JP3461382B2 - Objective lens scanning microscope - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope that can be used for visual inspection of large wafers and large liquid crystal substrates, and more specifically, an objective lens scanning type in which an objective lens can move horizontally on a sample in one axial direction. Regarding the microscope.

[0002]

2. Description of the Related Art A microscope in which an objective lens can move in a horizontal uniaxial direction (for example, the X-axis direction) on a sample is used in the X-axis of a stage on which a large substrate or the like is placed because the objective lens moves in the X-axis direction. There is an advantage that movement in the direction is unnecessary. Furthermore, if the objective lens is movable in two directions, the X-axis direction and the Y-axis direction, the stage movement is completely unnecessary. As described above, the microscope in which the objective lens is moved instead of moving the stage has an advantage that the entire apparatus can be downsized.

For example, in a stage movement type microscope,
In order to inspect a liquid crystal substrate of 0 × 465 mm,
The size of the entire device is required to be at least (2 × size of liquid crystal substrate) = 760 × 930 mm. On the other hand, if the microscope is capable of scanning the objective lens biaxially, the size of the device can be theoretically reduced to 360 × 465 mm.

However, the method of scanning the objective lens is
Although it is effective for a laser scanning microscope that irradiates a spot on a sample and a microscope having an extremely narrow field of view, it has the following drawbacks when applied to a microscope designed to focus on a wide field of view.

FIG. 6 shows the state of light flux until the intermediate images a and a'corresponding to the point a on the optical axis on the sample and the point b distant from the optical axis are connected. In the figure, the optical path diagram shown by the solid line shows the optical path diagram of the light emitted from the point (a) on the objective optical axis, and the optical path diagram shown by the broken line shows the point on the sample at the position deviated from the optical axis by d ( ) Shows the optical path diagram of the light emitted from. Comparing these two optical path diagrams, it can be seen that the luminous flux in the afocal optical system is expanded even when an infinitely designed lens is used as the objective lens. Therefore, even if an afocal optical system is formed between the objective lens and the imaging lens, if the distance between the two becomes long, the light flux at point (b) spreads significantly with respect to the light flux at point (b). The light flux of does not enter the imaging lens and an intermediate image cannot be obtained.

This is schematically shown in FIG. 7 (a).
It is (b). Even if the light beam from point (b) enters the imaging lens when the distance between the objective lens and the imaging lens is La, as shown in FIG. If the distance is increased to Lb, an intermediate image cannot be secured unless the imaging lens has a larger diameter.

For example, even if a general infinity designed objective lens and an imaging lens with a diameter of about 50 mm are used, the objective-
The distance between the imaging lenses is only about 200 mm, which greatly limits the scanning distance of the objective lens.

Further, since the height of the light beam increases even within the movable range of the objective lens, it is necessary to devise an aberration for the imaging lens, which makes the design extremely difficult. Various proposals have been made as measures for solving the above-mentioned problems associated with the increase in the aperture of the imaging lens.

For example, in US Pat. No. 4,744,642, FIG. 8 shows an optical path between an objective lens and an imaging lens.
A relay optical system R similar to the zoom shown in is provided, and the distance between the lenses L _{1 to} L ₄ is changed as the distance D increases,
An optical system is disclosed which is designed to eliminate the problems associated with the increase in the distance D.

In Japanese Patent Laid-Open No. 5-127088, the lenses L1 and L2 and the lenses L3 and L4 of the relay optical system R shown in FIG.
There is disclosed an afocal optical system that attempts to cope with a change in the distance D.

[0011]

However, when the relay optical system R shown in the above-mentioned document is used by being provided between the objective lens and the imaging lens, the relay of the image and the pupil is required, and the lens design is There are problems such as difficulty and mechanical design for changing the lens position.

The present invention has been made in view of the above circumstances, and has a structure in which lens design and mechanical design are easy, the size of an intermediate image, the brightness of an image can be secured, and the size can be further reduced. The objective is to provide an objective lens scanning microscope.

