JP3405391B2 - Oil tempered wire for spring and method of manufacturing the same - Google Patents

Oil tempered wire for spring and method of manufacturing the same

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Publication number
JP3405391B2
JP3405391B2 JP25785997A JP25785997A JP3405391B2 JP 3405391 B2 JP3405391 B2 JP 3405391B2 JP 25785997 A JP25785997 A JP 25785997A JP 25785997 A JP25785997 A JP 25785997A JP 3405391 B2 JP3405391 B2 JP 3405391B2
Authority
JP
Japan
Prior art keywords
wire
spring
quenching
oil
tempering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP25785997A
Other languages
Japanese (ja)
Other versions
JPH1180895A (en
Inventor
憲人 山尾
孝至 塩飽
照幸 村井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
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Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP25785997A priority Critical patent/JP3405391B2/en
Publication of JPH1180895A publication Critical patent/JPH1180895A/en
Application granted granted Critical
Publication of JP3405391B2 publication Critical patent/JP3405391B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はオイルテンパー線に
関するもので、特に自動車エンジン弁ばねやトランスミ
ッションおよびクラッチ内部で用いられる高強度高耐疲
労ばね用のオイルテンパー線に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oil temper wire, and more particularly to an oil temper wire for a high strength and high fatigue resistance spring used in an automobile engine valve spring, a transmission and a clutch.

【0002】[0002]

【従来の技術】自動車の低燃費化に対応して近年、自動
車のエンジンやトランスミッションの小型軽量化が進め
られており、エンジンの弁ばねやトランスミッションに
使用されるばねに負荷される応力は年々厳しくなって、
用いられるばね材料はより一層の高強度化が求められて
いる。これらエンジンの弁ばねやトランスミッションの
ばねには主として弁ばね用シリコンクロム鋼オイルテン
パー線や、さらにこれに炭素量を増やしたり炭化物形成
元素を添加した高強度シリコンクロム鋼オイルテンパー
線が用いられている。
2. Description of the Related Art In response to the reduction in fuel consumption of automobiles, the size and weight of automobile engines and transmissions have been reduced in recent years, and the stress applied to engine valve springs and springs used in transmissions has become severer year by year. Become,
The spring material used is required to have higher strength. These engine valve springs and transmission springs are mainly made of silicon chrome steel oil tempered wire for valve springs and high strength silicon chrome steel oil tempered wire in which the carbon content is increased or a carbide forming element is added. .

【0003】オイルテンパー線は焼入焼戻工程(オイル
テンパー工程)において金属組織を焼戻マルテンサイト
にすることによって強度と靱性を確保している。この焼
入焼戻工程における温度履歴は図1に示すようになる
が、この焼入時に高温のオーステナイト相からマルテン
サイト変態を起こしてマルテンサイト相が生成する。そ
の際、ばね用オイルテンパー線はその成分値の特性上、
オーステナイト相が全てマルテンサイト相に変態するの
ではなく室温の状態(図1のA領域)に冷却しても体積
比で数%のオーステナイト相が不可避的に残る。そして
このオーステナイト相は残留オーステナイトと呼ばれて
いる。
The oil tempered wire secures strength and toughness by making the metal structure into tempered martensite in the quenching and tempering process (oil tempering process). The temperature history in this quenching and tempering process is as shown in FIG. 1, but during this quenching, a martensite transformation occurs from the high temperature austenite phase to produce a martensite phase. At that time, the oil tempered wire for spring has a characteristic of its component value,
Even if all the austenite phase is not transformed into the martensite phase, even if it is cooled to a room temperature state (A region in FIG. 1), a few percent of the austenite phase by volume remains inevitably. And this austenite phase is called retained austenite.

