JP3373603B2 - Bridge circuit for sensor - Google Patents
Bridge circuit for sensorInfo
- Publication number
- JP3373603B2 JP3373603B2 JP19548693A JP19548693A JP3373603B2 JP 3373603 B2 JP3373603 B2 JP 3373603B2 JP 19548693 A JP19548693 A JP 19548693A JP 19548693 A JP19548693 A JP 19548693A JP 3373603 B2 JP3373603 B2 JP 3373603B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- resistors
- sensor
- bridge
- amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、センサチップ上に抵
抗体ブリッジを形成し、各種センサとして用いるセンサ
用ブリッジ回路に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor bridge circuit in which a resistor bridge is formed on a sensor chip and used as various sensors.
【０００２】[0002]
【従来の技術】従来、例えば、磁気抵抗効果素子を使用
するセンサ回路は、図３に示すように、センサチップ１
０に形成された抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４
が、ブリッジ状に接続され、ＲＳ１，ＲＳ２の一方の側
の端子が各々電源ＶＣＣに接続され他方の端子が他の抵
抗体ＲＳ４，ＲＳ３の一方の端子に各々接続されてい
る。また、抵抗体ＲＳ４，ＲＳ３の他方の端子はＧＮＤ
に接地されている。そして、抵抗体ＲＳ２とＲＳ３及び
抵抗体ＲＳ１とＲＳ４との間から各々出力が伸びて、各
出力がアンプ１１とアンプ１２とに各々接続されてい
る。アンプ１２は、電源ＶＣＣに対して抵抗体Ｒ５，Ｒ
６間に、Ｒ１を介して接続され、アンプ１２の出力と入
力との間に抵抗体Ｒ２が接続されている。アンプ１２の
出力は、アンプ１１の入力に、抵抗体Ｒ３を介して接続
され、さらに、抵抗体Ｒ４が抵抗体Ｒ３とアンプ１１の
出力との間に接続されている。2. Description of the Related Art Conventionally, for example, a sensor circuit using a magnetoresistive effect element has a sensor chip 1 as shown in FIG.
The resistors R S1 , R S2 , R S3 , and R S4 formed in 0.
Are connected in a bridge form, one terminal of each of R S1 and R S2 is connected to the power supply V CC , and the other terminal is connected to one terminal of each of the other resistors R S4 and R S3 . . The other terminals of the resistors R S4 and R S3 are GND.
Grounded to. The outputs extend from between the resistors R S2 and R S3 and between the resistors R S1 and R S4, and the outputs are connected to the amplifier 11 and the amplifier 12, respectively. The amplifier 12 has resistors R 5 and R for the power supply V CC .
Between 6, are connected via the R 1, resistor R 2 is connected between the input and output of the amplifier 12. The output of the amplifier 12 is connected to the input of the amplifier 11 via a resistor R 3 , and the resistor R 4 is connected between the resistor R 3 and the output of the amplifier 11.
【０００３】この磁気抵抗効果素子による磁気測定方法
は、図示しない被測定物の磁気変化により、センサチッ
プ１０に形成された抵抗体ＲＳ１，ＲＳ２，ＲＳ３，Ｒ
Ｓ４の抵抗値が、その磁気変化の大きさに比例して変動
する。そして、この抵抗値の変化をブリッジ回路によっ
て検出し、増幅して出力することにより磁気を測定する
ことができるものである。In this magnetic resistance measuring method using the magnetoresistive effect element, the resistors R S1 , R S2 , R S3 , R formed on the sensor chip 10 by the magnetic change of an object to be measured (not shown).
The resistance value of S4 fluctuates in proportion to the magnitude of the magnetic change. Then, the magnetism can be measured by detecting the change in the resistance value with a bridge circuit, amplifying and outputting the amplified value.
