JP3432706B2 - How to measure hole position - Google Patents

How to measure hole position

Info

Publication number
JP3432706B2
JP3432706B2 JP18155097A JP18155097A JP3432706B2 JP 3432706 B2 JP3432706 B2 JP 3432706B2 JP 18155097 A JP18155097 A JP 18155097A JP 18155097 A JP18155097 A JP 18155097A JP 3432706 B2 JP3432706 B2 JP 3432706B2
Authority
JP
Japan
Prior art keywords
hole
coordinates
work
measuring
connecting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP18155097A
Other languages
Japanese (ja)
Other versions
JPH1123217A (en
Inventor
孝男 柴山
義信 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Priority to JP18155097A priority Critical patent/JP3432706B2/en
Priority to CA002242179A priority patent/CA2242179C/en
Priority to US09/110,320 priority patent/US6163035A/en
Publication of JPH1123217A publication Critical patent/JPH1123217A/en
Application granted granted Critical
Publication of JP3432706B2 publication Critical patent/JP3432706B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、車両のサブフレー
ム等のワークに形成したサスペンションの連結孔等の孔
の位置を計測する方法及び装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for measuring the positions of holes such as suspension connecting holes formed in a work such as a vehicle subframe.

【0002】[0002]

【従来の技術】従来、孔位置の計測に際しては、光軸が
斜交するように配置した2台のカメラとスポット光源と
を備える計測ヘッドをロボットの動作端に取付け、計測
ヘッドを孔に対向する所定の計測位置に位置決めした状
態でワークにスポット光を照射し、この状態で2台のカ
メラによりワークを撮像して、画像処理により各カメラ
の画面上における孔の中心位置を求め、三角測量の原理
で空間座標系における孔の中心の座標を算出している。
2. Description of the Related Art Conventionally, when measuring a hole position, a measuring head having two cameras arranged so that their optical axes are obliquely arranged and a spot light source is attached to an operating end of a robot, and the measuring head is opposed to the hole. The work is irradiated with spot light in a state where it is positioned at a predetermined measurement position, the work is imaged by two cameras in this state, the center position of the hole on the screen of each camera is obtained by image processing, and triangulation is performed. The coordinate of the center of the hole in the spatial coordinate system is calculated by the principle of.

【0003】[0003]

【発明が解決しようとする課題】上記従来例のもので
は、カメラの画面に暗部として現われる孔の像の周囲の
明暗境界部を孔の孔縁部として、この孔縁部の位置から
孔の中心位置を求めているが、ノイズ等の影響で明暗境
界部がぼやけ、検出される孔縁部の位置がばらついて測
定誤差を生じ易く、また、2台のカメラのうち少なくと
も一方のカメラはワークを斜め方向から撮像するため、
ねじ孔のような奥行の有る孔では孔の内面からの反射光
でカメラの画面に現われる孔の像の形がゆがみ、その結
果、検出される孔中心の位置がずれ、空間座標系におけ
る孔の中心座標の測定誤差を生ずる。
In the conventional example described above, the light-dark boundary around the image of the hole appearing as a dark portion on the screen of the camera is defined as the hole edge portion of the hole, and the center of the hole is determined from the position of the hole edge portion. Although the position is sought, the light / dark boundary is blurred due to the influence of noise, etc., and the position of the detected hole edge is likely to vary, which easily causes a measurement error. At least one of the two cameras is Since the image is taken from an oblique direction,
In a hole with a depth such as a screw hole, the reflected light from the inner surface of the hole distorts the shape of the image of the hole that appears on the screen of the camera, and as a result, the position of the detected hole center shifts and It causes a measurement error of the central coordinates.

【0004】また、2台のカメラを設ける関係で計測ヘ
ッドが大型化するため、ワークの込み入った場所に計測
ヘッドを潜り込ませることができず、このような場所に
形成した孔の位置を計測することは困難である。
Further, since the measuring head becomes large due to the provision of the two cameras, the measuring head cannot be submerged in a place where the work is complicated, and the position of the hole formed in such a place is measured. Is difficult.

【0005】本発明は、以上の点に鑑み、孔の位置を高
精度で計測でき、更に、ワークの込み入った場所に形成
した孔の位置も計測できるようにすることを課題として
いる。
In view of the above points, an object of the present invention is to make it possible to measure the position of a hole with high accuracy and also to measure the position of a hole formed in a place where a work is complicated.

【0006】[0006]

【課題を解決するための手段】上記課題を解決すべく、
本発明のワーク連結部位置の計測方法によれば、第1の
ワークに設けた、該第1のワークに連結される第2のワ
ークの連結部の位置を計測するワーク連結部位置の計測
方法であって、前記連結部に互いに対向する1対の孔を
形成したものにおいて、計測対象物に対する投受光で測
定対象物との間の距離を測定する測距器を用い、測距
器を連結部に対する光線の照射点が前記一対の孔をそれ
ぞれ横断するように設定した走査線に沿って動くように
前記第1のワークに対し移動し、この移動中に測距器で
測定された連結部との間の距離の変化に基づいて走査線
に交差する孔の複数の孔縁点の座標を求め、これら複
数の孔縁点の座標から各孔の中心の座標を算出し、この
算出した連結部の一方の孔の中心と他方の孔の中心との
結線の中点の座標を求め、この中点を連結部の位置を現
す点として、この中点の基準位置からのずれを測定す
る。
[Means for Solving the Problems] In order to solve the above problems,
According to the work connecting portion position measuring method of the present invention ,
A second work provided on the work and connected to the first work.
A method for measuring a position of a work connecting portion for measuring a position of a connecting portion of a ark, wherein a pair of holes facing each other is formed in the connecting portion.
In the formed one, a distance measuring device that measures the distance between the measuring target and the measuring target is used, and the irradiation point of the light beam with respect to the connecting portion traverses the pair of holes. To move along the set scan line
The coordinates of a plurality of hole edge points of each hole intersecting with the scanning line are obtained based on the change in the distance between the first work and the connecting portion measured by the rangefinder during the movement. , These compound
Calculate the coordinates of the center of each hole from the coordinates of the number of hole edge points.
Between the calculated center of one hole and the calculated center of the other
Obtain the coordinates of the midpoint of the connection, and use this midpoint to identify the position of the connection.
The deviation of this midpoint from the reference position is measured as
It

