JP3353075B2 - Glass plate recycling method and apparatus - Google Patents
Glass plate recycling method and apparatusInfo
- Publication number
- JP3353075B2 JP3353075B2 JP00376694A JP376694A JP3353075B2 JP 3353075 B2 JP3353075 B2 JP 3353075B2 JP 00376694 A JP00376694 A JP 00376694A JP 376694 A JP376694 A JP 376694A JP 3353075 B2 JP3353075 B2 JP 3353075B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- glass plate
- glass
- liquid crystal
- regenerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Liquid Crystal (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、ガラス板表面に絶縁
膜,導電膜等の膜を形成してなるガラス基板から導電膜
を除去し、ガラス板を再生利用する方法及びその実施に
使用する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of recycling a glass plate by removing a conductive film from a glass substrate having a film such as an insulating film and a conductive film formed on the surface of the glass plate, and to use the method for carrying out the method. Related to the device.
【0002】[0002]
【従来の技術】例えば液晶パネルを構成する液晶ガラス
基板は、ガラス板上にSi系の絶縁膜を形成し、さらに
その上にITO(Indium Tin Oxide) 膜, クロム
膜, アルミニウム膜,MT(Molybdenun Tantalum)膜
等の導電膜を、スパッタリング等の方法にて所要のパタ
ーンに形成して作製している。Liquid crystal glass substrate constituting the Related Art The liquid crystal panel, for example, the Si-based insulating film formed on a glass plate, further ITO (I ndium T in O xide ) thereon film, chromium film, aluminum film, MT the (M olybdenun T antalum) film or the like of the conductive film is produced by forming a predetermined pattern by a method such as sputtering.
【0003】図4は、補償用液晶セルを備える液晶パネ
ルの構造を示す模式的断面図である。図中11は表示用液
晶セルであり、これに対向させて、例えば青白表示をコ
ントラストが大きい白黒表示に変換するための補償用液
晶セル12が配されている。表示用液晶セル11は、ガラス
板13の一面に、パターニングされた(図示せず)導電膜
14が形成されてなる液晶ガラス基板15, 15を、間に液晶
16を介在させ導電膜14, 14が対向するように配置した構
造をなしている。その他の構造物の図示は省略してい
る。また補償用液晶セル12は、液晶16を基板17,17にて
挟んだ構造をなしている。そしてこれら表示用液晶セル
11及び補償用液晶セル12を挟む態様で偏光板18, 18が対
向配置されている。FIG. 4 is a schematic cross-sectional view showing the structure of a liquid crystal panel provided with a compensating liquid crystal cell. In the figure, reference numeral 11 denotes a liquid crystal cell for display, and a liquid crystal cell for compensation 12 for converting, for example, a blue-white display into a black-and-white display having a high contrast is disposed opposite to the liquid crystal cell. The display liquid crystal cell 11 is formed by forming a patterned (not shown) conductive film on one surface of a glass plate 13.
Liquid crystal glass substrates 15, 15 on which
It has a structure in which conductive films 14 and 14 are arranged to face each other with 16 interposed therebetween. Illustration of other structures is omitted. The compensating liquid crystal cell 12 has a structure in which a liquid crystal 16 is sandwiched between substrates 17 and 17. And these display liquid crystal cells
Polarizing plates 18, 18 are opposed to each other with the 11 and the compensating liquid crystal cell 12 interposed therebetween.
【0004】以上の如き液晶パネル用の液晶ガラス基板
は、所定の品質基準に達しているものだけが液晶パネル
に使用される。この品質基準は一般に高いため、液晶ガ
ラス基板の歩留りは低く、導電膜に例えばピンホール,
汚れ,マスク不良等の欠陥が存在する不良品はほとんど
が廃棄されていた。しかしながら資源の有効利用及び液
晶パネルの生産コストの削減を図る上で、高価なガラス
板を再生利用することは非常に重要である。[0004] As for the liquid crystal glass substrate for a liquid crystal panel as described above, only a liquid crystal glass substrate which meets a predetermined quality standard is used for the liquid crystal panel. Since this quality standard is generally high, the yield of the liquid crystal glass substrate is low, and for example, a pinhole,
Most defective products having defects such as dirt and mask defects have been discarded. However, in order to effectively use resources and reduce the production cost of liquid crystal panels, it is very important to reuse expensive glass plates.
