JP3382857B2 - Method and apparatus for treating harmful substance-containing gas - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to various organic pollutants,
The present invention relates to a method and an apparatus for detoxifying a gas containing a harmful substance such as a malodorous component and a bacterium, and particularly to a method and an apparatus for detoxifying a gas containing a harmful substance with improved detoxification efficiency by ozone.

[0002]

2. Description of the Related Art As one of the methods for detoxifying pollutant gas containing harmful substances such as various organic pollutants, malodorous components and bacteria, there is an oxidation treatment method using ozone. Since ozone self-decomposes, ozone is less likely to remain in the processing gas and affect the human body, and it is expected that the field of use will further expand as a clean processing agent in the future.

The treatment with ozone is carried out by injecting an ozone-containing gas from an ozone generator (ozonizer) into the harmful-substance-containing gas, but usually the concentration of the harmful substance in the gas is extremely dilute, and therefore harmful. A large proportion of ozone is decomposed before it contributes to oxidative decomposition, sterilization, etc. of the substance, and there is a problem that the detoxification efficiency is low.

[0004]

SUMMARY OF THE INVENTION The present invention solves the above problems in the prior art and uses ozone, which is a highly safe oxidant, to remove various organic pollutants, malodorous components, bacteria and the like. An object of the present invention is to provide a method for treating a gas containing a harmful substance and an apparatus therefor capable of efficiently treating a gas containing a harmful substance.

[0005]

The present invention adopts the following constitutions (1) to ( 8 ) as means for solving the above problems.

( 1 ) Add ozone to gas containing harmful substances,
After mixing, by passing through the adsorbent layer filled with a high silica adsorbent that adsorbs ozone and adsorbs harmful substances, a harmful substance-containing gas that detoxifies the harmful substances in the gas by the action of ozone In the treatment method, the high-silica adsorbent is one or more high-silica adsorbents selected from the group consisting of high-silica pentasil zeolite, dealuminated faujasite and mesoporous silicate. Processing method.

( 2 ) Add ozone to the gas containing harmful substances,
After mixing, by passing through the adsorbent layer filled with a high silica adsorbent that adsorbs ozone and adsorbs harmful substances, a harmful substance-containing gas that detoxifies the harmful substances in the gas by the action of ozone In the treatment method, the adsorbent layer is a two-layered adsorbent layer having mesoporous silicate filled on the treated gas inlet side and dealuminated faujasite on the treated gas outlet side. Method of treating substance-containing gas. ( 3 ) The processing gas after detoxifying harmful substances in the adsorbent layer is contacted with an ozone decomposing agent to decompose residual ozone, thereby preventing leakage of ozone to the downstream. The method for treating a hazardous substance-containing gas according to any one of 1) and 2) . ( 4 ) Any of the above (1) to (3) , wherein the processing gas after detoxifying harmful substances in the adsorbent layer is returned to the source of the harmful substance-containing gas and circulated. One method for treating gas containing harmful substances.

( 5 ) Adsorbs ozone and absorbs harmful substances
Adsorbent packed tower with adsorbent layer of high silica adsorbent
And supply a gas containing harmful substances to the adsorbent packed tower.
Connected to the supply pipe, and ozone is added to the gas.
Treated from the ozone generator to be added and the adsorbent packed tower
And a hazardous substance-containing
In the processing apparatus of Organic vapor, characterized in that said high silica adsorbent is a high silica pentasil zeolite, 1 or more high-silica adsorbent selected from the group consisting of dealuminized faujasite and mesoporous silicate
Processor of hazardous substances containing gas.