【０００４】[0004]
【発明が解決しようとする課題】上記従来の技術におい
て、センサチップ１０に異常な力が加わったり、長期間
の使用により、上記センサチップ１０に亀裂が生じた場
合、上記各抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の
内、ＲＳ１，ＲＳ４又はＲＳ２，ＲＳ３が断線した場
合、上記抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の内の
任意の３個の抵抗体が断線した場合、及び上記抵抗体Ｒ
Ｓ１，ＲＳ２，ＲＳ３，ＲＳ４が全て断線した場合、ア
ンプ１１，１２に入力する電位が不安定となり、出力も
不安定となって一定の出力が得られず、どの部分の抵抗
体の異常であるのか特定できず、異常発生の検知ができ
ないという問題があった。In the prior art described above, when an abnormal force is applied to the sensor chip 10 or a crack is generated in the sensor chip 10 due to long-term use, the resistors R S1 , When R S1 , R S4 or R S2 , R S3 among R S2 , R S3 , R S4 is disconnected, any three resistors among the resistors R S1 , R S2 , R S3 , R S4 If the body is broken, and the resistor R
When S1 , R S2 , R S3 , and R S4 are all disconnected, the potentials input to the amplifiers 11 and 12 become unstable, the output becomes unstable, and a constant output cannot be obtained. There was a problem that it was not possible to identify whether it was abnormal and it was not possible to detect the occurrence of abnormality.
【０００５】この発明は上記従来の技術の問題点に鑑み
て成されたもので、センサチップの断線を確実に知るこ
とができるセンサ用ブリッジ回路を提供することを目的
とする。The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to provide a sensor bridge circuit capable of surely knowing a disconnection of a sensor chip.
【０００６】[0006]
【課題を解決するための手段】この発明は、センサチッ
プ上にブリッジ状に抵抗体のセンサを形成し、このブリ
ッジの互いに対向する一対の端部の一方を電源に接続し
他方をグランドに接続するとともに、他の一対の端部を
出力としてアンプに入力し、上記各抵抗体のうち互いに
対向する一対の抵抗体のみに、その抵抗体の抵抗値より
きわめて大きい抵抗値の抵抗体を各々並列に接続したセ
ンサ用ブリッジ回路である。また、上記各抵抗体のうち
電源とアンプ間に接続された一つの抵抗体とこの抵抗体
と対向する抵抗体のみに、その抵抗体の抵抗値よりきわ
めて大きい抵抗値の抵抗体を並列に接続したセンサ用ブ
リッジ回路である。According to the present invention, a resistor sensor is formed in a bridge shape on a sensor chip, one of a pair of ends of the bridge facing each other is connected to a power source, and the other is connected to a ground. At the same time, the other pair of ends is input to the amplifier as an output, and only the pair of resistors facing each other among the above resistors are connected in parallel with resistors having a resistance value extremely larger than that of the resistors. Is a bridge circuit for the sensor connected to. Also, of the above resistors, one resistor connected between the power supply and the amplifier and this resistor
This is a sensor bridge circuit in which a resistor having a resistance value extremely larger than the resistance value of the resistor is connected in parallel only to the resistor opposed to .
【０００７】[0007]
【作用】この発明のセンサ用ブリッジ回路は、ブリッジ
に組まれた各抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の
内、抵抗体ＲＳ１，ＲＳ４又はＲＳ２，ＲＳ３が断線し
た場合、上記抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の
内の任意の３個の抵抗体が断線した場合、及び上記抵抗
体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４が全て断線した場
合、その出力は、接続する高抵抗値の抵抗体の取り付け
位置によりＬ又はＨの何れかの一定の出力を示すもので
ある。In the sensor bridge circuit of the present invention, among the resistors R S1 , R S2 , R S3 and R S4 assembled in the bridge, the resistors R S1 and R S4 or R S2 and R S3 are disconnected. If, when an arbitrary three resistors of said resistor R S1, R S2, R S3 , R S4 is broken, and the resistor R S1, R S2, R S3 , R S4 is broken all In that case, the output shows a constant output of either L or H depending on the mounting position of the high-resistance resistor to be connected.
