JP3367022B2 - Barrel type cleaning device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a barrel type cleaning device for removing a large amount of a relatively small work piece and at the same time, completely removing contaminants adhering to the surface.

[0002]

2. Description of the Related Art Conventionally, for cleaning a work, a method of immersing the work in a cleaning agent, a method of stirring the work in the cleaning agent, a method of spraying the cleaning agent on the work at high pressure, A method is known in which an object is placed in a cleaning agent and ultrasonic vibration is applied to the cleaning agent.

[0003]

Contamination by fine particles on the work piece is extremely firmly fixed to the substrate and it is difficult to completely remove it. Further, even if it can be removed, there is a drawback that it takes an extremely long time. A method of applying a mechanical external force to remove such adhered fine particle contamination is known, and for example, a method of rubbing and removing with a medium such as a buff, a polishing material, or a brush is performed. These methods are so-called polishing when an abrasive is used and are used for processing a base, but are classified as cleaning when an abrasive is not used. Although these methods have the characteristics as described above, in order to clean the substrate without scratching it, the machine needs to be highly accurate, and the medium also needs various devises, which is costly. In addition, there is a drawback that the efficiency is poor because each item is washed individually.

The present invention has been made in view of such problems. In particular, recently, ozone depletion, global warming, environmental destruction, etc. due to cleaning agents such as specific CFCs and specific chlorinated hydrocarbons (eg, 1,1,1-trichloroethane, abbreviated here as ethane) have become global problems. The immediate development of so-called CFC-free and ethane-free technologies is desired.

One of the problems to be solved by the present invention is a technology for removing CFCs and ethane, and the lack of the ability of an alternative cleaning agent is compensated for by sliding between media or workpieces. By using the principle of (3), cleaning is attempted.

[0006]

That is, the cleaning apparatus of the present invention
Is a machine in which a workpiece is loaded into a barrel processing machine, and water or a cleaning agent is charged into the barrel processing machine, and the barrel processing machine is operated to perform cleaning.

In this case, a cleaning mechanism accompanied by sliding will be described, particularly in a rotating barrel system in which a prismatic tank as shown in FIGS. 1 and 2 is rotated about a central axis parallel to a generatrix of the rotating shaft. It is as follows.

That is, 50 to 70% of a mixture (referred to as a mass) of a work, a medium and washing water is charged into the barrel tank, and when the barrel tank is rotated at an appropriate number of revolutions, the mass at the portion in contact with the tank wall is increased. Is lifted by the tank wall, and when it reaches a certain height, it falls along the surface of the mass due to the action of gravity. This falling layer forms a so-called fluidized bed in which relative movement is generated between the workpiece and the medium or between the workpieces, and the sliding action thereof removes microcontamination on the surface of the workpiece. In other barrel type cleaning devices (eg planetary rotation type, vibration type, vortex type, etc.),
Fundamentally, a fluidized bed is generated and washing is performed therein. These fluidized beds are extremely orderly and do not generate disturbances such as turbulence, so there is no scratch on the workpiece, and the barrel tank wall is lined with a plastic such as rubber or urethane. Therefore, due to the collision with the tank wall

[0009] Namely the present invention includes a water supply pipe on both end faces the center line of the rotating barrel tank and the drainage pipe are provided so as to face each water supply tube, engaged to face the mouth portion of the drain pipe detachable water supply device And a drainage device, wherein the water supply pipe can be connected to at least one supply port for various cleaning agents, water, pure water, and ultrapure water. Of the tank
A water supply pipe and the drain pipe to face respectively on both end surface center line
A lower drainage pipe, which is provided and has a valve that opens and closes by an elastic force at the outermost peripheral portion of the end face , is provided with a water supply pipe on the center line, a water supply device movable toward the mouth of the drainage pipe, and a drainage device The end surfaces of both devices are provided with packing, and the end surface packing is pressed against the mouths of the water supply pipe and the drainage pipe to enable water supply and drainage to the barrel tank, and the water supply pipe is various cleaning agents, water, A spring for closing the lower drainage pipe is provided in the movable lower drainage device that can be connected to at least one supply port of pure water or ultrapure water and that faces the lower drainage pipe at the outermost peripheral portion of the end face. It is a barrel type cleaning device characterized in that it is provided with a push rod that presses to enable drainage. Not only can the rod be cleaned, it is possible to remove particulate contamination that is difficult to remove by other methods, and various barrels developed by the barrel processing method can be used according to the conditions of the workpiece, There is an advantage that the developed automation and unmanned can be used almost as it is.

