JP3416568B2 - CBN blade and cutting device for cutting hard material - Google Patents
CBN blade and cutting device for cutting hard materialInfo
- Publication number
- JP3416568B2 JP3416568B2 JP13295699A JP13295699A JP3416568B2 JP 3416568 B2 JP3416568 B2 JP 3416568B2 JP 13295699 A JP13295699 A JP 13295699A JP 13295699 A JP13295699 A JP 13295699A JP 3416568 B2 JP3416568 B2 JP 3416568B2
- Authority
- JP
- Japan
- Prior art keywords
- cbn
- cutting
- blade
- abrasive grains
- tip portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【発明の属する技術分野】本発明は、金属材料、半導体
単結晶材料、セラミックス材料、水晶材料又はガラス材
料の切断加工に好適に使用されるＣＢＮブレード及び当
該ＣＢＮブレードを用いた硬質材料の切断装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a CBN blade suitably used for cutting metal materials, semiconductor single crystal materials, ceramic materials, crystal materials or glass materials, and a hard material cutting apparatus using the CBN blade. Regarding
【０００２】[0002]
【関連技術】ＣＢＮは立方晶系閃亜鉛鉱型構造の窒化ホ
ウ素であり、ボラゾンともよばれる。ＣＢＮは耐熱性に
優れるとともにダイヤモンドに次ぐ硬さを有しているの
で各種工具や研摩材として用いられている。[Related Art] CBN is boron nitride having a cubic zinc blende type structure, and is also called borazone. Since CBN has excellent heat resistance and hardness second only to diamond, it is used as various tools and abrasives.
【０００３】硬質材料の切断加工には最高の硬さを有す
るダイヤモンドチップ部分を具備したダイヤモンドブレ
ードが通常用いられるが、金属等の粘り気を有する材料
を切断すると、ダイヤモンドチップ部分が高温になり、
高熱によってダイヤモンドチップ部分が燃焼してしまう
場合がある。このような場合には、硬さではダイヤモン
ドに劣るものの耐熱性に優れたＣＢＮチップ部分を具備
したＣＢＮブレードが特に好適に用いられている。A diamond blade having a diamond tip portion having the highest hardness is usually used for cutting a hard material, but when a viscous material such as metal is cut, the diamond tip portion becomes high in temperature,
The high heat may burn the diamond tip portion. In such a case, a CBN blade equipped with a CBN tip portion which is inferior to diamond in hardness but is excellent in heat resistance is particularly preferably used.
【０００４】従来のＣＢＮブレード及びＣＢＮブレード
を用いた切断装置について、図５〜図８によって説明す
る。図５は従来のＣＢＮブレードの１例を示すもので、
（ａ）は従来のＣＢＮブレードの正面図、（ｂ）は
（ａ）のＢ−Ｂ線断面図及び、（ｃ）はＣＢＮチップ部
分の摘示説明図である。A conventional CBN blade and a cutting device using the CBN blade will be described with reference to FIGS. FIG. 5 shows an example of a conventional CBN blade,
(A) is a front view of a conventional CBN blade, (b) is a sectional view taken along line BB of (a), and (c) is a schematic explanatory view of a CBN tip portion.
【０００５】図６は従来のＣＢＮブレードを装着した切
断装置の一部断面説明図で、（ａ）は被切断物を切断す
る前の状態を示し、（ｂ）は被切断物を切断している最
中の状態を示す図面である。FIG. 6 is a partial cross-sectional explanatory view of a cutting device equipped with a conventional CBN blade. FIG. 6A shows a state before cutting an object to be cut, and FIG. It is drawing which shows the state in the middle of being.
【０００６】図７は従来のＣＢＮブレードによる被切断
物の切断中の状態を示す一部断面図で、（ａ）は被切断
物の受ける応力を示し、（ｂ）はＣＢＮブレードの金属
基板の両側面に被切断物が接触する状態を示す図面であ
る。FIG. 7 is a partial cross-sectional view showing a state in which an object to be cut is being cut by a conventional CBN blade. (A) shows a stress received by the object to be cut, and (b) shows a metal substrate of the CBN blade. It is drawing which shows the state in which a to-be-cut object contacts both sides.
【０００７】図８は従来のＣＢＮブレードによる被切断
物の切断中の状態を示す一部断面拡大説明図で、（ａ）
は切断抵抗が大きい状態を示し、（ｂ）はＣＢＮブレー
ドが反ってしまい、切断面に反りが生じる状態を示し、
（ｃ）は被切断物の切断終了時の状態を示し、（ｄ）は
切断終了後の切断面にバリが発生した状態を示す図面で
ある。FIG. 8 is an enlarged partial sectional explanatory view showing a state in which an object to be cut is being cut by a conventional CBN blade.
Shows a state in which the cutting resistance is large, and (b) shows a state in which the CBN blade is warped to cause a warp in the cut surface,
(C) is a drawing showing a state at the end of cutting of the object to be cut, and (d) is a drawing showing a state in which burrs are generated on the cut surface after the cutting.
【０００８】従来のＣＢＮブレード１０は、図５に示す
ように、高速回転する円盤状の金属基板１２と、その外
周部に、メタルボンド、レジンボンド、電着等によりＣ
ＢＮ砥粒を固着させたチップ部分１４から構成されてい
る。１６は該金属基板１２の中央部に穿設された軸孔で
ある。１８は切断装置で、モータ等の駆動手段を内蔵し
た回転駆動部２０と該回転駆動部２０に接続された回転
軸２２とを有している[ 図６（ａ）（ｂ）] 。As shown in FIG. 5, a conventional CBN blade 10 has a disk-shaped metal substrate 12 that rotates at a high speed, and a C-shaped metal substrate 12, a resin bond, and an electrodeposition on the outer periphery of the metal substrate 12.
It is composed of a tip portion 14 to which BN abrasive grains are fixed. Reference numeral 16 is a shaft hole formed in the center of the metal substrate 12. Reference numeral 18 denotes a cutting device, which has a rotary drive unit 20 incorporating a drive means such as a motor and a rotary shaft 22 connected to the rotary drive unit 20 [FIGS. 6 (a) and 6 (b)].
【０００９】従来のＣＢＮブレード１０を用いて、金属
材料、半導体単結晶材料、セラミックス材料、水晶材料
又はガラス材料等の硬質材料製の板、ロッド、チューブ
等の被切断物Ｇを切断した場合、ＣＢＮブレード１０の
チップ部分１４の形状が金属基板１２に対して凹型、即
ちその先端面形状が平坦面となっている[ 図５（ｃ）]
ため、ＣＢＮブレード１０による被切断物Ｇの切断が進
行するにつれて、被切断物ＧとＣＢＮブレードとの間に
切断抵抗が生じてくる[ 図７（ａ）] 。When a conventional CBN blade 10 is used to cut a plate G made of a hard material such as a metal material, a semiconductor single crystal material, a ceramic material, a crystal material or a glass material, a rod, a tube, or the like, The shape of the tip portion 14 of the CBN blade 10 is concave with respect to the metal substrate 12, that is, the tip surface shape is a flat surface [FIG. 5 (c)].
