JP3374801B2 - Gas treatment equipment - Google Patents

Gas treatment equipment

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Publication number
JP3374801B2
JP3374801B2 JP26530099A JP26530099A JP3374801B2 JP 3374801 B2 JP3374801 B2 JP 3374801B2 JP 26530099 A JP26530099 A JP 26530099A JP 26530099 A JP26530099 A JP 26530099A JP 3374801 B2 JP3374801 B2 JP 3374801B2
Authority
JP
Japan
Prior art keywords
gas
water tank
exhaust duct
water
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26530099A
Other languages
Japanese (ja)
Other versions
JP2001079336A (en
Inventor
忍 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP26530099A priority Critical patent/JP3374801B2/en
Publication of JP2001079336A publication Critical patent/JP2001079336A/en
Application granted granted Critical
Publication of JP3374801B2 publication Critical patent/JP3374801B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Treating Waste Gases (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、ガス処理装置に関
するものである。
TECHNICAL FIELD The present invention relates to a gas treatment device.

【0002】[0002]

【従来の技術】従来例に係るガス処理装置は図3に示す
ように、洗浄塔23内の酸排気入口26より上方に排気
処理用充填物25が設置され、散布管24から排気処理
用充填物25に散水が行われるようになっており、洗浄
塔23の底部に廃水管27が接続されている。また洗浄
塔23の清浄空気出口28から送風ファン22により清
浄空気が排出されるようになっている。
2. Description of the Related Art As shown in FIG. 3, a gas treatment apparatus according to a conventional example has an exhaust treatment filler 25 installed above an acid exhaust inlet 26 in a cleaning tower 23, and a spray pipe 24 is used for exhaust treatment charge. The object 25 is sprinkled, and a waste water pipe 27 is connected to the bottom of the washing tower 23. Further, clean air is discharged from the clean air outlet 28 of the washing tower 23 by the blower fan 22.

【0003】また洗浄塔23内の廃水の一部は、貯留槽
33に帰還され、また貯留槽33の補給水入口32には
補給管31が接続されている。また貯留槽33には薬品
注入装置30が取付け、貯留槽33から循環ポンプ29
にて排気処理用充填物25に散水が行われる。
A part of the waste water in the cleaning tower 23 is returned to the storage tank 33, and the supply water inlet 32 of the storage tank 33 is connected to a supply pipe 31. Further, the chemical injection device 30 is attached to the storage tank 33, and the circulation pump 29 is connected from the storage tank 33.
At the exhaust treatment filler 25, water is sprinkled.

【0004】以上のように従来例に係るガス処理装置は
図3に示すように、処理ガスを無機ハロゲン化ガスとし
て取扱うものであり、例えばSiF4ガスをガスとして
吸着処理する、或いは空気と混合して排気処理するよう
になっている。
As described above, the gas treating apparatus according to the conventional example handles the treating gas as an inorganic halogenated gas as shown in FIG. 3, and, for example, adsorbs SiF 4 gas as a gas or mixes it with air. Then, the exhaust is processed.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、図3に
示す従来例に係るガス処理装置では、例えばSiF4
スは、気液接触部分(排気処理用充填物25及び循環ポ
ンプ29による散水)で反応しきれなかったH2Si
6,洗浄塔23の洗浄水によって生成される副生成物
であるNaSiF6,(NH42SiF6などが後段の送
風ファン22に析出して、送風ファン22を停止させる
という問題がある。
However, in the gas treatment apparatus according to the conventional example shown in FIG. 3, for example, SiF 4 gas reacts at the gas-liquid contact portion (exhaust treatment filling 25 and water spray by the circulation pump 29). H 2 Si that could not be exhausted
There is a problem that F 6 and NaSiF 6 , (NH 4 ) 2 SiF 6 , which are by-products generated by the cleaning water of the cleaning tower 23, deposit on the blower fan 22 in the subsequent stage and stop the blower fan 22. .

【0006】本発明の目的は、洗浄塔でのガス処理を効
率的に行い、また洗浄塔への負荷軽減および生成物析出
を防止するガス処理装置を提供することにある。
An object of the present invention is to provide a gas treatment device which efficiently performs gas treatment in the washing tower, reduces the load on the washing tower, and prevents product precipitation.