【0004】この残留オーステナイトそのものは応力が
作用するとその応力によって応力誘起マルテンサイト変
態を起こし、その分変形量は稼げることもあり、靱性に
直接悪影響を与えることはない。むしろ、例えば特開平
7-322266号、特開平3-162550号、ばね技術研究会1997年
度春季講演会講演論文集P13〜16に示されるように、積
極的に残留オーステナイトの量を増やして残留オーステ
ナイトの応力誘起変態を利用することで靱性を向上させ
ることが提案されている。
When the stress acts on the retained austenite itself, stress-induced martensitic transformation is caused by the stress, and the amount of deformation may be increased by that amount, so that the toughness is not directly adversely affected. Rather, for example,
As shown in 7-322266, JP-A-3-162550, Spring Technical Research Group 1997 Spring Lecture Lecture Proceedings P13-16, the amount of retained austenite is positively increased to induce stress-induced transformation of retained austenite. It has been proposed to improve toughness by utilizing it.

【0005】また、焼入れた際に不可避的または意図的
に生じる残留オーステナイトの一部は焼戻中にマルテン
サイトに分解することが知られている。すなわち、図1
のB領域において残留オーステナイトの一部がマルテン
サイトに分解する。ただこれらのマルテンサイトは分解
と同時に焼戻されるので靱性に悪影響を与えることはな
い。
Further, it is known that a part of the retained austenite which is inevitably or intentionally generated during quenching is decomposed into martensite during tempering. That is, FIG.
In the region B, part of the retained austenite decomposes into martensite. However, since these martensites are tempered at the same time they are decomposed, they do not adversely affect the toughness.

【0006】[0006]

【発明が解決しようとする課題】しかし、発明者らは焼
戻後の冷却中(図1のC領域)にも残留オーステナイト
が分解して体積比で0.5%以上のマルテンサイトが生じ
ること、さらにこのマルテンサイトは焼戻されていない
ため靱性に悪影響を与えることを見い出した。
However, the inventors have found that retained austenite decomposes during cooling after tempering (region C in FIG. 1) to produce martensite of 0.5% or more in volume ratio. It was found that this martensite adversely affects the toughness because it is not tempered.

【0007】これまでも例えば門間、須藤著『鉄鋼材料
とその熱処理』(日本金属学会)P134〜136に示すよう
に、マルテンサイト変態開始温度(Ms点)が低い鋼種
においては焼入時に生成した残留オーステナイトの一部
が焼戻後の冷却時にマルテンサイト変態を起こすことが
知られている。しかし、これは高速度鋼やダイス鋼のよ
うに炭素量が0.95%以上かCrまたはNiを2%以上含
有する鋼種に関するものである。成分が異なる上にMs
点が低くないばね用鋼においては残留オーステナイトが
焼戻後の冷却中にマルテンサイト変態を起こし、未焼戻
のマルテンサイトが存在することは知られていない。
Until now, for example, as shown in Kadoma and Sudo, "Steel Materials and Their Heat Treatments" (Japan Institute of Metals), P134-136, steels with a low martensite transformation start temperature (Ms point) were formed during quenching. It is known that part of retained austenite undergoes martensitic transformation during cooling after tempering. However, this relates to steel types having a carbon content of 0.95% or more or Cr or Ni of 2% or more, such as high speed steel and die steel. Different composition and Ms
It is not known that residual austenite undergoes martensitic transformation during cooling after tempering in spring steels whose points are not low and untempered martensite exists.

【0008】また、残留オーステナイト量を減らす方法
として特開平4-311529号に示すように油焼入後すみやか
に水焼入をする方法があるが、この方法でも焼戻後の冷
却中に生成するマルテンサイト量を体積比で0.5%以下
とすることはできない。
Further, as a method of reducing the amount of retained austenite, there is a method of rapidly quenching with water after oil quenching as shown in JP-A No. 4-311529, but this method also produces during quenching after tempering. The amount of martensite cannot be 0.5% or less by volume.

【0009】従って、本発明の主目的は、オイルテンパ
ー線に存在する未焼戻のマルテンサイトを体積比で0.5
%以下にし、高強度でかつ高靱性のばね用オイルテンパ
ー線を提供することにある。
Therefore, the main object of the present invention is to provide untempered martensite present in an oil tempered wire in a volume ratio of 0.5.
% Or less, and to provide an oil tempered wire for springs having high strength and high toughness.

