JP3357541B2 - Moving magnet type linear motor - Google Patents

Moving magnet type linear motor

Info

Publication number
JP3357541B2
JP3357541B2 JP20445796A JP20445796A JP3357541B2 JP 3357541 B2 JP3357541 B2 JP 3357541B2 JP 20445796 A JP20445796 A JP 20445796A JP 20445796 A JP20445796 A JP 20445796A JP 3357541 B2 JP3357541 B2 JP 3357541B2
Authority
JP
Japan
Prior art keywords
permanent magnet
magnet
mover
magnetic
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20445796A
Other languages
Japanese (ja)
Other versions
JPH1052024A (en
Inventor
光一 小田
洋明 武石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Hitachi Metals Ltd
Original Assignee
Canon Inc
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Hitachi Metals Ltd filed Critical Canon Inc
Priority to JP20445796A priority Critical patent/JP3357541B2/en
Publication of JPH1052024A publication Critical patent/JPH1052024A/en
Application granted granted Critical
Publication of JP3357541B2 publication Critical patent/JP3357541B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、長手方向に複数個
のコイルを配設してなる固定子と、この固定子の長手方
向に複数個の永久磁石を配設してなる可動子とを、永久
磁石の表面に形成された磁気空隙内にコイルが存在する
ように構成し、可動子が固定子の長手方向に直線運動す
るように形成された可動磁石型リニアモータに関するも
のであり、特に可動子の移動方向両端部における推力の
リニアリティを向上させた可動磁石型リニアモータに関
するものである。
The present invention relates to a stator having a plurality of coils arranged in a longitudinal direction and a mover having a plurality of permanent magnets arranged in a longitudinal direction of the stator. The present invention relates to a movable magnet type linear motor in which a coil is configured to exist in a magnetic gap formed on a surface of a permanent magnet, and a mover is formed to linearly move in a longitudinal direction of a stator. The present invention relates to a movable magnet linear motor having improved thrust linearity at both ends in the moving direction of a mover.

【0002】[0002]

【従来の技術】従来10cmないし1mの長いストローク
の範囲内で物体の移動若しくは位置決めを行なうために
は、例えば移動方向に沿って異極が交互に現れるように
複数個の永久磁石を設け、これらの永久磁石と対向する
位置に複数個のコイルを設けると共に、上記永久磁石ま
たはコイルの何れか一方を固定子とし、他方を可動子と
したリニアモータが使用されている。
2. Description of the Related Art Conventionally, in order to move or position an object within a long stroke range of 10 cm to 1 m, for example, a plurality of permanent magnets are provided so that different poles alternately appear in the moving direction. A plurality of coils are provided at positions facing the permanent magnets, and one of the permanent magnets and coils is used as a stator, and the other is used as a linear motor.

【0003】このようなリニアモータは、永久磁石を含
む磁気回路部にセンターヨークがなく、しかもコイルと
対向する磁気空隙内において磁束が複数個の閉ループを
構成し、磁路の一部に磁束が集中しないようになってい
るので、長いストロークの全域に亘って一様な磁束密度
を確保することができる。
In such a linear motor, a magnetic circuit portion including a permanent magnet does not have a center yoke, and a magnetic flux forms a plurality of closed loops in a magnetic gap opposed to a coil. Since it is not concentrated, a uniform magnetic flux density can be secured over the entire area of a long stroke.

【0004】図6は従来の可動磁石型リニアモータの例
を示す要部正面図、図7は図6におけるB−B線断面矢
視図である。図6および図7において、固定子1と可動
子2とは、可動子2が固定子1の長手方向に沿って往復
移動可能に形成されている。
FIG. 6 is a front view of an essential part showing an example of a conventional movable magnet type linear motor, and FIG. 7 is a sectional view taken along the line BB in FIG. 6 and 7, the stator 1 and the mover 2 are formed so that the mover 2 can reciprocate along the longitudinal direction of the stator 1.

【0005】まず固定子1は、例えば偏平状に形成した
多相コイル3を非磁性材料からなる平板状の支持部材4
の両面に、絶縁板(図示せず)を介して長手方向に所定
量宛ずらせて配設して構成され、これらの多相コイル3
には、位置検出用のホール素子、ホールIC等の磁電変
換素子(図示せず)によって制御される直流電流が通電
され得るように形成される。5は縁板であり、支持部材
4の縁辺に設けられる。
[0005] First, a stator 1 comprises a flat support member 4 made of a non-magnetic material, for example, a flat multi-phase coil 3.
Are arranged on both sides of the multi-phase coil 3 via an insulating plate (not shown) so as to be shifted by a predetermined amount in the longitudinal direction.
Are formed so that a direct current controlled by a magnetoelectric conversion element (not shown) such as a Hall element for position detection or a Hall IC can be supplied. Reference numeral 5 denotes an edge plate provided on the edge of the support member 4.

