JP3408033B2 - heat pipe - Google Patents
heat pipeInfo
- Publication number
- JP3408033B2 JP3408033B2 JP29034395A JP29034395A JP3408033B2 JP 3408033 B2 JP3408033 B2 JP 3408033B2 JP 29034395 A JP29034395 A JP 29034395A JP 29034395 A JP29034395 A JP 29034395A JP 3408033 B2 JP3408033 B2 JP 3408033B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- heat pipe
- less
- copper
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ＩＣやＬＳＩ等の
半導体素子やモジュールの冷却に適した、細径化しても
長寿命が得られるヒートパイプに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat pipe suitable for cooling semiconductor elements such as ICs and LSIs and modules, and capable of obtaining a long life even if the diameter is reduced.
【０００２】[0002]
【従来の技術】エレクトロニクス分野においては、Ｉ
Ｃ、ＬＳＩ等の半導体素子やモジュール等は、いわゆる
軽薄短小の時代の要請もあって益々小型化・高密度実装
化が進められている。他の分野においても、設置スペー
スやデザイン性の面で、一層のコンパクト化が要求され
ている。又小型化や高密度実装化等に伴い単位体積当た
りの取扱い熱量は増大してきている。この為、放熱対策
は重要な課題となってきている。前記放熱対策の１つと
してヒートパイプの利用が考えられている。半導体素子
やモジュール等の冷却にはヒートパイプの細径化が不可
欠であり、これまでに外径が２mm程度のものが開発され
ている。これら細径のヒートパイプには、主に、銅製コ
ンテナに熱媒体として水を真空封入したものが用いられ
ている。In the electronics field, I
Semiconductor elements such as C and LSI, modules, and the like are being further miniaturized and mounted with higher density due to demands in the so-called light, thin, short, and small age. In other fields, further downsizing is required in terms of installation space and design. In addition, the amount of heat handled per unit volume is increasing with the miniaturization and high-density mounting. Therefore, heat dissipation measures have become an important issue. The use of a heat pipe is considered as one of the heat dissipation measures. In order to cool semiconductor devices and modules, it is essential to reduce the diameter of the heat pipe, and up to now an outer diameter of about 2 mm has been developed. For these small-diameter heat pipes, a copper container in which water is vacuum-sealed as a heat medium is mainly used.
【０００３】[0003]
【発明が解決しようとする課題】しかし、このような細
径のヒートパイプは、高い熱密度（熱流束）で使用した
りすると、熱媒体に水を使用し、コンテナ材に銅を使用
した場合でも、寿命が極端に短くなることが分かってき
た。本発明者等は、このような事態を踏まえて鋭意研究
を行い、細径のヒートパイプの寿命が短い原因は、コン
テナ内面と熱媒体との間の電気化学的反応又は化学反応
によること、これらの反応はコンテナ内面の酸化膜等の
性状に大きく左右されることを知見し、更に研究を進め
て本発明を完成させるに至った。本発明は、細径化して
も長寿命が得られるヒートパイプの提供を目的とする。However, when such a heat pipe having a small diameter is used at a high heat density (heat flux), when water is used as the heat medium and copper is used as the container material. However, it has been found that the life is extremely shortened. The present inventors have conducted diligent research based on such a situation, and the cause of the short life of the small-diameter heat pipe is due to an electrochemical reaction or a chemical reaction between the inner surface of the container and the heat medium. It was found that the reaction of 1 is greatly influenced by the properties of the oxide film on the inner surface of the container, and further research was conducted to complete the present invention. It is an object of the present invention to provide a heat pipe that can have a long life even if the diameter is reduced.
【０００４】[0004]
【課題を解決するための手段】請求項１記載の発明は、
銅又は銅合金製コンテナ内に、熱媒体として水を封入し
たヒートパイプにおいて、前記コンテナの熱媒体と接す
る面の酸化膜厚さが30ｎｍ以下であることを特徴とする
ヒートパイプである。The invention according to claim 1 is
In a heat pipe in which water is enclosed as a heat medium in a copper or copper alloy container, an oxide film thickness of a surface of the container in contact with the heat medium is 30 nm or less.
