JP3400435B2 - Drive device and machine tool in machine tool - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving device used in a driving portion such as a feed of a processing head in various machine tools including a laser processing machine,
In particular, the present invention relates to a drive device adopting a linear motor system and a machine tool equipped with the drive device.

[0002]

2. Description of the Related Art In various machine tools such as a laser beam machine, those adopting a linear motor system have been proposed and used as a driving device for feeding and driving a machining head to a work. Conventionally, the magnet on the stator side of such a drive device has been mounted so as to be directly arranged on a frame supporting the stator.

[0003]

However, in such a structure, the strong attractive force acting between the mover and the stator directly acts on the frame on which the stator is mounted via the magnetic pole alignment surface, and the frame is It deforms and adversely affects the machining accuracy of the machine tool. For this reason, the frame needs to have a large rigidity in order to counter such suction force, and it is necessary to design the frame to be stronger than usual when a drive device other than the linear motor system (for example, a ball screw) is adopted. was there. This causes inconveniences such as an increase in size and weight of the machine tool.

In view of the above circumstances, the present invention provides a linear motor type driving device, which is convenient and does not require an increase in the size and weight of the machine tool, and a machine tool equipped with the driving device. The purpose is to do.

[0005]

According to a first aspect of the present invention for solving the above-mentioned problems, a magnet array formed by alternately arranging two kinds of magnets (56) having different surface polarities in a linear movement direction. Stator (51) with (560)
And is movable in a linear movement direction with respect to the stator,
A mover (6) having a coil (63) capable of generating a driving force in a linear movement direction by receiving a magnetic force from the magnet.
0) and a drive device (5) in a machine tool (1) including
0), the stator is provided on a base portion (52) and a comb-teeth-shaped protrusion portion (53) protruding from the base portion.
Has eclipsed the magnet column supporting portion (55), the said
Of the comb-teeth-shaped protrusions, the comb-teeth-shaped protrusions on both sides are
The magnet column support is provided on only one of the protrusions.
To the comb tooth-shaped protrusions sandwiched between the comb tooth-shaped protrusions on both sides.
Is provided with the magnet row support portions on both sides thereof.
Ri, between the magnet rows supporting portion, wherein the coil forms a freely coil passage space passes (S), said magnet rows magnet holding groove in the support part (54), Shinnoshi the linear movement direction, the coil pass A magnet holding means (54) is provided in the magnet holding groove so as to open toward the space.
a) is provided, and the magnet is configured to be inserted into the magnet holding groove and held by the magnet holding means.

According to a second aspect of the present invention, the magnet holding means has projecting portions (54a) projecting from both sides of the opening of the magnet holding groove toward the center of the opening of the magnet holding groove. The magnet is held by being sandwiched between the inner part (54c) of the magnet holding groove and the protrusion.

According to a third aspect of the present invention, a width (W) between the protrusions on both sides of the opening of the magnet holding groove.
Is smaller in the opening direction of the magnet holding groove.

According to a fourth aspect of the present invention, the protruding end portion (59) of the magnet row support portion is detachable from the base portion side portion. .

According to a fifth aspect of the present invention, the base portion and the magnet row support portion are integrally formed.

According to a sixth aspect of the present invention, there are provided
It is characterized in that a reinforcing member (52a) for reinforcing between the base and the comb-shaped protrusion is provided.

According to a seventh aspect of the present invention, the magnet row support portion is provided with air blowing means (58) capable of blowing pressurized air to form an air curtain along the coil passage space. Is characterized by.

Further, according to claim 8 of the present invention, the protruding end portion (59) of the magnet row supporting portion is detachable from the portion on the base portion side, and the air blowing means is The front end portion is provided with an air transport pipe (59b) for transporting pressurized air, and a blowing portion (59a) for blowing the pressurized air transported by the air transport pipe to the outside. And

According to a ninth aspect of the present invention, the magnet has side portions (56b) facing each other in a linear movement direction,
The plurality of magnets forming the magnet row are arranged such that the side portions are inclined with respect to the linear movement direction.

According to a tenth aspect of the present invention, the magnet array has a spacer (57) between the magnets having different surface polarities.

The eleventh aspect of the present invention provides a machine tool (1) having a support member (47) and the supported member (49) supported by the support member so as to be relatively movable. Item 10. A machine tool having a drive device (50) according to Item 1 , wherein the stator is connected to the support member and the mover is connected to the supported member of the drive device. On the machine.

According to a twelfth aspect of the present invention, the stator and the support member are formed as separate members.

According to a thirteenth aspect of the present invention, the supported member has a processing head (10).

According to a fourteenth aspect of the present invention, the supported member has a work setting portion (3).

The numbers in parentheses are for convenience of showing the corresponding elements in the drawings, and the present description is not limited to the description in the drawings.