【0006】次に可動子2は、例えば軟鋼のような強磁
性材料により中空角筒状に形成されたヨーク6の内面
に、前記固定子1の長手方向に相隣る磁極の極性が異な
るように複数個の永久磁石7を、空隙を介して異極が対
向するように固着して形成される。
Next, the movable element 2 is provided on the inner surface of a yoke 6 formed of a ferromagnetic material such as mild steel in the shape of a hollow rectangular tube so that the magnetic poles adjacent to each other in the longitudinal direction of the stator 1 have different polarities. Are formed by fixing a plurality of permanent magnets 7 so that different poles face each other via a gap.

【0007】以上の構成により、多相コイル3に電流を
流すと、多相コイル3の巻線方向が永久磁石7による磁
束と直交しているので、永久磁石7はフレミングの左手
の法則により、固定子1の長手方向の駆動力を受けるか
ら、永久磁石7を固着してなる可動子2は、固定子1の
長手方向に移動する。
With the above configuration, when a current flows through the multi-phase coil 3, the winding direction of the multi-phase coil 3 is orthogonal to the magnetic flux generated by the permanent magnet 7, so that the permanent magnet 7 is driven by Fleming's left-hand rule. The movable element 2 to which the permanent magnet 7 is fixed moves in the longitudinal direction of the stator 1 because the movable element 2 receives the driving force in the longitudinal direction of the stator 1.

【0008】次に多相コイル3に前記と逆方向の電流を
流すと、永久磁石7には前記と逆方向の駆動力が作用す
るから、可動子2は前記と逆方向に移動する。従って多
相コイル3への通電およびその電流の方向を制御するこ
とにより、可動子2を往復動させるか、若しくは所定の
位置に移動位置決めをすることができる。
Next, when a current in the opposite direction is applied to the multiphase coil 3, a driving force in the opposite direction acts on the permanent magnet 7, so that the mover 2 moves in the opposite direction. Therefore, by controlling the energization of the polyphase coil 3 and the direction of the current, the mover 2 can be reciprocated or moved and positioned at a predetermined position.

【0009】[0009]

【発明が解決しようとする課題】図8ないし図10は夫
々図7における可動子2のC−C断面説明図であり、永
久磁石7の形状および配置の異なるものの例を示し、断
面を表す斜線を省略して示している。また図5は可動子
2の移動方向位置と空隙磁束密度との関係を示す図であ
る。
FIGS. 8 to 10 are cross-sectional views of the mover 2 shown in FIG. 7 taken along the line C--C, respectively, showing examples of permanent magnets 7 having different shapes and arrangements. Is omitted. FIG. 5 is a diagram showing the relationship between the moving direction position of the mover 2 and the air gap magnetic flux density.

【0010】前述の従来のリニアモータにおいては、図
6に示すように永久磁石7は直方体状に形成されてお
り、可動子2の移動方向と直交する断面積が同一、すな
わち厚さ寸法および幅寸法が同一である。また複数個の
永久磁石7,7間においては、間隙、および磁束の短絡
等により空隙磁束密度が永久磁石7の中間部におけるも
のより小となっている。そして永久磁石7の可動子2の
移動方向の空隙磁束密度分布は、図5において破線aで
示されるように略円弧状となっており、正弦波曲線sと
大幅に相違している。なお図5におけるλは永久磁石
7,7間の可動子2の移動方向ピッチ(同極の磁極間ピ
ッチ)である。
In the above-described conventional linear motor, as shown in FIG. 6, the permanent magnet 7 is formed in a rectangular parallelepiped shape, and the cross-sectional area orthogonal to the moving direction of the mover 2 is the same, that is, the thickness dimension and the width. The dimensions are the same. In addition, the gap magnetic flux density between the plurality of permanent magnets 7 is smaller than that in the middle portion of the permanent magnet 7 due to a gap, a short circuit of magnetic flux, and the like. The air gap magnetic flux density distribution of the permanent magnet 7 in the moving direction of the mover 2 has a substantially arc shape as shown by a broken line a in FIG. 5, and is significantly different from the sinusoidal curve s. In FIG. 5, λ is a pitch in the moving direction of the mover 2 between the permanent magnets 7, 7 (a pitch between magnetic poles of the same polarity).