【０００５】この発明では、熱媒体と接するコンテナ内
面の酸化膜厚さが30ｎｍ以下と薄い為、酸化膜内への空
気の吸着や、電気化学的反応による影響が抑制され、そ
の結果、ヒートパイプの寿命が向上する。この発明にお
いて、熱媒体と接するコンテナ内面の酸化膜厚さを30ｎ
ｍ以下に限定した理由は、30ｎｍを超えると空気の吸着
量が大巾に増加し、短時間で不凝縮性ガスが発生する為
である。According to the present invention, since the oxide film thickness on the inner surface of the container in contact with the heating medium is as thin as 30 nm or less, the adsorption of air into the oxide film and the influence of the electrochemical reaction are suppressed. As a result, the heat pipe Lifespan is improved. In this invention, the thickness of the oxide film on the inner surface of the container in contact with the heat medium is 30n.
The reason why it is limited to m or less is that when it exceeds 30 nm, the adsorbed amount of air greatly increases and non-condensable gas is generated in a short time.
【０００６】この発明において、コンテナの材料には、
例えば、低酸素銅、無酸素銅、タフピッチ銅、燐脱酸
銅、キュプロニッケル等が用いられる。中でも、低酸素
銅又は無酸素銅は熱伝導性に優れ好ましいが、小径化に
伴い、そこに含まれる不純物（酸素等）の量が寿命に影
響することが明らかになってきている。本発明では、コ
ンテナ又はウィックに、酸素が0.01wt％以下、銅が 99.
97wt％以上の低酸素銅、特には、酸素が 0.001wt％以
下、銅が99.99 wt％以上の無酸素銅を用いるのがヒート
パイプの長期信頼性が高まり好ましい。熱媒体として、
イオン交換水や蒸留水等の純水は、電気化学的反応を起
こし難く好ましい。In the present invention, the material of the container is
For example, low oxygen copper, oxygen free copper, tough pitch copper, phosphorus deoxidized copper, cupro nickel, etc. are used. Among them, low-oxygen copper or oxygen-free copper is preferable because it has excellent thermal conductivity, but it has been clarified that the amount of impurities (oxygen or the like) contained therein has an influence on the life as the diameter becomes smaller. In the present invention, the container or wick contains less than 0.01 wt% oxygen and 99.
It is preferable to use low-oxygen copper of 97 wt% or more, especially oxygen-free copper having 0.001 wt% or less of oxygen and 99.99 wt% or more of copper because the long-term reliability of the heat pipe is increased. As a heat medium,
Pure water such as ion-exchanged water or distilled water is preferable because it is unlikely to cause an electrochemical reaction.
【０００７】請求項２記載の発明は、コンテナ内に、銅
又は銅合金製のウィックが配され、前記ウィックの酸化
膜厚さが30ｎｍ以下であることを特徴とする請求項１記
載のヒートパイプである。The invention according to claim 2 is characterized in that a wick made of copper or copper alloy is arranged in the container, and the oxide film thickness of the wick is 30 nm or less. Is.
【０００８】このように、コンテナ内にウィックを配し
たものは、毛細管力が増加し、トップヒートモードでの
性能が優れている。前記ウィックについても酸化膜厚さ
を30ｎｍ以下にすることにより、酸化膜内への空気の吸
着や、電気化学的反応による影響を抑制でき、ヒートパ
イプの寿命を向上させることができる。前記ウィック
は、表面積が大きい為に、酸化膜厚さの管理は、より重
要になる。As described above, the container having the wick arranged therein has an increased capillary force and is excellent in the performance in the top heat mode. Also for the wick, by setting the oxide film thickness to 30 nm or less, the adsorption of air into the oxide film and the influence of the electrochemical reaction can be suppressed, and the life of the heat pipe can be improved. Since the wick has a large surface area, the control of the oxide film thickness becomes more important.
