JP3540504B2 - Substrate transfer device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a substrate transfer device used in a P-CVD device or the like.
[0002]
[Prior art]
FIG. 5 shows a synchronous substrate transfer apparatus for a conventional P-CVD apparatus. Gate valves 2a and 2b for compartments are provided so that chambers a to c are arranged in the vacuum vessel 1 in the longitudinal direction. A pinion 7 is disposed in the lower part of the vacuum vessel 1 in the longitudinal direction, and its axis is exposed through a magnetic seal 10 to the outside. In the vacuum vessel 1, there is arranged a substrate carrier 13 having a rack on the side that meshes with the pinion 7.
[0003]
The shafts outside each pinion 7 are connected in a row by a timing belt 09. One external shaft of the pinion 7 is connected to the motor 04. In the figure, reference numeral 05 denotes a motor driving device.
[0004]
In the above, the motor 04 is driven by the motor driving device 05 in a predetermined pattern according to the processing steps. Then, the substrate transport cart 13 moves to and stops in each chamber via the pinion 7 and the rack 8 according to the process.
[0005]
[Problems to be solved by the invention]
The above conventional apparatus has the following problems.
(A) Since it is a mechanical stop adjusting device, it is difficult to determine the stop position with high accuracy.
(B) A space for passing the timing belt is required, and a shift due to damage to the belt occurs in a long-time continuous operation.
(C) Further, the timing belt is easily worn out, and there is a concern about the reliability of long-term use.
[0006]
[Means for Solving the Problems]
The present invention takes the following measures to solve the above-mentioned problems.
(1) A vacuum container whose both ends and the inside are partitioned by gate means so as to have a plurality of chambers along the length, and a substrate transport trolley which is arranged movably in the longitudinal direction inside and outside the vacuum container and has a rack on a side surface. A stepping motor driven pinion provided in a plurality of longitudinal directions inside and outside the vacuum vessel, at least one of which is arranged to mesh with the rack; and synchronous driving means for synchronously driving at least two of the pinions. Is provided.
[0007]
In the above, when the synchronous driving means operates in a predetermined pattern, the stepping motor connected to the synchronous driving means rotates synchronously and the pinion rotates. Therefore, the rack meshed with the pinion, that is, the substrate transport trolley moves and stops in a predetermined pattern.
[0008]
In this way, the movement, stop, and positioning of the substrate transport cart corresponding to the process can be performed accurately.
(2) In the substrate transfer apparatus according to the above (1), the interior of the vacuum vessel is divided into three chambers, and pinions are arranged in front and rear of each chamber, and pinions are arranged in front of the front chamber and behind the rear chamber. And two synchronous driving means are provided, one for driving each front pinion from the front of the central chamber and the other for driving each rear pinion from the rear of the central chamber, and Two trolleys are also provided.
[0009]
In the above, when the front synchronous drive means operates in a predetermined pattern, the front pinion connected to the synchronous drive means rotates. Therefore, the engaged front rack, that is, the front substrate transport trolley moves and stops in a predetermined pattern. In this way, the movement, stop, and positioning of the substrate transfer cart corresponding to the process can be performed accurately from the center chamber to the front. The same applies to the rear part.
(3) In the substrate transfer apparatus of the above (2), a substrate transfer means is provided in a central chamber of the vacuum vessel.
[0010]
In the above, each synchronous drive means operates in a predetermined pattern. For example, the front synchronous driving means operates to move and stop the substrate transfer cart in a predetermined pattern from outside to the front chamber, then to the center chamber, and again to the outside from the front chamber.
[0011]
On the other hand, the rear synchronous drive means operates to move and stop in a predetermined pattern from the outside to the rear chamber, then to the center chamber, and again to the outside from the rear chamber, with a predetermined time delay from the above. That is, after the processing step in the central chamber, the substrate is transferred from the front substrate transport vehicle to the rear substrate transport vehicle by the transshipment means and operates in a pattern such that the substrate is unloaded.
[0012]
In this way, the movement, stop, and positioning of each substrate carrier are accurately performed in accordance with the process.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
(1) A first embodiment of the present invention will be described with reference to FIG. The parts described in the conventional example are assigned the same reference numerals, and the description thereof will be omitted, and the parts related to the present invention will be mainly described.
[0014]
A stepping motor 4 is connected to a shaft outside each pinion 7. The output of the motor driving device 5 is connected to each stepping motor 4. Further, an output of a pulse oscillator 6 is connected to each motor driving device 5.
[0015]
Here, the pulse oscillator 6 and the motor driving device 5 are synchronous driving means.
[0016]
In the above, the pulse oscillator 6 transmits a pulse having a pattern according to the process. Each motor driving device 5 receives this signal and drives each stepping motor 4.
[0017]
Therefore, the stepping motor 5 rotates synchronously and the pinion 7 rotates. The rack 8 meshed with the pinion 7, that is, the substrate carrier 13 moves and stops in a predetermined pattern. Since each pinion 7 rotates synchronously, it can smoothly mesh with the approaching rack 8.
[0018]
In this way, the movement, stop, and positioning of the substrate transport cart 13 corresponding to the process can be performed accurately. The stop position can be adjusted at the step width level of the stepping motor 5.
