JP3517289B2 - EDM holder - Google Patents

EDM holder

Info

Publication number
JP3517289B2
JP3517289B2 JP27975694A JP27975694A JP3517289B2 JP 3517289 B2 JP3517289 B2 JP 3517289B2 JP 27975694 A JP27975694 A JP 27975694A JP 27975694 A JP27975694 A JP 27975694A JP 3517289 B2 JP3517289 B2 JP 3517289B2
Authority
JP
Japan
Prior art keywords
electrode
mounting
holder
flexible
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27975694A
Other languages
Japanese (ja)
Other versions
JPH08118156A (en
Inventor
政治 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Makino Milling Machine Co Ltd
Original Assignee
Makino Milling Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Makino Milling Machine Co Ltd filed Critical Makino Milling Machine Co Ltd
Priority to JP27975694A priority Critical patent/JP3517289B2/en
Publication of JPH08118156A publication Critical patent/JPH08118156A/en
Application granted granted Critical
Publication of JP3517289B2 publication Critical patent/JP3517289B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 【0001】 【産業上の利用分野】ワークを放電加工する電極または
放電加工されるワークを装着する放電加工機のホルダに
関する。 【0002】 【従来の技術】主軸に対して電極またはワークを取付け
るに際し、主軸軸線に対するX,Y軸方向の位置決めを
行う必要があるが、それらの位置決めは、X,Y軸方向
にそれぞれ摺動する二重蟻溝機構により行っている。 【0003】 【発明が解決しようとする課題】しかし、蟻溝構造によ
る摺動では、構造が複雑となるばかりでなく、摺動部の
遊びにより位置ずれが発生し、位置決め精度を出し難い
欠点がある。また、ねじによる位置決めではバックラッ
シュにより変位を生じ、微調整が困難で作業に時間がか
かる。 【0004】 【課題を解決するための手段】本発明は、主軸に対して
電極またはワークを取付けるに際し、主軸軸線に対する
X,Y軸方向の摺動による位置決め調整を行わず、構造
が単純で、位置決め調整を簡単に行えるような放電加工
機のホルダを得ようとするもので、下記のような構成と
なっている。 【0005】 【0006】()ワークを放電加工する電極または放
電加工されるワークを主軸に装着させるとともに、前記
電極またはワークの装着位置調節を行う放電加工機のホ
ルダにおいて、前記ホルダは、前記ホルダのベースプレ
ートを前記主軸に装着するホルダ装着部と、前記電極ま
たはワークを取付ける取付板と、前記ベースプレートと
前記取付板との間に設けられ、前記ベースプレートに対
して前記取付板を前記主軸の軸線と垂直な直交2軸方向
に移動させて前記電極またはワークの位置調節を行う位
置調整ブロックと、で構成され、前記位置調整ブロック
は、前記ベースプレートに固定され、前記2軸方向の1
軸方向に弾性変形可能なように複数の貫通孔を穿設して
形成した複数の弾性薄肉板よりなる第1可撓部と、前記
第1可撓部に移動部を介して一体的に設けられ、前記2
軸方向の他の1軸方向に弾性変形可能なように複数の貫
通孔を穿設して形成した複数の弾性薄肉板よりなり、前
記取付板を固定するようになっている第2可撓部と、前
記取付板を前記ベースプレートに対して弾性変形させる
よう前記第1、第2可撓部をそれぞれ押圧するねじと、
を具備した放電加工機のホルダ。 【0007】 【作用】本発明においては、ホルダのベース部と装着部
との間に、主軸の軸線方向と直角方向に弾性変形が可能
な可撓部を設けて、該可撓部として、弾性薄肉板のよう
に主軸の軸線方向と直角方向には剛性が小さく変位可能
であり、主軸の軸線方向には高い剛性を有した部材を採
用し、前記可撓部をねじにより押圧することにより、押
圧方向の弾性変形量を調節し、装着部に装着した電極ま
たはワークの装着位置調節を行っているので、X,Y軸
方向に必要量の微調整を簡単に行うことが可能となる。 【0008】 【実施例】次に、本発明の実施例を図面に従って説明す
る。図1は本発明実施例の放電加工機のホルダを示す正
面図、図2は本発明実施例の放電加工機のホルダを示す
図1のA矢視図、図3は本発明実施例の放電加工機のホ
ルダを備えた形彫放電加工機の主軸部を示す正面図であ
る。 【0009】図3には型彫放電加工機7の主軸9に本発
明の電極ホルダ3を取付けた実施例が示されている。型
彫放電加工機7は、図示しない床面に固定されたベッド
に搭載され、ワーク21を載置するテーブル19と、テーブ
ル19の周囲をシール25を介して取り囲むように設けら
れ、テーブル19に対し上下動可能な加工槽23とを有して
いる。また、テーブル19の後方でベッドに立設された図
示しないコラム上をX軸方向に移動するサドル17と、サ
ドル17上をY軸方向に移動するラム15と、ラム15の前面
をZ軸方向に移動する主軸9とを有している。なお、電
極ホルダ3は主軸9の下端に絶縁プレート11を介して設
けられたチャック13に取付られ、電極1は電極ホルダ3
の電極装着部5に電極取付板2を介して装着されてい
る。このようにして、電極1がテーブル19に載置された
ワーク21に対し、X,Y,Z軸方向に相対移動すること
により、ワーク21に所望形状の放電加工を行っている。 【0010】図1は本発明実施例の電極ホルダ3の正面
図で、電極ホルダ3の上部には主軸9の下端に設けられ
たチャック13により保持されるチャッキング栓27および
チャッキングに際しての位置調整のためのピン39が設け
られ、その下にベースプレート29を介してベース部31、
第1可撓部33、移動部35、第2可撓部37、電極装着部
5、最下位に電極取付板2が設けられている。そして電
極取付板2には電極1が着脱可能に固定される。 【0011】第1可撓部33および第2可撓部37は、図2
にも示されるように、角孔が主軸9の軸線方向と直角方
向に薄肉部41を残して並列状に孔明けされて主軸9の軸
線方向には剛性を備えているが、主軸9の軸線方向と直
角方向には変位し易くなっているため、この薄肉部41が
可撓板として作用する。また、第1可撓部33と第2可撓
部37は互いに直角方向に孔明けがされているので、ベー
ス部31に対し電極装着部5がX,Y軸方向に変位可能と
なっている。 【0012】図2に示すように、ベース部31の両側に
は、第1可撓部33の薄肉部41と平行し、かつ、第1可撓
部33の下の移動部35に対面するする垂下腕43、43がそれ
ぞれ設けられ、その移動部35の両側面に対面する位置
に、ロックナット45を備えた押圧ねじ47がそれぞれ螺合
されている。 【0013】また、図1に示すように、前記垂下腕43、
43とは直角方向に、移動部35の両側には、第2可撓部37
の薄肉部41と平行し、かつ、第2可撓部37の下部の電極
装着部5(前記移動部35に相当)に対面する垂下腕49、
49がそれぞれ設けられ、その電極装着部5の両側面に対
面する位置に、ロックナット51を備えた押圧ねじ53がそ
れぞれ螺合されている。 【0014】以上のように構成されているので、図1お
よび図3において、電極1の電極装着部5に対面する左
右垂下腕49、49にそれぞれ設けられた押圧ねじ5
3、53を調節し電極装着部5を押圧すれば、薄肉部
(可撓板)41を図1および3において左右方向に移動
し変位させることができる。よって、薄肉部(可撓板)
41の下部に位置している電極装着部5が左右方向に変
位し電極装着部に取付けられた電極1を左右方向に移動
させることができる。 【0015】同様に、垂下腕43、43に設けた押圧ネジ4
7、47を調節し移動部35を押圧すれば、第1可撓部33の
薄肉部(可撓板)41が図1および3において紙面と直角
方向(図2においては左右方向)に変位させることがで
きる。よって、薄肉部(可撓板)41の下部に位置してい
る移動部35が紙面と直角方向に変位し第2可撓部37およ
び電極装着部5を紙面に直角方向に変位させることがで
