JP3428053B2 - Heater for producing oxide superconducting tape and method for producing oxide superconducting tape - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater and a method for producing an oxide superconducting tape used in a method for producing a long oxide superconducting tape of the order of several meters to several km. Is being applied and developed in fields such as power transportation, superconducting magnets, and superconducting energy storage.

[0002]

2. Description of the Related Art Oxide superconductors are excellent superconductors exhibiting a critical temperature exceeding liquid nitrogen temperature. In order to use this oxide superconductor as a practical superconductor as described above, It is necessary to obtain an oxide superconductor having a high critical current density by aligning the crystal orientations. That is, since the oxide superconductor has the property of easily passing electricity in a specific direction of its crystal structure and having difficulty in passing electricity in a specific direction,
It is necessary to manufacture an oxide superconductor having crystal orientation as good as possible. Further, when the composition of the oxide superconductor deviates from the specified composition to some extent or when a slight amount of impurities are included, the critical current density tends to decrease.

Therefore, various means have heretofore been attempted in order to form an oxide superconducting layer having a good crystal orientation and a uniform composition on a substrate such as a substrate or a metal tape. As one of the methods, a single crystal base material such as MgO or SrTiO ₃ having a crystal structure similar to that of the oxide superconductor is used, and a film forming method such as sputtering or laser deposition method is used on the single crystal base material. A method of forming a precursor thin film of an oxide superconductor and heat treating the precursor thin film to form an oxide superconducting layer is practiced.

If an oxide superconducting layer is formed on a base material of a single crystal material such as MgO or SrTiO ₃ by a film forming method, the oxide superconducting layer is formed so as to match the crystal of the base material. Since the crystal orientation can be improved and the thin film composition can be made uniform, an oxide superconducting layer having a high critical current density can be obtained. However, in order to obtain a long oxide superconductor in consideration of the above-mentioned practical use purpose, oxidation is performed by a film formation method on a metal tape-shaped substrate instead of the single crystal substrate. It is necessary to form a superconducting layer to manufacture a long superconductor. Then, in order to form the oxide superconducting layer on the long tape-shaped substrate as described above, the precursor thin film of the oxide superconductor is heated on the substrate to adjust the crystal structure of the thin film and the precursor. It is necessary to supply a sufficient amount of oxygen into the body thin film.

4 (a) to 4 (c) are provided inside a vacuum chamber provided in a film forming apparatus such as a sputtering apparatus or a laser deposition apparatus for producing an oxide superconductor,
It shows one structural example of a conventional heater 30 for heating the tape-shaped base material and the precursor thin film as described above. This heater 30 has a case body 31 made of a heat conductor such as metal, and a heating element 32 made of a heating coil inside a case body 31.
A heat plate 33 made of a heat-resistant metal such as Inconel is fixed to the upper surface of the case body 31 and fixed to the inner bottom portion of the vacuum chamber of the heating film forming apparatus. Then, the heater 30 having the above-described structure sequentially feeds the tape-shaped base material 37 onto the upper surface of the hot plate 33 so that the tape-shaped base material 37 can be slid in contact with the base material 37, and the base material 37 can be sequentially drawn from the upper surface. In order to be able to perform, the heater 30 is provided on both sides with a tape-shaped substrate feeding device and a winding device (not shown). Also, the heater 30
A target of a sputtering apparatus and a target of a laser vapor deposition apparatus are provided above the above, and particles generated from these targets are sequentially deposited on the upper surface of the base material 37 on the heater 30 to form an oxide superconductor. The precursor thin film can be formed.

The heater 30 having the above structure
Because the oxide superconductor is formed in a vacuum chamber in a pure O ₂ atmosphere of about 1 × 10 ^-1 to 1 × 10 ¹ Torr, it is excellent in heat resistance as a material of the heating element 32. Pt or the like having a high melting point is often used.

