JP3436663B2 - Wiring board manufacturing device and wire hooking device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring board manufacturing apparatus used for manufacturing a semiconductor device package, and a wire hanging apparatus for hanging a wire on a wire hanging plate used in the manufacturing apparatus.

[0002]

2. Description of the Related Art In a multi-layered semiconductor package, a via is formed to electrically connect a wiring pattern between layers. A wiring board with a via is provided as a wiring board in which a via is previously provided in the board. The purpose of the present invention is to make it available for manufacturing a multi-layer semiconductor package.

As a method of obtaining a wiring board with a via, the present applicant has previously sliced a ceramic columnar body obtained by arranging a large number of metal conductors in parallel with an axis with a predetermined thickness perpendicular to the axis. We proposed a method to obtain the
78580, JP-A-8-78581). When manufacturing a wiring board with vias based on ceramics, a number of thin metal wires were stood up in the container at predetermined intervals according to the arrangement of the vias, and a ceramic slurry was poured into the container to bury the thin metal wires. After manufacturing a green body, the green body is sintered to form a columnar body in which a metal conductor is embedded, and the columnar body is sliced at a predetermined thickness in a direction perpendicular to the axial direction of the metal conductor to form a via. Get the wiring board.

FIG. 20 shows a method of slicing the columnar body 5 to obtain a wiring board with a via. If the metal conductors are arranged in the columnar body 5 at predetermined intervals, the sliced body 6 of the wiring board in which the vias are embedded can be obtained only by slicing the columnar body 5. Therefore, the sliced body 6 is formed into the shape of the wiring board. A wiring board with a via is obtained by cutting. The obtained wiring board with vias can be used as a substrate that constitutes a multi-layer semiconductor package, and can also be used as a substrate of a semiconductor package that uses the wiring board as a base to form a multi-layered wiring pattern by a build-up method or the like. The substrate material of the wiring substrate 5 with vias is not limited to the ceramic material, and various plastic materials such as epoxy resin and other materials can be used.

[0005]

In the method of manufacturing the wiring board by slicing the columnar body as described above, it is necessary to arrange a large number of fine metal wires (metal conductors) in the container. Since the vias formed on the wiring board are arranged at extremely fine intervals such as 1 mm, it is necessary to efficiently and accurately arrange the fine metal wires in the actual manufacturing process. The present invention makes it possible to arrange a large number of thin metal wires with high precision and efficiency in the manufacture of such a wiring board with a via, and to manufacture a wiring board with a via easily. It is an object of the present invention to provide a device and a wire hanging device that can be easily used for wire hanging of a wire hanging plate used in this wiring board manufacturing device.

[0006]

The present invention has the following constitution in order to achieve the above object. That is, its axis and in parallel to a number of conductor wires are embedded columnar body according to the planar arrangement of the wiring board via to form a wiring board by a cut Dusko a predetermined thickness perpendicularly to the axis of the columnar body wire In a substrate manufacturing apparatus, as a mechanism for arranging the plurality of conducting wires in parallel with the axis of the columnar body, a plurality of wire hooks having a frame portion for supporting the thin metal wires to be the conducting wires by winding them in parallel at a predetermined interval. It is characterized by comprising a plate and a supporting means for aligning and juxtaposing the plurality of wire hanging plates. Also, on the wire hanging plate ,
A groove for positioning and supporting the thin metal wire is formed. Further, a spacer for arranging the thin metal wires at a predetermined interval is arranged between the plurality of wire hanging plates arranged side by side. Further, a recess for arranging a rod body separate from the thin metal wire is formed in an inner space formed by juxtaposing the wire hanging plates in the frame portion of the wire hanging plate. Further, on the outer surface of the frame portion of the wire hooking plates, characterized in that the locking member cut and raised the locking piece for locking the metal thin wire is attached. Further, the pedestal juxtaposing Wa ear hanging plate as the supporting <br/> lifting means is provided to form a pillar-shaped body by combining from both sides of supported metal thin wires in juxtaposed wire hooking plates arranged inside A formwork that is divided into multiple parts to form the container space is provided.
Characterized in that it has been.

Further, its axis parallel to large number of columnar body conductor is embedded in accordance with the planar arrangement of the wiring board via the wiring board by a cut Dusko a predetermined thickness perpendicularly to the axis of the columnar body In the manufacturing apparatus of the wiring board to be formed, as a mechanism for arranging the plurality of conducting wires in parallel with the axis of the columnar body, a thin metal wire for one row of the columnar body supplied from the supply unit of the metal fine wire forming the conducting wire. And a vertical movement arm that guides and supplies the vertical movement arm at predetermined intervals according to the arrangement of the vias by vertical movement and horizontal movement at a predetermined pitch during ascent and descent, and the vertical movement arm moves to the upper position and moves laterally. And the vertical movement arm are in the upper position when they are lowered and when they are moved to the lower position and laterally moved and are raised, the locking rods that hook the thin metal wires for one row to lock at the predetermined intervals, respectively. When you move to the lower position Wherein the groove for locking the locking rod and a support frame member having an upper supporting frame and the lower support frame provided in accordance with the arrangement of conductors in the columnar body. Also, with the locking rod, characterized in that the grooves for positioning the thin metal wires at predetermined intervals is provided.
Further, locking rods are attached to the upper support frame and the lower support frame, and the thin metal wires supported by being locked by the locking rods are placed inside and combined from both sides to form a container space for forming the columnar body. It is characterized in that a form frame divided into a plurality of parts to be formed is provided .

Further, a wiring board is formed by cutting a columnar body in which a large number of conductors are embedded in parallel with the axis of the via on the wiring board in a plane arrangement and cutting the columnar body perpendicularly to the axis of the columnar body with a predetermined thickness. apparatus for manufacturing a wiring board, a pre-Symbol number of conductor wires as the axis mechanism arranged parallel to the columnar body, so that bisects the columnar body in the axial
A lower plate that supports the upper portion of the columnar body when cut, and a plurality of containers that form the columnar body by arranging the upper portion of the columnar body on the lower plate inside and combining them from both sides. Bei a divided mold, an upper guide plate and the thin metal wire in the upper surface of the container provided with a guide hole for guiding inserted one by one in accordance with the arrangement of the fine metal wire in the columnar body
The lower plate, the upper part of the columnar body, and the formwork are combined.
And by fitting the upper guide plate to the upper part of the form,
Forming a container space in which thin metal wires are arranged,
Pour the filling material into the space and cure the filling material to make fine metal wires.
After forming the columnar body in which the
Cut in the direction perpendicular to the axis of the thin metal wire, and
The minute part is arranged in the container space at the lower end of the thin metal wire in a predetermined arrangement.
Leave it on the lower plate as a support for
The columnar body can be formed by sequentially using