【0011】一般に回転子側が永久磁石界磁であり、外
側が固定電機子であるモータにおいては、常に回転子の
磁束と電機子起磁力の関係を垂直に保持するためには、
適切な制御回路によって、正弦波電機子電流の確立と正
弦波のギャップ磁束分布を形成することが必要であると
されている。このように構成することにより、モータが
発生するトルクは、電機子電流と磁束密度の各々最大値
の積にのみ依存し、回転子の基準軸からの変位角には無
関係なトルクが発生する。すなわち上記変位角によるト
ルクリップルの発生を防止できることになる。
In general, in a motor having a permanent magnet field on the rotor side and a fixed armature on the outside, in order to always maintain the vertical relationship between the magnetic flux of the rotor and the armature magnetomotive force,
It is stated that it is necessary to establish a sinusoidal armature current and form a sinusoidal gap magnetic flux distribution by a suitable control circuit. With this configuration, the torque generated by the motor depends only on the product of the maximum value of the armature current and the maximum value of the magnetic flux density, and a torque irrelevant to the displacement angle of the rotor from the reference axis is generated. That is, the occurrence of torque ripple due to the displacement angle can be prevented.

【0012】一方リニアモータは上記回転子および電機
子の直径を無限大に形成したものであり、上記の理論が
当然に適用される。従って前記図8に示す永久磁石7に
おける可動子2の移動方向の空隙磁束密度分布を正弦波
状に形成すれば、可動子2の移動位置によるトルクリッ
プルを解消し、リニアリティの優れたリニアモータを得
ることができることとなる。
On the other hand, a linear motor is one in which the diameters of the rotor and the armature are formed to be infinite, and the above theory is naturally applied. Therefore, if the air gap magnetic flux density distribution in the moving direction of the mover 2 in the permanent magnet 7 shown in FIG. 8 is formed in a sine wave shape, torque ripple due to the moving position of the mover 2 is eliminated, and a linear motor with excellent linearity is obtained. You can do it.

【0013】しかしながら、従来のリニアモータにおい
ては永久磁石7が前記図8のように形成されているた
め、可動子2の移動方向における空隙磁束密度分布が非
正弦波となり、トルクリップルが発生し、リニアリティ
を損なうと共に、位置決め精度に悪影響を及ぼすという
問題点がある。
However, in the conventional linear motor, since the permanent magnet 7 is formed as shown in FIG. 8, the air gap magnetic flux density distribution in the moving direction of the mover 2 becomes a non-sinusoidal wave, and torque ripple occurs. There is a problem that linearity is impaired and positioning accuracy is adversely affected.

【0014】次に図9に示す構成のものは、永久磁石7
の両端部に補助永久磁石8を設けたものであるが、図5
において鎖線bによって示されるように空隙磁束密度分
布が正弦波曲線sから大幅にずれた状態となり、特に可
動子2の移動方向両端部において甚だしい。
Next, the structure shown in FIG.
5 are provided with auxiliary permanent magnets 8 at both ends.
In this case, the air gap magnetic flux density distribution greatly deviates from the sinusoidal curve s as indicated by the chain line b, and is particularly severe at both ends of the mover 2 in the moving direction.

【0015】更に図10に示すものは、永久磁石7の断
面形状を略かまぼこ型に形成したものであるが、図5に
おいて曲線cによって示されるように正弦波曲線sと近
似した曲線の空隙磁束密度分布が得られる。しかしなが
ら、図5において明らかなように、長手方向の右端部の
近傍、すなわち正弦波曲線sが空隙磁束密度0の軸と交
差する長手方向位置から±λ/4の領域においては、曲
線cが正弦波曲線sから大きく外れていることが認めら
れる。従って可動子2には常にトルクリップルが発生
し、推力のリニアリティが大幅に低下するという問題点
がある。
FIG. 10 shows a permanent magnet 7 in which the cross-sectional shape of the permanent magnet 7 is formed in a substantially semi-cylindrical shape. In FIG. 5, the air gap magnetic flux approximates to a sinusoidal curve s as shown by a curve c in FIG. A density distribution is obtained. However, as is apparent from FIG. 5, in the vicinity of the right end in the longitudinal direction, that is, in a region of ± λ / 4 from the longitudinal position where the sinusoidal curve s intersects the axis of the air gap magnetic flux density 0, the curve c has a sinusoidal shape. It is recognized that the wave curve s deviates greatly. Therefore, there is a problem that torque ripple always occurs in the mover 2 and the linearity of thrust is greatly reduced.

【0016】本発明は、上記従来技術に存在する問題点
を解決し、可動子の移動方向両端部における推力のリニ
アリティを向上させた可動磁石型リニアモータを提供す
ることを課題とする。
An object of the present invention is to provide a movable magnet type linear motor which solves the above-mentioned problems in the prior art and improves the linearity of thrust at both ends in the moving direction of the mover.