Therefore, as the cutting of the object G by the CBN blade 10 progresses, a cutting resistance is generated between the object G and the CBN blade [FIG. 7 (a)].
【００１０】その切断抵抗は、被切断物Ｇを撓ませる作
用とＣＢＮブレード１０の金属基板１２を反らせる作用
の二つの作用を同時にするため、被切断物ＧがＣＢＮブ
レード１０金属基板１２の側面１２ａに接触し、チッピ
ング（被切断物Ｇの切断面に割れや欠けが入る現象）が
発生した[ 図７（ｂ）] 。Since the cutting resistance has two functions, that is, the function of bending the object to be cut G and the effect of bending the metal substrate 12 of the CBN blade 10 at the same time, the object to be cut G has a side surface 12a of the metal substrate 12 of the CBN blade 10. , And chipping (a phenomenon in which a cut surface of the object G is cracked or chipped) occurred [FIG. 7 (b)].
【００１１】更に、切断中に生じたＣＢＮブレード１０
の金属基板１２の反り[ 図８（ｂ）] が原因となって、
切断面Ｍが反ってしまい、切断終了時にはＣＢＮブレー
ド１０の逃げ現象が起こり[ 図８（ｃ）] 、切断終了時
にバリＮが残ってしまう[ 図８（ｄ）] という問題があ
った。In addition, the CBN blade 10 produced during cutting
Due to the warp of the metal substrate 12 of FIG. 8 (b),
There is a problem that the cutting surface M warps, the escape phenomenon of the CBN blade 10 occurs at the end of cutting [FIG. 8 (c)], and the burr N remains at the end of cutting [FIG. 8 (d)].
【００１２】[0012]
【発明が解決しようとする課題】本発明者等は、上記し
た問題点を解決するために、鋭意研究を進めたところ、
まず第一に切断中の切断抵抗を減少させるためにＣＢＮ
ブレードチップ部分の先端面の形状を平坦面の代わりに
凸部形状とすることにより切断抵抗が減少すること、特
にＣＢＮチップ部分の先端面の凸部形状の先端角度を、
好ましくは、４５°〜１２０°に設定すれば、切断抵抗
が良好に減少することを見出した。DISCLOSURE OF THE INVENTION The inventors of the present invention have made extensive studies in order to solve the above problems,
First of all, to reduce the cutting resistance during cutting, CBN
Cutting resistance is reduced by making the shape of the tip surface of the blade tip part a convex shape instead of a flat surface, and in particular, the tip angle of the convex shape of the tip surface of the CBN tip part is
It has been found that the cutting resistance is favorably reduced when the angle is preferably set to 45 ° to 120 °.
【００１３】本発明者等は、第二に、ＣＢＮブレードの
金属基板の側面にＣＢＮ砥粒層を設けることにより、切
断中に切断抵抗を受けて被切断物が撓んでＣＢＮブレー
ドと接触した場合に生じるチッピング防止と、ＣＢＮブ
レードの反りが原因となって、切断面が反ってしまい、
切断終了時に起きるＣＢＮブレードの逃げ現象を防止
し、バリの発生を防止することができることを見出し、
本発明を完成した。Secondly, the present inventors have found that when the CBN abrasive grain layer is provided on the side surface of the metal substrate of the CBN blade, the cutting resistance is received during the cutting to bend the object to be cut and contact the CBN blade. The chipping prevention and the warp of the CBN blade causes the cut surface to warp,
It was found that the escape phenomenon of the CBN blade at the end of cutting can be prevented and the occurrence of burr can be prevented,
The present invention has been completed.
【００１４】本発明は、切断中の切断抵抗を良好に低減
させることができ、切断中に切断抵抗を受けて被切断物
が撓んでブレードと接触した場合に生じるチッピングを
防止し、切断終了時に起きるブレードの逃げ現象を防止
し、バリの発生を防止することができるようにした硬質
材料切断用ＣＢＮブレード及び切断装置を提供すること
を目的とする。The present invention can satisfactorily reduce the cutting resistance during cutting, prevents chipping that occurs when an object to be cut bends and contacts the blade due to cutting resistance during cutting, and at the end of cutting. It is an object of the present invention to provide a CBN blade for cutting a hard material and a cutting device capable of preventing a blade escape phenomenon that occurs and preventing burr from occurring.
【００１５】[0015]
【課題を解決するための手段】上記課題を解決するため
に、本発明の硬質材料切断用ＣＢＮブレードは、円盤状
の金属基板と、該金属基板の外周部に設けられかつＣＢ
Ｎ砥粒をメタルボンド又はレジンボンドにより固着させ
たＣＢＮチップ部分とを有するガラス材料、セラミック
ス材料、半導体単結晶材料又は水晶材料である硬質材料
を切断するための硬質材料切断用ＣＢＮブレードにおい
て、該金属基板の側面でかつ該チップ部分の内側に砥粒
を固着してなる砥粒層を該チップ部分に連続して全周に
わたって設けるとともに、該ＣＢＮチップ部分の先端面
形状を突部形状とし、該ＣＢＮチップ部分の先端面の突
部形状の先端角度を４５°〜１２０°に設定し、該砥粒
層の側面高さが該ＣＢＮチップ部分の側面高さよりも小
であるようにするとともに、該砥粒層を構成する砥粒が
該ＣＢＮチップ部分を構成するＣＢＮ砥粒よりも細かい
砥粒であるようにしたことを特徴とする。In order to solve the above-mentioned problems, a CBN blade for cutting a hard material according to the present invention is provided with a disk-shaped metal substrate and an outer peripheral portion of the metal substrate and CB.
In a CBN blade for cutting a hard material for cutting a hard material such as a glass material, a ceramic material, a semiconductor single crystal material or a crystal material having a CBN chip portion in which N abrasive grains are fixed by a metal bond or a resin bond, An abrasive grain layer formed by fixing abrasive grains on the side surface of the metal substrate and on the inside of the chip portion is continuously formed over the entire periphery of the chip portion.
With over and provided, the distal end surface shape and convexity of CBN tip portion, to set the point angle of the projection shape of the front end face of the CBN tip portion 45 ° to 120 °, side height of the abrasive grain layer Is smaller than the side surface height of the CBN tip portion, and the abrasive grains constituting the abrasive grain layer are finer than the CBN abrasive grains constituting the CBN tip portion. Is characterized by.
【００１６】上記ＣＢＮチップ部分の先端面の凸部形状
の先端角度は、さらに好ましくは６０°〜９０°に設定
される。The tip angle of the convex shape of the tip surface of the CBN chip portion is more preferably set to 60 ° to 90 °.