Moreover, its axis parallel to large number of columnar body conductor is embedded in accordance with the planar arrangement of the wiring board via the wiring board by a cut Dusko a predetermined thickness perpendicularly to the axis of the columnar body In a manufacturing apparatus of a wiring board to be formed, as a mechanism for arranging the plurality of conducting wires in parallel with the axis of the columnar body, one side and the other side sandwiching the plurality of thin metal wires arranged in parallel at a predetermined interval and supplied. In addition, a pair of grooved arms for hooking the metal thin wires at a predetermined interval in a direction orthogonal to the longitudinal direction of the metal thin wires are arranged and supported so as to be alternately arranged one by one on the one side and the other side. From the position where the grooved arm support is opposed to the grooved arm by sandwiching the metal thin wires, the metal thin wire is sent out and the grooved arm is moved by a predetermined distance so that the metal thin wire is hooked and crossed. And further comprising a moving means for. In addition, the plane arrangement of the thin metal wires is changed from one sliced body obtained by slicing the columnar body to a plurality of wiring boards.
Wherein the but has been possible acquisition. Further, a container forming a columnar body for accommodating the thin metal wires supported in a predetermined arrangement is characterized in that a heater wire is provided on the wall surface so that the container can be heated.

Further, a wire hooking device convolutions fine metal wires automatically in the wire hooking plates for use in the apparatus for manufacturing the wiring substrate, pairs toward the axisymmetric centerline of the frame portion disposed in the axis of rotation As a plate rotating mechanism for rotating the wire hanging plate, a feeding mechanism for applying a constant tension to the metal thin wire and sending out the metal thin wire from the side where the wire hanging plate rotates, and the wire hanging plate makes one rotation. In each case, there is provided a moving mechanism for translating the feeding position of the thin metal wire from the feeding mechanism with respect to the wire hanging plate in parallel at a predetermined pitch with respect to the wire hanging plate. The wire hanging device rotates the wire hanging plate by the plate rotating mechanism while sending the thin metal wire by the sending mechanism of the thin metal wire, and moves the wire hanging plate with respect to the wire hanging plate every time the wire hanging plate makes one rotation by the moving mechanism. By moving at a predetermined pitch, the thin metal wires can be wound around the wire hanging plate at predetermined intervals by automatic operation.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below. (First Embodiment) FIG. 1 is an explanatory view showing a first embodiment of a wiring board manufacturing apparatus according to the present invention. The wiring board manufacturing apparatus according to the present embodiment uses a wire-hanging plate 12 formed in a frame shape as a method of arranging the thin metal wires 10 at a predetermined interval in a container filled with a base material serving as a base material of the wiring board. It is characterized by using.

The wire hanging plate 12 is a thin plate formed in a rectangular frame shape, and the metal thin wires 10 are opposed to the frame parts 12a and 12b.
It is supported by rolling around between them. Frame 1
Grooves 14 are provided on the outer surfaces of 2a and 12b so that the supported thin metal wires 10 are not displaced. FIG. 2 shows the frame 12
2A shows an example of forming the groove 14 provided in a and 12b. FIG. 2A shows an example in which the groove 14 is provided on the outer surface of the frame portion 12a, and FIG.
2a is an example in which a groove 14 is provided on the inner side surface, FIG.
This is an example in which the groove 14 is provided on the outer side surface and the inner side surface of a.

The shape of the groove 14 can be set to an appropriate shape such as a flat bottom V shape. The example shown in FIGS. 2B and 2C is a thin metal wire 10.
Is completely buried in the groove 14 so that the outer surface of the thin metal wire 10 does not protrude from the side surface of the frame portion 12a. As a material for the wire hanging plate 12, a metal material such as stainless steel or a ceramic material such as zirconia can be used. In the case of a metal material, the groove 14 can be formed by etching or grinding, and in the case of a ceramic material, the groove 14 can be formed by grinding or the like.

The method for arranging the thin metal wire 10 in the container is as follows.
A wire hanging plate 12 of the same shape in which a thin metal wire 10 is wound.
Are arranged side by side, whereby a large number of metal thin wires 10 are arranged vertically and horizontally. The positioning holes 16 provided at the four corners of the wire hanging plate 12 are for inserting the positioning pins 18 to align the wire hanging plate 12. When the wire hanging plates 12 are arranged in parallel, in this embodiment, the spacers 20 are arranged between the adjacent wire hanging plates 12. This is because an appropriate gap is provided between the wire hanging plates 12 adjacent to each other so that the fine metal wires 10 are arranged vertically and horizontally at predetermined intervals in a plane arrangement. FIG. 3 shows a state in which the wire hanging plate 12 is arranged via the spacer 20.
The wire hanging plate 12 of the illustrated example has frame portions 12a and 12b.
A groove 14 is provided on the side surface of the metal thin wire 10 so that the thin metal wire 10 is buried in the groove 14.

When the metal thin wire 10 is arranged by using the wire hanging plate 12 and the spacer 20, the thickness of the wire hanging plate 12 and the spacer 20 and the depth of the groove 14 provided in the wire hanging plate 12 are set. The arrangement interval of the thin wires 10 can be set. In the embodiment, the wire hanging plate 12 is made of a stainless material of about 1.2 mm and formed into a frame body having an inner dimension of about 190 mm square. The groove 14 has a pitch of 1.0 mm and the groove 14 has a depth of 1
It is 50 μm. The spacer 20 was formed in the same frame shape as the wire hanging plate 12 using a stainless plate having a thickness of about 0.8 mm.

As a method of attaching the thin metal wire 10 to the wire hanging plate 12, in the embodiment, as shown in FIG. 4, the locking piece 22a is cut and raised at a predetermined position on the outer surface of the frame portion 12a of the wire hanging plate 12. The locking plate 22 is fixed, and the thin metal wire 1 is fixed at a predetermined position on the wire hanging plate 12.
Each time 0 is rolled, the metal wire 20 is attached to the locking piece 22a.
Then, the thin metal wire 10 was guided to the adjacent groove 14, and the thin metal wire 10 was wound at the position of the groove 14. When the thin metal wire 10 is wound around the wire hanging plate 12, the wire hanging plate 12 is rotated around the center line A while slightly applying tension on the supply side of the thin metal wire 10 as shown in FIG.

