JP3375154B2 - Fluorine-containing water treatment equipment - Google Patents
Fluorine-containing water treatment equipmentInfo
- Publication number
- JP3375154B2 JP3375154B2 JP24730792A JP24730792A JP3375154B2 JP 3375154 B2 JP3375154 B2 JP 3375154B2 JP 24730792 A JP24730792 A JP 24730792A JP 24730792 A JP24730792 A JP 24730792A JP 3375154 B2 JP3375154 B2 JP 3375154B2
- Authority
- JP
- Japan
- Prior art keywords
- fluorine
- packed tower
- containing water
- storage tank
- calcium carbonate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明はフッ素含有水用処理装
置、さらに詳しくは、半導体製造分野などから排出され
るフッ素含有廃液、特に濃厚系フッ素含有廃液をそれぞ
れ個別に大がかりな配管工事が不要で経済的有利に処理
し、該廃液中のフッ素を再資源として利用可能な高純度
のフッ化カルシウムとして回収するためのフッ素含有水
用処理装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a treatment apparatus for fluorine-containing water, and more specifically to a fluorine-containing waste liquid discharged from the semiconductor manufacturing field, etc. The present invention relates to a treatment apparatus for fluorine-containing water for economically advantageous treatment and recovering fluorine in the waste liquid as high-purity calcium fluoride that can be used as a resource.
【０００２】[0002]
【従来の技術】近年、半導体製造分野やその関連分野、
あるいは各種金属材料、単結晶材料、光学系材料などの
表面処理分野などにおいては、多量のエッチング剤が使
用されており、そして、このエッチング剤としては、主
にフッ化水素や、フッ化水素とフッ化アンモニウムを主
成分とするエッチング剤が用いられている。フッ化水素
を主成分とするエッチング剤は、通常フッ素をＨＦとし
て０.９重量％程度を含む薬剤であって大量に用いられ
ており、一方、フッ化水素及びフッ化アンモニウムを主
成分として含むエッチング剤（バッファードフッ酸）
は、その使用量は少ないものの、フッ素をＨＦとして通
常７重量％程度含有していることから、これらのエッチ
ング剤は廃水系統へ移行した際、高濃度フッ素含有廃液
となる。一方、エッチング途中やエッチング終了時に
は、これらのエッチング剤で処理された材料を大量の洗
浄水で洗浄するため、その洗浄工程からは、大量の低濃
度フッ素含有廃液が排出される。このようなフッ素含有
廃液は、一般的には総合排水中に流入されている。この
総合排水のフッ素の除去は、通常水酸化カルシウムや塩
化カルシウムなどのカルシウム化合物を添加して、フッ
化カルシウムとして不溶化し、固液分離したのち、再度
その処理液にアルミニウム塩やマグネシウム塩を添加
し、その水酸化物へのフッ素吸着−固液分離を行った
り、あるいはフッ素吸着樹脂でイオン交換分離するな
ど、高度処理を施して放流する方法がとられている。し
かしながら、この総合廃水として処理する方法において
は、該総合廃水中のフッ素濃度が大幅に変動するのに対
応して、大過剰の水酸化カルシウムや塩化カルシウムな
どのカルシウム化合物の添加が必要となり、薬剤を多量
に要する上、固液分離されたフッ素カルシウムは再資源
化するには不純物が多く、不適当な汚泥が多量に発生す
るのを免れないという問題がある。そこで、濃厚系フッ
素含有廃液と希薄系フッ素含有廃液とに分別し、濃厚系
廃液を集めて処理する方法が提案されている。濃厚系廃
液が分別排出されれば、それを総合廃水処理系へ一定量
注入して濃度変動を低くして処理できるし、また、炭酸
カルシウム剤と接触させて、フッ素をフッ化カルシウム
として回収することも可能である。しかしながら、プラ
ント建設時に分別排出管を設けなかった場合に、新たに
分別排出管を改造して設けるには多額の費用を必要とす
るし、多くの場合、配管設置面積の余裕がなく、施工で
きないのが実状である。また、フッ素廃液から、炭酸カ
ルシウムを用いてフッ化カルシウムとして回収する場合
には、廃液中のフッ素濃度、酸の種類やその濃度などの
液組成が回収物のフッ化カルシウム純度に影響するの
で、分別の仕様や精度が、フッ化カルシウムの再資源化
の可否を決めるカギになっている。2. Description of the Related Art In recent years, semiconductor manufacturing fields and related fields,
Alternatively, a large amount of etching agents are used in the field of surface treatment of various metal materials, single crystal materials, optical system materials, etc., and as the etching agents, hydrogen fluoride and hydrogen fluoride are mainly used. An etching agent whose main component is ammonium fluoride is used. An etching agent containing hydrogen fluoride as a main component is usually used in a large amount because it contains fluorine as HF in an amount of about 0.9% by weight, while it contains hydrogen fluoride and ammonium fluoride as main components. Etching agent (buffered hydrofluoric acid)