【０００９】請求項１又は２記載の発明において、コン
テナ、又はコンテナとウィックの熱媒体と接する面の酸
化膜厚さは、10ｎｍ以下、特には５ｎｍ以下にするの
が、電気化学的反応がより起き難くなり好ましい。In the invention according to claim 1 or 2, the thickness of the oxide film on the surface of the container, or the surface of the container and the wick that is in contact with the heat medium, is set to 10 nm or less, and particularly 5 nm or less. It is difficult to get up and is preferable.
【００１０】請求項３記載の発明は、銅又は銅合金製コ
ンテナ内に、熱媒体として水を封入したヒートパイプに
おいて、前記コンテナの熱媒体と接する面の酸化膜厚さ
が30ｎｍ以下、コンテナの熱媒体と接する面に付着した
油分及び熱媒体内に溶出した油分の合計量が 0.1ｍｇ／
ｍ（ヒートパイプの長さ１ｍ当たりの油分重量）以下で
あることを特徴とするヒートパイプである。According to a third aspect of the present invention, in a heat pipe in which water is enclosed as a heat medium in a copper or copper alloy container, an oxide film thickness of a surface of the container in contact with the heat medium is 30 nm or less, The total amount of oil adhering to the surface in contact with the heat medium and oil eluted in the heat medium is 0.1 mg /
m (oil weight per 1 m of length of heat pipe) or less.
【００１１】又請求項４記載の発明は、コンテナ内に、
銅又は銅合金製のウィックが配され、前記ウィックの酸
化膜厚さが30ｎｍ以下、コンテナとウィックの熱媒体と
接する面に付着した油分及び熱媒体内に溶出した油分の
合計量が 0.1ｍｇ／ｍ以下であることを特徴とする請求
項３記載のヒートパイプである。According to the invention of claim 4, in a container,
A wick made of copper or a copper alloy is arranged, and the oxide film thickness of the wick is 30 nm or less, and the total amount of oil adhering to the surface of the container and the wick in contact with the heat medium and the oil eluted in the heat medium is 0.1 mg / It is m or less, It is a heat pipe of Claim 3 characterized by the above-mentioned.
【００１２】請求項３又は４記載の発明は、コンテナ内
面等の酸化膜厚さを所定値以下に抑えると共に、化学反
応を助長するコンテナ内の油分を所定値以下に抑えて、
ヒートパイプの寿命を更に向上させたものである。ここ
で油分の合計量を 0.1ｍｇ／ｍ以下としたのは、種々の
改善研究を行う中で、油分がヒートパイプの長期信頼性
に影響を与えることを見出した為である。尚、通常行わ
れている脱脂程度では、油分の合計量を 0.1ｍｇ／ｍ以
下に抑えることはできない。請求項３又は４記載の発明
において、コンテナやウィックの材料に無酸素銅を用い
て熱伝導性を高め、又前記コンテナやウィックの熱媒体
と接する面の酸化膜厚さを10ｎｍ以下、特には５ｎｍ以
下とし、前記コンテナ内の合計油分量を0.05ｍｇ／ｍ以
下、特には0.01ｍｇ／ｍ以下にして電気化学的反応をよ
り確実に抑制することにより、ヒートパイプの寿命を更
に一層向上させることができる。According to the third or fourth aspect of the present invention, the oxide film thickness on the inner surface of the container or the like is suppressed to a predetermined value or less, and the oil content in the container that promotes the chemical reaction is suppressed to a predetermined value or less,
The life of the heat pipe is further improved. The reason why the total amount of oil content is set to 0.1 mg / m or less is that it was found that the oil content affects the long-term reliability of the heat pipe during various improvement studies. In addition, it is not possible to suppress the total amount of oil content to 0.1 mg / m or less by the usual degreasing degree. In the invention according to claim 3 or 4, oxygen-free copper is used as the material of the container or wick to enhance the thermal conductivity, and the oxide film thickness of the surface of the container or wick in contact with the heat medium is 10 nm or less, particularly To further improve the life of the heat pipe by making the total oil content in the container 5 nm or less and 0.05 mg / m or less, particularly 0.01 mg / m or less to more reliably suppress the electrochemical reaction. You can