When manufacturing the columnar body in which the fine metal wires 10 are embedded, as shown in FIG. 1, the wire hanging plates 12 to which the fine metal wires 10 are attached are alternately superposed on the spacers 20, and the positioning pins 18 are inserted. End plate 24
After pressing both end faces with each other to integrate them by bolting, they are placed on the pedestal 26, and the form 28 formed in a semi-cylindrical shape on the pedestal 26 is combined from both sides to form a bottomed cylindrical container. Next, a filling material that constitutes the base material of the wiring board is filled in this container and solidified to obtain a columnar body in which the fine metal wires 10 are embedded.

In this embodiment, a copper wire is used as the fine metal wire 10 and an epoxy resin containing 50% by volume or more of aluminum nitride powder is used as the filler. This filling material was filled in a container formed by the mold 28 and the pedestal 26, vacuum treated, and then left standing in an oven at 100 ° C. for 24 hours to be cured. After the curing, the columnar body in which the fine metal wires 10 were embedded was taken out from the cylindrical container, and only this columnar body was left at 150 ° C. for 48 hours to be completely cured. Using a multi-blade saw, the obtained columnar body was cut out to a thickness of about 0.64 mm perpendicular to the axis of the thin metal wire 10,
It was possible to obtain a wiring board with vias in which copper vias having a pitch of 1.0 mm were formed in a matrix.

It is also possible to arrange the rod 30 formed separately from the metal thin wire 10 simultaneously with the metal thin wire 10 in the container so that the rod 30 and the metal thin wire 10 are embedded. . In FIG. 1, a recess 12c for mounting the rod body 30 on the inner peripheral side surfaces of the wire hanging plate 12 and the spacer 20.
And a method of setting by inserting the rod body 30 from the side when the wire hanging plate 12 and the spacer 20 are stacked. In this case, the metal thin wire 10 is wound around the wire hanging plate 12 while avoiding the mounting portion of the rod body 30. As the rod 30, for example, an aluminum nitride rod is used, which is mounted in a container together with the thin metal wire 10 and filled with an epoxy resin filler containing 50% by volume or more of aluminum nitride powder as in the above example. Then, by curing, a columnar body in which the aluminum nitride rod body is embedded can be obtained.

FIG. 5 shows the columnar body 32 thus obtained. Since the metal fine wire 10 and the rod 30 are embedded in the columnar body 32, the columnar body 32 is cut out perpendicularly to the axis of the metal fine wire 10 to form an aluminum nitride ceramic in the central portion of the substrate. It is possible to obtain a wiring board in which copper vias are formed in a matrix around the ceramic. As described above, it is possible to dispose different kinds of materials in the container, and with such an arrangement, a wiring board made of different kinds of materials can be obtained.

FIG. 6 shows another embodiment of the wire hanging plate 12. The wire hanging plates 12 of the above-described embodiment are overlapped with each other via the spacers 20 to set the intervals in the plane arrangement of the fine metal wires 10. On the other hand, in the present embodiment, the depths of the grooves 14 are set so that the vertical and horizontal arrangement intervals of the thin metal wires 10 become a predetermined interval when the wire hanging plates 12 are brought into contact with each other and overlapped with each other. is there. In the case of this embodiment, there is an advantage that the spacer 20 is unnecessary.

As shown in each of the above embodiments, the method of arranging the thin metal wires 10 by using the wire hanging plate 12 supports the thin metal wires 10 by the wire hanging plate 12, so that the positional deviation of the thin metal wires 10 is eliminated. There is an advantage that the metal thin wire 10 can be arranged with high accuracy. Further, there are features that the dissimilar materials can be easily attached and the cost of the manufacturing apparatus can be suppressed.

7 and 8 are a front view and a plan view showing the configuration of an embodiment of a wire hanging device for automatically wire-hanging the thin metal wire 10 on the wire hanging plate 12. This wire hooking device includes a plate rotating mechanism 10 for rotating the wire hooking plate 12 with a line symmetry center line of a frame portion arranged facing each other around which the thin metal wire 10 is wound as a rotation axis.
0, a feeding mechanism 102 that feeds the thin metal wire 10 from the side of the wire hanging plate 12 that is rotated and driven by the plate rotating mechanism 100 by applying a constant tension to the thin metal wire 10, and the sending mechanism for the wire hanging plate 12. A moving mechanism 104 for moving the position of sending out the metal thin wires 10 from 102 at a predetermined pitch.

The plate rotating mechanism 100 includes clampers 106a and 106b detachably supporting the central portions of two frame portions that do not wind the thin metal wire 10 by the wire hanging plate 12, and a shaft 108 that supports the clampers 106a and 106b. The wire hanging plate 12 is rotated by rotationally driving. By clamping and rotating the central portion of the frame portion with the clampers 106a and 106b, the wire hanging plate 12 is rotated about the line symmetry center line of the frame portion around which the thin metal wire 10 is wound. 110a and 110b are shafts 1
The shaft support portion 08, 112a and 112b are pulleys fixed to the shaft 108.

The pulleys 112a and 112b are connected to the plate rotating motor 114 to rotate the shaft 108 and rotate the wire hanging plate 12 clamped by the clampers 106a and 106b. As shown in FIG. 7, the plate rotation motor 114 and the pulleys 112a and 112b connect the intermediate pulley 116 and the plate rotation motor 114 with a belt, and the intermediate pulley 116 and the pulleys 112a and 112b.
The belt 118 is connected to 2b.

The feeding mechanism 102 for the thin metal wire 10 includes a coil 120 formed by winding a long thin metal wire, and a thin metal wire 10.
Tension part 12 for applying a constant tension to the
2, a wire drawing portion 124 for straightly extending and sending out the metal thin wire 10 wound in a coil shape, and the metal thin wire 1
It has a wire guide 126 that defines a 0 feed position and a wire feed motor 128. The wire feeding motor 128 is for controlling the feeding amount of the thin metal wire 10 from the coil 120.

The delivery mechanism 102 of this embodiment applies a constant tension to the thin metal wire 10 at all times.
The tension part 1 is provided as a structure for that.
In FIG. 22, the guide rail 122a is arranged in the vertical direction, and the tension roller 1 is vertically movable on the guide rail 122a.
As shown in FIG. 7, the metal thin wire 10 is hung between the guide rollers 130 and 132 and the tension roller 122b so that the weight of the tension roller 122b is applied to the metal thin wire 10. Since the tension roller 122b is supported by the guide rail 122a so as to be vertically movable, the gravity of the tension roller 122b is constantly applied to the thin metal wire 10, and the thin metal wire 10 is always supplied with a constant tension.

