JP3427988B2 - Clean room fire compartment purification system - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fire-prevention section cleaning device in a clean room in which a transfer device for transferring an object is installed.

[0002]

2. Description of the Related Art In transportation in a clean room, it is necessary to install a fire damper or a fire shutter when penetrating a fire compartment. This will be described with reference to FIGS. In the figure, reference numeral 1 represents a body wall of a building that constitutes a clean room.

The body wall 1 is provided with an opening 2 through which the conveying device 7 is passed. The opening 2 is provided with a fire damper or a fire shutter 3 that blocks the opening 2 in the event of a fire. This fire damper or fire shutter 3
Are mounted in the casing 5. The fire damper or fire shutter 3 is in communication with a drive 4 which is actuated by various sensors such as smoke detectors, heat detectors and the like.

In this way, the fireproof section A can be formed in the body wall 1 by providing the fireproof damper or the fireproof shutter 3 in the opening 2. Body wall 1
A transport device 7 is arranged to face the opening 2 of the moving device 6 of the fire damper or the fire shutter 3 as a boundary.

The conveying device 7 is, for example, Japanese Patent Publication No. 62-22.
As disclosed in Japanese Patent Publication No. 830, Japanese Utility Model Publication No. 24016, and the like, dust generated during traveling is removed by a transport duct 8 in which a carriage 11 that is moved by a motor such as a linear motor is arranged, and a fan filter unit 12. A rail 10 including an exhaust duct 9 is provided. According to this conventional example, the carriage 11 on which the transported object 13 is placed is moved along the rail 10.

[0006]

At this point, the carrier device 7 is
Since the rail 10 penetrates the fireproof section A of the body wall 1,
The rail 10 is divided at the moving part 6 of the fireproof damper or the fireproof shutter 3 as a boundary. Therefore, as shown in FIG. 14, dust is likely to be generated from the moving part 6 of the fireproof damper or the fireproof shutter 3.

The dust cannot be quickly discharged by the exhaust duct 9. Further, since the fire-preventing section A becomes a tunnel, the moving portion 6 of the fire-prevention damper or the fire-preventing shutter 3 is more than that of the normal transportation route due to the tunnel effect.
It is also a place where dust is easily rolled up. The present invention has been made to solve such conventional problems, and an object thereof is to provide a device for purifying a fire compartment in a clean room capable of quickly exhausting dust generated from a moving portion of a fire damper or a fire shutter. To provide.

[0008]

According to the present invention, there is provided an opening of a body wall of a clean room, a fire damper or a fire shutter provided in the opening and closing the opening at the time of a fire, an exhaust duct and a transfer duct. A transport device in which the rail penetrates through the opening of the frame wall with the moving portion of the fire damper or fire shutter as a boundary, and an exhaust device provided at the tip of both rails of the transport device. It is characterized by consisting of. According to the second aspect of the present invention, purification units each including a fan filter unit are separately installed at the front ends of both rails.
A partition plate is disposed between the two purification units so as to correspond to the moving part of the fire damper or the fire shutter.

According to the third aspect of the present invention, a purifying unit for communicating with the exhaust device of the clean room is separately installed at the tip of both rails, and a moving portion of the fire damper or the fire shutter is provided between both units. Then, a partition plate is provided. The invention according to claim 4 is provided with an opening of a body wall of a clean room, a fire damper or a fire shutter provided on both sides of the opening to close the opening at the time of a fire, and a rail including an exhaust duct and a transport duct. Or, a transport device in which rails are arranged to face the outside and the inside of the opening of the body wall with the moving part of the fire shutter as a boundary, and an exhaust device provided at the tip of both rails of the transport device outside the opening, It is characterized by comprising a partition plate arranged corresponding to a moving part of each fire damper or fire shutter, and a fire damper or fire shutter arranged on each partition plate.

According to the fifth aspect of the present invention, purification units each having a fan filter unit are separately installed at the tip portions of both rails, and a moving portion of a fire damper or a fire shutter is provided between both purification units. Then, a partition plate is provided. According to the invention of claim 6, a purification unit for communicating with the exhaust device of the clean room is separately installed at the end portions of both rails,
A partition plate is disposed between both units so as to correspond to a moving portion of the fire damper or the fire shutter.

The invention of claim 7 is characterized in that a fan filter unit is disposed on the ceiling of the opening.

[0012]

According to the first aspect of the invention, the rail, which is composed of the exhaust duct and the transport duct that penetrate the opening of the body wall of the clean room, is divided by the moving portion of the fire damper or fire shutter. The rail is connected to the exhaust device at the dividing point, and dust generated in this part is exhausted by the exhaust device.

