JP3359703B2 - X-ray microscope sample container and sample holding method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample container for a microscope , and more particularly, to an optical system in an X-ray microscope using either X-rays or soft X-rays. is attached to a predetermined position, to Yoosame be observed sample with an aqueous solution therein Yoosamesora
The present invention relates to a sample container having an inter-portion formed therein, which is applied to an X-ray microscope, a soft X-ray microscope, or the like, and relates to a sample container for storing and holding a sample to be observed.

[0002]

2. Description of the Related Art In recent years, research and development of X-ray light sources and X-ray optical elements have been remarkably advanced, and as one of the applied systems,
X-ray microscopes have been commercialized. The X-ray microscope of this type mainly includes, for example, a grazing incidence optical system such as a Walter type (FIG. 12A), a Fresnel zone plate using diffraction (FIG. 12B), and two sheets. Direct incidence type Schwarzschild optical system in which a spherical mirror is coated with a multilayer film (Fig. 12 (c))
There are various types using an imaging element as described above.
In general, since the diffraction limit of this type of X-ray microscope becomes smaller in proportion to the wavelength of the X-ray used, when compared with a normal optical microscope using visible light, the spatial resolution is one digit. Or higher. For example,
An X-ray microscope using a wavelength of several hundred millimeters has the advantage that a resolution of up to about 50 nm can be expected. In line with this, the emergence of a small and high-intensity laser plasma light source has become an important issue in laboratory use. As a result, the development of the X-ray microscope is further promoted, and thus the X-ray microscope is positioned as an excellent microscope of the next generation.

[0003] Recently, attention has been paid to so-called soft X-ray microscopes using soft X-rays, that is, soft X-ray microscopes, in addition to X-ray microscopes using normal specifications X-rays. here,
The features of soft X-rays are that high-resolution observation is possible compared to optical microscopes, and that no pretreatment is required for the sample to be observed, such as with an electron microscope.
Soft X-rays, when compared to electron beams, cause very little damage to biological samples. If necessary, a living body in a state similar to a living environment can be used as it is, with high resolution, no staining, etc. For living body observation, which can be observed under the light, it is possible to apply the present invention to an extremely desirable living body observation microscope. On the other hand, in particular, when using soft X-rays corresponding to a so-called “water window” (wavelength: in the range of 23 ° to 44 °), the living body is kept in such a desirable and natural state as possible. As a result of the observation that the sample can be observed, research on the use of soft X-rays in this region is active.

Next, referring to FIGS. 8, 9 and 10, FIG.
The principle and configuration of a conventional soft X-ray microscope will be described. That is, the conventional soft X-ray microscope shown in FIG.
The condenser lens 33 irradiates the observation sample 34a received in the sample container 34 with soft X-rays emitted from the sample lens 34, and the objective lens 35 forms a fluoroscopic image on a detector 36 for detection. It has become
In this case, since the soft X-rays are largely absorbed by the atmosphere, the portion through which the soft X-rays pass must be set in a vacuum atmosphere. In the vacuum chamber device 37 (hereinafter, referred to as
(Referred to as a vacuum-sealed type). In addition, the observed sample 34
In the case where a is a biological sample or the like and a vacuum atmosphere cannot be applied, as shown in FIG. 9, the configuration itself of the vacuum chamber device 37 is changed to the emission end from the soft X-ray light source 32 to the condenser lens 33. It is divided into a vacuum chamber part 37a that houses the soft X-ray emission side including the emission window 38, and a vacuum chamber part 37b that houses the detection side from the objective lens 35 to the detector 36 including the entrance window 39 at the entrance end. At the same time, the injection window 38 in each of the vacuum chambers 37a and 37b
The observation sample 34a received in the sample container 34 is arranged in a space portion having a distance d as small as possible between the light source and the entrance window 39, and furthermore, in a space portion 40 opened to the atmosphere (hereinafter, referred to as a space). In the same way as the previous example, soft X
The soft X-ray emitted from the line light source 32 is
3 irradiates the observed sample 34 a through the exit window 38, receives the soft X-rays transmitted through the observed sample 34 a from the entrance window 39, and forms a perspective image on the detector 36 by the objective lens 35. To detect.

