JP3521706B2 - Ink jet recording head and method of manufacturing the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head which heats a liquid by heat generated by a heating element and ejects the liquid by pressure generated during growth of bubbles generated in the liquid for recording.

[0002]

2. Description of the Related Art Generally, in an ink jet recording head,
A heating element for heating the liquid is formed on the substrate,
It is configured by joining with a nozzle plate having a liquid ejection port for ejecting liquid corresponding to the heating element. In such an ink jet recording head, it is necessary to receive liquid supply from the outside and fill each heating element with liquid. Particularly in a so-called roof shooter type ink jet recording head in which a liquid ejection port is arranged directly above a heating element, it is necessary to shorten the distance between the heating element and the recording medium, and therefore the structure of the substrate on the heating element is restricted. , It is difficult to supply liquid.

For example, as disclosed in Japanese Patent Laid-Open No. 6-238904, a structure has been proposed in which a hole is formed in a substrate by an etching method and ink is supplied through the hole. The method described in this document uses etching that takes a very long time to make a hole in the substrate, and further, the etching process is performed twice from the front side and the back side. It takes. Further, since the substrate is handled in the state where the groove for forming the hole is dug, the substrate is easily damaged.

As another ink jet recording head, for example, as described in Japanese Patent Application Laid-Open No. 6-8434, a structure in which ink is supplied from the end surface of the substrate has been proposed, which is improved in terms of performance and productivity. Was added.
However, in this structure, ink can be supplied only from the opposite end surfaces of the substrate. Therefore, when handling a large number of inks, such as when realizing full color, it is difficult to realize with one substrate, and it is necessary to arrange a plurality of substrates. When arranging a plurality of substrates in this way, there has been a problem such as positional deviation.

Further, for example, Japanese Utility Model Publication No. 3-10046 discloses that ink is supplied from a groove formed in a substrate, which helps prevent damage to the substrate during processing. In this case, the ink is supplied from the end of the groove, but there is a problem that the ink supply becomes insufficient especially when the groove becomes long.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and can easily form a liquid supply path, can be efficiently manufactured, and can be used with various liquids. It is an object of the present invention to provide an inkjet recording head and a manufacturing method thereof.

[0007]

According to the present invention, there is provided a substrate on which a heating element for heating a liquid is formed, and a nozzle having a groove serving as a liquid flow path and a liquid discharge port corresponding to the heating element. An ink jet recording head comprising a plate joined to a front surface side of the substrate, wherein a plurality of the heating elements are formed in one row on the front surface side of the substrate and the row of the heating elements is formed. The first that functions as a common liquid chamber shared by
Grooves are formed so as not to penetrate in the depth direction of the substrate in parallel with the rows of the heating elements, and on the back surface side which is the surface opposite to the surface on which the heating elements of the substrate are formed, A second groove that is substantially orthogonal to the first groove is formed, the first groove and the second groove communicate with each other at an intersecting portion, and from the second groove to the first groove. The liquid supplied to the groove is supplied to the liquid discharge port from the first groove through the liquid flow path on the front surface side of the substrate. Further, the present invention provides a substrate on which a heating element for heating a liquid is formed, and a nozzle plate on which a groove serving as a liquid channel corresponding to the heating element and a liquid ejection port are formed on the front surface side of the substrate. An ink jet recording head joined to a plurality of heating elements, wherein a plurality of the heating elements are formed in two rows in a substantially row shape on the front surface side of the substrate, and the common liquid chamber is shared by the rows of the heating elements. A first groove that functions as a groove is formed parallel to the middle of the two rows of the heating element so as not to penetrate in the depth direction of the substrate, and is opposite to the surface of the substrate on which the heating element is formed. On the back side, which is the surface,
A second groove is formed which is substantially orthogonal to the first groove,
The first groove and the second groove communicate with each other at an intersecting portion, and the liquid supplied from the second groove to the first groove is on the front surface side of the substrate on the first side. The liquid is supplied from the groove through the liquid flow path to the liquid discharge port.