きる。 【0016】以上説明したように、押圧ねじ47、53
により第1可撓部33、第2可撓部37をそれぞれ単独
に主軸9の軸線方向と直角方向に変位させることができ
るので、ベース部31に対し、電極1を装着する電極装
着部5をX,Y軸方向に簡単に移動させることができ
る。 【0017】なお、可撓部33、37に形成された薄肉部
(可撓板)41を隔てて形成されている孔は、丸、楕円、
平行四辺形に形成してもよい。また、台形に形成すれ
ば、電極装着部5は主軸9の軸線方向と直角方向に移動
することを基調とし、若干旋回運動も行い、電極1の主
軸9の軸線に対する取付角度の微調節も行える。また、
可撓部33、37における薄肉部(可撓板)41は、孔明けに
よらずに別の加工法、例えば可撓板の溶接によって作成
してもよい。要するに、薄肉部(可撓板)41は主軸9の
軸線と直角方向には変位可能で主軸9の軸線方向には剛
性を有する構造となっておればよい。 【0018】また、本実施例では、型彫放電加工機7に
おいて主軸9に取付けられた電極ホルダ3の電極装着部
5に装着された電極1でワーク21を加工する場合につい
て説明したが、電極ホルダ3の電極装着部5に電極1の
代わりにワーク21を取付け、このワーク21を水平方向に
張り渡したワイヤ電極により放電加工するようにしても
よい。 【0019】 【発明の効果】本発明は、薄肉部(可撓板)の弾性特性
を用いた相対位置調整機構を備えた装置であり、従来の
蟻溝装置のように、可動プレートとベースプレート間に
は摩擦部(摺動部)がないので、摺動部の遊びに起因す
る位置ずれおよび摩擦による残留応力に起因する相対位
置の経時変化がない。また、可撓部の弾性変形を利用し
ているので、ねじによる押圧を解けば、自分の反発力に
より元に戻ろうとするので、遊びがなく、その調整が容
易で高精度な位置決めが可能である。従って、電極また
はワークの取付け位置の微調整を簡単に行うことができ
る。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holder of an electric discharge machine for mounting an electrode for electric discharge machining of a workpiece or a workpiece to be subjected to electrical discharge machining. 2. Description of the Related Art When an electrode or a work is mounted on a spindle, it is necessary to perform positioning in the X and Y axes with respect to the spindle axis. This is done by the double dovetail mechanism. [0003] However, the sliding with the dovetail structure not only complicates the structure, but also has a drawback that the play of the sliding portion causes a positional deviation, which makes it difficult to obtain the positioning accuracy. is there. In addition, in the case of positioning with screws, displacement occurs due to backlash, so that fine adjustment is difficult and time is required for work. According to the present invention, when an electrode or a work is mounted on a main shaft, positioning is not performed by sliding in the X and Y directions with respect to the main shaft axis, and the structure is simple. The object of the present invention is to obtain a holder for an electric discharge machine capable of easily performing positioning adjustment, and has the following configuration. ( 1 ) A holder of an electric discharge machine for mounting an electrode for performing electric discharge machining on a work or a work to be subjected to electric discharge machining to a main shaft and adjusting a mounting position of the electrode or the work, wherein the holder is A holder mounting portion for mounting a base plate of a holder to the main shaft, a mounting plate for mounting the electrode or the work, and provided between the base plate and the mounting plate, wherein the mounting plate is attached to the base plate by the axis of the main shaft. And a position adjustment block that adjusts the position of the electrode or the workpiece by moving the electrode or the work in two orthogonal directions perpendicular to the axis. The position adjustment block is fixed to the base plate.
A first flexible portion formed of a plurality of elastic thin plates formed by forming a plurality of through holes so as to be elastically deformable in the axial direction, and provided integrally with the first flexible portion via a moving portion; Said 2
A second flexible portion comprising a plurality of elastic thin plates formed by drilling a plurality of through holes so as to be elastically deformable in another axial direction in the other axial direction, and adapted to fix the mounting plate. A screw for pressing the first and second flexible portions, respectively, so as to elastically deform the mounting plate with respect to the base plate;