[0012]

Embodiments of the present invention will now be described with reference to the accompanying drawings.

In FIGS. 1 and 2, cylindrical flanges 8a and 8b are attached to both end surfaces of an inner octagonal barrel tank 2. On the other hand, on the base 1, four rollers 9a, 9
b, 9c and 9d are attached in pairs, respectively, and as shown in FIG. 1, one of the rollers or a shaft for fixing the rollers is rotated by a motor 4. In this way, when one roller 9b is rotated, the rotational movement is transmitted to the collar 8, so that the barrel tank 2 is rolled. The rotation speed of the barrel tank 2 can be changed by an inverter. Also, as shown in FIG.
On the center line of the barrel tank 2, a water supply pipe 10 and a drain pipe 11 are paired.
It is provided facing . Further, a lower drain pipe 14 having a valve 13 that opens and closes by the elastic force of the spring 12 is also provided on the outermost peripheral portion of the end surface of the barrel tank 2 (FIG. 3). Since the lower drain pipe 14 serves to discharge all the water or the cleaning agent in the barrel tank 2 at the end of each processing step, the lower drain pipe 14 is located at the lower position when the positioning of the barrel tank 2 is stopped. The name of the drain pipe 14 is attached. In addition, 15 in the figure
Is a dog for positioning which responds to a proximity switch (not shown), and 16 is a block for fitting and fixing the positioned barrel tank 2 with a knock (not shown). Although 3 is an automatically openable / closable barrel lid (FIG. 2), the opening / closing of the barrel lid 3 is performed at the time of loading and unloading the workpiece and the media, and is not directly related to the present invention.

The structure of the water supply device 18 is as shown in FIG.
On the base 1 so that the housing 20, which is provided so as to face the water supply pipe 10 of the barrel tank 2 and in which the hollow pipe 19 is inserted, can be moved forward or backward as indicated by the arrow 43 by the fluid pressure cylinder 31. It is installed on the pillar 22 planted in. The center line of the hollow pipe 19 is aligned with the center line of the water supply pipe 10, a ring-shaped rubber packing 23 is attached to the tip of the hollow pipe 19, and the rear end is connected to a rotary joint 24. Therefore, the water supply device 18 can rotate the barrel tank 2 while being connected to the barrel tank 2. The rotary joint 24
Through the hose 25, as described later,
6, connected to the cleaning agent tanks 27, 28, 29, 30 (FIG. 7).

FIG. 5 is a front view in which a part of the drainage device 32 is shown in section. Since the structure is almost the same as that of the water supply device 18, the same parts are designated by the reference character a and the description thereof is omitted.
The barrel tank 2 rotates while the drainage device 32 and the barrel tank 2 are connected. The water supply pipe 10 and the drain pipe 11 of the barrel tank 2 are provided on the barrel rotation center line, and the barrel tank 2 is rotated while being connected to the water supply device 18 and the drainage device 32 as described above. It is also possible to operate with 11 open. However, if left open, the mass cannot be loaded with more than 1/2 of the contents. Alternatively, check valves as shown in FIGS. 3 and 13 may be provided at the mouths of both of them. In this case, the mass can be charged with 1/2 or more of the content. A check valve is required, especially when the invention is used in a planetary swivel barrel.

FIG. 6 is a partially sectional front view of the second drainage device 33. The second drainage device 33 is installed on the column 22a at a position just below the drainage device 32. A hollow pipe 35 having a push rod 34 inside is fitted and inserted into a housing 37 attached to the support column 22a. The push rod 3
4 is the piston rod 39 of the fluid pressure cylinder 38 at the rear end.
Are linked to. A coil spring 40 is fitted between the rear end of the push rod 34 and the rear end of the hollow pipe 35. A ring-shaped rubber packing 36 is attached to the tip of the hollow pipe 35.

Next, the piping system of the cleaning agent supply device 18 is shown in FIG.
Follow the instructions below. The water supply tank 26 is city water,
When using a concentrated solution for rinsing or cleaning, use it as a diluent. Detergent tank 27, 28, 29, 3
For example, 0 indicates the case where four kinds of cleaning agents of different kinds are used for the workpiece, but the number may be one, and four or more may be provided. Since the purpose of the cleaning agent is to remove CFCs and ethane, cleaning agents that do not belong to this category, such as aqueous cleaning agents (neutral cleaning agents, weak alkaline cleaning agents), which are not subject to regulation, are fluorocarbons, perfluoroalcohol, tempen, and others. Hydrocarbons, alcohols, N-
A cleaning agent such as methyl-2-pyrrolidone, a ketone or an ether can be used. If necessary, one or two of these may be pure water or ultrapure water.