【0017】[0017]

【課題を解決するための手段】上記の課題を解決するた
めに、第1の発明においては、偏平状に形成した多相コ
イルを非磁性材料からなる平板状の支持部材の両面に絶
縁板を介して長手方向に所定量宛ずらせて配設してなる
固定子と、この固定子の長手方向に相隣る磁極の極性が
異なるように複数個の永久磁石を配設しかつ磁気空隙を
介して異極が対向するように形成した可動子とからな
り、この可動子をその磁気空隙内に前記多相コイルが存
在するようにかつ前記固定子の長手方向移動可能に固定
子に介装すると共に、前記多相コイルに正弦波駆動電流
を供給するための駆動回路を備えてなる可動磁石型リニ
アモータにおいて、永久磁石の厚さ寸法をt1 >t
e (但し、t1 :中央部における厚さ寸法、te :移動
方向端部における厚さ寸法)に形成すると共に、可動子
の移動方向両端部に永久磁石と隣接させてこの永久磁石
と極性を異にする磁極が磁気空隙に臨むように形成した
補助永久磁石を、前記永久磁石と磁極間ピッチλ/4
(λは永久磁石の同極間ピッチ)の位置に設け、かつ補
助永久磁石の可動子移動方向の幅寸法w 2 を、w 2 <w
1 /4(w 1 は永久磁石の可動子移動方向の幅寸法)に
形成する、という技術的手段を採用した。
According to a first aspect of the present invention, a flat multi-phase coil is provided with insulating plates on both sides of a flat support member made of a non-magnetic material. And a plurality of permanent magnets are arranged so that the polarity of magnetic poles adjacent to each other in the longitudinal direction of the stator is different from each other and is arranged via a magnetic gap. And a movable element formed so that opposite poles are opposed to each other, and the movable element is interposed in the stator such that the polyphase coil exists in the magnetic gap and is movable in the longitudinal direction of the stator. In addition, in a movable magnet type linear motor including a drive circuit for supplying a sine wave drive current to the polyphase coil, the thickness of the permanent magnet is set to t 1 > t.
e together form a (where, t 1:: thickness at the center, t e the thickness dimension in the moving direction end portion), the permanent magnet and the polarity by adjacent permanent magnets in the moving direction end portions of the movable element The auxiliary permanent magnet formed so that the magnetic poles having different magnetic poles face the magnetic air gap is provided with a pitch λ / 4 between the permanent magnet and the magnetic pole.
(Λ is the pitch between the same poles of the permanent magnet).
The width dimension w 2 of the auxiliary permanent magnet in the mover moving direction is defined as w 2 <w
1/4 (w 1 is the width of the movable element moving direction of the permanent magnets) in
You form, was adopted the technical means that.

【0018】また第2の発明においては、偏平状に形成
した多相コイルを非磁性材料からなる平板状の支持部材
の一方の面に長手方向に所定量宛ずらせて配設してなる
固定子と、この固定子の長手方向に相隣る磁極の極性が
異なるように複数個の永久磁石を配設した可動子とから
なり、この可動子を前記多相コイルと磁気空隙を介して
対向するようにかつ前記固定子の長手方向移動可能に固
定子に介装すると共に、前記多相コイルに正弦波駆動電
流を供給するための駆動回路を備えてなる可動磁石型リ
ニアモータにおいて、永久磁石の厚さ寸法をt1 >te
(但し、t1 :中央部における厚さ寸法、te :移動方
向端部における厚さ寸法)に形成すると共に、可動子の
移動方向両端部に永久磁石と隣接させてこの永久磁石と
極性を異にする磁極が磁気空隙に臨むように形成した補
助永久磁石を、前記永久磁石と磁極間ピッチλ/4(λ
は永久磁石の同極間ピッチ)の位置に設け、かつ補助永
久磁石の可動子移動方向の幅寸法w 2 を、w 2 <w 1
4(w 1 は永久磁石の可動子移動方向の幅寸法)に形成
る、という技術的手段を採用した。
According to the second aspect of the present invention, there is provided a stator in which a flattened polyphase coil is disposed on one surface of a flat support member made of a nonmagnetic material so as to be shifted by a predetermined amount in the longitudinal direction. And a mover in which a plurality of permanent magnets are arranged so that the magnetic poles adjacent to each other in the longitudinal direction of the stator have different polarities, and the mover faces the polyphase coil via a magnetic gap. A movable magnet type linear motor including a drive circuit for supplying a sine wave drive current to the multi-phase coil while interposing the stator so as to be movable in the longitudinal direction of the stator as described above. The thickness dimension is t 1 > te
(Where t 1 is the thickness at the center, and t e is the thickness at the end in the movement direction), and at the both ends in the movement direction of the mover, adjacent to the permanent magnet, the polarity of the permanent magnet is set. An auxiliary permanent magnet formed such that different magnetic poles face the magnetic air gap is provided with a pitch λ / 4 (λ
Is located at the same pole pitch of the permanent magnet)
The width dimension w 2 of the magnet in the moving direction of the mover is defined as w 2 <w 1 /
4 (w 1 is the width of the movable element moving direction of the permanent magnet) formed
To that adopted the technical means that.