A holder for an electric discharge machine equipped with: According to the present invention, a flexible portion which can be elastically deformed in a direction perpendicular to the axis of the main shaft is provided between the base portion and the mounting portion of the holder. The rigidity is small and can be displaced in the direction perpendicular to the axis direction of the main shaft like a thin plate, and a member having high rigidity is adopted in the axial direction of the main shaft, and by pressing the flexible portion with a screw, Since the amount of elastic deformation in the pressing direction is adjusted to adjust the mounting position of the electrode or the work mounted on the mounting portion, fine adjustment of the required amount in the X and Y axis directions can be easily performed. Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a front view showing a holder of the electric discharge machine according to the embodiment of the present invention, FIG. 2 is a view taken along the arrow A of FIG. 1 showing the holder of the electric discharge machine of the embodiment of the present invention, and FIG. It is a front view which shows the main shaft part of the die sink electric discharge machine provided with the holder of a processing machine. FIG. 3 shows an embodiment in which the electrode holder 3 of the present invention is mounted on a main shaft 9 of a die sinking electric discharge machine 7. The die sinking electric discharge machine 7 is mounted on a bed fixed to a floor surface (not shown), and is provided so as to surround a table 19 on which a workpiece 21 is placed, and a periphery of the table 19 via a seal 25. On the other hand, it has a processing tank 23 that can move up and down. Also, a saddle 17 that moves in the X-axis direction on a column (not shown) standing on the bed behind the table 19, a ram 15 that moves on the saddle 17 in the Y-axis direction, and a front surface of the ram 15 in the Z-axis direction. And a main shaft 9 that moves to The electrode holder 3 is attached to a chuck 13 provided at the lower end of the main shaft 9 via an insulating plate 11.
Is mounted via the electrode mounting plate 2 to the electrode mounting portion 5. In this way, the electrode 1 is relatively moved in the X, Y, and Z-axis directions with respect to the work 21 placed on the table 19, thereby performing the electric discharge machining of a desired shape on the work 21. FIG. 1 is a front view of an electrode holder 3 according to an embodiment of the present invention. A chucking plug 27 held by a chuck 13 provided at a lower end of a main shaft 9 and a position at the time of chucking are provided above the electrode holder 3. A pin 39 for adjustment is provided, and a base portion 31, a base portion 31,
The first flexible portion 33, the moving portion 35, the second flexible portion 37, the electrode mounting portion 5, and the electrode mounting plate 2 are provided at the lowest position. The electrode 1 is detachably fixed to the electrode mounting plate 2. The first flexible portion 33 and the second flexible portion 37 are arranged as shown in FIG.
As shown in FIG. 2, square holes are formed in parallel with each other leaving a thin portion 41 in a direction perpendicular to the axial direction of the main shaft 9 to provide rigidity in the axial direction of the main shaft 9. Since it is easy to be displaced in the direction perpendicular to the direction, the thin portion 41 functions as a flexible plate. Further, since the first flexible portion 33 and the second flexible portion 37 are perforated at right angles to each other, the electrode mounting portion 5 can be displaced in the X and Y axis directions with respect to the base portion 31. . As shown in FIG. 2, on both sides of the base portion 31, it is parallel to the thin portion 41 of the first flexible portion 33 and faces the moving portion 35 below the first flexible portion 33. Hanging arms 43 are provided, respectively, and pressing screws 47 provided with lock nuts 45 are screwed into positions facing both side surfaces of the moving portion 35, respectively. Further, as shown in FIG.
In the direction perpendicular to 43, on both sides of the moving section 35, a second flexible section 37
A hanging arm 49 which is parallel to the thin portion 41 and faces the electrode mounting portion 5 (corresponding to the moving portion 35) below the second flexible portion 37;