Further, in the invention, in the manufacturing method for manufacturing the ink jet recording head, the row of the heating elements is formed on the substrate, and the first groove is formed on the front surface side of the substrate, The second groove is formed on the back surface side of the substrate, and the first groove and the second groove are communicated with each other at a portion that intersects with the first groove when the second groove is formed, The invention is characterized in that a nozzle plate, in which a groove serving as a liquid flow path and a liquid discharge port are formed corresponding to the substrate and the heating element, is bonded to the front surface side of the substrate.

[0009]

1 is a perspective sectional view showing a first embodiment of an ink jet recording head of the present invention, FIG.
3 is a perspective view of an example of a substrate, and FIG. 3 is a plan view of an example of a substrate. In the figure, 1 is a substrate, 2 is a heating element array,
Reference numeral 3 is a first groove, 4 is a nozzle plate, 5 is a liquid ejection port, 6 is a droplet, 7 is a second groove, and 8 is an edge portion.

A plurality of heating elements are formed on the substrate 1. The heating elements may be linearly arranged, or may be arranged in a zigzag manner to form the heating element row 2 by being arranged substantially in various rows. In FIGS. 1 to 3, the heating element rows 2 are arranged in two rows. 2 and 3
For convenience of illustration, the individual heating elements are not shown, but the heating element row 2 is shown by a bar line. Between the two rows of heating elements 2,
The first groove 3 is formed. The first groove 3 functions as a common liquid chamber shared by the two rows of heating elements 2. A second groove 7 is formed on the surface of the substrate 1 opposite to the surface on which the heating element array 2 is formed (hereinafter referred to as the back surface). The second groove 7 communicates at a portion intersecting with the first groove 3,
A through hole is formed to penetrate the substrate 1.

On the other hand, liquid discharge ports 5 are formed in the nozzle plate 4 corresponding to the individual heating elements formed on the substrate 1, and each liquid discharge port 5 and the first groove 3 which is a common liquid chamber. Grooves are formed to serve as individual flow paths that communicate with each other. Then, the substrate 1 and the nozzle plate 4 described above are joined together to form an inkjet recording head as shown in FIG.

Liquid supplied from a tank or the like (not shown) is introduced into the ink jet recording head from the back surface of the substrate 1. The liquid flows into the first groove 3 through the through hole formed at the intersection of the second groove 7 and the first groove 3,
It is supplied onto each heating element of the heating element array 2 through the individual flow path formed in the nozzle plate 4.

A current-carrying electrode (not shown) is connected to each heating element, and a driving pulse is applied from the outside according to an image signal to heat the heating element. By the heat generated by the heating element,
The liquid supplied onto the heating element is heated, and bubbles are generated in the liquid to grow. The liquid on the heating element is pushed out from the liquid ejection port 5 by the pressure when the bubbles grow, and is ejected as the liquid droplet 6 for recording.

FIG. 4 is a process chart showing an example of the manufacturing method of the first embodiment of the ink jet recording head of the present invention. In the figure, 11 is a silicon wafer, 12 is a cutting position,
13 is a second groove forming position, and 14 is a cleaning liquid. The right side of the drawing shows the state of each substrate 1. Note that, as in FIGS. 2 and 3, the heating element row 2 is indicated by a bar line. Here, a process is shown in which a silicon substrate is used as the substrate 1 and a large number of substrates 1 are formed on a wafer and then cut out.

In FIG. 4A, the silicon wafer 11
The heating element array 2 is formed on the upper surface, and energizing electrodes and driving circuits for the heating elements (not shown) are formed by, for example, an LSI manufacturing process. Further, a protective layer or a resin layer may be formed on the heating element array 2.