[0005] Thus, with a soft X-ray microscope of this kind, the sample to be observed and the sample to be observed containing water are contained in order to avoid vacuum drying.
In particular, in this case, when observing a biological sample, the type and configuration of an applicable sample container differ depending on whether the sample is a vacuum-sealed type or an open-to-atmosphere type. That is, when the former is applied to the vacuum sealed soft X-ray microscope, it is necessary to separate water from the vacuum atmosphere in order to arrange the sample to be observed in a vacuum. In this case, FIG. As shown in the figure, a space portion is formed inside and a relatively thin sample holding substrate 42 serving as a spacer is sandwiched between two thin films 43 on the front and back of the sample holding substrate 42. The sample container 41 has a configuration in which the observation sample 34a and the aqueous solution 45 are respectively sealed. On the other hand, when applying to the latter open air soft X-ray microscope,
Since the arrangement space is open to the atmosphere, it is not always necessary to sandwich the sample holding substrate 42 between the thin films 43, and the observation sample 34a and the aqueous solution 45 may be simply held in the internal space. However, as described above, in consideration of the absorption by the air layer in the arrangement space, a mechanism for maintaining the inside of the arrangement space under reduced pressure as much as possible is provided.

FIG. 11 shows an example of this type of sample container according to a conventional proposal (in this case, Japanese Patent Application Laid-Open No. 63-29820).
No. 0). That is, in the explanatory view shown in FIG. 11, the sample container 50 has a silicon nitride thin film 52 having a thickness of about 0.3 μm laminated on one surface of a silicon substrate 51 and the silicon substrate 51 is connected to the other surface. By performing anisotropic etching from the side of the opening to form an opening 51a to be an entrance window or an exit window,
An integrated set of a silicon substrate 51 having an opening 51a and a silicon nitride thin film 52 is prepared, and a silicon-based material having a predetermined thickness is set with respect to the surface of the silicon nitride thin film 52 of one of the components. The storage space portion 54 is formed by joining the spacers 53 with the same type of adhesive or the like, and water containing a biological sample is stored in the storage space portion 54. The surface of the silicon nitride thin film 52 is similarly bonded and sealed. In the case of the former vacuum-sealed soft X-ray microscope, the sample container 50 containing the water containing the biological sample and sealing is set in a vacuum chamber and then evacuated. And, in the case of the latter open-air soft X-ray microscope, in the space between the exit window and the entrance window in each of the vacuum chambers, each of which is previously reduced to the predetermined pressure. After setting, observation is performed with soft X-rays.

[0007]

Here, in the case of each of the above-mentioned conventional sample containers 34, 41 and 50, during the period from the setting to the apparatus to the start of observation, or during the observation, There is a problem in that the biological sample enclosed in the storage space in the sample containers 34, 41, and 50 together with the water moves without permission. That is, in a microscope using X-rays and soft X-rays, since the visual field range is not very wide, even a slight movement of the biological sample may hinder observation. For example, the convection of water itself containing the biological sample In addition to the movement of the biological sample due to its cell activity, the movement of the biological sample due to gravity and buoyancy in the placement posture respectively occurs, making it difficult to continuously observe a specific observation object for a long time. Met.

