JP3475964B2 - Ultrasonic cleaner - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device, and more particularly, to a photosensitive member having a pattern formed between an insulating film formed on the surface of a substrate and a metal film of a magnetic material. The present invention relates to an ultrasonic cleaning device that removes the photosensitive material, which is an object to be cleaned, having the material by an organic solution and ultrasonic vibration.

[0002]

2. Description of the Related Art Conventionally, there are various objects to be cleaned by an ultrasonic cleaner, and one of them is a printed circuit board for a sensor as shown in FIG. In FIG.
a is an object to be cleaned, and 1 to 4 described later are laminated in order from the bottom. That is, 1 is a substrate made of SUS or Inconel, and 2 is a polyimide resin having a thickness of 1 to 5 μm.
m is an insulating film, 3 is a photosensitive material having a thickness of about 3 μm, which is made of a resist forming a pattern, and 4 is a metal such as nickel, which is formed by vacuum deposition or sputtering, by a method such as photolithography. About 0.2 μm
It is a metal film formed on.

FIG. 6 shows an outline of a conventional ultrasonic cleaning device, which incorporates a high-power oscillator (not shown) into which the cleaning object a is put and is cleaned. The photosensitive material 3 of the object a is removed with an organic solution 6 such as acetone.

[0004]

However, in the above-mentioned conventional ultrasonic cleaning device, the photosensitive material 3 is melted by cleaning, but a part of the metal film 4 is scattered as fine fragments during cleaning, and this is scattered. There is a problem in that the insulating film 2 is lowered and comes into contact with the surface of the insulating film 2 to damage or stick to the surface, thereby impairing the insulating property of the insulating film 2.

The present invention is intended to solve the above problems. That is, an object of the present invention is to provide an ultrasonic cleaning device that can attract the scattered pieces of the magnetic metal film formed during cleaning and does not damage the insulating film. Is.

[0006]

In order to achieve the above object, the present invention provides an insulating film and a pattern on the surface of a substrate in order from the bottom.
The photosensitive material forming the film and the metallic metal film are laminated.
In ultrasonic cleaner for removing the photosensitive material of the cleaning object is by the organic solution and the ultrasonic vibration effect, before
The substrate is placed in the organic solution so that the metal film faces upward.
It is soaked and installable, and is equipped with a magnet for collecting magnetic material fine particles that is provided close to the metal film of the magnetic material on the installed substrate from above and is immersed in the organic solution in the cleaning tank. I was supposed to.

[0007]

According to the present invention, the surface of the substrate is insulated from the bottom in order.
The metallization of the photosensitive material and the magnetic material forming the film and pattern
In an ultrasonic cleaning device for removing the photosensitive material of a cleaning object in which a film is laminated by an organic solution and an ultrasonic vibration action, the substrate is arranged so that the metal film formation faces upward.
It can be installed by immersing it in an organic solution,
Since the magnet for collecting magnetic substance fine particles, which is provided close to the metal film of the magnetic substance on the substrate from above and is immersed in the organic solution in the cleaning tank, is scattered finely during cleaning. The fragments of the metal film of the magnetic substance are attracted and collected. This
At the time of scattering, the fragments of the metal film of the magnetic material that scattered
The board from above without touching the board.
Is attracted to the magnets that are trapped and collected by the magnets.

Therefore, the scattered metal fragments do not come into contact with the object to be cleaned and are not damaged.

[0009]

1 and 2 show a first embodiment of the present invention. 1 and 2, a is a cleaning object similar to that shown in FIG. 5, 5 is a cleaning tank similar to that shown in FIG. 6, and 6 is a similar organic solution such as acetone.

Reference numeral 7 is a magnet for collecting magnetic fine particles,
It is composed of a permanent magnet or an electromagnet, is immersed in the organic solution 6, and surrounds the cleaning object a. That is, the magnet 7 is installed so as not to be away from the metal film 4 of the magnetic material of the cleaning object a shown in FIG. In the ultrasonic cleaning device configured as shown in FIGS. 1 and 2, the magnet 7 for collecting magnetic fine particles is installed inside the cleaning tank 5 and surrounds the cleaning object a. Since the magnet 7 is scattered during the cleaning, the metal film 2
Of the debris, the debris does not come into contact with the cleaning object a, does not scratch or touch the surface of the insulating film 2, and therefore the insulating property of the insulating film 2 is not impaired.

3 and 4 show a second embodiment of the present invention. In the second embodiment, the magnetic substance collecting magnet 7 is positioned directly above the cleaning object a and is supported by the supporting arm 8. In the ultrasonic cleaner configured as shown in FIG. 3 and FIG. 4, since the magnet 7 for collecting magnetic fine particles is located directly above the object a to be cleaned, the magnet 7 is The fragments of the metal film 2 that have scattered and risen are collected without being lowered.

Therefore, the debris does not come into contact with the object to be cleaned a and the surface of the insulating film 2 is not scratched or rubbed.

Although not shown, as a third embodiment of the present invention, the cleaning tank itself also serves as a magnet for collecting magnetic fine particles. However, if there is a magnet for collecting magnetic fine particles immediately below the object to be cleaned, the metal film fragments that scatter and rise during cleaning may be forcibly lowered and brought into contact with the surface of the object to be cleaned. Since this is not preferable, when the cleaning tank is also used as the magnet for collecting magnetic fine particles, the bottom of the cleaning tank needs to be configured so as not to act as a magnet for collecting magnetic fine particles.

[0014]

As described above, according to the present invention,
The photosensitive material of the cleaning target having the photosensitive material having the pattern formed between the insulating film formed on the surface of the substrate and the metal film formation of the magnetic material is removed by the organic solution and the ultrasonic vibration action. In the ultrasonic cleaner, a magnet for collecting magnetic fine particles, which is provided close to the metal film formation of the magnetic material and is immersed in the organic solution in the cleaning tank, is used. The scattered fragments of the metal film of the magnetic substance are attracted and collected.

Therefore, the scattered metal fragments do not come into contact with the object to be cleaned and do not damage the object to be cleaned, and it is possible to avoid impairing the insulating property of the insulating film of the object to be cleaned.

[Brief description of drawings]

FIG. 1 is a sectional front view showing a first embodiment of the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is a sectional front view showing a second embodiment of the present invention.

FIG. 4 is a plan view of FIG.

FIG. 5 is an enlarged sectional front view showing an example of an object to be cleaned.

FIG. 6 is a sectional front view schematically showing a conventional ultrasonic cleaner.

[Explanation of symbols]

a Cleaning object 1 substrate 2 insulating film 3 Photosensitive material 4 Metallic metal film formation 5 cleaning tank 6 Organic solution 7 Magnets for collecting magnetic particles

Claims (3)

(57) [Claims] 1. A photosensitive material having an insulating film and a pattern formed on the surface of a substrate in order from the bottom and a metal film of a magnetic material are laminated on the photosensitive material to be cleaned. In an ultrasonic cleaning device that removes by action, the substrate can be dipped in the organic solution so that the metal film is directed upward, and the metal film can be installed on the magnetic material of the installed substrate. An ultrasonic cleaner comprising a magnet for collecting magnetic fine particles which is provided so as to approach from above and is immersed in an organic solution in a cleaning tank. 2. The ultrasonic cleaning device according to claim 1, wherein the magnet for collecting the magnetic fine particles, which is installed in the cleaning tank, is located immediately above the object to be cleaned. 3. The ultrasonic cleaner according to claim 1, wherein a part of the cleaning tank excluding the bottom part is a magnet for collecting magnetic fine particles.