JP3403460B2 - Method for producing carbon material having non-oxide ceramic spray coating - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention
Seed rolls, metal and glassy melting crucibles, various batteries
And electrodes for electrolysis, projectile structural materials, heating elements and heat
Nitride with excellent heat resistance and abrasion resistance used for processing materials
Or non-oxide ceramic spray coating of carbide
Carbon materialManufacturing methodIt is about. [0002] BACKGROUND OF THE INVENTION Carbon products are lightweight and chemically and thermally sensitive.
Excellent thermal stability and non-metallic heat and electrical conductivity
In addition to its excellent properties, products processed into fibrous
Has higher mechanical strength than steel in
Advanced industrial fields such as science, fiber, polymer, metal refining, and ceramics
Widely adopted in. But on the other hand this carbon product
Has poor abrasion resistance and low bonding strength with metal
Disadvantages due to the lack of compounding with other materials.
Removal of points was essential. [0003] Conventionally, the above-mentioned disadvantages of carbon products have been solved.
As a means to overcome this, carbon and polymers or metals
It is common to combine these materials with different materials.
Plating, chemical plating, physical vapor deposition (PVD),
Metal coating by chemical vapor deposition (CVD), thermal spraying, etc.
The law is drawing attention. However, to date
, Electroplating, chemical plating, PVD, CVD
Is limited by the shape and dimensions of the product, and
Since the coating layer is relatively thin,
A sufficiently effective coating layer has not been obtained. On the other hand, the coating layer is formed by a thermal spraying method.
There are few restrictions on the shape and size of the product.
It is advantageous in that the coating layer can be thicker than other coating methods.
is there. For example, the method described in JP-A-60-2211591
The method focuses on these advantages, and focuses on the current collector of the carbon electrode.
Forming a metal layer on the contact surface by thermal spraying
And propose. That is, Sn, Pb, Zn, Cu, Ag, A
l, Ni, Fe, stainless steel, brass, bronze, monel metal
Using one of these as a thermal spray material,
When producing a carbon electrode by spray coating with the wire spray method
At the time. However, this technology is not suitable for plasma spraying or explosion.
When using the thermal spray method, the carbon product is
Undesirable problem because it is oxidized and destroyed
There was a point. [0005] Further, by the above-mentioned electric wire spraying method, charcoal is used.
Regarding the method of spraying metal on the material surface,
Limited to soft metals that can be processed into wires, so-called charcoal
It may not be possible to use metals that are suitable for joining with
Also, the spray metal recommended by this prior art is in contact with carbon.
Since the joint strength is low and the electric wire spraying method is used,
The problem is that the backing speed is slow and the work efficiency is poor.
there were. Techniques for forming a thermal spray coating layer on a carbon material
As a technique, besides, JP-A-60-224771, JP-A-60-22477
First, metal coatings are disclosed in Japanese Unexamined Patent Publications Nos. 4-59978 and 4-1399084.
After forming the covering layer, apply the ceramic layer on it
An approach is disclosed. Also, ceramics are sprayed directly on carbon material.
To prevent reaction of carbon materials with environmental components,
As a technique for preventing a direct reaction with a metal, Japanese Unexamined Patent Publication No. 50-55
Nos. 540, 58-37171, 62-113782 and
There are respective publications of 1-145386. In these prior arts, under-
In the case where a metal spray coating layer is formed,
When exposed to a high temperature of 700 ° C or more in
Oxidizes and bonds to carbon material and upper ceramic coating
Disappears and the whole coating layer peels or breaks
Becomes Further, in an inert gas atmosphere or vacuum,
When heated to a temperature of 0 ° C or higher, the undercoat metal
As a result of the carbon material reacting and changing to metal carbide, the temperature drops
Phenomenon that the coating layer peels or breaks from the carbon base material during
Therefore, improvement is strongly desired. In order to solve the above problems, carbon
After adding a specific metal to the material, heat treatment is performed to remove the metal compound.
After formation, oxide ceramics (Al_TwoO_Three, SiO_Two, MgO)
Method (see JP-A-58-64287) or
Sprays metallic silicon onto the surface of a carbon product and then heat treats it.
(Japanese Unexamined Patent Publication No. 61-30657)
Publications) are proposed. However, the above technique requires a heat treatment step.