Although it is used in a small amount, since it normally contains about 7% by weight of fluorine as HF, these etching agents become a high-concentration fluorine-containing waste liquid when transferred to the wastewater system. On the other hand, during or after the etching, since the materials treated with these etching agents are washed with a large amount of washing water, a large amount of low concentration fluorine-containing waste liquid is discharged from the washing step. Such a fluorine-containing waste liquid is generally flowed into the integrated wastewater. The removal of fluorine from this integrated wastewater is usually performed by adding a calcium compound such as calcium hydroxide or calcium chloride to insolubilize it as calcium fluoride and performing solid-liquid separation, then adding aluminum salt or magnesium salt to the treatment liquid again. Then, a method is adopted in which the hydroxide is subjected to advanced treatment such as fluorine adsorption-solid-liquid separation, or ion exchange separation with a fluorine adsorption resin, and then discharged. However, in the method of treating as the integrated wastewater, it is necessary to add a large excess of calcium compounds such as calcium hydroxide and calcium chloride in response to the large fluctuation of the fluorine concentration in the integrated wastewater. In addition to requiring a large amount of water, the solid-liquid separated calcium fluoride has many impurities for recycling, and there is a problem that a large amount of inappropriate sludge is unavoidable. Therefore, a method is proposed in which the concentrated fluorine-containing waste liquid is separated from the concentrated fluorine-containing waste liquid and the concentrated waste liquid is collected and treated. If the concentrated waste liquid is separated and discharged, it can be treated by injecting a fixed amount of it into the integrated wastewater treatment system to reduce the concentration fluctuation, and by contacting it with a calcium carbonate agent, recovering fluorine as calcium fluoride. It is also possible. However, if a separate discharge pipe is not installed during plant construction, a large amount of cost will be required to newly install a modified separate discharge pipe, and in many cases, there is no room in the piping installation area and construction cannot be performed. Is the actual situation. Further, in the case of recovering calcium fluoride using calcium carbonate from the fluorine waste liquid, since the fluorine concentration in the waste liquid, the liquid composition such as the kind of acid and the concentration thereof influences the calcium fluoride purity of the recovered product, The specifications and accuracy of sorting are the key to deciding whether or not calcium fluoride can be recycled.
【０００３】[0003]
【発明が解決しようとする課題】本発明は、このような
事情のもとで、半導体製造分野などから排出されるフッ
素含有廃液、特に濃厚系フッ素含有廃液を、それぞれ個
別に大がかりな配管工事が不要で経済的有利に処理し、
該廃液中のフッ素を再資源として利用可能な高純度のフ
ッ化カルシウムとして回収するためのフッ素含有水用処
理装置を提供することを目的としてなされたものであ
る。Under the above circumstances, the present invention requires large-scale piping work individually for a fluorine-containing waste liquid, particularly a concentrated fluorine-containing waste liquid, discharged from the semiconductor manufacturing field and the like. It is unnecessary and is processed economically,
The object of the present invention is to provide a fluorine-containing water treatment device for recovering the fluorine in the waste liquid as high-purity calcium fluoride that can be used as a resource.