【0019】[0019]

【0020】また上記の発明において、永久磁石と補助
永久磁石とを同一磁石材料によって形成し、かつ補助永
久磁石の厚さ寸法t2 をt2 <te とすることができ
る。更に上記の発明において、永久磁石と補助永久磁石
とを異種の磁石材料によって形成し、永久磁石の磁束密
度Br1と補助永久磁石の磁束密度Br2をBr1>Br2とす
ることができる。
[0020] In the above invention, it is possible to the permanent magnets and the auxiliary permanent magnet is formed of the same magnetic material, and the thickness t 2 of the auxiliary permanent magnet and t 2 <t e. Further in the above invention, it is possible to the permanent magnets and the auxiliary permanent magnet is formed by magnetic material of different kinds, the magnetic flux density B r2 in the auxiliary permanent magnet and the magnetic flux density B r1 of the permanent magnet and B r1> B r2.

【0021】上記の構成により、可動子の移動方向の両
端部近傍における空隙磁束密度分布を、正弦波曲線に近
似させることができ、推力のリニアリティを向上させる
ことができるのである。
With the above configuration, the air gap magnetic flux density distribution near both ends in the moving direction of the mover can be approximated to a sinusoidal curve, and the linearity of thrust can be improved.

【0022】[0022]

【発明の実施の形態】図1は本発明の実施の形態を示す
要部断面図、図3は図1におけるA−A線断面図、図4
は図3における可動子の移動方向の端部近傍を示す拡大
説明図であり、同一部分は前記図6ないし図10と同一
の参照符号で示す。これらの図において、永久磁石7は
前記図10に示されるように断面形状を略かまぼこ型に
形成すると共に、磁極間ピッチλ/2を介してヨーク6
の内面に固着する。そして可動子2の両端部に永久磁石
7と隣接させて、永久磁石7と極性を異にする磁極が磁
気空隙に臨むように補助永久磁石8を設ける。
FIG. 1 is a sectional view of an essential part showing an embodiment of the present invention, FIG. 3 is a sectional view taken along line AA in FIG. 1, and FIG.
FIG. 4 is an enlarged explanatory view showing the vicinity of the end of the mover in the moving direction in FIG. 3, and the same parts are denoted by the same reference numerals as in FIGS. 6 to 10. In these figures, the permanent magnet 7 has a substantially semi-cylindrical cross section as shown in FIG. 10 and a yoke 6 with a magnetic pole pitch λ / 2 therebetween.
Adheres to the inner surface of An auxiliary permanent magnet 8 is provided at both ends of the mover 2 so as to be adjacent to the permanent magnet 7 so that magnetic poles having a polarity different from that of the permanent magnet 7 face the magnetic gap.

【0023】次に図4において、t1 ,te は各々永久
磁石7の中央部における厚さ寸法および可動子2の移動
方向端部における厚さ寸法であり、t1 >te の略かま
ぼこ型または擬似台形状に形成する。また永久磁石7の
可動子移動方向の幅寸法w1はw1 <λ/2に形成する
ことが好ましい。また補助永久磁石8の厚さ寸法t2
よび可動子2の移動方向の幅寸法w2 は、各々t2 <t
e およびw2 <w1 /4に形成する。
[0023] Next in Figure 4, t 1, t e are each thickness in the moving direction end portion of the thickness dimension and the mover 2 in the central portion of the permanent magnet 7, almost semicylindrical of t 1> t e Form into a mold or pseudo-trapezoid. Further, it is preferable that the width dimension w 1 of the permanent magnet 7 in the moving direction of the mover is set to be w 1 <λ / 2. The thickness t 2 of the auxiliary permanent magnet 8 and the width w 2 of the mover 2 in the moving direction are t 2 <t.
formed on e and w 2 <w 1/4.

【0024】なお上記永久磁石7と補助永久磁石8の厚
さ寸法の関係t2 <te は、両永久磁石7,8が同一磁
石材料によって形成された場合であり、両者が異種の磁
石材料によって形成された場合には、永久磁石7の磁束
密度Br1と補助永久磁石8の磁束密度Br2との関係をB
r1>Br2とする。
It should be noted relationship t 2 <t e thickness dimension of the permanent magnets 7 and the auxiliary permanent magnet 8 is a case where both the permanent magnets 7 and 8 are formed of the same magnetic material, both the dissimilar magnetic material , The relationship between the magnetic flux density Br1 of the permanent magnet 7 and the magnetic flux density Br2 of the auxiliary permanent magnet 8 is represented by B
It is assumed that r1 > Br2 .