[0013]

In order to achieve the above object, the objective lens scanning microscope of the present invention is a scanning microscope for observing a sample image by scanning an objective lens designed at infinity with respect to the observation surface of the sample. In, the infinity design objective lens ,
The light from the objective lens designed for infinity is used as the observation surface of the sample.
Reflective member that reflects in a direction parallel to the above, and the infinity design
An objective unit integrally incorporating a first imaging lens that forms an image of light from the objective lens as a primary image, and an objective unit moving unit that moves the objective unit along the observation surface of the sample, A second imaging lens for forming the primary image of the first imaging lens as a secondary image, and an eyepiece lens.
An observation unit in which a lens or a TV camera is fixedly arranged at a predetermined position, and a trapezoidal mirror unit that folds back an observation optical path between the first imaging lens and the second imaging lens.
Trapezoidal mirror unit moving means for moving the trapezoidal mirror unit along the sample surface, and the interval between the first imaging lens and the second imaging lens is constant, the said objective unit With a trapezoidal mirror unit
2: characterized by comprising control means for driving in the same direction, at a rate of 1.

[0014] Further, the said objective unit moving means and the trapezoidal mirror unit movement means, said objective unit and a guide for guiding in parallel respectively along the specimen observation plane trapezoidal mirror unit, said objective unit and a trapezoid mirror unit And a driving mechanism including a pulse motor for individually driving and controlling the screw rods, and the moving amount of the trapezoidal mirror unit is 1 / the moving amount of the objective unit. The pulse motor is controlled so that the movement amount is 2.

The objective unit corresponding to the objective lens scanning microscope of the present invention is an objective lens designed for infinity, and an emission optical path arranged on the optical axis of the objective lens is parallel to the specimen observation surface. Deflection mirror for guiding the
The image forming lens is integrally incorporated, and the objective lens is movable with respect to the objective unit in a direction perpendicular to the specimen observation plane. Further, the objective unit is split into transmitted light path and the reflection light path on the optical axis of the objective lens Ha
It is equipped with a mirror and an autofocus optical system is connected to the transmission optical path. Further, the objective unit is characterized in that it comprises a half mirror on the optical axis of the objective lens that divides into a reflected light path and a transmitted light path, and an illumination optical system is connected to the transmitted light path. In addition, the objective unit,
A half mirror is provided on the optical axis of the objective lens to divide it into a reflected light path and a transmitted light path, a polarizer is arranged on the transmitted light path side, an analyzer is arranged on the reflected light path side, and a differentiation is made on the objective lens side. > An interference prism is arranged, and an illumination optical system is further connected to the transmission optical path via the polarizer.

Further, the observation unit corresponding to the objective lens scanning microscope of the present invention illuminates the sample through the trapezoidal mirror unit and the objective lens between the second imaging lens and the eyepiece. It is characterized in that an illumination optical system is connected. The observation unit is the trapezoid
The optical path between the mirror unit and the second imaging lens is deflected in the direction orthogonal to the moving direction of the objective unit.
And a mirror . In addition, the trapezoid
The image pickup unit includes a first imaging lens between a pair of mirrors.
To the second imaging lens
A moving image forming lens for transmitting is arranged, and the moving image forming lens is
Move the same distance in the same direction as the trapezoidal mirror unit
It is characterized by

[0017]

According to the present invention, when the objective unit is moved along the specimen observing surface, the specimen image captured by this objective lens is moved by the first imaging lens integrated into the objective unit to the first imaging lens. An image is formed as a next image. Further, the secondary image is formed on the primary image by the second imaging lens that is integrally incorporated in the observation unit via the trapezoidal mirror unit.

On the other hand, the movement amount of the trapezoidal mirror unit is controlled according to the movement of the objective unit so that the distance between the first imaging lens and the second imaging lens becomes constant. At this time, since the second imaging lens is integrally incorporated in the stationary observation unit,
By moving the trapezoidal mirror unit by 1/2, the distance between the first imaging lens and the second imaging lens is always maintained at a constant distance regardless of the scanning of the objective lens.

That is, the diameter of the light beam incident on the second imaging lens provided at the fixed position does not theoretically change even if the objective lens moves. Therefore, the scanning distance of the objective lens is not limited by the diameter of the imaging lens.