【０００４】[0004]
【課題を解決するための手段】本発明者らは、前記目的
を達成するために鋭意研究を重ねた結果、半導体製造分
野などの各エッチング工程における廃エッチング剤貯槽
に、それぞれ着脱自在な粒状炭酸カルシウム充填塔を設
け、該充填塔にフッ素含有廃液を循環通液することで、
廃液処理とフッ素をフッ化カルシウムとして回収するこ
とのできる装置により、その目的を達成しうることを見
い出し、この知見に基づいて本発明を完成するに至っ
た。すなわち、本発明は、
（１）エッチング剤を用いたエッチング工程からのフッ
素含有廃水を貯めて、空気撹拌を行う貯槽と、粒状炭酸
カルシウム充填塔と、該貯槽からフッ素含有水を上向流
で充填塔へ送液するための送液用配管と、充填塔から出
た処理水を該貯槽へ返送するための循環用配管とからな
り、該送液用配管及び該循環用配管には、ワンタッチジ
ョイント又はクランプバンドを設けることにより、粒状
炭酸カルシウム充填塔を着脱自在に構成することを特徴
とするフッ素含有水用処理装置、及び
（２）フッ素含有廃水用貯槽が２５ｇ／Ｌ以下に希釈さ
れたフッ素含有廃水を貯留するものである第１項記載の
フッ素含有水用処理装置、を提供するものである。As a result of intensive studies to achieve the above-mentioned object, the inventors of the present invention have found that granular carbon dioxide which can be detachably attached to a waste etching agent storage tank in each etching step in the semiconductor manufacturing field or the like. By providing a calcium packed tower and circulating the fluorine-containing waste liquid through the packed tower,
It has been found that the object can be achieved by a waste liquid treatment and an apparatus capable of recovering fluorine as calcium fluoride, and the present invention has been completed based on this finding. That is, the present invention includes (1) a storage tank for storing fluorine-containing waste water from an etching process using an etching agent and performing air agitation, a granular calcium carbonate packed tower, and an upward flow of fluorine-containing water from the storage tank. It is composed of a liquid sending pipe for sending liquid to the packed tower and a circulating pipe for returning treated water discharged from the packed tower to the storage tank. The liquid sending pipe and the circulating pipe are one-touch By disposing a joint or a clamp band, the granular calcium carbonate packed tower is configured to be removable, and (2) the fluorine-containing wastewater storage tank is diluted to 25 g / L or less. The treatment apparatus for fluorine-containing water according to claim 1, which stores fluorine-containing wastewater.
【０００５】以下、添付図面に従って本発明を詳細に説
明する。図１は本発明のフッ素含有水用処理装置の１例
を示す概略図であって、まず、フッ素含有水１はフッ素
含有水貯槽２に入れる。フッ素の組成については、フッ
化水素系でもフッ化アンモニウム系のいずれでもよい
が、フッ素濃度は高濃度になると除去率が低下するの
で、通常５０ｇ・Ｆ／リットル以下、好ましくは２５ｇ
・Ｆ／リットル以下になるように脱塩水や水道水などの
希釈水３によって希釈する。該貯槽２には、フッ素含有
水を粒状炭酸カルシウム充填塔４へ送液するための配管
５と、充填塔４から出た処理水を貯槽２へ返送するため
の循環用配管６が設けられている。また、送液用配管５
及び循環用配管６には、充填塔４を自在に着脱しうるよ
うに、循環ポンプ７を貯槽２側に付設する場合は、それ
ぞれワンタッチジョイント（例えばカプラ）やクランプ
バンドＢ,Ｂ'が設けられ、一方、ポンプ７を充填塔４側
に付設する場合はワンタッチジョイント（例えばカプ
ラ）やクランプバンドＡ,Ａ'が設けられるが、この場合
でも充填塔４のみを再生工場に持ち運びができるよう
に、Ｂ,Ｂ'も設けるのが望ましい。The present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a schematic diagram showing an example of the treatment apparatus for fluorine-containing water of the present invention. First, the fluorine-containing water 1 is put into a fluorine-containing water storage tank 2. The composition of fluorine may be either hydrogen fluoride type or ammonium fluoride type, but the removal rate is lowered when the concentration of fluorine becomes high, so it is usually 50 g · F / liter or less, preferably 25 g.