【００１３】[0013]
【実施例】以下に本発明を実施例により詳細に説明す
る。
（実施例１）コンテナに、外径が４mm又は６mm、長さが
250mmの燐脱酸銅管又は無酸素銅管を用い、このコンテ
ナを有機溶媒にて脱脂し、次いで酸化膜を水素還元法に
より除去したのち、コンテナ内にイオン交換水を真空封
入してヒートパイプを作製した。酸化膜は 5、10、30、
50ｎｍの種々の厚さに残した。酸化膜の厚さは、通電
量、浸漬面積、還元時間から算出するカソード還元法に
より測定した。コンテナには、酸素が 0.001wt％以下、
銅が 99.99wt％以上の無酸素銅を用いた。EXAMPLES The present invention will be described in detail below with reference to examples. (Example 1) A container having an outer diameter of 4 mm or 6 mm and a length of
A 250 mm phosphorus deoxidized copper tube or oxygen-free copper tube is used to degrease this container with an organic solvent, and then the oxide film is removed by the hydrogen reduction method. Was produced. Oxide film is 5, 10, 30,
It was left in various thicknesses of 50 nm. The thickness of the oxide film was measured by the cathode reduction method, which was calculated from the energization amount, the immersion area, and the reduction time. Oxygen 0.001wt% or less,
Oxygen-free copper containing 99.99 wt% or more of copper was used.
【００１４】（実施例２）コンテナに、外径４mm、長さ
250mmの無酸素銅管を用い、コンテナ内にウィックとし
て無酸素銅製のワイヤメッシュ(100メッシュ) を配した
他は、実施例１と同じ方法によりヒートパイプを作製し
た。コンテナとワイヤメッシュには、酸素が 0.001wt％
以下、銅が 99.99wt％以上の無酸素銅を用いた。(Embodiment 2) The container has an outer diameter of 4 mm and a length.
A heat pipe was produced in the same manner as in Example 1 except that a 250 mm oxygen-free copper tube was used and an oxygen-free copper wire mesh (100 mesh) was placed as a wick in the container. 0.001wt% oxygen in container and wire mesh
Hereafter, oxygen-free copper containing 99.99 wt% or more of copper was used.
【００１５】得られた各々のヒートパイプの寿命を図１
に示す長期信頼性試験装置を用いて調べた。この試験装
置は、ヒーター10と、前記ヒーター10の温度をコントロ
ールする温度制御器11とからなり、ヒーター10をヒート
パイプ12の蒸発部13に巻付けて前記蒸発部13を所定温度
(150℃）に保ち、蒸発部13と凝縮部14の温度差（Ｔ1−
Ｔ2)を測定する装置である。寿命は６℃の温度差が生じ
るまでの時間、又は生じた温度差により評価した。短時
間に多くの温度差がつく程、長期信頼性が無いことを示
している。結果を表１に示す。The life of each heat pipe obtained is shown in FIG.
It investigated using the long-term reliability test apparatus shown in. This test apparatus comprises a heater 10 and a temperature controller 11 for controlling the temperature of the heater 10. The heater 10 is wound around an evaporation section 13 of a heat pipe 12 so that the evaporation section 13 has a predetermined temperature.
The temperature difference between the evaporator 13 and the condenser 14 (T 1 −
This is a device for measuring T 2 ). The life was evaluated by the time until the temperature difference of 6 ° C. occurred or the temperature difference generated. The larger the temperature difference in a short time, the less long-term reliability is indicated. The results are shown in Table 1.