【0007】また、本発明のワーク連結部位置の計測装
置によれば、1本目の走査線に交差する2つの孔縁点の
座標を求めると共に、該座標のいずれか一方を含み、前
記1本目の走査線に対し所定角度傾いた2本目の走査線
に沿って照射点を動かすことにより、該2本目の走査線
に交差する少なくとも1つの孔縁点の座標を求め、これ
ら孔縁点の座標から孔の中心の座標を算出する。
Further, according to the work connecting portion position measuring apparatus of the present invention, the coordinates of two hole edge points intersecting the first scanning line are obtained and at least one of the coordinates is included.
Note that the second scanning line is tilted at a predetermined angle with respect to the first scanning line.
By moving the irradiation point along, the coordinates of at least one hole edge point intersecting the second scanning line are obtained, and the coordinates of the center of the hole are calculated from the coordinates of these hole edge points.

【0008】照射点を走査線に沿って動かすと、測距器
で測定される距離は、照射点が孔に入ったところで急増
し、孔から外れたところで急減する。そのため、測定距
離が急変する走査線上の点が走査線に交差する孔の孔縁
点に正確に一致する。ここで、測距器の光軸に直交する
平面座標系における走査線上の点の座標は既知であり、
また光軸方向の座標は測距器で測定される距離であるか
ら、孔縁点の空間座標系における座標を精度良く計測で
きる。
When the irradiation point is moved along the scanning line, the distance measured by the distance measuring device sharply increases when the irradiation point enters the hole and sharply decreases when the irradiation point departs from the hole. Therefore, the point on the scanning line where the measurement distance changes abruptly coincides with the hole edge point of the hole intersecting the scanning line. Here, the coordinates of the points on the scanning line in the plane coordinate system orthogonal to the optical axis of the rangefinder are known,
Further, since the coordinate in the optical axis direction is the distance measured by the distance measuring device, the coordinate of the hole edge point in the spatial coordinate system can be accurately measured.

【0009】[0009]

【0010】[0010]

【0011】[0011]

【0012】[0012]

【発明の実施の形態】本発明を、図10に示すワークた
るサブフレームWに形成したサスペンション連結用の孔
の位置の計測に適用した実施形態について説明する。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which the present invention is applied to the measurement of the position of a hole for connecting a suspension formed in a subframe W as a work shown in FIG. 10 will be described.

【0013】サブフレームWは、左右両側部の前後両端
に車体に対する計4個の取付部A1,A2,A3,A4
を備えており、各取付部A1〜A4をこれに形成した各
取付穴A1a〜A4aに挿通する穴径より小径のボルト
(図示せず)で穴位置のずれを許容し得るように車体に
締結する。
The sub-frame W has a total of four mounting portions A1, A2, A3, A4 attached to the vehicle body at the front and rear ends of both left and right sides.
The mounting portions A1 to A4 are fastened to the vehicle body with a bolt (not shown) having a diameter smaller than the hole diameter for inserting the mounting portions A1 to A4 into the mounting holes A1a to A4a formed therein. To do.

【0014】サブフレームWの左右各側部には、マルチ
リンク式サスペンションが組付けられる。マルチリンク
式サスペンションは、ナックルNの下部に連結するロア
アームと上部に連結するアッパアームとを夫々複数のリ
ンクで構成するサスペンションであり、図示のもので
は、ロアアームを、ナックルNの下部前端に連結した斜
め前方にのびるトレーリングリンクS1と、ナックルN
の下部中間に連結した横方向にのびるロアリンクS2
と、ナックルNの下部後端に連結したコントロールリン
クS3とで構成し、アッパアームを、ナックルNの上部
に連結した横方向にのびるアッパリンクS4と、ナック
ルNの上部に連結した斜め後方にのびるリーデングリン
クS5とで構成しており、これら各リンクをサブフレー
ムの側部に設けた各連結部B1〜B5に連結する。各連
結部B1〜B5は、対向する1対の板部Ba,Baを有
し、各リンクの端部を両板部Ba,Ba間に挿入して、
両板部Ba,Baに形成した孔Bb,Bbに挿通するボ
ルトにより各リンクの端部を各連結部に枢着している。
また、トレーリングリンクS1用とロアリンクS2用と
アッパリンクS4用とリーデングリンクS5用の連結部
B1,B2,B4,B5の片側の板部Bdの外面には、
図8(C)に示す如く、ボルトを螺合するナットBcが
溶着されている。コントロールリンクS3用の連結部B
3の各板部Baに形成する孔Bbは、図9(B)に示す
如く、長円形に形成されており、偏心カムによりボルト
を孔Bbの長手方向に変位させてアライメントを調整で
きるようにしている。
Multi-link suspensions are attached to the left and right sides of the sub-frame W. The multi-link suspension is a suspension in which a lower arm connected to the lower part of the knuckle N and an upper arm connected to the upper part of the knuckle N are each composed of a plurality of links. Trailing link S1 extending forward and knuckle N
Lateral lower link S2 connected to the lower middle of the
And a control link S3 connected to the lower rear end of the knuckle N, and the upper arm has a laterally extending upper link S4 connected to the upper part of the knuckle N and an obliquely rearward extending link connected to the upper part of the knuckle N. The link S5 is connected to each of the connecting portions B1 to B5 provided on the side portion of the subframe. Each of the connecting portions B1 to B5 has a pair of plate portions Ba and Ba facing each other, and the end portion of each link is inserted between both plate portions Ba and Ba,
The ends of each link are pivotally attached to each connecting portion by bolts inserted into holes Bb, Bb formed in both plate portions Ba, Ba.
Further, on the outer surface of the plate portion Bd on one side of the connecting portions B1, B2, B4, B5 for the trailing link S1, the lower link S2, the upper link S4, and the leading link S5,
As shown in FIG. 8C, a nut Bc for screwing a bolt is welded. Connection B for control link S3
As shown in FIG. 9B, the hole Bb formed in each plate portion Ba of No. 3 is formed in an oval shape, and the eccentric cam displaces the bolt in the longitudinal direction of the hole Bb so that the alignment can be adjusted. ing.