Extra work is required, and applicable coating materials
It is limited, and not only leads to an increase in production cost,
Its coating performance is not sufficient. In view of such a situation, the present inventors have
Japanese Patent Application Laid-Open No. 5-70268 discloses a linear expansion of carbon.
The coefficient ratio is in the range of 0.73 to 1.44 and the conversion to carbon
Metals with high chemical affinity, such as Cr, Ti, V, W, Mo,
Thermal spray coating of metal such as Zr, Nb, Ta, etc.
Technology to form various ceramic spray coating layers on
Proposed. According to this technology, the temperature atmosphere below 600 ℃
If this is the case, a great effect on the improvement of the wear resistance of the carbon material is recognized.
Was. However, in an inert gas atmosphere over 600 ° C or
When used for a long time in the air, the carbon material reacts with the metal coating layer.
The metal coating layer and the carbon material
Or bonding of metallization and overlying coating
The disadvantage is that the force disappears and the coating layer peels off in any case.
Therefore, it must be used only under the condition of 600 ℃ or less
In the situation. By the way, in the prior art described above,
The applied thermal spray material is metal (alloy) or oxide
Limited to ceramics. Slightly, JP-A-61-
No. 30657 discloses a carbon product coated with silicon carbide.
After thermal spraying metallic silicon, this is also heat treated.
Changed to carbide by direct thermal spray coating
It was not done. As described above, the sprayed material is metal or oxide.
These materials are limited to ceramics.
Because it has a distinct melting point, film formation by thermal spraying is easy.
This is because that. On the other hand, nitride and carbide ceramics
The mix excels in various properties such as abrasion resistance and molten metal resistance.
But no clear melting point when sprayed in air
Not only that, thermal decomposition and oxides
Has the disadvantage of being easily changed. Therefore, these ceramics
Atmospheric thermal spray coatings for coatings, even if formed
Porous, contains oxides and decomposition products, and adheres to the base material
Can form only films that are poor and practically unsuitable
Absent. Here, the melting points of nitrides and carbides are exemplified.
Then, in nitride, TiN: 2900-3220 ° C, VN: 2050-23
60 ° C, NbN: 2050 ° C, TaN: 2980-3360 ° C, HfN: 3300-3307
° C, ZrN: 2930-2980 ° C, AlN: 2200-2300 ° C, BN: 2720 ~
3000 ℃, Si_ThreeN_Four: 1900 ℃, CrN: 1500 ℃ and carbides
TiC: 3180-3250 ° C, ZrC: 3175-3540 ° C, HfC: 3885-3890
° C, VC: 2810-2865 ° C, TaC: 3740-3880 ° C, NbC: 3500 ~
3800 ℃, WC: 2627-2900 ℃, B_FourC: 2350-2470 ° C, SiC: 22
00-2700 ° C, Cr_ThreeC_Two: 1895 ℃, Cr₇C_Three1895 ℃
However, few have a clear melting point like metals,
Thermal conductivity is 0.004 to 0.07 for nitrides and 0.01 for carbides.
It is in the range of ~ 0.1, which is very small compared to metals.
On the other hand, hardness is nitride: 1060-3260kgf / mm_TwoAnd carbonized
Product: 1800-3700kgf / mm_TwoIn the range of compared to metal
It has very hard characteristics. The nitride and carbonized material having such physical properties
When object particles are introduced into a hot plasma environment,
The surface of the particle is heated rapidly, but its center is conducting heat.
Large temperature difference due to low rate and slow heating
I do. In other words, the surface of the particles is decomposed simultaneously with melting.
Despite this, the temperature rise is slow in the center,
It is in a hard state. In addition, plasma as a thermal spray environment is high
It is warm and has a speed of about 1-2 Mach
The residence time of the particles is short, and
In the case of nitride and carbide particles with a diameter of μm,
It cannot be completely melted. In the state of nitride and carbide in the above state,
When the particles are sprayed on the surface of the object, the surface of the object
Only the surface is blasted, and the formation of the film is
Can not. In addition, nitride and carbide particles are 1 μm or less.
Particles in the state of fine powder
To reduce the fluidity of the spray
Supply is impossible and even if particles are introduced into the plasma
Even if it comes, it will be scattered and decomposed immediately around the plasma
Therefore, a thermal spray coating cannot be formed. This
As described above, it is impossible to form a film directly with nitride or carbide alone
Therefore, in fact, cermet with added metal component
State and the film is formed using the melting phenomenon of metal components.