【0025】上記の構成による可動子2の移動方向にお
ける空隙磁束密度分布は、図5において曲線dによって
示されるように、正弦波曲線sに近似することが認めら
れる。特に可動子2の端部からλ/8の内側の領域にお
いて、従来のものにおける曲線a〜cと比較すると近似
度が抜群に良好であることが明らかである。
It is recognized that the air gap magnetic flux density distribution in the moving direction of the mover 2 according to the above configuration approximates a sinusoidal curve s as shown by a curve d in FIG. In particular, in the region inside λ / 8 from the end of the mover 2, it is clear that the degree of approximation is extremely good as compared with the curves a to c of the conventional one.

【0026】この場合において、曲線a〜cと対応する
永久磁石の形状寸法は夫々前記図8ないし図10に示す
通りであり、これらの図において( )内は寸法(mm)
を表している。なお曲線dと対応する永久磁石は図4に
示す通りであり、図4における永久磁石7は図10に示
す永久磁石7と同一寸法とし、図4における補助永久磁
石8は、t2 =3mm、w2 =5mmに形成した。なお上記
永久磁石7および補助永久磁石8は、R−Fe−B系希
土類磁石(日立金属製 HS−42AH)によって形成
した。
In this case, the shapes and dimensions of the permanent magnets corresponding to the curves a to c are as shown in FIGS. 8 to 10, respectively. In these figures, the figures in parentheses are the dimensions (mm).
Is represented. Incidentally permanent magnets corresponding to the curve d is as shown in FIG. 4, the permanent magnet 7 in FIG 4 is the same size as the permanent magnets 7 shown in FIG. 10, the auxiliary permanent magnet 8 in Fig. 4, t 2 = 3 mm, It was formed to w 2 = 5 mm. The permanent magnet 7 and the auxiliary permanent magnet 8 were formed of an R-Fe-B-based rare earth magnet (HS-42AH manufactured by Hitachi Metals).

【0027】次に図2は本発明の他の実施の形態を示す
要部断面図であり、同一部分は前記図1と同一の参照符
号で示す。図2に示すものは、固定子1の一方の側に永
久磁石7および補助永久磁石8を有する可動子2を設け
たものであり、可動子2の移動方向に沿う永久磁石7お
よび補助永久磁石8の形状および配設態様は、前記図3
および図4と同様である。従って作用効果についても同
様のものが期待できる。
Next, FIG. 2 is a sectional view of a main part showing another embodiment of the present invention, and the same parts are denoted by the same reference numerals as in FIG. FIG. 2 shows an example in which a movable element 2 having a permanent magnet 7 and an auxiliary permanent magnet 8 is provided on one side of a stator 1, and the permanent magnet 7 and the auxiliary permanent magnet along the moving direction of the movable element 2 are provided. 8 is the same as that shown in FIG.
And FIG. Therefore, the same effect can be expected.

【0028】上記の説明においては、永久磁石7の中央
部と端部との間の断面輪郭が直線状に形成されたものに
ついて記述したが、この断面輪郭が凹曲線若しくは凸曲
線に形成されたものにおいても作用効果は同様である。
In the above description, the case where the cross-sectional profile between the central portion and the end portion of the permanent magnet 7 is formed in a straight line has been described, but this cross-sectional profile is formed as a concave curve or a convex curve. The effect is the same in the case of the above.

【0029】[0029]

【発明の効果】本発明は以上記述のような構成および作
用であるから、永久磁石を備えた可動子の移動方向の両
端部近傍における空隙磁束密度分布を正弦波曲線に近似
させることができ、トルクリップルを防止し、推力のリ
ニアリティを大幅に向上させ得るという効果を奏し得
る。
According to the present invention having the above-described structure and operation, the air-gap magnetic flux density distribution near both ends in the moving direction of the mover having the permanent magnet can be approximated to a sinusoidal curve. The effect that torque ripple can be prevented and the linearity of thrust can be greatly improved can be achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態を示す要部断面図である。FIG. 1 is a cross-sectional view of a main part showing an embodiment of the present invention.

【図2】本発明の他の実施の形態を示す要部断面図であ
る。
FIG. 2 is a cross-sectional view of a main part showing another embodiment of the present invention.

【図3】図1におけるA−A線断面図である。FIG. 3 is a sectional view taken along line AA in FIG.