-Dilute with deionized water 3 such as demineralized water or tap water so that the amount becomes F / liter or less. The storage tank 2 is provided with a pipe 5 for sending fluorine-containing water to the granular calcium carbonate packed tower 4, and a circulation pipe 6 for returning the treated water discharged from the packed tower 4 to the storage tank 2. There is. Also, the liquid delivery pipe 5
When the circulation pump 7 is attached to the storage tank 2 side so that the packed tower 4 can be freely attached and detached, the circulation pipe 6 is provided with a one-touch joint (for example, a coupler) or clamp bands B and B '. On the other hand, when the pump 7 is attached to the packed tower 4 side, a one-touch joint (for example, a coupler) and clamp bands A and A'are provided, but even in this case, only the packed tower 4 can be carried to the regeneration plant. It is desirable to provide B and B '.
【０００６】充填塔４は、密開型上向流で通液循環する
構造が有利である。下向流通液としてもよいが、この場
合、反応によって二酸化炭素ガスが発生して、塔内が水
切れ状態となるおそれがあるので上向流の方が望まし
い。また、充填塔４は開放型でもよいが、反応によって
はアンモニアガスを生成することがあるので、ガス、液
をともに貯槽２へ流入させ、ここでガス分離するのがよ
い。さらに、充填塔内の粒状炭酸カルシウムが流動化す
るように、充填塔下部から空気を吹き込むのもよい（図
示せず）。該粒状炭酸カルシウムの粒子径は０.１〜０.
５mmの範囲にあるのが望ましい。[0006] The packed column 4 is advantageously of a structure in which the liquid is circulated in a close-open upward flow. A downward flowing liquid may be used, but in this case, an upward flow is preferable because carbon dioxide gas may be generated by the reaction and the inside of the tower may be drained. Although the packed tower 4 may be an open type, ammonia gas may be generated depending on the reaction, so it is preferable that both the gas and the liquid flow into the storage tank 2 and the gas is separated here. Further, air may be blown from the lower part of the packed tower so that the granular calcium carbonate in the packed tower is fluidized (not shown). The particle size of the granular calcium carbonate is 0.1 to 0.1.
It is desirable to be in the range of 5 mm.
【０００７】また、充填塔内の炭酸カルシウムがフッ化
カルシウムに完全に変換したことを、例えば入口及び出
口液のフッ素濃度から判断して、炭酸カルシウム充填塔
を新しい炭酸カルシウム充填塔と入れ替える。この際、
充填塔内に貯留している液は有害であるので、空気など
で置換（図示せず）後に、洗浄水で洗浄するのがよい。
この洗浄水は炭酸カルシウム量に対して５重量倍以下程
度でよく、また貯槽２に戻してもよいし、フッ素濃度が
低いので総合廃水系へ排出してもよい。次に、貯槽２内
のフッ素濃度が低下し、処理ができたことを確認してか
ら排出する（図示せず）。該フッ素濃度を確認するため
には、貯槽内が均一化するように機械撹拌や空気撹拌を
行うのが望ましい。その場合、空気撹拌の方がアンモニ
アガスの放出により、炭酸カルシウム接触時の反応が促
進し、処理水の水質がよくなるので有利である。また、
炭酸カルシウム充填塔の材質については、フッ素や酸に
より腐食されないものであればよく、特に制限はない。
さらに、該炭酸カルシウム充填塔は２塔以上の直列通液
が好ましく、また、処理液排水やろ材流動化のために間
欠通液としてもよい。Further, it is judged that the calcium carbonate in the packed column is completely converted to calcium fluoride, for example, by judging from the fluorine concentration of the inlet and outlet liquids, and the calcium carbonate packed column is replaced with a new calcium carbonate packed column. On this occasion,
Since the liquid stored in the packed tower is harmful, it is preferable to wash it with washing water after replacing it with air or the like (not shown).
