JP3505498B2 - Curtain-flowing device for flowing material - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a curtain-like dropping device for flowing material, which is applicable to a curtain head of a flow curtain coater system.

[0002]

2. Description of the Related Art For example, solder resist ink is applied to the front and back surfaces of a printed wiring board (printed wiring board) and dried, and a required pattern of solder resist is formed by a photo-developing method. The solder resist is formed by coating for the purpose of preventing the adhesion of solder to unnecessary portions of solder, protecting the conductor pattern, and maintaining electrical insulation. As a method for forming the solder resist ink on the printed wiring board, a curtain flow coater method is used in which the solder resist ink of a viscous fluid (paint) is dripped in a curtain shape on the surface of the substrate to be conveyed and applied. ing.

Conventionally, in a system that realizes this curtain flow coater method, as shown in FIG. 10 , the liquid solder resist ink liquid A of the supernatant discharged from the bottom side of the stored ink tank 1 is supplied through a filter device 3. The liquid supply pump 2 that pressure-feeds the liquid pipe 2a, the curtain head 4 that drips the solder resist ink in a pressurized state supplied from the liquid supply pipe 2a downward as a liquid curtain 4a, and is conveyed below the liquid curtain 4a. The substrate 6 to be applied, the ink trough 5 that receives the solder resist ink that has flowed out of the surface of the substrate 6 and guides it to the downstream side, and the solder resist ink that flows down from the outlet 5a of the ink trough 5 is stored and bubbles B And a stored ink tank 1 which is separated into an ink liquid A.

The internal structure of the curtain head 4 includes a tapered flow guide passage 4b communicating with the liquid supply pipe 2a at an inlet 4d at one end of the curtain width, and a downward slit 4c of a horizontal orifice opened at the bottom end thereof. The pressure-applied solder resist ink is pushed into the flow-down slit 4c from the flow guide path 4b and is pushed out from the flow-down slit 4c to a position right below. In the curtain head 4, it is important that the film thickness of the liquid curtain 4a be made uniform over the entire curtain width and droop.

However, since the inflow port 4d of the liquid supply pipe 2a is located at one end, the flow pressure becomes uneven between the part of the downflow slit 4c close to the inflow port of the liquid supply pipe 2a and the part far from it. Inevitably, the film thickness of the liquid curtain 4a becomes uneven in the width direction. Conventionally, in order to correct this non-uniformity of film thickness,
The liquid supply pressure of the liquid supply pump 2 is increased to set the ink in the flow guide path 4b in a pressurized state, and the ink is squeezed out from the downflow slit 4c.

[0006]

However, the above-mentioned curtain head 4 has the following problems.

Even if the ink in the flow guide path 4b is set to a pressurized state, a slight pressure difference is relatively generated between the side near the inlet 4d of the flow-down slit 4c and the side far from the inlet 4d. The non-uniformity has not been fundamentally resolved.
Even if the slit widths at the left and right ends of the downflow slit 4c are strictly controlled to be equal, it is difficult to eliminate the uneven film thickness due to the difference in the fluid resistance of the flow path and the individual variation of the device.

In general, when the coating film is thicker than necessary, ink backing (drip) is likely to occur at the edge of the substrate, and hole blocking is likely to occur at the through hole. Further, the amount of drying is likely to be non-uniform between the surface portion of the coating film and the inner portion of the coating film, and air bubbles are mixed and cracks are likely to occur. However, in the above-mentioned curtain head 4, since the ink is pushed out from the flow-down slit 4c in the pressurized state, the liquid curtain 4
a itself has the initial flow velocity at the flow slit 4c.
Therefore, the liquid curtain 4 per unit length in the transport direction of the substrate 6
The flow length of a becomes long, and therefore the thickness of the coating film on the substrate 6 becomes thick. The minimum film thickness of the solder resist ink coating film is 50 to 60 μm even if the substrate 6 conveyance speed is increased.
Is the limit, and it is impossible in principle to reduce the film thickness below this.