【0007】[0007]

【課題を解決するための手段】前記目的を達成するた
め、本発明に係るガス処理装置は、処理対象のガスを流
動させる排気ダクトを備え、排気ダクトの下部に水槽を
取付け、 排気ダクトの天井側に複数の上部ローラをガス
流に沿って設置し、かつ水槽内にも複数の下部ローラを
設置し、 上部ローラと下部ローラに無端状の織布を掛渡
し、下部ローラ部で織布を水槽内の洗浄水に浸漬し、ガ
ス流方向の最終段の下部ローラから初段の下部ローラに
水槽内で織布を導き、水槽から繰出された濡れた織布を
排気ダクト内と水槽内とに交互に移動可能にローラで誘
導して蛇行させ、織布を折返して排気ダクト内に複数段
に設置し、 排気ダクトのガス流の上流側に散水管を設置
し、排気ダクトの下流側に清浄空気出口を配置し、 処理
対象のガスを、排気ダクト内に導入して、まず処理対象
のガスに散布管からの散布水を強制的に接触させて加水
分解反応を起こし、その反応生成物を複数段の濡れた織
布に次々に接触させて捕獲し、この織布に捕獲した反応
生成物を水槽の溶液にて溶解させて除去するよにしたも
のである。また、前記水槽内を多段に分割し、分割され
た各水槽内に前記複数の下部ローラの各々を配置し、前
記複数の上部ローラの各々に隣接して散布管をそれぞれ
設置し、隣接する後段の分割された水槽から前段の散布
管にポンプにより送水するようにし、処理ガスと散布管
からの散布水との反応および処理ガスと濡れた織布との
反応を複数回繰返して行うものである。
In order to achieve the above-mentioned object, a gas processing apparatus according to the present invention is designed to flow a gas to be processed.
Equipped with a moving exhaust duct, a water tank under the exhaust duct
Install and install multiple upper rollers on the ceiling side of the exhaust duct.
It is installed along the flow, and multiple lower rollers are installed in the water tank.
Installed and hung an endless woven cloth on the upper roller and lower roller
Immerse the woven cloth in the water in the water tank at the lower roller, and
From the last lower roller in the flow direction to the first lower roller
Guide the woven cloth in the water tank, and remove the wet woven cloth from the water tank.
Induced by rollers so that it can move alternately between the exhaust duct and the water tank.
Guide it to meander, fold back the woven fabric and put it in multiple stages in the exhaust duct.
Installed in the water, and a sprinkler pipe installed upstream of the gas flow in the exhaust duct.
The clean air outlet on the downstream side of the exhaust duct for processing.
The target gas is introduced into the exhaust duct, and first , the sprayed water from the spray pipe is forcibly brought into contact with the gas to be treated to cause a hydrolysis reaction, and the reaction product is wetted in multiple stages.
Reactions that were captured by contacting the fabric one after another and captured on this woven fabric
The product is dissolved in a solution in a water tank and removed. In addition, the water tank is divided into multiple stages
Place each of the plurality of lower rollers in each water tank,
Note Spreading tubes adjacent to each of the upper rollers.
Installed and sprayed from the adjacent divided water tank in the rear stage to the front stage
Make sure to pump water to the pipe, process gas and spray pipe
From water and reaction of treated gas with wet woven fabric
The reaction is repeated a plurality of times.

【0008】[0008]

【発明の実施の形態】以下、本発明の実施の形態を図に
より説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

【0009】(実施形態1)図1は、本発明の実施形態
1に係るガス処理装置を示す構成図である。
(First Embodiment) FIG. 1 is a block diagram showing a gas treatment apparatus according to a first embodiment of the present invention.

【0010】図1に示す本発明の実施形態1に係るガス
処理装置は、処理対象のガスを流動させる排気ダクト1
5を備えており、排気ダクト15の下部に水槽14を取
付けている。
The gas treatment apparatus according to the first embodiment of the present invention shown in FIG. 1 is an exhaust duct 1 for flowing a gas to be treated.
5, the water tank 14 is attached to the lower portion of the exhaust duct 15.