【0015】ところで、左右各側における連結部B1〜
B5の相対位置精度に狂いを生ずると、偏心カムによる
コントロールリンクS3の調整だけではアライメントを
正確に調整できなくなる。そこで、サブフレームWを組
立てた後、計測ステーションにおいて左右各側の連結部
B1〜B5の位置を計測し、連結部B1〜B5の相対位
置精度が公差内に収まっているか否かを判別し、公差内
に収まっているサブフレームWのみを合格品として次工
程に搬送するようにした。
By the way, the connecting portions B1 on the left and right sides
If the relative position accuracy of B5 is incorrect, the alignment cannot be accurately adjusted only by adjusting the control link S3 by the eccentric cam. Therefore, after assembling the sub-frame W, the positions of the left and right connecting portions B1 to B5 are measured in the measuring station to determine whether the relative position accuracy of the connecting portions B1 to B5 is within the tolerance. Only the sub-frame W that is within the tolerance is transferred to the next process as an acceptable product.

【0016】計測ステーションには、図1及び図2に示
す如く、サブフレームWを定位置に支持する治具1と、
サブフレームWの左右各側の連結部B1〜B5の位置を
計測する左右2台の計測装置2,2とが配置されてい
る。
In the measuring station, as shown in FIGS. 1 and 2, a jig 1 for supporting the subframe W at a fixed position,
Two left and right measuring devices 2 and 2 for measuring the positions of the connecting portions B1 to B5 on the left and right sides of the subframe W are arranged.

【0017】治具1は、図3乃至図5に明示する如く、
サブフレームWを各取付部A1〜A4において支持する
4個のワーク受け11,12,13,14を備えてお
り、各ワーク受け11〜14に、各取付部A1〜A4を
上方から狭圧固定する、シリンダ110a,120a,
130a,140aで開閉されるクランパー110,1
20,130,140を設けている。サブフレームWは
各取付部A1〜A4の車体に対する座面が下方を向くよ
うに上下反転した状態で図外のトランスファー装置によ
り計測ステーションに搬入され、トランスファー装置の
上下方向の動きで各取付部A1〜A4が各ワーク受け1
1〜14に載置されるようになっている。
The jig 1 is as shown in FIGS.
It is provided with four work receivers 11, 12, 13, 14 that support the sub-frame W at each of the mounting portions A1 to A4, and each mounting portion A1 to A4 is fixed to each of the work receiving receptacles 11 to 14 from above with a narrow pressure. Cylinders 110a, 120a,
Clampers 110 and 1 opened and closed by 130a and 140a
20, 130, 140 are provided. The sub-frame W is carried into a measuring station by a transfer device (not shown) in a state in which the seat surfaces of the mounting parts A1 to A4 with respect to the vehicle body are turned upside down, and the mounting device A1 is moved by a vertical movement of the transfer device. ~ A4 is for each work 1
1 to 14 are mounted.

【0018】ところで、連結部B1〜B5の相対位置精
度はサブフレームWを車体に実装したときに公差内に収
まっていれば充分である。そして、サブフレームWに多
少の歪みがあっても、各取付部A1〜A4を車体に締結
すると、歪みが矯正されて、連結部B1〜B5の相対位
置精度が公差内に収まることがあり、逆に、サブフレー
ム単体では連結部B1〜B5の相対位置精度が公差内に
収まっていても、取付部A1〜A4の高さ方向の位置ず
れで、車体実装時にサブフレームWが歪み、連結部B1
〜B5の相対位置精度が公差内に収まらなくなることが
ある。本実施形態では、各クランパー110〜140で
各取付部A1〜A4を狭圧固定することにより、サブフ
レームWは各取付部A1〜A4を車体に締結した状態、
即ち、車体実装時と同様の状態に保持され、車体実装時
に連結部B1〜B5の相対位置精度が公差内に収まるか
否かを正確に判別できる。
By the way, the relative positional accuracy of the connecting portions B1 to B5 is sufficient if it is within the tolerance when the subframe W is mounted on the vehicle body. Even if the sub-frame W is slightly distorted, when the mounting portions A1 to A4 are fastened to the vehicle body, the distortion may be corrected and the relative positional accuracy of the connecting portions B1 to B5 may fall within the tolerance. On the contrary, in the subframe alone, even if the relative position accuracy of the connecting portions B1 to B5 is within the tolerance, the subframe W is distorted during mounting on the vehicle body due to the displacement of the mounting portions A1 to A4 in the height direction, and B1
The relative position accuracy of ~ B5 may not be within the tolerance. In the present embodiment, the clampers 110 to 140 tightly fix the mounting portions A1 to A4, so that the subframe W has the mounting portions A1 to A4 fastened to the vehicle body.
That is, the same state as when mounting the vehicle body is maintained, and it is possible to accurately determine whether the relative positional accuracy of the connecting portions B1 to B5 is within the tolerance when mounting the vehicle body.

【0019】サブフレームWの左右両側部の後端の取付
部A3,A4を支持するワーク受け13,14は治具ベ
ース10に立設した支柱131,141上に固定されて
いるが、サブフレームWの左右両側部の前端の取付部A
1,A2を支持するワーク受け11,12は、治具ベー
ス10に立設した支柱111,121上にシリンダ11
2a,122aによりガイドバー112b,122bに
案内されて昇降されるように設けた昇降台112,12
2上に設けられている。そして、ワーク受け11,12
の高さをサブフレームWの機種に応じて切替え、後端の
ワーク受け13,14と前端のワーク受け11,12と
の高低差をサブフレームWを取付ける車体部分の後端と
前端の高低差に合致させるようにしている。
The work receivers 13 and 14 for supporting the mounting portions A3 and A4 at the rear ends of the right and left sides of the subframe W are fixed on the columns 131 and 141 which are erected on the jig base 10. Front end mounting parts A on both left and right sides of W
The work receivers 11 and 12 that support 1 and A2 are mounted on the pillars 111 and 121 that are erected on the jig base 10, and the cylinders 11 are arranged on the pillars 111 and 121.
Elevating stands 112, 12 provided so as to be elevated by being guided by guide bars 112b, 122b by 2a, 122a.
It is provided on 2. Then, the work receivers 11 and 12
The height difference between the rear-end work receivers 13 and 14 and the front-end work receivers 11 and 12 is changed according to the type of the sub-frame W, and the height difference between the rear end and the front end of the vehicle body part on which the sub-frame W is mounted. I am trying to match.