【００１７】上記ＣＢＮチップ部分の凸部形状の先端角
度が４５°未満であると、切断抵抗は小さくなるがＣＢ
Ｎチップ部分の摩耗が増加し、ＣＢＮブレードの寿命が
それだけ短くなり、又、先端角度が１２０°を越える
と、切断抵抗を減少させる効果がそれだけ小さくなる
が、これらの角度範囲においても本発明の作用効果が達
成されることに変わりはない。If the tip angle of the convex shape of the CBN tip portion is less than 45 °, the cutting resistance is reduced but CB.
The wear of the N-tip portion is increased, the life of the CBN blade is shortened by that much, and when the tip angle exceeds 120 °, the effect of reducing the cutting resistance is reduced by that much. The effect is still achieved.
【００１８】上記砥粒層の側面高さが、ＣＢＮチップ部
分の側面高さよりも小であること、即ち該砥粒層の厚さ
が該ＣＢＮチップ部分の厚さよりもわずかに、例えば
０．０５ｍｍ程度だけ、薄い厚さを有するのが好まし
い。The side height of the abrasive grain layer is smaller than the side height of the CBN tip portion, that is, the thickness of the abrasive grain layer is slightly smaller than the thickness of the CBN tip portion, for example, 0.05 mm. It is preferable to have a thickness that is thin to the extent.
【００１９】上記砥粒層を構成する砥粒が、上記ＣＢＮ
チップ部分を構成するＣＢＮ砥粒、例えば＃１７０、よ
りも細かい砥粒、例えば＃２００、であるのが好適であ
る。The abrasive grains constituting the abrasive grain layer are the above-mentioned CBN.
It is preferable that the CBN abrasive grains constituting the tip portion, for example, # 170, and the finer abrasive grains, for example, # 200, be used.
【００２０】上記砥粒層は上記金属基板の側面の全面に
設けてもよいし、部分的に設けることもできる。部分的
に設ける場合には、その設置態様に特別の制限はないの
で、例えば、螺旋状、渦巻き状、放射状、多数の同心円
状、多数の点状等の設置態様を適宜採用することができ
る。The abrasive grain layer may be provided on the entire side surface of the metal substrate or may be provided partially. When provided partially, there is no particular limitation on the installation mode, and therefore, for example, a spiral, spiral, radial, multiple concentric, multiple point-like installation mode can be appropriately adopted.
【００２１】上記砥粒層を構成する砥粒がＣＢＮ砥粒及
び／又はその他の砥粒からなるのが好ましい。その他の
砥粒としては、ダイヤモンド、ＳｉＣ、Ａｌ2 Ｏ3、Ｚ
ｒＯ2、Ｓｉ3Ｎ4等をあげることができる。これらの砥
粒は単独で用いることもできるし、併用することも可能
である。It is preferable that the abrasive grains constituting the abrasive grain layer are CBN abrasive grains and / or other abrasive grains. Other abrasive grains include diamond, SiC, Al 2 O 3 , Z
It can be mentioned rO 2, Si 3 N 4 or the like. These abrasive grains can be used alone or in combination.
【００２２】上記ＣＢＮブレードによる切断の対象とな
る硬質材料としては、金属材料、半導体単結晶材料、セ
ラミックス材料、水晶材料又はガラス材料等をあげるこ
とができる。The hard material to be cut by the CBN blade may be a metal material, a semiconductor single crystal material, a ceramic material, a crystal material or a glass material.
【００２３】上記したＣＢＮブレードと、該ＣＢＮブレ
ードを高速回転させる回転駆動部によって硬質材料切断
装置を構成すれば、金属材料、半導体単結晶材料、セラ
ミックス材料、水晶材料又はガラス材料等の硬質材料製
の被切断物を切断抵抗を低減させた状態で切断でき、チ
ッピングを防止できるとともにバリの発生を防止するこ
とができる。If a hard material cutting device is constituted by the above-mentioned CBN blade and a rotary drive unit that rotates the CBN blade at a high speed, a hard material such as a metal material, a semiconductor single crystal material, a ceramic material, a crystal material, or a glass material can be used. The object to be cut can be cut in a state where the cutting resistance is reduced, chipping can be prevented, and burrs can be prevented from occurring.
【００２４】[0024]
【発明の実施の形態】以下に、本発明の実施の形態を添
付図面中、図１〜図４に基づいて説明する。図１は本発
明のＣＢＮブレードの一つの実施の形態を示すもので、
（ａ）は本発明のＣＢＮブレードの正面図、（ｂ）は
（ａ）のＡ−Ａ線断面図、（ｃ）はＣＢＮチップ部分の
摘示側面図である。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIGS. 1 to 4 in the accompanying drawings. FIG. 1 shows one embodiment of the CBN blade of the present invention.
(A) is a front view of the CBN blade of the present invention, (b) is a sectional view taken along the line AA of (a), and (c) is a side view showing the CBN tip portion.
【００２５】図２は本発明のＣＢＮブレードを装着した
切断装置の一部断面説明図で、（ａ）は被切断物を切断
する前の状態を示し、（ｂ）は被切断物を切断している
最中の状態を示す図面である。2A and 2B are partial cross-sectional explanatory views of a cutting device equipped with the CBN blade of the present invention. FIG. 2A shows a state before cutting the cutting object, and FIG. 2B shows cutting the cutting object. It is drawing which shows the state in the middle of doing.
【００２６】図３は本発明のＣＢＮブレードによる被切
断物の切断中の状態を示す一部断面説明図で、（ａ）は
被切断物の受ける応力を示し、（ｂ）はＣＢＮブレード
の金属基板の両側面に被切断物が接触しＣＢＮブレード
砥粒層で研削される状態を示す図面である。FIG. 3 is a partial cross-sectional explanatory view showing a state during cutting of an object to be cut by the CBN blade of the present invention. (A) shows a stress received by the object to be cut, and (b) shows a metal of the CBN blade. It is drawing which shows the state in which a to-be-cut object contacts both sides of a board | substrate, and is ground by a CBN blade abrasive grain layer.
【００２７】図４は本発明のＣＢＮブレードによる被切
断物の切断中の状態を示す一部断面拡大図で、（ａ）は
切断抵抗が小さい状態を示し、（ｂ）はＣＢＮブレード
が反ることがなく切断面に反りが発生せず、ＣＢＮブレ
ードの逃げ現象が起きない状態を示し、（ｃ）は切断終
了後の切断面にバリが発生しない状態を示す図面であ
る。FIG. 4 is a partially enlarged cross-sectional view showing a state in which an object to be cut is being cut by the CBN blade of the present invention. (A) shows a state in which the cutting resistance is small, and (b) shows that the CBN blade warps. FIG. 3C is a view showing a state in which the CBN blade does not cause the escape phenomenon and the burr does not occur on the cut surface after the completion of the cutting.
【００２８】図１〜図４において、図５〜図８と同一又
は類似部材は同一符号を用いて説明することがある。1 to 4, members which are the same as or similar to those in FIGS. 5 to 8 may be described using the same reference numerals.