Next, in FIG. 4 (B), a first groove 3 serving as a common liquid chamber is formed in parallel with the heating element array 2. Here, in order to stabilize the ejection performance of the liquid, it is necessary to accurately manufacture the distance from the edge portion 8 of the first groove 3 shown in FIG. 1 to the heating element array 2. In this example, since the silicon substrate is used as the substrate 1, the etching method can be used as the method for forming the first groove 3. In particular, if a dry etching process is used, the first groove 3 can be formed accurately in the vertical direction with high fidelity to the pattern. Further, even when wet etching is used, anisotropic etching using a KOH aqueous solution can be applied to form the first groove 3 with good pattern accuracy. Since either method can be processed in the state of a silicon wafer, the first groove 3 can be accurately formed on many substrates 1 at one time. Further, if the substrate 1 is penetrated by etching, it takes time and the accuracy becomes poor. In the present invention, when forming the first groove 3, the etching is stopped without penetrating in the depth direction of the substrate 1. At this time, if the depth of the first groove 3 is more than half of the thickness of the substrate 1, the damage of the substrate 1 in the following steps will increase. Therefore, the depth of the first groove 3 is equal to the thickness of the substrate 1. Less than half of that.
Specifically, a silicon wafer having a thickness of 625 μm was used to form a groove having a depth of 200 μm as the first groove 3.

Although etching is used as the method for forming the first groove 3 here, other methods such as a dicing saw can also be used. In this case, since the groove is formed from end to end of the substrate 1, a step of sealing both ends is required when forming the ink jet recording head.

Next, in FIG. 4C, a second groove 7 is formed on the back surface of the substrate 1 in a direction substantially orthogonal to the first groove 3, and the first groove 3 is formed at a position intersecting the first groove 3. The groove 3 and the second groove 7 are communicated with each other. That is, the second groove 7 may be formed to a depth such that the sum of the depths of the first groove 3 and the second groove 7 is equal to or larger than the thickness of the substrate 1. As a result, the first groove 3 and the second groove 7 are penetrated at the intersecting position. Second groove 7
As a method of forming the groove, since accuracy is not required as compared with the first groove 3, it is possible to perform cutting from the back surface with a dicing saw in the state of the wafer. Finally, the silicon wafer 11 is cut into chips using a dicing saw, and at the same time as this cutting step, the second groove 7 is formed. That is, in FIG. 4 (C), the cutting is performed at the second groove forming position 13 by the cutting process with the dicing saw, and the second
After the groove 7 is formed, cutting is performed at the cutting position 12 to obtain each substrate 1. The cut substrate 1 is washed with, for example, the washing liquid 14 in FIG. 4D in order to remove dicing powder and the like during dicing.

As described above, since the second groove 7 is formed in the conventional cutting process and the through hole for supplying the liquid can be formed by this, the manufacturing process can be simplified. Further, since cutting by dicing can be performed at high speed and easily, productivity can be improved and manufacturing cost can be reduced.

On the other hand, in the nozzle plate 4, individual flow paths corresponding to each heating element are manufactured by precision molding of plastic. Also,
The liquid discharge port 5 may be formed at the same time as molding, or may be additionally processed by laser processing separately. Then, the inkjet recording head is obtained by aligning and bonding the substrate 1. After that, members such as a heat sink for releasing heat generated on the substrate 1, a wiring substrate for supplying a driving signal and electric power to a heating element, a manifold for supplying a liquid from a liquid tank, and the like are assembled, and a recording unit is manufactured. To be done.

FIG. 5 is a schematic view showing an example of the arrangement pattern of the heating elements in the heating element array in the first embodiment of the ink jet recording head of the present invention. 21 in the figure
22 is a heating element. The ink jet recording head manufactured as described above can be used in various ways depending on the arrangement pattern of its heating elements. For example, in the example shown in FIG. 5 (A), the heating elements 21 and the heating elements 22 in the two rows of heating elements 2 formed with the first groove 3 sandwiched therebetween are arranged at opposite positions. In this case, while the inkjet recording head is scanning once in the direction substantially orthogonal to the heating element array 2, it is possible to perform overprinting at the same position on the recording medium.
By this overprinting, gradation can be expressed, and a multi-tone image can be formed.