The thin metal wire 10 is pulled out by rotating the wire hanging plate 12 by the plate rotating mechanism 100. Since there is variation in the amount of withdrawal, the tension roller 122b is guided by the guide rail 122a so as to absorb the variation. The wire feeding motor 128 controls the feeding amount of the thin metal wire 10 in accordance with the pulling amount of the thin metal wire 10.

In FIG. 7, 134 and 136 are sensors for detecting the lower limit position and the upper limit position of the tension roller 122b, respectively. When the sensor 134 detects that the tension roller 122b is lowered to the lower limit position, the feeding amount of the thin metal wire 10 by the wire feeding motor 128 is suppressed to prevent the tension roller 122b from further lowering. When the wire is raised to the position, the wire feed motor 128 increases the feed amount of the thin metal wire 10 so that the thin metal wire 10 can be pulled out. In this way, the fine metal wire 10 can be supplied by constantly exerting gravity on the fine metal wire 10 by the tension roller 122b.

The method of applying a tension by utilizing the own weight of the tension roller 122b is a suitable method for applying a constant tension to the thin metal wire 10 because the gravity is always constant. Of course, instead of using gravity, a method of using a mechanical spring that constantly gives a constant elastic force or using an air spring may be used.

In the present embodiment, the moving mechanism 104 is constructed so that the entire feeding mechanism 102 for the thin metal wires is slidably supported by the moving table 140, and the feeding mechanism 102 is pitch-fed by the moving motor 142.
The moving table 140 moves in the wire hanging plate 1
The wire hanging plate 12 is arranged in parallel with the rotation axis line of 2.
The thin metal wire 10 is arranged so as to move in parallel with the frame portion to be wound.

FIG. 9 shows a state in which the thin metal wire 10 is wound around the wire hanging plate 12 by the above automatic device. The thin metal wire 10 is accommodated in a groove provided on the side surface of the frame portion of the wire hanging plate 12, and is wound so that the thin metal wire 10 is stretched between the frame portions. As shown in FIG. 7, by rotating the wire hanging plate 12 by the plate rotating mechanism 100, the thin metal wire 10 is pulled out from the feeding mechanism 102, and the thin metal wire 10 is wound around the wire hanging plate 12. Every time the wire hanging plate 12 makes one rotation, the moving mechanism 104 causes the metal thin wire feeding mechanism 10 to move.
By moving 2 for one pitch of the wire hanging plate 12 and repeating the operation of winding the metal thin wire 10, the metal thin wire 10 can be automatically wound around the wire hanging plate 12.

When winding the metal thin wire 10 around the wire hanging plate 12, it is necessary to hook the metal thin wire 10 in the next groove every one rotation of the wire hanging plate 12 before moving to the next rotating operation. There is. In the apparatus of the embodiment, as a result of this hooking operation, as shown in FIG. 10, the wire guide 126 is laterally moved to a position where the metal thin wire 10 is once caught in the next groove, and the metal thin wire 10 is hooked in the next groove. By the way, the wire guide 126 is returned to the original position (moved laterally by one pitch from the original position), and the wire hanging plate 12 is rotated in that state. The reason why the tension roller 122b is supported by the guide rail 122a so that it can be moved slightly up and down is one of the reasons that such a feeding operation of the thin metal wire 10 is required.

In this embodiment, the metal thin wire feeding mechanism 102 is moved in parallel to wind the metal thin wire 10 around the wire hanging plate 12. However, the metal thin wire feeding mechanism 102 is fixed and the plate rotating mechanism 100 is rotated. The wire moving plate 104 is provided with a moving mechanism 104 to rotate the wire hanging plate 12 by the plate rotating mechanism 100, and while the wire hanging plate 12 is translated, the metal thin wire 10 is supplied from the feeding mechanism 102 to the wire hanging plate 12. It is also possible to rotate. This is because the feeding position for supplying the thin metal wire 10 to the wire hanging plate 12 depends on the relative positional relationship between the wire hanging plate 12 and the sending mechanism 102.

In FIG. 7, 138 is a wire clamp and 140 is a clamp cylinder. The wire clamp 138 is used to clamp the thin metal wire 10 between itself and the guide roller 132 and to stop the feeding of the thin metal wire 10. When replacing the wire hanging plate 12, the thin metal wire 10
Is stopped so that the wire hanging plate 12 can be replaced.

Although the wire hanging device of the above-mentioned embodiment holds the rotation axis of the wire hanging plate 12 horizontally and rotates the wire hanging plate 12 to wind the thin metal wire 10, the rotation axis of the wire hanging plate 12 is not always required. The arrangement is not limited to horizontal arrangement. For example, the rotation axis of the wire hanging plate 12 is arranged vertically, the feeding mechanism is fixed, and the wire hanging plate 12 is moved vertically by a predetermined pitch by a moving mechanism, or the wire hanging plate 12 is rotated around the vertical axis. It is also possible to wind the thin metal wire 10 around the wire hanging plate 12 by rotating only and moving the sending mechanism in the vertical direction by the moving mechanism. As shown in FIG. 7, if the feeding mechanism 102 is moved vertically by a moving table or the like while maintaining the structure for applying a constant tension to the thin metal wire 10 as it is, it is possible to apply a constant tension for wire hanging. .

According to the wire hanging device for a metal thin wire of this embodiment, the metal thin wire 10 can be wound around the wire hanging plate 12 by an automatic operation. Therefore, the work for winding the metal thin wire 10 around the wire hanging plate 12 is performed. In addition, the thin metal wire 10 can be wound around by applying a constant tension at all times, and stable winding is possible.

(Second Embodiment) FIG. 11 is an explanatory view showing a second embodiment of the wiring board manufacturing apparatus. Similarly to the manufacturing apparatus of the first embodiment, the wiring board manufacturing apparatus of the present embodiment also has a plane arrangement in a cylindrical container formed by combining the semi-cylindrical molds 28 in a cylindrical shape with a predetermined vertical and horizontal intervals. The metal thin wires 10 are arranged in the container and the filler is filled in the container to form a columnar body.