( 6 ) Adsorbs ozone and harmful substances
Adsorbent packed tower with adsorbent layer of high silica adsorbent
And supply a gas containing harmful substances to the adsorbent packed tower.
Connected to the supply pipe, and ozone is added to the gas.
Treated from the ozone generator to be added and the adsorbent packed tower
And a hazardous substance-containing
In a gas treatment apparatus, the adsorbent packed tower has an adsorbent layer having a two-layer structure in which a mesoporous silicate is filled on an inlet side of a gas to be treated and a dealuminized faujasite is filled on an outlet side of a treated gas. processor of hazardous substances containing gas you wherein the agent is a packed column. ( 7 ) Containing a harmful substance according to any one of the above (5) and (6) , characterized in that an ozone decomposing agent layer that decomposes leaking ozone is provided on the downstream side of the adsorbent packed tower. Gas processing equipment. ( 8 ) The treatment gas after detoxifying harmful substances in the adsorbent-packed tower is returned to the source of the harmful substance-containing gas and circulated, and the process gas (5) to () is characterized. 7. A treatment device for a gas containing a harmful substance according to any one of 7) .

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION The method of the present invention includes various organic pollutants such as VOC (Volatile Organic Compound: isopropyl alcohol, ethyl acetate, BTXs, halogenated organic compounds) and dioxins which are harmful substances designated by the Environment Agency.
After ozone is added to and mixed with pollutant gas containing odorous components such as mercaptan and hydrogen sulfide, and harmful substances such as bacteria, the detoxification by ozone is enhanced by passing through the adsorbent layer filled with the adsorbent. It is characterized in that it is designed to proceed efficiently. The detoxification mentioned here includes oxidative decomposition of organic pollutants and malodorous components due to oxidation reaction, sterilization of bacteria and the like.

The adsorbent used in the present invention must be one that adsorbs ozone and adsorbs harmful substances.
As an example of such adsorbent, high-silica pentasil zeolite (silicalite or SiO ₂ / Al ₂ O ₃ is higher ratio ZSM-5), dealuminated faujasite (ultrastable Y-type zeolite: USY), and High silica adsorbents such as mesoporous silicates (MCM-41, FSM-16, low temperature acidic synthetic mesoporous silicates using tetraethoxysilane as a silica source, or low temperature acidic synthetic mesoporous silicates using low molecular silicic acid as a silica source) be able to. In addition, as a comparative example, silica
Mention may be made of gels.

Among these high silica adsorbents, silica gel has a slightly low adsorption capacity for ozone and harmful substances (especially low adsorption capacity for harmful substances in the presence of water) and low resistance to water. Pentacyl zeolite, dealuminated faujasite, mesoporous silicate, etc. all have a high ozone adsorption capacity, and have a low decomposition rate of the adsorbed ozone, and also have the property of adsorbing harmful substances, and have resistance to water, It is also applicable to the treatment of gas containing moisture.

Among the high silica adsorbents, the high silica pentasil zeolite uses sodium silicate or fumed silica as a silica source and tetrapropylammonium bromide as an organic template.
SiO ₂ / obtained by performing hydrothermal synthesis at about 180 ° C
It is a pentasil zeolite having an Al ₂ O ₃ ratio of about 10 to 1000.

The dealumination faujasite is made of Si
By treating Na-Y type zeolite with an O ₂ / Al ₂ O ₃ ratio of about 5 with aqueous ammonia, the Al of the zeolite skeleton is
SiO ₂ / Al ₂ O ₃ ratio 10 obtained by removing most of
~ 400 ultra stable Y-zeolites (USY).

Mesoporous silicate is 10 to 1000
Silica-based porous material with angstrom mesopores
There are various manufacturing methods, and depending on the manufacturing conditions, etc.
O₂/ Al₂O₃Ratio 10 to substantially SiO₂Only
Has been obtained. For example, MCM-41 is a mobile
Temperature 140 ℃, pH 13.5, Siri developed by the company
Water source, sodium silicate, organic template
Use a cationic surfactant (more than 8 carbon atoms)
Specific surface area of 1600m²/ G, SiO
₂/ Al₂O₃It is a silica-based porous body with a ratio of about 1000.
It FMS-16 was also developed by Kuroda, Inagaki, etc.
Intercalation with cationic surfactant in kanemite
Of SiO 2 having a structure similar to MCM-41
₂/ Al ₂O₃It is a silica-based porous body with a ratio of about 1000.
It Also, low temperature mesoporous silicate is stuck
The method proposed by Y. et al., ie, as a silica source
Tetraethoxysilane (TEOS) is used as an organic template.
PH at room temperature using a cationic surfactant
Synthesized at 1 or less, low temperature mesoporous siliqu
Is a method developed by the present inventors, namely silica.
As a source, polycondensed silica-free silicic acid was used as an organic solvent.
At room temperature using cationic surfactant as template
It is synthesized at a pH of 1 or less. These low temperature mesopo
-Silica may be SiO depending on manufacturing conditions.₂/ Al₂
O₃Ratio 10 to substantially SiO₂You can get only things
You can