【図4】図3における可動子の移動方向の端部近傍を示
す拡大説明図である。
FIG. 4 is an enlarged explanatory view showing the vicinity of an end in the moving direction of the mover in FIG. 3;

【図5】可動子の移動方向位置と空隙磁束密度との関係
を示す図である。
FIG. 5 is a diagram showing a relationship between a moving direction position of a mover and an air gap magnetic flux density.

【図6】従来の可動磁石型リニアモータの例を示す要部
正面図である。
FIG. 6 is a main part front view showing an example of a conventional movable magnet type linear motor.

【図7】図6におけるB−B線断面矢視図である。FIG. 7 is a sectional view taken along the line BB in FIG. 6;

【図8】図7における可動子2のC−C断面説明図であ
る。
FIG. 8 is an explanatory cross-sectional view of the mover 2 taken along the line CC in FIG. 7;

【図9】図7における可動子2のC−C断面説明図であ
る。
9 is an explanatory cross-sectional view of the mover 2 in FIG. 7 taken along the line CC.

【図10】図7における可動子2のC−C断面説明図で
ある。
10 is an explanatory cross-sectional view of the mover 2 in FIG. 7 taken along the line CC.

【符号の説明】[Explanation of symbols]

1 固定子 2 可動子 3 多相コイル 7 永久磁石 8 補助永久磁石 DESCRIPTION OF SYMBOLS 1 Stator 2 Mover 3 Polyphase coil 7 Permanent magnet 8 Auxiliary permanent magnet

フロントページの続き (56)参考文献 特開 平4−165953(JP,A) 特開 平6−38502(JP,A) 実開 昭63−93783(JP,U) 実開 平1−159582(JP,U) (58)調査した分野(Int.Cl.7,DB名) H02K 41/02 - 41/035 Continuation of the front page (56) References JP-A-4-165953 (JP, A) JP-A-6-38502 (JP, A) JP-A 63-93783 (JP, U) JP-A 1-159582 (JP , U) (58) Fields surveyed (Int. Cl. 7 , DB name) H02K 41/02-41/035

