JP3533595B2 - Method for manufacturing ultra-thin heat-resistant resin film - Google Patents

Method for manufacturing ultra-thin heat-resistant resin film

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Publication number
JP3533595B2
JP3533595B2 JP16154799A JP16154799A JP3533595B2 JP 3533595 B2 JP3533595 B2 JP 3533595B2 JP 16154799 A JP16154799 A JP 16154799A JP 16154799 A JP16154799 A JP 16154799A JP 3533595 B2 JP3533595 B2 JP 3533595B2
Authority
JP
Japan
Prior art keywords
heat
thin film
film layer
resistant resin
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16154799A
Other languages
Japanese (ja)
Other versions
JP2000309026A (en
Inventor
潤 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Material Design Co., LTD
Original Assignee
Material Design Co., LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Material Design Co., LTD filed Critical Material Design Co., LTD
Priority to JP16154799A priority Critical patent/JP3533595B2/en
Publication of JP2000309026A publication Critical patent/JP2000309026A/en
Application granted granted Critical
Publication of JP3533595B2 publication Critical patent/JP3533595B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Moulds For Moulding Plastics Or The Like (AREA)
  • Moulding By Coating Moulds (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】最近の電子機器やその周辺機
器の小型化や高密度化に対応して、その部品等に使用さ
れる極めて薄い耐熱樹脂薄膜等のフィルムが要求されて
いる。本発明は、このような要求に対応する極めて薄い
フィルム、及び、その製造を可能にする新しいフィルム
の製造方法に関するものである。
BACKGROUND OF THE INVENTION In response to recent miniaturization and higher density of electronic equipment and peripheral equipment, extremely thin films such as heat-resistant resin thin films used for parts thereof are required. The present invention relates to an extremely thin film that meets such a demand, and a new film manufacturing method that enables its manufacture.

【0002】[0002]

【従来の技術】従来、フィルムは種々の方法で製造され
てきた。その一つのカレンダー法は、数対のロールで、
可塑状態の樹脂等をフィルムに成形する方法で、ゴム工
業等で広く行われているが、薄いフィルムの場合は、ロ
ールにくっついたり切断したりし易くなるので、使用す
ることができない。T型ダイス法は、ダイスからフィル
ム状に、溶融した樹脂を押し出して、直ちに冷却ロール
又は冷水で冷却する方法で、ポリプロピレン等の結晶性
ポリマーの場合には、透明性のよいものを得ることがで
きる。インフレーション法は、溶融した樹脂を円筒状に
押し出すと同時に空気を吹き込み、ふくらませて薄いフ
ィルムに加工する方法で、ポリエチレン袋を作るために
多用されている。溶液流延法は、樹脂溶液を、ベルト上
に流延し、ベルト上で移動中に溶媒を蒸発除去して、フ
ィルムを得る方法で、均一な薄いフィルムを得ることが
できる。湿式キャスト法は、樹脂溶液を、ダイからフィ
ルム状に凝固浴中に押し出して、フィルムを得る方法
で、セロハン等に使用されている。また、T型ダイス法
等で製造されたポリエステルフィルムやポリスチレンフ
ィルムは、引張強度等を高めるため、ガラス転移点以上
の温度で二軸延伸されるが、この二軸延伸によって、厚
さを薄くすることもできる。
2. Description of the Related Art Conventionally, films have been manufactured by various methods. One such calendar method is several pairs of rolls,
A method of molding a resin or the like in a plastic state into a film is widely used in the rubber industry and the like, but a thin film cannot be used because it easily sticks to a roll or is cut. The T-type die method is a method of extruding a molten resin in a film form from a die and immediately cooling it with a chill roll or cold water. In the case of a crystalline polymer such as polypropylene, it is possible to obtain a material having good transparency. it can. The inflation method is a method of extruding a molten resin into a cylindrical shape and at the same time blowing air into the resin to inflate it and process it into a thin film, which is often used for making a polyethylene bag. The solution casting method is a method of casting a resin solution on a belt and evaporating and removing a solvent while moving on the belt to obtain a film, and a uniform thin film can be obtained. The wet casting method is a method in which a resin solution is extruded in a film form from a die into a coagulation bath to obtain a film, which is used for cellophane and the like. A polyester film or polystyrene film produced by the T-die method or the like is biaxially stretched at a temperature equal to or higher than the glass transition point in order to increase tensile strength and the like, and the thickness is thinned by this biaxial stretching. You can also