This wash water may be about 5 times or less by weight the amount of calcium carbonate, and may be returned to the storage tank 2 or may be discharged to the integrated wastewater system because it has a low fluorine concentration. Next, it is discharged after confirming that the fluorine concentration in the storage tank 2 has decreased and the treatment has been completed (not shown). In order to confirm the fluorine concentration, it is desirable to carry out mechanical stirring or air stirring so that the inside of the storage tank becomes uniform. In this case, air agitation is advantageous because the release of ammonia gas promotes the reaction upon contact with calcium carbonate and improves the quality of treated water. Also,
The material for the calcium carbonate packed tower is not particularly limited as long as it is not corroded by fluorine or acid.
Further, the calcium carbonate packed column preferably has two or more serial liquid passages, and may be an intermittent liquid passage for draining the treatment liquid or fluidizing the filter medium.
【０００８】[0008]
【実施例】次に実施例により本発明をさらに詳細に説明
するが、本発明はこれらの例によってなんら限定される
ものではない。EXAMPLES The present invention will be described in more detail by way of examples, which should not be construed as limiting the invention thereto.
【０００９】実施例１
図１においてＢ,Ｂ'部にカプラを設けた試験装置を用い
て実施した。試薬ＮＨ4Ｆ及びＨ2ＳｉＦ６を溶解した１
０００mlのフッ素含有水をそれぞれ調製した。０.３２m
m径の炭酸カルシウム粒子を充填したカラムに、上記フ
ッ素含有水を上向流でＳＶ１２（１２００ml／hr）の流
速で通液し、その処理液を原液タンクに戻し循環して１
２時間後の原液タンク（処理液タンク）内のフッ素濃度
を分析した。その結果、ＮＨ4Ｆ水溶液の場合、循環前
にはpHが６.６及びＦ濃度が２７,５００mg／リットルあ
ったものが１２時間循環後にはそれぞれ９.０及び１,２
５０mg／リットルとなった。また、Ｈ2ＳｉＦ６水溶液
の場合、循環前にはpHが１.０及びＦ濃度が１１,３００
mg／リットルあったものが、１２時間循環後には、それ
ぞれ２.８および３５０mg／リットルとなった。なお、
ＳＶ１２で１２時間循環したので、一過式に換算すると
ＳＶ１で１時間通液したことに相当する。Example 1 In FIG. 1, a test apparatus having couplers at B and B'sections was used. Reagents NH 4 F and H 2 SiF 6 were dissolved 1
000 ml of each water containing fluorine was prepared. 0.32m
The fluorine-containing water was passed through the column packed with m-diameter calcium carbonate particles at an upflow rate of SV12 (1200 ml / hr), and the treated solution was returned to the stock solution tank and circulated.
The fluorine concentration in the stock solution tank (treatment solution tank) after 2 hours was analyzed. As a result, in the case of the NH 4 F aqueous solution, the one having a pH of 6.6 and the F concentration of 27,500 mg / liter before the circulation was 9.0 and 1.2 after the circulation for 12 hours, respectively.
It became 50 mg / liter. Further, in the case of H 2 SiF 6 aqueous solution, the pH was 1.0 and the F concentration was 11,300 before the circulation.
What was in mg / liter was 2.8 and 350 mg / liter after 12 hours of circulation, respectively. In addition,
Since the solution was circulated for 12 hours at SV12, it is equivalent to passing the solution at SV1 for 1 hour when converted into a transient type.