On the other hand, even if soft X-rays (wavelength; for example, 40 °) within the range of the “water window” region,
For example, the transmittance for water having a thickness of 5 μm is only about 14%, and the numerical value is not large.
Accordingly, the thickness of the aqueous solution containing the biological sample, in this case, the thickness of the aqueous solution in the soft X-ray transmission direction (in other words, in the sample container 41, the thickness of the sample holding substrate 42 serving as a spacer) It is more advantageous to make the thickness of the aqueous solution further thinner, but in fact, the lower the thickness of the aqueous solution is set, the more difficult it is to produce. is there. In the case of the latter sample container with an open-air soft X-ray microscope, the soft X-rays from the microscope are emitted at least in the vacuum chambers 37a and 37b on the soft X-ray emission side and the detection side. Window 38 and entrance window 3
If the sample container of the former vacuum-sealed soft X-ray microscope is used as it is to pass through the atmospheric layer between 9 and 9, the overall transmittance will be very small. Therefore, even when soft X-rays in the “water window” region are used, when the thin films 43 sandwiching the sample holding substrate 42 in the sample container 41 are abolished, the inner space 44 is covered. The challenge is how to hold the observation sample 34a and the aqueous solution 45.

The present invention has been made in view of the above-mentioned conventional circumstances, and has as its object to capture one observation object within a narrow field of view of a microscope for a long time. An object of the present invention is to provide an easy microscope sample container and holding method .

[0010]

In order to achieve the above object, a sample container for an X-ray microscope according to the first invention of the present invention uses either X-rays or soft X-rays. X
For X-ray microscopes , which are mounted at required positions in the optical system of the X-ray microscope and hold the sample to be observed together with the aqueous solution inside
A sample container , wherein the contact angle of the aqueous solution is less than 90 °.
A sample holding member is configured by braiding the element wire material, and the water is enclosed in a receiving space portion surrounded by the element wire material of the sample holding member.
The observed sample self-held by the surface tension of the solution
Characterized by forming a water film containing
It is.

A sample container for an X-ray microscope according to the second invention of the present invention is mounted at a required position in an optical system in an X-ray microscope using either X-rays or soft X-rays. X-ray microscope that holds the sample under observation together with the aqueous solution inside
A sample container for a microscope, wherein the contact angle of the aqueous solution is 90 °.
A sample holding member is configured by communicating the front and back of the substrate material to be less than, and a storage space portion that communicates the front and back of the sample holding member.
Min. Self-held by the surface tension of the aqueous solution
The feature is that a water film containing the sample to be observed is formed.
It is assumed that.

Here, a description will be given of a sample holding member in which a wire material in a sample container applied to the first invention is braided in a mesh shape. In recent years, an X-ray transmission window made of a thin film held by a metal mesh has been commercialized, and a configuration using a diamond thin film as this type of X-ray transmission window is shown in FIG.
This is shown in (b). That is, in FIGS. 2A and 2B,
1 is a holding space inside the outer periphery 21a surrounded by the outer ring portion 21a.
It is an annular holder member having an intermediate portion 21b and having a transmission window 21c opened at the center. Reference numeral 22 denotes a metal supporting grid member arranged in the holding space portion 21b of the annular holder member 21, in this case, a metal mesh having a thickness of about 0.3 mm as a sample holding member formed by braiding a metal wire material into a mesh shape. It is a member. 23 has a thickness of 1 μm reinforced by covering the upper surface of the metal mesh member 22.
A thin diamond thin film before and after is shown, and the diamond thin film 23 has, for example, an effective diameter of several mm (in FIG.
mm), it can sufficiently withstand a pressure difference of about 1 atm.

By the way, water molecules in an aqueous solution used in accordance with the biological sample have a strong polarizability, and therefore generally have a small contact angle with substances other than organic substances containing carbon, and the surface of the substance has a small contact angle. It is known that the metal mesh member 22 is sufficiently and effectively adhered and adsorbed. Therefore, when water is brought into contact with the metal mesh member 22 as well, surface tension is generated in a space mesh portion surrounded by metal wires of the mesh. Is to form a self-retaining water film,
In this case, in particular, after contacting water with the metal mesh member 22 holding the diamond thin film 23 shown in FIG.
By wiping off excess water, the water film here forms a curved surface and is held in the space mesh portion.
That is, by applying this phenomenon, an aqueous solution containing a biological sample, for example, as a sample to be observed is held in a very narrow space portion of the mesh portion, and the movement is prevented as much as possible. It can be confined.