[0007]

In the apparatus having the above structure, the precursor thin film is formed on the upper surface of the base material 37 by sputtering or laser vapor deposition while moving the base material 37 on the upper surface side of the heater 30. The heater 30 can heat the base material 37 and the precursor thin film. However, when the precursor thin film is heated by such a heater 30, the base material 37 is heated while sliding on the upper surface of the heating plate 33 of the heater 30 as described above. There is a problem that friction occurs between the base material 37 and the heating plate 33, the sliding speed of the base material 37 cannot be kept constant, and the temperature of the surface of the base material 37 becomes uneven.

For example, the hot plate 3 of the heater 30 described above.
3, the base material 37 is stopped and heated until the surface temperature of the base material 37 reaches 720 ° C.
While moving the upper surface of the heating plate 33 at a speed of traveling about 200 mm in time, the temperature change on the base material sliding surface at the center of the heating plate 33 was measured by a radiation thermometer,
The results shown in FIG. 5 were obtained.

As shown in FIG. 5, the temperature of the surface of the base material 37 is 720 which is the initial set temperature when the sliding starts.
A fluctuation of ± 50 ° C is shown at the boundary of ° C. And
When the superconducting properties of the oxide superconducting tape obtained by heating as described above were measured, the critical current density (J _c ) was 1
Only a low value of about 0 ¹ to 10 ² A / cm ² was obtained.

Further, the heating element 32 of the heater 30 for heating the base material 37 has excellent heat resistance such as Pt,
Although a material having a high melting point is used, when the Pt is heated to 1000 ° C. or higher in the above-described reduced pressure oxidizing atmosphere, the evaporation of Pt is induced. There is a problem that it adheres to the outer wall of the housed case body 31 to cause insulation failure between the heating element 32 and the case body 31.

Therefore, the present invention has been made in view of the above circumstances, and when a precursor thin film of an oxide superconductor is formed on a substrate by a film forming method such as sputtering or laser vapor deposition, a film is formed. The entire precursor thin film can be uniformly heated at an ideal film forming temperature, and the evaporation of the heating element constituents caused by high temperature heating in a reduced pressure oxygen atmosphere is prevented, so that the case body generated by this vapor is generated. We provide a heater for oxide superconducting tape that avoids insulation failure with the case, prevents contamination in the case body, and extends the life of the heating element itself. It is an object of the present invention to provide a method capable of obtaining an oxide superconducting tape which can be heated in a high temperature and exhibits a good critical current density.

[0012]

A heater for manufacturing an oxide superconducting tape according to claim 1, wherein a precursor of an oxide superconducting layer is formed on a base material by a film forming method in order to solve the above problems. In a heater provided inside a vacuum chamber for heating a tape-shaped substrate passing through an upper surface thereof, the heating heater includes a heating element, a case body housing the heating element, and a heating plate covering the upper surface of the case body. And an opening having an opening width narrower than the width of the base material is formed along the base material sliding portion of the hot plate, and the base material sliding portion is opened.
The base material that slides so as to close the mouth is inserted through the opening.
It is characterized in that it can be freely heated by the heating element .

A heater for producing an oxide superconducting tape according to claim 2 is intended to solve the above-mentioned problems.
The heating element of the oxide superconducting tape for manufacturing a heater according to the lamp heater of the infrared heating method heating elements in a quartz tube is sealed is used, the lamp heater is a hot plate
It is arranged inside the case body so as to be covered by . Oxidation according to claim 3.
A heater for manufacturing superconducting tape solves the above problems.
In order to manufacture the oxide superconducting tape according to claim 2,
The lamp heater of the heating heater is installed along the opening.
It is characterized by being arranged on both sides.

In order to solve the above-mentioned problems, a method for manufacturing an oxide superconducting tape according to a fourth aspect of the present invention comprises a heating element, a case body for accommodating the heating element, and a heating plate covering the upper surface of the case body. A heating heater for producing an oxide superconducting tape, in which an opening having an opening width narrower than the width of the base material is formed along the base material sliding portion of the hot plate, is installed in a vacuum chamber. by sliding the tape-shaped base material to pass in a state of blocking the upper surface, while heating the substrate slides over the opening to the predetermined deposition temperature desired at the time of film formation, the substrate upward Is deposited to form a precursor thin film of the oxide superconducting layer on the upper surface of the base material.