Pumps 7a and 7 are provided in the respective tanks.
b, 7c, 7d, 7e, and two-port single solenoid valves 41a, 41b ... And connected to a water inlet attached to the barrel tank 2 via a rotary joint 24. The high-pressure air source 44 is also connected to the same rotary joint 24 via the 2-port single solenoid valve 41f. The drainage side is barrel tank 2
The water is drained to the outside through the rotary joint 24b and the 2-port single solenoid valve 41g. Each of the water supply tanks and the cleaning agent tanks 26 to 30 is provided with a known level switch so that a fixed amount is charged in the barrel tank and the tank is constantly replenished with a fixed amount of water or cleaning agent solution. .

The operation of the present invention will be described according to the structure described above.

Water or a cleaning agent and, if necessary, a medium are loaded into the barrel tank 2 and the motor 4 is driven to rotate the barrel tank 2 for cleaning. Since the water supply pipe 10 and the drain pipe 11 are connected to the rotary joints 24 and 24a,
It is not necessary to disconnect the connection with the barrel tank 2 even during cleaning, but here, in order to understand the operation of the water supply pipe 10 and the drain pipe 11,
The barrel tank 2, the water supply pipe 10 and the drain pipe 11 are not connected during cleaning.

For example, in the first minute, the work is rotated at a low speed to mix the work and the medium slowly to prevent dents, and then the work is rotated at a high speed for cleaning.

When the cleaning with the cleaning liquid is completed, the proximity switch and the dog 14 are used for positioning, the pressure fluid is introduced into the piston side of the fluid pressure cylinder 38 of the second discharge device 33, and the piston rod 39 is advanced. As a result, the hollow pipe 35 and the push rod 34 move forward at the same time, the rubber packing 36 at the tip of the hollow pipe 35 contacts the drain pipe 14, and the advance of the hollow pipe 35 stops. When the piston rod 39 continues to move forward, only the push rod 34 moves forward this time, the push rod 34 contacts the valve 13, pushes the valve 13 inside the barrel tank 2, and opens the valve 13. As a result, the cleaning agent after the first cleaning is drained. Although the cleaning can be ended by this, when cleaning with another cleaning agent is required or after cleaning with the cleaning agent, water cleaning (including cleaning with pure water or ultrapure water), that is, rinse cleaning is performed. If you need to do this: That is, the pressure fluid is introduced into the piston rod side of the fluid pressure cylinder 38 to close the valve 13. Next, water is supplied from the water supply tank 26 to the barrel tank 2 and, while rotating at a low speed, water supply from the water supply device 18 and drainage from the drainage device 32 are simultaneously performed, and when the cleaning is completed, the second drainage device 33 is used. Drain. Next, high-pressure air is introduced from the high-pressure air source 44 into the barrel tank 2 to remove residual water inside.

Next, the fluid pressure cylinder 31 of the water supply device 18
And, the pressure fluid is introduced to the piston side of the fluid pressure cylinder 31a of the drainage device 32, the hollow pipe 19 and the hollow pipe 19a move forward, and the respective pipes are connected to the water supply pipe 10 of the barrel tank 2 as shown in FIGS. Contact with the drain pipe 11.
Another cleaning agent, for example, a cleaning agent that is half the content of the barrel is injected from the cleaning agent tank 28 through the hollow pipe 19. The cleaning agent flowing out of the hollow pipe 19a on the drain side is
It is stopped by closing a pinch valve (not shown) provided under the rotary joint 24a. After the introduction of the cleaning agent, by the reverse operation of water injection,
The hollow pipes 19 and 19a are disconnected from the barrel tank 2 (a rotary joint is attached, so this connection may not be disconnected), the motor 4 is rotated, and the second cleaning is performed. After the second cleaning is completed, the cleaning agent is discharged by the same operation as the previous time.

In this case, rinsing is performed by using water, pure water or ultrapure water as the second cleaning liquid. Of course, rinsing with pure water or ultrapure water may be performed after rinsing with city water, and the number of washing steps can be three or more.

As the medium, a plastic ball or a plastic cone having a rounded tip can be used. In order to improve the mixing during rotation, it is desirable that the bulk specific gravity is almost the same as that of the workpiece, and if the mixing is perfect, it is possible to prevent the workpieces from hitting each other. Therefore, there is no risk of dents or scratches. In addition to plastics, glass beads, steel balls, and ceramics having low grindability (for example, CS media manufactured by Chipton Co., Ltd.) are used.