Further, in the example shown in FIG. 5 (B), the heating elements 2 in the two rows of heating elements 2 formed with the first groove 3 sandwiched therebetween.
An example is shown in which the positions 1 and 22 are displaced from each other so that they do not face each other. In this case, by one scan of the inkjet recording head, dots formed by the heating elements of one heating element row 2 can be recorded between dots formed by the heating elements of the other heating element row 2, High-density recording is possible. Specifically, when the distance between the heating elements of the heating element array 2 is 63.5 μm (400 dpi), 800 dpi can be recorded by the two heating element arrays 2.

In any of the arrangement patterns of the heating elements shown in FIG. 5, since the accurately formed first groove 3 is used as a common liquid chamber and liquid is supplied from here to record an image, Stable image quality can be obtained.

FIG. 6 is a perspective sectional view showing a modified example of the first embodiment of the ink jet recording head of the present invention. In the figure, 9 is a common liquid chamber groove. In this example, the substrate 1 is the same as that shown in FIGS. 1 to 3, but the nozzle plate 4 is provided with a common liquid chamber groove 9. The common liquid chamber groove 9 is provided at a position facing the first groove 3 provided in the substrate 1.

In order to realize high-speed printing, it is necessary to reduce the resistance of the liquid flow path as much as possible, and it is preferable to increase the cross-sectional area of the common liquid chamber as a means for that. However, if the first groove 3 on the substrate 1 side is deepened as described above, the accuracy is deteriorated, and the strength is reduced, so that the first groove 3 is easily damaged, which leads to a reduction in yield. Therefore, in this example, the common liquid chamber groove 9 is formed in the nozzle plate 4 to form the common liquid chamber together with the first groove 3, and the cross-sectional area of the common liquid chamber is increased. As a result, the flow path resistance of the common liquid chamber can be reduced, and the liquid can be supplied onto the heat generating element at high speed to realize high-speed printing.

FIG. 7 is a perspective view of an example of a substrate showing another modified example of the first embodiment of the ink jet recording head of the present invention. In this example, a plurality of second grooves 7 are provided, and the second grooves 7 and the first grooves 3 are configured to communicate with each other at the intersecting portions. As the inkjet recording head becomes longer, the liquid supply performance may deteriorate in the individual flow paths corresponding to the heating elements near the ends. In this example, by providing a plurality of second grooves 7, the liquid is supplied from a plurality of locations in the common liquid chamber formed by the first grooves 3. As a result, the liquid supply conditions in the individual flow paths can be made as uniform as possible, and the deterioration of the liquid supply performance near the ends can be eliminated.

In each of the above examples, the heating element array 2 is used.
Although an example in which two columns are arranged is shown, the present invention is not limited to this and may be only one column. Further, it is also possible to arrange three or more rows of heating elements 2, and in that case, a plurality of first grooves 3 may be provided. When the same liquid is supplied to the heating element rows 2, for example, only the second groove 7 is formed by dicing as described above, and the through holes are formed at the positions intersecting with the plurality of first grooves 3. Can be formed.
Of course, a plurality of second grooves 7 may be provided.

8 and 9 are a plan view and a sectional view of a substrate showing a second embodiment of the ink jet recording head of the present invention. FIG. 8 shows the substrate 1 before the second groove 7 is formed.
FIG. 9 shows the substrate 1 after the second groove 7 is formed. 8 (A) and 9 (A) are plan views.
9B is a sectional view taken along the line aa ′, and FIGS. 8C and 9C are sectional views taken along the line bb ′. In the figure, 31 is a deep groove portion. In the second embodiment, an inkjet recording head using a plurality of different liquids is shown.