To date, there is no theoretical formula for the contact angle θ of water in the space surrounded by the metal wires of the mesh. Therefore, the space surrounded by the metal wires of this mesh is approximated by a well-known cylindrical pore space as shown in FIG. 3, and the contact angle θ of water in the water film forming the curved surface is set. Let's consider Here, the curved surface S
If the radius of curvature is R and the diameter of the cylindrical pores corresponding to the pitch of the mesh (interval between metal wires) is 2r, then there is a relationship of cos θ = r / R ‥‥ (1). From the derivation process of the equation (1), R is positive if the curved surface S is an upward concave surface as shown in the figure, and negative if the curved surface S is an upward convex surface. Therefore, when the contact angle θ of water is <90 °, the curved surface S becomes an upward concave surface when cos θ> 0 to form a required water film, and the biological sample can be held in the water film. On the other hand, when the contact angle of water θ ≧ 90 °, the curved surface S becomes an upward convex surface or a horizontal surface when cos θ ≦ 0, and in this case, the interposed water does not spread in a droplet form and thinly. It turns out that a water film is not formed. That is, when the contact angle of water θ ≧ 90 °, the aqueous solution containing the biological sample cannot be held in the mesh portion.

The pitch of the metal mesh member 22 for reinforcing and holding the diamond thin film 23 is at least 20 μm.
At least 20μ
An aqueous solution containing a biological sample can be confined in a space within a narrow mesh portion of mx 20 μm or less, and here, continuous observation over a long time can be easily performed without causing slight movement of the biological sample. Become. Further, since the metal mesh member 22 has the effect of reinforcing the strength of the sample container 21 itself, it is possible to manufacture an X-ray window using a thin and strong thin film that does not attenuate X-rays. Become.

[0016] Next, in the sample container to be applied to the second invention, as shown in Figure 5, relative to the container body substrate 25, contents accommodated space portion with at least one or more small openings
26 , a water film 27 that is self-held by surface tension is formed in the storage space portion 26 , and a biological sample, such as a biological sample, as a sample to be observed is held in the water film 27. It can be done. Therefore, in this case, the material of the container body substrate 25 and the storage space portion 2
By appropriately selecting the size and depth (substrate thickness) of the opening as 6 , the water film 27 can be larger than the thickness of the substrate 25.
Can be made thinner, and the formation of the water film 27 by the surface tension of the aqueous solution in the small opening can be observed without being largely restrained by the mounting posture with respect to the apparatus.

[0017]

FIG. 1 (a) is a longitudinal sectional view schematically showing a schematic configuration of a sample container for an X-ray microscope according to a first embodiment to which the first invention of the present invention is applied. FIG. 1 (b) is an explanatory plan view showing an enlarged outline of the nickel metal mesh member holding the water film, and FIG. 1 (c) is a unit formed with the water film of the nickel metal mesh member. FIG. 4 is an enlarged plan view showing a storage space portion of FIG. FIG. 4 (a) is a perspective view schematically showing a main part configuration of a sample container for an X-ray microscope according to a second embodiment to which the second invention of the present invention is applied, and FIG. FIG. 4 (a) B showing a sample container body holding the water film.
-It is a longitudinal cross-sectional view of the B line part.