Since high-pressure ink must be supplied from the liquid supply pump 2 and the ink recirculates to the liquid supply pump 2, the flow friction at the high-pressure discharge portion of the liquid supply pump 2 is particularly high. A loss occurs, the ink temperature gradually rises, and the viscosity coefficient changes. Further, since the ink temperature deviates from the room temperature, the thickness and quality of the coating film on the substrate change with time even during operation, which makes quality control difficult.

When the ink is pressure-fed in a pressurized state and the ink temperature gradually rises, the bubble generation is synergistically enhanced. Since the liquid curtain 4a flowing down at an initial velocity collides with the substrate 6 and the ink receiving gutter 5, it is easy to generate entrained bubbles. Further, bubbles are easily generated even when the liquid supply pump 2 is stirred. Furthermore, since the ink pressure sharply decreases on the side where the flow path 4d of the curtain head 4 is abruptly expanded or on the opening side of the flow-down slit port, supersaturated bubbles are easily generated in the ink. Even if the bubbles were completely removed in the stored ink tank 1, voids were frequently mixed in the coating film on the substrate 6, and the film forming quality and the yield were lowered.

In view of the above-mentioned problems, the object of the present invention is to reduce the curtain thickness of the curtain even if the curtain is drowned in a substantially natural flow.
It is an object of the present invention to provide a curtain-like flow-off device for a fluid material, which is uniform and can realize improvement in film quality such as uniform film thickness of a coating film.

[0012]

In order to solve the above-mentioned problems, the present invention is directed to a curtain material flow-off device for flowing a flow material in a curtain shape from a flow-down slit through a flow guide path. has a falling flow path flowing material from the injection passage is poured, drop passage Ri formed with a member for throttling the flow of fluid material with spreading in the slit direction receiving a fluid material poured, the member Channel wall to channel
An eaves-like member protruding inward, the eaves-like member facing each other.
Two or more eave-shaped members alternately projecting from the flow channel wall into the flow channel
And characterized in that. The eaves member is a pouring material
The end of the eaves-shaped member and the flow path wall facing this
It passes through the gap to the slit side constrictively.
Therefore, it fulfills a buffer diffusion function of receiving the poured fluid material and expanding it in the slit direction, and a gate (valve) function of restricting the flow rate. Therefore, the pressure in the slit direction is equalized, and the curtain thickness is made uniform in the width direction. Is the eaves member facing the flow path wall?
Are two or more eave-shaped members that alternately project into the flow path.
Therefore, the fluid material passes through the gap between the upper and lower eaves members.
As the pressure increases, the pressure in the slit direction becomes even, and the curtain thickness increases.
Becomes uniform in the width direction. In addition, the eaves-shaped member is formed in a tapered shape.
It is desirable that

[0013]

[0014]

In the present invention, the gap between the flow-down slits is
The tip of the eaves-shaped member and the flow
It has a gap interlocking adjustment mechanism that makes wide and narrow displacements with the road wall.
It is preferable. Due to the wideness of the gap of the flow-down slit, the curtain thickness
Adjustable, but the thinner the curtain thickness, the width of the curtain thickness
Unevenness in the direction becomes apparent. However, in the present invention, the gap
By providing an interlocking adjustment mechanism, the clearance of the downflow slit
Depending on the width of the
Therefore, the smaller the slit gap, the eaves-shaped part
The gap between the materials is also narrowed, the buffer diffusion function and the throttling function of the eaves-shaped member
And the pressure difference in the slit direction can be reduced.
Therefore, the effect of making the curtain thickness uniform can be strengthened.

[0016]

[0017]

[0018]

[0019]

[0020]

[0021]

[0022]

[0023]

[0024]

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a state in which the liquid supply pipe of the curtain head of the flow curtain coater system according to the present invention is removed, and FIG. 2 is a right side view showing the curtain head partially broken away, FIG. Is a perspective view showing a partial cutaway of the main part of the curtain head, FIG. 4 is a schematic view showing the arrangement of liquid supply pipes of the curtain head, and FIG. 5A is a schematic right side view of the curtain head. FIG. 5B shows bb ′ in FIG. 5A.
Fig. 6 is a schematic view showing the flow of the solder resist ink in a state of being cut along the line, Fig. 6 is a side view showing a swinging state of the movable block in the curtain head, and Fig. 7 is a tightening state of the movable block in the curtain head. FIG. 8 is a side view showing a state where the flow of the solder resist ink in the curtain head is viewed from the side.