【００２９】図１において、本発明の硬質材料切断用Ｃ
ＢＮブレード１１は、従来と同様に、高速回転する円盤
状の金属基板１２と、その外周部に、メタルボンド又は
レジンボンドによりＣＢＮ砥粒を固着させたチップ部分
１５から構成されている。１６は該金属基板１２の中央
部に穿設された軸孔である。１８は硬質材料切断装置
で、従来と同様に回転駆動部２０と回転軸２２とを有し
ている［図２（ａ）（ｂ）］。In FIG. 1, C for cutting a hard material of the present invention
The BN blade 11 is composed of a disk-shaped metal substrate 12 rotating at a high speed and a tip portion 15 having CBN abrasive grains fixed to the outer peripheral portion thereof by metal bonding or resin bonding, as in the conventional case. There is. Reference numeral 16 is a shaft hole formed in the center of the metal substrate 12. Reference numeral 18 denotes a hard material cutting device, which has a rotary drive unit 20 and a rotary shaft 22 as in the conventional case [FIGS. 2A and 2B].
【００３０】本発明のＣＢＮブレード１１の特徴の第一
は、ＣＢＮチップ部分１５の断面形状として、図１
（ｃ）によく示されるごとく、先端面に先端角度θを持
たせた凸部形状としたものである。このような形状にす
ることによって、従来の先端平坦形状に比較して、図４
（ａ）に示すように、切断抵抗が減少するものである。The first characteristic of the CBN blade 11 of the present invention is as shown in FIG.
As is often shown in (c), the tip surface has a convex shape with a tip angle θ. With such a shape, as compared with the conventional flat tip shape, as shown in FIG.
As shown in (a), the cutting resistance is reduced.
【００３１】このＣＢＮチップ部分１５の先端面の凸部
形状の先端角度θは４５°〜１２０°の範囲で設定する
のが好ましい。先端角度θが４５°未満であると、切断
抵抗は小さくなるがＣＢＮチップ部１５の摩擦が増加
し、ＣＢＮブレードの寿命がそれだけ短くなり、又、先
端角度θが１２０°を越えると、切断抵抗を減少させる
効果がそれだけ小さくなるが、本発明の作用効果が達成
されることに変わりはない。The tip angle θ of the convex shape of the tip surface of the CBN tip portion 15 is preferably set in the range of 45 ° to 120 °. When the tip angle θ is less than 45 °, the cutting resistance is reduced, but the friction of the CBN tip portion 15 is increased, and the life of the CBN blade is shortened as much. When the tip angle θ exceeds 120 °, the cutting resistance is increased. However, the effect of the present invention is still achieved.
【００３２】先端角度θのさらに好ましい範囲は６０°
〜９０°である。なお、図示例ではθ= ９０°の場合を
好ましい例として示している。A more preferable range of the tip angle θ is 60 °.
~ 90 °. In the illustrated example, the case of θ = 90 ° is shown as a preferable example.
【００３３】本発明のＣＢＮブレード１１の特徴の第二
は、図１（ａ）（ｂ）によく示されるごとく、ＣＢＮブ
レード１１の金属基板１２の側面１２ａに砥粒層１３を
設けることである。The second characteristic of the CBN blade 11 of the present invention is that the abrasive grain layer 13 is provided on the side surface 12a of the metal substrate 12 of the CBN blade 11, as well shown in FIGS. 1 (a) and 1 (b). .
【００３４】このように砥粒層１３を設けることによっ
て、切断中に切断抵抗を受けて被切断物Ｇが撓んでＣＢ
Ｎブレード１１と接触した場合に、従来のＣＢＮブレー
ド１０では避けることができなかったチッピングを防止
することができる。By providing the abrasive grain layer 13 in this way, the cutting object G is bent during the cutting due to the cutting resistance and the CB is bent.
When it comes into contact with the N blade 11, it is possible to prevent chipping, which cannot be avoided by the conventional CBN blade 10.
【００３５】さらに、ＣＢＮブレード１１の金属基板１
２の両側面１２ａが砥粒によって被覆されて砥粒層１３
が形成されるため、ＣＢＮブレード１１は該砥粒層１３
によって被覆され、その強度が増大し、ＣＢＮブレード
１１が切断中に反ってしまうということはなくなり、従
って、切断面が反ることもなく、切断終了時のＣＢＮブ
レード１１の逃げ現象も起こらず、バリの発生も完全に
防止される[ 図４（ａ）（ｂ）（ｃ）] 。Further, the metal substrate 1 of the CBN blade 11
Both side surfaces 12a of the second layer 12 are covered with abrasive grains to form an abrasive grain layer 13
Therefore, the CBN blade 11 is
And the strength of the CBN blade 11 is increased, and the CBN blade 11 does not warp during cutting. Therefore, the cutting surface does not warp, and the escape phenomenon of the CBN blade 11 at the end of cutting does not occur. Burrs are completely prevented [Figs. 4 (a) (b) (c)].
【００３６】本発明のＣＢＮブレード１１に用いられる
砥粒は、ＣＢＮチップ部分１５に対しては従来と同様に
＃１７０程度とすればよい。一方、砥粒層１３の砥粒
は、ＣＢＮチップ部分１５のＣＢＮ砥粒よりも細かい砥
粒、例えば＃２００程度が好ましい。The abrasive grains used for the CBN blade 11 of the present invention may be about # 170 for the CBN tip portion 15 as in the conventional case. On the other hand, the abrasive grains of the abrasive grain layer 13 are preferably finer than the CBN abrasive grains of the CBN chip portion 15, for example, about # 200.
【００３７】上記砥粒層１３の側面高さが、ＣＢＮチッ
プ部分１５の側面高さよりも小であることが好適であ
る。この砥粒層１３の側面高さがＣＢＮチップ部分の高
さよりも大となると切断作業自体に困難性を生じてしま
う不利がある。It is preferable that the side surface height of the abrasive grain layer 13 is smaller than the side surface height of the CBN tip portion 15. If the side surface height of the abrasive grain layer 13 is larger than the height of the CBN tip portion, there is a disadvantage that the cutting operation itself becomes difficult.
【００３８】上記砥粒層１３は、金属基板１２の側面１
２ａの全面に設けてもよいが、部分的に設けることもで
きる。部分的に設ける場合には、その設置態様に特別の
制限はないので、例えば、螺旋状、渦巻き状、放射状、
多数の同心円状、多数の点状等の設置態様を適宜採用す
ることができる。The abrasive grain layer 13 is formed on the side surface 1 of the metal substrate 12.
It may be provided on the entire surface of 2a, or may be provided partially. When provided partially, there is no particular restriction on the installation mode, and therefore, for example, spiral, spiral, radial,
A plurality of concentric circles, a large number of dots, or the like can be appropriately adopted.
【００３９】本発明のＣＢＮブレード１１による切断の
対象となる硬質材料としては、金属材料、半導体単結晶
材料、セラミックス材料、水晶材料又はガラス材料等を
あげることができる。Examples of the hard material to be cut by the CBN blade 11 of the present invention include a metal material, a semiconductor single crystal material, a ceramic material, a crystal material, a glass material and the like.