【０００８】[0008]
【実施例】この発明の実施例について図面に基づいて説
明する。図１はこの発明の第一実施例を示すもので、こ
の実施例のセンサ用ブリッジ回路は、磁気センサについ
てのもので、ガラス基板のセンサチップ１０に、磁性体
材料を蒸着し、この磁性体塗料をフォトリソグラフィー
により数ｋΩに形成された抵抗体ＲＳ１，ＲＳ２，Ｒ
Ｓ３，ＲＳ４が、ブリッジ状に接続されている。この抵
抗体ＲＳ１，ＲＳ２の各々の一方の端子が電源ＶＣＣに
接続され、他方の端子が抵抗体ＲＳ４，ＲＳ３の各々の
一方の端子に接続されている。また、抵抗体ＲＳ４，Ｒ
Ｓ３の他方の端子はＧＮＤに接地されている。そして、
抵抗体ＲＳ２とＲＳ３及びＲＳ１とＲＳ４との間から各
々出力が伸びて、各出力がアンプ１１とアンプ１２の非
反転入力端子に各々接続されている。アンプ１２の反転
入力端子には、電源ＶＣＣに対して抵抗体Ｒ５，Ｒ６間
の電位が、抵抗体Ｒ１を介して接続され、アンプ１２の
出力と反転入力端子との間には抵抗体Ｒ２が接続されて
いる。そして、アンプ１２の出力は、アンプ１１の反転
入力端子に抵抗体Ｒ３を介して接続され、さらに、アン
プ１１の出力と抵抗体Ｒ３との間に、抵抗体Ｒ４が接続
されている。Embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a first embodiment of the present invention. The sensor bridge circuit of this embodiment relates to a magnetic sensor. A magnetic material is vapor-deposited on a sensor chip 10 of a glass substrate, and the magnetic material Resistors R S1 , R S2 and R formed by photolithography to have several kΩ
S3 and R S4 are connected in a bridge shape. One terminal of each of the resistors R S1 and R S2 is connected to the power supply V CC , and the other terminal is connected to one terminal of each of the resistors R S4 and R S3 . In addition, the resistors R S4 and R
The other terminal of S3 is grounded to GND. And
Outputs extend from between the resistors R S2 and R S3 and between R S1 and R S4, and the outputs are connected to the non-inverting input terminals of the amplifier 11 and the amplifier 12, respectively. To the inverting input terminal of the amplifier 12, the potential between the resistors R 5 and R 6 is connected to the power supply V CC via the resistor R 1 , and between the output of the amplifier 12 and the inverting input terminal. The resistor R 2 is connected. The output of the amplifier 12 is connected through a resistor R 3 to the inverting input terminal of the amplifier 11, further, between the output of the amplifier 11 and the resistor R 3, the resistor R 4 is connected .
【０００９】抵抗体ＲＳ１には、数ＭΩの高抵抗値の抵
抗体Ｒ７が並列に接続され、この抵抗体ＲＳ１と対向す
る位置の抵抗体ＲＳ３にも、同様に数ＭΩの高抵抗値の
抵抗体Ｒ８が並列に接続されている。[0009] The resistor R S1, the number resistor R 7 of the high-resistance value of MΩ is connected in parallel, to the resistor R S3 position opposite to the resistor R S1, similarly high numbers MΩ A resistor R 8 having a resistance value is connected in parallel.
【００１０】この磁気抵抗効果素子を用いたセンサによ
る磁気測定方法は、従来技術と同様に、図示しない被測
定物の磁気変化により、センサチップ１０に形成された
抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の抵抗値が、磁
気変化の大きさに比例して変動する。そして、この抵抗
値の変化をブリッジ回路により検出し、アンプ１１，１
２により増幅して出力することにより磁気を測定するこ
とができるものである。A magnetic measurement method using a sensor using this magnetoresistive effect element is similar to the prior art, and the resistors R S1 , R S2 , R formed on the sensor chip 10 are caused by the magnetic change of an object to be measured (not shown). The resistance values of S3 and R S4 fluctuate in proportion to the magnitude of the magnetic change. Then, the change in the resistance value is detected by the bridge circuit, and the amplifiers 11 and 1 are connected.
It is possible to measure magnetism by amplifying by 2 and outputting.
【００１１】この実施例のセンサ用ブリッジ回路によれ
ば、ブリッジに組まれた各抵抗体ＲＳ１，ＲＳ２，Ｒ
Ｓ３，ＲＳ４の内、抵抗体ＲＳ１，ＲＳ４又はＲＳ２，
ＲＳ３が断線した場合、上記抵抗体ＲＳ１，ＲＳ２，Ｒ
Ｓ３，ＲＳ４の内の任意の３個の抵抗体が断線した場
合、及び上記抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の
全て断線した場合、アンプ１１の出力は、必ずＬｏｗ
（Ｌ）の一定の出力を示すものである。また、抵抗体Ｒ
Ｓ１，ＲＳ２，ＲＳ３，ＲＳ４の内の任意の１個の抵抗
体が断線した場合は、その抵抗体の位置により一定のＬ
又はＨｉｇｈ（Ｈ）の出力を示す。従って、センサチッ
プ１０に亀裂が生じ、抵抗体が断線した場合も、必ず一
定の出力が得られ、出力が不安定になることがなく、断
線した抵抗体の箇所を特定することができるものであ
る。また、抵抗体Ｒ７，Ｒ８は抵抗体ＲＳ１，ＲＳ２，
ＲＳ３，ＲＳ４に対してきわめて抵抗値の大きいもので
あり、測定に影響することがなく消費電力も無視するこ
とができる程度のものである。According to the sensor bridge circuit of this embodiment, the resistors R S1 , R S2 and R assembled in the bridge are arranged.
