JP3393945B2 - Vertically coupled dual mode SAW filter - Google Patents
Vertically coupled dual mode SAW filterInfo
- Publication number
- JP3393945B2 JP3393945B2 JP01870595A JP1870595A JP3393945B2 JP 3393945 B2 JP3393945 B2 JP 3393945B2 JP 01870595 A JP01870595 A JP 01870595A JP 1870595 A JP1870595 A JP 1870595A JP 3393945 B2 JP3393945 B2 JP 3393945B2
- Authority
- JP
- Japan
- Prior art keywords
- idt
- saw filter
- saw
- idts
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
【0001】[0001]
【産業上利用分野】本発明はSAWフィルタ,殊に移動
体通信等で必要な広帯域低損失で且つ阻止域減衰量の大
きな縦結合2重モードSAWフィルタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a SAW filter, and more particularly to a longitudinally coupled double mode SAW filter which has a wide band low loss and a large stop band attenuation required for mobile communication and the like.
【0002】[0002]
【従来の技術】従来,VHF〜UHF帯の高周波領域に
於ける広帯域低損失SAWフィルタには,一方向性ID
Tを用いたトランスバーサル型SAWフィルタや多電極
型SAWフィルタ,及び共振子型SAWフィルタが用い
られていた。2. Description of the Related Art Conventionally, a unidirectional ID has been used for a wide band low loss SAW filter in a high frequency region of VHF to UHF band.
A transversal SAW filter using T, a multi-electrode SAW filter, and a resonator SAW filter have been used.
【0003】一方向性IDTを用いたトランスバーサル
型SAWフィルタは移相器を必要としたり製造が難しい
という欠点をもつ上に,方向性損失を完全になくするこ
とが難しく低損失化が未だ不十分であった。また,多電
極型SAWフィルタは方向性損失が減少するがチップサ
イズが大きくなる上にIDTの内部反射によるスプリア
スが多く現れ,阻止域の減衰量が不十分であるという欠
点がある。The transversal type SAW filter using the unidirectional IDT has the drawbacks that it requires a phase shifter and is difficult to manufacture, and it is difficult to completely eliminate the directional loss and it is still difficult to reduce the loss. Was enough. Further, the multi-electrode SAW filter has a drawback that the directional loss is reduced but the chip size is increased, and more spurious due to internal reflection of the IDT appears, resulting in insufficient attenuation in the stop band.
【0004】次に共振子型SAWフィルタはSAWの振
動エネルギーをIDT内に閉じ込めるため方向性損失は
なく本質的に低損失化が図れる点で前記2つの方法より
優れている。共振子型SAWフィルタにはラダー型SA
Wフィルタや2重モードSAWフィルタなどがあるが,
ラダー型SAWフィルタは高い減衰傾度を得るために多
くの共振子を用いて構成する必要があり,設計が複雑な
上SAW共振子のスプリアスの影響を除くため電極膜厚
を極端に厚くしなければならないという欠点がある。Next, the resonator type SAW filter is superior to the above two methods in that the vibration energy of the SAW is confined in the IDT so that there is no directional loss and the loss can be essentially reduced. Ladder type SA for resonator type SAW filter
There are W filters and dual mode SAW filters,
The ladder-type SAW filter needs to be constructed with many resonators in order to obtain a high attenuation gradient, and the design is complicated, and the electrode film thickness must be extremely thick in order to eliminate the influence of the SAW resonator spurious. It has the drawback of not becoming.
【0005】これに対して2個のIDTをSAWの伝搬
方向に沿って近接配置し,これらの励起するSAWがI
DT間で互いに音響結合した際に生ずる1次モードと2
次モードの2つの振動モードを利用した縦結合2重モー
ドSAWフィルタは構造が簡単で且つ低損失化に優れて
いる。On the other hand, two IDTs are arranged close to each other along the propagation direction of the SAW, and the SAW that excites them is I.
The first-order mode and 2 that occur when acoustic coupling is performed between DTs
A longitudinally coupled double mode SAW filter utilizing two vibration modes of the next mode has a simple structure and is excellent in low loss.