FIG. 11 shows a method of arranging the thin metal wires 10 vertically and horizontally at a predetermined interval in this embodiment. The present embodiment is characterized in that a plurality of metal thin wires 10 are arranged by using locking rods 40a and 40b that guide and support the metal thin wires 10 at a predetermined arrangement interval. In FIG. 11, reference numeral 42 is a supporting frame body of the locking rods in which the locking rods 40a and 40b are arranged at a predetermined interval. In this support frame 42, an upper support frame 42a that supports the upper locking rod 40a and a lower support frame 42b that supports the lower locking rod 40b are vertically arranged at a predetermined distance apart in parallel. . In the support frame 42 of the embodiment, the upper support frame 42a and the lower support frame 42b are separated by 250 mm.

The upper support frame 42a and the lower support frame 42b are both U-shaped members, and grooves 44 for setting the locking rods 40a, 40b in parallel at a predetermined interval are formed in the respective extended frame portions. ing. The groove 44 is formed on the upper surface of the upper support frame 42a, and is formed on the lower surface of the lower support frame 42b. The interval between the grooves 44 defines the arrangement interval when the thin metal wires 10 are arranged in the vertical and horizontal directions at a predetermined interval.

The locking rods 40a and 40b are also made of the thin metal wire 1.
Since 0s are arranged at predetermined intervals, a groove 40c for positioning the thin metal wire 10 is provided. Upper locking rod 40a
A groove 40c is provided on the upper surface, and a groove 40c is provided on the lower surface of the lower locking rod 40b. The interval between the grooves 40c defines the arrangement interval of the thin metal wires 10. Therefore, the locking rod 40
For a and 40b, a large number of grooves 40c provided at predetermined intervals according to the via arrangement of the wiring board are prepared. Since the locking rods 40a and 40b are formed to have a thickness of about 1 mm, a certain strength is required, and at the same time, the groove 4 is affected by temperature change.
It is necessary that the interval of 0c does not change. In the embodiment, a zirconia ceramic substrate is used as a material for the locking rods 40a and 40b, and the length is 200 mm and the thickness is 0.9 mm.
The width was 5 mm, and the grooves 40c were formed at 1 mm intervals.

In FIG. 11, reference numeral 46 denotes a pair of vertical movement arms for supplying the thin metal wire 10. The vertical movement arm 46 is provided in the extension frame of the upper support frame 42a and the lower support frame 42b.
It is reciprocated up and down between a position above 2a and a position below lower support frame 42b, and is driven up and down, and is movably supported forward and backward. A pair of vertical movement arms 46
A guide roller 48 is rotatably attached to the arm end of the plurality of metal wires 10 arranged in a line and supplied at regular intervals. Circumferential grooves are provided on the circumferential surface of the guide roller 48 at regular intervals in the axial direction in accordance with the supply intervals of the metal thin wires 10, and one metal thin wire 10 is supplied to each circumferential groove so that the metal thin wires 10 are regularly spaced. Is available.

The guide roller 48 supported by the up-and-down moving arm 46 is supplied with the thin metal wire 10 from a reel in which an elongated body of the thin metal wire 10 is wound or a coil of the thin metal wire 10.
The same number of reels or coils as the number of the thin metal wires 10 supplied to the guide roller 48 are prepared.
Is configured to supply the fine metal wire 10 by applying a predetermined tension in accordance with the movement operation of the vertical movement arm 46.

Next, the operation of arranging the thin metal wires 10 will be described with reference to FIG. In the device of this embodiment, the vertically moving arm 46 is moved vertically and sequentially to the front side, and the locking rods 40a and 40b are sequentially supported.
The metal thin wires 10 are arranged vertically and horizontally at a predetermined interval by setting the above.

First, the end portion of the thin metal wire 10 is supported by the support frame 42.
The vertical movement arm 46 moves from the upper position to the lower position. As a result, the thin metal wire 10 is pulled out straight from top to bottom. When the vertical movement arm 46 descends to the lower position, the lower locking rod 40b is moved to the lower support frame 42.
It is set in the groove 44 on the deepest side of b. Next, the vertical movement arm 46 is moved forward by one pitch and raised. As a result, the thin metal wire 10 is locked by the locking rod 40b on the lower side, positioned by the groove 40c, and pulled out upward.

When the vertical movement arm 46 is raised to the upper position,
The upper locking rod 40a is set in the groove 44 of the upper support frame 42a, and the vertical movement arm 46 is similarly moved forward by one pitch and lowered. As a result, the thin metal wire 10 is locked to the locking rod 40a and the thin metal wire 10 is pulled out in parallel. When the vertical movement arm 46 is lowered to the lower position, the next locking bar 40b is set in the groove 44, and the vertical movement arm 46 is moved.
Is moved again by 1 pitch and raised. Thus, each time the vertical movement arm 46 is moved up and down, the locking rod 40
By setting a and 40b in the groove 33 and repeating the operation of moving the vertical movement arm 46 forward by one pitch,
The thin metal wires 10 are arranged in a grid pattern in a planar arrangement from the back side to the front side of the support frame 42.

When the metal thin wires 10 are all arranged, a semi-cylindrical form 28 is inserted from both sides in the middle between the upper support frame 42a and the lower support frame 42b, and the form 28 is combined to form a bottomed cylinder. Form a container. Next, after filling the filling material into the container and curing the filling material, the mold 28 is opened from both sides, and the columnar body is pulled out below the support frame body 42. When the filling material flows out from between the locking rods 40b, the bottom is formed by a jig that closes this gap. FIG. 12 shows a state where the columnar body 32 is pulled out downward from the support frame 42. By cutting the columnar body perpendicular to the axis of the thin metal wire 10,
As in the case of the first embodiment, a wiring board in which vias are arranged vertically and horizontally in a plane arrangement can be obtained.

(Third Embodiment) FIG. 13 is an explanatory view showing a third embodiment of the wiring board manufacturing apparatus. The manufacturing apparatus of the present embodiment uses a metal thin wire guide plate 50 provided with guide holes for inserting the metal thin wires 10 one by one in accordance with the arrangement position of the metal thin wires 10 in the columnar body. It is characterized in that the metal thin wires 10 are arranged in a predetermined vertical and horizontal array in a columnar body by supplying the metal thin wires 10 one by one to the holes.

FIG. 13 (a) shows a method of arranging the thin metal wires 10 in the container first in this manufacturing apparatus. In the figure, reference numeral 52 is a lower plate of the metal thin wire guide plate which constitutes the bottom surface of the container.
The lower end of the metal thin wire 10 is previously locked to the lower plate 52 in accordance with the arrangement position of the metal thin wires 10 in the container. On the other hand, the metal thin wire guide plate 50 has a guide hole penetrating therethrough in accordance with the arrangement position of the metal thin wire 10 on the lower plate 52, and the metal thin wire 10 is inserted into each of the guide holes and each metal thin wire 10 is inserted.
Is connected to the metal wire coil.