According to the second aspect of the present invention, dust generated at the dividing portions of both rails is purified by the fan filter unit and exhausted into the clean room. Further, since the partition plate blocks both purification units when the opening of the body wall by the fire damper or fire shutter is closed, flame, smoke, etc. do not propagate. According to the third aspect of the invention, the dust generated at the dividing point is exhausted to the outside of the clean room by the exhaust device of the clean room.

According to the invention of claim 4, there are three rails, each of which is composed of an exhaust duct and a transport duct which penetrate through the opening of the body wall of the clean room and which has a moving portion of one set of fire damper or fire shutter as a boundary. It is divided. At the dividing points of the rails, the tips of the rails located outside the openings are in communication with the exhaust device, and the dust generated at each dividing point is exhausted by the exhaust device.

Further, dust generated at the dividing portion is exhausted by the exhaust device. Furthermore, when closing the opening of the body wall by the fire damper or fire shutter, the partition plate blocks both purification units. In the invention of claim 5, dust generated at the divided portions of both rails is purified by the fan filter unit and exhausted into the clean room.

Further, when closing the opening of the body wall by the fireproof damper or fireproof shutter, the partition plate blocks both purification units, so that flame, smoke, etc. do not propagate. In the invention of claim 6, the dust generation at the dividing portion is exhausted to the outside of the clean room by the exhaust device of the clean room. In the invention of claim 7, clean air can be supplied also to the rail in the opening by the fan filter unit arranged on the ceiling of the opening.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in the drawings. 1 to 3 show an embodiment of the fireproof section purification device for a clean room according to claims 1 and 2. In the figure, reference numeral 31 represents a skeleton wall of a building that constitutes a clean room.

The body wall 31 is provided with an opening 32 through which the conveying device 40 passes. The opening 32 is provided with a fire damper or a fire shutter 33 that blocks the opening 32 in the event of a fire. This fire damper or fire shutter 33 is a casing (not shown) as in the conventional case.
It is installed inside. The fire damper or fire shutter 33 is in communication with a drive 34 that is actuated by various sensors such as smoke detectors, heat detectors and the like.

As described above, the fireproof section B can be formed by providing the frame wall 31 with the fireproof damper or the fireproof shutter 33 at the opening 32 thereof. A transport device 40 is arranged in the opening 32 of the body wall 31 so as to face the moving part 36 of the fire damper or fire shutter 33 as a boundary. As shown in FIG. 3, the transfer device 40 includes a transfer duct 42 in which a carriage 43 that is moved by a motor such as a linear motor is arranged, and an exhaust duct 44 that removes dust generated during traveling by a fan filter unit 45. It is provided with a rail 41.

As shown in FIGS. 1 and 2, the rail 41 including the exhaust duct 44 and the transport duct 42 penetrates the opening 32 of the frame wall 31 with the moving portion 36 of the fire damper or fire shutter 33 as a boundary. Are arranged. Purification units 50 each having a fan filter unit 52 are separately installed at the front ends of both rails 41, 41 of the carrier device 40. The bottom surfaces 46 of the tip ends of the rails 41, 41 on which the purification unit 50 is installed are formed by perforated plates.

The purifying unit 50 has a box-shaped case 51 that covers the tip of the rail 41 and is open downward.
Fan filter unit 52 mounted in the lower opening
It is composed of. A partition plate 55 is disposed between the purification units 50 so as to correspond to the moving portion 36 of the fire damper or fire shutter 33.

Therefore, the openings 53, 53 on the side of the dividing portion 54 between the cleaning units 50, 50 communicate with the transfer duct 42 of the rail 41. Next, the operation of the present embodiment configured as above will be described. The rail 41, which is composed of an exhaust duct 42 and a transport duct 44 that penetrate the opening 32 of the body wall 31 of the clean room, is divided by the moving portion 36 of the fire damper or fire shutter 33 as a boundary.

In the dividing parts 54 of the rails 41, 41, a cleaning unit 50 having a fan filter unit 52 is separately installed, and dust generated in this part is cleaned by the fan filter unit 52 to be cleaned inside the clean room. Exhausted to. In addition, a fire damper or fire shutter 33
When closing the opening 32 of the body wall 31 by the partition plate 5,
Since 5 blocks both purification units 50, flame, smoke, etc. do not propagate.

As described above, the dust generated in the dividing portion 54 of the rails 41, 41 can be quickly exhausted. FIG. 4 shows an embodiment of the clean room fire prevention section purification device according to the first and third aspects.

In the above embodiment, the duct 56 is attached instead of the fan filter unit 52 provided on the bottom surface of the purification unit 50, and the duct 56 is connected to the underfloor space of the clean room or the air conditioner. In this embodiment, the dust generated in the dividing portions 54 of the rails 41, 41 can be exhausted to the outside of the clean room.