[0020]

As described above, according to claim 1 of the present invention, instead of directly attaching the magnets to the supporting member such as the frame by brazing or the like, the magnet row support formed to project from the base portion is provided. The part supports the magnet. With this configuration, the magnet row supporting portion can be reinforced by utilizing the width of the magnet row, or when the two magnet row supporting portions are formed by one member, attractive force / repulsive force acting on the magnets. Can be processed so that they disappear from each other. Therefore, it is not necessary to design the stator or a supporting member such as a frame that supports the stator more firmly than in the usual case where a driving device other than the linear motor system (for example, a ball screw) is adopted. As a result, it is unnecessary to increase the size and weight of the machine tool.

One member also serves as two magnet row support portions
This saves members and reduces the size and weight of the device.
To be realized. Furthermore, magnets are held on both sides of one member.
The magnet row support through these magnets.
The forces acting on are canceled in one member. This
The strength design of the magnet row support portion becomes easy. Also, this
Base associated with the attractive and repulsive forces acting on these magnets
Since the bending moment in the base part does not act, the base part
The shape is also prevented.

According to the second aspect of the present invention, the magnet is firmly held by being sandwiched between the magnet and the inner protruding portion of the magnet holding groove.

According to the third aspect of the present invention, the width between the projecting portions is reduced toward the opening direction of the magnet holding groove, so that the magnet holding force is generated by the attraction force between the magnet and the coil of the moving element. The magnets that receive a force in the opening direction of the groove are clamped between the protrusions. This ensures that the position of the magnet is fixed.

According to the fourth aspect of the present invention, since the tip end portion of the magnet row support portion is detachable, the magnets can be easily attached and detached with the tip end portion removed.

According to the fifth aspect of the present invention, since the base portion and the magnet row support portion are integrally formed, the force acting in the stator is the integral base portion and magnet row. The support is surely supported.

According to claim 6 of the present invention, since the comb tooth-shaped protrusions of the magnet row supporting portions other than those commonly used between the magnet row supporting portions are reinforced by the reinforcing member, a magnet having a strong magnetic force can be obtained. It is possible to adopt.

According to the seventh aspect of the present invention, since the compressed air is blown to form the air curtain, the foreign matter is prevented from entering the coil passage space.

According to the eighth aspect of the present invention, since the pressurized air is blown out from the blowout portion at the tip of the magnet row support portion, it is possible to effectively prevent foreign matter from entering the coil passage space. Further, since the detachable tip portion is provided with the air transport pipe and the blowing portion, replacement and maintenance of the air transport pipe and the blowing portion are easy.

According to the ninth aspect of the present invention, by tilting the side portion with respect to the linear movement direction, it becomes possible to control the forward / backward movement of the moving element with the structure on the stator side.

According to the tenth aspect of the present invention, by disposing the spacers between the magnets, the magnets arranged in the linear movement direction can be easily positioned when the magnets are installed.

According to the eleventh aspect of the present invention, by adopting the above driving device, the force acting on the stator due to the attraction force and the repulsive force between the moving element and the moving element is within the stator. Since they cancel each other out, it is not necessary to design the frame or the like more firmly than in the usual case where a drive device other than the linear motor system (for example, a ball screw or the like) is adopted. As a result, it is unnecessary to increase the size and weight of the machine tool.

According to the twelfth aspect of the present invention, since the stator and the support member are separate members, the manufacture of the stator is facilitated.

According to the thirteenth aspect of the present invention, it can be applied to a machine tool of a type in which the machining head side is driven by a linear motor system.

Further, the fourteenth aspect of the present invention can be applied to a machine tool of a type in which the work setting portion side is driven by a linear motor system.

[0035]

DESCRIPTION OF THE PREFERRED EMBODIMENTS <Overall Configuration of Laser Processing Machine> FIG. 1 is a perspective view showing an example of a laser processing machine. The laser processing machine 1 of the present embodiment has a frame 2 as shown in FIG.
The frame 2 is provided with a table 3 (indicated by a one-dot chain line) on the upper surface of which a work (not shown) to be machined can be installed. Further, the frame 2 is provided with an X-axis rail 5 located above the table 3 and extending in the horizontal X-axis direction. A movable body 6 is supported on the X-axis rail 5 by being engaged with the X-axis rail 5 and movably suspended along the X-axis rail 5 in the X-axis direction (linear movement direction). . Further, a linear motor type driving device 50A for moving and positioning the moving body 6 along the X-axis direction with respect to the X-axis rail 5 side is provided over both the frame 2 and the moving body 6. There is. Details of the driving device 50A will be described later.

A column 7 is fixed to the moving body 6,
The column 7 is provided with a Y-axis rail 9 extending above the table 3 and extending horizontally in the horizontal Y-axis direction orthogonal to the X-axis. The head unit 10 is engaged with the Y-axis rail 9 to engage with the Y-axis rail 9,
It is provided so as to be movable along the Y-axis rail 9 in the Y-axis direction (linear movement direction). Further, a linear motor type driving device 50B that is capable of moving and positioning the head unit 10 on the Y-axis rail 9 side along the Y-axis direction is provided over both the column 7 and the head unit 10. ing. Details of the driving device 50B will be described later.

The head unit 10 includes a torch 11 that emits a laser beam LZ downward, and a Z-axis movement driving means 12 such as a ball screw device that can move and position the torch 11 in the vertical Z-axis direction. Etc.
A laser path 20 for transmitting the laser light oscillated by the laser oscillator is provided from the laser oscillator (not shown) to the torch 11.