【0011】さらに排気ダクト15の天井側にローラ1
6a,16a,16a・・・をガス流に沿って設置し、
かつ水槽14内にローラ16b,16b・・・と方向転
換用ローラ16c,16dを設置している。
Further, the roller 1 is provided on the ceiling side of the exhaust duct 15.
6a, 16a, 16a ... are installed along the gas flow,
Further, rollers 16b, 16b ... And direction changing rollers 16c, 16d are installed in the water tank 14.

【0012】そして、ローラ16a,16a,16a、
16b,16b、方向転換用ローラ16c,16dに無
端状の織布17を掛渡し、織布17を水槽14内の洗浄
水S内に浸漬し、方向転換用ローラ16cで方向転換さ
れて水槽14から繰出された織布17を排気ダクト15
内と水槽14内とに交互に移動可能にローラ16a,1
6bで誘導して蛇行させ、織布17を折返して排気ダク
ト15内に複数段に設置している。
The rollers 16a, 16a, 16a,
16b, 16b, the endless woven cloth 17 is hung on the direction changing rollers 16c, 16d, the woven cloth 17 is immersed in the cleaning water S in the water tank 14, and the direction changing roller 16c changes the direction. The woven fabric 17 fed from the exhaust duct 15
The rollers 16a, 1 can be moved alternately in the water tank 14 and in the water tank 14.
6b is guided and meandered, the woven fabric 17 is folded back and installed in the exhaust duct 15 in a plurality of stages.

【0013】また排気ダクト15の上流側に散水管11
を設置し、排気ダクト15の下流側に清浄空気出口18
を配置している。織布17は、散布管11から散布した
水の飛散防止と気液接触触媒を兼ねている。
The sprinkler pipe 11 is provided upstream of the exhaust duct 15.
Is installed and the clean air outlet 18 is provided on the downstream side of the exhaust duct 15.
Are arranged. The woven cloth 17 serves both as a gas-liquid contact catalyst and as a splash preventer for the water sprayed from the spray pipe 11.

【0014】また水槽14には余剰水を排出する廃水管
19が接続され、廃水管19の廃水出口20から余剰水
を廃水するようになっている。
A waste water pipe 19 for discharging excess water is connected to the water tank 14, and the excess water is discharged from a waste water outlet 20 of the waste water pipe 19.

【0015】次に、本発明の実施形態1に係るガス処理
装置を使用して処理対象のガスを処理する方法について
説明する。本発明の実施形態1に係るガス処理方法で
は、処理対象のガスとしてSiF4ガスを用いた場合を
例にとって説明する。
Next, a method for treating the gas to be treated by using the gas treating apparatus according to the first embodiment of the present invention will be described. In the gas processing method according to the first embodiment of the present invention, a case where SiF 4 gas is used as a gas to be processed will be described as an example.

【0016】SiF4ガスは、空気と混合すると空気中
の水分と反応して一部は以下のような反応が起こる。 3SiF4+4H2O→2H2SiF6+Si(OH)4 したがって、排気ガス入口13から排気ダクト15内に
導入されるガスの中には、の反応式で混合物とSiF
4ガスとが混在している。
When SiF 4 gas is mixed with air, it reacts with moisture in the air, and a part of the following reactions occur. 3SiF 4 + 4H 2 O → 2H 2 SiF 6 + Si (OH) 4 Therefore, in the gas introduced from the exhaust gas inlet 13 into the exhaust duct 15, the mixture and SiF
Mixed with 4 gases.

【0017】排気ガス入口13から排気ダクト15内に
導入されたSiF4ガスは、まず散布管11から散布さ
れた水と激しく反応してふっ化水素酸(HF)とケイ酸
(SiO2)を生じる。
The SiF 4 gas introduced from the exhaust gas inlet 13 into the exhaust duct 15 first reacts violently with the water sprayed from the spray pipe 11 to produce hydrofluoric acid (HF) and silicic acid (SiO 2 ). Occurs.