【0020】また、後端のワーク受け13,14は取付
部A3,A4が水平方向に相対移動できるように平坦に
形成されているが、前端のワーク受け11,12には、
取付部A1,A2に形成した取付穴A1a,A2aに嵌
合するロケートピン113,123が立設されている。
ロケートピン113,123は、図6に示す如く、上方
の小径ピン部113a,123aと下方の大径ピン部1
13b,123bとを有する段付形状に形成されてい
る。そして、取付穴A1a,A2aにカラーA1b,A
2bを嵌着した図中を付した機種の場合は、ワーク受
け11,12の高さを下げ、小径ピン部113a,12
3aをカラーA1b,A2bに嵌合させて、取付部A
1,A2が小径ピン部113a,123aの下端のワー
ク受け面113c,123cに着座するようにし、ま
た、取付穴A1a,A2aにカラーが嵌着されていない
図中を付した機種の場合は、ワーク受け11,12の
高さを上げ、大径ピン部113b,123bを取付穴A
1a,A2aに嵌合させて、取付部A1,A2が大径ピ
ン部113b,123bの下端のワーク受け面113
d,123dに着座するようにしている。尚、の機種
の取付穴A1a,A2aには後でゴムブッシュ付きのカ
ラーを嵌着する。
Further, the work receivers 13 and 14 at the rear end are formed flat so that the mounting portions A3 and A4 can be relatively moved in the horizontal direction.
Locate pins 113 and 123 that fit into the mounting holes A1a and A2a formed in the mounting portions A1 and A2 are provided upright.
As shown in FIG. 6, the locating pins 113 and 123 have upper small diameter pin portions 113a and 123a and lower large diameter pin portion 1a.
It is formed in a stepped shape having 13b and 123b. The collars A1b, A are attached to the mounting holes A1a, A2a.
In the case of the model shown in the figure in which 2b is fitted, the heights of the work receivers 11 and 12 are lowered, and the small-diameter pin portions 113a and 12 are
3a is fitted to the collars A1b and A2b, and the mounting portion A
1 and A2 are seated on the work receiving surfaces 113c and 123c at the lower ends of the small-diameter pin portions 113a and 123a, and in the case of the model shown in the drawing in which the collar is not fitted in the mounting holes A1a and A2a, Raise the height of the work receivers 11 and 12 and attach the large-diameter pin portions 113b and 123b to the mounting holes A.
1a, A2a, the mounting portion A1, A2 is the work receiving surface 113 of the lower end of the large diameter pin portion 113b, 123b.
I am trying to sit on d and 123d. A collar with a rubber bush will be fitted later into the mounting holes A1a and A2a of the model.

【0021】また、小径ピン部113a,123aは
の機種のカラーA1b,A2bの内径より小径に形成さ
れ、大径ピン部113b,123bはの機種の取付穴
A1a,A2aの内径より小径に形成されている。そし
て、小径ピン部113a,123aと大径ピン部113
b,123bとに夫々径方向外方に出没自在な複数のコ
レット113e,123e、113f,123fを設
け、小径ピン部113a,123aにコレット113
e,123eの内端面に当接するテーパー部を有するロ
ッド113g,123gを挿設すると共に、大径ピン部
113b,123bにコレット113f,123fの内
端面に当接するテーパー部を有するロッド113h,1
23hを挿設し、両ロッド113f,113h、123
f,123hを止め輪113i,123iで抜け止めら
れたピン113j,123jにより連結し、両ロッドを
下方のシリンダ113k,123kにより下動させたと
き、コレット113e,123e、113f,123f
が各ピン部113a,123a、113b,123bの
径方向外方に突出し、取付部A1,A2がロケートピン
113,123に対し芯決めされるようにしている。
The small-diameter pin portions 113a and 123a are formed to have a smaller diameter than the inner diameters of the collars A1b and A2b of the model, and the large-diameter pin portions 113b and 123b are formed to have a diameter smaller than the inner diameters of the mounting holes A1a and A2a of the model. ing. Then, the small-diameter pin portions 113a and 123a and the large-diameter pin portion 113
b and 123b are provided with a plurality of collets 113e, 123e, 113f, and 123f that can be projected and retracted outward in the radial direction, and the collet 113 is provided on the small-diameter pin portions 113a and 123a.
rods 113g and 123g having tapered portions that abut the inner end surfaces of e and 123e, and rods 113h and 1 3a that have tapered portions that abut the inner end surfaces of the collets 113f and 123f on the large diameter pin portions 113b and 123b.
23h is inserted, and both rods 113f, 113h, 123
When f and 123h are connected by pins 113j and 123j that are retained by retaining rings 113i and 123i and both rods are moved downward by lower cylinders 113k and 123k, collets 113e, 123e, 113f and 123f
Project outwardly in the radial direction of the respective pin portions 113a, 123a, 113b, 123b, and the mounting portions A1, A2 are centered with respect to the locate pins 113, 123.

【0022】また、ワーク受け11はワーク受け12に
対しサブフレームWの幅方向、即ち、左右方向に遊動自
在となっており、ワーク受け11の基準位置からの左右
方向への変位量を検出手段114で検出できるようにし
ている。これを詳述するに、ワーク受け11は、昇降台
112上の左右方向のレール115に摺動自在に支持さ
れており、昇降台112にワーク受け11に連結したポ
テンショメータから成る検出手段114を設け、ワーク
受け11の左右方向の変位を検出できるようにしてい
る。尚、ワーク受け11は、昇降台112上に設けた左
右1対の押圧シリンダ116,116により、常時は、
所定の基準位置に保持される。
The work receiver 11 is free to move in the width direction of the subframe W relative to the work receiver 12, that is, in the left-right direction, and the displacement amount of the work receiver 11 from the reference position in the left-right direction is detected. It can be detected by 114. To describe this in detail, the work receiver 11 is slidably supported by rails 115 on the elevating table 112 in the left-right direction, and the elevating table 112 is provided with detection means 114 composed of a potentiometer connected to the work receiver 11. The horizontal displacement of the work receiver 11 can be detected. In addition, the work receiver 11 is always operated by a pair of left and right pressing cylinders 116, 116 provided on the elevating table 112.
It is held at a predetermined reference position.