In the example shown in FIGS. 8 and 9, the first groove 3 is formed in each of the two rows of heating elements 2.
Different liquids are supplied to the first grooves 3, and recording is performed using different liquids for each heating element array 2. As a configuration for that, when forming the first groove 3, a deep groove portion 31 that is deeper than other portions is provided in a part thereof. The deep groove portion 31 is provided at a different position for each first groove 3 as shown in FIG. As a method of forming the deep groove portion 31 in the first groove 3, for example, there is a method of forming the deep groove portion 31 by two etching steps. Alternatively, the same shape can be obtained by previously forming only the deep groove portion 31 by an etching process and forming the other portions by, for example, cutting. Also in this example, the substrate 1 is not penetrated when the first groove 3 is formed.

And 1 for each liquid using the second groove 7.
Or, provide a plurality of each. In this example the two first grooves 3
Two second grooves 7 are formed corresponding to the above. At this time, the second groove 7 is formed to a depth that penetrates the deep groove portion 31 of the first groove 3 but does not penetrate the other portion even at a portion intersecting with the first groove 3. Then, as shown in FIG. 9, only when the second groove 7 intersects with the deep groove portion 31 of the first groove 3, the first groove 3 and the second groove 7 communicate with each other, and Even if the second groove 7 intersects with the portion of the groove 3 other than the deep groove portion 31, it does not communicate with each other. By changing the position of the deep groove portion 31 formed in the first groove 3 in this way, the second groove 7 that communicates with each other is formed.
Can be selected. Then, if the respective deep groove portions 31 are formed so that the respective first grooves 3 communicate with the corresponding different second grooves 7, a plurality of different liquids are respectively transferred to the corresponding first grooves 3. Can be supplied. In this example, the upper first groove 3 in FIG.
And the second groove 7 on the left side communicate with each other, and the first groove 3 on the lower side communicates with the second groove 7 on the right side.

As different liquids to be supplied to the respective first grooves 3, for example, inks of different colors can be supplied.
In this case, a two-color printed image can be obtained. Alternatively, inks of different densities may be supplied to form a multi-tone image.

FIG. 10 is a plan view and a sectional view of a substrate showing an application example of the second embodiment of the ink jet recording head of the present invention, and FIG. 11 is a sectional perspective view of the same. In this example, an inkjet recording head using four liquids is shown by further advancing the above-described second embodiment. The four liquids used are, for example, Y (yellow), M (magenta), C (cyan), and K (black).
It is possible to realize full-color recording by using the inks of respective colors and supplying them to the respective first grooves 3.

In this example, the configuration shown in FIGS.
They are used in combination and are formed on the same substrate 1. And each first
Deep grooves 31 are formed at different positions in all the grooves 3 and are configured to communicate with different second grooves 7.
In such a configuration, since four colors of ink can be handled by one substrate 1, there is very little dot misalignment between each color compared to the case of using individual substrates for each ink, and the high It is possible to form a recorded image of high image quality.

In this example, four different color inks are used, but of course three colors may be used, and 6 to 8 inks using dark color ink and light color ink are used for each color. Alternatively, a configuration according to the type of liquid, such as a configuration using a treatment liquid other than ink, is possible. The heating element row 2, and the first groove 3 and the second groove 7 may be formed according to the number of different liquids used.

Even when a large number of types of liquids are used, the width of the substrate 1 in this direction should be as small as possible because the ink jet recording head scans in a direction substantially orthogonal to the heating element array 2. For example, in FIG. 11, the length in the left-right direction in the figure is desired to be as small as possible. Therefore, it is not possible to take the width of the first groove 3 extremely large, and the liquid is supplied from the end of the first groove 3 as in the conventional case, or the direction parallel to the heating element row 2 is provided by cutting or the like. Grooving becomes difficult. On the other hand, due to the trend toward longer ink jet recording heads in recent years, for example, in FIG. 11, the length of the substrate 1 tends to become longer in the depth direction in the drawing. Therefore, even when a plurality of second grooves 7 are provided as in this example, they can be arranged relatively easily. in this way,
Even if the number of types of liquid used increases, it is possible to sufficiently cope with the situation. On the contrary, with such a configuration, the substrate 1 can be downsized even when a plurality of types of liquids are used.