FIG. 14 shows a method of supplying the thin metal wire 10 from the thin metal wire coil 54. Reference numeral 56 is a tensioner for applying a predetermined tension to the thin metal wire 10 to supply it. Each thin metal wire 10 supplied to the thin metal wire guide plate 50 is thus supplied through the tensioner 56. The tensioner 56 can be applied to the other embodiments described above when the thin metal wire 10 is supplied by applying a predetermined tension. Figure 13 (a)
As shown in FIG. 3, the lower plate 52 and the metal thin wire guide plate 50 are aligned in the vertical position, and the metal thin wires 10 are arranged parallel to each other and perpendicular to the surface of the lower plate 52.

With the thin metal wires 10 arranged, the template 28 formed in a semi-cylindrical shape on the lower plate 52 is combined from both sides in the same manner as in the above-mentioned embodiment to form a cylindrical container. In the embodiment, the metal thin wire guide plate 50 is provided with a sink port 55 through which a filler is poured. The mold 28 is assembled from both sides to form a cylindrical container, the metal thin wire guide plate 50 is fitted to the upper part of the cylindrical container, and the filler is poured from the sink port 55. On the lower surface of the metal thin wire guide plate 50, the form 2
An annular groove for inserting and supporting the upper edge of 8 may be provided. Of course, the filler may be filled in other ways.
When the filler is poured and during the process of curing the filler, the lower plate 52 and the metal thin wire guide plate 50 are vertically aligned, and a certain tension is applied to the metal thin wire 10 so that the metal thin wire 10 is straight in the columnar body. To be buried.

After the filler is hardened by heating or the like, the mold 28 is separated from the columnar body and the mold is opened. FIG. 13 (c) shows a state where the mold is opened. As a result, the columnar body 32 in which the thin metal wire 10 is embedded is formed on the lower plate 52. Next, the columnar body 32 formed on the lower plate 52 is cut in a direction perpendicular to the axis of the thin metal wire 10. This cutting is not an operation of slicing the columnar body 32 to form individual wiring boards, but an operation of separating the columnar body 32 into two while leaving the upper portion of the columnar body 32 slightly.

FIG. 13D shows a state in which the columnar body 32 is divided. 32a is an upper portion of the columnar body 32, which is a portion supporting and leaving the end of the thin metal wire 10, and 32b is a columnar body 32.
Is the completed part. The completed portion 32b of the columnar body 30 is cut out by the same operation as in the above-described embodiment to be provided as a wiring board with a via. On the other hand, the columnar body 32
The upper portion of is used as a support for arranging the lower end of the thin metal wire 10 in a predetermined arrangement in the next step of manufacturing the columnar body 32.

FIG. 13E shows the upper portion 32 of the columnar body 32.
It shows a state in which a is placed on the lower plate 52 and the molds 28 are combined from both sides to form a cylindrical container in which the thin metal wires 10 are arranged. The lower plate 52 may be provided with a groove for inserting and supporting the lower end edge of the form 28. By forming the cylindrical container in which the thin metal wires 10 are arranged in this manner, it becomes possible to shift to the state of FIG. 13B this time and form the columnar body 32. Also in this case, after the columnar body 32 is obtained,
Similarly to the above method, the columnar body 32 is divided into two, and the columnar body 3
The columnar body 32 can be obtained one after another by using the lower part of 2 as a completed part and using the upper part 32a as a support for the next thin metal wire 10. The method of dividing the columnar body 32 and leaving a part of the columnar body 32 as a support for the metal thin wires 10 to form the columnar bodies 32 one after another is effective in that it is easy to set the metal thin wires 10 vertically and horizontally. Is.

The method of forming the columnar body 32 using the above-described metal thin wire guide plate 50 and the lower plate 52 is a guide plate for positioning the metal thin wires 10 on the upper surface and the lower surface of the cylindrical container formed by the mold 28. This is a method of supporting and forming the columnar body 32. 15 and 12 show the thin metal wire 10 in such a case.
In this arrangement example, a plurality of wiring boards can be obtained with one slice body. FIG. 15 shows the upper guide plate 60.
16A and 16B show the lower guide plate 60b. Upper guide plate 60
a and the lower guide plate 60b are provided with the insertion holes 60c through which the thin metal wires 10 are inserted in the same arrangement, and the thin metal wires 10 are inserted into the respective insertion holes 60c, whereby the thin metal wires 1 are inserted in the cylindrical container.
0 can be placed in a predetermined arrangement.

Regarding the arrangement of the thin metal wires 10, it is not necessary that the arrangement of a plurality of wiring boards obtained by one slice is the same, and there are a plurality of types from the arrangement of the insertion holes 60c provided in the upper guide plate 60a and the lower guide plate 60b. It is of course possible that the wiring board of 1 is obtained from one columnar body. In addition, a groove is provided at a portion of the guide plate 60a, 60b where the end surface of the mold frame 28 abuts so that the mold frame 28 is not displaced, and the end surfaces of the mold frame 28 are abutted against each other and can be surely combined. As described above, it is also possible to form the end surface of the mold frame 28 into a shape in which the end surfaces are combined by concave and convex fitting.

(Fourth Embodiment) FIG. 17 is an explanatory view showing a fourth embodiment of the wiring board manufacturing apparatus. When forming the columnar body in which the thin metal wires 10 are embedded as described above,
As the cylindrical container is formed by the lower guide plate 60a, the upper guide plate 60b, and the frame 28, the thin metal wires 10 are supported in a predetermined arrangement in the container, and a filler such as a resin material or a ceramic material having flowability is filled in the container. And the filler is cured to form a columnar body. The embodiment shown in FIG. 17 is
The structure which can be utilized when filling a container with a resin material and heating is shown.

That is, when a thermosetting resin material such as an epoxy resin is used as the filler, the resin material can be efficiently cured by heating the container, thereby improving the manufacturing efficiency. You can In the embodiment shown in FIG. 17, a mold 28 having a heater wire 70 installed therein is used, and the temperature of the mold 28 is controlled and cured by a temperature controller 74 while detecting the temperature with a temperature sensor such as a thermocouple 72. Show the method. Similarly, for the lower plate 52, the heater 70 may be internally provided and the temperature controller 75 may be used to efficiently cure the filler.

