JP3471479B2 - Plate storage tool and cleaning device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique relating to cleaning of a plate-like body such as a glass thin plate or a film substrate, which is a constituent element of a liquid crystal display, and more particularly to cracking of the plate-like body or displacement due to cleaning / transport The present invention relates to a storage tool for a plate-like object used for preventing the above-mentioned problem and a cleaning device for cleaning the plate-like object using the storage tool.

[0002]

2. Description of the Related Art For example, when cleaning a thin glass plate or a film substrate (hereinafter referred to as a work) that constitutes a liquid crystal display (LCD) of an information processing apparatus, conventionally, a dedicated jig is mainly used to clean the four corners of the work. A batch-type cleaning method is adopted in which a clip is made and this is immersed in a cleaning solution. On the other hand, when performing mechanical cleaning, a "single-wafer cleaning apparatus" that cleans the works one by one is used.

This type of single-wafer cleaning apparatus comprises a transfer mechanism for transferring a work and a cleaning tank filled with a cleaning liquid for cleaning the work being transferred. FIG. 6 is a configuration diagram of a main part of a transfer mechanism in a conventional single-wafer cleaning apparatus, and shows an arrangement state of a pressing loader 61 and a transfer loader 62 that rotate relatively in opposite directions. At the time of cleaning, the work 60 is sandwiched between these loaders 61 and 62, and the loaders 61 and 62 are rotationally driven by a driving means (not shown). As a result, the individual works are transported in the horizontal direction by the frictional force and the driving force of the loaders 61 and 62. It is normal to use detergent mixed with detergent,
In some cases, no detergent is used. Further, ultrasonic cleaning may be performed by disposing an ultrasonic source at a predetermined portion of the cleaning tank. After the cleaning, the worker transfers the work whose four corners are clipped to the drying device to perform a predetermined drying work.

[0004]

As described above, in the conventional batch type cleaning, since only the four corners of the work are clipped by using the dedicated jig, the positional deviation is likely to occur during the cleaning. If the glass plate is a glass plate, it may not be able to support its weight and may be dropped. Further, when the cleaning is performed using the single-wafer cleaning device, since the thickness of the work is considerably thin, as shown by the broken line in FIG. 6, bending occurs during cleaning or during transportation. For example, in the case of a glass plate having a thickness of about 0.5 mm, a bending of about 5 mm occurs, and it may be damaged during the work. Further, in the single-wafer cleaning apparatus, since the work is conveyed in the horizontal direction for cleaning, there is a problem that water accumulates on the surface of the work. Regarding the transfer after cleaning, it is very difficult to transfer to the drying device without recontamination because the only part that the operator can directly touch is the clip part.

In view of the above problems, an object of the present invention is to provide a technique which is useful for preventing cracks and displacement of a work, water retention, or recontamination during transportation, cleaning, or transportation. To do.

[0006]

DISCLOSURE OF THE INVENTION The present invention provides a storage tool used for transporting and cleaning a work. This storage tool has a frame body that forms a storage space for the work with a recess for holding the peripheral edge of the work and an opening for exposing a surface portion other than the peripheral edge, and an elastic member having a U-shaped cross section. immediately whether <br/> et made, the guide hole is formed in the work to the receiving space at least one of the outer end portion of the frame body, the elastic
The jig stores the recess of the elastic jig in the guide hole.
It is fitted toward the space side to close the guide hole,
It is configured to hold the work in the recess of the elastic jig.
It is characterized by

Further, the frame is formed with at least one hole or groove for connecting a predetermined portion of the inner end of the frame with the outer end of the frame. The hole or groove is formed at a predetermined tilt angle in the vertical direction with respect to the predetermined portion of the inner end portion, for example, at a tilt angle in the range of 0 to 90 degrees with respect to a plane including the predetermined portion. preferable.

The present invention also provides a cleaning apparatus used for cleaning a work. This cleaning device is an improvement of the conventional single-wafer cleaning device, and brings the transporting mechanism for transporting the storage tool of the present invention into contact with the exposed surface of the workpiece mounted on the storage tool being transported and the cleaning liquid. And means.
The transport mechanism has at least a pair of brush rollers that rotate in opposite directions relative to each other with the storage device facing each other, and a drive unit that drives each brush roller, and is attached to the storage device by these brush rollers. Clean the exposed surface of the work.

[0009]

The storage tool of the present invention guides the work through the guide hole formed at the outer end of the frame and stores the work in the storage space. At this time, the peripheral edge portion of the plate-shaped body is sandwiched by the concave portions of the frame body, and the surface portion other than the peripheral edge portion is exposed from the opening surrounded by the frame body. This exposed surface is the target site for cleaning and drying. When the exposed surface of the work is dipped in the cleaning liquid, the cleaning liquid may stay, and this staying liquid is introduced from the inner end of the frame to the outer end of the frame through the hole or groove. That is, it is excluded from the exposed surface of the work. When the holes or grooves are formed at a predetermined inclination angle in the vertical direction, the retained liquid is naturally guided to the outer end along the inclination, so compared to the case where the holes or the like are formed in parallel, Elimination of stagnant liquid becomes easier.