【００１０】比較例１
実施例１において、フッ素含有水の流速をＳＶ１（１０
０ml／hr）とし、かつ一過式で１時間通液したこと以外
は、実施例１と同様にして実施した。その結果、ＮＨ4
Ｆ水溶液の場合、１時間通液後にはpHは９.０、Ｆ濃度
は２,５００mg／リットルとなった。また、Ｈ2ＳｉＦ6
水溶液の場合、１時間通液後にはpHは２.５、Ｆ濃度は
５９０mg／リットルとなった。Comparative Example 1 In Example 1, the flow rate of the fluorine-containing water was changed to SV1 (10
It was carried out in the same manner as in Example 1 except that the flow rate was set to 0 ml / hr) and the solution was passed through for 1 hour in a transient system. As a result, NH 4
In the case of the F aqueous solution, the pH was 9.0 and the F concentration was 2,500 mg / liter after 1 hour of passage. In addition, H 2 SiF 6
In the case of an aqueous solution, the pH was 2.5 and the F concentration was 590 mg / liter after 1 hour of passage.
【００１１】[0011]
【発明の効果】本発明によると、半導体製造分野などか
ら排出されるフッ素含有廃液をそれぞれ個別に処理する
ことにより、フッ化カルシウム純度に悪影響を及ぼすも
のを容易に除外でき、高品質のフッ化カルシウムが得ら
れるとともに、原液組成濃度が安定するので運転管理が
容易である。また、処理水質を確認して排出できるの
で、処理が確実であり、総合廃水系への濃度負荷が小さ
く、安定化をもたらす。さらに、大がかりな配管工事が
不要で、経済的に有利である。本発明装置は、特に少量
発生する濃厚系フッ素含有廃液に適用するのが有利であ
るが、半導体製造工程から排出される他の小規模なフッ
素含有廃液の処理にも適用できる。According to the present invention, by individually treating the fluorine-containing waste liquids discharged from the field of semiconductor manufacturing and the like, it is possible to easily exclude those which adversely affect the purity of calcium fluoride, and to obtain high-quality fluoride. Since calcium is obtained and the composition concentration of the stock solution is stable, operation management is easy. In addition, since the quality of treated water can be confirmed and discharged, the treatment is reliable, the concentration load on the integrated wastewater system is small, and stabilization is brought about. Further, it does not require large-scale piping work, which is economically advantageous. The apparatus of the present invention is particularly advantageous when applied to a concentrated fluorine-containing waste liquid that is generated in a small amount, but can also be applied to the treatment of other small-scale fluorine-containing waste liquid discharged from the semiconductor manufacturing process.
【図１】図１は本発明のフッ素含有水用処理装置の１例
を示す概略図である。FIG. 1 is a schematic view showing an example of a treatment apparatus for fluorine-containing water according to the present invention.