(Fifth Embodiment) FIGS. 18 and 15 are explanatory views showing a fifth embodiment of the wiring board manufacturing apparatus. In this embodiment, a grooved arm 80 for hooking the metal thin wires 10 according to the arrangement interval of the metal thin wires 10 as shown in FIG.
It is characterized in that a pair of grooved arm supports 82a and 82b that support parallel to each other at regular intervals are used. In a state where a large number of thin metal wires 10 are arranged in parallel at predetermined intervals, as shown in FIG. 19, the grooved arms 80 are alternately arranged on the upper side and the lower side sandwiching the thin metal wires 10, and the grooves 80 are directly arranged. While supporting the grooved arm 80 with the support bodies 82a and 82b of the grooved arm, the metal thin wire 1 is supported by the grooved arm 80.
Hook 0 and move in the opposite direction to cross. FIG. 18 shows a state in which the thin metal wire 10 is hooked on the grooved arm 80 and the thin metal wire 10 is supported so as to be stretched by the upper and lower grooved arms 80.

The thin metal wire 10 is a support 82 for the grooved arm.
a and 82b are moved and pulled out by the grooved arm 80 to be sequentially fed out, and the grooved arm support 8
The movement is stopped when 2a and 82b have moved a predetermined distance. A large number of thin metal wires 10 are stretched by the upper and lower grooved arms 80. In this state, similar to the above-described embodiment, the form 28 is combined from both sides to form a cylindrical container shape, and the filler is filled in the container to obtain the columnar body in the same manner. Since the vertical and horizontal arrangements of the thin metal wires 10 are stretched by the grooved arms 80, the grooved arms 8
In 0, positioning grooves are formed according to the arrangement interval of the thin metal wires 10. On the other hand, since the interval between the upper and lower grooved arms 80 that cross each other defines the arrangement interval of the thin metal wires 10, it is necessary to set the installation interval and the thickness of the grooved arms 80 appropriately. The grooved arm supports 82a and 82b need only move relatively, and at least one of them should be movable.

In each of the above-mentioned embodiments, as the container for arranging the thin metal wires 10, the one in which the mold 28 formed in the semi-cylindrical shape is combined has been described as an example, but the container shape is naturally limited to the cylindrical container. Instead of a container with a rectangular planar shape, the combination form is also divided into two,
A three-divided one, a four-divided one and the like can be appropriately used. Further, as the fine metal wire 10 to be used, various conductive wires other than copper and copper alloy can be used. It is preferable to appropriately select these conductors depending on the curing temperature of the filler, for example, whether the resin material is the filler or the ceramic material is the filler. Further, the filler is not limited to the resin material, and a ceramic material or the like may be used to form the columnar body by using a normal ceramic sintering method.

[0062]

According to the wiring board manufacturing apparatus of the present invention, it is possible to easily obtain a columnar body in which thin metal wires are arranged with high precision and efficiency, and thereby a wiring board with a via can be obtained. Mass production is easily possible. Further, the method of the present invention can be applied to the manufacture of a wiring board with a via made of a resin material as a base material and the manufacture of a wiring board with a via made of a ceramic material as a base material. Further, by using the wire hanging device, the wire can be easily hooked on the wire hanging plate used in the wiring board manufacturing apparatus, and it can be suitably used for manufacturing the wiring board.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a first embodiment of a wiring board manufacturing apparatus according to the present invention.

2A and 2B are a plan view and a cross-sectional view showing an example of forming a groove provided in a frame portion.

FIG. 3 is a plan view showing a state in which a wire hanging plate is arranged via a spacer.

FIG. 4 is a plan view and a front view showing a state in which a locking plate is attached to the outer surface of the wire hanging plate.

FIG. 5 is a cross-sectional view of a columnar body in which a thin metal wire and a rod body are embedded.

FIG. 6 is a plan view showing another embodiment of the wire hanging plate.

FIG. 7 is a front view of an automatic device that winds a thin metal wire around a wire hanging plate.

FIG. 8 is a plan view of an automatic device that winds a thin metal wire around a wire hanging plate.

FIG. 9 is a perspective view showing a state in which a thin metal wire is wound around a wire hanging plate.

FIG. 10 is an explanatory view showing a method of hooking a thin metal wire on the groove portion of the wire hanging plate.

FIG. 11 is an explanatory diagram showing a second embodiment of a wiring board manufacturing apparatus.

FIG. 12 is a perspective view of a columnar body obtained according to the second embodiment.

FIG. 13 is an explanatory diagram showing a third embodiment of the wiring board manufacturing apparatus.

FIG. 14 is an explanatory diagram showing a method for supplying a thin metal wire according to the third embodiment.

FIG. 15 is an explanatory diagram showing a planar arrangement of thin metal wires on the upper guide plate.

FIG. 16 is an explanatory diagram showing a planar arrangement of metal thin wires on a lower guide plate.

FIG. 17 is an explanatory diagram showing a fourth embodiment of a wiring board manufacturing apparatus.

FIG. 18 is an explanatory view showing a fifth embodiment of the wiring board manufacturing apparatus.

FIG. 19 is an explanatory diagram showing the arrangement of grooved arms in the fifth embodiment.

FIG. 20 is an explanatory diagram showing a method of slicing a columnar body to form a sliced body of a wiring board.

[Explanation of symbols]

10 thin metal wires 12 wire hanging plate 12a, 12b frame part 12c recess 14 groove 18 Positioning pin 20 spacers 22 Lock plate 26 pedestal 28 formwork 30 sticks 32 columns 40a, 40b Locking rod 40c groove 42 Support frame 42a Upper support frame 42b Lower support frame 44 groove 46 Vertical movement arm 48 guide roller 50 Metal fine wire guide plate 52 Lower plate 54 Metal Wire Coil 56 Tensioner 60a Upper guide plate 60b Lower guide plate 60c insertion hole 70 heater wire 72 Thermocouple 74 Temperature controller 80 grooved arm 82a, 82b Grooved arm support 100 plate rotation mechanism 102 sending mechanism 104 moving mechanism 106a, 106b clamper 112a, 112b pulley 114 plate rotation motor 120 coils 122 Tension part 122a guide rail 122b tension roller 126 Wire guide 128 wire feeding motor

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masakuni Tsuneda 711 Rishida, Kurita character, Nagano City, Nagano Prefecture Shinko Electric Industry Co., Ltd. (56) Reference JP-A-8-78581 (JP, A) JP Flat 8-186195 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01L 23/12 H05K 3/00

Claims (14)