【0010】[0010]

【課題を解決するための手段】本発明は上記の知見に基
づいてなされたもので、その特徴は、未焼戻で存在する
マルテンサイトの量を体積比で0.5%以下にすることに
ある。
The present invention was made on the basis of the above findings, and is characterized in that the amount of martensite existing in the untempered state is 0.5% or less by volume.

【0011】このオイルテンパー線は、重量%でC:0.
5〜0.9%、Si:0.8〜3.0%、Mn:0.4〜1.0%、C
r:0.4〜1.0%を含有し、焼入焼戻処理を施す線材を対
象とする。
This oil-tempered wire has a weight ratio of C: 0.
5 to 0.9%, Si: 0.8 to 3.0%, Mn: 0.4 to 1.0%, C
r: A wire rod containing 0.4 to 1.0% and subjected to quenching and tempering treatment.

【0012】化学成分として、さらに重量%でV:0.05
〜0.6%,Mo:0.05%〜0.5%およびNb:0.05〜0.2
%から選択された少なくとも1種を添加してもよい。
Further, as a chemical component, V: 0.05 by weight%.
~ 0.6%, Mo: 0.05% to 0.5% and Nb: 0.05 to 0.2
You may add at least 1 sort (s) selected from%.

【0013】また、本発明オイルテンパー線の製造方法
は、重量%でC:0.5〜0.9%、Si:0.8〜3.0%、M
n:0.4〜1.0%、Cr:0.4〜1.0%を含有する線材に焼
入焼戻処理を施すばね用オイルテンパー線の製造方法で
あって、焼戻処理までに線材を−50℃以下に冷却するこ
とを特徴とする。
In the method for producing the oil tempered wire of the present invention, C: 0.5-0.9%, Si: 0.8-3.0%, M by weight%.
A method for manufacturing a spring oil-tempered wire, in which a wire containing n: 0.4 to 1.0% and Cr: 0.4 to 1.0% is quenched and tempered, and the wire is cooled to -50 ° C or less before tempering. It is characterized by doing.

【0014】線材を−50℃以下に冷却する具体的手順と
しては、 室温に焼入れてから焼戻までの間に冷却工程を設けて
線材を−50℃以下に冷却する、 焼入の冷媒を−50℃以下にすることで線材を−50℃以
下に冷却する、ことが挙げられる。
As a concrete procedure for cooling the wire rod to -50 ° C or lower, a cooling step is provided between the quenching at room temperature and the tempering to cool the wire rod to -50 ° C or lower. It is possible to cool the wire to -50 ° C or lower by controlling the temperature to 50 ° C or lower.

【0015】さらにもう一つの製造方法は、前記と同様
の化学成分を有する線材に焼入焼戻処理を施すばね用オ
イルテンパー線の製造方法であって、この焼入焼戻処理
の後に第二の焼戻処理を行い、焼入焼戻処理後の冷却中
に残留オーステナイトの分解により生じたマルテンサイ
トを焼戻すことを特徴とする。
Still another manufacturing method is a method for manufacturing an oil tempered wire for spring, in which a wire having the same chemical composition as described above is subjected to quenching and tempering treatment. Is performed, and the martensite produced by the decomposition of residual austenite during cooling after the quenching and tempering treatment is tempered.

【0016】以下に本発明鋼線およびその製造方法にお
ける鋼組成限定理由ならびに製造条件の特定理由を説明
する。 <C:0.5〜0.9重量%>Cは鋼線の強度を高めるために
必須の元素であるが0.5%未満では十分な強度が得られ
ず、逆に0.9%を超えると結晶粒界にセメンタイトが析
出し著しく靱性が低下するためである。
The reasons for limiting the steel composition and the reasons for specifying the manufacturing conditions in the steel wire of the present invention and the manufacturing method thereof will be described below. <C: 0.5 to 0.9 wt%> C is an essential element for increasing the strength of the steel wire, but if it is less than 0.5%, sufficient strength cannot be obtained, and conversely if it exceeds 0.9%, cementite is formed in the grain boundaries. This is because they precipitate and significantly reduce toughness.