Of S3 and R S4 , resistors R S1 and R S4 or R S2 ,
When R S3 is broken, the resistors R S1 , R S2 , R
S3, if any of the three resistors of the R S4 is disconnected when, and where all disconnection of the resistor R S1, R S2, R S3 , R S4, the output of the amplifier 11 is always Low
(L) shows a constant output. In addition, the resistor R
If any one of the resistors S1 , R S2 , R S3 , and R S4 is disconnected, a constant L is generated depending on the position of the resistor.
It also indicates the output of High (H). Therefore, even if the sensor chip 10 is cracked and the resistor is disconnected, a constant output is always obtained, the output is not unstable, and the location of the disconnected resistor can be specified. is there. Further, the resistors R 7 and R 8 are resistors R S1 , R S2 ,
The resistance value is extremely large with respect to R S3 and R S4 , and does not affect the measurement, and the power consumption can be ignored.
【００１２】次にこの発明のセンサ用ブリッジ回路の第
二実施例について、図２に基づいて説明する。ここで、
上述の第一実施例と同様の部材は同一の符号を付して説
明を省略する。この実施例では、図２に示すように、互
いに対向する抵抗体ＲＳ２，ＲＳ４に各々並列に高抵抗
値の抵抗体Ｒ８，Ｒ７を各々取り付けたものである。こ
れによって、抵抗体ＲＳ１，ＲＳ４又はＲＳ２，ＲＳ３
が断線した場合、上記抵抗体ＲＳ１，ＲＳ２，ＲＳ３，
ＲＳ４の内の任意の３個の抵抗体が断線した場合、及び
上記抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の全て断線
した場合、アンプ１１の出力は、必ずＨの一定の出力を
示すものである。Next, a second embodiment of the sensor bridge circuit of the present invention will be described with reference to FIG. here,
The same members as those in the first embodiment described above are designated by the same reference numerals, and the description thereof will be omitted. In this embodiment, as shown in FIG. 2, resistors R 8 and R 7 having high resistance values are attached in parallel to the resistors R S2 and R S4 facing each other. As a result, the resistors R S1 , R S4 or R S2 , R S3
Is broken, the resistors R S1 , R S2 , R S3 ,
If any of the three resistors of the R S4 is disconnected, and when all disconnection of the resistor R S1, R S2, R S3 , R S4, the output of the amplifier 11 is always constant output of H Is shown.
【００１３】次にこの発明のセンサ用ブリッジ回路の第
三実施例について説明する。ここで、この第三実施例の
センサ用ブリッジ回路は上記第一実施例の回路と同様で
あるので、図１の回路を用いて説明する。この実施例の
センサ用ブリッジ回路は、気体の圧力センサについての
もので、Ｓｉのセンサチップ１０に、不純物を拡散させ
て数ｋΩに形成された拡散抵抗である抵抗体ＲＳ１，Ｒ
Ｓ２，ＲＳ３，ＲＳ４が、ブリッジ状に接続されてい
る。この抵抗体ＲＳ１，ＲＳ２の各々の一方の端子が電
源ＶＣＣに接続され他方の端子が抵抗体ＲＳ４，ＲＳ３
の各々の一方の端子に接続されている。また、抵抗体Ｒ
Ｓ４，ＲＳ３の他方の端子はＧＮＤに接地されている。
そして、抵抗体ＲＳ２とＲＳ３及びＲＳ１とＲＳ４との
間から各々出力が伸びて、各出力がアンプ１１とアンプ
１２の非反転入力端子に各々接続されている。アンプ１
２の反転入力端子には、電源ＶＣＣに対して抵抗体
Ｒ５，Ｒ６間の電位が、抵抗体Ｒ１を介して接続され、
アンプ１２の出力と反転入力端子との間には抵抗体Ｒ２
が接続されている。そして、アンプ１２の出力は、アン
プ１１の反転入力端子に抵抗体Ｒ３を介して接続され、
さらに、アンプ１１の出力と抵抗体Ｒ３との間に、抵抗
体Ｒ４が接続されている。Next, a third embodiment of the sensor bridge circuit of the present invention will be described. Since the sensor bridge circuit of the third embodiment is similar to the circuit of the first embodiment, the circuit of FIG. 1 will be described. The sensor bridge circuit of this embodiment is for a gas pressure sensor, and resistors R S1 , R are diffusion resistors formed in Si sensor chip 10 by diffusing impurities to several kΩ.