Further, even when the objective unit and the folding mirror unit move, the distance between the first imaging lens and the second imaging lens is always maintained at a constant distance. Therefore, the lens design is easy. Further, a mechanism for moving the objective unit and the folding mirror unit at a ratio of 2: 1 is required, but a mechanism for moving individual lenses so as to eliminate aberrations and the like in accordance with scanning of the objective lens is designed. Compared with, the mechanical design is greatly simplified.

[0021]

When the objective unit moves along the specimen observation surface, the trapezoidal mirror unit moves in the same direction so as to keep the distance between the first image forming lens and the second image forming lens constant, and the trapezoid movement Yuizo lens in the mirror unit is moved by the same distance as the movement amount of trapezoidal mirror unit, the moving Yuizo lens approaches the secondary image of the first imaging lens, the light beam incident to the mobile Yuizo lens The diameter is constant and small regardless of the movement of the objective lens.

According to the present invention, the light source image is incident via the illumination system optically connected to the objective unit. A light source image that is linearly polarized when passing through a polarizer is projected onto a sample through a half mirror and an objective lens. The light beam that has entered the objective lens from the sample passes through the objective lens, is reflected by the half mirror , and the common vibration component is extracted by the analyzer and interferes to form a color contrast, which then enters the first imaging lens. .
By providing the illumination optical system and the differential interference unit in the objective unit in this way, the optical elements interposed between the differential interference unit and the objective lens can be minimized, and differential interference observation without deterioration of polarization characteristics is realized. it can.

According to the present invention, the stage on which the sample is placed can be moved in the direction orthogonal to the scanning direction of the objective lens, and two-dimensional scanning can be performed by combining the scanning of the objective lens and the stage. .

[0025]

EXAMPLES Examples of the present invention will be described below. FIG. 1 is a configuration diagram of an objective lens scanning microscope according to the first embodiment of the present invention. The objective lens scanning microscope of the present embodiment includes a movable objective unit 1 which is arranged above a stage on which a sample S made of a liquid crystal substrate is placed and which is movable in a uniaxial direction parallel to the stage surface. The movable objective unit 1 is provided with a revolver 2 capable of attaching several objective lenses rotatably on a revo attachment surface formed at a lower end thereof. The revolver 2 is connected to an electric rotation mechanism (not shown) that rotates the revolver 2 so that an arbitrary objective lens 3 is inserted into the optical axis, and is used for focusing the objective lens 3 inserted into the optical axis. Further, it is connected to an electric vertical movement mechanism (not shown) for moving the revolver 2 up and down with respect to the unit 1. It is assumed that the objective lens 3 is an objective lens designed at infinity in which focusing can be performed by moving the objective lens and the primary image position does not change even if the objective lens moves up and down.

A first mirror 4 consisting of a half mirror is arranged on the optical axis of the objective lens 3 in the movable objective unit 1 in a state of being inclined by 45 degrees with respect to the optical axis. In this embodiment, the optical axis of the objective lens 3 inserted in the optical axis is assumed to be perpendicular to the stage surface (sample plane). Of the light emitted from the objective lens 3, the light flux reflected by the first mirror 4 has an optical axis in the first direction parallel to the stage surface.

A first imaging lens 5 is arranged on the reflection-side optical axis of the first mirror 4 as seen from the objective lens 3 side, and
Another optical element 6 such as a mirror is arranged on the transmission-side optical axis of the mirror 4. The first image forming lens 5 forms a primary image 7 at a predetermined position on the bending optical axis described later. The optical element 6 guides the light flux of the sample image to the optical path other than the eyepiece lens system. For example, an AF (autofocus) optical system or the like is attached to this optical path as needed.

The movable objective unit 1 is mounted with the revolver 2 (objective lens 3) described above (however, it can be rotated and moved up and down), and the first mirror 4 and the first imaging lens 5 are fixed. .