FIG. 12 is a plan view of an example of a substrate showing a modified example of the second embodiment of the ink jet recording head of the present invention. In the example shown in FIGS. 8 and 9, between the two rows of heating elements 2, two corresponding first grooves 3 are provided.
Was formed. However, not limited to this, for example, FIG.
Of course, as shown in FIG. 5, the heating element rows 2 and the first grooves 3 may be alternately arranged.

It is also possible to combine the above-described first and second embodiments. Figure 1
As shown in FIG. 2 (B), a configuration in which one first groove 3 is shared by two heating element rows 2 in the same manner as the configuration shown in the above-described first embodiment is set as one set, and the configuration thereof is set. A plurality of sets may be formed. In this case, for example, the heating elements of the two heating element rows 2 using the same liquid are arranged in a zigzag pattern as shown in FIG. 5B, thereby improving the recording density, and using different liquids. It is conceivable to use such as recording a key.

[0038]

As is apparent from the above description, according to the present invention, it is easy to form the second groove, which is provided in parallel with the heating element array and is substantially orthogonal to the first groove, on the back surface of the substrate. By any method, the first groove and the second groove are communicated with each other at the intersecting portion to form the liquid supply path, which allows efficient and reliable manufacture. The liquid supplied from the second groove to the first groove is supplied to the liquid discharge port from the first groove through the liquid flow path on the front surface side of the substrate. Further, even an inkjet recording head that uses a plurality of types of liquids can be easily configured with one chip, and it is possible to form a high-quality image with little positional deviation. By using, for example, liquids of a plurality of colors as a liquid to be used, a one-chip multi-color head can be configured, and a head capable of gradation expression and high-density recording even with a single color can be configured by one chip. Even when such plural kinds of liquids are used, there is an effect that a compact inkjet recording head can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective cross-sectional view showing a first embodiment of an inkjet recording head of the present invention.

FIG. 2 is a perspective view of an example of a substrate in the first embodiment of the inkjet recording head of the present invention.

FIG. 3 is a plan view of an example of a substrate according to the first embodiment of the inkjet recording head of the present invention.

FIG. 4 is a process drawing showing an example of the manufacturing method of the first embodiment of the inkjet recording head of the present invention.

FIG. 5 is a schematic diagram showing an example of an array pattern of each heating element in the heating element array in the first embodiment of the inkjet recording head of the present invention.

FIG. 6 is a perspective sectional view showing a modified example of the first embodiment of the inkjet recording head of the present invention.

FIG. 7 is a perspective view of an example of a substrate showing another modification of the first embodiment of the inkjet recording head of the present invention.

FIG. 8 is a plan view and a cross-sectional view of a second embodiment of an inkjet recording head of the present invention before forming a second groove on a substrate.

9A and 9B are a plan view and a cross-sectional view after forming a second groove of a substrate showing an ink jet recording head according to a second embodiment of the invention.

FIG. 10 is a second part of the inkjet recording head of the present invention.
13A and 13B are a plan view and a sectional view of a substrate showing an application example of the embodiment of FIG.

FIG. 11 is a second part of the inkjet recording head of the present invention.
FIG. 11 is a cross-sectional perspective view showing an application example of the embodiment of FIG.

FIG. 12 is a second part of the inkjet recording head of the present invention.
FIG. 13 is a plan view of an example of a substrate showing a modified example of the embodiment of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... Heating element row, 3 ... 1st groove | channel, 4 ... Nozzle plate, 5 ... Liquid discharge port, 6 ... Droplet, 7 ... 2nd groove, 8 ... Edge part, 9 ... Common liquid chamber Groove, 11 ... Silicon wafer, 12
... cutting position, 13 ... second groove forming position, 14 ... cleaning liquid,
21, 22 ... Heating element, 31 ... Deep groove portion.