In order to solve the above-mentioned problems, the method for producing an oxide superconducting tape according to a fifth aspect is such that the heating element in the method for producing an oxide superconducting tape according to the fourth aspect has a heating element in a quartz tube. An enclosed infrared heating lamp heater is used , and the lamp heater is covered with the hot plate.
Place it inside the case so that
The radiant heat of the lamp heater is transferred through the opening of the heat storage plate.
The lower surface of the base material is irradiated to heat the base material . The oxide superconducting tape according to claim 6.
The oxide superconducting tape according to claim 5,
In the manufacturing method of, the lamp heater is provided in the opening.
Along the sides of the lamp heater, the lamp heater
Characterized by heating the substrate through the mouth
Is.

[0016]

Heater according to the present invention as [act above description is composed of a heating element and a heat plate case body and covering the case body top surface for accommodating this, along the base sliding portion of the hot plate And an opening having an opening width narrower than the width of the base material is provided, and a tape-shaped base material is slid on the upper surface of the opening of the heater while contacting the side portion of the hot plate. The precursor thin film of the oxide superconductor is formed while the substrate is heated by the heat radiated from the heating element, so that the substrate is uniformly heated and the precursor is Oxygen in the atmosphere can be sufficiently taken in, and a precursor of an oxide superconductor having good crystallinity can be produced. Also, when the base material is in contact with the side portion of the hot plate,
The base material closes the opening,
When forming a precursor thin film of an oxide superconductor, a film forming substance
Can be prevented from adhering to the heating element.

Further, by uniformly heating the entire base material as described above, it is possible to reduce the thermal stress due to the difference in thermal expansion between the base material and the precursor thin film. Does not cause cracks. Therefore, if this precursor thin film is heat-treated in an oxygen atmosphere, a superconducting tape having an oxide superconducting layer having a high critical current density and excellent superconducting properties can be obtained.

Furthermore, when the base material slides on the opening as described above, the sliding speed or the radiant heat of the heating element is adjusted to freely set the heating temperature to a desired temperature. It can be controlled, and the film forming temperature can be set in consideration of the precursor of the oxide superconductor or the composition of the substrate. Therefore, it is possible to produce an oxide superconducting tape which is versatile.

Further, by enclosing the heating element of the heating heater in a quartz tube and using it as an infrared type heater, Pt which forms the heating element even if it is heated to 1000 ° C. or higher in a reduced pressure oxidizing atmosphere. It is possible to prevent the evaporation of constituent substances such as the above, prevent contamination in the case body, and prolong the life of the heating element body.

[0020]

EXAMPLE An example of the heater for producing an oxide superconducting tape and the method for producing an oxide superconducting tape of the present invention will be described below. FIG. 1 (a) shows an example of a heater according to the present invention installed inside a vacuum chamber of a film forming apparatus such as a laser vapor deposition apparatus or a sputtering apparatus for producing an oxide superconductor. The vacuum chamber of the film forming apparatus is connected to a vacuum exhaust apparatus so that the inside of the vacuum chamber can be in a reduced pressure atmosphere, and is connected to an oxygen gas supply source to supply a desired amount of oxygen gas under the reduced pressure atmosphere. It can be supplied.

The heater 1 in this example is a horizontally long heater,
An infrared heating type lamp heater 5 in which a heating element 4 is vacuum-sealed in a quartz tube 3 is housed inside a horizontally long case body 2, and the upper surface of the case body 2 is provided with two heat-shielding lamps. The plates 6a and 6b are provided. An opening 8 having a space slightly smaller than the tape width H is formed along the position where the tape-shaped substrate 7 slides between the two hot plates 6a and 6b.

The heating element 4 of the lamp heater 5 is a heating coil formed of tungsten (W) or the like, and the case body 2 is formed of Inconel or the like having excellent heat resistance and a high melting point. The heat generated by the lamp heater 5 is uniformly radiated upward. The lids 6a and 6b are made of Inconel made of the same material as the case body 2.