When the work stored in the storage tool is washed using the cleaning apparatus of the present invention, that is, the single-wafer cleaning apparatus, the pair of brush rollers driven by the driving means is guided by, for example, a carrier. Rotate relatively while sandwiching the storage tool that is in contact with the cleaning liquid in the cleaning tank. As a result, the exposed surface of the work exposed from the storage tool is washed. After the cleaning, the work can be continued without touching the exposed surface (cleaning surface) by performing the subsequent work while the work is stored in the storage tool, for example, the transfer work to the drying device.

[0011]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a plan view of a storage tool according to an embodiment of the present invention, and FIG. 2 is a side view thereof. This storage tool 1
Is constructed by joining the back surfaces of a pair of frame-shaped hollow frames 10 and 11. The thickness of the individual hollow frames 10 and 11 may be arbitrary. Although the material may be arbitrary, SUS steel is used in this embodiment.

Each of the hollowed-out frames 10 and 11 has a predetermined frame width, and its opening portions (hollowed-out portions) 10a and 11a.
Are formed in the same shape as the surface of the workpiece to be cleaned, that is, the surface of the peripheral portion excluding the dead zone. In addition, as shown in the drawing, the openings 10a, 11 of the hollow frames 10, 11 are formed.
The front side end near a is formed in a tapered shape, and the rear upper and lower ends have a stepped portion 1 having a thickness of about ½ of the thickness of the work.
0b and 11b are formed. These steps 10b, 1
The width of 1b is slightly shorter than the corresponding frame width on the front side, and at least the contact surface of the peripheral portion of the work is formed on the inner end side of the cutout frames 10 and 11. Steps are removed from the left and right ends of the rear surface of the hollowed-out frames 10 and 11 to form guide holes for the work, and a part of the frame width is cut out to form work take-out ports 10c and 11c. There is. Further, a plurality of grooves 10d, 11d for removing air or water are formed at the top, bottom, left and right ends of the back surface. Although the number of these grooves 10d and 11d is arbitrary, it is preferable that the number of grooves 10d and 11d is large, and it is preferable that the grooves are formed so as to be uniform at each side end.

The hollow frames 10 and 11 having such a shape
When the back surfaces are joined together, a recess corresponding to the thickness of the work is formed on the inner end side, and the work storage space 12 is formed as a whole. Further, work guide holes 13 are formed at the left and right ends, and the grooves 10d and 11d act as holes as shown in the drawing.

At the time of use, the work is inserted into the storage space 12 through the guide hole 13 and, as shown in the front view of FIG. 3A and the step view of FIG. 3B, an elastic jig 20 having a U-shaped cross section. Is fitted into the frame body from the left and right ends to close the guide hole 13. As a result, the peripheral portion of the work is clamped by the recess formed in the storage tool 1, while the surface portion other than the peripheral portion has the opening 10
It is exposed from a and 11a. When the guide hole 13 is closed by the elastic jig 20, the entire peripheral portion of the work is supported by the storage tool 1, so that the work is prevented from dropping or bending due to the conventional four-point support.

For cleaning, carrying and drying, a work storage tool 1
Perform in the state of being stored in. The cleaning may be batch type or mechanical type. The mechanical cleaning will be described later. The retained liquid that has accumulated on the exposed surface of the work during or after cleaning is guided to the outer end through the grooves 10d and 11d,
Easily excluded to the outside. After cleaning, the hollow frame 10,
The portion 11 is transferred to a drying device and dried there. After the completion of drying, the elastic jig 20 is removed and the work is taken out from the take-out ports 10c and 11c. In this way, the positional deviation of the work is eliminated, and handling such as transfer work becomes extremely easy. Further, the surface of the cleaned work is not re-contaminated, and the conventional problem of this kind is solved. In the above example, the grooves 10d and 11d are formed for draining air or water, but holes may be formed in the individual hollow frames 10 and 11 from the beginning. FIG. 4 shows an arrangement example of such holes.

FIG. 4A shows an example in which holes 10e and 11e are formed parallel to the surface to be cleaned of the work, and FIG. 4B shows an example in which the holes are formed in a tapered shape with a predetermined inclination angle. In the former case, the processing is relatively easy, and in the latter case, the cleaning liquid staying on the surface of the workpiece after cleaning is naturally guided toward the outer end, so that the remaining water (cleaning liquid) can be removed more easily. It has the remarkable effect of becoming.

Next, a single wafer cleaning apparatus for cleaning the work stored in the storage tool 1 will be described. As shown in FIG. 5, this single-wafer cleaning apparatus has a pressing loader 5
A plurality of pairs of 1 and the transport loader 52 are arranged in parallel in the transport direction at predetermined intervals. Reference numeral 53 is a cleaning tank,
An ultrasonic wave irradiation plate 53a is arranged at the bottom of the ultrasonic wave irradiation plate 53a. A cleaning liquid 54 is filled in the cleaning tank 53. The cleaning liquid 54 has a water level of at least the transport loader 52.
Is filled until it covers. The pressing loader 51 and the transfer loader 52 are, for example, so-called brush rollers having a brush or a similar material mounted on the surface thereof. Insert the tool 1. Then, the storage tool 1 is conveyed in the direction of the arrow by relatively rotating in the reverse direction. At that time, ultrasonic waves are radiated from the ultrasonic wave irradiation plate 53a, and ultrasonic cleaning and brush cleaning are used in combination. As a result, even if the storage tool 1 and the exposed surface of the workpiece to be cleaned have irregularities,
The surface to be cleaned is cleaned well.