【００１６】[0016]
【表１】 ＊ ３×103 時間経過後、 104時間経過後、２×104 時間経過後。[Table 1] * After 3 × 10 3 hours, 10 4 hours, 2 × 10 4 hours.
【００１７】表１より明らかなように、本発明例品（N
o.1〜12) は、いずれも、寿命が 104時間以上であっ
た。又酸化膜厚さが薄いもの程寿命が長く、又無酸素銅
の方が燐脱酸銅より寿命が長く、又ウィックは無い方が
寿命が長いことが分かった。As is clear from Table 1, the product of the present invention (N
o.1 to 12) all had a life of 10 4 hours or more. It was also found that the thinner the oxide film, the longer the life, the oxygen-free copper has a longer life than the phosphorus-deoxidized copper, and the life without wick is longer.
【００１８】（実施例３）コンテナに、外径が４mm又は
６mm、長さが 250mmの燐脱酸銅管を用い、このコンテナ
を有機溶媒にて脱脂し、次いで酸化膜を水素還元法によ
り除去したのち、コンテナ内にイオン交換水を真空封入
してヒートパイプを作製した。酸化膜は 5、10、30ｎｍ
の厚さに制御した。酸化膜の厚さは、通電量、浸漬面
積、還元時間から算出するカソード還元法により測定し
た。油分量は、合計で0.01〜 0.2ｍｇ／ｍ（ヒートパイ
プ１ｍ当たりの油分重量）の範囲に制御した。前記油分
量は、管内を溶液で洗浄し、洗浄溶液を濃縮した後に赤
外線分光光度計により測定した。結果を表２に示す。(Example 3) A phosphorus deoxidized copper tube having an outer diameter of 4 mm or 6 mm and a length of 250 mm was used as a container, the container was degreased with an organic solvent, and then the oxide film was removed by a hydrogen reduction method. After that, ion-exchanged water was vacuum-sealed in the container to produce a heat pipe. Oxide film is 5, 10, 30 nm
Controlled to the thickness of. The thickness of the oxide film was measured by the cathode reduction method, which was calculated from the energization amount, the immersion area, and the reduction time. The total amount of oil was controlled in the range of 0.01 to 0.2 mg / m (weight of oil per 1 m of heat pipe). The oil content was measured with an infrared spectrophotometer after washing the inside of the tube with the solution and concentrating the washing solution. The results are shown in Table 2.
【００１９】（実施例４）コンテナに、外径４mm、長さ
250mmの無酸素銅管を用い、コンテナ内にウィックとし
て無酸素銅製のワイヤメッシュ(100メッシュ) を配した
他は、実施例３と同じ方法によりヒートパイプを作製し
た。(Embodiment 4) The container has an outer diameter of 4 mm and a length.
A heat pipe was manufactured by the same method as in Example 3 except that a 250 mm oxygen-free copper tube was used and an oxygen-free copper wire mesh (100 mesh) was placed as a wick in the container.
【００２０】[0020]
【表２】 ＊ ３×103 時間経過後、 104時間経過後、２×104 時間経過後。[Table 2] * After 3 × 10 3 hours, 10 4 hours, 2 × 10 4 hours.
【００２１】表２より明らかなように、本発明例品（16
〜27）は 104時間経過後まで温度差が生じなかった。油
分量は少ない程、寿命が長かった。コンテナ材質、酸化
膜厚さ、ウィックの有無については、実施例１と同じ傾
向が見られた。これに対し、比較例品（28〜30）は油分
量が0.20mg/mと多かった為、３×103時間経過後に温度
差が生じ始め、その後温度差は急激に増加した。油分の
影響はNo.16とNo.28 、 No.25とNo.30 を比較すれば明
らかである。この油分による寿命の低下は、熱媒体と、
コンテナやウィックとの化学反応が油分により促進した
為である。As is clear from Table 2, the products of the present invention (16
In the case of ~ 27), no temperature difference occurred until after 10 4 hours. The smaller the amount of oil, the longer the life. Regarding the material of the container, the thickness of the oxide film, and the presence or absence of the wick, the same tendency as in Example 1 was observed. On the other hand, since the comparative example products (28 to 30) had a large oil content of 0.20 mg / m, a temperature difference started to occur after 3 × 10 3 hours had elapsed, and then the temperature difference rapidly increased. The effect of oil content is clear when comparing No. 16 and No. 28, and No. 25 and No. 30. The decrease in life due to this oil is due to the heat medium,
This is because the chemical reaction with the container and wick was accelerated by the oil.