First, in the configuration of the first embodiment shown in FIG. 1 (a), a sample container is formed on one surface of a silicon substrate 1 by, for example, a diamond thin film 2 having a thickness of about 0.3 μm by vacuum evaporation. And anisotropically etching the central portion of the silicon substrate 1 from the other surface side, so that an incident window including a central portion of the diamond thin film 2 is formed.
Alternatively, by forming an opening 1a as a window for emission, an integrated set of the silicon substrate 1 and the diamond thin film 2 having the opening 1a is prepared.
In addition, a silicon-based spacer 3 having a predetermined thickness is bonded to one of the components, in this case, the surface of the diamond thin film 2 in the component on the soft X-ray source side with a similar adhesive. As shown in FIG. 1 (b), while forming the space portion 4 and in contact with the diamond thin film 2,
Nickel wire material with a wire diameter of about 0.3mm, pitch 25μ
A metal mesh member 5 as a sample holding member braided into a mesh at m is arranged. In this case, FIG.
As shown in (a), a metal mesh part 5 is provided in the opening 1a.
Be in contact with you. Then, an aqueous solution is appropriately dropped on the nickel-made metal mesh member 5 in contact with the diamond thin film 2 in the space portion 4 , thereby obtaining the structure shown in FIG.
As shown in FIGS. 1 (b) and 1 (c), the water film 6 (in FIG. 1 (c), which is in the mesh portion of each unit surrounded by nickel wires and is self-retained by surface tension. And a holding state in which the free surface has a concave curved surface due to surface tension) can be easily formed, and the biological sample 7 is held within the water film 6 as expected, and further, The other surface of the diamond thin film 2 is similarly joined to the spacer 3 to seal the entire structure. That is, in the sample container of the first embodiment configured as described above, an X-ray microscope using either an X-ray or a soft X-ray as a radiation source, particularly, in this case, a vacuum sealed X-ray It can be effectively applied as a sample container in a microscope.

Therefore, in the sample container of the first embodiment, the mesh portion of each unit surrounded by the nickel wire is
That is, the water film 6 which is self-held by the surface tension is formed in the limited and small storage space, and the water film 6 is formed.
Since the biological sample 7 is held therein, the movement of the biological sample 7 to be observed is favorably restricted, and the observation is extremely easy. Further, in the sample container according to the first embodiment, when structurally viewed, the opening 1a serving as a window on the soft X-ray source side is formed by attaching the diamond thin film 2 to the nickel metal mesh member 5 . Because of the contact, the opening 1a
As a result of the reinforcement, the mechanical strength of the opening 1a is sufficiently improved, so that it is possible not only to withstand the impact of the scattered emitted particles, but also to reduce the possibility of breakage due to the pressure difference of the incident window . In addition, a wire rod having a contact angle of an aqueous solution of less than 90 °
Because it forms a water film on the contents accommodated space portion surrounded by the charge, the surface
Free tension in the transmission direction of X-rays or soft X-rays through the water film due to tension
The surface becomes a concave curved surface, in the transmission direction of X-rays or soft X-rays.
The thickness of the aqueous solution can be reduced, and the sample to be observed can be observed.
In this case, the transmittance can be increased.

Here, in the case of the first embodiment, the nickel wire is used as the material of the metal mesh member, but other metals having excellent affinity with water may be used. Similarly, other materials having excellent affinity with water, for example, a high molecular compound such as acrylic resin , rayon, or nylon, or a silicon-based inorganic compound may be used. In this way, the surface tension of the aqueous solution
Thus, a self-holding water film can be formed more easily. On the other hand, in the embodiment in which the mesh member is provided in the space inside the sample container in the first embodiment, the diamond thin film reinforced and held by the mesh member with respect to the opening 1a serving as the window through which the soft X-ray source enters. May be provided, and a silicon nitride thin film may be provided in the opening 1b serving as an emission window on the detector side. Alternatively, the configuration may be reversed.