When the storage tool 1 is leveled and washed as shown in the figure, water may collect on the upper surface side and air may enter between the lower surface side and the water surface. For this purpose, it is dealt with by discharging it to the outside through the drainage groove or hole. Therefore, the unevenness of drying due to the accumulated water does not occur.

Although the present embodiment is as described above, the storage tool of the present invention is not necessarily limited to the configuration of the above embodiment. For example, in the present embodiment, an example in which a pair of hollow frames 10 and 11 are joined has been described, but they may be integrally formed of resin or steel, and the outlets 10c and 11c are also shown in FIG. In addition to the configuration provided at a plurality of locations as shown in FIG. 5, the configuration may be formed at any one of the side end portions.

[0020]

As is apparent from the above description, according to the storage tool of the present invention, it is possible to carry, wash, and transfer with the peripheral portion of the plate-shaped member held, so that the thin plate-shaped member can be used. Even if there is, it is effective in preventing cracks, misalignment, or recontamination after cleaning. In addition, since it has a guide hole to the internal storage space, it is easy to attach and detach the plate-shaped body, and at least one hole or groove is formed, so that the plate-shaped body can be removed regardless of the cleaning method. It has the effect of removing accumulated water from the surface of the body. Further, according to the cleaning device of the present invention, it is possible to perform single-wafer cleaning in the state where the plate-shaped body is stored in the storage tool, and since the cleaning is performed by the brush roller,
Even if the surface to be cleaned has irregularities, it is possible to easily remove stains. In this single-wafer cleaning, the cleaning liquid or air is likely to stay on the surface of the plate-like body, but by combining it with the storage tool of the present invention, it is possible to eliminate the adverse effect.

[Brief description of drawings]

FIG. 1 is a front view of a storage tool according to an embodiment of the present invention.

FIG. 2 is a side view of the storage tool according to the present embodiment.

3A is a front view of an elastic jig for closing the guide hole after housing the work, and FIG. 3B is a side view thereof.

FIG. 4A is an example in which a hole parallel to the surface to be cleaned of the work is formed, and FIG. 4B is an example in which the hole is formed in a tapered shape with a predetermined inclination angle.

FIG. 5 is an explanatory diagram showing an example of a cleaning method when cleaning is performed using the storage tool and the single-wafer cleaning device of the present embodiment.

FIG. 6 is an explanatory view showing bending when cleaning is performed by a conventional single-wafer cleaning apparatus.

[Explanation of symbols]

1 storage equipment 10,11 hollow frame 10a, 11a openings 10b, 11b steps 10c, 11c outlet 10d, 11d groove 10e, 10f, 11e, 11f holes 12 storage space 13 Guide hole 20 Elastic jig 51 Presser loader 52 Conveyor loader

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B08B 11/02-11/04

Claims (4)

(57) [Claims] 1. A frame body forming a storage space for the plate-like body by a recess for holding the peripheral edge of the plate-like body and an opening for exposing a surface portion other than the peripheral edge, and a U-shaped cross section. consists of a Jo resilient jig, and at least one guide hole of the plate-like body into the accommodating space in the outer end portion to form a frame body, the resilient jig, the guide hole, wherein The recess of the elastic jig
Fits toward the storage space side to close the guide hole
Then, hold the plate-shaped body in the recess of the elastic jig.
A plate-shaped storage tool characterized by being configured . 2. A frame body which forms a storage space for the plate-like body by a recess for holding the peripheral edge of the plate-like body and an opening for exposing a surface portion other than the peripheral edge, the frame comprising: The body is formed with at least one hole that connects a predetermined portion of the inner end of the body to the outer end of the frame, and the hole has a predetermined inclination angle in the vertical direction with respect to the predetermined portion.
A plate-shaped storage tool characterized by being formed with a degree . 3. A frame body which forms a storage space for the plate-like body by a recess for holding the peripheral edge of the plate-like body and an opening for exposing a surface portion other than the peripheral edge, the frame comprising: The body is formed with at least one groove that connects a predetermined portion of the inner end of the body to the outer end of the frame, and the groove has a predetermined inclination angle in the vertical direction with respect to the predetermined portion.
A plate-shaped storage tool characterized by being formed with a degree . 4. A transport mechanism for transporting the plate-shaped storage tool according to any one of claims 1 to 3 , an exposed surface of the plate-shaped body mounted on the storage tool being transported, and a cleaning liquid. The transport mechanism includes at least a pair of brush rollers whose opposing portions rotate in opposite directions with the storage tool sandwiched therebetween, and a drive unit which drives each brush roller. Cleaning device.