A trapezoidal mirror unit 8 is provided movably in the first direction which is the same as the moving direction of the moving objective unit 1 on the folding optical axis and behind the primary image. A trapezoidal mirror unit 8 is arranged. The trapezoidal mirror unit 8 includes a second mirror 8-1 that bends the bending optical axis upward by 90 degrees, which is the second direction, and an optical axis that is bent by the second mirror 8-1 in the second direction. And a third mirror 8-2 that is turned back at 90 degrees in the same direction. The second mirror 8-1 and the third mirror 8-2 are fixed to the unit 8. In this specification, the first
The mirror 4 to the second mirror 8-1 are referred to as the bent optical axis, and the optical axis from the third mirror 8-2 to the eyepiece lens described later is referred to as the folded optical axis. The length of the perpendicular line between the bent optical axis and the folded optical axis that are parallel to each other may be an appropriate value in terms of design.

The second imaging lens 9 is fixedly installed at a predetermined position on the folding optical axis that does not interfere with the movement of the trapezoidal mirror unit 8 toward the most objective lens side. The focal length of the second imaging lens 9 is determined based on the relationship between the optical path length from the primary image 7 to the second imaging lens 9 and the image magnification, and here, the second imaging lens 9 is used. The secondary image 16 is obtained at the focal position of. Further, in the present embodiment, the magnification is set to 1 in order to use a general eyepiece lens as it is. An eyepiece lens 10 is provided at a predetermined position on the folding optical axis.

The optical system from the second imaging lens 9 to the eyepiece lens 10 is provided in the fixed unit 20. The light projecting unit 11 is provided for the fixed unit 20. The light projecting unit 11 includes a light source 12, a condensing lens 13 that condenses light emitted from the light source 12, a projection lens 14 that projects the light source light condensed by the condensing lens 13 onto a pupil position of the objective lens 3, It is composed of a half mirror 15 that folds back the light source image that has passed through the projection lens 14 and is incident on the optical axis.

Here, the moving objective unit 1 and the trapezoidal mirror unit 8 are provided with the interlocking mechanism shown in FIG. 2 so as to move in the same direction at a ratio of 2: 1. The interlocking mechanism includes a guide rail 21 extending on the stage in the first direction, and the movable objective unit 1 and the trapezoidal mirror unit 8 are attached to the guide rail 21 so as to be movable in the first direction. ing. The moving objective unit 1 and the trapezoidal mirror unit 8 are moved by ball screws.
That is, the moving objective unit 1 has a ball screw nut 2
2 is fixed with the central axis of the hole in the first direction, and the nut 22 has a screw rod 2 of a ball screw.
3 is screwed in. Similarly, the trapezoidal mirror unit 8 is also fixed with the nut 24, and the screw rod 25 is screwed into the nut 24. Each screw rod 2
Pulse motors 26 and 27 are provided at one ends of the screw rods 3 and 25, respectively.
It is designed to give rotational force to 5. Two motors 2
6, 27 is a controller 28 to a motor driver 29
The rotation amount is independently controlled via a and 29b. Specifically, the controller 28 gives M pulses to the pulse motor 26 corresponding to the moving objective unit 1 while the moving objective unit 1 is moving (while the objective lens is being scanned), while the pulse corresponding to the trapezoidal mirror unit 8 is given. The motor 27 is given M / 2 pulses. The ball screws of the moving objective unit 1 and the trapezoidal mirror unit 8 have the same pitch, and the moving distances are the same for a certain number of pulses.

Next, as an operation of the present embodiment configured as described above, a case of scanning the sample S from point a to point a'will be described. When the moving objective unit 1 is at the point a, the trapezoidal mirror unit 8 is assumed to be at the point b, which is 270 mm away from the point a in the first direction. When the objective unit reaches the point a ', the trapezoidal mirror unit 8 moves to the point b'. When the point a moves to a ', the point b moves 190 mm and moves to the point b' (480 mm point).

The light source image of the light source 12 of the light projecting unit 11 is
It is reflected to the second imaging lens 9 side by the half mirror 15 inserted on the folding optical axis. The light source image that has passed through the second imaging lens 9 is incident on the half mirror 4 in the moving objective unit 1 via the trapezoidal mirror unit 8 and the first imaging lens 5, and is directed to the sample side by the half mirror 4. Is reflected.
As a result, the light source image is projected near the pupil of the objective lens.