【0005】そこでガラス板を再生利用することを目的
とした従来の前記導電膜の除去方法としては、酸又はア
ルカリ系の化学薬品により導電膜を溶解剥離する方法が
ある。Therefore, as a conventional method of removing the conductive film for the purpose of recycling the glass plate, there is a method of dissolving and peeling the conductive film with an acid or an alkaline chemical.
【0006】[0006]
【発明が解決しようとする課題】しかしながらこれらの
化学薬品はガラス素材に対してもラジカルに反応し、エ
ッチング現象によりガラス表面の粗度等の表面状態を悪
化させ、液晶ガラス基板として使用することが困難とな
る場合が多い。従って結局は再生利用されずに廃棄され
ているのが現状であった。本発明は、斯かる事情に鑑み
てなされたものであり、ガラス板の一面に形成された導
電膜を電解剥離することにより、その表面状態を悪化さ
せることなくガラス板を再生することが可能なガラス板
の再生方法及びその実施に使用する装置を提供すること
を目的とする。However, these chemicals also react radically with the glass material, deteriorating the surface condition such as the roughness of the glass surface due to the etching phenomenon, and can be used as a liquid crystal glass substrate. Often difficult. Therefore, in the end, they were discarded without being recycled. The present invention has been made in view of such circumstances, and by conducting electrolytic peeling of a conductive film formed on one surface of a glass plate, it is possible to regenerate the glass plate without deteriorating its surface state. An object of the present invention is to provide a method for regenerating a glass plate and an apparatus used for the method.
【0007】[0007]
【課題を解決するための手段】第1発明に係るガラス板
の再生方法は、ガラス板の一面に導電膜が形成されたガ
ラス基板から、前記導電膜を除去することにより前記ガ
ラス板を再生する方法において、電解液の存在下で、前
記導電膜に接触させた陽極と、パッドを介して前記導電
膜に接触させた陰極との間に所定の電圧を印加すること
により前記導電膜を電解剥離することを特徴とする。According to a first aspect of the present invention, there is provided a method for regenerating a glass sheet, wherein the glass sheet is regenerated by removing the conductive film from a glass substrate having a conductive film formed on one surface of the glass plate. In the method, in the presence of an electrolytic solution, a predetermined voltage is applied between an anode in contact with the conductive film and a cathode in contact with the conductive film through a pad, whereby the conductive film is electrolytically separated. It is characterized by doing.
【0008】第2発明に係るガラス板の再生方法は、第
1発明において、前記導電膜を構成する金属の平衡電極
電位以上の電圧を前記電極対に印加することを特徴とす
る。[0008] A method for regenerating a glass sheet according to a second invention is characterized in that, in the first invention, a voltage equal to or higher than the equilibrium electrode potential of the metal constituting the conductive film is applied to the electrode pair.
【0009】第3発明に係るガラス板の再生方法は、第
1発明において、前記電解液として導電性であり、前記
ガラス板を損傷させない、塩類の溶液を使用することを
特徴とする。A method for regenerating a glass plate according to a third invention is characterized in that, in the first invention, a salt solution which is conductive and does not damage the glass plate is used as the electrolytic solution.
【0010】第4発明に係るガラス板の再生装置は、ガ
ラス板の一面に導電膜が形成されたガラス基板から、前
記導電膜を除去することにより前記ガラス板を再生する
装置において、前記導電膜と接触せしめるようになした
陽極、及び先端にパッドを有する陰極を配置した電極対
と、該電極対の陽極,陰極間に所定電圧を印加する手段
と、前記パッドに電解液を供給する手段とを備えること
を特徴とする。According to a fourth aspect of the present invention, there is provided an apparatus for regenerating a glass plate by removing the conductive film from a glass substrate having a conductive film formed on one surface of the glass plate. An electrode pair having an anode adapted to be brought into contact with the cathode and a cathode having a pad at the tip, a means for applying a predetermined voltage between the anode and the cathode of the electrode pair, and a means for supplying an electrolytic solution to the pad. It is characterized by having.