Further, according to the experimental results of the present inventors, this
Among these high silica adsorbents, SiO₂/ Al₂O₃ratio
70 or more high silica pentasil zeolite, SiO₂/
Al ₂O₃De-aluminized forge size of 20 or more
G, SiO₂/ Al₂O₃A mesoporous material with a ratio of 20 or more
The replicate has a high ozone adsorption capacity,
It is a preferable adsorbent because it has a low solution ratio. Among these
High silica pentasil zeolite has high ozone adsorption capacity,
The ozone decomposition rate tends to be slightly higher, and the ozone adsorption capacity and
Considering the decomposition rate, SiO₂/ Al₂O₃20 or more
Mesoporous silicates show the best performance,
With SiO₂/ Al₂O₃Aluminum deal with a ratio of 20 or more
Auger sight, SiO₂/ Al₂O₃Higher than 70
The order is silica pentasil zeolite.

These adsorbents may be used alone or in the form of a mixture depending on the purpose of use by molding them into any shape such as granular, pellet, Raschig ring, and honeycomb.
In addition, the adsorbent-filled tower has a two-layer structure in which the treated gas inlet side is filled with mesoporous silicate having high adsorption performance for high-concentration ozone and the outlet side of treated gas is dealuminated faujasite with high adsorption performance for low-concentration ozone. It is also possible to increase the use efficiency of ozone as the adsorbent layer of the structure.

In the present invention, ozone is added to and mixed with a gas containing a harmful substance, and then the adsorbent packed column provided with the adsorbent layer is passed through to carry out an oxidation reaction in the adsorbent phase to remove the harmful substance. Disassemble. This makes it possible to proceed with detoxification with a much higher efficiency than in the case where ozone is simply added to a gas containing a harmful substance to cause a reaction.
The amount of ozone added may be appropriately set depending on the type and concentration of harmful components in the treated gas, but in ordinary gas treatment, 1 to 20 mol, preferably 3 mol, per 1 mol of harmful components.
It is about 10 mol.

As an ozone generator (ozonizer) for supplying ozone into the polluted gas, any of the known methods such as a silent discharge method, an ultraviolet lamp method, and a water electrolysis method can be applied. Among them, the water electrolysis method uses a specially treated ion-exchange membrane, a gas-permeable electrode (hydrogen electrode) made of carbon and fluororesin, and a lead dioxide electrode (ozone electrode).
It is sandwiched between the electrodes, and ion-exchanged water is supplied to the ozone electrode as raw material water for electrolysis to generate ozone and oxygen in the ozone electrode and hydrogen in the hydrogen electrode. High concentration and clean ozone gas can be obtained. Therefore, it is suitable when applied to gas treatment as in the present invention.

The present invention is based on the fact that the inventors of the present invention carried out an ozone adsorption test in a gas phase, in which a high silica type adsorbent (particularly high silica pentasil zeolite, dealuminated faujasite,
Mesoporous silicate, etc.) efficiently adsorbs ozone, and also makes it possible to efficiently oxidize co-adsorbed harmful substances such as organic pollutants, bacteria, and malodorous components by ozone, detoxify by sterilization, etc., and convert ozone to oxygen. It is based on the result of finding out that. In this way, the coexistence of the adsorbent makes the harmful substances in the gas harmless, for example, the ozone oxidation of organic pollutants proceeds efficiently because the ozone oxidative decomposition reaction in the gas causes the ozone concentration in the gas [ O ₃ ] and the concentration of organic pollutant [ORG], which proceeds in proportion to the product [O ₃ ] · [ORG], but in the adsorbent, the ozone concentration [O ₃ ] in the adsorbent phase and Organic pollutant concentration [OR
G] reaches about 10 to 100 times, so that [O ₃ ]. [ORG] in the adsorbent is 10 to 1000 in the gas phase.
It is thought that this is because it will reach 0 times.