FIG. 5 shows one embodiment of the clean room fire prevention section purification device according to the fourth and fifth aspects. In this embodiment, fire dampers or fire shutters 33 are arranged on both sides of the opening 32 of the body wall 31. Therefore, the rail 41 of the carrier device 40 is connected to the opening 3 of the body wall 31.
It is located divided into the outer side and the inner side of 2.

The purification unit 50 for covering the rail 41 located outside the opening 32 of the skeleton wall 31 is the same as that in the above embodiment. The purification unit 58 covering the rail 41 located inside the body wall 31 has the same shape as the case 51 of the purification unit 50, but the bottom surface is closed and the partition plates 55 are provided on both sides.
Is attached. And each division part 54 is located in the upper part of each partition plate 55. Each partition plate 55 is provided with a fireproof damper or a fireproof shutter 57.

Also in this embodiment, the same operational effects as those of the above embodiment can be obtained. Further, in the purification unit 58 located inside the body wall 31, dust is generated as shown by an arrow through an opening formed by the moving parts of the fireproof dampers or the fireproof shutters 57 installed on both partition plates 55. It is drawn by the fan filter unit 52 provided on the bottom surface of the purification unit 50, purified here, and discharged into the clean room.

In this embodiment, the fire dampers or shutters 33 are arranged on both sides of the opening 32 of the body wall 31, but the same applies to one side. FIG. 6 shows a modification of FIG. In this embodiment, a duct 60 provided with a fire damper or fire shutter 61 is attached to the partition plate 55.

This embodiment also has the same effects as the embodiment shown in FIG. FIG. 7 shows one embodiment of the clean room fire prevention section purification device according to claims 4 and 6. In the above-described embodiment, the duct 56 is attached instead of the fan filter unit 52 provided on the bottom surface of the purification unit 50, and the duct 56 is connected to the underfloor space of the clean room or the air conditioner.

In this embodiment, the dust generated in the dividing portion 54 of the rails 41, 41 can be exhausted to the outside of the clean room. FIG. 8 shows an embodiment of the clean room fire prevention section purification device according to the present invention. In this embodiment, the fan filter unit 62 is provided on the ceiling of the opening 32 of the body wall 31 of the fireproof compartment purification device of the clean room shown in FIG.
A partition plate 63 is attached to the upper side of the. The partition plate 63 is provided with a fireproof damper or a fireproof shutter 64.

In this embodiment, purified air can be positively supplied also to the purification unit 58 in the opening 32.
FIG. 9 shows a modification of FIG. In this embodiment, the duct 65 provided with the fireproof damper or the fireproof shutter 66 is attached to the partition plate 63, and the duct 60 provided with the fireproof damper or the fireproof shutter 61 is attached to the partition plate 55.

This embodiment also has the same effects as the embodiment shown in FIG. In addition, the duct 60 is divided into the partition plate 5
5, the fire damper or the fire shutter 57 may be provided as in FIG. FIG. 10 shows a modification of FIG. In this embodiment, a duct 56 is attached instead of the fan filter unit 52 provided on the bottom surface of the purification unit 50, and the duct 56 is connected to the underfloor space of the clean room or the air conditioner.

In this embodiment, the dust generated in the dividing portion 54 of the rails 41, 41 can be exhausted to the outside of the clean room. FIG. 11 shows a modification of FIG. In this embodiment, a duct 56 is attached instead of the fan filter unit 52 provided on the bottom surface of the purification unit 50, and the duct 56 is connected to the underfloor space of the clean room or the air conditioner.

In this embodiment, the dust generated in the dividing portions 54 of the rails 41, 41 can be exhausted to the outside of the clean room.

[0036]

As described above, according to the first aspect of the present invention, the rail including the exhaust duct and the transfer duct that penetrates the opening of the body wall of the clean room has the moving part of the fire damper or the fire shutter as a boundary. Since the rail is connected to the exhaust device at the part where the rail is divided, dust generated in this part is quickly exhausted by the exhaust device,
Does not pollute the clean room.

According to the second aspect of the present invention, the dust generated at the divided portions of both rails is sucked by the fan filter unit, is then purified there, and is exhausted into the clean room.
Does not pollute the clean room.