<Structure of Driving Device> FIG. 2 is a sectional view showing the details of the driving device, and FIG.
3 is a cross-sectional view taken along line X1-Y1 of FIG.
It is a Y2 sectional view. Drive device 50A, 50B described above
As shown in FIG. 2, both are the stator 51 and the mover 6.
It is a linear motor type driving device configured from 0.
Therefore, the driving devices 50A and 50B are different from each other only in size, installation place, and the like, and the two driving devices 50A and 50B are qualitatively the same. Therefore, these driving devices 50A and 50B are collectively referred to as the driving device 50 and will be collectively described. To do.

[Structure of Stator] As shown in FIGS. 2 and 3, the stator 51 of the drive unit 50 includes a support member 47 (frame 2) provided with rails (X-axis rail 5 or Y-axis rail 9). Alternatively, it has a base portion 52 that is fixed to the column 7) and extends in the directions of arrows C and D in FIG. 3 (the direction toward the back of the paper in FIG. 2) which is the direction of linear movement parallel to the rail. In the base portion 52,
Three comb-tooth-shaped protrusions 53 that protrude in a cross-section (see FIG. 2) are formed in a streak shape along the linear movement direction (directions of arrows C and D). Toothed protrusion 53
2 is an arrow A in FIG.
They are lined up at substantially equal intervals in the B direction. A coil passage space S through which a coil unit 63, which will be described later, can freely pass in a linear movement direction is formed between the comb-teeth-shaped protrusions 53, 53 adjacent to each other in the directions of arrows A and B. Since the stator 51 and the support member 47 are separate members, the stator 51 can be easily manufactured.

As shown in FIGS. 2 and 3, a magnet holding groove 54 extends in a linear movement direction at a portion of each comb tooth-shaped protrusion 53 facing the coil passage space S, and the coil passage space S is extended. The magnet holding groove 54 has a plurality of magnets 56 formed in a plate shape and a plurality of spacers 57 formed of a plate-shaped nonmagnetic material in the magnet holding groove 54. , And is inserted and held with the surface thereof facing the coil passing space S. The plurality of magnets 56 are all plate members having substantially parallelogrammic plate surfaces of the same size and shape, and the plurality of spacers 57 are also plate members having substantially parallelogrammic plate surfaces of the same size and shape.

Regarding the plurality of magnets 56 and the spacers 57 held in the magnet holding grooves 54, as shown in FIG. 3, two kinds of magnets 56 having different surface polarities (N / S) sandwich the spacer 57. These magnets 56 and the spacers 57, which are alternately arranged in the linear movement direction and are held in the respective magnet holding grooves 54, constitute a magnet row 560 extending in the linear movement direction. As shown in FIG. 2, the magnet rows 56 facing each other in the direction intersecting with the linear movement direction (arrow A, B direction).
Between 0 and 560, the magnets 56 and 56 are arranged to face each other in a one-to-one manner in the intersecting direction, and the surface polarities (N / S) of the magnets 56 and 56 facing each other are different from each other. It is arranged to face each other.

The magnet 56 and the spacer 57 have a substantially parallelogrammatic plate surface as described above. That is, the magnet 56 has side portions 56b, 56b facing each other in the linear movement direction.
The spacer 57 is a side part 57 facing the linear movement direction.
b and 57b respectively, and the magnet row 560
The plurality of magnets 56 and the spacers 57 forming the
The side portions 56b and 57b are arranged so as to be inclined with respect to the linear movement direction. By arranging in a tilted manner in this way, forward / backward drive control of the mover 60, which will be described later, is possible with the configuration on the stator side.

On both sides (upper and lower sides in FIGS. 2 and 3) of the opening 54b of the magnet support groove 54, projecting portions 54 are formed so as to project toward the center of the opening of the opening 54b.
a and 54a are provided, and the magnet 56 described above is provided.
The spacer 57 is sandwiched and held between the protrusions 54a, 54a and the inner portion 54c of the magnet support groove 54. Further, the back surface of the magnet 56 and the spacer 57 and the flat inner portion 54c of the magnet support groove 54 are bonded by an adhesive.

The protrusion 54 of the magnet holding groove 54
The width W between a and 54a decreases in the opening direction of the magnet holding groove 54 (direction toward the coil passage space S). That is, as shown in FIG. 2, the cross section of the protrusion 54a is inclined. As a result, even if the magnet 56 receives a force toward the opening direction of the magnet holding groove 54 due to the attraction force (described later), the magnet 56 is prevented from moving in the form of being clamped between the protrusions 54a, 54a. The magnet 56 is securely fixed and held. In addition, as shown in FIG. 2, according to the cross-sectional shape of the protrusion 54a,
Portion 56 of magnet 56 that abuts protrusion 54a
a is also processed into an inclined sectional shape.