Further, in the gas phase, ozone frequently decomposes without contributing to detoxification due to collision with a third substance other than harmful substances, and its detoxification efficiency is not so great. On the other hand, in detoxifying harmful substances by ozone in the adsorbent phase as in the present invention, since ozone and harmful substances are selectively adsorbed in the adsorbent phase, ozone decomposition by collision with the third substance The probability of is greatly reduced, and ozone is efficiently consumed for detoxifying harmful substances.

In the present invention, in the case of ordinary gas treatment, unreacted ozone is retained in the silica-based adsorbent, so that there is almost no risk of leaking to the downstream, but a large amount of ozone such as sterilization of special bacteria is added. In the case of leaking for some reason, contact with an ozone decomposing agent such as activated carbon or an alumina-based compound, which is a consumable adsorbent that contacts the leaked ozone with ozone and oxidizes it to CO ₂ , Can be disassembled. That is, unreacted ozone can be decomposed by providing a decomposing agent layer that decomposes leaking ozone at the processing gas outlet of the adsorbent packed tower that performs detoxification processing with ozone. The decomposing agent layer may be provided inside the outlet part of the adsorbent packed tower,
Alternatively, it may be separately provided outside the packed tower. Activated carbon has been used for the treatment of leaked ozone,
In the conventional detoxification process of harmful substances in the gas phase, the reaction is slow and the leak ozone concentration is also high. Therefore, the consumption of activated carbon by ozone is considerably large, and the frequency of replacement often makes it difficult to maintain economy and maintainability. There was a strong need for improvement.
In this respect, according to the method of the present invention, the concentration of leaked ozone becomes 1/10 or less of that in the conventional case, and therefore the frequency of use of activated carbon can be significantly extended to about 10 times that in the conventional case.

If necessary, a filter material layer for removing dust can be provided on the upstream side of the ozone injection point to the harmful substance-containing gas and / or on the downstream side of the ozone adsorption reactor.
Whether or not the filter material layer is installed, the installation position, and the like may be appropriately determined depending on the condition of the device, the property of the harmful substance-containing gas and the like.

The method and apparatus of the present invention have a high detoxification performance of harmful substances, there is no fear of ozone flowing out into the treated gas, and the decomposition and sterilizing action of harmful substances possessed by ozone can be sufficiently performed with relatively simple equipment. It is possible to build a high performance pollutant gas purification system that utilizes harmful substances, such as air purification and deodorization of general office buildings, hospitals, hotels, food factories, subway premises, amusement parks, trains, etc. , Sterilization, printing plant, injection molding plant, clean room, paint plant, etc., purification of exhaust gas containing trace organic substances, waste gas treatment of garbage incinerators, etc., deodorization of exhaust gas from fermentation plants, food waste treatment plants, etc., human waste, sewage treatment It can be used in a wide range of applications such as removing odors from processes.

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 shows an example of a processing flow of a harmful substance-containing gas to which the present invention is applied to exhaust gas processing of a plant such as a printing factory. In FIG. 1, the harmful substance-containing gas from the main plant 1 is sent to the mixer 4 by the blower 3 through the exhaust gas discharge pipe 2, and ozone is injected from the ozone generator 5 and introduced into the adsorbent packed tower 6. The high silica adsorbent is packed in the adsorbent packed tower 6, and the harmful substances and ozone in the introduced gas are co-adsorbed with the high silica adsorbent, and react in a high concentration state to decompose the harmful substances. Normally, there is no leakage of ozone to the treated gas discharged from the treated gas discharge pipe 7, but if necessary, activated carbon or the like may be provided on the treated gas outlet side in the adsorbent packed tower 6 or in the downstream of the adsorbent packed tower 6. An ozone decomposer layer may be provided. Note that FIG. 1 shows an example in which the ozone decomposing agent layer 6b is provided on the processing gas outlet side of the adsorbent layer 6a in the adsorbent packed tower 6 via the partition 6c.