49 are provided, and pressing screws 53 having lock nuts 51 are screwed into positions facing both side surfaces of the electrode mounting portion 5, respectively. 1 and 3, the pressing screws 5 provided on the left and right hanging arms 49, 49 facing the electrode mounting portion 5 of the electrode 1 are shown in FIGS.
By adjusting the electrodes 3 and 53 and pressing the electrode mounting portion 5, the thin portion (flexible plate) 41 can be moved and displaced in the left-right direction in FIGS. Therefore, the thin part (flexible plate)
The electrode mounting portion 5 located below 41 is displaced in the left and right direction, and the electrode 1 attached to the electrode mounting portion can be moved in the left and right direction. Similarly, pressing screws 4 provided on the hanging arms 43, 43
When the moving portion 35 is pressed by adjusting the positions 7 and 47, the thin portion (flexible plate) 41 of the first flexible portion 33 is displaced in the direction perpendicular to the plane of the paper in FIGS. 1 and 3 (the horizontal direction in FIG. 2). be able to. Therefore, the moving part 35 located below the thin part (flexible plate) 41 can be displaced in a direction perpendicular to the plane of the paper, and the second flexible part 37 and the electrode mounting part 5 can be displaced in a direction perpendicular to the plane of the paper. . As described above, the pressing screws 47, 53
As a result, the first flexible portion 33 and the second flexible portion 37 can be independently displaced in the direction perpendicular to the axial direction of the main shaft 9, so that the electrode mounting portion 5 on which the electrode 1 is mounted is attached to the base portion 31. It can be easily moved in the X and Y axis directions. The holes formed between the thin portions (flexible plates) 41 formed in the flexible portions 33 and 37 are round, elliptical,
It may be formed in a parallelogram. Further, if the electrode mounting portion 5 is formed in a trapezoidal shape, the electrode mounting portion 5 basically moves in a direction perpendicular to the axis direction of the main shaft 9, performs a slight turning motion, and can finely adjust the mounting angle of the electrode 1 with respect to the axis of the main shaft 9. . Also,
The thin portions (flexible plates) 41 in the flexible portions 33 and 37 may be formed by another processing method, for example, welding of the flexible plates, without making holes. In short, the thin portion (flexible plate) 41 may have a structure that can be displaced in a direction perpendicular to the axis of the main shaft 9 and has rigidity in the axial direction of the main shaft 9. In this embodiment, the case where the workpiece 21 is processed by the electrode 1 mounted on the electrode mounting portion 5 of the electrode holder 3 mounted on the main shaft 9 in the die sinking electric discharge machine 7 has been described. A work 21 may be attached to the electrode mounting portion 5 of the holder 3 instead of the electrode 1, and the work 21 may be subjected to electric discharge machining by a wire electrode extending in a horizontal direction. According to the present invention, there is provided an apparatus having a relative position adjusting mechanism using the elastic characteristic of a thin portion (flexible plate). Since there is no friction portion (sliding portion), there is no positional deviation due to play of the sliding portion and no change over time in the relative position due to residual stress due to friction. In addition, because the elastic deformation of the flexible part is used, if the screw is released, it will return to its original state by its own repulsive force, so there is no play, and the adjustment is easy and high-precision positioning is possible. is there. Therefore, fine adjustment of the mounting position of the electrode or the work can be easily performed.