【００４０】具体的な金属材料としては、ステンレスロ
ッド、ステンレスパイプ、フェライト等の磁性材料等を
あげることができ、半導体単結晶材料としては、シリコ
ン単結晶やガリウム・ヒ素単結晶等があり、セラミック
ス材料としては、ＳｉＣやアルミナ等のロッド、パイ
プ、ブロック、板等があり、ガラス材料としては、石英
ガラス材料、ソーダ石灰ガラス材料、ホウケイ酸ガラス
材料、鉛ガラス材料等がある。Specific examples of metal materials include magnetic materials such as stainless rods, stainless pipes, and ferrites. Semiconductor single crystal materials include silicon single crystals and gallium / arsenic single crystals, and ceramics. Materials include rods such as SiC and alumina, pipes, blocks, plates, and the like, and glass materials include quartz glass material, soda-lime glass material, borosilicate glass material, lead glass material, and the like.
【００４１】[0041]
【実施例】以下に、本発明の実施例を挙げて説明する。EXAMPLES Examples of the present invention will be described below.
【００４２】（実施例１）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結し、ＣＢＮチップ部分の先
端角度を９０゜にしたブレードに、ＣＢＮチップ部分か
ら内側に８０ｍｍの所まで両面に厚さ０．１ｍｍ、番手
＃４００のＣＢＮ砥粒の電着層をつけたブレードを使用
して、外径８０ｍｍのステンレスのロッドを切断した。(Example 1) Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
CBN abrasive grains with a thickness of 0.1 mm on both sides from the CBN tip portion to 80 mm inward on a blade with N abrasive grains sintered with metal bond and the tip angle of the CBN tip portion set to 90 ° A stainless rod having an outer diameter of 80 mm was cut using a blade having the electrodeposition layer of No. 2.
【００４３】切断抵抗の検出：ＣＢＮブレードを回転さ
せるために、モーターを使用するが、ブレードに切断抵
抗がかかった場合、回転用モーターにも負荷がかかるた
め、モーターに流れる電流値が増大する。この電流値を
計測することによって、切断抵抗の大小を検出できる。Detection of cutting resistance: A motor is used to rotate the CBN blade. When the cutting resistance is applied to the blade, a load is also applied to the rotating motor, so that the current value flowing through the motor increases. By measuring this current value, the magnitude of the cutting resistance can be detected.
【００４４】切断抵抗を検出するために、ＣＢＮブレー
ド回転用のモーターの電流値を切断深さ５ｍｍ、１０ｍ
ｍ、１５ｍｍ、２０ｍｍ、３０ｍｍ、４０ｍｍ、６０ｍ
ｍ、８０ｍｍにおいて計測し、その結果を表１に示し
た。また、表１の数値をグラフとして図９に示した。表
１及び図９から明らかなように、切断が進行するにつれ
て、電流値が増大し、ステンレスのロッドの中心部で最
大の電流値を示したが、電流値の増加は大きくなく、切
断抵抗が小さいことを示していた。In order to detect the cutting resistance, the current value of the motor for rotating the CBN blade is set to a cutting depth of 5 mm and 10 m.
m, 15mm, 20mm, 30mm, 40mm, 60m
Measurement was performed at m and 80 mm, and the results are shown in Table 1. Further, the numerical values in Table 1 are shown as a graph in FIG. As is clear from Table 1 and FIG. 9, as the cutting progressed, the current value increased and showed the maximum current value at the center of the stainless steel rod, but the current value did not increase significantly and the cutting resistance was It was showing that it was small.
【００４５】切断終了後に、ステンレスのロッドの切断
面を観察したが、チッピング、バリの発生がなく、反り
もなかった。After the completion of the cutting, the cut surface of the stainless steel rod was observed, but no chipping, burrs, or warpage was observed.
【００４６】（比較例１）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結した従来形状のＣＢＮチッ
プ部分を有するＣＢＮブレードを用いて、外径８０ｍｍ
のステンレスのロッドを切断した。(Comparative Example 1) Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
Using a CBN blade having a CBN tip portion of a conventional shape obtained by sintering N abrasive grains with a metal bond, an outer diameter of 80 mm
The stainless steel rod was cut.
【００４７】切断抵抗を検出するために、ＣＢＮブレー
ド回転用のモーターの電流値を計測したことろ、表１及
び図９に示すような結果となった。切断が進行するにつ
れて、電流値が増大し、ステンレスのロッドの中心部で
最大の電流値を示した。The current value of the motor for rotating the CBN blade was measured in order to detect the cutting resistance, and the results shown in Table 1 and FIG. 9 were obtained. As the cutting progressed, the current value increased, showing the maximum current value at the center of the stainless steel rod.
【００４８】切断が終了したステンレスのロッドの切断
面を観察したところ、切断面にチッピングが発生してい
た。それに、切断終了箇所には、バリが残っており、切
断面が１ｍｍ反っていた。又、ＣＢＮブレードの側面を
観察したところ、ステンレスのロッドが接触した部分に
傷が発生していた。Observation of the cut surface of the stainless steel rod after the cutting showed that chipping occurred on the cut surface. In addition, burrs remained at the end of cutting, and the cut surface was warped by 1 mm. Further, when the side surface of the CBN blade was observed, it was found that a scratch was generated at the portion where the stainless rod contacted.
【００４９】（実施例２）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結し、ＣＢＮチップ部分の先
端角度を１２５゜にしたブレードに、ＣＢＮチップ部分
から内側に８０ｍｍの所まで両面に厚さ０．１ｍｍ、番
手＃４００のＣＢＮ砥粒の電着層をつけたブレードを使
用して、外径８０ｍｍのステンレスのロッドを切断し
た。Example 2 Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
CBN abrasive grains with a thickness of 0.1 mm on both sides from the CBN tip portion to 80 mm inward on a blade with N abrasive grain sintered with metal bond and the tip angle of the CBN tip portion set to 125 ° A stainless rod having an outer diameter of 80 mm was cut using a blade having the electrodeposition layer of No. 2.
【００５０】切断抵抗を検出するための電流値は、表１
及び図９に示す通りであった。最大電流値は、実施例１
と比較例１の中間であったが、切断終了後に、ステンレ
スのロッドの切断面を観察したところ、チッピング、バ
リの発生がなかったが、０．３ｍｍ反っていた。The current values for detecting the cutting resistance are shown in Table 1.
And as shown in FIG. The maximum current value is shown in Example 1.
Although it was in the middle of Comparative Example 1, when the cut surface of the stainless steel rod was observed after the completion of cutting, chipping and burrs did not occur, but it was warped by 0.3 mm.