Then, on the opening 8 formed between the heat plates 6a and 6b of the heater 1 having the above-mentioned structure, the side portions of both the heat plates 6a and 6b are slid in contact with each other by about W = 5 mm. In such a state, the tape-shaped substrate 7 is moved in parallel from the right side to the left side in FIG. The widths W, W at which the base material 7 contacts on both side portions of the hot plates 6a, 6b are made as small as possible, and the base material 7 and the heat plates 6a,
It is necessary to reduce friction with 6b as much as possible, but when vapor-depositing a precursor thin film of an oxide superconductor on the base material 7, the vapor deposition material is not evaporated to the lamp heater 5 to a certain extent. It is necessary to maintain the contact widths W and W.

As the base material 7, a metal tape made of Hastelloy or a noble metal may be used, and a YSZ (yttrium-stabilized zirconia) layer or an MgO layer as an intermediate layer is coated on the metal tape. You may use what was done. Further, as a moving mechanism of the base material 7, a tape-shaped base material 7 feeding device is provided on both sides of the heater 1, and a tape-shaped base material 7 winding device is provided on the left side of the heater 1. It is provided so that the base material 7 can be sent out and moved from the delivery device to the winding device side.

Therefore, in the heater 1 having the above structure, the heat generated by energizing the lamp heater 5 is uniformly radiated upward by the case body 2, and the base material 7 is placed on the upper surface of the case body 2. The base material 7 is heated by moving on the opening 8 while being in contact with each side of the heating plates 6a and 6b for about 5 mm. Here, the base material 7 can directly receive the heat generated from the lamp heater 5 from the openings 8 of the heat plates 6a and 6b, and the base material 7 can be the heat plates 6a and 6b. The friction generated by the sliding contact with each side is negligibly small and has no influence on the sliding speed of the base material 7. Therefore, the temperature control of the surface of the base material 7 is performed by the lamp. It can be freely adjusted by controlling the radiant heat of the heater 5 and the sliding speed of the substrate 7.

Therefore, a method of manufacturing an oxide superconducting tape using the heater 1 having the above structure will be described. First, as shown in FIG. 1, the base material 7 is placed on the opening 8 of the heater 1 and the precursor of the oxide superconductor is formed into a film. Before forming the precursor thin film, An example will be described in which a polycrystalline thin film such as YSZ (yttrium-stabilized zirconia) is formed on the base material 7 as an intermediate layer. In order to form a polycrystalline thin film of YSZ as an intermediate layer on the base material 7, a polycrystalline thin film is formed on the base material 7 by a sputtering device using a YSZ target or a laser deposition device. . Since the intermediate layer of this polycrystalline thin film has a crystal structure similar to that of the oxide superconductor, the intermediate layer is provided in consideration of crystal conformity, and the base material 7 and the oxidation formed on the base material 7 are taken into consideration. The purpose of this is to control the element diffusion reaction between the superconductor and the precursor thin film, and to eliminate the thermal stress caused by the difference in the coefficient of thermal expansion between the base material 7 and the precursor thin film.

After the YSZ polycrystal thin film is formed on the base material 7 as described above, the oxide superconductor precursor thin film is formed on the polycrystal thin film. To form this precursor thin film on the polycrystalline thin film, the laser deposition apparatus 10 shown in FIG. 2 is used.

The laser deposition apparatus 10 includes a processing container 11
In the vapor deposition processing chamber 12 inside the processing container 11,
The base material 7 and the target 13 can be installed. That is, the base 14 is provided at the bottom of the vapor deposition processing chamber 12, and the heater 1 is provided above the base 14.
The base material 7 can be moved horizontally above it, and the target 13 supported by a support holder 15 is provided obliquely above the heater 1 in an inclined state. The processing container 11 is connected to a vacuum exhaust device (not shown) via an exhaust hole 16 so that the inside pressure can be reduced.

The target 13 has a composition similar to or close to that of the oxide superconducting thin film to be formed, or a complex oxide sintered body or oxide superconductor containing a large amount of components that easily escape during film formation. It consists of a plate such as. The base 14 is for supporting the heater 1, and the heater 1 has the heating element 4 and the heating plate 6a enclosed in the quartz tube 3 as described in the previous example.
6b, and the openings 8 are formed by the heat plates 6a and 6b. By sliding the base materials 6a and 6b on the openings 8, the base material 7 is gently heated to a desired temperature. It can be heated.