【0003】[0003]

【発明が解決しようとする課題】前述のように、薄いフ
ィルムは、カレンダー法では、ロールにくっついたり切
断したりし易くなり、T型ダイス法では、冷却ロールか
ら剥離する時や冷水を当てる時に切断し易くなる。ま
た、溶液流延法では、ベルトから剥離する時に切断し易
くなり、湿式キャスト法では、凝固浴から引き上げる時
に切断し易くなる。インフレーション法や二軸延伸で
は、原理的には非常に薄いフィルムまで製造することが
可能ではあるが、空気圧や延伸速度等を微調節すること
が困難なため、厚さ5μm以下のフィルムは製造されて
いない。本発明が解決しようとする第1の課題は、最近
の電子機器やその周辺機器の小型化や高密度化に対応し
て、これまで存在していなかった極めて薄いフィルム、
特に耐熱樹脂等の非延伸性樹脂の極めて薄いフィルムを
提供することである。また、第2の課題は、このような
極めて薄いフィルムの製造を可能にし、また、それなり
の厚さを有するフィルムの製造にも適用できる新しいフ
ィルムの製造方法を提供することである。
As described above, in the calendering method, a thin film easily sticks to the roll or is cut, and in the T-type die method, when peeling from a cooling roll or applying cold water. Easy to cut. Further, the solution casting method facilitates cutting when peeled from the belt, and the wet casting method facilitates cutting when pulled up from the coagulation bath. By the inflation method and biaxial stretching, it is possible in principle to produce a very thin film, but since it is difficult to finely adjust the air pressure and the stretching speed, a film with a thickness of 5 μm or less is produced. Not not. The first problem to be solved by the present invention is to cope with the recent trend toward miniaturization and high density of electronic devices and their peripheral devices, which is an extremely thin film which has not existed until now.
In particular, it is to provide an extremely thin film of a non-stretchable resin such as a heat resistant resin. A second object is to provide a new film manufacturing method that enables the manufacture of such an extremely thin film and is applicable to the manufacture of a film having a certain thickness.

【0004】[0004]

【課題を解決するための手段】本発明者は、前述の課題
を解決するため、厚さ0.1〜2mmのアルミニウムの
薄板からなる支持体を、片面に耐熱性樹脂薄膜層を形成
させる範囲を残してマスキングし、マスキングしてない
面の表面に、ポリアミドカルボン酸のジメチルアセトア
ミド溶液を塗布し、マスキングテープを除去した後、約
200℃に加熱してジメチルアセトアミドを気化除去し
重合反応を促進してポリイミドの薄膜層を形成させ、そ
の薄膜層の周縁部に沿って枠状の固定具を接着させた
後、アルミニウムの薄板からなる支持体を水酸化ナトリ
ウム水溶液で溶解除去することを特徴とする固定具に保
持された厚さ1〜2μmの極薄耐熱性樹脂フィルムの製
造方法(以下「第1発明」という)、及び、厚さ0.1
〜2mmのアルミニウムの薄板からなる支持体を、片面
に耐熱性樹脂薄膜層を形成させる範囲を残してマスキン
グし、マスキングしてない面の表面に、耐熱性フッ素樹
脂溶液を塗布し、マスキングテープを除去した後、約3
50℃に加熱して溶媒を気化除去し耐熱性フッ素樹脂を
溶融させて薄膜層を形成させ、その薄膜層の周縁部に沿
って枠状の固定具を接着させた後、アルミニウムの薄板
からなる支持体を水酸化ナトリウム水溶液で溶解除去す
ることを特徴とする固定具に保持された厚さ1〜2μm
の極薄耐熱性樹脂フィルムの製造方法(以下「第2発
明」という)を提案する。
Means for Solving the Problems In order to solve the above-mentioned problems, the present inventor has a support made of a thin aluminum plate having a thickness of 0.1 to 2 mm in a range where a heat resistant resin thin film layer is formed on one side. Masking, leaving the surface uncoated, apply a solution of polyamidecarboxylic acid in dimethylacetamide, remove the masking tape, and heat to about 200 ° C to vaporize and remove dimethylacetamide to accelerate the polymerization reaction. Then, a thin film layer of polyimide is formed, and after a frame-shaped fixture is adhered along the peripheral edge of the thin film layer, the support made of a thin aluminum plate is dissolved and removed with an aqueous sodium hydroxide solution. And a method for producing an ultrathin heat-resistant resin film having a thickness of 1 to 2 μm (hereinafter, referred to as “first invention”), and a thickness of 0.1
A support made of a thin aluminum plate of ~ 2 mm is masked while leaving a range for forming a heat-resistant resin thin film layer on one side, and a heat-resistant fluororesin solution is applied to the surface of the unmasked surface, and a masking tape is applied. After removing, about 3
After heating to 50 ° C to evaporate and remove the solvent and melt the heat-resistant fluororesin to form a thin film layer, a frame-shaped fixture is adhered along the periphery of the thin film layer, and then a thin aluminum plate is used. 1 to 2 μm in thickness held by a fixture characterized by dissolving and removing the support with an aqueous solution of sodium hydroxide
The method for producing the ultrathin heat-resistant resin film (hereinafter referred to as "second invention") is proposed.