You. By the way, nitride ceramics contain metal components
Even if it does, a good quality film cannot be obtained.
It has not been realized. [0019] SUMMARY OF THE INVENTION
The excellent wear resistance of nitrides and carbides
Resistance, molten metal resistance, molten glass resistance, stain resistance, environment resistance
It is not possible to impart barrier properties, oxidation resistance, etc. to carbon materials.
It is. An object of the present invention is to provide a nitride and a carbide alone.
The superior function possessed by nitride or carbide ceramics
Material applied by heat spray coatingChargeAdvantageous manufacturing method
To propose a law. [0020] Means for Solving the Problems The inventors have developed nitride and
And carbide-based ceramics thermal spray coatings
In the state of the nitride, literally 100% nitride
Or carbon material coated with 100% carbide spray coating
In order to accomplish the present invention,
Was. First, a conventional nitride and carbide type
A detailed investigation of the sprayed powder material (commercially available) shows that
These materials are fine particles (5 to 10 μm) of nitride or charcoal.
Ni and Cr in the following various methods (1) to (4)
Or metal such as Co mixed or sintered
ing. (1) Metal particles are mechanically mixed with nitride or carbide particles.
After combining, adjust the particle size to 10-50μm (2) Nitride or carbide particles are formed by chemical plating.
After coating, adjust the particle size to 10-50μm (3) Mechanical mixing of nitride or carbide particles and metal particles
After sintering, sinter under pressure at high temperature and mechanically pulverize
And adjusted to a particle size of 10-50 μm (4) Combining the above methods (1) to (3) appropriately Sprayed powder material prepared according to the above method
The material is softened or melted only in the metal component in a high temperature spray environment.
Melting can form a film, so nitride and carbide particles
Has the advantage of being able to form a film even in a hard solid state.
You. However, the amount of metal components contained in sprayed powder particles
Has reached 6 to 50 wt%, so nitrides and carbides are
Its useful function is greatly affected by the presence of metal components.
Has been reduced. For example, in a high temperature state,
Is easily oxidized, and the metal component reacts with nitride and carbide.
Seawater, industrial
Placed in a weakly acidic or weakly alkaline environment as well as water
And the electrochemical dissolution is promoted,
Even if nitrides or carbides with corrosion properties are used, their functions
I can't do it. Further, the metal component in the film is carbon in the atmosphere.
Reacts with the components (carburized) or selects with molten metal or glass
Constructs a film due to exhaustion of metal components such as selective bonding
Of falling sediment particles locally, and further contact abrasion by the dropped particles
And many problems such as abnormal wear of wear parts.
You. Therefore, in the present invention,
In consideration of circumstances, nitrides and carbides that do not contain metal components
A spray-coated carbon material was realized as an undercoat.
That is, the present invention provides a method for forming a nitride or
Coated with ceramic spray coating of carbide, and if necessary
And any metal or alloy or oxide-based ceramic
Single layer or multiple layers of combinations
Non-acid, characterized by having an overcoat layer of
Material with a ceramic spray coatingManufacture
MethodIt is. Here, ceramic spray coatingAsIs Ti
N, HfN, NbN, TaN, VN, ZrN, CrN, Si_ThreeN_Four, NbC, TiC, Cr
_ThreeC_Two, TaC, WC, HfC, ZrC, VC or B_FourOne of C or
Those consisting of layers of these mixtures are advantageously suitable. [0025]In particularThe carbon material has a particle size of 0.01
Collect primary particles of ~ 1μm nitride or carbide to form
Secondary particles having a particle size of 3 to 50 μm, ie, pseudo particles
The surface of carbon material is directly sprayed by
Forming a non-oxide ceramic spray coatingAnd toYo
Can be manufactured. [0026] In general, nitrides and carbides are hard and have a high melting point.
And the temperature difference from the decomposition point is small,
It does not exhibit a molten state. Moreover, in the atmosphere,
There is a disadvantage that it is easily formed. Also, the thermal conductivity is lower than that of metal.
And small. The present inventionUsed in the methodThermal spray particles
To eliminate the disadvantageous properties of carbides and carbides
Oxide or carbide to fine particles of 0.01 to 1 μm (hereinafter referred to as primary
These primary particles are collected and, for example, acetic acid
5-50μm diameter via organic binder such as vinyl
Pseudo-particles obtained by agglomerating (hereinafter referred to as secondary particles)
U). Then, using these secondary particles, plasma
Perform thermal spray coating. That is, secondary particles are introduced into the plasma.