In this embodiment, the protrusion 5 serves as a magnet holding means for holding the magnet 56 securely.
4a is shown as an example, the magnet holding means is not limited to the protrusion 5
It is not limited to the one like 4a. For example, a fastening member such as a bolt may be used as the magnet holding means, and the fastening member may penetrate the front and back of the magnet 56 to fix the magnet 56 to the inner portion 54c of the magnet holding groove 54. Further, the protrusion 54a may be formed so that the cross section is not inclined. Adhesion between the magnet 56 and the inner portion 54c of the magnet holding groove 54 is also arbitrary.

The protruding end side of the comb-tooth-shaped protruding portion 53 is a clamp 59 which is detachable from the base portion 52 side.
The clamp 59 includes one of the protrusions 54a (the lower protrusion 54a shown in FIGS. 2 and 3). By removing the clamp 59, the magnet holding groove 54 of the comb-tooth-shaped protruding portion 53 is opened laterally (downward in FIGS. 2 and 3). Therefore, the magnet 56 and the spacer 57 can be easily attached and detached with the clamp 59 removed. The configuration in which the clamp 59 can be attached to and detached from the comb tooth-shaped protruding portion 53 is an example, and the comb tooth-shaped protruding portion 53 can be formed of an integral member that is not partially attached and removed.

It should be noted that the comb-tooth-shaped protruding portion 53 and the base portion 52.
And are integrally formed. For example, in this embodiment,
The portion other than the clamp 59 of the comb tooth-shaped protruding portion 53 and the base portion 52 are made of the same member. As a result, the attraction force due to the magnetic force between the magnets 56 is reliably supported by the comb-shaped protrusion 53 and the base 52 that are integrated. Further, the comb tooth-shaped protruding portion 53 is expressed from the viewpoint of the shape of the member, but the magnet row 56 is used.
When expressed from the viewpoint of the function of supporting 0, it can be rephrased as the magnet row supporting portion 55.

In this embodiment, there are three comb tooth-shaped protrusions 53 as shown in FIG. 2, and the comb tooth-shaped protrusions 53 on both the left and right sides in FIG. 2 support the magnet row 560 only on one side. One magnet row support portion 55 is formed. The comb tooth-shaped protruding portion 53 at the center in FIG. 2 supports the magnet rows 560 and 560 on both left and right sides, and the two magnet row supporting portions 55 are also used as one member. That is, in the example of FIG. 2, two pairs of magnet row support portions 55 are provided.

By using the two magnet row support portions 55 as one member, the saving of members and the reduction in size and weight of the device can be realized, and the magnets 56 are held on both sides of one member. At the time of driving, the magnet row support portions 55, 55 are inserted through the magnets 56.
The forces that act symmetrically on each other are canceled out in one member, and
Deformation of the central comb tooth-shaped protruding portion 53 is prevented, and attraction force / repulsive force (usually
Since the bending moment in the base portion 52 due to the suction force is significantly larger than the repulsive force), the base portion 5
The deformation of 2 is also prevented. As a result, the comb tooth-shaped protrusion 5
The strength design of No. 3 becomes easier than the case of no combined use. In addition, as shown in FIG. 2, between the comb tooth-shaped protrusions 53, 53 on both the left and right sides in FIG. The ribs 52a are provided and reinforced in such a manner that the width W of the middle and upper and lower sides, that is, the width of the magnet row 560 is utilized.

Thus, the magnet 56 of the stator 51 is
The comb-tooth-shaped protrusion 53 to which is attached is not directly attached to the support member 47 as a frame, but is formed on the base portion 52 separated from the support member 47. Of the protrusions 53, one or more comb-tooth-shaped protrusions 53 arranged in the central portion excluding the comb-tooth-shaped protrusions 53, 53 at both ends in the cross section of FIG. -Since the repulsive force is processed so that all of the repulsive force is eliminated, and the ribs 52a reinforce only the comb tooth-shaped protrusions 53, 53 on both ends thereof, the stator 51 should be reinforced with a simple structure. Therefore, it is not necessary to further improve the rigidity of the supporting member 47.

Moreover, since the comb tooth-shaped protruding portions 53 on both sides in FIG. 2 can be reinforced by utilizing the width of the magnet row 560, an efficient reinforcing structure can be adopted and the base portion can be used. It is possible to reduce the weight and size of the stator 51 including the stator 52. Incidentally, in the past, since the magnet 56 was directly attached to the support member 47 by brazing or the like,
The attraction force / repulsion force acting on the magnet 56 is entirely exerted on the support member 47 without being canceled, and in order to counteract the attraction force / repulsion force, the support member 47 itself must be reinforced, and inevitably The reinforcement was a big one. Although not shown, three pairs of magnet row support parts 55,
It is also possible to provide many pairs such as 4 pairs.

As shown in FIG. 2 and FIG.
The lamp 59 is provided with air blowing means 58.
That is, the air blowing means 58 directs a plurality of air outlets 59a to the coil passing space S in the vicinity of the protrusion 54a,
An air transport pipe 59 that is provided along the coil passage space S and supplies pressurized air to these air outlets 59a.
It has b in the clamp 59. This air transport tube 59
Air pressurized by an air pump or the like (not shown) can be supplied to b. That is, the pressurized air supplied through the air transport pipe 59b is blown into the coil passing space S from the air outlet 59a to form an air curtain, thereby preventing foreign matter from entering the coil passing space S. .