【0005】第1発明及び第2発明で使用される支持体
には、その表面に極薄耐熱性樹脂薄膜層が形成された状
態で、酸やアルカリで処理したとき、容易に反応して溶
解除去できる材料で作られていることが必要になる。一
般に、反応し易い無機材料として、食塩等の水に可溶な
塩類や酸に容易に反応して溶解する炭酸カルシウム等の
炭酸塩をあげることができる。しかしながら、通常の方
法では、表面が平滑で機械的強度のある支持体を定常的
に製造することは困難である。このような観点から、支
持体の材料として、安価でイオン化傾向の高く酸に容易
に溶解する亜鉛、鉄、銅等の金属や、酸にもアルカリに
も溶解する亜鉛、アルミニウム、錫、鉛、アンチモン、
ビスマス等の両性金属があげられる。その中でも、アル
ミニウムは、容易に0.1〜2mmの厚さの薄板とする
ことができ、また、容易に水酸化ナトリウム水溶液に溶
解できるので、支持体の材料として最も適している。
The support used in the first and second aspects of the invention has an ultrathin heat-resistant resin thin film layer formed on its surface, and when treated with an acid or an alkali, it easily reacts and dissolves. It must be made of a removable material. In general, examples of the inorganic material that easily reacts include salts soluble in water such as salt and carbonates such as calcium carbonate that easily react and dissolve in an acid. However, it is difficult to constantly produce a support having a smooth surface and mechanical strength by a usual method. From such a viewpoint, as the material of the support, metals such as zinc, iron, and copper that are inexpensive and have a high ionization tendency and are easily dissolved in an acid, or zinc, aluminum, tin, lead, which is soluble in both an acid and an alkali, Antimony,
Examples include amphoteric metals such as bismuth. Among them, aluminum is the most suitable as the material of the support because it can be easily formed into a thin plate having a thickness of 0.1 to 2 mm and can be easily dissolved in an aqueous sodium hydroxide solution.

【0006】第1発明及び第2発明において、片面に耐
熱性樹脂薄膜層を形成させる範囲を残してマスキングす
ることによって、あらかじめ所定の大きさの極薄フィル
ムを製造することができ、極薄フィルムを適宜の大きさ
に切断する等の取扱の煩雑さと、その取扱の際にフィル
ム内に歪みが発生するのを避けることができる。そし
て、このマスキングに使用されたマスキングテープは薄
膜層の耐熱樹脂が硬化する前に取り除かれる。従って、
不必要な場所や予期せぬところに耐熱性樹脂が付着硬化
して種々のトラブルが発生するのを予防することができ
る。
In the first and second aspects of the invention, by masking while leaving a range for forming the heat-resistant resin thin film layer on one surface, an ultrathin film of a predetermined size can be manufactured in advance, and the ultrathin film can be produced. It is possible to avoid the complexity of handling such as cutting into a proper size and the occurrence of distortion in the film during the handling. Then, the masking tape used for this masking is removed before the heat-resistant resin of the thin film layer is cured. Therefore,
It is possible to prevent various troubles from occurring due to the heat resistant resin being adhered and cured at unnecessary places or unexpected places.

【0007】第1発明では、耐熱性樹脂薄膜層は、耐熱
性樹脂のポリイミドの前駆体であるポリアミドカルボン
酸のジメチルアセトアミド溶液を塗布し、マスキングテ
ープを除去した後、約200℃に加熱して溶媒であるジ
メチルアセトアミドを気化除去し重合反応を起こさせて
ポリイミドとすることによって形成される。
In the first invention, the heat-resistant resin thin film layer is formed by applying a dimethylacetamide solution of polyamidecarboxylic acid, which is a polyimide precursor of the heat-resistant resin, removing the masking tape, and then heating to about 200.degree. It is formed by vaporizing and removing dimethylacetamide which is a solvent and causing a polymerization reaction to form a polyimide.