Then, the primary particles on the outermost surface are softened immediately by heating.
Primary particles that are decomposed and decomposed, but filled inside
The element is simply softened by the gas components of the atmosphere.
Just melts or melts and hits the workpiece
Therefore, the film formation rate increases. Incidentally, the particles prepared with the organic binder
When the diameter is less than 5 μm, the rate of thermal decomposition is large, and
When the thickness exceeds 50 μm, the temperature in the center does not rise sufficiently.
Therefore, a high quality film cannot be obtained. Here, from the viewpoint of the material of the object to be processed, the conventional solution
Powdered powder material and characteristics of film properties formed by it
The following is a summary. (1) Are the thermal spray powder particles of nitride and carbide fine particles?
Basically, it is hard and sprayed
Although softened in the environment, compared to metal particles
All were several steps hard, so they hit the surface of the workpiece at high speed
At this time, the collision portion is minutely broken. Because of this,
The particles cannot adhere firmly and fall off easily
Therefore, the adhesion efficiency is low, and even if a film is formed,
Has low adhesion. (2) Thermal spray coating is formed by deposition of thermal spray particles
However, if the phenomenon as described in (1) above exists, the impact of spray particles
Insufficient conversion of impact energy to heat energy
Therefore, only a film having a weak interparticle bond is formed. (3) The phenomenon described in (1) above depends on the hardness of the workpiece.
The harder the material, the less the impact of sprayed particles
In the direction. For this reason, in the prior art, hard spraying
When a film is formed by using a material, a high hardness
Had to choose one. (4) The adhesion of the thermal sprayed coating depends on the thermal expansion coefficient
We are strongly influenced by the difference. That is, the temperature change during film formation
Or temperature changes in the environment in which the sprayed product is used.
The thermal expansion coefficient difference between the two becomes the shear stress at the interface
If the difference is large, the film can be easily peeled off.
Let go. Regarding the above (3), the thermal spray material used in the present invention
When heated in a plasma spray environment,
The primary particles located on the surface of the particles are decomposed or oxidized
However, due to the rapid heat transfer inside the particles,
Is softened and a film can be formed. Therefore, it is soft and
Forms a good coating even on carbon materials with weak interparticle bonding
It is possible to make it. For example, carbon steel (SS400)
Of course, Al, Ti, Cu and its alloys, carbon and its complex
A film can be easily formed on a mixture or the like. With respect to the above (4), the present inventionUsed in
The thermal expansion coefficient of sprayed nitride or carbide particles is shown below.
As compared to metal, it is directly formed on carbon material.
Can be membrane. Further, the nitride and carbon of the present invention
Since the oxide film is hard, the
Metal (alloy), oxide ceramics, cermet
Any coating can be formed. Thermal expansion coefficient of nitride: 4-10 × 10^-6/ ℃ Thermal expansion coefficient of carbide: 4.5 to 8.5 x 10^-6/ ℃ In the present invention, by the method described above,
That is, by spraying the secondary pseudo particles,
Non-oxide (carbide, nitride) ceramic
After forming a thermal spray coating,
The various overcoats are then spray coated. This o
Bar coat is made of gold such as Ni, Cr, Co, Nb, Ta, etc.
Metals, their alloys or oxide-based and non-oxide-based ceramics
Or a single layer of those cermets or it
A plurality of layers according to these combinations are formed by thermal spray coating. [0034] 【Example】 Example 1 According to Table 1, nitride or carbide particles
Used as a thermal spraying material, carbon sintered plate (width: 50mm, length:
100mm and thickness: 10mm)
Therefore, after forming a film with a thickness of 50 μm,
Rate, adhesion to sintered carbon plate, and cross section of coating
The porosity was determined. Also, as a comparison, the thermal spray material of the present invention
Evaluation using the same material as the material but with different diameters
did. The evaluation of the film was as follows. (i) The residual rate as a film is (A / B) x 100 (%) Where A is the weight of the sprayed material deposited on the carbon sintered plate B: Weight of thermal spray material used for thermal spraying Evaluated according to. (ii) Adhesion of film JIS H 86 for coatings formed on carbon sintered plates
64 Test method for overlay coating product 4.4 Evaluation according to adhesion test method
Value (iii) Porosity of coating The cross section of the film formed on the sintered carbon plate was observed with an optical microscope.