【0006】更に,3個のIDTをSAWの伝搬方向に
沿って近接配置し,これらが励起するSAWがIDT間
で互いに音響結合した際に生ずる1次モードと3次モー
ドの2つの振動モードを利用した縦結合2重モードSA
Wフィルタは,前記1次モードと2次モードを利用した
フィルタに比べて広帯域化が可能である。Further, three IDTs are arranged close to each other along the propagation direction of the SAW, and two vibration modes, a first-order mode and a third-order mode, generated when the SAWs excited by these acoustically couple with each other, are generated. Vertically coupled dual mode SA used
The W filter has a wider band than the filter using the first-order mode and the second-order mode.
【0007】しかも該フィルタにおいて本願発明者らは
特開平5ー267990により,中央IDTと両側ID
Tとの対面する最内側電極指の中心間々隔を概ねλ/4
とすることにより更に広帯域で低損失の縦結合2重モー
ドSAWフィルタが得られることを開示した。Moreover, in the filter, the inventors of the present invention have disclosed the central IDT and the IDs on both sides according to Japanese Patent Laid-Open No. 5-267990.
The distance between the centers of the innermost electrode fingers facing T is approximately λ / 4.
It has been disclosed that a wider band and lower loss longitudinally coupled double mode SAW filter can be obtained.
【0008】しかし,この縦結合2重モードSAWフィ
ルタの周波数減衰特性は図4に示すように通過域近傍の
低域側では十分な減衰量が得られるのに対し高域側に於
いては比較的大きなスプリアスが発生する。これは入出
力IDTの対数で決まるトランスバーサル型SAWフィ
ルタの周波数特性に起因するスプリアスで,従来から抑
圧が困難であった。このスプリアスにより例えば米国ペ
ージャ用930MHz帯SAWフィルタのような高域側
近傍で高い減衰量を必要とするフィルタでは所望の減衰
特性が得られず実用に供しないという欠点があった。However, as shown in FIG. 4, the frequency attenuation characteristics of this longitudinally coupled double-mode SAW filter are such that sufficient attenuation can be obtained at the low frequency side near the pass band, while comparison is made at the high frequency side. Large spurious is generated. This is spurious due to the frequency characteristics of the transversal SAW filter determined by the logarithm of the input / output IDT, and it has been difficult to suppress it in the past. Due to this spurious, for example, a filter that requires a high amount of attenuation in the vicinity of the high frequency band, such as a 930 MHz band SAW filter for an American pager, has a drawback that desired attenuation characteristics cannot be obtained and cannot be put to practical use.
【0009】[0009]
【発明の目的】本発明は上述の如き従来の1次モードと
3次モードを用いた縦結合2重モードSAWフィルタの
高域側減衰帯域に現れるスプリアスを抑圧し,高域側近
傍の減衰量の十分大きなフィルタ特性を有する広帯域低
損失縦結合2重モードSAWフィルタを提供することを
目的とする。An object of the present invention is to suppress spurious appearing in the high-side attenuation band of the conventional longitudinally coupled double-mode SAW filter using the first-order mode and the third-order mode as described above, and to reduce the amount of attenuation near the high-frequency side. It is an object of the present invention to provide a wide band low loss longitudinally coupled double mode SAW filter having a sufficiently large filter characteristic.
【0010】[0010]
【発明の概要】上述の目的を達成する為本発明に係る1
次モードと3次モードを用いた縦結合2重モードSAW
フィルタは,中央IDTと両側IDTとの対面する最内
側電極指の中心間々隔が左右で異なるものであり,殊に
概ね一方はnλ/2で他方は(2n−1)λ/4(λは
励起したSAWの波長,n=1,2,・・・)とした構成
をとる。SUMMARY OF THE INVENTION In order to achieve the above-mentioned object
Vertically coupled dual-mode SAW using second- and third-order modes
In the filter, the centers of the innermost electrode fingers of the central IDT and the IDTs on both sides facing each other differ from each other on the left and right sides, and in particular, one is nλ / 2 and the other is (2n-1) λ / 4 (λ is The wavelength of the excited SAW, n = 1, 2, ...) is adopted.