A feeding device 22 for feeding the tape-shaped substrate 7 is provided on the right side of the heater 1 and a winding device 23 for the tape-shaped substrate 7 is provided on the left side of the heater 1. Is provided, and the base material 7 is provided from the delivery device 22.
Is sent to the upper surface side of the heater 1, and after passing through the opening 8 of the heater 1, it can be wound by the winding device 23. The heating temperature of the base material 7 can be appropriately adjusted by the radiation heat from the heating element 3 and the sliding speed of the base material.

On the other hand, a laser emitting device 17, a first reflecting plate 18, a condenser lens 19 and a second reflecting mirror 20 are provided on the side of the processing container 11, and a laser beam generated by the laser emitting device 17 is provided. The target 13 can be focused and irradiated on the side wall of the processing container 11 through the transparent window 21. The laser emitting device 17 may be any one of a YAG laser, a CO ₂ laser, an excimer laser, etc. as long as it can scoop out or evaporate the constituent particles from the target 13.

In the laser vapor deposition apparatus 17 having the configuration shown in FIG. 2 as described above, after the base material 7 on which the polycrystalline thin film is formed is set in the delivery apparatus 22, the vapor deposition processing chamber 12
Is depressurized with a vacuum pump. Here, oxygen gas is introduced into the vapor deposition processing chamber 12 so that the vapor deposition processing chamber 12 has an oxygen atmosphere. In addition, the delivery device 22 is operated to sequentially deliver the base material 7 to the upper side of the heater 1, and the base material 7 is slid on the opening 8 and the heater 1 is operated to heat the base material 7 to a desired temperature. .

Next, the laser beam generated from the laser emitting device 17 is focused and irradiated on the target 13 in the vapor deposition processing chamber 12. As a result, the constituent particles of the target 13 are scooped out or evaporated, and the particles are deposited on the polycrystalline thin film on the base material 7. The deposition of the particles is performed by the heater 1
Is performed on the base material 7 on the opening 8.

The substrate 7 is heated by the radiant heat from the lamp heater 5 of the heater 1 and is maintained at a predetermined film forming temperature, and particles are deposited as described above to form a precursor thin film. It is formed. Therefore, since the precursor thin film deposited on the base material 7 is heat-treated under the above-mentioned suitable heating conditions, oxygen in the atmosphere can be sufficiently taken into the precursor thin film after the film formation. In addition, as described above, the base material 7
If the base material 7 is heated, the base material 7 can be uniformly heated to a predetermined film forming temperature, so that the thermal stress generated between the base material 7 and the precursor can be reduced. The thermal stress applied to the body thin film can be reduced, and cracks will not occur. Therefore, if this precursor thin film is heat-treated, an oxide superconductor having a superconducting layer exhibiting excellent superconducting properties can be manufactured.

Since the lamp heater 5 used for the heating heater 1 is an infrared type heater in which the heating element 4 is enclosed in the quartz tube 3, it is heated to 1000 ° C. or higher in a reduced pressure oxidizing atmosphere. However, it is possible to prevent evaporation of the constituent material itself such as Pt that constitutes the heating element 4,
Contamination in the case body 2 can be prevented, and the life of the heating element 4 itself can be extended.

Therefore, the following test was conducted on the heater of the present invention having the above-mentioned structure. (Test Example) A lamp heater 5 housed in a case body 2 made of Inconel as shown in FIGS. 1 (a) to 1 (c),
After setting the inside of the case body 2 to 720 ° C. by 5, the base material 7 is placed on the opening 8 formed by the heat plates 6a and 6b made of Inconel provided so as to cover the case body 2, This is slid on the opening 7 at 800 mm / hour and the temperature of the base material 7 is measured by a thermocouple arranged on the upper surface of the base material 7. The result is shown in FIG. The base material 7 has a length of 1
m as a middle layer by sputtering on a metal tape made of Hastelloy with a width of 5 m and a thickness of 0.1 mm.
An intermediate layer of YSZ of μm is formed, and a target for laser vapor deposition is an oxide target having a composition of Y ₁ Ba ₂ Cu ₃ O _{7 -X} .