１ フッ素含有水 ２ フッ素含有水貯槽 ４ 粒状炭酸カルシウム充填塔 Ａ ワンタッチジョイント Ａ' ワンタッチジョイント Ｂ ワンタッチジョイント Ｂ' ワンタッチジョイント 1 Fluorine-containing water 2 Fluorine-containing water storage tank 4 Granular calcium carbonate packed tower A One-touch joint A'One-touch joint B One-touch joint B'One-touch joint
フロントページの続き (72)発明者 高土居 忠 東京都新宿区西新宿３丁目４番７号 栗 田工業株式会社内 (72)発明者 三木 正博 大阪府大阪市阿倍野区帝塚山一丁目23番 14−521 (72)発明者 福留 敏郎 大阪府南河内郡千早赤阪村大字小吹68− 335 (72)発明者 前野 又五郎 大阪府和泉市光明台２−42−６ (56)参考文献 特開 昭50−127872（ＪＰ，Ａ) 特開 昭53−64956（ＪＰ，Ａ) 特開 昭48−32357（ＪＰ，Ａ) 特開 昭50−10798（ＪＰ，Ａ) 特開 昭54−7762（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C02F 1/58 Front page continued (72) Inventor Tadashi Takadoi 3-4-7 Nishishinjuku, Shinjuku-ku, Tokyo Kurita Industry Co., Ltd. (72) Inventor Masahiro Miki 1-23-14 Teizukayama, Abeno-ku, Osaka-shi, Osaka Prefecture 521 (72) Inventor Toshiro Fukudome 68-335 Kobuki, Chihaya Akasaka-mura, Minamikawachi-gun, Osaka Prefecture 72-42 (72) Inventor Matagoro Maeno 2-42-6 Mitsumeidai, Izumi City, Osaka Prefecture (56) Reference Japanese Patent Laid-Open No. 50- 127872 (JP, A) JP 53-64956 (JP, A) JP 48-32357 (JP, A) JP 50-10798 (JP, A) JP 54-7762 (JP, A) (58) Fields surveyed (Int.Cl. 7 , DB name) C02F 1/58
Claims (2)
のフッ素含有廃水を貯めて、空気撹拌を行う貯槽と、粒
状炭酸カルシウム充填塔と、該貯槽からフッ素含有水を
上向流で充填塔へ送液するための送液用配管と、充填塔
から出た処理水を該貯槽へ返送するための循環用配管と
からなり、該送液用配管及び該循環用配管には、ワンタ
ッチジョイント又はクランプバンドを設けることによ
り、粒状炭酸カルシウム充填塔を着脱自在に構成するこ
とを特徴とするフッ素含有水用処理装置。1. A storage tank for storing fluorine-containing wastewater from an etching process using an etching agent and stirring the air , a granular calcium carbonate packed tower, and the fluorine-containing water sent from the tank to the packed tower in an upward flow. A liquid supply pipe for liquefying, and a circulation pipe for returning the treated water discharged from the packed tower to the storage tank
The liquid supply pipe and the circulation pipe are
A joint or clamp band
The granular calcium carbonate packed tower can be configured to be removable.
And a fluorine-containing water treatment device.
希釈されたフッ素含有廃水を貯留するものである請求項
１記載のフッ素含有水用処理装置。2. The fluorine-containing water treatment device according to claim 1, wherein the fluorine-containing wastewater storage tank stores the fluorine-containing wastewater diluted to 25 g / L or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24730792A JP3375154B2 (en) | 1992-08-24 | 1992-08-24 | Fluorine-containing water treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24730792A JP3375154B2 (en) | 1992-08-24 | 1992-08-24 | Fluorine-containing water treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0663561A JPH0663561A (en) | 1994-03-08 |
| JP3375154B2 true JP3375154B2 (en) | 2003-02-10 |
Family
ID=17161468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24730792A Expired - Lifetime JP3375154B2 (en) | 1992-08-24 | 1992-08-24 | Fluorine-containing water treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3375154B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9868656B2 (en) | 2011-12-28 | 2018-01-16 | Mitsubishi Heavy Industries Mechatronics Systems | Wastewater treatment device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2600569B2 (en) * | 1993-03-09 | 1997-04-16 | 栗田工業株式会社 | Treatment method for fluorine-containing water |
| JPH08148457A (en) * | 1994-11-15 | 1996-06-07 | Tadahiro Omi | Wet station, wet cleaning method using the same and device thereof |
| JP5002884B2 (en) * | 2003-07-02 | 2012-08-15 | トヨタ自動車株式会社 | Polymer electrolyte fuel cell system |
| JP5141161B2 (en) * | 2007-09-27 | 2013-02-13 | セイコーエプソン株式会社 | Waste liquid treatment equipment |
-
1992
- 1992-08-24 JP JP24730792A patent/JP3375154B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9868656B2 (en) | 2011-12-28 | 2018-01-16 | Mitsubishi Heavy Industries Mechatronics Systems | Wastewater treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0663561A (en) | 1994-03-08 |
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