【0023】サブフレームWを治具1にセットする際は
ワーク受け11を基準位置に保持しておき、セット後押
圧シリンダ116,116によるワーク受け11の拘束
を解除し、この状態でロケートピン113,123のコ
レット113e,123e、113f,123fを突出
させて取付部A1,A2をロケートピン113,123
に対し芯決めする。この際、サブフレームWの左右方向
の幅寸法が基準寸法からずれていると、水平方向の芯決
め反力を受けてこのずれ量分だけワーク受け11が基準
位置から左右方向に変位し、検出手段114でこの変位
量が検出される。その後で各クランパー110〜140
を閉じて各取付部A1〜A4を拘束する。
When setting the subframe W on the jig 1, the work receiver 11 is held at the reference position, and after setting, the constraint of the work receiver 11 by the pressing cylinders 116, 116 is released, and in this state, the locate pin 113, The collets 113e, 123e, 113f, 123f of 123 are projected to attach the mounting portions A1, A2 to the locate pins 113, 123.
To the center. At this time, if the width dimension of the sub-frame W in the left-right direction is deviated from the reference dimension, the work receiver 11 is displaced in the left-right direction from the reference position by the amount of the deviation due to the horizontal centering reaction force, and detection is performed. The displacement amount is detected by the means 114. After that, each clamper 110-140
Is closed to restrain each of the mounting portions A1 to A4.

【0024】計測装置2は、ロボット20と、その動作
端たる手首20aに搭載した計測ヘッド21とで構成さ
れており、計測ヘッド21には図7(A)(B)に示す
ように測距器22が取付けられている。測距器22とし
ては、例えば、キーエンス社製のLK−2000シリー
ズのレーザ式測距器を用いることができる。この測距器
22は、レーザダイオード22aからのレーザ光(波長
670mm)を投光レンズ22bとバンドパスフィルタ2
2cとを介して計測対象物に照射し、反射光をバンドパ
スフィルタ22dと受光レンズ22eとを介してCCD
素子から成る受光素子22fで受光して、計測対象物ま
での距離を計測するものであり、基準計測距離が30mm
であって、±5mmの測定レンジにおいて1μmの分解能
で距離を測定できる。
The measuring device 2 is composed of a robot 20 and a measuring head 21 mounted on a wrist 20a, which is the operating end of the robot 20, and the measuring head 21 measures the distance as shown in FIGS. 7 (A) and 7 (B). A container 22 is attached. As the range finder 22, for example, a LK-2000 series laser range finder manufactured by Keyence Corporation can be used. The range finder 22 includes a projecting lens 22b and a bandpass filter 2 for emitting a laser beam (wavelength 670 mm) from a laser diode 22a.
2c to irradiate the object to be measured, and the reflected light is passed through the bandpass filter 22d and the light receiving lens 22e to the CCD.
Light is received by the light receiving element 22f composed of an element to measure the distance to the object to be measured, and the reference measurement distance is 30 mm.
Therefore, the distance can be measured with a resolution of 1 μm in the measurement range of ± 5 mm.

【0025】また、本実施形態では、計測ヘッド21に
1対の測距器22,22を取付けると共に、計測ヘッド
21の先端部に各測距器22の光軸22gを屈曲させる
1対のミラー23,23を取付け、一方の測距器22の
光軸22gの一方のミラー23による屈曲方向と、他方
の測距器22の光軸22gの他方のミラー23による屈
曲方向とが互に反対方向になるようにしている。
Further, in the present embodiment, a pair of distance measuring devices 22 and 22 are attached to the measuring head 21, and a pair of mirrors for bending the optical axis 22g of each distance measuring device 22 at the tip of the measuring head 21. 23 and 23 are attached, and the bending direction of one mirror 23 of the optical axis 22g of one distance measuring device 22 is opposite to the bending direction of the other mirror 23 of the optical axis 22g of the other distance measuring device 22. I am trying to become.

【0026】計測に際しては、サブフレームWの左右各
側の連結部B1〜B5に左右各側の計測装置2の計測ヘ
ッド21を順に移動し、各連結部B1〜B5の1対の板
部Ba,Ba間にミラー23,23を取付けた計測ヘッ
ド21の先端部を、各ミラー23で屈曲された各測距器
22の光軸22gが各板部Baの法線方向を向くように
挿入する。
In the measurement, the measuring heads 21 of the measuring devices 2 on the left and right sides are sequentially moved to the connecting portions B1 to B5 on the left and right sides of the subframe W, and the pair of plate portions Ba of the connecting portions B1 to B5 are set. , Ba are inserted so that the optical axis 22g of each distance measuring device 22 bent by each mirror 23 faces the normal direction of each plate portion Ba. .

【0027】そして、各測距器22から各ミラー23を
介して各板部Baに照射されるレーザ光の照射点が、図
8(A)に示す如く、孔Bbを横断するように設定した
走査線L1に沿って動くように、計測ヘッド21をロボ
ット20で移動する。尚、走査線L1は、各連結部B1
〜B5について予め定められている計測基準位置を基準
にして規定される光軸22gに直交する平面座標系にお
ける直線方程式として設定されており、走査線L1上の
各点の平面座標系における座標は既知である。
Then, the irradiation point of the laser beam irradiated from each distance measuring device 22 to each plate portion Ba via each mirror 23 is set to cross the hole Bb as shown in FIG. 8 (A). The measuring head 21 is moved by the robot 20 so as to move along the scanning line L1. The scanning line L1 is connected to each connecting portion B1.
Is set as a linear equation in a plane coordinate system orthogonal to the optical axis 22g defined based on a predetermined measurement reference position for B5 to B5, and the coordinates of each point on the scanning line L1 in the plane coordinate system are It is known.