【0017】<Si:0.8〜3.0重量%>Siは鋼中に置
換型元素として固溶し、鋼の強度や耐熱性を高めるのに
有効な元素である。0.8%未満ではその効果は十分では
なく、逆に3.0%を超えると固溶しきれず冷間での加工
性を著しく損ねるためである。
<Si: 0.8 to 3.0% by weight> Si is a solid solution element in the steel as a substitutional element and is an element effective for increasing the strength and heat resistance of the steel. This is because if it is less than 0.8%, the effect is not sufficient, and if it exceeds 3.0%, the solid solution cannot be completely dissolved and the cold workability is significantly impaired.

【0018】<Mn:0.4〜1.0重量%>Mnは鋼の焼入
れ性を向上させ、鋼中のSを固定し、その害を阻止する
が0.4%未満ではその効果がほとんどなく、また1.0%超
えると靱性が低下するためである。
<Mn: 0.4 to 1.0% by weight> Mn improves the hardenability of steel and fixes S in the steel to prevent its harm, but less than 0.4% has almost no effect and exceeds 1.0%. And toughness decreases.

【0019】<Cr:0.4〜1.0%>CrはMn同様焼入
れ性を高めるとともに焼戻時の軟化抵抗性を高め、高強
度化するのに効果的な元素である。0.4%未満ではその
効果がなく、1.0 %を超えると炭化物の固溶を抑制し強
度低下を招くためである。
<Cr: 0.4-1.0%> Cr is an element effective for enhancing the hardenability as well as Mn, enhancing the softening resistance during tempering, and enhancing the strength. This is because if it is less than 0.4%, there is no effect, and if it exceeds 1.0%, solid solution of carbide is suppressed and strength is lowered.

【0020】<V:0.05〜0.6%>Vは焼入れ焼戻時に
炭化物を形成し軟化抵抗を増大させる元素であるが、0.
05%未満ではその効果は極めて限定的であり、0.6%を
超えると形成される炭化物が粗大化し靱性を低下させる
からである。
<V: 0.05 to 0.6%> V is an element that forms carbides during quenching and tempering to increase the softening resistance, but
If it is less than 05%, the effect is extremely limited, and if it exceeds 0.6%, the carbide formed becomes coarse and the toughness is reduced.

【0021】<Mo:0.05〜0.5%>MoはV同様炭化
物を形成し、焼戻軟化抵抗を増大させる元素であるが、
0.05%未満ではその効果はなく、0.6%を超えると形成
される炭化物が粗大化し靱性を著しく低下させるからで
ある。
<Mo: 0.05-0.5%> Mo is an element that forms carbides similarly to V and increases temper softening resistance.
This is because if it is less than 0.05%, there is no effect, and if it exceeds 0.6%, the formed carbide becomes coarse and the toughness is remarkably lowered.

【0022】<Nb:0.05〜0.2%>Nbは炭化物を形
成し、焼戻軟化抵抗を増大させる元素であるが、0.05%
未満ではその効果はほとんどなく、0.2%を超えると形
成される炭化物が粗大化し靱性を大幅に低下させるから
である。
<Nb: 0.05 to 0.2%> Nb is an element that forms carbides and increases temper softening resistance, but 0.05%
If it is less than 0.2%, the effect is hardly present, and if it exceeds 0.2%, the carbide formed is coarsened and the toughness is significantly lowered.

【0023】<−50℃以下への線材の冷却>焼入時また
は焼入後焼戻までに線材を低温にすることによって残留
オーステナイト量を減少させ、焼戻後冷却中に生じるマ
ルテンサイト量を減少できるが、線材の到達温度が−50
℃より高いと残留オーステナイト量の減少量が十分でな
く、焼戻後の冷却中に体積比で0.5%を超えるマルテン
サイトを生じるからである。
<Cooling of wire rod to −50 ° C. or lower> The amount of retained austenite is decreased by lowering the temperature of the wire rod during quenching or after tempering until tempering, and the amount of martensite generated during cooling after tempering is reduced. Can be reduced, but the temperature reached by the wire rod is -50
If the temperature is higher than 0 ° C, the amount of retained austenite is not sufficiently reduced, and martensite exceeding 0.5% by volume is generated during cooling after tempering.