The curtain head 100 of this embodiment mainly includes a curtain head main body 10 that can be raised and lowered along the columns 12 on both the left and right sides of the gate structure.
Reference numeral 0 denotes the mounting and fixing plates 11, 11 on both the left and right sides, the metal fixing block 13 sandwiched and fixed between them, and the swinging fulcrum shafts 14a at the upper corners of the metal mounting and fixing plates 11, 11.
Movable block 1 made of metal that can swing around 14a
Have four. A beam plate 15 is laterally fixed to the tops of the columns 12, 12, and the upper mounting pieces 11a and the lower mounting pieces 11b of the mounting fixing plates 11, 11 are connected via linear bearings (ball bushes) 12a, 12b. It is supported by columns 12 so that it can be raised and lowered.

On the top surface of the fixed block 13, a head elevation adjusting screw rod 16 threadedly penetrating the beam plate 15 is hung, and an adjusting knob 16a is provided at the tip of the screw rod 16. The movable block 14 is attached to the attachment fixing plates 11, 11 via hinges 14b, 14b. As shown in FIG. 6, the movable block 14 can be pulled away from the fixed block 13 and turned over to open the inside of the head for maintenance and inspection. Be useful.
On the top surface of the mounting and fixing plate 11, 11, a safety rod 17,
When the movable block 14 is inverted, the movable block 14 is inverted, and then the movable block 14 is inverted so that the movable block 14 is inverted.
Movable block 1 by inserting 7 and 17 back
The inadvertent return rotation of 4 is stopped by the safety rods 17 and 17 which prevent it from opening.

A handle plate 18 having a handle 18a protruding outward is fixed to both sides of the lower portion of the movable block 14. The handle plate 18 includes a cutout portion 18b that is open outward. A vertical shaft 19a is planted at a position facing the cutout portion 18b of the mounting and fixing plate 11.
A screw rod 19b that can swing on a horizontal plane about the vertical shaft 19a can be fitted into and removed from the cutout portion 18b.
The handle plate 18 around the notch 18b is sandwiched by the tightening nut knob 19c screwed to the screw rod 19b and the lock nut 19d.

A slit gap dial gauge 20 is provided below the mounting and fixing plates 11 on both sides, and the tip of the probe needle 20a is in contact with the back surface of the handle plate 18. This dial gauge 20 has an accuracy of 10 μm and is 10
Since the slit gap becomes narrower as the grip plate 18 approaches the mounting and fixing plate 11 by tightening the tightening nut knob 19c, the dial has a maximum pushing position (zero slit gap) of the probe 20a. The gauge pointer is set to zero. The slit gap can be expanded up to 3 mm.

Fixed block 1 of the curtain head body 10
A packing 21 having a U-shaped cross section and made of an elastic material such as rubber is sandwiched between the upper part of the movable block 14 and the movable block 14 to liquid-tightly seal a flow guide passage described later. The packing 21 also functions as an elastic member that elastically resists the pressing of the movable block 14 by tightening the tightening nut knob 19c. Then, as shown in FIG. 6, a pair of metal slit plates 22 and 23 are fixed to the bottom surface of the fixed block 13 and the bottom surface of the movable block 14.

The flow guide path defined by the fixed block 13, the movable block 14, the packing 21, and the pair of slit plates 22 and 23 is, as shown in FIG. 4, a liquid supply fluid communicating with a liquid supply pump (not shown). Three T-shaped joints 31a from the main pipe 31
And branch liquid supply pipes 32A, 32B, 32C and 32D that are horizontally branched via the elbow joint 31b and flow control valves (flow control ball valves) provided on the branch liquid supply pipes 32A, 32B, 32C and 32D, respectively. ) 32a, 3
2b, 32c, 32d, and injection channels 33A to 33D that are perforated in the horizontal direction of the fixed block 13 and communicate with the branch liquid supply pipes 32A to 32D, and are defined between the fixed block 13 and the movable block 14. And injection channels 33A to 33
A vertical drop flow path 34 into which the ink from D is poured at each of the injection ports 33a to 33d separated and dispersed in the slit direction;
The slit plates 22 and 23 at the bottom of the vertical drop channel 34 have a tapered slit introduction groove 35 in which a downward slit 35a is opened.