【0018】の反応式で生成した混合物に、このふっ
化水素酸が作用して多量のH2SiF6が生成される。ま
た、以下の反応も同時進行する。 4HF+SiO2→SiF4+2H2O 2HF+SiF4→H2SiF6 さらに散布管11からの散布水領域を通過した処理ガス
は排気ダクト15内に送込まれ、折返して排気ダクト1
5内に複数段に設置された、濡れた織布17に次々に接
触する。
The hydrofluoric acid acts on the mixture formed by the reaction formula (1) to produce a large amount of H 2 SiF 6 . The following reactions also proceed simultaneously. 4HF + SiO 2 → SiF 4 + 2H 2 O 2HF + SiF 4 → H 2 SiF 6 Further, the processing gas that has passed through the sprayed water region from the spray pipe 11 is sent into the exhaust duct 15 and is turned back to the exhaust duct 1.
The wet woven fabrics 17, which are installed in a plurality of stages in the No. 5, are brought into contact with each other one after another.

【0019】処理ガスと散布管11からの散布水との反
応、処理ガスと濡れた織布17との反応は全て発熱反応
であるため、散布水の吸熱反応(蒸発熱)効果及び織布
付着水の吸熱反応(蒸発熱)効果により更に反応は加速
する。
Since the reaction between the treatment gas and the spray water from the spray pipe 11 and the reaction between the treatment gas and the wet woven cloth 17 are all exothermic reactions, the endothermic reaction (evaporation heat) effect of the spray water and the cloth adhesion The reaction is further accelerated by the endothermic reaction (heat of evaporation) of water.

【0020】これらの反応により生成されたH2SiF6
は、後段の織布17に付着し、織布17はローラ16
a,16bによって水槽14内に導かれ、織布17に付
着したH2SiF6は、水槽17内の水に溶解することに
よって除去される。
The H 2 SiF 6 produced by these reactions
Adheres to the woven cloth 17 in the subsequent stage, and the woven cloth 17 is the roller 16
The H 2 SiF 6 introduced into the water tank 14 by the a and 16b and adhering to the woven cloth 17 is removed by dissolving it in the water in the water tank 17.

【0021】また水槽14内の水は散布管11からの散
布水により常に補給されるため、余剰水は廃水出口20
から排出される。
Further, since the water in the water tank 14 is constantly replenished by the spray water from the spray pipe 11, the surplus water is the waste water outlet 20.
Emitted from.

【0022】以上のように本発明の実施形態1は、例え
ばSiF4ガスの排気が行われる洗浄塔の前段(図3参
照)に設置することにより、効率的にSiF4ガスを処
理し得る。また洗浄塔への負荷軽減及び生成物析出を防
止することにより、安定稼動に寄与することができる。
As described above, according to the first embodiment of the present invention, the SiF 4 gas can be efficiently treated by installing the SiF 4 gas at the front stage (see FIG. 3) of the washing tower in which the SiF 4 gas is exhausted. Further, it is possible to contribute to stable operation by reducing the load on the washing tower and preventing the deposition of products.

【0023】(実施形態2)図2は、本発明の実施形態
2に係るガス処理装置を示す構成図である。
(Embodiment 2) FIG. 2 is a block diagram showing a gas treatment apparatus according to Embodiment 2 of the present invention.

【0024】図2に示す本発明の実施形態2に係るガス
処理装置は、水槽14内を水槽14a,14b,14
c,14d多段に分割し、各水槽14a,14b,1
4c,14d内にローラ16c,16b1,16b2,1
6dを設置し、織布17を水槽14a内の方向転換用ロ
ーラ16cで排気ダクト15内のローラ16a1に方向
転換して掛渡し、ローラ16a1からの織布17を水槽
14内のローラ16b1に掛渡し、ローラ16b1からの
織布17を排気ダクト15内のローラ16a2に掛渡
し、ローラ16a2からの織布17を水槽14内のロー
ラ16b2に掛渡し、ローラ16b2からの織布17を排
気ダクト15内のローラ16a3に掛渡し、ローラ16
a3からの織布17を水槽14内のローラ16dに掛渡
すことにより無端状に配置している。
In the gas treatment device according to the second embodiment of the present invention shown in FIG. 2, the inside of the water tank 14 is filled with water tanks 14a, 14b, 14
c, 14d divided into multiple stages , and each water tank 14a, 14b, 1
Rollers 16c, 16b1, 16b2, 1 in 4c, 14d
6d is installed, the woven cloth 17 is diverted by the direction changing roller 16c in the water tank 14a to the roller 16a1 in the exhaust duct 15, and the woven cloth 17 from the roller 16a1 is hung on the roller 16b1 in the water tank 14. The woven cloth 17 from the roller 16b1 is hung on the roller 16a2 in the exhaust duct 15, the woven cloth 17 from the roller 16a2 is hung on the roller 16b2 in the water tank 14, and the woven cloth 17 from the roller 16b2 is laid on the exhaust duct 15 Rolled over the inner roller 16a3, the roller 16
The woven fabric 17 from a3 is placed endlessly by hanging it over the roller 16d in the water tank 14.