【0028】照射点を走査線L1に沿って動かすと、測
距器22で測定される距離は、図8(B)に示す如く、
照射点が孔Bbに入ったときに計測限界まで急増し、照
射点が孔Bbから外れたときに急減する。従って、測定
距離が急増する走査線L1上の点の位置から、走査線L
1に交差する走査方向始端側の孔Bbの孔縁点Laの平
面座標系での座標を知ることができ、測定距離が急減す
る走査線L1上の点の位置から、走査線L1に交差する
走査方向終端側の孔Bbの孔縁点Lbの平面座標系での
座標を知ることができる。また、孔縁点La、Lbの光
軸方向の座標は測定距離から知ることができ、かくて、
孔縁点La,Lbの空間座標系における座標を計測でき
る。ここで、孔縁における測定距離の変化は非常に急峻
であり、そのため、ノイズ等の影響を受けることなく孔
縁点の座標を正確に計測できる。
When the irradiation point is moved along the scanning line L1, the distance measured by the range finder 22 is as shown in FIG. 8 (B).
When the irradiation point enters the hole Bb, it sharply increases to the measurement limit, and when the irradiation point deviates from the hole Bb, it sharply decreases. Therefore, from the position of the point on the scanning line L1 where the measurement distance increases sharply,
It is possible to know the coordinates in the plane coordinate system of the hole edge point La of the hole Bb on the starting end side in the scanning direction that intersects 1 and intersect the scanning line L1 from the position of the point on the scanning line L1 where the measurement distance sharply decreases. The coordinates of the hole edge point Lb of the hole Bb on the terminal side in the scanning direction in the plane coordinate system can be known. Further, the coordinates of the hole edge points La and Lb in the optical axis direction can be known from the measurement distance, and thus,
The coordinates of the hole edge points La and Lb in the spatial coordinate system can be measured. Here, the change in the measurement distance at the hole edge is very steep, so that the coordinates of the hole edge point can be accurately measured without being affected by noise or the like.

【0029】孔縁点Lbの座標が計測されると、走査線
L1に対し所定角度傾いた孔縁点Lbを通る第2の走査
線L2に沿って照射点を動かし、測定距離が急減する走
査線L2上の点の位置から走査線L2に交差する孔Bb
の孔縁点Lcの空間座標系における座標を求める。そし
て、上記3つの孔縁点La,Lb,Lcの座標から孔B
bの中心0の空間座標系における座標を幾何学的に算出
する。尚、1本目の走査線L1を含む複数本の走査線を
予め設定しておき、4個以上の孔縁点の座標を測定して
孔Bbの中心座標を回帰処理によって算出することも可
能であるが、本実施形態のように孔縁点Lbを起点とし
て2本目の走査線L2を設定すれば、走査に要する時間
を短縮して計測作業の能率を向上でき、有利である。
When the coordinates of the hole edge point Lb are measured, the irradiation point is moved along the second scanning line L2 passing through the hole edge point Lb inclined by a predetermined angle with respect to the scanning line L1, and the scanning distance is rapidly reduced. Hole Bb intersecting the scanning line L2 from the position of the point on the line L2
The coordinates of the hole edge point Lc of the above are calculated in the spatial coordinate system. Then, from the coordinates of the three hole edge points La, Lb, and Lc, the hole B
The coordinates in the spatial coordinate system of the center 0 of b are calculated geometrically. It is also possible to preset a plurality of scanning lines including the first scanning line L1 and measure the coordinates of four or more hole edge points to calculate the center coordinates of the hole Bb by regression processing. However, setting the second scanning line L2 starting from the hole edge point Lb as in the present embodiment is advantageous in that the time required for scanning can be shortened and the efficiency of measurement work can be improved.

【0030】ところで、ナットBcを溶着した板部Ba
の孔Bbの計測では、図8(C)に示す如く、照射点が
板部Baの板面から孔Bb内に臨むナットBcの端面に
移行したところで測定距離が板部Baの板厚分だけ増加
し、照射点がナットBcの内径内に入ったところで測定
距離が計測限界に急増する。そこで、走査線とナットB
cの内径円との交点の位置を孔縁点の位置として測定し
て内径円の中心位置を求め、これと板部Baの測定距離
とから板部Baの板面と同一平面上における内径円の中
心座標を求め、これを孔Bbの中心0の座標としてい
る。
By the way, the plate portion Ba to which the nut Bc is welded
In the measurement of the hole Bb, the measurement distance is equal to the plate thickness of the plate portion Ba when the irradiation point moves from the plate surface of the plate portion Ba to the end surface of the nut Bc facing the hole Bb, as shown in FIG. 8C. When the irradiation point increases within the inner diameter of the nut Bc, the measurement distance rapidly increases to the measurement limit. Therefore, scan line and nut B
The position of the intersection of c with the inner diameter circle is measured as the position of the hole edge point to obtain the center position of the inner diameter circle, and from this and the measured distance of the plate portion Ba, the inner diameter circle on the same plane as the plate surface of the plate portion Ba The center coordinates of the hole Bb are calculated and used as the coordinates of the center 0 of the hole Bb.

【0031】そして、図9(A)に示す如く、一方の板
部Baの孔Bbの中心0と他方の板部Baの孔Bbの中
心0との結線の中点Mの座標を求め、この中点Mを連結
部の位置を現わす点として連結部の基準位置からのずれ
を測定している。尚、孔Bbを長円形に形成する、コン
トロールリンクS3用の連結部B3の位置計測に際して
は、図9(B)に示す如く、一方の板部Baの孔Bbの
長手方向一方の半円部の中心0の座標と、他方の板部B
aの孔Bbの長手方向他方の半円部の中心0の座標とを
夫々の半円部に対して設定した走査線L1,L2に交差
する孔縁点La,Lb,Lcの座標から算出し、両中心
0,0の結線の中点Mを連結部B3の位置を現わす点と
してその座標を求めている。
Then, as shown in FIG. 9 (A), the coordinates of the midpoint M of the connection between the center 0 of the hole Bb of the one plate portion Ba and the center 0 of the hole Bb of the other plate portion Ba are determined, and The displacement from the reference position of the connecting portion is measured with the midpoint M as the point representing the position of the connecting portion. When measuring the position of the connecting portion B3 for the control link S3 in which the hole Bb is formed in an oval shape, as shown in FIG. 9 (B), one plate portion Ba has one semicircular portion in the longitudinal direction of the hole Bb. Coordinates of the center of 0 and the other plate B
The coordinates of the center 0 of the other semicircular portion of the hole Bb of the a in the longitudinal direction are calculated from the coordinates of the hole edge points La, Lb, Lc intersecting the scanning lines L1, L2 set for the respective semicircular portions. , The coordinates of the midpoint M of the connection between the centers 0 and 0 are determined as the point representing the position of the connecting portion B3.