【００２２】以上、４mmφ又は６mmφの燐脱酸銅又は無
酸素銅製のコンテナを用い、又ウィックにワイヤメッシ
ュを用いた場合について説明したが、本発明は、ヒート
パイプの径が２mmφ程度に細い場合でも、又材料にタフ
ピッチ銅等を用いた場合でも、又コンテナが内面溝を形
成したグルーブ管の場合でも、或いは、ウィックとして
ワイヤ等の形状材を用いた場合でも、同様の効果が得ら
れるものである。The case where the container made of phosphorous-deoxidized copper or oxygen-free copper of 4 mmφ or 6 mmφ is used and the wire mesh is used for the wick has been described above. However, the present invention is applied when the diameter of the heat pipe is as thin as about 2 mmφ. However, the same effect can be obtained when tough pitch copper or the like is used as the material, when the container is a groove tube having an inner surface groove, or when a shaped material such as a wire is used as the wick. Is.
【００２３】尚、前記実施例では、酸化膜厚さと油分量
は、熱媒体を真空封入する前（ヒートパイプ作製前）の
測定値であるが、ヒートパイプ作製後に解体して測定し
た値が本発明の限定値に含まれる場合も、本発明に属す
ることは言うまでもない。In the above-mentioned examples, the oxide film thickness and the oil content are the measured values before the heat medium is vacuum sealed (before the heat pipe is manufactured). Needless to say, the case of being included in the limit value of the invention belongs to the present invention.
【００２４】ウィック入りの、より細径のヒートパイプ
は、半導体素子等の冷却に有用であり、多くの需要が見
込まれる。しかし、上記ヒートパイプは、前記実施例か
ら明らかなように寿命が短くなる傾向にある。従って、
上記ヒートパイプは、コンテナやウィック等の酸化膜厚
さ、更にコンテナ内の油分量をより低い値に厳しく管理
する必要がある。The heat pipe having a smaller diameter and containing a wick is useful for cooling semiconductor elements and the like, and is expected to be in great demand. However, the heat pipe tends to have a shorter life as is clear from the above-mentioned embodiment. Therefore,
In the heat pipe, it is necessary to strictly control the oxide film thickness of the container, the wick, etc., and the oil content in the container to a lower value.
【００２５】[0025]
【発明の効果】以上に述べたように、本発明のヒートパ
イプは、コンテナの熱媒体と接する面の酸化膜厚さが30
ｎｍ以下と薄い為、コンテナ内面と熱媒体との間で電気
化学的反応及び化学反応が起き難く、良好な熱伝達特性
が、長期間良好に保持される。更に、コンテンナの熱媒
体と接する面に付着した油分及び熱媒体内に溶出した油
分の合計量を 0.1ｍｇ／ｍ以下に抑えることにより一層
向上する。依って、細径でも長寿命のヒートパイプが得
られ、工業上顕著な効果を奏する。As described above, in the heat pipe of the present invention, the oxide film thickness of the surface of the container in contact with the heat medium is 30.