By the way, the processing flow shown in FIG. 1 has a one-through structure in which the processing gas detoxified by the action of ozone is discharged to the outside of the main plant 1. For example, the flow chart when applied to an exhaust duct of a factory. Is. Alternatively, when the main plant 1 is regarded as outside air, it is a flow diagram when it is applied to sterilize and introduce outside air into a food factory.

The present invention can also be applied to the following cases. For example, in the case where the main plant 1 is a food factory or the like, a peculiar odor may be generated due to the food to be handled and the working environment may be deteriorated. In addition, air conditioning equipment generally cools, heats, or dehumidifies the inside of food factories to maintain the air in the food factories at a constant level. Introducing outside air into the factory changes the temperature and humidity inside the food factory. Therefore, the load on the air conditioner increases.

Therefore, when the present invention is applied to this, for example, the processing flow shown in FIG. 2 may be used. That is, in the processing flow shown in FIG. 2, ozone is mixed in the mixer 4 with the harmful substance-containing gas that is discharged from the main plant 1 by the blower 3 through the inside air discharge pipe 21, and the harmful substance-containing gas that is mixed with this ozone is mixed. It is introduced into the adsorbent packed tower 6 (up to this point, the same as in the case of FIG. 1). Then, the processing gas after detoxifying harmful substances in the adsorbent-filled tower 6 is returned to the main plant 1 which is the source of the harmful substance-containing gas through the inside air return pipe 22 and circulated. is doing.

In this way, the processing gas is supplied to the main plant 1 again.
By returning to the inside and circulating, without increasing the load of the air conditioner 8 provided in the main plant 1 such as a food factory,
It is possible to deodorize and sterilize the air in the main plant 1 such as a food factory. Further, since ozone does not flow out into the inside air return pipe 22, the work environment is not deteriorated by ozone in the main plant 1.

[0030]

The present invention will be described in more detail with reference to the following examples. Example 1 Isopropyl alcohol (IPA) was added as a harmful substance.
A treatment test of a harmful substance-containing gas by ozone was conducted by using a test device (no ozone decomposing agent layer was provided) having the flow shown in FIG. 1 by using air (simulation gas of exhaust gas of a printing factory) containing 00 ppm as a sample. The types of high silica adsorbent used are shown in Table 1, and the test conditions are shown in Table 2. In addition, as a comparative example
Silica gel is also shown.

[0031]

[Table 1]

[0032]

[Table 2]

In the test, a gas containing 100 ppm of IPA was treated under the conditions shown in Table 2, and the IPA concentration in the gas sampled at the treated gas discharge pipe 7 portion in FIG. 1 (outlet IPA
Concentration) and ozone concentration (outlet O ₃ concentration).

The results are shown in FIG. In FIG. 3, the adsorbents A, B and C have almost the same numerical values, and these are shown by a single line. Outlet IPA for the ozone molar ratios 5, 15 and 25 in FIG.
The concentration and the outlet O ₃ concentration are shown in Table 3.

From FIG. 3, it is necessary to add ozone in a molar ratio of about 20 in order to obtain a removal rate of 50% or more with the adsorbent D.
The amount of ozone leak is about 10ppm, but the adsorbent A
In the case of C to C, a removal rate of 50% or more is obtained at an ozone molar ratio of 3 or more, a removal rate of 80 or more at an ozone molar ratio of 3 or more, and a leak ozone of 1 ppm at an ozone molar ratio of 10 or less.
Below, it can be seen that the molar ratio is as low as 3 ppm even at a 15 molar ratio.