【0032】ところで、サブフレームWは上記の如く取
付穴A1〜A4の位置ずれを許容できるように車体に取
付けられるため、サブフレームWの左右方向の幅寸法が
公差の範囲でばらついても問題はない。然し、サブフレ
ームWの左右各側の連結部B1〜B5の位置を左右各側
の計測装置2で上記の如く計測する際、幅寸法に誤差が
あると、前後方向に傾むいたトレーリングリンクS1用
やリーデングリンクS5用の連結部B1,B5に対する
計測基準位置に計測ヘッド21を移動する際、計測ヘッ
ド21が連結部B1,B5に干渉して、その先端部を連
結部B1,B5の板部Ba,Ba間に挿入できなくなっ
たり、挿入できても走査中に先端部が板部に当接して、
計測ミスを生ずることがある。
By the way, since the sub-frame W is mounted on the vehicle body so that the displacement of the mounting holes A1 to A4 can be allowed as described above, there is no problem even if the lateral width of the sub-frame W varies within the tolerance range. Absent. However, when the positions of the connecting portions B1 to B5 on the left and right sides of the subframe W are measured by the measuring device 2 on the left and right sides as described above, if there is an error in the width dimension, the trailing link tilted in the front-rear direction. When the measuring head 21 is moved to the measurement reference position with respect to the connecting portions B1 and B5 for S1 and the leading link S5, the measuring head 21 interferes with the connecting portions B1 and B5, and the tip portion of the measuring head 21 moves to the connecting portions B1 and B5. It becomes impossible to insert between the plate parts Ba and Ba, or even if it can be inserted, the tip part comes into contact with the plate part during scanning,
Measurement error may occur.

【0033】ここで、サブフレームWの幅寸法の誤差
は、上記の如く左右方向に遊動自在とした左右一側のワ
ーク受け11の基準位置からの変位量として検出手段1
14で検出される。そのため、左右一側の計測装置2の
各連結部B1〜B5に対する計測基準位置を検出手段1
14で検出された変位量分だけ左右方向に補正すれば、
各連結部B1〜B5の板部Ba,Ba間に計測ヘッド2
1の先端部を確実に挿入でき、計測ミスを生じない。
Here, the error in the width dimension of the sub-frame W is detected by the detecting means 1 as the amount of displacement from the reference position of the work receiver 11 on the left and right sides which is free to move in the left and right directions as described above.
Detected at 14. Therefore, the measurement reference position for each of the connecting portions B1 to B5 of the measuring device 2 on the left and right sides is detected by the detecting means 1.
If the displacement amount detected in 14 is corrected in the left-right direction,
The measuring head 2 is provided between the plate portions Ba of the connecting portions B1 to B5.
The tip of No. 1 can be reliably inserted, and no measurement error occurs.

【0034】また、治具ベース10上には、U字状の枠
体から成る左右1対の標準器15,15が設けられてお
り、計測装置2で連結部B1〜B5の位置を計測する前
に、計測ヘッド21の先端部を標準器15の対向する側
板15a,15a間に挿入して、各側板15aに形成し
た孔15bの中心座標を計測し、両側の孔15b,15
bの中心を結ぶ結線の中点の基準位置からのずれを計測
している。このずれはロボット20による計測ヘッド2
1の位置決め誤差に起因するものであり、各連結部B1
〜B5に対する計測基準位置をこのずれに応じて補正し
て、計測ヘッド21が各連結部B1〜B5に対し正しく
位置決めされるようにする。
Further, on the jig base 10, a pair of left and right standard devices 15 and 15 made of a U-shaped frame is provided, and the measuring device 2 measures the positions of the connecting portions B1 to B5. First, the tip of the measuring head 21 is inserted between the side plates 15a, 15a facing each other of the standard device 15, the center coordinates of the holes 15b formed in each side plate 15a are measured, and the holes 15b, 15 on both sides are measured.
The deviation of the midpoint of the line connecting the centers of b from the reference position is measured. This deviation is caused by the measuring head 2 by the robot 20.
1 due to the positioning error of each connection portion B1
The measurement reference position with respect to .about.B5 is corrected according to this deviation so that the measuring head 21 is correctly positioned with respect to each of the connecting portions B1 to B5.

【0035】上記の如くサブフレームWの左右各側の連
結部B1〜B5の位置を計測すると、連結部B1〜B5
の相対位置精度が公差内に収まっているか否かを判別
し、公差内に収まっていないサブフレームWは不合格品
として回収し、公差内に収まっているサブフレームWの
みを次工程に搬送する。
When the positions of the connecting portions B1 to B5 on the left and right sides of the subframe W are measured as described above, the connecting portions B1 to B5 are measured.
It is determined whether or not the relative position accuracy is within the tolerance, the subframe W that is not within the tolerance is collected as a rejected product, and only the subframe W that is within the tolerance is conveyed to the next process. .

【0036】[0036]

【発明の効果】以上の説明から明らかなように、本発明
によれば、測距器を用いることで孔の位置をノイズ等の
影響を受けずに高精度で計測でき、また、ミラーを用い
ることでワークの込み入った場所に形成した孔の位置も
計測でき、更に、測距器とミラーとを各1対に設けるこ
とで対向する1対の板部に形成した孔の位置を能率良く
計測できる。
As is apparent from the above description, according to the present invention, the distance measuring device can be used to measure the position of the hole with high accuracy without being affected by noise and the like, and the mirror is used. By doing so, it is possible to measure the position of the hole formed in the complicated place of the work, and by providing the distance measuring device and the mirror for each pair, the position of the hole formed on the pair of plate parts facing each other can be efficiently measured. it can.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に係る計測装置を配置した計測ステー
ションの平面図
FIG. 1 is a plan view of a measuring station in which a measuring device according to the present invention is arranged.