【図面の簡単な説明】 【図1】本発明実施例の放電加工機のホルダを示す正面
図である。 【図2】本発明実施例の放電加工機のホルダを示す図1
のA矢視図である。 【図3】本発明実施例の放電加工機のホルダを備えた形
彫放電加工機の主軸部を示す正面図である。 【符号の説明】 1 電極 2 電極取付板 3 電極ホルダ 5 電極装着部 7 放電加工機 9 主軸 13 チャック 19 テーブル 21 ワーク 23 加工槽 27 チャッキング栓 29 ベースプレート 31 ベース部 33 第1可撓部 35 移動部 37 第2可撓部 39 ピン 41 薄肉部(可撓板) 43 垂下腕 47 押圧ねじ 49 垂下腕 53 押圧ねじ
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view showing a holder of an electric discharge machine according to an embodiment of the present invention. FIG. 2 shows a holder of the electric discharge machine according to the embodiment of the present invention.
FIG. FIG. 3 is a front view showing a main shaft portion of a die sinking electric discharge machine provided with a holder of the electric discharge machine according to the embodiment of the present invention. [Description of Signs] 1 electrode 2 electrode mounting plate 3 electrode holder 5 electrode mounting portion 7 electric discharge machine 9 main spindle 13 chuck 19 table 21 work 23 processing tank 27 chucking plug 29 base plate 31 base portion 33 first flexible portion 35 move Part 37 second flexible part 39 pin 41 thin part (flexible plate) 43 hanging arm 47 pressing screw 49 hanging arm 53 pressing screw

フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B23H 7/26 B23Q 3/18 Continuation of front page (58) Field surveyed (Int.Cl. 7 , DB name) B23H 7/26 B23Q 3/18

Claims (1)

(57)【特許請求の範囲】 【請求項1】 ワークを放電加工する電極または放電加
工されるワークを主軸に装着させるとともに、前記電極
またはワークの装着位置調節を行う放電加工機のホルダ
において、 前記ホルダは、前記ホルダのベースプレートを前記主軸
に装着するホルダ装着部と、 前記電極またはワークを取付ける取付板と、 前記ベースプレートと前記取付板との間に設けられ、前
記ベースプレートに対して前記取付板を前記主軸の軸線
と垂直な直交2軸方向に移動させて前記電極またはワー
クの位置調節を行う位置調整ブロックと、で構成され、 前記位置調整ブロックは、前記ベースプレートに固定さ
れ、前記2軸方向の1軸方向に弾性変形可能なように複
数の貫通孔を穿設して形成した複数の弾性薄肉板よりな
る第1可撓部と、 前記第1可撓部に移動部を介して一体的に設けられ、前
記2軸方向の他の1軸方向に弾性変形可能なように複数
の貫通孔を穿設して形成した複数の弾性薄肉板よりな
り、前記取付板を固定するようになっいる第2可撓部
と、 前記取付板を前記ベースプレートに対して弾性変形させ
るよう前記第1、第2可撓部をそれぞれ押圧するねじ
と、 を具備したこと特徴とする放電加工機のホルダ。
(57) [Claim 1] In a holder of an electric discharge machine for mounting an electrode for performing electric discharge machining on a workpiece or a workpiece to be subjected to electrical discharge machining to a main shaft and adjusting a mounting position of the electrode or the workpiece. A holder mounting portion for mounting the base plate of the holder to the spindle; a mounting plate for mounting the electrode or the work; and a mounting plate provided between the base plate and the mounting plate; And a position adjustment block for adjusting the position of the electrode or the work by moving the position adjustment block in two orthogonal directions perpendicular to the axis of the main shaft. The position adjustment block is fixed to the base plate, and A first flexible portion including a plurality of elastic thin plates formed by forming a plurality of through holes so as to be elastically deformable in one axial direction; A plurality of elastic thin-walls formed integrally with the first flexible portion via a moving portion, and formed by forming a plurality of through-holes so as to be elastically deformable in the other one axis direction in the two-axis direction; A second flexible portion made of a plate and adapted to fix the mounting plate; and a screw for pressing the first and second flexible portions respectively to elastically deform the mounting plate with respect to the base plate. a holder as electric discharge machine characterized by comprising a.
JP27975694A 1994-10-20 1994-10-20 EDM holder Expired - Fee Related JP3517289B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27975694A JP3517289B2 (en) 1994-10-20 1994-10-20 EDM holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27975694A JP3517289B2 (en) 1994-10-20 1994-10-20 EDM holder

Publications (2)

Publication Number Publication Date
JPH08118156A JPH08118156A (en) 1996-05-14
JP3517289B2 true JP3517289B2 (en) 2004-04-12

Family

ID=17615474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27975694A Expired - Fee Related JP3517289B2 (en) 1994-10-20 1994-10-20 EDM holder

Country Status (1)

Country Link
JP (1) JP3517289B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU1809099A (en) * 1997-12-09 1999-06-28 Anthony A. Russo Tool holding system
CN103831646B (en) * 2014-03-13 2016-01-20 北京航空航天大学 The passive vibration damping fixture of a kind of Milling Process

Also Published As

Publication number Publication date
JPH08118156A (en) 1996-05-14

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