[0036]

[Table 3]

(Example 2) Adsorbent A was used, the adsorbent usage was 1 m ³ , the inlet IPA concentration was 100 ppm, the ozone / IPA molar ratio was 5, and the adsorption temperature was 25 ° C. The test is carried out by changing the IPA concentration at the outlet and the outlet O
₃ concentrations were measured. The result is as shown in FIG. 4, and under these conditions, the treatment amount was 90 m ³ N / h or less.
%, The removal rate of 80% or more was obtained even when the treatment amount was 8000 m ³ N / h or less, and the ozone leak amount was 1 ppm or less. Inlet gas amount 2500 in FIG. 4,
Table 4 shows the outlet IPA concentration and the outlet O ₃ concentration at 5000, 7500 and 10000 m ³ N / h.

[0038]

[Table 4]

Example 3 Using the adsorbent A, the adsorbent was used
Dose: 2m³, Inlet IPA concentration: 100ppm, inlet gas
Amount: 10^Fourm³N / h, ozone / IPA molar ratio: 5
Depending on the conditions, the adsorption temperature is changed and the test is performed, and the IPA concentration at the outlet is changed.
And exit O₃The concentration was measured. The result is as shown in Figure 5.
Under these conditions, the ozone leak amount is 0.0
02ppm or less, 80% or less at a processing temperature of 60 ° C or less
The above removal rate is obtained, and it is almost in the range of 20 to 50 ° C.
It can be seen that a removal rate of 90% or more can be obtained. In Figure 5
At processing temperatures of 0, 25, 35, 50 and 75 ° C
Outlet IPA concentration and outlet O ₃The concentrations are shown in Table 5.

[0040]

[Table 5]

(Example 4) Using the adsorbents A to D as described above, air containing a predetermined amount of ethyl acetate, methyl mercaptan and dioxin as harmful substances was used as a sample gas, and the adsorbent amount was 1 m ³ , the inlet gas. Quantity: 5000m ³ N
/ H, treatment temperature: a treatment test of the harmful substance-containing gas with ozone was performed under the conditions of 25 ° C.

The results are shown in Table 6, which shows that the method of the present invention is effective in removing various harmful substances.
In particular, the adsorbents A to C have a high removal rate and a small amount of leak ozone, and the effect of the adsorbent A is particularly large.

[0043]

[Table 6]

[0044]

According to the method of the present invention, in the treatment of harmful substance-containing gas with ozone, the effective utilization rate of ozone is improved by using an adsorbent that efficiently adsorbs ozone and adsorbs harmful substances. However, detoxification treatment such as oxidative decomposition and sterilization of organic pollutants and malodorous components with high processing speed and high efficiency becomes possible. In addition, because the utilization rate of ozone (the rate that contributes to the oxidation of harmful substances, etc.) is improved and the ozone adsorbing power of the adsorbent used is high, the amount of leaked ozone in the treated gas discharged is small. Further, if necessary, by providing an ozone decomposing agent layer such as activated carbon, it is possible to completely prevent ozone leakage. Further, according to the apparatus of the present invention, it is possible to efficiently perform the treatment of the gas containing the harmful substance with ozone.

Further, according to the method and apparatus of the present invention, the processing gas is supplied again to the source of the harmful substance-containing gas (food factory, etc.).
By returning to and circulating the air, the air in the main plant of the food factory or the like can be deodorized and sterilized without increasing the load on the air conditioner provided in the food factory or the like. Further, since ozone does not flow out into the inside air return pipe, the working environment is not deteriorated by ozone in the main plant.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an example of a processing flow of a harmful substance-containing gas according to the method of the present invention.

FIG. 2 is an explanatory view showing another example of a processing flow of a harmful substance-containing gas according to the method of the present invention.

FIG. 3 O ₃ / IPA molar ratio and outlet I in Example 1
Diagram showing the relationship between PA and O ₃ concentrations.

FIG. 4 is a graph showing a relationship between an inlet gas amount and an outlet IPA and O ₃ concentration in Example 2.

FIG. 5: Treatment temperature and outlet IPA and O in Example 3
_The figure which shows the relationship with ₃ concentration.