(2) A second embodiment of the present invention will be described with reference to FIGS. The inside of the vacuum vessel 1 is divided by gate valves 2a to 2d so as to become a load lock chamber a, a film formation chamber b, and an unload chamber c.
[0019]
Pinions 7a and 7b are arranged in front of the load lock chamber a and behind the unload chamber c, respectively. Also, two units are arranged in each of the chambers a to c. Here, 7a is a pinion in front of the front pinion of the center chamber b, and 7b is a rear pinion from the rear pinion.
[0020]
The output of the pulse transmitter 6a is sent to the stepping motor 4a via the respective motor driving devices 5a. The output of the pulse transmitter 6b is sent to the stepping motor 4b via the respective motor driving devices 5b.
[0021]
Further, substrate transport carts 13a and 13b are arranged at the front and rear, respectively. Further, in the central film forming chamber, there is a film forming apparatus having a substrate transfer means (not shown).
[0022]
In the above, each of the pulse transmitters 6a and 6b operates in a predetermined pattern corresponding to the process. The front pulse transmitter 6a operates so as to move and stop the substrate transport carriage 13a from the outside in a predetermined pattern from the front chamber a, then the center chamber b, and again from the front chamber a to the outside. I do.
[0023]
The same is true for the rear.
[0024]
In this way, the movement, stop, and positioning of each substrate carrier are accurately performed in accordance with the process.
[0025]
Hereinafter, an example of one processing step will be specifically described.
[0026]
FIG. 3A shows a state in which the transfer carriage 12a on which the glass substrate 11 is placed in the load lock chamber a is stopped and a vacuum is being applied, and the gate valve 2a and the gate valve 2b are closed. In the unload chamber c, the carrier 13b on which the glass substrate 11 on which the film is formed is placed is stopped, and the vacuum is being broken, and the gate valve 2d is being opened.
[0027]
3 (b) and 3 (c), when the load lock chamber a is evacuated, the gate valve 2b is opened, the carrier 12a is put into the film forming chamber b, the glass substrate 11 is transferred to the film forming apparatus, and the loading is performed. Return to lock room a. On the other hand, when the pressure in the unloader chamber c becomes normal pressure, the carrier 13b moves to the unloader side, lowers the glass substrate 11 on which the film was formed in the previous process, and returns to the unload chamber b in an empty state. In the film forming chamber a, the gate valve 2b is closed, and a film is being formed on the glass substrate 11.
[0028]
In FIG. 3D, when the vacuum in the load lock chamber a is broken, the transport trolley 12a comes out to the loader side and the new glass substrate 11 is placed thereon. On the other hand, as for the glass substrate 11 on which the film is formed in the film forming chamber b, the carrier 13b waiting in the unloading chamber c moves and mounts the glass substrate 11. Thereafter, the state is as shown in FIG. 3 (a), and by repeating this in sequence, the glass substrate 11 enters the loader, the load lock chamber, and further into the film formation chamber, and after film formation, passes through the unload chamber to the unloader side. It can move and stop accurately.
[0029]
In the above description, the pinions 4a and 4b are arranged on one side, but as shown in FIG. 4, the front pinion 4a may be arranged on one side and the rear pinion 4b may be arranged on the other side.
[0030]
【The invention's effect】
As described above, according to the present invention, since the respective stepping motors are synchronously driven and stopped in a predetermined pattern by the synchronous driving means, the substrate transport cart is accurately moved and stopped. In addition, since the pinion is driven by a stepping motor, the service life can be extended and the reliability can be improved.
[Brief description of the drawings]
FIG. 1 is a partial sectional view of a configuration according to a first embodiment of the present invention.
FIG. 2 is a partial cross-sectional view of a configuration according to a second embodiment of the present invention.
FIG. 3 is an operation explanatory view of the second embodiment.
FIG. 4 is an explanatory diagram of the second embodiment.
FIG. 5 is a partial cross-sectional view of a conventional example.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Vacuum container 2a-2d Gate valve 4,4a, 4b Stepping motor 5,5a, 5b Motor drive device 6,6a, 6b Pulse oscillator 7,7a, 7b Pinion 8 Rack 10 Magnetic seal 11 Glass substrate 13,13a, 13b Substrate Transport trolley

Claims (3)

A vacuum container having both ends and an interior partitioned by a gate means so as to have a plurality of chambers along the length, a substrate transfer cart arranged on a side surface movably disposed inside and outside the vacuum container in a longitudinal direction, and the vacuum A stepping motor driven pinion which is provided in plural numbers in the inside and outside of the container and at least one of which is arranged so as to mesh with the rack; and synchronous driving means for synchronously driving at least two of the pinions. A substrate transfer device, comprising: 2. The substrate transfer apparatus according to claim 1, wherein the inside of the vacuum vessel is divided into three chambers, and pinions are arranged in front and rear of each chamber, and pinions are arranged in front of the front chamber and behind the rear chamber, and are synchronously driven. Two means are provided, one for driving each pinion from the front of the central chamber to the front, and the other for driving each pinion from the rear of the central chamber to the rear, and a substrate transfer cart is also supported. A substrate transfer device, wherein two are provided. 3. The substrate transfer device according to claim 2, wherein a substrate transfer means is provided in a central chamber of the vacuum vessel.

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