In the example of FIGS. 2 and 3, the air outlet 59a.
The air blowing means 58 including the air transport pipe 59b and the like is provided in the clamp 59, and the magnet row support portion 5 is provided.
Since the pressurized air is blown out from the tip portion of 5, the foreign matter can be effectively prevented from entering the coil passage space S. Further, since the clamp 59 is detachable, it is easy to replace or maintain only the air outlet 59a and the air transport pipe 59b. However, the air blowing means is not limited to the examples of FIGS. 2 and 3, and for example, the air outlet 59a and the air transport pipe 59b are provided in the portion 52b of the base portion 52 adjacent to the coil passage space S. It is also possible.

[Structure of Moving Element] In FIG. 2, the side (the moving body 6 or the head unit 10 shown in FIG. 1) that moves by engaging with the rail (X-axis rail 5 or Y-axis rail 9 shown in FIG. 1). ) Is shown as a supported member 49. As shown in FIG. 2, the moving element 60 of the driving device 50 includes a moving element body 61 fixed to the supported member 49.
The mover body 61 has two coil units 63 formed so as to be inserted into the coil passage space S between the comb-like protrusions 53 of the stator 51, respectively. Each coil unit 63 includes a plurality of coils 6 that are opposed to the magnet rows 560 and 560 on both sides.
2 (individual coil 62 is omitted in FIG. 2).
A predetermined clearance is formed between each coil unit 63 and the stator 51 side.

FIG. 4 is a diagram schematically showing the positional relationship between the magnet and the coil. The coil units 63 are
As shown in FIG. 2, the magnet rows 560 and 560 are opposed to each other on both sides. And each coil unit 63
Has eight coils 62 for each magnet row 560 facing each other, and these eight coils 62 are linear movement directions (arrow C and D directions) as schematically shown in FIG.
A coil row 64 composed of four coils 62 arranged at a constant interval L / 2 is arranged in two upper and lower stages as shown by the chain double-dashed line in FIG. Distance L between the coils 62, 62
/ 2 is the spacer 5 in the linear movement direction as shown in FIG.
The distance between the magnets 56, 56 aligned with each other through 7. Therefore, the spacing between magnets 56 of the same polarity
Is an interval L which is twice the interval L / 2.

In addition, the number of pairs of the magnet row supporting portions is 2,
The number of coil units can be changed according to the change to 3, 4, ...
It is changed to 2, 3, 4, ... The coil unit 6
The number of stages of the three coil rows 64 may be 1, 2, 3, ..., and the number of the coils 62 in one coil row 64 is not limited to 4, 1, 2, 3 ,. , 6 ... and so on. Further, although the arrangement interval of the coils 62 in the coil array 64 corresponds to the arrangement interval of the magnets 56, it does not necessarily have to be the corresponding arrangement interval. Further, in the present embodiment, the upper and lower coil rows 64 are aligned in the linear movement direction, but the upper and lower coil rows 64 may be arranged in the linear movement direction. In this case, it is not necessary to incline the side edge 56b of the magnet 56 with respect to the linear movement direction, and it is possible to employ, for example, a rectangular plate-shaped magnet.

[Structure of Position Detection Device] FIG. 5 is a block diagram showing the position detection device. The drive device 50 is provided with a position detection device 30. The position detection device 30 has the stator 51 and the mover 60 described above as its constituent elements, and as shown in FIG.
1, the main controller 31 includes a voltage supply controller 32,
Supply voltage detector 33, first signal detector 35, second signal detector 36, third signal calculator 37, position detection controller 39,
The on-axis position setting unit 40, the on-axis position detection unit 41, etc. are connected. The voltage Q (Asinωt) is supplied to each coil 62 by the voltage supply means 65 as shown in FIG.

<Manufacture of Magnet and Spacer> FIG. 6 is a diagram for explaining a magnet polishing method, and FIG. 7 is a diagram for explaining a spacer polishing method. The magnet 56 and the spacer 57 described above are formed with highly accurate dimensions, and are manufactured so that there are almost no individual differences in dimensions.
The reason why such high precision is required is to perform the position detection described later with high precision.

A method of manufacturing the magnet 56 and the spacer 57 will be described. First, when the magnet 56 is manufactured, a single plate material made of a magnetic material is prepared, and the single plate material
Both front and back surfaces, which are shaped to face (backward) the coil passing space S side, are polished by an appropriate polishing machine or the like. Next, a plurality of magnets 56 are cut out from the single plate material. Since the plurality of cut out magnets 56 are collectively polished in the state of one plate material, they are members having the same plate thickness.
Next, the plurality of magnets 56 cut out are
As shown in FIG. 6, when magnet rows 560 are formed, the front and back surfaces of the magnets 56 (which have already been polished by the above-described polishing operation) are overlapped with each other so that their shapes are matched with each other. Clamp with a clamp device. After that, in the clamped magnet mass 56A, 4 shown by symbols P1 to P4 in FIG.
The surfaces are sequentially polished, and after the polishing is completed, the clamp is released to complete the plurality of magnets 56.