【００５１】（実施例３）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結し、ＣＢＮチップ部分の先
端角度を４０゜にしたブレードに、ＣＢＮチップ部分か
ら内側に８０ｍｍの所まで両面に厚さ０．１ｍｍ、番手
＃４００のＣＢＮ砥粒の電着層をつけたブレードを使用
して、外径８０ｍｍのステンレスのロッドを切断した。(Example 3) Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
CBN abrasive grains with a thickness of 0.1 mm on both sides up to 80 mm inward from the CBN tip portion on a blade made by sintering N abrasive grains with a metal bond and setting the tip angle of the CBN tip portion to 40 ° A stainless rod having an outer diameter of 80 mm was cut using a blade having the electrodeposition layer of No. 2.
【００５２】切断抵抗を検出するための電流値は、表１
及び図９に示す通りであった。最大電流値は、実施例１
と同じであった。切断終了後に、ステンレスのロッドの
切断面を観察したところ、チッピング、バリの発生がな
く、反りもなかった。しかし、ＣＢＮチップ先端部の消
耗が激しく、先端部が１ｍｍ減少していた。Table 1 shows the current values for detecting the cutting resistance.
And as shown in FIG. The maximum current value is shown in Example 1.
Was the same as When the cut surface of the stainless steel rod was observed after the completion of cutting, no chipping or burrs were generated, and there was no warp. However, the tip portion of the CBN chip was heavily consumed, and the tip portion was reduced by 1 mm.
【００５３】[0053]
【表１】 [Table 1]
【００５４】（実施例４）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結し、ＣＢＮチップ部分の先
端角度を９０゜にしたブレードに、ＣＢＮチップ部分か
ら内側に８０ｍｍの所まで両面に厚さ０．１ｍｍ、番手
＃４００のＣＢＮ砥粒の電着層をつけたブレードを使用
して、外径６０ｍｍのＳｉＣのロッドを切断した。Example 4 Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
CBN abrasive grains with a thickness of 0.1 mm on both sides from the CBN tip portion to 80 mm inward on a blade with N abrasive grains sintered with metal bond and the tip angle of the CBN tip portion set to 90 ° A rod of SiC having an outer diameter of 60 mm was cut using a blade having an electrodeposition layer of
【００５５】切断抵抗を検出するために、ブレード回転
用モーターの電流値を計測したところ、表２及び図１０
に示すような結果となった。切断が進行するにつれて、
電流値が増大し、ＳｉＣロッドの中心部で最大の電流値
を示したが、電流値の増加は大きくなく、切断抵抗が小
さいことを示していた。切断終了後に、切断面を観察し
たが、チッピング、バリの発生がなく、反りもなかっ
た。In order to detect the cutting resistance, the current value of the blade rotation motor was measured, and Table 2 and FIG.
The result is shown in. As the cutting progresses
The current value increased and showed the maximum current value at the center of the SiC rod, but the increase in current value was not so large that the cutting resistance was small. After the completion of cutting, the cut surface was observed, but no chipping or burr was generated, and there was no warp.
【００５６】（実施例５）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結し、ＣＢＮチップ部分の先
端角度を９０゜にしたブレードに、ＣＢＮチップ部分か
ら内側に８０ｍｍの所まで両面に厚さ０．１ｍｍ、番手
＃４００のＣＢＮ砥粒の電着層をつけたブレードを使用
して、外径６０ｍｍのアルミナのロッドを切断した。(Example 5) Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
CBN abrasive grains with a thickness of 0.1 mm on both sides from the CBN tip portion to 80 mm inward on a blade with N abrasive grains sintered with metal bond and the tip angle of the CBN tip portion set to 90 ° An alumina rod having an outer diameter of 60 mm was cut using a blade having an electrodeposition layer of No. 2.
【００５７】切断抵抗を検出するために、ブレード回転
用モーターの電流値を計測したところ、表２及び図１０
に示すような結果となった。切断が進行するにつれて、
電流値が増大し、アルミナロッドの中心部で最大の電流
値を示したが、電流値の増加は大きくなく、切断抵抗が
小さいことを示していた。切断終了後に、切断面を観察
したが、チッピング、バリの発生がなく、反りもなかっ
た。The current value of the blade rotating motor was measured to detect the cutting resistance.
The result is shown in. As the cutting progresses
The current value increased and showed the maximum current value in the central part of the alumina rod, but the increase in current value was not so large and the cutting resistance was small. After the completion of cutting, the cut surface was observed, but no chipping or burr was generated, and there was no warp.
【００５８】（実施例６）外径３００ｍｍ、厚み１．０
ｍｍの金属基板上に、ＣＢＮチップ部分の厚み１．３ｍ
ｍ、ＣＢＮチップ部分の幅７ｍｍ、番手＃１７０のＣＢ
Ｎ砥粒をメタルボンドで焼結し、ＣＢＮチップ部分の先
端角度を９０゜にしたブレードに、ＣＢＮチップ部分か
ら内側に８０ｍｍの所まで両面に厚さ０．１ｍｍ、番手
＃４００のＣＢＮ砥粒の電着層をつけたブレードを使用
して、外径５０ｍｍのガリウム・ヒ素単結晶を切断し
た。Example 6 Outer diameter 300 mm, thickness 1.0
The thickness of the CBN chip is 1.3m on a metal substrate of mm.
m, width of CBN chip part 7 mm, CB of count # 170
CBN abrasive grains with a thickness of 0.1 mm on both sides from the CBN tip portion to 80 mm inward on a blade with N abrasive grains sintered with metal bond and the tip angle of the CBN tip portion set to 90 ° A gallium / arsenic single crystal having an outer diameter of 50 mm was cut using a blade having an electrodeposition layer of
【００５９】切断抵抗を検出するために、ブレード回転
用モーターの電流値を計測したところ、表２及び図１０
に示すような結果となった。切断が進行するにつれて、
電流値が増大し、ガリウム・ヒ素単結晶の中心部で最大
の電流値を示したが、電流値の増加は大きくなく、切断
抵抗が小さいことを示していた。切断終了後に、切断面
を観察したが、チッピング、バリの発生がなく、反りも
なかった。The current value of the blade rotating motor was measured to detect the cutting resistance.
The result is shown in. As the cutting progresses
The current value increased, and the maximum current value was shown in the central part of the gallium-arsenic single crystal, but the increase in current value was not so large and the cutting resistance was small. After the completion of cutting, the cut surface was observed, but no chipping or burr was generated, and there was no warp.
【００６０】[0060]
【表２】 [Table 2]
【００６１】[0061]
【発明の効果】以上述べたごとく、本発明によれば、切
断中の切断抵抗を良好に低減させることができ、切断中
に切断抵抗を受けて被切断物が撓んでＣＢＮブレードと
接触した場合に生じるチッピングを防止し、切断終了時
に起きるＣＢＮブレードの逃げ現象を防止し、バリの発
生を防止できるという効果が達成された。As described above, according to the present invention, it is possible to satisfactorily reduce the cutting resistance during cutting, and when the object to be cut bends and contacts the CBN blade due to the cutting resistance during cutting. The effect of being able to prevent the chipping that occurs in the above, prevent the escape phenomenon of the CBN blade that occurs at the end of cutting, and prevent the occurrence of burrs is achieved.