(57) [Claims] 1. A columnar body in which a large number of conductors are embedded in parallel with an axis of the via in a wiring board in a plane arrangement,
In a wiring board manufacturing apparatus for forming a wiring board by cutting a predetermined thickness perpendicularly to the axis of the columnar body, as a mechanism for arranging the plurality of conductors in parallel with the axis of the columnar body, a metal serving as the conductor is formed. A plurality of wire hanging plates having a frame portion for supporting the thin wires by winding them in parallel at predetermined intervals, and a supporting means for aligning and juxtaposing the plurality of wire hanging plates with each other. Wiring board manufacturing equipment. 2. The wiring board manufacturing apparatus according to claim 1, wherein a groove for positioning and supporting the thin metal wire is formed in the wire hanging plate. 3. A spacer for arranging the thin metal wires at a predetermined interval is arranged between a plurality of the wire hanging plates juxtaposed to each other.
Alternatively, the wiring board manufacturing apparatus according to 2. 4. The frame portion of the wire hanging plate is provided with a recess for arranging a rod body separate from the thin metal wire in an internal space formed by juxtaposing the wire hanging plate. The wiring board manufacturing apparatus according to claim 1, 2, or 3. 5. A locking member formed by cutting and raising a locking piece for locking a thin metal wire is attached to an outer surface of a frame portion of the wire hanging plate. 4. The wiring board manufacturing apparatus according to 4. 6. A container space in which a pedestal for arranging the wire hanging plates side by side is provided as the supporting means, and the thin metal wires supported by the wire hanging plates arranged side by side are arranged inside and combined from both sides to form the columnar body. The wiring board manufacturing apparatus according to claim 1, 2, 3, 4, or 5, wherein a form frame divided into a plurality of parts is used. 7. A columnar body in which a large number of conductors are embedded in parallel with the axis of the via according to the plane arrangement of vias in the wiring board,
In a wiring board manufacturing apparatus for forming a wiring board by cutting a predetermined thickness perpendicularly to the axis of the columnar body, the conductor is configured as a mechanism for arranging the plurality of conductors in parallel with the axis of the columnar body. A row of the metal thin wires of the columnar body supplied from the metal thin wire supply unit is guided by a vertical movement and a lateral movement of a predetermined pitch during ascent and descent at a predetermined interval in accordance with the arrangement of the vias to be supplied. The vertical movement arm, and when the vertical movement arm moves to the upper position and laterally moves and descends, and when the vertical movement arm moves to the lower position and laterally moves and ascends, the predetermined thin metal wire for each row is hooked. A locking rod that locks at an interval, and a groove that locks the locking rod when the vertical movement arm moves to an upper position and a lower position are provided according to the arrangement of the conductors in the columnar body. Support frame and lower support frame Apparatus for manufacturing a wiring substrate characterized by having a supporting frame member to. 8. The wiring board manufacturing apparatus according to claim 7, wherein the locking rod is provided with grooves for positioning the thin metal wires at predetermined intervals. 9. A locking rod is attached to the upper support frame and the lower support frame, and thin metal wires supported by being locked by the locking rod are arranged inside and combined from both sides to form the columnar body. 9. The wiring board manufacturing apparatus according to claim 7, wherein a plurality of molds that form a container space are used. 10. A wiring board is formed by cutting a columnar body, in which a large number of conductors are embedded in parallel with the axis of the via in the wiring board in a plane arrangement, perpendicularly to the axis of the columnar body with a predetermined thickness. In the wiring board manufacturing apparatus, a mechanism for arranging the plurality of conducting wires in parallel with the axis of the columnar body is provided as an upper part of the columnar body when the columnar body is cut so as to be divided into two perpendicular to the axis. A lower plate for supporting the part, a plurality of divided molds for forming a container space for forming the columnar body by arranging an upper part of the columnar body on the inside of the lower plate and combining them from both sides; top in a upper guide plate with the thin metal wires provided with a guide hole for guiding inserted one by one in accordance with the arrangement of the fine metal wire in the columnar body, the upper portion of the lower plate and the columnar body and the mold Combined with and type
By fitting the upper guide plate to the top of the frame,
Form a container space in which thin metal wires are arranged, and
Pour the filler and cure the filler to embed the fine metal wires.
After forming the formed columnar body, the mold is opened, and the columnar body is cut in a direction perpendicular to the axis of the thin metal wire.
The upper part of the columnar body under the metal wire in the container space.
Remain on the lower plate as a support for arranging the ends in a predetermined arrangement.
The columnar body can be formed by sequentially using the support on the lower plate.
Apparatus for manufacturing a wiring substrate, characterized in that the. 11. According to the plane arrangement of vias of a wiring board.
A columnar body with many conductors embedded in parallel with its axis
To have a predetermined thickness perpendicular to the axis of the columnar body.
In the manufacturing equipment of the wiring board which forms the wiring board by
And a mechanism for arranging the plurality of conducting wires in parallel with the axis of the columnar body.
As a rule, a number of metal thin
On one side and the other side sandwiching the wire, the longitudinal direction of the thin metal wire and
A large number of metal wires that are hooked at regular intervals in orthogonal directions
Grooved arms are alternately arranged one by one on the other side
Support for a pair of grooved arms arranged and supported so that
The grooved arm is paired with the body and the metal thin wires.
From the facing position, feed the thin metal wire and
Set the grooved arm at a specified distance so that you can hook it and cross it.
An apparatus for manufacturing a wiring board, comprising: a moving means for moving the wiring board. 12. The planar arrangement of the thin metal wires is set to the columnar shape.
Multiple wiring boards from one sliced body
It is possible to obtain
4, 5, 6, 7, 8, 9, 10, or 11, the wiring board manufacturing apparatus. 13. A thin metal wire supported in a predetermined arrangement is stored.
The container forming the columnar body is provided with heater wires on the wall surface.
The container is heatable.
1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11 also
Is a wiring board manufacturing apparatus described in 12 . 14. The method according to claim 1, 2, 3, 4 or 5.
Gold on the wire hanging plate used in the wiring board manufacturing equipment.
A wire hooking device for automatically winding a metal thin wire, wherein a line symmetry center line of the frame portions arranged to face each other is a rotation axis line.
Plate rotation to rotate the wire hanging plate as
The rolling mechanism and the wire by applying a constant tension to the thin metal wire.
Sending a thin metal wire from the side where the hanging plate rotates
Each time the protrusion mechanism and the wire hanging plate rotate once, the wire
The gold from the feeding mechanism for the hanging plate
Set the feeding position of the metal thin wire to the wire hanging plate
And a moving mechanism that relatively moves in parallel at a predetermined pitch.
A wire hooking device characterized by the above.