【0008】第2発明では、耐熱性樹脂薄膜層は、耐熱
性フッ素樹脂溶液を塗布し、マスキングテープを除去し
た後、約350℃に加熱して溶媒を気化除去し耐熱性フ
ッ素樹脂を溶融させることによって形成させている。な
お、第2発明で使用する耐熱性フッ素樹脂の中では、パ
ーフルオロアルコキシ樹脂が最も好ましい。
In the second invention, the heat-resistant resin thin film layer is formed by applying a heat-resistant fluororesin solution, removing the masking tape, and then heating at about 350 ° C. to vaporize and remove the solvent to melt the heat-resistant fluororesin. It is formed by Among the heat resistant fluororesins used in the second invention, the perfluoroalkoxy resin is most preferred.

【0009】第1発明及び第2発明において、薄膜層形
成後、その薄膜層の周縁部に沿って枠状の固定具を接着
させてから、支持体のアルミニウム薄板を水酸化ナトリ
ウム水溶液により溶解除去することによって、その処理
の際に極薄フィルムに亀裂や歪みが生じるのを防止し、
更に、得られた厚さ2μmの極薄耐熱性樹脂フィルムを
固定具に保持したまま出荷することよって、極薄フィル
ムの輸送中の損傷や受入れ先の取扱の際の損傷を防止す
ることができる。
In the first and second aspects of the invention, after forming the thin film layer, a frame-shaped fixture is adhered along the peripheral edge of the thin film layer, and then the aluminum thin plate of the support is dissolved and removed with an aqueous sodium hydroxide solution. By preventing the occurrence of cracks and distortions in the ultra-thin film during the process,
Furthermore, by shipping the obtained ultra-thin heat-resistant resin film having a thickness of 2 μm while holding it in the fixture, it is possible to prevent damage during transportation of the ultra-thin film and damage during handling of the recipient. .

【0010】[0010]

〔実施例1〕[Example 1]

(1)支持体の調製 支持体として、厚さが0.1mm、大きさが110×1
10mmで、表面が光沢面のアルミニウム板(JIS
H4000 AlN30H−H18)を使用した。その
片面をマスキングテープ(日東電工(株)製「エレップ
マスキングテープ N−380」)貼り、他方の面をフ
ィルム層生成面とした。
(1) Preparation of support As a support, the thickness is 0.1 mm and the size is 110 × 1.
Aluminum plate with 10 mm and glossy surface (JIS
H4000 AlN30H-H18) was used. A masking tape (“ELEP Masking Tape N-380” manufactured by Nitto Denko Corporation) was attached to one surface of the film, and the other surface was used as a film layer forming surface.

【0011】(2)ポリイミドフィルム層の生成 前述の支持体のフィルム層生成面に、ジメチルアセトア
ミド中で予備的に縮合させて得られた中間体のポリアミ
ドカルボン酸のジメチルアセトアミド溶液を薄く塗布し
て、マスキングテープを除去し、200℃に加熱乾燥
し、厚さ2μmのポリイミドフィルム層を生成させた。
(2) Formation of Polyimide Film Layer A thin film of a dimethylacetamide solution of an intermediate polyamidecarboxylic acid obtained by precondensation in dimethylacetamide was thinly applied to the film layer formation surface of the above-mentioned support. The masking tape was removed, and the film was heated and dried at 200 ° C. to form a polyimide film layer having a thickness of 2 μm.