【0011】[0011]
【発明の実施例】以下,本発明を図面に示した実施例に
基づいて詳細に説明する。図1は本発明に係る1次モー
ドと3次モードを用いた縦結合2重モードSAWフィル
タの電極パターンの構成図であって,36゜YカットL
iTaO3基板1の表面にSAWを励振するための入力
IDT2とこれを受信するための出力IDT3,3およ
びその両側に反射器4,4を伝搬方向がX軸方向になる
ように配置する。図1において中央の入力IDT2と両
側の出力IDT3との対面する最内側電極指の中心間々
隔をL1,L2とすると,一方はL1=λ/2として周期
的配置のままとし,他方はL2=λ/4として周期的配
置からλ/4シフトした構成とする。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will now be described in detail with reference to the embodiments shown in the drawings. FIG. 1 is a configuration diagram of an electrode pattern of a longitudinally coupled dual mode SAW filter using a first-order mode and a third-order mode according to the present invention.
An input IDT 2 for exciting the SAW, output IDTs 3 and 3 for receiving the SAW, and reflectors 4 and 4 on both sides thereof are arranged on the surface of the iTaO 3 substrate 1 so that the propagation direction is the X-axis direction. In FIG. 1, when the center-to-center spacings of the innermost electrode fingers facing the input IDT2 at the center and the output IDT3 at both sides are L 1 and L 2 , one is left in a periodic arrangement with L 1 = λ / 2, and the other is Is set to L 2 = λ / 4 and is shifted from the periodic arrangement by λ / 4.
【0012】図3は前述の特開平5ー267990によ
る従来方法の電極パターンの構成図を示したものであ
り,L1=L2=λ/4である。図1および図3において
共にIDT周期は4.38μm,中央IDTは31.5
対,両側IDTは各々21.5対,交差長は32λ,反
射器本数は左右各々180本,IDTの周期(LT)と
反射器の周期(LR)との比はLT/LR=0.992,電
極はアルミニウムで膜厚は0.175μm(4%λ)で
ある。FIG. 3 shows a configuration diagram of an electrode pattern of the conventional method according to the above-mentioned JP-A-5-267990, where L 1 = L 2 = λ / 4. 1 and 3, the IDT cycle is 4.38 μm and the central IDT is 31.5.
Pairs, on both sides IDT are each 21.5 pairs, crossing length is 32Ramuda, reflector number is present right respectively 180, the ratio of the IDT of the period (L T) and the reflector of the period (L R) is L T / L R = 0.992, the electrode is aluminum, and the film thickness is 0.175 μm (4% λ).
【0013】この電極パターンによる従来の1次モード
と3次モードを用いた縦結合2重モードSAWフィルタ
を2段縦続接続した構成の周波数減衰特性を図4に示
す。図4において中心周波数(f0)は930MHz,
1dB帯域幅20MHz,所望の高域側f0+15MH
z付近の減衰量は22dBであった。FIG. 4 shows the frequency attenuation characteristic of a structure in which two vertically coupled double mode SAW filters using the conventional first-order mode and third-order mode with this electrode pattern are cascade-connected. In FIG. 4, the center frequency (f 0 ) is 930 MHz,
1 dB bandwidth 20 MHz, desired high frequency side f 0 +15 MH
The amount of attenuation around z was 22 dB.
【0014】これに対して図2は本発明の図1の電極パ
ターンによるフィルタを2段縦続接続した構成の周波数
減衰特性であり,f0は同じ930MHz,1dB帯域
幅は14MHzで,高域側f0+15MHz付近に減衰
極をもたせることができるので40dB以上の減衰量が
得られる。帯域幅が若干減少するが,所望帯域幅は3M
Hzであるので十分要求を満足する。挿入損失は共に約
2.5dBで変化がない。従って通過域高域側近傍の減
衰量を必要とするフィルタには,本発明の方法は著しい
効果がある。On the other hand, FIG. 2 shows the frequency attenuation characteristics of a structure in which filters of the electrode pattern of FIG. 1 according to the present invention are cascaded in two stages. F 0 is the same 930 MHz, 1 dB bandwidth is 14 MHz, and the high frequency side is shown. Since an attenuation pole can be provided near f 0 +15 MHz, an attenuation amount of 40 dB or more can be obtained. Bandwidth is slightly reduced, but the desired bandwidth is 3M
Since it is Hz, it sufficiently satisfies the requirement. The insertion loss is about 2.5 dB, which is unchanged. Therefore, the method of the present invention has a significant effect on a filter that requires an attenuation amount near the pass band and the high band side.