The falling flow path 34 has a first blade (overhanging member) 36A and a second blade 36B which alternately project into the flow path from the flow path walls 22a and 23a facing each other on the downstream side of the injection ports 33a to 33d. Is equipped with. This blade 36A, 3
The tip of 6B is chamfered on the upper surface side, and is formed in a tapered shape. The first blade 36A closest to the injection ports 33a to 33d is the flow path wall 22a on the injection ports 33a to 33d side.
Protruding from. Further, on the back surfaces of the slit plates 22 and 23, the V grooves (recessed portions) 22c and 23 are formed around the slit 35a.
Beak (bird's peak) -shaped lip 22b, 23 with c
b is formed. The center of the swing fulcrum shaft 14a and the beak-shaped lip 22b of the slit plate 22 on the fixed block 13 side.
The tip of the first blade 36A is located on a line L (indicated by a one-dot chain line in FIGS. 6 and 7) that connects to the second line when the movable block 14 blocks the drop flow path 34. Second blade 36B is located in the middle thereof. When the movable block 14 is pressed against the fixed block 13 against the elastic force of the packing 21 by tightening the tightening nut knob 19c and the gap of the slit 35a is narrowed, the second blade 36 is proportionally increased.
The gap between B and the gap between the first blade 36A is narrowed. Therefore, the movable fixed block 13 and the tightening nut knob 19c constitute a gap interlocking adjustment mechanism.

In the space sandwiched between the fixed block 13 and the movable block 14, a floating flow path 37 communicating with above the injection ports 33a to 33d of the drop flow path 34 is defined immediately below the packing 21. An overflow port (overflow) 37a that faces the flow path 37 is formed in the attachment fixing plates 11, 11. An overflow port (overflow) 37a opened in the mounting / fixing plates 11, 11 is connected to an overflow pipe 38 having an air port 38a opened upward as shown in FIGS. 1 and 5, and the lower end of the overflow pipe 38 is An overflow discharge port 38b for returning the overflow liquid to the liquid curtain receiving trough 39 that receives the liquid curtain K is provided just below the slit 35a. The liquid curtain receiving trough 39 has an outlet 39a at the lower part of the one end portion for recirculating the ink at the lower part of the one end portion. In addition, the curtain width limiting gutters 40 and 40 that drip excess portions on both ends of the liquid curtain K to the liquid curtain receiving trough 39 are attached to the fixing plate 1.
It is provided in the lower part of 1,11.

Branch supply liquid pipe 32 branched from the supply main pipe 31
A to 32D are injection channels 33A to 33 of the fixed block 13.
In order to transfer the ink A, which is close to normal pressure to D, the ink A is poured from the injection ports 33a to 33d into the vertical drop passage 34 for substantially natural flow. The ink A poured from the inlets 33a to 33d has a weak pressure and thus has no momentum, and the lateral spread (endward spread) in the slit direction is weak. In the slit groove 35, the fluid pressure is maximized just below the inlets 33a to 33d. Therefore, the curtain thickness in the slit direction tends to be uneven.

However, in this example, a plurality of injection ports 33a ...
Since 33d are arranged dispersedly, the slit groove 35
Among the adjacent inlets, the ink A that laterally spreads from both inlets overlaps each other, and the pressures of the portions directly below the inlets 33a to 33d and the intermediate portions thereof are equalized, and the curtain thickness in the slit direction tends to be uniform. . In particular, since the pouring amount from each of the injection ports 33a to 33d can be proportionally adjusted by the flow rate adjusting valves 32a to 32d, the curtain thickness of the curtain liquid K dripping from the slit 35a can be easily made uniform in the slit direction.