【0012】(3)フィルムの固定 厚さが1mm、外形が20×20mmで、外周に2mm
の縁を残して、中央部に16×16mmの窓のような孔
が設けられたニッケル鍍金した黄銅製の枠状固定具の下
面に、エポキシ系熱硬化型接着を塗布して、支持体上に
生成したフィルム層に加圧接着して、120℃で1時間
加熱し固着させ、枠状固定具の外周に沿って支持体を切
断して、半製品とした。なお、枠状固定具には、酸やア
ルカリに耐性のあるステンレス製のものも使用される。
また、その大きさも、市場がどのような広さのフィルム
を要求しているかによって定められる。一般に、必要以
上にフィルムを広くすると、運搬や取扱中の不注意によ
って破損による被害が大きくなる。
(3) The fixed thickness of the film is 1 mm, the outer shape is 20 × 20 mm, and the outer circumference is 2 mm.
Epoxy thermosetting adhesive is applied to the lower surface of a nickel-plated brass frame-shaped fixture with a 16 x 16 mm window-like hole in the center, leaving the edges of It was pressure-bonded to the film layer produced in 1 above, heated at 120 ° C. for 1 hour to be fixed, and the support was cut along the outer periphery of the frame-shaped fixture to obtain a semi-finished product. In addition, as the frame-shaped fixing tool, one made of stainless steel resistant to acid and alkali is also used.
The size is also determined by the size of the film demanded by the market. Generally, if the film is made wider than necessary, damage due to damage due to carelessness during transportation and handling will increase.

【0013】(4)支持体の除去 前述の半製品を、50℃に加熱した33重量%水酸化ナ
トリウム水溶液に30分間浸漬して、アルミニウム製の
支持体を除去し、水洗して枠状固定具に保持された厚さ
2μmのポリイミドフィルムを得た。なお、得られたポ
リイミドフィルムの厚さの測定には、アンリツ(株)製
電子マイクロメーター(K103A)の高精度タイプ
(繰り返し精度 0.01μm)を使用した。
(4) Removal of support The above-mentioned semi-finished product is immersed in a 33 wt% sodium hydroxide aqueous solution heated at 50 ° C. for 30 minutes to remove the support made of aluminum, and washed with water to fix it in a frame shape. A 2 μm-thick polyimide film held by the tool was obtained. For the measurement of the thickness of the obtained polyimide film, a high precision type (repetition precision 0.01 μm) of an electronic micrometer (K103A) manufactured by Anritsu Corporation was used.

【0014】〔実施例2〕実施例1と同様にして、支持
体の片面に厚さ2μmのポリイミドフィルム層を生成さ
せたものを、15×20mmの大きさに切断し、厚さ2
mm、30×40mmのアクリル板固定具の上面の中央
に、ポリイミドフィルム層をアクリル板固定具の方に向
けて載せ、マスキングテープで固定し、マスキングテー
プの中央部を切り取り7×10mmの窓を開け、半製品
とし、実施例1と同様にして、アクリル板固定具とマス
キングテープで保持された厚さ2μmのポリイミドフィ
ルムを得た。なお、アクリル板固定具に固定するため、
支持体上に生成したポリイミドフィルムを、支持体とと
もに切り取る広さは、市場がどのような広さのフィルム
を要求しているかによって定められる。また、支持体の
溶解除去の際には、マスキングテープで覆われた部分の
窓に近いところは溶解除去されるが、全部が溶解除去さ
れないようにしている。
Example 2 In the same manner as in Example 1, a support having a polyimide film layer having a thickness of 2 μm formed on one surface was cut into a size of 15 × 20 mm to obtain a thickness of 2
mm, 30 × 40 mm, place the polyimide film layer on the center of the upper surface of the acrylic plate fixture toward the acrylic plate fixture, fix with masking tape, cut out the central part of the masking tape, and make a 7 × 10 mm window. A semi-finished product was opened, and a polyimide film having a thickness of 2 μm held by an acrylic plate fixture and a masking tape was obtained in the same manner as in Example 1. In addition, because it is fixed to the acrylic plate fixture,
The size of the polyimide film cut on the support along with the support is determined by how wide the market demands the film. Moreover, when the support is dissolved and removed, the portion of the portion covered with the masking tape near the window is dissolved and removed, but the entire portion is prevented from being dissolved and removed.

【0015】2 パーフルオロアルコキシ樹脂フィルム
の製造 〔実施例3〕実施例1と同様な支持体の片面に、プライ
マーレスでパーフルオロアルコキシ樹脂溶液(ダイキン
株式会社製「RD1」(仮称))を薄く塗布し、マスキ
ングテープを除去して、350℃に加熱して厚さ1μm
のパーフルオロアルコキシ樹脂の薄膜層を生成させ、実
施例2と同様にして、周辺部の薄膜層をアルミニウム薄
板と一緒にマスキングテープでアクリル板固定具に接着
され保持された厚さ1μmのパーフルオロアルコキシ樹
脂フィルムを得た。
2 Production of Perfluoroalkoxy Resin Film [Example 3] A primer-less perfluoroalkoxy resin solution (“RD1” (tentative name) manufactured by Daikin Co., Ltd.) was thinly applied on one surface of a support similar to that in Example 1. Apply, remove the masking tape, and heat to 350 ° C to a thickness of 1 μm.
A perfluoroalkoxy resin thin film layer having a thickness of 1 μm is adhered to an acrylic plate fixture with a masking tape together with an aluminum thin plate and is held in the same manner as in Example 2 to produce a perfluoroalkoxy resin thin film layer. An alkoxy resin film was obtained.