In order to adjust the focus of the objective lens 3 to the point a of the sample S, the revolver 2 is moved by a vertical movement mechanism (not shown).
Move up and down. When the objective lens 3 is in focus, the distance from the first imaging lens 5 to the position where the primary image 7 is formed is always constant due to the nature of the objective lens at infinity.

Next, a pulse signal is sent from the controller 28 to the motor drivers 29a and 29b at a ratio of 2: 1. For example, if n pulses are required before the moving objective unit 1 moves from the point a to the point a ′, the controller 2
Reference numeral 8 gives a pulse signal of n pulses to the motor driver 29a in a constant cycle during T time. When the pulse motor 26 rotates according to the number of pulses, the screw rod 23 rotates and the nut 2 screwed onto the rod 23.
The propulsive force in the first direction acts on 2. Since the movement of the screw rod 23 in the first direction is restricted, the moving objective unit 1 to which the nut 22 is fixed is guided by the guide rail 21 and moves in the first direction by 380 mm.

Further, the controller 28 supplies a pulse signal with a pulse number of n / 2 to the other motor driver 29b during the same T time. Another pulse motor 27 rotates in accordance with the number of pulses, and the trapezoidal mirror unit 8 is guided by the guide rail 21 and moves 190 mm (380/2) in the first direction in the same manner as described above.

Since the position of the primary image 7 is constant if the objective lens 3 is in focus, the position of the primary image 7 is the same when the moving objective unit 1 moves in the first direction. Move in the first direction by a distance. If the trapezoidal mirror unit 8 is fixed, the distance from the primary image 7 to the second imaging lens 9 changes, so that the light beam diameter in the second imaging lens 9 changes greatly. However, in the present embodiment, the trapezoidal mirror unit 8 moves in the same direction at a rate of ½ of the moving amount of the moving objective unit 1, so that the primary image 7 and the second image 7 are moved during the moving period of the moving objective unit 1. The distance to the imaging lens 9 does not change, and therefore the size of the light beam diameter at the position of the second imaging lens 9 is also constant.

The light flux that has passed through the second imaging lens 9 forms a secondary image 16 at a predetermined position on the return optical axis, and the image is observed from the eyepiece lens 10. As described above, according to the present embodiment, both the moving objective unit 1 and the trapezoidal mirror unit 8 can be moved in the first direction, which is the scanning direction of the objective lens 3, and when the moving objective unit 1 moves, only a half distance can be obtained at the same time. Since the trapezoidal mirror unit 8 is moved in the same direction, even if the scanning stroke of the objective lens 3 is increased, the second imaging lens 9 is used as compared with the case where the afocal system immediately after the infinity objective lens is used. The diameter of can be reduced.

Further, according to this embodiment, since the distance between the first and second imaging lenses 5 and 9 is constant, there is an advantage that the lens design is easy. The interlocking mechanism, which is the structural part of this embodiment, may be designed to move the moving objective unit 1 and the trapezoidal mirror unit 8 on the same guide rail at a ratio of 2: 1. It is easier than mechanical design.

Further, according to the present embodiment, since the second image forming lens 9 has a magnification of 1, a normal eyepiece lens can be used. Further, since the light projecting unit 11 is provided at the fixed position, there is an advantage that the burden on the moving objective unit 1 is small and the rigidity of the mechanism portion for moving the moving objective unit 1 is not required.

It should be noted that TV observation becomes possible by installing a TV camera on an optical path guided by the optical element 6 or on an optical path newly branched by installing a split prism at the position of the eyepiece lens 10.

When a finite design objective lens 3 is used, a microscope equipped with a mechanism for moving the stage up and down must be used. This is because the primary image position is changed above and below the objective lens by focusing.

Next, a second embodiment of the present invention will be described. FIG. 3 is a diagram showing the configuration of the objective lens scanning microscope according to the second example. The same parts as those in the first embodiment described above are designated by the same reference numerals to avoid redundant description.