In this example, the vertical falling flow path 34 for natural flow is provided with first and second blades 36A and 36B. Such blade members 36A, 36B
Absorbs the ink A poured from the injection ports 33a to 33d and narrowly passes through the gap to the slit groove 35 side. Therefore, it absorbs the poured ink to weaken the power and spread in the slit direction. It acts as a gate (valve) that throttles the flow rate. For this reason, as the poured ink passes through the gap between the first and second blades 36A and 36B, the pressure in the slit direction is gradually equalized, and the curtain thickness is made uniform in the width direction.

The ink A poured from the injection ports 33a to 33d easily flows down vigorously along the flow path wall 22a on the injection port side, but the first blade 3 from the flow path wall 22a on the injection port side.
Since 6A is projected, this exerts a buffer diffusion action, which contributes to uniformization of the curtain thickness.

The present inventor investigated the optimum number of blades. One sheet was insufficient, and three or more sheets were worse than or substantially equal to two sheets.

Even if the flow rate of each of the injection flow channels 33A to 33D fluctuates with time, the excess flow rate overflows from the injection ports 33a to 33d to the overflow port 37a via the floating flow channel 37 above, and falls vertically. Since it is not forced into the flow path 34,
The pressure fluctuation in the slit groove 35 can be suppressed.

Here, the overflow port 37a is, as shown in FIG.
It is formed on the mounting and fixing plates 11 and 11 corresponding to the both end positions of the downflow slit 35a. The four flow rate adjusting valves 32a to 32a are arranged so that the flow rate overflowing from the overflow port 37a on one side and the flow rate overflowing from the overflow port 37a on the other side become equal.
By adjusting 2d, the curtain thickness of the liquid curtain can be made uniform in the slit direction. For example, when the flow rate flowing out from the right side overflow port 37a in FIG. 5 is larger than the flow rate flowing out from the left side overflow port 37a, the ink flow amount is larger on the left side of the slit groove 35, and thus the slit is reduced. Since the right side of 35a has a smaller curtain thickness than the left side, the flow control valve 32 on the right side
Loosen a, 32b, or adjust the left flow control valves 32c, 32
By tightening d, the overflow flows are equalized and the curtain thickness is made uniform. In other words, since the overflow ports 37a are provided at both ends, the curtain thickness can be adjusted to be uniform.

Further, as shown in FIG. 8, the bubbles B in the ink A that are gently transferred to the injection flow paths 33A to 33D are as shown in FIG.
Since it is distributed from the inlets 33a to 33d to the floating flow path 37 above and floats and is positively discharged to the overflow port 37a together with the overflow, a positive poultry / foam removal function is exhibited.
In particular, there is a great advantage that the garbage / foam removing function is exhibited immediately before the slit groove 35. This is significant for improving film quality.

To reduce the thickness of the liquid curtain K, the tightening nut knob 19c is tightened to push the movable block 14 against the elastic force of the packing 21 toward the fixed block 13 to narrow the gap of the slit 35a. At this time, since the gap interlocking adjustment mechanism simultaneously narrows the gap between the second blade 36B and the first blade 36A, the buffer diffusion action and the throttling action of the blades 36A and 36 are increased, and the slit groove 35 The pressure difference in the slit direction can be reduced, and the effect of making the curtain thickness uniform can be enhanced.

The slit plates 22 and 23 of this example are made of metal block, and the edge of the slit 35a is shown in FIG.
As shown in (D), it has a unique shape. As described above, the slit 35 is formed on the back surface of the slit plate 22 (23).
Around the a, a beak-shaped lip 22b (23b) having a V-shaped groove (recessed portion) 22c (23c) is formed, and this beak-shaped lip 22b (23b) has a downward tapering shape. Between the slit introduction groove 35 side and the back surface of the slit plate 22 (23), there is communication between the vertical straight line drawing portion Y and the rounded portion (rounded portion) R, and the rounded portion R and the V groove (recessed portion).
A horizontal straight line portion X is interposed between 22c (23c). In this example, the length of the vertical linear diaphragm portion Y is 0.5 mm,
The radius of curvature of the rounded portion R is 0.2 mm, and the length of the horizontal straight portion X is 2.0 mm. The depth of the V groove 22c (23c) is 3 mm.