【図１】 本発明のＣＢＮブレードの一つの形態を示す
もので、（ａ）は本発明のＣＢＮブレードの正面図、
（ｂ）は（ａ）のＡ−Ａ線断面図及び（ｃ）はＣＢＮチ
ップ部分の摘示側面説明図である。FIG. 1 shows one form of a CBN blade of the present invention, (a) is a front view of the CBN blade of the present invention,
(B) is the AA sectional view taken on the line of (a), and (c) is a side view explanatory drawing of a CBN chip part.
【図２】 本発明のＣＢＮブレードを装着した切断装置
の一部断面説明図で、（ａ）は被切断物を切断する前の
状態を示し、（ｂ）は被切断物を切断している最中の状
態を示す図面である。FIG. 2 is a partial cross-sectional explanatory view of a cutting device equipped with a CBN blade of the present invention, (a) shows a state before cutting an object to be cut, and (b) shows cutting the object to be cut. It is drawing which shows the state in the middle.
【図３】 本発明のＣＢＮブレードによる被切断物の切
断中の状態を示す一部断面説明図で、（ａ）は被切断物
の受ける応力を示し、（ｂ）はＣＢＮブレードの金属基
板の両側面に被切断物が接触し砥粒層で研削される状態
を示す図面である。FIG. 3 is a partial cross-sectional explanatory view showing a state during cutting of an object to be cut by the CBN blade of the present invention, (a) shows stress received by the object to be cut, and (b) shows a metal substrate of the CBN blade. It is drawing which shows the state in which a to-be-cut object contacts both side surfaces and is ground by an abrasive grain layer.
【図４】 本発明のＣＢＮブレードによる被切断物の切
断中の状態を示す一部断面拡大説明図で、（ａ）は切断
抵抗が小さい状態を示し、（ｂ）はＣＢＮブレードが反
ることなく切断面に反りが発生せず、ＣＢＮブレードの
逃げ現象が起きない状態を示し、（ｃ）は切断終了後の
切断面にバリが発生しない状態を示す図面である。FIG. 4 is an enlarged partial cross-sectional explanatory view showing a state during cutting of an object to be cut by the CBN blade of the present invention, (a) shows a state where the cutting resistance is small, and (b) shows that the CBN blade warps. 2C shows a state in which the cut surface does not warp and the escape phenomenon of the CBN blade does not occur, and FIG. 6C is a view showing a state in which burrs do not occur on the cut surface after the cutting.
【図５】 従来のＣＢＮブレードの１例を示すもので、
（ａ）は従来のＣＢＮブレードの正面図、（ｂ）は
（ａ）のＢ−Ｂ線断面図及び、（ｃ）はＣＢＮチップ部
分の摘示説明図である。FIG. 5 shows an example of a conventional CBN blade,
(A) is a front view of a conventional CBN blade, (b) is a sectional view taken along line BB of (a), and (c) is a schematic explanatory view of a CBN tip portion.
【図６】 従来のＣＢＮブレードを装着した切断装置の
一部断面説明図で、（ａ）は被切断物を切断する前の状
態を示し、（ｂ）は被切断物を切断している最中の状態
を示す図面である。FIG. 6 is a partial cross-sectional explanatory view of a cutting device equipped with a conventional CBN blade, in which (a) shows a state before cutting an object to be cut, and (b) shows a state of cutting the object to be cut. It is drawing which shows the state inside.
【図７】 従来のＣＢＮブレードによる被切断物の切断
中の状態を示す一部断面説明図で、（ａ）は被切断物の
受ける応力を示し、（ｂ）はＣＢＮブレードの金属基板
の両側面に被切断物が接触し砥粒層で研削される状態を
示す図面である。FIG. 7 is a partial cross-sectional explanatory view showing a state during cutting of an object to be cut by a conventional CBN blade, (a) showing stress received by the object to be cut, and (b) showing both sides of a metal substrate of the CBN blade. It is drawing which shows the state in which a to-be-cut object contacts a surface and is ground by an abrasive grain layer.
【図８】 従来のＣＢＮブレードによる被切断物の切断
中の状態を示す一部断面拡大説明図で、（ａ）は切断抵
抗が大きい状態を示し、（ｂ）はＣＢＮブレードが反っ
てしまい、切断面に反りが生じる状態を示し、（ｃ）は
切断終了時の状態を示し、（ｄ）は切断終了後の被切断
物の切断面にバリが発生した状態を示す図面である。FIG. 8 is an enlarged partial cross-sectional explanatory view showing a state in which an object to be cut is being cut by a conventional CBN blade, (a) shows a large cutting resistance, and (b) shows that the CBN blade is warped, FIG. 3 is a drawing showing a state in which a cut surface is warped, (c) shows a state at the end of cutting, and (d) is a drawing showing a state in which burrs are generated on the cut surface of an object to be cut after the end of cutting.
【図９】 実施例１〜３及び比較例１における切断中の
ＣＢＮブレード回転用モーターの電流値の変化を示すグ
ラフである。9 is a graph showing changes in the current value of a CBN blade rotation motor during cutting in Examples 1 to 3 and Comparative Example 1. FIG.
【図１０】 実施例４〜６における切断中のＣＢＮブレ
ード回転用モーターの電流値の変化を示すグラフであ
る。FIG. 10 is a graph showing changes in the current value of the CBN blade rotation motor during cutting in Examples 4 to 6.