The plurality of completed magnets 56 has a side 5
Since 6b, 56b and the other sides are collectively polished in the state of the magnet mass 56, the members have the same shape and size. Even if there is an error during polishing, this error is evenly generated in the plurality of magnets 56, so that there is almost no individual difference in size and shape among the plurality of magnets 56.

The spacer 57 is similarly manufactured.
That is, the coil passage space S of a single plate material made of a non-magnetic material
Both the front and back surfaces that face each other (backward) are polished by an appropriate polishing machine or the like, and a plurality of spacers 57 are cut out from the single plate material. As shown in FIG. 7, the plurality of spacers 57 that have been cut out are matched with each other in shape and overlapped to be clamped as a spacer mass 57A by a clamp device or the like (not shown). After that, of the clamped spacer mass 57A, four surfaces shown by reference numerals Q1 to Q4 in FIG. 7 are sequentially polished, and after the polishing is completed, the clamp is released to complete the plurality of spacers 57. Similar to the spacer 57, the completed plurality of spacers 57 hardly cause individual difference in size and shape. Therefore, the magnet array 560 formed by arranging the magnets 56 and the spacers 57 mutually as shown in FIG. 3 is divided by the magnets 56 and the spacers 57 with the dimensions in the directions of arrows C and D being extremely accurate. Formed in shape.

<Operation of the entire laser processing machine> As described above, in the laser processing machine 1, the drive unit 50A moves and positions the moving body 6 along the X-axis rail 5 in the X-axis direction, and the drive unit 50B drives the head. The unit 10 is moved and positioned along the Y-axis rail 9 in the Y-axis direction,
By moving and positioning the torch 11 in the Z-axis direction via the Z-axis movement driving means 12, the relative position of the torch 11 with respect to a work (not shown) placed on the table 3 is changed. Along with this, laser light oscillated by a laser oscillator (not shown) passes through the laser path 20 and the torch 1
1 is transmitted. Therefore, the work is processed by cutting with the laser beam LZ emitted from the torch 11 while changing the relative position of the torch 11 with respect to the work (not shown).

<Operation of Driving Device and Position Detecting Device> Driving device 50A for moving body 6 with respect to frame 2 and driving device 5 for head unit 10 with respect to column 7
Driving by 0B is performed by a driving device 50A for a supported member 49 that generically indicates the moving body 6, the head unit 10, and the like with respect to a supporting member 47 that generically describes the frame 2, the column 7, and the like.
The driving by the driving device 50 that generically refers to 50B and the like will be described below. The control axis in the linear movement direction of the drive device 50 (X axis in the drive device 50A, Y axis in the drive device 50B) will be referred to as the T axis as shown in FIG.

[Outline of Driving] When the feeding of the T-axis component is instructed by executing the machining program, the voltage supply unit 65 starts the voltage supply to each coil 62. Each coil 6 by the voltage supply
2 is excited while sequentially changing the N pole and the S pole, so that the interaction with the magnetic force of each magnet 56 of the magnet array 560 arranged to face each other makes it possible to move in the T axis direction based on the known operation principle of the linear motor. A driving force is generated, and the mover 60
The side is driven in the T-axis direction. In addition, when the voltage supply from the voltage supply unit 65 is stopped, each coil 62 is connected to each magnet 5
Electric power is generated and excited by the magnetic force of 6, and a braking force is generated by the interaction with the magnet 56 to stop the moving element 60.

As described above, the magnet array 560 is used.
Since the plurality of magnets 56 are arranged such that their side edges 56b are inclined with respect to the T-axis (the direction of linear movement), the two-stage coil array 64 in the coil unit 63 (see FIGS. 2 and 3A). In the reference), the position of the magnet 56 facing the coil 62 is displaced in the T-axis direction. Therefore,
When a voltage is supplied to the coils 62 by the voltage supply unit 65 to excite each coil 62, the driving force in the T-axis direction received by the coil unit 63 as a whole always occurs in a desired one direction.

[Voltage Supply Control in Driving Device] FIG. 8 is a graph showing the relationship between the P ′ signal and the Q signal. The horizontal axis of FIG. 8 represents the displacement amount of the moving element 60 in the T-axis direction as an angle and is expressed as a displacement angle θ, and the vertical axis represents the signal magnitude. In the plurality of magnets 56 arranged in the T-axis direction (see FIG. 4), the spacing L between the two spacers 57 and the magnets 56 having the same surface polarity and sandwiching one magnet 56 is one phase (angle 2π). ) Minutes, for example, the displacement amount of the distance q in the T-axis direction is θ = 2πq / L.