Normally, as shown in FIG. 9A, a slit structure is adopted in which the slit groove 35 is tapered downward and the slit rim is a knife edge (wedge shape) with an acute angle. In a mixed fluid material such as solder resist ink, if there are steps such as a sudden expansion portion and a rapid contraction portion in the ink flow path, the fluidity is likely to shift due to the difference in viscosity and specific gravity between the mixed components, and the liquid curtain The surface has streaks and wavy lines, and the unevenness of the curtain thickness is noticeable. In FIG. 9 (A), the slit groove 3 is tapered downward.
5, so they are relaxed. However, since the slit rim is a knife edge, the minimum throttle portion that limits the thickness of the liquid curtain is merely the ridgeline of the knife edge, and the frictional force on the liquid curtain K at the slit rim becomes a minimum value close to zero. ing. Therefore, although the liquid cut-off property at the slit edge is good, the change in the frictional force is large with respect to the fluctuation of the ink pressure, the fluctuation, and the slight shaking of the liquid curtain K in the slit gap direction, and the liquid curtain still remains. Causes surface streaks and liquid curtain thickness variations.

Therefore, the present inventor made a prototype of a slit structure having a vertical linear aperture portion Y at the slit rim as shown in FIG. 9 (B), and examined the running characteristics. Since a large frictional force (shear stress) is generated between the liquid curtain K and the slit rim by the area of the vertical linear throttle portion Y, fluctuations in the ink pressure or a slight amount in the slit gap direction of the liquid curtain K. The fluctuation ratio of the frictional force is relatively small even with respect to the shaking of the curtain, so that the streak on the liquid curtain surface and the variation in the thickness of the liquid curtain K are reduced. However, if the vertical linear drawing portion Y is too long, the frictional force (resistive force) at the slit rim becomes too large, the liquid drainage property deteriorates, and the liquid curtain K becomes more difficult to come out as the slit gap becomes narrower. , A periodic wavy pattern starts to appear on the liquid curtain K, and the liquid curtain itself shakes. In addition, since the ink flows under a natural flow and there is almost no extrusion pressure, if the vertical linear throttle portion Y and the back surface of the slit plate are at a right angle, the exudation of the ink of the viscous fluid easily forms a deposit pool on the outer edge of the slit. . It has been found that when the outer surface of the slit is a knife-edge-shaped sloped surface like the tip of a nozzle of a water sprinkler, the ink having a high viscosity that passes through the slit gap will rather spread the adhering pool and deteriorate the liquid drainage property.

The inventor of the present invention further prototyped a slit structure having a vertical linear aperture portion Y and a rounded portion R at the slit rim as shown in FIG. 9C, and examined the drooping characteristic. By providing the rounded portion R, the amount of adhered accumulation at the base of the liquid curtain K at the slit rim can be limited to a small scale, and the liquid drainage property is improved. Therefore, the wavy pattern on the liquid curtain surface is reduced.
However, if the radius of curvature of the rounded portion R is too long, attaching the rounded portion R is equivalent to opening the slit rim in a trumpet shape, and therefore ink tends to propagate along the curved surface. Therefore, its radius of curvature is limited. However, since the ease of transmission of ink along the rounded curved surface is somewhat left, the base of the liquid curtain K is also biased when the curtain shakes in the slit gap direction. Therefore, the slit plate rear surface in the vicinity of the slit rim is inevitable. Droplets tend to adhere to the entire surface. Therefore, it is necessary to suppress the shaking of the curtain.

The air coming in contact with the liquid curtain K dripping from the edge of the slit is a laminar downward laminar flow. However, since there is no air above the slit plate near the edge of the slit, the pressure becomes negative. Therefore, since a parallel airflow flows into the slit plate along the back surface thereof, a vortex is generated at the horizontal and vertical intersections (airflow deflecting portions). Since the base of the liquid curtain K is sandwiched by the pair of left and right air swirls on the slit plates 22 and 23 side, it can be presumed that the liquid curtain K shakes due to the imbalance.