S2 , R S3 , and R S4 are connected in a bridge shape. One terminal of each of the resistors R S1 and R S2 is connected to the power supply V CC , and the other terminal is connected to the resistors R S4 and R S3.
Is connected to one of the terminals. In addition, the resistor R
The other terminals of S4 and R S3 are grounded to GND.
The outputs extend from between the resistors R S2 and R S3 and between R S1 and R S4, and the outputs are connected to the non-inverting input terminals of the amplifier 11 and the amplifier 12, respectively. Amplifier 1
The potential between the resistors R 5 and R 6 with respect to the power supply V CC is connected to the inverting input terminal of the resistor 2 via the resistor R 1 .
A resistor R 2 is provided between the output of the amplifier 12 and the inverting input terminal.
Are connected. The output of the amplifier 12 is connected to the inverting input terminal of the amplifier 11 via the resistor R 3 .
Further, a resistor R 4 is connected between the output of the amplifier 11 and the resistor R 3 .
【００１４】抵抗体ＲＳ１には、数ＭΩの高抵抗値の抵
抗体Ｒ７が並列に接続され、この抵抗体ＲＳ１と対向す
る位置の抵抗体ＲＳ３にも、同様に数ＭΩの高抵抗値の
抵抗体Ｒ８が並列に接続されている。[0014] The resistor R S1, the number resistor R 7 of the high-resistance value of MΩ is connected in parallel, to the resistor R S3 position opposite to the resistor R S1, similarly high numbers MΩ A resistor R 8 having a resistance value is connected in parallel.
【００１５】この半導体式圧力センサによる気体圧力測
定方法は、従来技術と同様に、図示しない被測定圧導入
部と、大気圧の導入部とからセンサチップ１０の表裏面
に各々被測定ガス圧と大気圧が加わり、大気圧と被測定
ガス圧との差により、センサチップ１０に機械的な歪を
生じる。この歪によりセンサチップ１０に形成された抵
抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の抵抗値が、歪の
大きさに比例して変化する。そして、この抵抗値の変化
をブリッジ回路により検出し、アンプ１１，１２により
増幅して出力することにより被測定ガス圧と大気圧の差
圧を測定することができるものである。This gas pressure measuring method using a semiconductor pressure sensor is similar to the prior art in that the measured pressure introduction part and the atmospheric pressure introduction part, which are not shown, are connected to the front and back surfaces of the sensor chip 10, respectively. The atmospheric pressure is applied, and the sensor chip 10 is mechanically distorted due to the difference between the atmospheric pressure and the gas pressure to be measured. Due to this strain, the resistance values of the resistors R S1 , R S2 , R S3 , and R S4 formed on the sensor chip 10 change in proportion to the magnitude of the strain. Then, the change in the resistance value is detected by the bridge circuit, amplified by the amplifiers 11 and 12 and output, and the differential pressure between the measured gas pressure and the atmospheric pressure can be measured.