【0024】[0024]

【発明の実施の形態】表1に示す化学成分を有する試料
を溶解、圧延、熱処理、伸線によって線径3.0mmφの線
とした後、表2に示す条件で焼入焼戻を行った。焼入の
冷媒または焼入後の冷却における冷媒には、−70〜−
30℃についてはエチルアルコールとドライアイスの混
合液を、−196℃については液体窒素を用いた。焼入
後の冷却は室温まで焼入れた後、1回目の焼戻しの前に
冷却工程を設けて行った。2回目の焼戻しが請求項4の
「第二の焼戻し」に相当する。
BEST MODE FOR CARRYING OUT THE INVENTION A sample having the chemical composition shown in Table 1 was melted, rolled, heat-treated and drawn into a wire having a wire diameter of 3.0 mmφ, and then quenched and tempered under the conditions shown in Table 2. -70 to-for the cooling medium for quenching and the cooling medium for cooling after quenching.
A liquid mixture of ethyl alcohol and dry ice was used at 30 ° C, and liquid nitrogen was used at -196 ° C. Cooling after quenching was performed by quenching to room temperature and then providing a cooling step before the first tempering. The second tempering corresponds to the "second tempering" of claim 4.

【0025】それぞれのサンプルについて、引張り強さ
の測定,X線回折による残留オーステナイト量の測定,
透過型電子顕微鏡による鋼線中の未焼戻のマルテンサイ
ト量の測定を行った。さらに靱性評価として線表面に深
さ30μmで先端部が0.2mmRの疵をつけ、その疵を外側に
してシャルピー衝撃試験を行い吸収エネルギーを測定し
た。その結果を表3に示す。
For each sample, the tensile strength was measured, the amount of retained austenite was measured by X-ray diffraction,
The amount of untempered martensite in the steel wire was measured by a transmission electron microscope. Further, as a toughness evaluation, a flaw having a depth of 30 μm and a tip portion of 0.2 mmR was formed on the surface of the wire, and a Charpy impact test was performed with the flaw on the outside to measure the absorbed energy. The results are shown in Table 3.

【0026】[0026]

【表1】 [Table 1]

【0027】[0027]

【表2】 [Table 2]

【0028】[0028]

【表3】 [Table 3]

【0029】表3に示すように、すべての実施例(比較
材以外のもの)は比較材と比べ強度レベルは同等である
が未焼戻のマルテンサイト量が体積比で0.5%以下であ
る。そしてシャルピー衝撃値吸収エネルギーが30kg・m/c
m2以上となっており、明らかに優れた靱性を示してい
る。
As shown in Table 3, all the examples (other than the comparative material) have the same strength level as the comparative material, but the untempered martensite content is 0.5% or less by volume. And Charpy impact value absorbed energy is 30kg ・ m / c
It is m 2 or more, and clearly shows excellent toughness.

【0030】[0030]

【発明の効果】以上各項において説明したように、本発
明によれば高強度でかつ高靱性を有するばね用オイルテ
ンパー線を提供することができる。
As described above, according to the present invention, it is possible to provide an oil tempered wire for a spring having high strength and high toughness.

【図面の簡単な説明】[Brief description of drawings]

【図1】焼入れ焼戻し処理における温度履歴を示すグラ
フである。
FIG. 1 is a graph showing a temperature history in a quenching and tempering process.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) C22C 38/00 - 38/60 C21D 9/52 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) C22C 38/00-38/60 C21D 9/52