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 偏平状に形成した多相コイルを非磁性材
料からなる平板状の支持部材の両面に絶縁板を介して長
手方向に所定量宛ずらせて配設してなる固定子と、この
固定子の長手方向に相隣る磁極の極性が異なるように複
数個の永久磁石を配設しかつ磁気空隙を介して異極が対
向するように形成した可動子とからなり、この可動子を
その磁気空隙内に前記多相コイルが存在するようにかつ
前記固定子の長手方向移動可能に固定子に介装すると共
に、前記多相コイルに正弦波駆動電流を供給するための
駆動回路を備えてなる可動磁石型リニアモータにおい
て、 永久磁石の厚さ寸法をt1 >te (但し、t1 :中央部
における厚さ寸法、te :移動方向端部における厚さ寸
法)に形成すると共に、可動子の移動方向両端部に永久
磁石と隣接させてこの永久磁石と極性を異にする磁極が
磁気空隙に臨むように形成した補助永久磁石を、前記永
久磁石と磁極間ピッチλ/4(λは永久磁石の同極間ピ
ッチ)の位置に設け、かつ補助永久磁石の可動子移動方
向の幅寸法w 2 を、w 2 <w 1 /4(w 1 は永久磁石の
可動子移動方向の幅寸法)に形成したことを特徴とする
可動磁石型リニアモータ。
1. A stator comprising a flat multi-phase coil arranged on both sides of a flat support member made of a non-magnetic material, and a predetermined amount of the stator interposed via an insulating plate in a longitudinal direction. A plurality of permanent magnets are arranged so that the polarities of magnetic poles adjacent to each other in the longitudinal direction of the stator are different, and a mover formed so that different poles face each other via a magnetic gap. A drive circuit for supplying a sine-wave drive current to the multi-phase coil while interposing the multi-phase coil in the stator so that the multi-phase coil exists in the magnetic gap and movably in the longitudinal direction of the stator. the movable magnet type linear motor comprising Te, the thickness of the permanent magnet t 1> t e together form a (where, t 1:: thickness at the center, t e the thickness dimension in the moving direction end portion) , Adjacent to permanent magnets at both ends in the moving direction of the mover The auxiliary permanent magnet permanent magnet and the magnetic pole having different polarities are formed to face the magnetic gap, said permanent
Pitch between permanent magnet and magnetic pole λ / 4 (λ is the pitch between permanent magnets of the same pole)
Switch) and move the mover of the auxiliary permanent magnet.
The width w 2 of the direction, w 2 <w 1/4 (w 1 is a permanent magnet
A movable magnet linear motor formed in a width dimension in the moving direction of the mover) .
【請求項2】 偏平状に形成した多相コイルを非磁性材
料からなる平板状の支持部材の一方の面に長手方向に所
定量宛ずらせて配設してなる固定子と、この固定子の長
手方向に相隣る磁極の極性が異なるように複数個の永久
磁石を配設した可動子とからなり、この可動子を前記多
相コイルと磁気空隙を介して対向するようにかつ前記固
定子の長手方向移動可能に固定子に介装すると共に、前
記多相コイルに正弦波駆動電流を供給するための駆動回
路を備えてなる可動磁石型リニアモータにおいて、 永久磁石の厚さ寸法をt1 >te (但し、t1 :中央部
における厚さ寸法、te :移動方向端部における厚さ寸
法)に形成すると共に、可動子の移動方向両端部に永久
磁石と隣接させてこの永久磁石と極性を異にする磁極が
磁気空隙に臨むように形成した補助永久磁石を、前記永
久磁石と磁極間ピッチλ/4(λは永久磁石の同極間ピ
ッチ)の位置に設け、かつ補助永久磁石の可動子移動方
向の幅寸法w 2 を、w 2 <w 1 /4(w 1 は永久磁石の
可動子移動方向の幅寸法)に形成 たことを特徴とする
可動磁石型リニアモータ。
2. A stator in which a flat multi-phase coil is disposed on one surface of a flat support member made of a non-magnetic material so as to be shifted by a predetermined amount in the longitudinal direction, and A movable element having a plurality of permanent magnets disposed so that the magnetic poles adjacent to each other in the longitudinal direction have different polarities. The movable element faces the polyphase coil via a magnetic gap and the stator. In the movable magnet type linear motor, which is provided with a driving circuit for supplying a sine-wave driving current to the polyphase coil while being interposed in the stator so as to be movable in the longitudinal direction, the thickness of the permanent magnet is set to t 1 > T e (where t 1 is the thickness at the center, t e is the thickness at the end in the movement direction), and the permanent magnet is arranged adjacent to the permanent magnet at both ends in the movement direction of the mover. So that the magnetic poles with different polarities face the magnetic gap An auxiliary permanent magnets form the permanent
Pitch between permanent magnet and magnetic pole λ / 4 (λ is the pitch between permanent magnets of the same pole)
Switch) and move the mover of the auxiliary permanent magnet.
The width w 2 of the direction, w 2 <w 1/4 (w 1 is a permanent magnet
Moving magnet type linear motor, characterized in that formed in the movable element width in the moving direction).
【請求項3】 永久磁石と補助永久磁石とを同一磁石材
料によって形成し、かつ補助永久磁石の厚さ寸法t 2
2 <t e としたことを特徴とする請求項1または
記載の可動磁石型リニアモータ。
3. The permanent magnet and the auxiliary permanent magnet are made of the same magnetic material.
And the thickness t 2 of the auxiliary permanent magnet
<br /> movable magnet type linear motor according to claim 1 or 2, characterized in that a t 2 <t e.
【請求項4】 永久磁石と補助永久磁石とを異種の磁石
材料によって形成し、永久磁石の磁束密度B r1 と補助永
久磁石の磁束密度B r2 をB r1 >B r2 としたことを特徴と
する請求項1または2に記載の可動磁石型リニアモー
タ。
4. The permanent magnet and the auxiliary permanent magnet is formed by the magnet different materials, permanent auxiliary magnetic flux density B r1 in the permanent magnet
3. The movable magnet type linear motor according to claim 1 , wherein the magnetic flux density Br2 of the negative magnet is set to Br1 > Br2 .
JP20445796A 1996-08-02 1996-08-02 Moving magnet type linear motor Expired - Lifetime JP3357541B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20445796A JP3357541B2 (en) 1996-08-02 1996-08-02 Moving magnet type linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20445796A JP3357541B2 (en) 1996-08-02 1996-08-02 Moving magnet type linear motor

Publications (2)

Publication Number Publication Date
JPH1052024A JPH1052024A (en) 1998-02-20
JP3357541B2 true JP3357541B2 (en) 2002-12-16

Family

ID=16490860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20445796A Expired - Lifetime JP3357541B2 (en) 1996-08-02 1996-08-02 Moving magnet type linear motor

Country Status (1)

Country Link
JP (1) JP3357541B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5379458B2 (en) * 2008-11-28 2013-12-25 Thk株式会社 Coreless linear motor
WO2012023565A1 (en) * 2010-08-18 2012-02-23 Thk株式会社 Magnetic field shielding mechanism and actuator
JP5418556B2 (en) * 2011-08-23 2014-02-19 株式会社安川電機 Linear motor mover and linear motor
JP2015089189A (en) * 2013-10-29 2015-05-07 株式会社安川電機 Linear motor

Also Published As

Publication number Publication date
JPH1052024A (en) 1998-02-20

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