【0015】以上,本発明を入出力IDTの最内側電極
指の中心間々隔L1=λ/2,L2=λ/4として説明し
たが,入出力IDT間隔をλ/2毎に離していってもI
DT間の結合が弱くなって帯域幅が減少はするが,減衰
極が現れる効果は全く同じである。Although the present invention has been described above with the center-to-center spacing L 1 = λ / 2, L 2 = λ / 4 of the innermost electrode fingers of the input / output IDT, the input / output IDT intervals are separated by λ / 2. Even I
Although the coupling between DTs is weakened and the bandwidth is reduced, the effect of appearance of the attenuation pole is exactly the same.
【0016】また,本発明を36゜YカットLiTaO3
基板を用いた例により説明したが,この基板に限定され
るものではなく,STカット水晶,XカットLiTaO
3,64゜YカットLiNbO3,45゜XカットLi2B4
O7等,他の圧電基板を用いた場合にも適用できること
は明らかである。The present invention also provides a 36 ° Y-cut LiTaO 3
Although an example using a substrate has been described, the present invention is not limited to this substrate, and ST cut quartz, X cut LiTaO
3 , 64 ° Y-cut LiNbO 3 , 45 ° X-cut Li 2 B 4
It is obvious that the present invention can be applied to the case where another piezoelectric substrate such as O 7 is used.
【0017】[0017]
【発明の効果】本発明に係るフィルタは以上説明した如
く構成するものであるから,高周波領域に於いて広帯域
低損失で且つ通過域近傍の高域側減衰量の大きなフィル
タを得る上で著しい効果がある。Since the filter according to the present invention is constructed as described above, a remarkable effect is obtained in obtaining a filter having a wide band low loss in the high frequency region and a large attenuation on the high frequency side near the pass band. There is.
【図1】本発明に係る1次モードと3次モードを用いた
縦結合2重モードSAWフィルタの電極パターンの基本
構成を示す図。FIG. 1 is a diagram showing a basic configuration of an electrode pattern of a longitudinally coupled dual mode SAW filter using a first-order mode and a third-order mode according to the present invention.
【図2】本発明に係る1次モードと3次モードを用いた
縦結合2重モードSAWフィルタの一実施例の周波数減
衰特性を示す図。FIG. 2 is a diagram showing frequency attenuation characteristics of an example of a longitudinally coupled dual mode SAW filter using a first-order mode and a third-order mode according to the present invention.
【図3】従来の1次モードと3次モードを用いた縦結合
2重モードSAWフィルタの電極パターンの構成を示す
図。FIG. 3 is a diagram showing a configuration of an electrode pattern of a conventional longitudinally coupled dual mode SAW filter using a first-order mode and a third-order mode.
【図4】従来の1次モードと3次モードを用いた縦結合
2重モードSAWフィルタの周波数減衰特性を示す図。FIG. 4 is a diagram showing frequency attenuation characteristics of a conventional longitudinally coupled dual mode SAW filter using a first-order mode and a third-order mode.