Since it is as thin as nm or less, electrochemical reaction and chemical reaction do not easily occur between the inner surface of the container and the heat medium, and good heat transfer characteristics can be maintained satisfactorily for a long period of time. Further, the total amount of oil adhering to the surface of the container that contacts the heat medium and the amount of oil eluted in the heat medium is suppressed to 0.1 mg / m or less to further improve. Therefore, a heat pipe having a small diameter and a long life can be obtained, and a remarkable effect is industrially achieved.
【図１】長期信頼性試験装置の説明図である。FIG. 1 is an explanatory diagram of a long-term reliability test device.
10………ヒーター 11………温度制御器 12………ヒートパイプ 13………蒸発部 14………凝縮部 10 ... Heater 11 ……… Temperature controller 12 ……… Heat pipe 13 ... Evaporator 14 ……… Condenser
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平７−239195（ＪＰ，Ａ) 特開 昭63−129297（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) F28D 15/02 104 F28D 15/02 106 ─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-7-239195 (JP, A) JP-A-63-129297 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) F28D 15/02 104 F28D 15/02 106
Claims (4)
して水を封入したヒートパイプにおいて、前記コンテナ
内の熱媒体と接する面の酸化膜厚さが30ｎｍ以下である
ことを特徴とするヒートパイプ。1. A heat pipe in which water is enclosed as a heat medium in a copper or copper alloy container, wherein the oxide film on the surface in contact with the heat medium in the container has a thickness of 30 nm or less. pipe.
クが配され、前記ウィックの酸化膜厚さが30ｎｍ以下で
あることを特徴とする請求項１記載のヒートパイプ。2. The heat pipe according to claim 1, wherein a wick made of copper or a copper alloy is arranged in the container, and the oxide film thickness of the wick is 30 nm or less.
して水を封入したヒートパイプにおいて、前記コンテナ
の熱媒体と接する面の酸化膜厚さが30ｎｍ以下、コンテ
ナの熱媒体と接する面に付着した油分及び熱媒体内に溶
出した油分の合計量が 0.1ｍｇ／ｍ（ヒートパイプの長
さ１ｍ当たりの油分重量）以下であることを特徴とする
ヒートパイプ。3. In a heat pipe in which water is sealed as a heat medium in a copper or copper alloy container, the oxide film thickness of the surface of the container in contact with the heat medium is 30 nm or less, and the surface of the container in contact with the heat medium is 30 nm or less. A heat pipe characterized in that the total amount of the adhered oil component and the oil component eluted in the heat medium is 0.1 mg / m (oil component weight per 1 m of the length of the heat pipe) or less.
クが配され、前記ウィックの酸化膜厚さが30ｎｍ以下、
コンテナとウィックの熱媒体と接する面に付着した油分
及び熱媒体内に溶出した油分の合計量が 0.1ｍｇ／ｍ以
下であることを特徴とする請求項３記載のヒートパイ
プ。4. A wick made of copper or a copper alloy is arranged in a container, and the oxide film thickness of the wick is 30 nm or less,
The heat pipe according to claim 3, wherein the total amount of oil adhering to the surface of the container and the wick that contacts the heat medium and oil eluted in the heat medium is 0.1 mg / m or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29034395A JP3408033B2 (en) | 1995-10-12 | 1995-10-12 | heat pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29034395A JP3408033B2 (en) | 1995-10-12 | 1995-10-12 | heat pipe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09113162A JPH09113162A (en) | 1997-05-02 |
| JP3408033B2 true JP3408033B2 (en) | 2003-05-19 |
Family
ID=17754829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29034395A Expired - Lifetime JP3408033B2 (en) | 1995-10-12 | 1995-10-12 | heat pipe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3408033B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5568289B2 (en) * | 2009-11-30 | 2014-08-06 | 新光電気工業株式会社 | Heat dissipation component and manufacturing method thereof |
| TWI493150B (en) * | 2012-11-30 | 2015-07-21 | Ind Tech Res Inst | Heat pipe and method for forming the same |
-
1995
- 1995-10-12 JP JP29034395A patent/JP3408033B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09113162A (en) | 1997-05-02 |
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