For this reason, the present inventor has shown in FIG.
The slit structure shown in (D) was adopted. That is, a V groove 22c (23c) having a crossing angle of 90 ° is formed on the back surface of the slit plate 22 (23) leaving a horizontal straight line portion X from a rounded portion R, and a portion surrounded by a broken line is mirror-finished.
The presence of the V-shaped groove 22c (23c) can suppress the shaking of the liquid curtain K in the slit gap direction and reduce the adhesion of droplets.
As indicated by the broken line arrow, the air flow supplied near the circle has a component in the liquid curtain droop direction, so it can be inferred that no eddy current is generated near the circle. Horizontal straight line X
Is made longer, the structure becomes substantially the same as that of FIG. When the horizontal straight line portion X is shortened to about 1 mm, on the contrary, the liquid curtain K comes to wrap around the V groove 22c (23c) side. As described above, this substantially corresponds to the slit outer surface being a knife-edge-shaped inclined surface. And
The reason why the portion surrounded by the broken line is mirror-finished is to eliminate roughness and to make the friction coefficient uniform and to prevent ink from spreading and spreading, which is effective in reducing liquid drainage and adhesion of droplets.

Since the liquid curtain K can be dripped under such a natural flow, it is possible to make the coating film uniform and thin. In this example, the thickness of the coating film could be reduced to 10 μm. It is possible to improve the film quality by applying multiple layers. Further, since the friction loss of the fluid material is reduced, the rise of the liquid temperature can be suppressed even in the circulation method of the fluid material. It is possible to suppress variations in film thickness and film quality over time during operation. Furthermore, the fact that the fluid material is not in a pressurized state and the rise of the liquid temperature can be suppressed, the generation of bubbles in the fluid material can be suppressed, so that the film forming quality and the yield can be improved.

For further liquid temperature control, a cooling device may be provided in the liquid supply pipe or in the preliminary storage tank.

The apparatus of this example can be used not only for the solder resist ink but also for the application of a highly viscous adhesive. Since the coating film of the adhesive may be a thick film, the air port 38a is blocked,
If the adhesive liquid is pressure-fed to the liquid supply main pipe 31, a film can be formed by a conventional method. Further, it is not limited to viscous fluid, but it can be used for curtain-like runoff of weakly viscous fluid in cleaning processing, etc.
Any fluid material may be used.

[0053]

As described above, the present invention has the following effects.

(1) Flow material poured into the drop channel
Receiving and expanding in the slit direction, the flow of the flowing material
Since it has a member for squeezing the amount, it slips even under a substantially natural flow.
The pressure in the vertical direction becomes even and the curtain thickness becomes uniform in the width direction.
With this, it is possible to achieve uniform coating film thickness and improve film quality.
You can A flow path as a member having such a function
Can be an eaves-like member protruding from the wall into the flow path
However, as an eaves-shaped member, it alternates from the opposite channel walls into the channel.
It is desirable to have two or more eaves-like members that project to the front. Flow
As the moving material passes through the gap between the upper and lower eaves members,
The pressure in the slit direction becomes even, and the curtain thickness is wide.
Make uniform. In addition, the eaves-shaped member is formed in a tapered shape.
Is desirable.

(2) And, in the present invention, the flow-through slip is
The tip of the eaves-like member and this
Interlocking adjustment mechanism that causes wide and narrow displacement of the flow passage wall facing the wall
Can be adopted. Narrow the slit gap
The gap between the eaves-like members narrows in conjunction with each other, cushioning the eaves-like members.
Pressure in the width direction at the slit increases diffusion and throttling action
Since the difference can be reduced, the effect of making the curtain thickness uniform can be strengthened.
It is possible to improve the film quality.

[0056]

[0057]

[0058]

[0059]

[0060]

[0061]

[0062]

[0063]

[Brief description of drawings]

FIG. 1 is a perspective view showing a state in which a liquid supply pipe of a curtain head of a flow curtain coater system according to the present invention is removed.

FIG. 2 is a right side view showing the curtain head partially broken away.

FIG. 3 is a perspective view showing a partially cutaway main part of the curtain head.

FIG. 4 is a schematic view showing an arrangement of liquid supply pipes of the curtain head.