[Explanation of symbols]

1 Main plant 2 Exhaust gas outlet piping 3 Blower 4 mixer 5 Ozone generator 6 Adsorbent packing tower 6a adsorbent layer 6b Ozone decomposer layer 6c partition 7 Process gas discharge piping 8 air conditioners 21 Inside air outlet piping 22 Inside air return piping

Front page continuation (72) Inventor Hiroyuki Tsutaya 5-171-1 Fukahori-cho, Nagasaki-shi, Nagasaki Mitsubishi Heavy Industries, Ltd. Nagasaki Research Institute (72) Inventor Ka Wada 3000, Tana, Sagamihara, Kanagawa Mitsubishi Heavy Industries, Ltd. In Sagamihara Works (72) Inventor Tokuichi Mineo 3000 Tana, Sagamihara City, Kanagawa Mitsubishi Heavy Industries, Ltd. Inside Sagamihara Works (56) References JP-A-115096 (JP, A) JP-A-6-55032 (JP) , A) JP-A-5-57134 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B01D 53/34

Claims (8)

(57) [Claims] 1. Addition and mixing of ozone to a harmful substance-containing gas, and then flowing through an adsorbent layer filled with a high-silica adsorbent that adsorbs ozone and adsorbs harmful substances. In the method for treating a harmful substance-containing gas for detoxifying a substance by the action of ozone, the high silica adsorbent is a high silica pentasil zeolite,
A method for treating a gas containing a harmful substance, which is one or more high silica adsorbents selected from the group consisting of dealuminated faujasite and mesoporous silicate. 2. A harmful substance in a gas is obtained by adding ozone to a gas containing a harmful substance and mixing it, and then passing it through an adsorbent layer filled with a high silica adsorbent that adsorbs ozone and adsorbs the harmful substance. In the method for treating a harmful substance-containing gas, which detoxifies a substance by the action of ozone, the adsorbent layer is filled with mesoporous silicate on the side of the gas to be treated, and dealuminized faujasite on the side of the treated gas. A method for treating a gas containing a harmful substance, which is an adsorbent layer having a layered structure. 3. A process gas after detoxifying harmful substances in the adsorbent layer is contacted with an ozone decomposing agent to decompose residual ozone, thereby preventing leakage of ozone to a downstream flow. processing method of pollutant gases according to claim 1 or 2. 4. The method of claim 1 to 3, characterized in that said processing gas after detoxify harmful substances in the adsorbent layer, is circulated again returned to the source of the pollutant gases
The method for treating a gas containing a harmful substance according to any one of 1. 5. Adsorbs ozone and adsorbs harmful substances.
An adsorbent packed tower provided with an adsorbent layer of a high silica adsorbent,
Supplying a gas containing harmful substances to the adsorbent packed tower
Supply pipe and connected to the supply pipe, add ozone to the gas
From the ozone generator and the adsorbent packed tower.
Gas containing harmful substances, which is equipped with a discharge pipe for discharging natural gas.
In the processing apparatus of the soot, the high silica adsorbent is high silica pentasil zeolite,
Processor of hazardous substances containing gas you, characterized in that one or more kinds of high-silica adsorbent selected from dealuminated faujasite and the group consisting of mesoporous silicate. 6. Adsorbs ozone and adsorbs harmful substances.
An adsorbent packed tower provided with an adsorbent layer of a high silica adsorbent,
Supplying a gas containing harmful substances to the adsorbent packed tower
Supply pipe and connected to the supply pipe, add ozone to the gas
From the ozone generator and the adsorbent packed tower.
Gas containing harmful substances, which is equipped with a discharge pipe for discharging natural gas.
In the apparatus for treating gas, an adsorbent in which the adsorbent-packed tower is provided with a two-layer structure adsorbent layer in which the treated gas inlet side is filled with mesoporous silicate and the treated gas outlet side is filled with dealuminated faujasite processor of hazardous substances containing gas you being a packed column. 7. A downstream side after the adsorbent packed column, the process of pollutant gases according to claim 5 or 6, characterized in that is an ozone decomposing ozone decomposing agent layer to leak provided apparatus. 8. A process gas After detoxifying harmful substances in the adsorbent packed column according to claim 5, characterized by being configured to circulate again returned to the source of the pollutant gases Item 7. A treatment device for a gas containing a harmful substance according to any one of items 7 .