In the above embodiment, the cleaning by the rotating barrel has been described, but other barrels such as a planetary rotation type barrel, a vibrating barrel, a reciprocating barrel, a gyro type barrel,
It can also be washed with a spin type barrel, a vortex barrel or the like.

This device can be fully automated by using a known sequence control method. A programmable controller is used for full automation, for example.

Details of the cleaning method described above will be described below.

[0029] <Cleaning specifications>     Barrel tank size 600mm (circle inscribed) x 670mm (length)     Barrel tank shape Octagonal column with inner rubber lining     Barrel tank volume 200 ml     Work product Small diameter roller (SUS) 2φ x 30mm                     Anti-rust oil coating     Objective rust prevention oil removal cleaning     Media used Ceramic sphere diameter 3 mm (manufactured by Tipton Co., Ltd.)     Cleaning agent Weak alkaline cleaning agent     Washing time 5 minutes     Result The cleaning effect is good and there are no scratches.                     Cleaning with specific CFCs or 1,1,1-trichloroethane                     Equal to or more than.

[0030]

The present invention uses a barrel processing device to
By using water or a weak alkaline detergent, if necessary, a medium, it is possible to obtain a cleaning effect equivalent to or higher than the cleaning effect with the specific flon or 1,1,1-trichloroethane. Therefore, it is effective in preventing ozone layer depletion, global warming, and environmental destruction, and requires no manpower in the continuous steps of cleaning and rinsing, and is extremely effective in saving labor and labor.

[Brief description of drawings]

FIG. 1 is a front view of a rotary barrel type cleaning device embodying the present invention.

FIG. 2 is a plan view of the same.

FIG. 3 is an enlarged cross-sectional view of the barrel tank.

FIG. 4 is a front view in which a part of the water supply device is also shown in section.

FIG. 5 is a front view in which a part of the drainage device is also shown in section.

FIG. 6 is a front view in which a part of the second drainage device is also shown in section.

FIG. 7 is a piping diagram of the same.

[Explanation of symbols]

1 base 2 barrel tank 3 barrel lid 10 Water pipe 11 drainage pipe 12 springs 13 valves 14 Lower drainage pipe 16 Positioning block 18 Water supply device 21 stand 24a, 24b Rotary joint 26 Water tank 27 First cleaning agent tank 28 Second cleaning agent tank 29 Third cleaning agent tank 30 4th cleaning agent tank 32 drainage system 33 Second drainage device 34 push rod

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-60-247199 (JP, A) JP-A-3-263500 (JP, A) Actually opened 62-368 (JP, U) Actually opened 4- 9686 (JP, U) Actual opening 2-93962 (JP, U) Actual opening Sho 50-84897 (JP, U) Actual opening Sho 60-155575 (JP, U) Actual opening Sho 50-18983 (JP, Y1) Jikken Sho 39-24220 (JP, Y1) (58) Fields investigated (Int.Cl. ⁷ , DB name) B08B 1/00-7/04

Claims (3)

(57) [Claims] 1. A water supply pipe and a drain pipe are provided on a center line of an end face of a rotary barrel tank, and the water supply pipe and the water supply device and the drainage device are provided so as to be engaged and disengaged so as to face the mouth of the drain pipe. It is at least one of the species detergent, water, pure water and ultra-pure water
The barrel type cleaning device is characterized in that it can be connected to the supply port. 2. A lower drainage pipe having a water supply pipe and a drainage pipe on the center line of the end face of the rotating barrel tank and having a valve opened and closed by an elastic force at the outermost peripheral portion of the end face, the water supply pipe on the center line, A barrel tank is provided with a water supply device and a drainage device that are movable opposite to the mouth of the drainage pipe, and packing is provided on the end faces of both devices, and the end face packing is pressed against the mouths of the water supply pipe and the drainage pipe. water supply to, and allow drainage, the water supply pipe each species detergent, water, pure water and a small ultra-pure water
It is possible to connect to any one of the supply ports ,
Or One end surface on a movable lower drainage device facing downward drainage pipe of the outermost peripheral portion, the barrel, characterized in that it comprises a push rod to allow drainage by pressing the spring to close the lower drainpipe Shape cleaning device. 3. A comprises a rotary joint to the water supply apparatus and the drainage device, the water supply pipe of the barrel tank, according to claim 1 or claim that has been characterized to make the cleaning operation can be performed in a state bound to the drain pipe 2. The barrel type cleaning device according to 2.