【0016】〔実施例4〕実施例3と同様にして、支持
体の片面に、プライマーレスでパーフルオロアルコキシ
樹脂溶液を薄く塗布し、マスキングテープを除去して、
350℃に加熱して厚さ2μmのパーフルオロアルコキ
シ樹脂の薄膜層を生成させ、実施例1と同様にして、枠
状固定具を接着し、支持体を溶解除去して、枠状固定具
に保持された厚さ2μmのパーフルオロアルコキシ樹脂
フィルムを得た。
Example 4 In the same manner as in Example 3, a primerless perfluoroalkoxy resin solution was thinly applied to one surface of the support, and the masking tape was removed.
By heating to 350 ° C. to form a thin film layer of perfluoroalkoxy resin having a thickness of 2 μm, the frame-shaped fixture was adhered, the support was dissolved and removed in the same manner as in Example 1, and the frame-shaped fixture was formed. A retained perfluoroalkoxy resin film having a thickness of 2 μm was obtained.

【0017】3 耐熱ポリウレタンフィルムの製造 〔参考例1〕実施例1と同様な支持体の片面に、耐熱ウ
レタン溶液(武田薬品工業株式会社製「タケラックE−
365)を薄く塗布して、マスキングテープを除去し、
50℃に加熱乾燥し、厚さ2μmの耐熱ポリウレタン樹
脂の薄膜層を形成させ、実施例1と同様に枠状固定具に
接着し、支持体を溶解除去して、固定具に保持された厚
さ2μmの耐熱ポリウレタンフィルムを得た。
3 Production of Heat-Resistant Polyurethane Film [Reference Example 1] A heat-resistant urethane solution (Takelac E-manufactured by Takeda Pharmaceutical Co., Ltd. was used on one side of a support similar to that used in Example 1.
365) thinly and remove the masking tape,
It is heated and dried at 50 ° C. to form a thin film layer of a heat-resistant polyurethane resin having a thickness of 2 μm, which is adhered to a frame-shaped fixture in the same manner as in Example 1, the support is dissolved and removed, and the thickness retained by the fixture is fixed. A heat resistant polyurethane film having a length of 2 μm was obtained.

【0018】〔参考例2〕参考例1と同様にして、支持
体の片面に厚さ2μmの耐熱ポリウレタン樹脂の薄膜層
を形成させ、実施例2と同様に処理して、マスキングテ
ープでアクリル板固定具に接着され保持された厚さ2μ
mの耐熱ポリウレタンフィルムを得た。
[Reference Example 2] In the same manner as in Reference Example 1, a thin film layer of a heat-resistant polyurethane resin having a thickness of 2 μm was formed on one surface of a support, treated in the same manner as in Example 2, and treated with a masking tape to obtain an acrylic plate. Thickness of 2μ glued to and held by fixture
A heat resistant polyurethane film of m was obtained.

【0019】[0019]

【発明の効果】本発明に係わる極薄耐熱性樹脂フィルム
の製造方法は、前述のような構成を有するので、市場の
電子関連機器の小型化、高密度化に対応できる極薄耐熱
性樹脂フィルムの提供を可能にするものであり、今後の
電子関連機器産業を活性化し、社会生活における通信の
利便性を更に高めるものである。
Since the method for producing an ultrathin heat-resistant resin film according to the present invention has the above-mentioned structure, the ultrathin heat-resistant resin film which can cope with the miniaturization and high density of the electronic-related equipment on the market. It will enable the future provision of electronic-related equipment industry and further enhance the convenience of communication in social life.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B29C 41/02 B29C 41/30 B29C 41/42 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) B29C 41/02 B29C 41/30 B29C 41/42