As is apparent from the results shown in FIG. 3, according to the heater 1 of the present invention, the base material 7 is arranged on the opening 8 and the lamp heater 5 housed in the case body 2 is provided. By directly heating with the radiant heat from 5, the base material 7 can be uniformly heated and evenly maintained at a predetermined temperature. Therefore, as described above, according to the heater 1 of the present invention, the tape-shaped base material 7 can be heated under ideal conditions for producing an oxide superconductor and the temperature can be maintained. The base material 7
Sliding speed of 200mm / hour to 800m
The same tests as above were performed at various speeds of m / hour, but all the base materials 7 were uniformly heated and maintained at a predetermined film forming temperature, as in the above test example. Has come.

Therefore, an example of manufacturing an oxide superconducting tape using the above heater 1 will be described below. (Production example) First, length 1 m, width 5 mm, thickness 0.1 mm
After forming YSZ having a thickness of 0.5 μm as an intermediate layer on the metal tape made of Hastelloy of No. 3, it was placed on the opening 8 of the heater 1 as shown in FIGS. 1 (a) to 1 (c). . The target for laser deposition is Y ₁ Ba ₂
An oxide target having a composition of Cu ₃ O _7-x was used.

Then, the substrate 7 is slid at a speed of 200 mm /
The time is set and the inside of the vapor deposition processing chamber 12 is depressurized to 10 ^-5 Torr or less by using the apparatus shown in FIG.
A precursor thin film of an oxide superconductor having a thickness of 1.0 μm was formed in an oxygen gas atmosphere of orr. Then, the precursor thin film was exposed to 760 Torr in an oxygen gas atmosphere at 7
Heat treatment was carried out at 20 ° C. for 2 hours to obtain a superconducting tape having an oxide superconducting layer having a composition of Y ₁ Ba ₂ Cu ₃ O _7-x .

When the critical temperature of the obtained superconducting tape was measured, the critical temperature (T _c ) was 88 over the entire length of 1 m.
˜89 K, and the critical current density (J _c ) is 1 × 10 ³ −1.
High performance of 0 ⁴ A / cm ² (77K, 0 stella) was exhibited.

[0041]

As described above, the heater according to the present invention comprises a heating element, a case body for accommodating the heating element, and a hot plate that covers the upper surface of the case body. An opening having a width narrower than the width of the base material is provided along with, and a tape-shaped base material is brought into contact with the side portion of the lid on the upper surface of the opening of the heater. While sliding, while heating the base material by the heat radiated from the heating element, by forming a precursor thin film of the oxide superconductor, the base material is uniformly heated,
Oxygen in the atmosphere can be sufficiently taken into the precursor, and the precursor of the oxide superconductor having good crystallinity can be generated. Further, since the base material blocks the opening, the oxide
When the precursor of the superconductor is deposited, the deposition material is attached to the heating element.
You can avoid wearing it. Further, by uniformly heating the entire base material as described above, it is possible to reduce the thermal stress caused by the difference in thermal expansion between the base material and the precursor thin film, and the precursor thin film is cracked. There is nothing to do. Therefore, if this precursor thin film is heat-treated in an oxygen atmosphere, a superconducting tape having an oxide superconducting layer having a high critical current density and excellent superconducting properties can be obtained.

Furthermore, when the base material slides on the opening as described above, the sliding speed or the radiant heat of the heating element is adjusted to freely set the heating temperature to a desired temperature. It can be controlled, and the film forming temperature can be set in consideration of the precursor of the oxide superconductor or the composition of the substrate. Therefore, it is possible to produce an oxide superconducting tape which is versatile.

Further, by enclosing the heating element of the heating heater in a quartz tube and using it as an infrared type heater, Pt which forms the heating element even if it is heated to 1000 ° C. or higher in a reduced pressure oxidizing atmosphere. It is possible to prevent the evaporation of constituent substances such as the above, prevent contamination in the case body, and prolong the life of the heating element body.