【0025】さらに排気ダクト15内の天井側に設置し
たローラ16a1,16a2,16a3,16a4に隣接し
て散布管11a,11b,11c,11dをそれぞれ設
置し、後段の水槽から前段の散布管に水をポンプ21
a,21bにより送水するようにしたものである。
Further, spraying pipes 11a, 11b, 11c, 11d are installed adjacent to the rollers 16a1, 16a2, 16a3, 16a4 installed on the ceiling side in the exhaust duct 15, respectively, and water is supplied from the water tank in the latter stage to the spray pipe in the former stage. Pump 21
Water is supplied by a and 21b.

【0026】図2に示す本発明の実施形態2に係るガス
処理装置によれば、処理ガスと散布管からの散布水との
反応、処理ガスと濡れた織布との反応を複数回繰返して
行うことができ、反応の遅いガスも効率的に除去処理す
ることができるという利点を有する。
According to the gas treatment apparatus according to the second embodiment of the present invention shown in FIG. 2, the reaction between the treatment gas and the spray water from the spray pipe and the reaction between the treatment gas and the wet woven fabric are repeated a plurality of times. It can be carried out, and has an advantage that a gas having a slow reaction can be efficiently removed.

【0027】[0027]

【発明の効果】以上のように本発明によれば、処理ガス
と散布水との反応、処理ガスと濡れた織布との反応を組
合せて行うため、これらの反応は全て発熱反応であり、
散布水の吸熱反応(蒸発熱)効果及び織布付着水の吸熱
反応(蒸発熱)効果により更に反応は加速させて行うこ
とができる。
As described above, according to the present invention, since the reaction of the treated gas with the sprayed water and the reaction of the treated gas with the wet woven fabric are performed in combination, all of these reactions are exothermic reactions.
The reaction can be further accelerated by the endothermic reaction (evaporation heat) effect of the sprayed water and the endothermic reaction (evaporation heat) effect of the woven fabric-attached water.

【0028】したがって図3に示すような洗浄塔の前段
に設置することにより、効率的にガスを処理することが
でき、洗浄塔への負荷軽減及び生成物析出を防止するこ
とにより、安定稼動に寄与することができる。
Therefore, the gas can be efficiently treated by installing it in the front stage of the washing tower as shown in FIG. 3, and the load on the washing tower can be reduced and the precipitation of the product can be prevented to ensure stable operation. Can contribute.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施形態1に係るガス処理装置を示す
構成図である。
FIG. 1 is a configuration diagram showing a gas treatment device according to a first embodiment of the present invention.

【図2】本発明の実施形態2に係るガス処理装置を示す
構成図である。
FIG. 2 is a configuration diagram showing a gas treatment device according to a second embodiment of the present invention.

【図3】従来例に係るガス処理装置を示す構成図であ
る。
FIG. 3 is a configuration diagram showing a gas treatment device according to a conventional example.