It is 400 times larger and the ratio of pores is checked and evaluated. The above evaluation results are also shown in Table 1. [0036] [Table 1] (I) Residual rate as a film Tests obtained by using the thermal spray material in the state of the primary particles of the present invention
Piece Nos. 6 to 10 have very poor fluidity as powder,
The supply from the powder supply device to the plasma spray gun is difficult.
Therefore, film formation was impossible. So, using compressed air
Forced blowing into the plasma frame
Since the substance is fine particles, it immediately scatters around and forms a film.
Did not reach. Also, the particle size of the sprayed material is reduced to 1 to 10 μm.
The remaining rate of the film somewhat improved, and
%, And the same percentage of particles with a particle size of 10 to 50 μm
Met. [0038] The above comparative examples have a low residual ratio.
Is a blast on a sintered carbon plate with a hard spray material
The effect is strong.
Scattered, destroyed or removed by colliding particles
It is thought. On the other hand, the primary fine particles according to the present invention
Spray particles by agglomerating particles into a size of 3-50 μm
38-78% residual rate
It was found that it possessed an excellent film function. (Ii) Adhesion of the film The residual ratio in the film obtained in the comparative example was very low.
Therefore, even if long-time thermal spraying is performed, the initial target of 50μ
A film having a thickness of m was not obtained. Therefore, on a carbon sintered plate
When the adhesion of the film formed on the target was examined,
It was in the range of about 10-25 μm thickness. And its adhesion
Is 5-38kgf / cm^TwoExtremely weak in the range of
It was unbearable. On the other hand, the sprayed material according to the present invention is used.
350-450 kgf / cm ^TwoHigh adhesion
Was done. Also, when observing the peeled part of the film after the adhesion test,
All of the peeling occurred on the carbon sintered plate,
Was in good health. That is, according to the present invention,
The adhesion of the thermal spray coating is based on the carbon particles that make up the carbon sintered plate.
It was confirmed that it was larger than the mutual bonding force. (Iii) Porosity of the film The porosity of the film obtained in the comparative example is as high as 48 to 82%.
This is one of the causes of the decrease in the adhesion of the film.
it is obvious. On the other hand, the sprayed material according to the present invention is
The porosity of the coating obtained is limited to the range of 5 to 30%.
You. This porosity is obtained by spraying a metal sprayed material in the atmosphere.
It is the same as the film when it was processed, and is resistant to practical use with high adhesion.
It can be seen that it has the performance that can be obtained. Embodiment 2 Using the same sprayed material as in Example 1, carbon
80μ thickness on sintered plate by atmospheric plasma spraying
m was formed. In addition, for comparison,
The metal spray coating formed on the surface of the carbon sintered plate
-Coat) with oxide ceramic sprayed on it
And ceramics on carbon sintered plate
Those having a sprayed film were also manufactured. With respect to the film thus obtained, 0.1 torr
In a vacuum furnace at 1200 ° C for 1 hour, and then in a vacuum furnace for 60 hours.
Decrease the temperature to 0 ° C, then reach 200 ° C in air
The cooling operation is performed with one thermal shock, and this operation is performed up to 15 times.
And the state of the film was observed. The result is
Table 2 also shows the specifications of the membrane. [0044] [Table 2] Test pieces Nos. 6 to 12, which are comparative examples,
Three times thermal shock, large and small cracks in the film
And the film itself is undercoat or charcoal
It was peeled off from the sintered plate. In particular, test pieces Nos. 6 to 8
The carbon sintered plate reacts with the undercoat metal,
A clear carburizing phenomenon was observed, and the film peeled from this part.
Was also recognized. On the other hand, the nitride film according to the present invention
(Specimen Nos. 1 and 2) withstand 10 to 12 thermal shocks and
The carbide film (specimen Nos. 3 to 5) was subjected to 15 thermal shocks.
Even though small cracks occur, the film peels off
However, excellent thermal shock resistance was observed. Embodiment 3 The same coating as in Example 2 was formed on a sintered carbon plate, and the same as in Example 2.
Formed in the same manner. Abrasive resistance of the coating thus obtained
The abrasion resistance is the plating abrasion resistance specified in JIS H 8503.
Measured by abrasion test with SiC abrasive based on test
Was. That is, the abrasive wear tester shown in FIG.
And a test piece holder 1 having a sprayed coating 2 formed thereon.