【００１６】この実施例のセンサ用ブリッジ回路によれ
ば、ブリッジに組まれた各抵抗体ＲＳ１，ＲＳ２，Ｒ
Ｓ３，ＲＳ４の内、抵抗体ＲＳ１，ＲＳ４又はＲＳ２，
ＲＳ３が断線した場合、上記抵抗体ＲＳ１，ＲＳ２，Ｒ
Ｓ３，ＲＳ４の内の任意の３個の抵抗体が断線した場
合、及び上記抵抗体ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４の
全て断線した場合、アンプ１１の出力は、必ずＬｏｗ
（Ｌ）の一定の出力を示すものである。また、抵抗体Ｒ
Ｓ１，ＲＳ２，ＲＳ３，ＲＳ４の内の任意の１個の抵抗
体が断線した場合は、その抵抗体の位置により一定のＬ
又はＨｉｇｈ（Ｈ）の出力を示す。従って、センサチッ
プ１０に亀裂が生じ、抵抗体が断線した場合も、必ず一
定の出力が得られ、出力が不安定になることがなく、断
線した抵抗体の箇所を特定することができるものであ
る。また、抵抗体Ｒ７，Ｒ８は抵抗体ＲＳ１，ＲＳ２，
ＲＳ３，ＲＳ４に対してきわめて抵抗値の大きいもので
あり、測定に影響することがなく消費電力も無視するこ
とができる程度のものである。According to the sensor bridge circuit of this embodiment, the resistors R S1 , R S2 and R assembled in the bridge are arranged.
Of S3 and R S4 , resistors R S1 and R S4 or R S2 ,
When R S3 is broken, the resistors R S1 , R S2 , R
S3, if any of the three resistors of the R S4 is disconnected when, and where all disconnection of the resistor R S1, R S2, R S3 , R S4, the output of the amplifier 11 is always Low
(L) shows a constant output. In addition, the resistor R
If any one of the resistors S1 , R S2 , R S3 , and R S4 is disconnected, a constant L is generated depending on the position of the resistor.
It also indicates the output of High (H). Therefore, even if the sensor chip 10 is cracked and the resistor is disconnected, a constant output is always obtained, the output is not unstable, and the location of the disconnected resistor can be specified. is there. Further, the resistors R 7 and R 8 are resistors R S1 , R S2 ,
The resistance value is extremely large with respect to R S3 and R S4 , and does not affect the measurement, and the power consumption can be ignored.
【００１７】また、この発明のセンサ用ブリッジ回路
は、磁気センサや圧力センサのみならず、その他の湿度
センサ等、ブリッジ状に抵抗体を形成してセンサとして
作用させるものに適用できるものであり、その用途は問
わないものである。The sensor bridge circuit of the present invention can be applied not only to magnetic sensors and pressure sensors, but also to other humidity sensors and the like in which a resistor is formed in a bridge shape to act as a sensor. The use is not limited.
【００１８】[0018]
【発明の効果】この発明のセンサ用ブリッジ回路は、ブ
リッジ状に形成された抵抗体のうちの一対の抵抗体のみ
に高抵抗値の抵抗体を各々並列に接続するのみで、抵抗
体の断線に対して予め予測される所定の出力が得られ、
断線を確実に検出することができ、正確に断線箇所を特
定することができるものである。According to the sensor bridge circuit of the present invention, a resistor having a high resistance value is connected in parallel only to a pair of resistors among the resistors formed in a bridge shape. A predetermined output that is predicted in advance with respect to the disconnection of the resistor is obtained,
The disconnection can be detected reliably, and the disconnection location can be specified accurately.
【図１】この発明の第一実施例のセンサ用ブリッジ回路
を示す回路図である。FIG. 1 is a circuit diagram showing a sensor bridge circuit according to a first embodiment of the present invention.
【図２】この発明の第二実施例のセンサ用ブリッジ回路
を示す回路図である。FIG. 2 is a circuit diagram showing a sensor bridge circuit according to a second embodiment of the present invention.
【図３】この発明の従来の技術のセンサ用ブリッジ回路
を示す回路図である。FIG. 3 is a circuit diagram showing a conventional sensor bridge circuit of the present invention.