1・・・圧電基板, 2,3・・・IDT, 4・・・反射器,
L1,L2・・・最内側電極指の中心間々隔1 ... Piezoelectric substrate, 2, 3 ... IDT, 4 ... Reflector,
L 1 , L 2 ... Distance between centers of innermost electrode fingers
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H03H 9/64 H03H 9/145 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) H03H 9/64 H03H 9/145
Claims (2)
振,受信する中央及び両側の3個のインタディジタルト
ランスジューサ(IDT)電極を近接配置し,これらの
両側に反射器を設け励起したSAWの振動エネルギーを
前記IDT内に閉じ込めると共に,前記IDT間の音響
結合によって発生する1次及び3次モードの波動を利用
する縦結合2重モードSAWフィルタであって、前記中央IDTの一方のくし型電極をアースとし他方の
くし型電極を入・出力とし 、前記両側IDTの一方のくし型電極同士を接続してアー
スとし他方のくし型電極を接続して入・出力とした 縦結
合2重モードSAWフィルタに於いて, 前記中央IDTと両側IDTとの対面する最内側電極指
の中心間々隔が左右で異なることを特徴とする縦結合2
重モードSAWフィルタ。1. A SAW excited by arranging three interdigital transducer (IDT) electrodes at the center and both sides for exciting and receiving a surface acoustic wave (SAW) on a piezoelectric substrate in close proximity, and providing a reflector on each side of these electrodes. Is a longitudinally coupled dual mode SAW filter that confines the vibrational energy of the IDT in the IDT and utilizes the waves of the first and third modes generated by the acoustic coupling between the IDTs. The electrode is grounded and the other
The comb electrodes are used as input and output, and one of the IDTs on both sides is connected to each other.
In a longitudinally coupled dual-mode SAW filter in which the other comb-shaped electrode is connected for input and output, the center-to-center spacing of the innermost electrode fingers facing the central IDT and both IDTs is different between left and right. Vertical connection 2 characterized by
Heavy mode SAW filter.
振,受信する中央及び両側の3個のインタディジタルト
ランスジューサ(IDT)電極を近接配置し,これらの
両側に反射器を設け励起したSAWの振動エネルギーを
前記IDT内に閉じ込めると共に,前記IDT間の音響
結合によって発生する1次及び3次モードの波動を利用
する縦結合2重モードSAWフィルタに於いて, 前記中央IDTと両側IDTとの対面する最内側電極指
の中心間々隔が,一方はnλ/2で他方は(2n−1)
λ/4(λは励起したSAWの波長,n=1,2,・・
・)であることを特徴とする縦結合2重モードSAWフ
ィルタ。2. A surface acoustic wave (SAW) is excited on a piezoelectric substrate.
3 interdigital transmitters on the center and both sides for shaking and receiving
Place the lance transducer (IDT) electrodes close to each other, and
Vibration energy of SAW excited by installing reflectors on both sides
Acoustics between the IDTs while confined in the IDTs
Utilizes the waves of the first and third modes generated by coupling
In the longitudinally coupled dual mode SAW filter, the centers of the innermost electrode fingers of the central IDT and the IDTs on both sides facing each other are nλ / 2 on the one hand and (2n-1) on the other hand.
λ / 4 (λ is the wavelength of the excited SAW, n = 1, 2, ...
・) A longitudinally coupled double-mode SAW filter, characterized in that
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01870595A JP3393945B2 (en) | 1995-01-10 | 1995-01-10 | Vertically coupled dual mode SAW filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01870595A JP3393945B2 (en) | 1995-01-10 | 1995-01-10 | Vertically coupled dual mode SAW filter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08191229A JPH08191229A (en) | 1996-07-23 |
JP3393945B2 true JP3393945B2 (en) | 2003-04-07 |
Family
ID=11979068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP01870595A Expired - Lifetime JP3393945B2 (en) | 1995-01-10 | 1995-01-10 | Vertically coupled dual mode SAW filter |
Country Status (1)
Country | Link |
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JP (1) | JP3393945B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0782255B1 (en) * | 1995-12-28 | 2002-03-27 | Murata Manufacturing Co., Ltd. | Longitudinal coupling type surface acoustic wave resonator filter |
JPH10190394A (en) * | 1996-12-25 | 1998-07-21 | Murata Mfg Co Ltd | Surface acoustic wave resonance filter |
JP2002185284A (en) | 2000-12-15 | 2002-06-28 | Sanyo Electric Co Ltd | Surface acoustic wave filter |
JP3685102B2 (en) * | 2001-07-27 | 2005-08-17 | 株式会社村田製作所 | Surface acoustic wave filter, communication device |
JP2003258595A (en) | 2002-02-27 | 2003-09-12 | Fujitsu Media Device Kk | Surface acoustic wave device |
-
1995
- 1995-01-10 JP JP01870595A patent/JP3393945B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH08191229A (en) | 1996-07-23 |
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