The sintered element 3 is placed on the test piece support 4 while the SiC
While pressing the wound disk 6 around the paper 5 against the film surface
After moving the test piece to the left and right 1000 times,
Observation and weight measurement were performed. Also, as a comparison, carbon
The sintered plate itself was similarly evaluated. This rating
Table 3 shows the results. The measured value of the amount of wear was
The weight loss ratio of each sprayed coating is based on the weight loss
Indicated. [0048] [Table 3] As is clear from the table, the outside of the carbon sintered plate
At a glance, significant wear was seen due to contact with the SiC abrasive paper.
And poor wear resistance, but with a specific gravity of about 1.8
Because of its light weight, the weight loss was not so large. Also, the abrasion resistance of the film obtained in the comparative example
Is better than a sintered carbon plate and changes in appearance after the test
Was also less. However, 8% Y of test pieces No. 6 to 9_Two0_Three・ Zr
O_TwoIn the film, the contact part with the SiC abrasive paper is worn away,
For example, a relatively large weight loss was also observed. This cause
Is 8% Y_Two0_Three・ ZrO_TwoThe hardness of the film is Vickers hardness 400
~ 480, lower than other thermal spray coatings of 600 ~ 1000
It is thought that there is. On the other hand, Al_TwoO_Three, MgAl_TwoO_FourSuch as film
Is very hard (Vickers hardness: 800-900), but SiC
Particles that make up the film fall off when rotated in contact with abrasive paper
The weight loss of the film by the prior art is largely
Minutes were due to particle shedding. On the other hand, the coating according to the present invention is hard and
In addition, because the particles that make up the film have a strong mutual bonding force,
No particles fall off, both appearance and weight loss change
Has the least and excellent abrasive wear resistance
Was confirmed. Embodiment 4 Non-oxide on a carbon sintered plate of the same material and dimensions as in Example 1.
Base ceramics as undercoat to 30μm thickness
Metal or oxide ceramics on it.
Each was sprayed to a thickness of 100 μm to form a multilayer coating. Up
The operation of heating and cooling the multilayer film under the same conditions as in Example 2
The operation was repeated, and the appearance of the film was observed.
It was shown to. The test conditions were the same as in Example 2.
Therefore, the film of the comparative example was the film of Example 2 (Table 2. Test piece No. 6).
To 8) were referred to. The results are shown in Table 2 (the results of Example 2).
Multilayer with metal undercoat according to the prior art
Repeat the thermal shock once or twice for the coating (specimen Nos. 6 to 8)
Alone, various large and small cracks occur in the film,
The carburizing phenomenon occurs in the under metal, and the film
Peeled from the part. On the other hand, the non-oxidation according to the present invention
Multilayer coatings with undercoating of ceramics
Because the metal layer is completely isolated from the base carbon sintered plate,
No carburizing phenomenon is observed in the metal layer, and it is formed on it
Oxide-based ceramic coatings
Cracks are observed but no peeling is observed
Was. In addition, as shown in test pieces No. 3 and No. 6,
Oxide ceramics are directly formed on Lamix.
The applied film also has a large resistance to this kind of thermal shock.
Demonstrated. [0054] [Table 4][0055] As described above, the present inventionMethodObey
The film is dense and has good adhesion, even in high temperature vacuum.
Because it is extremely stable and has excellent wear resistance,
It compensates for the wear resistance of carbon materials, which is a weak point, and offers its advantages.
Low weight and good chemical stability.
Can be. Therefore, weight reduction of equipment using carbon material
Energy saving and chemical and thermal safety.
We can provide carbon products with qualitative and wear resistance.
It is possible to extend the life of the product.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing a point of an abrasive wear resistance test. [Description of Signs] 1 Specimen holder 2 Thermal spray coating 3 Carbon sintered plate 4 Specimen support 5 SiC abrasive paper

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-139084 (JP, A) JP-A-5-32472 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) C04B 41/80-41/91

Claims (1)

(57) [Claims 1] A particle size of 0.01 to 1 directly on the surface of a carbon material.
A non-oxide ceramic sprayed film is formed by plasma spraying pseudo particles having a particle diameter of 3 to 50 μm, in which fine particles of nitride or carbide of μm are aggregated, and a metal / alloy and an oxide are further formed thereon. A method for producing a carbon material having a non-oxide ceramic sprayed film, comprising spray-coating and laminating at least one of a ceramic sprayed coating of an oxide and a non-oxide material.