Next, in the configuration of the second embodiment shown in FIG. 4 (a), the sample container is a copper plate sample holding base having a thickness of about 5 μm.
Small opening on the plate 11 with an opening size of 50 μm × 50 μm
The storage space part 12 communicated with the front and back by the mouth has a pitch interval of 1
A plurality of pieces are regularly arranged at 00 μm, and by appropriately dropping an aqueous solution into the storage space 12, the storage space 12 is similarly placed in the storage space 12.
The water film 13 self-held by the surface tension (FIG. 4 (b) shows a holding state in which the free surface has a concave curved surface due to the surface tension) can be easily formed, and the water film 13 can be easily formed.
Therefore, the biological sample 14 can be held as expected. That is, in the sample container of the second embodiment configured as described above, the aspect as it is, that is, the first container
As in the case of the sample container according to the embodiment, the water film 13 including the biological sample 14 is not exposed and the water film 13 including the biological sample 14 is kept exposed, and the holding by the surface tension is not performed. Therefore, an X-ray microscope using either an X-ray or a soft X-ray as a radiation source without any restriction or restriction on its arrangement posture, particularly, in this case, an open-to-atmosphere type It can be effectively applied as a sample container in an X-ray microscope. Further, in the second embodiment,
The sample container on which the water film 13 was formed was converted to an open-air X-ray microscope.
If it is used, the space for placing the biological sample 14 can be
It can be narrower than an X-ray microscope. Therefore,
X-rays or soft X-rays are more observable than the conventional open-air type
Will be in contact with less air space in the placement space of
Atmospheric absorption of X-rays or soft X-rays is reduced.

Furthermore, in the sample container of the second embodiment, within containers accommodated space 12 of each unit, that is, for a limited small volume and contents housed space portion 12 of the aperture dimension, surface tension Since the water film 13 to be self-retained is formed and the biological sample 14 is held in the water film 13 , the movement of the biological sample 14 to be observed is favorably restricted, and the observation is extremely easy. Become. Also, the contact angle of the aqueous solution
Is less than 90 °.
Since a water film is formed, X-rays or
Indicates that the free surface in the soft X-ray transmission direction has a concave curved surface,
Or to reduce the thickness of the aqueous solution in the soft X-ray transmission direction
And increase the transmittance when observing the sample to be observed.
Can be.

When the sample container according to the second embodiment is applied to a vacuum sealed X-ray microscope, for example, as shown in FIG. 6, the sample container shown in FIG. The whole of the sample holding substrate 11 holding the water film 13 containing the biological sample 14 in the storage space portion 12 is used or used, or as shown in FIG. Similarly, a water film 13 containing a biological sample 14 is placed in a sample space 16 having window openings 17.
The whole of the sample holding substrate 11 held in 2 may be stored and used.

Here, in the case of the second embodiment, a copper plate is used as the sample holding substrate, but other metals having excellent affinity with water may be used. Other materials having an excellent affinity for, for example, a polymer compound such as acrylic resin , rayon, and nylon, or a silicon-based inorganic compound may be used. Like this
Water film that self-holds due to the surface tension of the aqueous solution.
It can be easily formed.

[0025]

As described in detail above, the first and second aspects of the present invention are described below.
According to the sample container for a microscope according to the second invention, the sample is held.
A water film that is self-retained by surface tension can be easily formed in a storage space portion surrounded by element wires , and the sample to be observed can be effectively held in the water film that is thus self-retained. As a result, the movement of the sample to be observed during the observation can be prevented, and the observation for a long time becomes easy.

[0026] Also, the use of the present invention to an X-ray microscope sample container open to the atmosphere, in addition to the above, it is Ru can obtain the effect such also reduced absorption of soft X-rays.

[Brief description of the drawings]

FIG. 1 (a) is a longitudinal sectional view schematically showing a schematic configuration of a sample container according to a first embodiment to which the first invention of the present invention is applied. (b) is an explanatory plan view showing the overall outline of the metal mesh member holding the water film.
(c) shows one unit of the water film of the metal mesh member.
It is a plane explanatory view which expands and shows a storage space part .

FIG. 2A is a plan view showing a mode of supporting a thin film by the metal mesh member. (b) is a longitudinal cross-sectional view taken along line AA of the thin film supported by the metal mesh member.

FIG. 3 is a schematic diagram illustrating a contact angle of a water film in the metal mesh member according to the first invention.