The objective lens scanning microscope of the present embodiment has a moving objective unit 1 ', a light source, a condenser lens 13, a projection lens 14 and a light projecting unit 11' including a mirror 15, and
A differential interference unit including a polarizer 31, an analyzer 32, and a differential interference prism 40 is provided. The polarizer 31 and the mirror 15 are arranged on the transmission-side optical axis of the first mirror 4 as viewed from the objective lens side. An analyzer 32 is arranged on the reflection-side optical axis of the first mirror 4.

In this embodiment, the second optical axis is arranged on the folding optical axis.
The relay lens 33 for relaying the secondary image of the imaging lens 9 is provided. This is effective when you want to move the eyepiece position away from the sample.

As in the case of the first embodiment, an interlocking mechanism for interlocking the moving objective unit 1'and the trapezoidal mirror unit 8 in the first direction at a ratio of 2: 1 is provided.

In the present embodiment configured as described above, the light source image that has passed through the analyzer 31 is transmitted through the first mirror 4, passes through the objective lens 3, and is projected onto the sample S. The light flux from the sample S passes through the objective lens 3, is then reflected by the first mirror 4, passes through the analyzer 32, and is incident on the first imaging lens 5. The light flux that has passed through the first imaging lens 5 enters the relay lens 33 through the trapezoidal mirror unit 8 and the second imaging lens 9 and is relayed to the eyepiece lens.

According to the present embodiment as described above, the moving objective unit 1'and the trapezoidal mirror unit 8 are moved in the first direction at a ratio of 2: 1. Therefore, the above-described first embodiment is performed. The same effect as the example can be obtained. Moreover, since the light projecting unit 11 'and the differential interference unit are provided in the moving objective unit 1', the deterioration of the polarization characteristic is smaller and the contrast is smaller than that in the case where the light projecting unit is provided in the fixed unit as in the first embodiment. Good differential interference observation can be realized.

4 and 5 show modifications of the first and second embodiments, respectively. The same parts as those in the first and second embodiments are designated by the same reference numerals. The modified example shown in FIG.
The second imaging lens 9'is arranged between the second and third mirrors 8-1 and 8-2 in the trapezoidal mirror unit 8, and the second
The imaging lens 9'of the
It is configured to move in the same direction in the same direction. In addition,
A mechanism for moving the second imaging lens 9'as described above is not shown, but can be easily designed by those skilled in the art. In addition, a third optical axis is provided on the folding optical axis in the fixed unit.
The imaging lens 34 of is arranged.

According to the present embodiment as described above, the first imaging lens 5, the second imaging lens 9'and the third imaging lens 3 are formed.
Since the distance 4 does not change, the effects of the above-described respective embodiments can be obtained, and the distance between the primary image 7 and the second imaging lens 9'can be shortened, so that the second imaging lens 9'can be obtained. Also, the light beam diameter in the third imaging lens 34 can be reduced, and the increase in diameter of each of these imaging lenses can be prevented.

The modification shown in FIG. 5 is an example in which the optical system of the folding optical axis is changed. That is, a fourth mirror 35 that bends the folding optical axis in a direction orthogonal to the objective scanning direction (first direction) is provided between the third mirror 8-2 and the second imaging lens 9 on the folding optical axis. It is arranged. The second imaging lens 9 and the eyepiece lens 10 are arranged on the optical axis bent again by the fourth mirror 35.

According to such a modification, workability can be improved together with the stage moving direction. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the gist of the present invention.

[0054]

As described above in detail, according to the present invention, the lens design and the mechanical design are easy, and the size of the intermediate image can ensure the brightness of the image, and the size can be further reduced. An objective lens scanning microscope can be provided.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an objective lens scanning microscope according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of an interlocking mechanism provided in the objective-lens scanning microscope shown in FIG.

FIG. 3 is a configuration diagram of an objective lens scanning microscope according to a second embodiment of the present invention.

FIG. 4 is a diagram showing a modification of the first and second embodiments.

FIG. 5 is a diagram showing another modification of the first and second embodiments.

FIG. 6 is a diagram showing a light beam expansion state of an afocal optical system immediately after an infinity objective lens.

FIG. 7 is a diagram showing an increase in diameter of an imaging lens due to expansion of a light beam in an afocal optical system.

FIG. 8 is a configuration diagram of a microscope in which a relay optical system is inserted in a bending optical axis.