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 重量%でC:0.5〜0.9%、Si:0.8〜
3.0%、Mn:0.4〜1.0%、Cr:0.4〜1.0%を含有す
る線材に焼入焼戻処理を施したばね用オイルテンパー線
であって、 焼入時に生成する残留オーステナイトの一部より焼戻後
の冷却中に生ずる未焼戻のマルテンサイトの量が体積比
で0.5%以下であることを特徴とするばね用オイルテン
パー線。
1. C: 0.5-0.9% by weight%, Si: 0.8-
An oil-tempered spring wire made by quenching and tempering a wire rod containing 3.0%, Mn: 0.4 to 1.0%, and Cr: 0.4 to 1.0%. Tempered from a portion of retained austenite formed during quenching. An oil tempered wire for a spring, characterized in that the amount of untempered martensite produced during the subsequent cooling is 0.5% or less by volume.
【請求項2】 さらに重量%でV:0.05〜0.6%,M
o:0.05%〜0.5%およびNb:0.05〜0.2%から選択さ
れた少なくとも1種を添加してあることを特徴とする請
求項1記載のばね用オイルテンパー線。
2. V: 0.05-0.6% by weight%, M
The oil tempered wire for a spring according to claim 1, wherein at least one selected from o: 0.05% to 0.5% and Nb: 0.05 to 0.2% is added.
【請求項3】 重量%でC:0.5〜0.9%、Si:0.8〜
3.0%、Mn:0.4〜1.0%、Cr:0.4〜1.0%を含有す
る線材に焼入焼戻処理を施すばね用オイルテンパー線の
製造方法であって、 焼戻処理までに線材を−50℃以下に冷却することを特徴
とするばね用オイルテンパー線の製造方法。
3. C: 0.5-0.9%, Si: 0.8-by weight%
A method for producing an oil tempered wire for a spring, in which a wire material containing 3.0%, Mn: 0.4 to 1.0%, and Cr: 0.4 to 1.0% is subjected to quenching and tempering treatment, wherein the wire material is -50 ° C before tempering treatment. A method for manufacturing an oil tempered wire for a spring, which comprises cooling as follows.
【請求項4】 重量%でC:0.5〜0.9%、Si:0.8〜
3.0%、Mn:0.4〜1.0%、Cr:0.4〜1.0%を含有す
る線材に焼入焼戻処理を施すばね用オイルテンパー線の
製造方法であって、 前記焼入焼戻処理の後に第二の焼戻処理を行い、焼入焼
戻処理後の冷却中に残留オーステナイトの分解により生
じたマルテンサイトを焼戻すことを特徴とするばね用オ
イルテンパー線の製造方法。
4. C: 0.5-0.9%, Si: 0.8-by weight%.
A method for producing an oil tempered wire for spring, which comprises subjecting a wire containing 3.0%, Mn: 0.4 to 1.0%, Cr: 0.4 to 1.0% to quenching and tempering treatment, the method comprising: The method for producing an oil-tempered wire for a spring, which comprises performing the tempering treatment of 1. and tempering martensite generated by decomposition of retained austenite during cooling after the quenching and tempering treatment.
JP25785997A 1997-09-04 1997-09-04 Oil tempered wire for spring and method of manufacturing the same Expired - Lifetime JP3405391B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25785997A JP3405391B2 (en) 1997-09-04 1997-09-04 Oil tempered wire for spring and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25785997A JP3405391B2 (en) 1997-09-04 1997-09-04 Oil tempered wire for spring and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH1180895A JPH1180895A (en) 1999-03-26
JP3405391B2 true JP3405391B2 (en) 2003-05-12

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ID=17312171

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Application Number Title Priority Date Filing Date
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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007063584A (en) * 2005-08-05 2007-03-15 Sumitomo Electric Ind Ltd Oil tempered wire and manufacturing method therefor
US20130118655A1 (en) 2010-08-04 2013-05-16 Nhk Spring Co., Ltd. Spring and manufacture method thereof
JP5683230B2 (en) * 2010-11-22 2015-03-11 日本発條株式会社 Spring and manufacturing method thereof
CN102965490A (en) * 2012-11-26 2013-03-13 遵义市顺通机械有限公司 Thermal treatment process of spring
KR102120699B1 (en) * 2018-08-21 2020-06-09 주식회사 포스코 Wire rod and steel wire for spring with improved toughness and corrosion fatigue resistance and method for manufacturing the same

Also Published As

Publication number Publication date
JPH1180895A (en) 1999-03-26

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