FIG. 4A is a perspective view schematically showing a configuration of a main part of a sample container for an X-ray microscope according to a second embodiment to which the second invention of the present invention is applied. (b) is a vertical cross-sectional view taken along line BB of the sample container body holding the water film.

FIG. 5 (a) is a perspective explanatory view showing the concept of a sample container body in a unit storage space portion corresponding to the second invention.
(b) is an explanatory longitudinal sectional view taken along the line C-C of the storage space part of one unit holding the water film.

FIG. 6 is an explanatory longitudinal sectional view showing another usage example of the sample container according to the second embodiment.

FIG. 7 is an explanatory longitudinal sectional view showing still another example of use of the sample container according to the second embodiment.

FIG. 8 is a schematic diagram showing a schematic configuration for explaining the principle of a general vacuum sealed soft X-ray microscope.

FIG. 9 is a schematic diagram showing a schematic configuration for explaining the principle of a general open-to-air soft X-ray microscope.

FIG. 10 is a longitudinal sectional view showing the concept of a sample container applied to a vacuum sealed soft X-ray microscope.

FIG. 11 is a longitudinal sectional view showing a schematic configuration of a sample container for an X-ray microscope according to a conventional example.

FIG. 12A is a diagram showing an X-ray microscope using a Walter oblique incidence optical system as a conventional imaging element. (b)
FIG. 2 is a diagram showing an X-ray microscope using a Fresnel zone plate as a conventional imaging element. (c) is an X-ray image obtained by a direct incidence type Schwarzschild optical system as a conventional imaging element.
It is a figure which shows a line microscope.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Silicon substrate 1a Opening ( incoming window, outgoing window ) 2 Diamond thin film 3 Spacer 4 Space 5 Metal mesh member 6 Water film 7 Biological sample (observed sample) 11 Sample holding substrate 12 Storage space 13 Water film 14 Biological sample (observed sample)

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hiroaki Nagai 2-34-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (56) References JP-A-4-206333 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) G21K 7/00 G01N 1/28

Claims (6)

(57) [Claims] An X-ray microscope which is mounted at a required position in an optical system of an X-ray microscope using either X-rays or soft X-rays and holds a sample to be observed together with an aqueous solution therein.
A sample container for a microscope , wherein the contact angle of the aqueous solution is 90 °.
Configure the sample holding member by braiding the wire material to be less than
In the storage space part surrounded by the strand material of the sample holding member
The subject self-held by the surface tension of the aqueous solution
Characterized in that a water film containing the observation sample is formed.
X-ray microscope sample container. 2. Use either X-rays or soft X-rays.
At the required position in the optical system of the X-ray microscope
X-ray microscope that holds the sample under observation together with the aqueous solution inside
A sample container for a microscope, wherein the contact angle of the aqueous solution is 90 °.
By connecting the front and back of the substrate material that is less than
A storage space part configured and communicating the front and back of the sample holding member.
Min. Self-held by the surface tension of the aqueous solution
The feature is that a water film containing the sample to be observed is formed.
X-ray microscope sample container. 3. The holding member is made of a material having an affinity for water.
The X according to claim 1 or 2, wherein
Sample container for X-ray microscope. 4. The sample holding member is made of nickel or nickel.
Metals containing copper, acrylic resin or rayon
Or nylon.
X-ray microscope sample container described above. 5. The sample holding member is housed in a closed space.
Has a window through which X-rays enter or exit
The sample holding member further comprises a structure,
Claims characterized by contacting the entrance or exit window
Item 3. The sample container for an X-ray microscope according to Item 1 or 2. 6. An optical system in a microscope for observing a living body.
At the required position, and contained in the aqueous solution and the aqueous solution
A sample holding method for holding a sample to be observed, wherein the contact angle of the aqueous solution is less than 90 °.
The sample holding member is provided with an opening, and a storage space in the opening is provided.
Min. Self-held by the surface tension of the aqueous solution
Form a water film containing the sample to be observed and hold the sample to be observed
A sample holding method.