[Description of Reference Signs] 1, 1 '... Moving objective unit, 2 ... Revolver, 3 ... Objective lens, 4 ... First mirror ... 5 ... First imaging lens, 8
... Trapezoidal mirror unit, 8-1 ... Second mirror, 8-2
... third mirror, 9, 9 '... second imaging lens, 10 ...
Eyepiece lens, 11, 11 '... Projection unit, 21 ... Guide rail, 22, 24 ... Nut, 23, 25 ... Screw rod, 26, 27 ... Pulse motor, 28 ... Controller, 29a, 29b ... Motor driver, 31 ... Polarizer, 32 ... Analyzer, 34 ... Third imaging lens, 35 ... Fourth mirror.

Claims (9)

(57) [Claims] 1. A scanning microscope for observing a sample image by scanning an infinity-designed objective lens with respect to an observation surface of the sample, wherein the infinity-designed objective lens and light from the infinity-designed objective lens are supplied to the sample. Reflected in the direction parallel to the observation surface of
The light from the projecting member and the objective lens designed for infinity is first
An objective unit that integrally incorporates a first imaging lens for forming a next image, objective unit moving means for moving the objective unit along the observation surface of the specimen , and the first imaging lens A second image forming lens for forming a primary image as a secondary image, and an eyepiece lens or a TV camera.
And a trapezoidal mirror unit that folds back the observation optical path between the first imaging lens and the second imaging lens, and the trapezoidal mirror unit as a trapezoidal mirror unit moving means for moving, a distance between the first imaging lens and the second imaging lens is constant along the trapezoidal mirror and said objective unit
And over unit 2: an objective lens scanning microscope to a control means for driving in the same direction at a ratio of 1, and characterized by including the. 2. The objective unit moving means and the trapezoidal mirror unit moving means, guides for guiding the objective unit and the trapezoidal mirror unit in parallel along the specimen observation surface, and the objective unit and the trapezoidal mirror unit, respectively. A driving mechanism including a driving screw rod and a pulse motor for separately controlling the driving of these screw rods is provided, and the moving amount of the trapezoidal mirror unit is 1/2 the moving amount of the objective unit. The pulse motor is controlled so that
The objective lens scanning microscope described. 3. The objective unit, an objective lens designed at infinity, a deflection mirror arranged on the optical axis of the objective lens for guiding an emission optical path parallel to the sample observation surface, and the first coupling unit. 2. The objective lens scanning microscope according to claim 1, wherein an image lens is integrally incorporated, and the objective lens is movable with respect to the objective unit in a direction perpendicular to a sample observation surface. 4. The objective unit comprises a half mirror on the optical axis of the objective lens, which splits a reflected light path and a transmitted light path, and an autofocus optical system is connected to the transmitted light path. The objective lens scanning microscope described. 5. The objective unit according to claim 1, further comprising a half mirror on the optical axis of the objective lens, which splits a reflected light path and a transmitted light path, and an illumination optical system is connected to the transmitted light path. Objective lens scanning microscope. 6. The objective unit comprises a half mirror on the optical axis of the objective lens, which splits a reflected light path and a transmitted light path, a polarizer is arranged on the transmission light path side, and an analyzer is arranged on the reflection light path side. The objective lens scanning microscope according to claim 1, wherein a differential interference prism is arranged on the objective lens side, and an illumination optical system is further connected to the transmission optical path via the polarizer. 7. The observation unit is characterized in that an illumination optical system for illuminating the sample is connected between the second imaging lens and an eyepiece lens via the trapezoidal mirror unit and the objective lens. The objective lens scanning microscope according to claim 1. 8. The observation unit comprises a mirror for deflecting an optical path between the trapezoidal mirror unit and the second imaging lens in a direction orthogonal to a moving direction of the objective unit. The objective lens scanning microscope according to claim 1. 9. The trapezoidal mirror unit includes a moving image-forming lens for transmitting a primary image formed by the first image-forming lens to a second image-forming lens between a pair of mirrors. Then, the moving image forming lens is moved in the same direction as the trapezoidal mirror unit by the same distance.
The objective lens scanning microscope described.