１０：従来のＣＢＮブレード、１１：本発明のＣＢＮブ
レード、１２：金属基板、１２ａ：金属基板の側面、１
３：砥粒層、１４：従来のＣＢＮチップ部分、１５：本
発明のＣＢＮチップ部分、１６：軸孔、１８：切断装
置、２０：回転駆動部、２２：回転軸、Ｇ：被切断物10: Conventional CBN blade, 11: CBN blade of the present invention, 12: Metal substrate, 12a: Side surface of metal substrate, 1
3: Abrasive grain layer, 14: Conventional CBN chip part, 15: CBN chip part of the present invention, 16: Shaft hole, 18: Cutting device, 20: Rotation drive part, 22: Rotation shaft, G: Object to be cut
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｂ２４Ｄ 3/00 ３３０ Ｂ２４Ｄ 3/00 ３３０Ｇ ３５０ ３５０ 5/14 5/14 Ｈ０１Ｌ 21/304 ６１１ Ｈ０１Ｌ 21/304 ６１１Ｓ (72)発明者 水野 徹 福島県岩瀬郡鏡石町大字鏡田字境173 株式会社アトック 福島工場内 (72)発明者 須釜 明彦 福島県郡山市田村町金屋字川久保88番地 信越石英株式会社 郡山工場内 (72)発明者 松谷 利勝 山形県天童市大字清池字藤段1357番３ 株式会社山形信越石英内 (72)発明者 伊勢 吉明 山形県天童市大字清池字藤段1357番３ 株式会社山形信越石英内 (56)参考文献 特開 平４−82670（ＪＰ，Ａ) 特開 平８−216031（ＪＰ，Ａ) 特開 平６−216031（ＪＰ，Ａ) 実公 平８−1807（ＪＰ，Ｙ２) (58)調査した分野(Int.Cl.7，ＤＢ名) B24D 5/00 - 5/12 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI B24D 3/00 330 B24D 3/00 330G 350 350 350 5/14 5/14 H01L 21/304 611 H01L 21/304 611S (72) Invention Toru Mizuno Toru Mizuno Kagamiishi-cho, Iwase-gun, Fukushima Prefecture 173 Kagami-da, Sakai, Atok Co., Ltd.Fukushima Factory (72) Inventor Akihiko Sugama 88, Kawakubo, Kanaya, Tamura-cho, Koriyama-shi, Fukushima Shin-Etsu Quartz Co., Ltd.Koriyama Factory (72) Inventor Toshikatsu Matsutani 1357-3 Fujidan, Kiyoike, Tendo-shi, Yamagata Yamaguchi Shinetsu Quartz Co., Ltd. (72) Inventor Yoshiaki Ise, 1357-3 Fujidan, Kiyoike, Tendo, Yamagata Yamaguchi Shin-Etsu Quartz Co., Ltd. (56) References JP-A-4-82670 (JP, A) JP-A-8-216031 (JP, A) JP-A-6-216031 (JP, A) Jpn. Y2) (58) Fields surveyed (Int.Cl. 7 , DB name) B24D 5/00-5/12
Claims (5)
部に設けられかつＣＢＮ砥粒をメタルボンド又はレジン
ボンドにより固着させたＣＢＮチップ部分とを有するガ
ラス材料、セラミックス材料、半導体単結晶材料又は水
晶材料である硬質材料を切断するための硬質材料切断用
ＣＢＮブレードにおいて、該金属基板の側面でかつ該チ
ップ部分の内側に砥粒を固着してなる砥粒層を該チップ
部分に連続して全周にわたって設けるとともに、該ＣＢ
Ｎチップ部分の先端面形状を突部形状とし、該ＣＢＮチ
ップ部分の先端面の突部形状の先端角度を４５°〜１２
０°に設定し、該砥粒層の側面高さが該ＣＢＮチップ部
分の側面高さよりも小であるようにするとともに、該砥
粒層を構成する砥粒が該ＣＢＮチップ部分を構成するＣ
ＢＮ砥粒よりも細かい砥粒であるようにしたことを特徴
とする硬質材料切断用ＣＢＮブレード。1. A glass material, a ceramic material, or a semiconductor single crystal having a disk-shaped metal substrate and a CBN chip portion provided on the outer peripheral portion of the metal substrate and having CBN abrasive grains fixed thereto by metal bond or resin bond. in hard material cutting CBN blade for cutting hard material is a material or quartz material, said chip abrasive layer formed by fixing abrasive grains on the inner side a and the tip portion of the metal substrate
The CB is provided continuously over the entire part
The tip surface shape of the N-tip portion is a projection shape, and the tip angle of the projection shape of the tip surface of the CBN tip portion is 45 ° to 12 °.
It is set to 0 ° so that the side surface height of the abrasive grain layer is smaller than the side surface height of the CBN tip portion, and the abrasive grains forming the abrasive grain layer form the CBN tip portion.
A CBN blade for cutting a hard material, characterized in that the abrasive grains are finer than the BN abrasive grains.
的に設けられることを特徴とする請求項１記載の硬質材
料切断用ＣＢＮブレード。2. The CBN blade for cutting a hard material according to claim 1, wherein the abrasive grain layer is partially provided on a side surface of the metal substrate.
及び／又はその他の砥粒からなることを特徴とする請求
項１又は２記載の硬質材料切断用ＣＢＮブレード。3. The CBN blade for cutting a hard material according to claim 1, wherein the abrasive grains constituting the abrasive grain layer are CBN abrasive grains and / or other abrasive grains.
Ｃ，Ａｌ2 Ｏ3，ＺｒＯ2 ，Ｓｉ3 Ｎ4 であることを特
徴とする請求項３記載の硬質材料切断用ＣＢＮブレー
ド。4. The other abrasive grains are diamond, Si
The CBN blade for cutting a hard material according to claim 3, which is C, Al 2 O 3 , ZrO 2 , or Si 3 N 4 .
Ｎブレードと、該ＣＢＮブレードを高速回転させる回転
駆動部とを有することを特徴とする硬質材料切断装置。5. The CB according to any one of claims 1 to 4.
A hard material cutting device having an N blade and a rotary drive unit for rotating the CBN blade at a high speed.
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13295699A JP3416568B2 (en) | 1999-05-13 | 1999-05-13 | CBN blade and cutting device for cutting hard material |
| TW88114568A TW418445B (en) | 1998-09-10 | 1999-08-25 | Exterior knife-edge, interior knife-edge, core drill and processing apparatus using the same |
| US09/390,629 US6203416B1 (en) | 1998-09-10 | 1999-09-07 | Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones |
| DE69934555T DE69934555T2 (en) | 1998-09-10 | 1999-09-09 | Circular saw blade and inner hole saw and machines using these tools |
| EP99117822A EP0985505B1 (en) | 1998-09-10 | 1999-09-09 | Outer-Diameter blade and inner-diameter blade and processing machines using same ones |
| EP06004768A EP1681151B1 (en) | 1998-09-10 | 1999-09-09 | A core drill and processing machines using same |
| DE69940132T DE69940132D1 (en) | 1998-09-10 | 1999-09-09 | Hollow drilling tool and machines using this tool |
| KR1019990038363A KR100550441B1 (en) | 1998-09-10 | 1999-09-09 | Outer diameter blade, inner diameter blade, core drill and working apparatus with them |
| US09/708,050 US6595844B1 (en) | 1998-09-10 | 2000-11-08 | Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones |
| US09/708,049 US6595845B1 (en) | 1998-09-10 | 2000-11-08 | Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13295699A JP3416568B2 (en) | 1999-05-13 | 1999-05-13 | CBN blade and cutting device for cutting hard material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000326232A JP2000326232A (en) | 2000-11-28 |
| JP3416568B2 true JP3416568B2 (en) | 2003-06-16 |
Family
ID=15093439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13295699A Expired - Fee Related JP3416568B2 (en) | 1998-09-10 | 1999-05-13 | CBN blade and cutting device for cutting hard material |
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| Country | Link |
|---|---|
| JP (1) | JP3416568B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2012139661A (en) | 2010-08-06 | 2014-09-20 | Сэнт-Гобэн Эбрейзивс, Инк. | ABRASIVE TOOL, METHOD FOR ITS OPERATION AND METHOD FOR CLEAN PROCESSING OF PARTS |
| CN110744063A (en) * | 2019-09-05 | 2020-02-04 | 江苏锋泰工具有限公司 | Preparation method of composite ceramic cutting saw blade |
-
1999
- 1999-05-13 JP JP13295699A patent/JP3416568B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000326232A (en) | 2000-11-28 |
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