【符号の説明】[Explanation of symbols]

11 散水管 14 水槽 15 排気ダクト 17 織布 11 Sprinkling pipe 14 aquarium 15 Exhaust duct 17 Woven cloth

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 処理対象のガスを流動させる排気ダクト
を備え、排気ダクトの下部に水槽を取付け、 排気ダクトの天井側に複数の上部ローラをガス流に沿っ
て設置し、かつ水槽内にも複数の下部ローラを設置し、 上部ローラと下部ローラに無端状の織布を掛渡し、下部
ローラ部で織布を水槽内の洗浄水に浸漬し、ガス流方向
の最終段の下部ローラから初段の下部ローラに水槽内で
織布を導き、水槽から繰出された濡れた織布を排気ダク
ト内と水槽内とに交互に移動可能にローラで誘導して蛇
行させ、織布を折返して排気ダクト内に複数段に設置
し、排気ダクトのガス流の上流側に散水管を設置し、排気ダ
クトの下流側に清浄空気出口を配置し、 処理対象のガスを、排気ダクト内に導入して、まず 処理
対象のガスに散布管からの散布水を強制的に接触させて
加水分解反応を起こし、その反応生成物を複数段の濡れ
た織布に次々に接触させて捕獲し、この織布に捕獲した
反応生成物を水槽の溶液にて溶解させて除去するように
したことを特徴とするガス処理装置。
1. An exhaust duct for flowing a gas to be treated.
The provided, only mounting the water tank at the bottom of the exhaust duct, a plurality of upper rollers on the ceiling side of the exhaust duct is placed along the gas stream, and also installing a plurality of bottom rollers in the water tank, the upper roller and the lower roller Endless woven fabric is hung on the bottom, the woven fabric is immersed in the cleaning water in the water tank at the lower roller, and the woven cloth is guided from the last lower roller in the gas flow direction to the first lower roller in the water tank. The wet woven fabric fed out from the guide is meandered by rollers so that it can be moved alternately in the exhaust duct and the water tank, and the woven fabric is folded back and installed in multiple stages in the exhaust duct, and the gas flow in the exhaust duct is set. Install a sprinkler pipe on the upstream side of the
The clean air outlet is located on the downstream side, and the gas to be treated is introduced into the exhaust duct.First, the sprayed water from the spray pipe is forcibly brought into contact with the gas to be treated to cause a hydrolysis reaction. , Wet the reaction product in multiple stages
Captured by contacting the woven cloth one after another, and captured on this woven cloth
A gas treatment device, characterized in that a reaction product is dissolved in a solution in a water tank and removed.
【請求項2】 前記水槽内を多段に分割し、分割された
各水槽内に前記複数の下部ローラの各々を配置し、前記
複数の上部ローラの各々に隣接して散布管をそれぞれ設
置し、隣接する後段の分割された水槽から前段の散布管
にポンプにより送水するようにし、処理ガスと散布管か
らの散布水との反応および処理ガスと濡れた織布との反
応を複数回繰返して行うようにしたことを特徴とする請
求項1に記載のガス処理装置。
2. The water tank is divided into multiple stages,
Arranging each of the plurality of lower rollers in each water tank,
Install a spray tube adjacent to each of the upper rollers.
Place the adjacent divided water tank in the rear stage to the spray pipe in the front stage.
Pump water to the process gas and spray pipe.
Reaction with sprayed water and reaction between treated gas and wet woven fabric
The contract is characterized in that the response is repeated multiple times.
The gas treatment device according to claim 1.
JP26530099A 1999-09-20 1999-09-20 Gas treatment equipment Expired - Fee Related JP3374801B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26530099A JP3374801B2 (en) 1999-09-20 1999-09-20 Gas treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26530099A JP3374801B2 (en) 1999-09-20 1999-09-20 Gas treatment equipment

Publications (2)

Publication Number Publication Date
JP2001079336A JP2001079336A (en) 2001-03-27
JP3374801B2 true JP3374801B2 (en) 2003-02-10

Family

ID=17415295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26530099A Expired - Fee Related JP3374801B2 (en) 1999-09-20 1999-09-20 Gas treatment equipment

Country Status (1)

Country Link
JP (1) JP3374801B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602004027914D1 (en) 2003-07-10 2010-08-12 Takasago Perfumery Co Ltd TASTING AMPLIFIER, FOOD OR BEVERAGE PRODUCT CONTAINING THE TASTING AMPLIFIER AND TASTE REINFORCING PROCESS
CN110141925A (en) * 2019-07-01 2019-08-20 金发科技股份有限公司 A kind of adsorption and sedimentation device, the system and method for the exhaust gas containing particulate matter

Also Published As

Publication number Publication date
JP2001079336A (en) 2001-03-27

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