Front page continuation (72) Inventor Katsuhide Ogawa 2274 Hongo, Ebina City, Kanagawa Prefecture, Fuji Xerox Co., Ltd. Kaihei 7-329294 (JP, A) JP 9-169113 (JP, A) JP 63-3962 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B41J 2 / 05 B41J 2/16

Claims (9)

(57) [Claims] 1. A substrate on which a heating element for heating a liquid is formed, and a nozzle plate on which a groove serving as a liquid channel corresponding to the heating element and a liquid ejection port are formed are provided on the front surface side of the substrate. An inkjet recording head formed by joining, wherein a plurality of the heating elements are formed in a single row on the front surface side of the substrate, and a common liquid chamber is shared by the rows of the heating elements. A rear surface, which is a surface opposite to the surface of the substrate on which the heating element is formed, in which a first groove that functions is formed in parallel with the row of the heating elements and does not penetrate in the depth direction of the substrate. A second groove that is substantially orthogonal to the first groove is formed on the side, and the first groove and the second groove communicate with each other at the intersecting portion, and the second groove The liquid supplied from the first groove to the first groove is on the front surface side of the substrate from the first groove. An ink jet recording head, characterized in that the ink is supplied to the liquid ejection port through the liquid flow path. 2. The row of the heating elements and the first groove are set as one set, a plurality of sets are arranged in parallel, a plurality of the second grooves are formed, and the corresponding first set is formed. The ink jet recording head according to claim 1, wherein the groove and the second groove are communicated with each other only at an intersecting portion. 3. The inkjet according to claim 2, wherein the first groove has a depth of two or more steps and communicates with the corresponding second groove in a deep portion. Recording head. 4. A substrate on which a heating element for heating a liquid is formed, and a nozzle plate on which a groove serving as a liquid channel corresponding to the heating element and a liquid ejection port are formed are provided on the front surface side of the substrate. An inkjet recording head formed by joining, wherein a plurality of heating elements are formed in two rows in a substantially row shape on the front surface side of the substrate, and as a common liquid chamber shared by the rows of heating elements. A first groove that functions is formed in parallel with the middle of the two rows of the heating element so as not to penetrate in the depth direction of the substrate, and the surface of the substrate opposite to the surface on which the heating element is formed. A second groove that is substantially orthogonal to the first groove is formed on the back surface side of the first groove and the second groove.
Of the second groove to communicate with the first groove, the liquid supplied from the second groove to the first groove passes through the liquid channel from the first groove on the front surface side of the substrate. And an ink jet recording head which is supplied to the liquid ejection port. 5. A set of two rows of the heating elements and the first groove formed in the middle between the rows are arranged in parallel, and a plurality of the second grooves are formed. In addition, the corresponding first groove and the corresponding second groove communicate with each other only at an intersecting portion.
The inkjet recording head according to 1. 6. The inkjet according to claim 5, wherein the first groove has a depth of two or more steps and communicates with the corresponding second groove in a deep portion. Recording head. 7. A row of the heating elements is formed on the substrate,
The first groove is formed on the front surface side of the substrate, the second groove is formed on the back surface side of the substrate, and at a portion that intersects with the first groove when the second groove is formed. A nozzle plate, in which the first groove and the second groove are communicated with each other and a groove serving as a liquid flow path corresponding to the substrate and the heating element and a liquid discharge port are formed, is bonded to the front surface side of the substrate. 7. The method for manufacturing an ink jet recording head according to claim 1, wherein: 8. The method of manufacturing an inkjet recording head according to claim 7, wherein the first groove is formed by etching, cutting, or a combination thereof. 9. The method of manufacturing an inkjet recording head according to claim 7, wherein the second groove is formed by cutting.