【図2】 計測ステーションの正面図[Figure 2] Front view of the measuring station

【図3】 治具の平面図[Fig. 3] Plan view of the jig

【図4】 治具の側面図[Fig. 4] Side view of the jig

【図5】 図3のV−V線で截断した正面図5 is a front view cut along the line VV of FIG.

【図6】 ロケートピンの縦断面図FIG. 6 is a vertical sectional view of a locate pin.

【図7】 (A)計測ヘッドの正面図、(B)計測ヘッ
ドの平面図
7A is a front view of the measuring head, and FIG. 7B is a plan view of the measuring head.

【図8】 (A)走査線の孔との関係を示す図、(B)
孔と測定距離との関係を示す図、(C)ナット付きの孔
と測定距離との関係を示す図
FIG. 8A is a diagram showing the relationship between scanning lines and holes, and FIG.
The figure which shows the relationship between a hole and a measurement distance, (C) The figure which shows the relationship between a hole with a nut, and a measurement distance

【図9】 (A)計測対象たる連結部の位置の求め方を
示す図、(B)長円形の孔を形成した連結部の位置の求
め方を示す図
FIG. 9A is a diagram showing how to determine the position of a coupling portion to be measured, and FIG. 9B is a diagram showing how to determine the position of a coupling portion having an oval hole.

【図10】 サブフレームの斜め上方から見た斜視図FIG. 10 is a perspective view of the subframe as seen from diagonally above.

【符号の説明】[Explanation of symbols]

2 計測装置 20 ロボット 21 計測ヘッド 22 測距器 23 ミラー Bb 孔 L1,L2 走査線 La,Lb,Lc 孔縁点 0 孔の中心 2 measuring devices 20 robots 21 measuring head 22 rangefinder 23 Mirror Bb hole L1, L2 scanning line La, Lb, Lc hole edge point 0 hole center

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01B 11/00 - 11/30 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G01B 11/00-11/30

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 第1のワークに設けた、該第1のワーク
に連結される第2のワークの連結部の位置を計測するワ
ーク連結部位置の計測方法であって、前記連結部に互いに対向する1対の孔を形成したものに
おいて、 計測対象物に対する投受光で測定対象物との間の距離を
測定する測距器を用い、 測距器を連結部に対する光線の照射点が前記一対の
をそれぞれ横断するように設定した走査線に沿って動く
ように前記第1のワークに対し移動し、 この移動中に測距器で測定された連結部との間の距離の
変化に基づいて走査線に交差する孔の複数の孔縁点の
座標を求め これら複数の孔縁点の座標から各孔の中心の座標を算出
し、この算出した連結部の一方の孔の中心と他方の孔の
中心との結線の中点の座標を求め、 この中点を連結部の位置を現す点として、この中点の基
準位置からのずれを測定する、 ことを特徴とするワーク連結部位置の計測方法。
1. A first work provided on the first work.
For measuring the position of the connecting part of the second work connected to the
A method for measuring the position of a connecting portion of a link , in which a pair of holes facing each other are formed in the connecting portion.
Oite, using a range finder for measuring the distance between the measuring object with light emitting and receiving for the measurement object, so that the irradiation point of the light beam with respect to connecting portion said range finder traverses each said pair of holes Each hole is moved relative to the first work piece so as to move along the set scanning line, and each hole intersects the scanning line based on the change in the distance between the first work and the connecting portion measured by the distance measuring device during the movement. obtains a plurality of coordinates of Anaenten of calculating the center coordinates of each hole from the plurality of hole edge point coordinates
However, the calculated center of one hole of the connecting part and the calculated
Obtain the coordinates of the midpoint of the line connecting to the center, and use this midpoint as the point that represents the position of the connection,
A method for measuring a position of a work connecting portion , which comprises measuring a deviation from a quasi-position .
【請求項2】 1本目の走査線に交差する2つの孔縁点
の座標を求めると共に、該座標のいずれか一方を含み、
前記1本目の走査線に対し所定角度傾いた2本目の走査
線に沿って照射点を動かすことにより、該2本目の走査
線に交差する少なくとも1つの孔縁点の座標を求め、こ
れら孔縁点の座標から孔の中心の座標を算出することを
特徴とする請求項1に記載のワーク連結部位置の計測方
法。
2. The coordinates of two hole edge points intersecting with the first scanning line are obtained, and one of the coordinates is included,
Second scan tilted by a predetermined angle with respect to the first scan line
By moving the irradiation point along the line, the coordinates of at least one hole edge point intersecting the second scanning line are obtained, and the coordinates of the center of the hole are calculated from the coordinates of these hole edge points. The method for measuring the position of the work connecting portion according to claim 1.
JP18155097A 1997-07-07 1997-07-07 How to measure hole position Expired - Fee Related JP3432706B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP18155097A JP3432706B2 (en) 1997-07-07 1997-07-07 How to measure hole position
CA002242179A CA2242179C (en) 1997-07-07 1998-07-03 Method of, and apparatus for, measuring position of hole
US09/110,320 US6163035A (en) 1997-07-07 1998-07-06 Method of, and apparatus for, measuring position of hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18155097A JP3432706B2 (en) 1997-07-07 1997-07-07 How to measure hole position

Publications (2)

Publication Number Publication Date
JPH1123217A JPH1123217A (en) 1999-01-29
JP3432706B2 true JP3432706B2 (en) 2003-08-04

Family

ID=16102754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18155097A Expired - Fee Related JP3432706B2 (en) 1997-07-07 1997-07-07 How to measure hole position

Country Status (1)

Country Link
JP (1) JP3432706B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010047086A (en) * 2008-08-20 2010-03-04 Central Motor Co Ltd Nut detection system for body panel
JP2010276581A (en) * 2009-06-01 2010-12-09 Honda Motor Co Ltd Sensing erroneous determination prevention method
JP2011106896A (en) * 2009-11-16 2011-06-02 Mitsutoyo Corp Non-contact probe and measuring machine

Also Published As

Publication number Publication date
JPH1123217A (en) 1999-01-29

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