FIG. 5A is a schematic right side view of the curtain head,
(B) is a schematic view showing the flow of the solder resist ink in a state of being cut along the line bb 'in (A).

FIG. 6 is a side view showing a swinging state of a movable block in the curtain head.

FIG. 7 is a side view showing a tightened state of a movable block in the curtain head.

FIG. 8 is a cross-sectional view showing a state where the flow of solder resist ink in the curtain head is viewed from a side surface.

FIG. 9A is a vertical sectional view showing an example of a slit structure,
(B) is a longitudinal sectional view showing another example of the slit structure, (C).
[Fig. 3] is a vertical sectional view showing still another example of the slit structure, and (D) is a vertical sectional view showing the slit structure adopted in the curtain head.

FIG. 10 is a schematic diagram showing a conventional curtain flow coater system.

[Explanation of symbols]

100 ... Curtain head 6 ... Substrate 10 ... Curtain head body 11 ... Mounting and fixing plate 11a ... Top mounting piece 11b ... Lower mounting piece 12 ... Support 12a, 12b ... Linear bearing (ball bush) 13 ... Fixed block 14 ... Movable block 14a ... rocking fulcrum shaft 15 ... Beam plate 16 ... Screw rod for head elevation adjustment 16a ... adjusting knob 17… Safety bar for opening 18 ... Handle plate 18a ... grip handle 18b ... Notch 19a ... Vertical axis 19b ... screw rod 19c ... Tightening nut knob 19d ... Stop nut 20 ... Dial gauge for slit gap 20a ... Exploration stylus 21 ... Packing 22, 23 ... Slit plate 22a, 23b ... Channel wall 22a, 23b ... Beak (bird's peak) shaped lip 22c, 23c ... V groove (recessed portion) 31 ... Liquid supply main 31a ... T type joint 31b ... Elbow joint 32A, 32B, 32C, 32D ... Branch supply pipe 32a, 32b, 32c, 32d ... Flow rate control valve 33A, 32B, 32C, 33D ... Injection channel 33a, 32b, 32c, 33d ... Injection port 35 ... Slit introduction groove 35a ... Downflow slit 36A ... the first blade 36B ... second blade 37 ... Floating channel 37a ... overflow port 38 ... Overflow piping 38a ... Air port 38a 38b ... overflow outlet 39 ... Liquid screen gutter 39a ... Exit 40 ... Gutter width limited gutter A ... Ink liquid B ... bubbles K ... Liquid curtain X: Horizontal straight line Y: Vertical linear aperture R ... Rounded part.

Claims (4)

(57) [Claims] 1. In a curtain-like apparatus for flowing a flow material in a curtain shape from a downward slit through a flow guide path, the flow guide path has a drop flow path into which the flow material is poured from an injection path. and the drop passage Ri formed with a member for throttling the flow of fluid material with spreading in the slit direction receiving a fluid material poured, the member channel wall
Is an eaves-shaped member protruding into the flow path from the eaves-shaped member.
Is two or more that alternately project from the opposing channel walls into the channel.
A curtain-like dropping device for flowing material, which is an eaves-shaped member . 2. The flow-through slit according to claim 1,
In conjunction with the wide and narrow displacement of the gap, the tip of the eaves-shaped member and this
Gap interlocking adjuster that causes wide and narrow displacements of the facing flow passage wall
A curtain-like material-discharging device for a fluid material having a structure . 3. A flow-through slot for flowing a flowable material through a flow guide path.
For a curtain-like device for flowing material that flows from a container in a curtain shape
In the flow guide path, the flow material from the injection path is poured.
Has a drop flow path that is inserted, and the drop flow path is poured
Flows while receiving the fluid material and expanding it in the slit direction
It has a member for restricting the flow rate of the material, and the member is a channel wall
The eaves-shaped member protruding from the
And the tip of the eaves-like member in conjunction with the wide and narrow displacement of the gap
Interlocking gap that widens the gap with the flow path wall facing this
A curtain-like dropping device for flowing material, characterized by having an adjusting mechanism . 4. A curtain-like dropping device for flowing material according to any one of claims 1 to 3 , wherein the eave-shaped member is formed in a tapered shape.