【符号の説明】 １０ センサチップ １１，１２ アンプ ＲＳ１，ＲＳ２，ＲＳ３，ＲＳ４ 抵抗体 Ｒ７，Ｒ８ 抵抗体[Explanation of reference numerals] 10 sensor chips 11, 12 amplifiers R S1 , R S2 , R S3 , R S4 resistors R 7 , R 8 resistors
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平３−209140（ＪＰ，Ａ) 特開 平４−348089（ＪＰ，Ａ) 特開 昭49−110391（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01L 9/04 G01L 1/18 G01B 7/00 G01P 21/00 G01R 31/02 G01K 7/24 G01F 1/68 G01R 33/09 ─────────────────────────────────────────────────── --- Continuation of the front page (56) References JP-A-3-209140 (JP, A) JP-A-4-348089 (JP, A) JP-A-49-110391 (JP, A) (58) Field (Int.Cl. 7 , DB name) G01L 9/04 G01L 1/18 G01B 7/00 G01P 21/00 G01R 31/02 G01K 7/24 G01F 1/68 G01R 33/09
Claims (2)
形成し、このブリッジ状の抵抗体によりセンサを形成
し、上記ブリッジ状の抵抗体のうち互いに対向する一対
の端部の一方を電源に接続し他方をグランドに接続する
とともに、上記ブリッジ状の抵抗体の他の一対の端部を
出力としてアンプに入力したセンサ用ブリッジ回路にお
いて、上記二対の各抵抗体のうち互いに対向する一対の
抵抗体のみに、その抵抗体の抵抗値よりきわめて大きい
抵抗値の抵抗体を各々並列に接続したことを特徴とする
センサ用ブリッジ回路。1. A bridge-shaped resistor is formed on a sensor chip, a sensor is formed by the bridge-shaped resistor, and one of a pair of ends of the bridge-shaped resistor facing each other is used as a power source. In the sensor bridge circuit in which the other end of the bridge-shaped resistor is input to the amplifier as an output while connecting the other to the ground, a pair of resistors that are opposed to each other of the two pairs of resistors are connected. A bridge circuit for a sensor, characterized in that only a resistor is connected in parallel with a resistor having a resistance value extremely larger than that of the resistor.
形成し、このブリッジ状の抵抗体によりセンサを形成
し、上記ブリッジ状の抵抗体のうち互いに対向する一対
の端部の一方を電源に接続し他方をグランドに接続する
とともに、上記ブリッジ状の抵抗体の他の一対の端部を
出力としてアンプに入力したセンサ用ブリッジ回路にお
いて、上記各抵抗体のうち電源とアンプ間に接続された
一つの抵抗体とこの抵抗体と対向する抵抗体のみに、そ
の抵抗体の抵抗値よりきわめて大きい抵抗値の抵抗体を
並列に接続したことを特徴とするセンサ用ブリッジ回
路。2. A bridge-shaped resistor is formed on a sensor chip, a sensor is formed by the bridge-shaped resistor, and one of a pair of end portions of the bridge-shaped resistor facing each other is used as a power source. In the sensor bridge circuit in which the other end of the bridge-shaped resistor is input as an output to the amplifier while connecting the other to the ground, it is connected between the power supply and the amplifier among the resistors. A sensor bridge circuit characterized in that only one resistor and a resistor facing this resistor are connected in parallel with a resistor having a resistance value extremely larger than that of the resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19548693A JP3373603B2 (en) | 1992-12-30 | 1993-07-12 | Bridge circuit for sensor |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4-360292 | 1992-12-30 | ||
| JP36029292 | 1992-12-30 | ||
| JP19548693A JP3373603B2 (en) | 1992-12-30 | 1993-07-12 | Bridge circuit for sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06249730A JPH06249730A (en) | 1994-09-09 |
| JP3373603B2 true JP3373603B2 (en) | 2003-02-04 |
Family
ID=26509147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19548693A Expired - Lifetime JP3373603B2 (en) | 1992-12-30 | 1993-07-12 | Bridge circuit for sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3373603B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4617545B2 (en) * | 1999-10-13 | 2011-01-26 | 株式会社デンソー | Sensor abnormality detection circuit and physical quantity detection device |
| JP3442700B2 (en) | 1999-10-15 | 2003-09-02 | Ｓｍｃ株式会社 | Control device for pressure sensor and pressure sensor system |
| JP5517777B2 (en) | 2010-06-25 | 2014-06-11 | 日立オートモティブシステムズ株式会社 | System having disconnection detection circuit and disconnection detection means for bridge circuit |
| JP6309067B2 (en) * | 2016-10-31 | 2018-04-11 | 三菱電機株式会社 | Magnetic detector |
| JP7542982B2 (en) * | 2020-04-09 | 2024-09-02 | ミネベアミツミ株式会社 | Fault detection circuit and detection system |
-
1993
- 1993-07-12 JP JP19548693A patent/JP3373603B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06249730A (en) | 1994-09-09 |
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