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】厚さ0.1〜2mmのアルミニウムの薄板
からなる支持体を、片面に耐熱性樹脂薄膜層を形成させ
る範囲を残してマスキングし、マスキングしてない面の
表面に、ポリアミドカルボン酸のジメチルアセトアミド
溶液を塗布し、マスキングテープを除去した後、約20
0℃に加熱してジメチルアセトアミドを気化除去し重合
反応を促進してポリイミドの薄膜層を形成させ、その薄
膜層の周縁部に沿って枠状の固定具を接着させた後、ア
ルミニウムの薄板からなる支持体を水酸化ナトリウム水
溶液で溶解除去することを特徴とする固定具に保持され
た厚さ1〜2μmの極薄耐熱性樹脂フィルムの製造方法
1. A support made of a thin aluminum plate having a thickness of 0.1 to 2 mm is masked except for a region where a heat-resistant resin thin film layer is formed on one surface, and a polyamide carvone is provided on the surface of the unmasked surface. After applying the dimethylacetamide solution of acid and removing the masking tape,
After heating to 0 ° C to vaporize and remove dimethylacetamide to accelerate the polymerization reaction to form a polyimide thin film layer, a frame-shaped fixture is adhered along the periphery of the thin film layer, and then a thin aluminum plate is removed. Method for producing an ultrathin heat-resistant resin film having a thickness of 1 to 2 μm, which is held by a fixture, which comprises dissolving and removing the supporting material with an aqueous sodium hydroxide solution.
【請求項2】厚さ0.1〜2mmのアルミニウムの薄板
からなる支持体を、片面に耐熱性樹脂薄膜層を形成させ
る範囲を残してマスキングし、マスキングしてない面の
表面に、耐熱性フッ素樹脂溶液を塗布し、マスキングテ
ープを除去した後、約350℃に加熱して溶媒を気化除
去し耐熱性フッ素樹脂を溶融させて薄膜層を形成させ、
その薄膜層の周縁部に沿って枠状の固定具を接着させた
後、アルミニウムの薄板からなる支持体を水酸化ナトリ
ウム水溶液で溶解除去することを特徴とする固定具に保
持された厚さ1〜2μmの極薄耐熱性樹脂フィルムの製
造方法
2. A support made of a thin aluminum plate having a thickness of 0.1 to 2 mm is masked except for the area where a heat-resistant resin thin film layer is formed on one surface, and the surface of the unmasked surface is heat-resistant. After applying the fluororesin solution and removing the masking tape, it is heated to about 350 ° C. to vaporize and remove the solvent and melt the heat-resistant fluororesin to form a thin film layer,
A frame-shaped fixture is adhered along the periphery of the thin film layer, and then the support made of a thin aluminum plate is dissolved and removed with an aqueous sodium hydroxide solution. Method for producing ultra-thin heat-resistant resin film of 2 μm
JP16154799A 1999-04-27 1999-04-27 Method for manufacturing ultra-thin heat-resistant resin film Expired - Fee Related JP3533595B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16154799A JP3533595B2 (en) 1999-04-27 1999-04-27 Method for manufacturing ultra-thin heat-resistant resin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16154799A JP3533595B2 (en) 1999-04-27 1999-04-27 Method for manufacturing ultra-thin heat-resistant resin film

Publications (2)

Publication Number Publication Date
JP2000309026A JP2000309026A (en) 2000-11-07
JP3533595B2 true JP3533595B2 (en) 2004-05-31

Family

ID=15737191

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Country Link
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4900032B2 (en) * 2007-05-15 2012-03-21 東洋紡績株式会社 Method for producing polyimide film
JP4900033B2 (en) * 2007-05-15 2012-03-21 東洋紡績株式会社 Method for producing polyimide film
JP5410894B2 (en) * 2009-09-11 2014-02-05 新日鉄住金化学株式会社 Method for producing polyimide film

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60370B2 (en) * 1978-02-07 1985-01-08 株式会社ニコン How to make a film for soft X-ray lithography
JPS56103227A (en) * 1980-01-21 1981-08-18 Kanegafuchi Chem Ind Co Ltd Preparation of heat-resistant film
JPH0776024A (en) * 1993-09-08 1995-03-20 Sumitomo Metal Mining Co Ltd Manufacture of polyimide resin film
JPH0780865A (en) * 1993-09-10 1995-03-28 Tosoh Corp Stripping method of thin optical resin film and frame for stripping
US5529740A (en) * 1994-09-16 1996-06-25 Jester; Randy D. Process for treating liquid crystal polymer film
JPH10138265A (en) * 1996-11-06 1998-05-26 Kyodo Printing Co Ltd Production of decorative panel

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