[Brief description of drawings]

FIG. 1A is a perspective view showing a heater for producing an oxide superconducting tape of the present invention. (B) is shown in FIG.
It is a top view of (a). FIG. 1C is a side view of FIG.

FIG. 2 is an overall state in which the heater for producing an oxide superconducting tape of the present invention shown in FIG. 1 is installed inside a vacuum chamber of a film forming apparatus such as a laser vapor deposition apparatus or a sputtering apparatus for producing an oxide superconductor. It is a figure which shows a figure.

FIG. 3 is a diagram showing a result of a test example in which a base material is slid on a heater for manufacturing an oxide superconducting tape of the present invention shown in FIG. 1 to measure a heating temperature change of the base material.

FIG. 4A is a perspective view showing a conventional heater for producing an oxide superconducting tape. (B) is FIG. 4 (a)
FIG. FIG. 4C is a side view of FIG.

5 is a diagram showing a measurement result of measuring a heating temperature change of a base material by sliding the base material on the conventional heater for producing an oxide superconducting tape shown in FIG.

[Explanation of symbols]

1, 30 ... Heater for manufacturing oxide superconducting tape 2,
31 ... Case body 3 ... Quartz tube 4, 32 ... Heating element 5 ... Lamp heater 6
a, 6b ... Hot plate 7, 37 ... Base material 8 ... Opening portion 10
... Laser device 11 ... Processing container 12 ... Deposition chamber 1
3 ... Target 14 ... Base 15 ... Support Holder 16
... Exhaust hole 17 ... Laser vapor deposition device 18 ... First reflector
19 ... Condensing lens 20 ... Second reflecting mirror 21 ... Transparent window 22 ... Sending device 23 ... Winding device

─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Osamu Kono 1-5-1 Kiba, Koto-ku, Tokyo Fujikura Ltd. (56) References JP-A-2-307808 (JP, A) JP-A-62- 130275 (JP, A) (58) Fields surveyed (Int.Cl. ⁷ , DB name) C23C 14/00-14/58 H01B 13/00 H01B 12/06 H05B 3/64

Claims (6)

(57) [Claims] 1. A heating heater for heating a tape-shaped base material which is provided inside a vacuum chamber for forming a precursor of an oxide superconducting layer on a base material by a film forming method and which passes through an upper surface, The heater comprises a heating element, a case body that houses the heating element, and a hot plate that covers the upper surface of the case body. An opening having an opening width narrower than the width of the base material along the base material sliding portion of the hot plate. parts are formed, the substrate to slide the base sliding portion so as to close the opening
Is freely heated by the heating element through the opening.
A heater for manufacturing oxide superconducting tape, which is characterized by: 2. An infrared heating type lamp heater having a quartz tube in which the heating element is enclosed is used as the heating element.
Case so that the heater is covered by the hot plate
The heater for producing an oxide superconducting tape according to claim 1, wherein the heater is arranged inside the body . 3. The lamp heater is provided along the opening.
3. It is arranged on both sides of the lever.
A heater for producing the oxide superconducting tape as described above. 4. A heating element, a case body for accommodating the heating element, and a heat plate covering the upper surface of the case body, and having an opening width narrower than the base material width along the base material sliding portion of the heat plate. A heater for manufacturing oxide superconducting tape having an opening formed therein is installed in a vacuum chamber, and a tape-shaped base material is slid so that the heating heater passes through the opening in a closed state . Film formation from above the base material while heating the base material that slides on the opening to the predetermined film formation temperature desired during film formation
A method for producing an oxide superconducting tape, which comprises depositing a substance to form a precursor thin film of an oxide superconducting layer on an upper surface of a substrate. 5. A heating element, heating element using lamp heater infrared heating system that is put into a quartz tube, the lamp
Inside the case so that the heater is covered by the hot plate
And is placed through the opening of the hot plate.
The radiant heat of the lamp heater is applied to the lower surface of the base material to
The method for producing an oxide superconducting tape according to claim 3, wherein the base material is heated . 6. The lamp heater is provided along the opening.
They are arranged on both sides, and the opening is made by the lamp heater.
6. The substrate is heated via the
Manufacturing method of the above-mentioned oxide superconducting tape.