First, mover 60 is moved in the direction of arrow C (T
A state in which movement is driven in the positive direction on the axis) will be described. The main controller 31 shown in FIG. 5 controls the voltage supply by the voltage supply means 65 via the voltage supply controller 32. That is, the voltage supply control unit 32 controls the voltage Q (A
sin ωt) is detected by the supply voltage detection unit 33.
On the other hand, the voltage supply control unit 32 causes the first signal detection unit 35 and the second signal detection unit 36 to detect the predetermined X signal and Y signal related to the voltage in each coil 62, respectively, as shown in FIG. There is. The X signal and the Y signal are known based on the voltage supplied to each coil 62 by the voltage supply means 65 and the induced voltage generated by the change of the magnetic flux density when the coil 62 moves with respect to the magnet 56. This is the value obtained by the method. For example, as shown in FIG. 4, when the displacement amount q of the coil 62 on the T axis with respect to the magnet 56 is X, the X signal is X = Acos (2
πq / L) · sin ωt, the Y signal is Y = Asin (2
πq / L) · sin ωt.

The X signal detected by the first signal detecting section 35 and the Y signal detected by the second signal detecting section 36 are transmitted to the third signal calculating section 37, and in the third signal calculating section 37, these X signals are transmitted. And the P signal is calculated based on the Y signal. In this embodiment, first, an X ′ signal is calculated from the X signal. That is, X ′ = Acos (2πq / L) · sin (ωt−π
/ 2), and further transforming the right side, X '= Acos (2
πq / L) · cosωt. A P signal is calculated from the X ′ signal and the Y signal. That is, P = X '+ Y
Then, Y = Asin (2πq / L) · sinωt
Since X ′ = Acos (2πq / L) · cosωt, P = Asin (ωt + 2πq / L).

The voltage supply controller 32 includes a third signal calculator 3
Based on the P signal calculated in 7, the additional voltage by the voltage supply means 65 is controlled so that the value of the P signal becomes zero. P
By setting = 0, ωt + 2πq / L = 0, and ω
The magnitude of t becomes equal to the magnitude of the displacement angle θ. That is,
Control is performed in which the voltage of each coil 62 is changed in synchronization with the magnets 56 arranged at intervals L of one phase to effectively generate a driving force for the mover 60.
In addition, such voltage supply control is basically performed by each coil 62.
However, as shown in FIG. 4, the two coils 62, 62 arranged at every other one of the four coils 62 of the same coil row 64 have an interval L of one phase. Since they are arranged and have the same positional relationship with respect to the magnet 56, they are collectively controlled by a parallel circuit as shown in FIG.

[Position Detection] Here, the case where the moving element 60 is stopped at a predetermined position on the T axis will be described. First, the position detection control unit 39 sends a displacement amount (denoted as q ′) obtained as a position control amount in the T-axis direction based on a machining program or the like to the axial position setting unit 40. The on-axis position setting unit 40 uses the above-described P signal equation and substitutes q ′ for the displacement q, P ′ = Asi.
n (ωt + 2πq ′ / L) is set. Since the displacement amount q ′ is a constant, 2πq ′ / L is a constant. The on-axis position setting unit 40 also stores a value obtained by dividing 2πq ′ / L by π (rounding down after the decimal point) as the reset count RM. The relationship between the voltage Q from the voltage supply means 65 and the set equation P ′ when changing ωt in synchronization with the magnets 56 arranged in the T-axis direction is as shown in FIG.

After the setting by the on-axis position setting section 40 is completed, the voltage supply by the voltage supply means 65 is started and the driving of the mover 60 is started. During this time, as described above, the voltage Q supplied to each coil 62 by the voltage supply means 65 is sequentially detected by the supply voltage detection unit 33,
The detected voltage Q is sequentially transmitted to the position detection controller 39. The position detection control unit 39 causes the on-axis position detection unit 41 to perform position detection based on the transmitted voltage Q. First, the axial position detection unit 41 counts the number of times that the value of the voltage Q that has been sent becomes Q = 0.

Next, the on-axis position detector 41 starts the calculation of the value of the above equation P'when the number of times Q = 0 becomes equal to the stored number of resets RM. That is, based on the voltage Q (Asin ωt) transmitted sequentially,
The value of P ′ = Asin (ωt + 2πq ′ / L) is calculated.
When the current displacement amount matches the displacement amount q'set above, P '= P = 0 should be satisfied, so the on-axis position detection unit 41 calculates the value of the above formula P', When the calculation result becomes 0, that is, when the current displacement amount matches the displacement amount q'set above, a predetermined detection signal DS is output.

Based on the detection signal DS from the on-axis position detector 41, the voltage supply controller 32 stops the voltage supply by the voltage supply means 65. The above-described braking force is generated by stopping the voltage supply, and the mover 60 immediately stops. As a result, the mover 60 is positioned at the position on the T-axis that provides the desired displacement amount q '.

By using the position detecting device 30 as described above, it is possible to detect the position by detecting that the moving element 60 is displaced by a desired displacement amount. The position detection by the position detection device 30 is highly accurate by using the magnet 56 and the spacer 57 that have almost no individual difference in size and shape. Therefore, the position can be detected without providing a means for position detection such as an encoder separately from the magnet array 560, which is convenient because the entire apparatus can be simplified and downsized.

In the above-described embodiment, the table 3 as the work setting portion is fixed to the frame 2, but it is also possible to adopt a structure in which the table 3 is moved and driven with respect to the frame 2. In this case, the drive unit 50 can be installed by connecting the stator 51 to the frame 2 and the mover 60 to the table 3, and the drive unit 50 can drive the table 3 relative to the frame 2.