Further, since the partition plate blocks both purification units when closing the opening of the body wall by the fire damper or fire shutter, flame, smoke, etc. do not propagate. According to the third aspect of the invention, the dust generated at the dividing point is quickly exhausted by the exhaust device of the clean room, and the clean room is not contaminated. According to the invention of claim 4, the rail composed of the exhaust duct and the transport duct that penetrates the opening of the body wall of the clean room is divided into three parts with the moving part of the pair of fire dampers or fire shutters as a boundary. Since the rail tip located outside the opening communicates with the exhaust system at this rail division, the dust generated at each division should be quickly exhausted by the exhaust system to contaminate the clean room. There is no.

According to the fifth aspect of the present invention, the dust generated at the divided portions of both rails is sucked by the fan filter unit, purified there, and discharged into the clean room.
Does not pollute the clean room. According to the invention of claim 6, the dust generation at the dividing point is quickly exhausted by the exhaust device of the clean room, and the clean room is not contaminated.

According to the invention of claim 7, clean air can be supplied also to the rails in the opening by the fan filter unit arranged on the ceiling of the opening, so that dust generation at the dividing point is exhausted from the clean room. The equipment vents quickly and does not pollute the clean room.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a fireproof section purification device for a clean room according to claims 1 and 2.

FIG. 2 is a vertical cross-sectional view showing a main part of FIG.

FIG. 3 is a vertical cross-sectional view showing a main part of the transport device of FIG.

FIG. 4 is a vertical cross-sectional view showing an embodiment of the clean room fire prevention section purification device according to the first and third aspects.

FIG. 5 is a vertical cross-sectional view showing an embodiment of the fireproof section purification device for a clean room according to claims 4 and 5.

6 is a vertical cross-sectional view showing a modified example of FIG.

FIG. 7 is a vertical cross-sectional view showing one embodiment of the fireproof section purification device for a clean room according to claims 4 and 6;

FIG. 8 is a vertical cross-sectional view showing an embodiment of the clean room fire prevention section purification device according to the present invention.

9 is a vertical cross-sectional view showing a modified example of FIG.

10 is a vertical cross-sectional view showing a modified example of FIG.

11 is a vertical cross-sectional view showing a modified example of FIG.

FIG. 12 is a perspective view showing a relationship between a fire prevention section of a conventional clean room and a transfer device.

13 is a perspective view showing a state in which the casing of FIG. 12 is removed.

14 is a vertical cross-sectional view of FIG.

[Explanation of symbols]

31 body wall 32 openings 33, 57, 61 Fire damper or fire shutter 36 Moving part 40 Conveyor 41 rails 42 Transport duct 45,52,57 fan filter unit 50,58 Purification unit 51 cases 53 openings 54 division 55 Partition Plate 56,60 duct

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Claims (7)

(57) [Claims] 1. A clean room including an opening of a body wall, a fire damper or fire shutter provided in the opening for closing the fire in the event of fire, and a rail including an exhaust duct and a transport duct. A fireproof compartment in a clean room, comprising: a transfer device in which a rail is arranged so as to pass through an opening of a body wall with a moving part as a boundary, and an exhaust device provided at the tip of both rails of the transfer device. Purification device. 2. A purifying unit equipped with a fan filter unit is separately installed at the tip ends of both rails, and a partition plate is provided between the purifying units in correspondence with a moving portion of a fire damper or a fire shutter. The fireproof compartment purification device for a clean room according to claim 1, wherein the device is disposed. 3. A purification unit for communicating with an exhaust device of a clean room is separately installed at the tip of both rails, and a partition plate is provided between both units in correspondence with a moving part of a fire damper or a fire shutter. The fireproof compartment purification device for a clean room according to claim 1, wherein the device is disposed. 4. A fireproof damper or fireproof, comprising: an opening of a body wall of a clean room; a fireproof damper or a fireproof shutter provided on both sides of this opening to close the opening in case of fire; and a rail composed of an exhaust duct and a transport duct. A transport device with rails facing the outside and inside of the opening of the frame wall with the moving part of the shutter as a boundary, an exhaust device provided at the tip of both rails of the transport device outside the opening, and fire protection. A fireproof compartment purification device for a clean room, comprising: a partition plate arranged corresponding to a moving part of a damper or a fireproof shutter; and a fireproof damper or a fireproof shutter arranged on each partition plate. 5. A purification unit equipped with a fan filter unit is separately installed at the tip of both rails, and a partition plate is provided between both purification units corresponding to a moving part of a fire damper or a fire shutter. The fireproof compartment purification device for a clean room according to claim 4, which is provided. 6. A purification unit for communicating with an exhaust device of a clean room is separately installed at the tip of both rails, and a partition plate is provided between both units to correspond to a moving part of a fire damper or a fire shutter. The fireproof compartment purification device for a clean room according to claim 4, which is provided. 7. The fireproof compartment purification device for a clean room according to claim 4, wherein a fan filter unit is disposed on the ceiling of the opening.