Further, in the above-described embodiment, the laser processing machine 1 is shown as an example of the machine tool, but the drive device 50 is not limited to the laser processing machine. In addition, in the case of a machine tool having a support member and a supported member that is supported by the support member so as to be linearly movable relative to each other, the drive device 50 may be provided in various machine tools such as a machining center and a lathe. It is possible to adopt.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a laser processing machine.

FIG. 2 is a cross-sectional view showing details of a driving device.

FIG. 3 is a sectional view of a stator side.

FIG. 4 is a diagram schematically showing a positional relationship between a magnet and a coil.

FIG. 5 is a block diagram showing a position detection device.

FIG. 6 is a diagram illustrating a method of polishing a magnet.

FIG. 7 is a diagram illustrating a spacer polishing method.

FIG. 8 is a graph showing a relationship between a Q signal and a P signal.

[Explanation of symbols] 1 Machine tool (laser processing machine) 3 Work setting section (table) 10 Processing head (head unit) 47 Support member 49 Supported member 50 drive 51 Stator 52 Base 52a Reinforcing member (rib) 54 Magnet holding groove 54a Magnet holding means, projection (projection) 54c depth 55 Magnet row support 56 magnet 56b Side (side) 57 Spacer 58 Air blowing means 59 Tip (Clamp) 59a Air outlet (air outlet) 59b Air transport pipe 60 movers 63 coils (coil unit) 560 magnet row S coil passage space W width

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References Japanese Patent Publication No. 10-512438 (JP, A) JP 2000-14119 (JP, A) JP 2001-69745 (JP, A) International Publication 97/2647 (WO , A1) (58) Fields surveyed (Int.Cl. ⁷ , DB name) H02K 41/03 B23Q 5/28 B23Q 11/00 H02K 5/10

Claims (14)

(57) [Claims] 1. Directly connecting two types of magnets having different surface polarities.
With magnet rows formed by alternately arranging in the line movement direction
And the stator that moves in a linear movement direction relative to the stator.
A straight line under the magnetic force of the magnet
A mover having a coil that can generate a driving force in the moving direction
In a drive device in a machine tool including The stator is formed with a base and a protrusion from the base.
WasProvided on the comb-shaped protrusionA magnet row support,
HaveOf the comb tooth-shaped protrusions, the comb tooth-shaped protrusions on both sides are
The magnet row support is provided on only one of the comb-teeth-shaped protrusions.
And the comb-tooth-like protrusions sandwiched between the comb-tooth-like protrusions on both sides.
The magnet row support portion is provided on both sides of the portion.
Cage, The coil can pass freely between the magnet row support parts.
Forming a coil passage space, Straightly move the magnet holding groove to the magnet row support.
Extends in the moving direction and opens toward the coil passage space
Provided in the form of A magnet holding means is provided in the magnet holding groove, Insert the magnet into the magnet holding groove,
This magnet is configured to be held by the magnet holding means.
And a drive device in a machine tool. 2. The magnet holding means has protrusions formed so as to protrude from both sides of the opening of the magnet holding groove toward the center of the opening of the magnet holding groove, and the magnet has a back portion of the magnet holding groove. The drive device for a machine tool according to claim 1, wherein the drive device is held by being sandwiched between the protrusion and the protrusion. 3. The machine tool according to claim 2, wherein a width between the protrusions on both sides of the opening of the magnet holding groove is reduced toward an opening direction of the magnet holding groove. Drive. 4. The drive device for a machine tool according to claim 1, wherein the protruding end portion of the magnet row support portion is detachable from the base portion side portion. 5. The base section and the magnet row support section are integrally formed.
A drive device in the machine tool described. The comb-like projections of wherein said sides, was placed a reinforcing member for reinforcing between the base portion, the driving device in the machine tool according to claim 1, wherein a. 7. The machine tool according to claim 1, wherein the magnet row support portion is provided with air blowing means capable of blowing pressurized air to form an air curtain along the coil passage space. Drive in. 8. A protruding end portion of the magnet array support portion is attachable to and detachable from a portion on the base portion side, and the air blowing means conveys pressurized air to the distal end portion. 8. The drive device for a machine tool according to claim 7 , further comprising: an air transport pipe for controlling the air transport pipe, and a blowout unit that blows out the pressurized air transported by the air transport pipe to the outside. 9. The magnet has side portions facing each other in a linear movement direction, and a plurality of magnets forming the magnet row are arranged such that the side portions are inclined with respect to the linear movement direction. The drive device in the machine tool according to claim 1. 10. The drive device in a machine tool according to claim 1, wherein the magnet array has a spacer between the magnets having different surface polarities. 11. A machine tool comprising a support member and a supported member supported by the support member so as to be relatively movable, the drive device according to claim 1 , wherein the drive device includes: A machine tool characterized in that a stator is connected to the support member and the mover is connected to the supported member. 12. The machine tool according to claim 11, wherein the stator and the support member are formed as separate members. 13. The machine tool according to claim 11, wherein the supported member has a processing head. 14. The machine tool according to claim 11, wherein the supported member has a work setting portion.