【0011】[0011]
【作用】本発明者らは、ガラス板の表面を損傷させずに
導電膜を剥離する方法を種々検討し、電解による方法を
試みた結果、良好な効果が得られた。図1はこの原理を
示す模式図である。即ち導電膜Mを陽極と接続し、コイ
ル状をなす対極Kを陰極と接続する。そしてこれら導電
膜M,対極K間に直流を印加し、対極Kに対する陽極の
電位を、導電膜Mを形成する金属の平衡電極電位より高
い電位に保持することにより、金属内部の電子は陽極へ
導かれ、外部回路を通り対極Kへ移動し、そこで電子受
容反応によって消費される。これにより導電膜Mを形成
する金属の溶解が進行する。The present inventors have studied various methods for peeling the conductive film without damaging the surface of the glass plate, and have tried a method using electrolysis. As a result, a good effect was obtained. FIG. 1 is a schematic diagram showing this principle. That is, the conductive film M is connected to the anode, and the coiled counter electrode K is connected to the cathode. Then, a direct current is applied between the conductive film M and the counter electrode K, and the potential of the anode with respect to the counter electrode K is maintained at a potential higher than the equilibrium electrode potential of the metal forming the conductive film M, so that the electrons inside the metal are transferred to the anode. It is guided and travels through an external circuit to the counter electrode K, where it is consumed by the electron acceptor reaction. Thereby, dissolution of the metal forming the conductive film M proceeds.
【0012】ここで陽極(導電膜M) における電極反応
は、 M=Mn++ne- で示され、そのときの平衡電極電位EM/ M n+は、 EM/ M n+=EM/ M n+°+RT/nF・(ln a M n+) 但し、a M n+ ;Mn+の活量 EM/ M n+°;aM =a M n+=1のときの平衡電極電位
(標準電極電位) aM ;Mの活量 で表される。上式より明らかな如く、平衡電極電位はa
M n+に依存するが、電解液の水素イオン濃度には無関係
である。つまり酸又はアルカリ剤を使用しなくても装置
系に平衡電極電位以上の電圧を印加することで導電膜の
溶解は可能である。Here, the electrode reaction at the anode (conductive film M) is represented by M = M n + + ne − , and the equilibrium electrode potential E M / M n + at that time is E M / M n + = E M / M n + ° + RT / nF · (ln a M n +) where, a M n +; M n + of the activity of E M / M n + °; a M = a M n + = equilibrium electrode potential (standard electrode potential) in the case of 1 a M The activity of M. As is clear from the above equation, the equilibrium electrode potential is a
Depends on M n +, but not on the hydrogen ion concentration of the electrolyte. That is, the conductive film can be dissolved by applying a voltage higher than the equilibrium electrode potential to the device system without using an acid or an alkali agent.
【0013】本発明にあっては、導電性の電解液を使用
し電極対に所定電圧を印加して導電膜を電解剥離するこ
とにより除去して、その表面を損傷することなくガラス
板を再生利用することが可能である。According to the present invention, a conductive sheet is used to remove a conductive film by applying a predetermined voltage to the electrode pair and electrolytically peeling off the conductive film, thereby regenerating the glass sheet without damaging the surface thereof. It is possible to use.
【0014】[0014]
【実施例】以下、本発明をその実施例を示す図面に基づ
き具体的に説明する。図2は、本発明に係るガラス板の
再生方法の実施態様を示す模式的平面図であり、図3は
この III-III線における模式的拡大断面図である。図中
1は、導電膜2がガラス板3の表面に形成された液晶ガ
ラス基板である。この液晶ガラス基板1上に角棒状の電
極対4が設置されており、カーボンからなる一方の電極
4aは陽極と接続され、先端にパッドとしてスポンジ4dを
備えるカーボンからなる他方の電極4bは陰極と接続され
ている。ここで導電膜2は電極4aとは接触しているが、
電極4bとはスポンジ4dの存在により直接は接触していな
い。そしてこれら電極4a, 4bは間に空間4cを設けるよう
に近接保持されており、この空間4cは、途中にポンプ6
を備えたパイプ5を介してタンク7と接続されている。
タンク7内には電解液が貯えられており、この電解液を
ポンプ6にて空間4cへ供給するようになしてある。この
ような電極対4は図示しない駆動機構にて液晶ガラス基
板1上を水平移動が可能なようになしてある。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to the drawings showing the embodiments. FIG. 2 is a schematic plan view showing an embodiment of the glass sheet recycling method according to the present invention, and FIG. 3 is a schematic enlarged sectional view taken along the line III-III. 1 is a liquid crystal glass substrate having a conductive film 2 formed on the surface of a glass plate 3. A rectangular rod-shaped electrode pair 4 is provided on the liquid crystal glass substrate 1, and one electrode made of carbon is provided.
4a is connected to the anode, and the other electrode 4b made of carbon and provided with a sponge 4d as a pad at the tip is connected to the cathode. Here, the conductive film 2 is in contact with the electrode 4a,
There is no direct contact with the electrode 4b due to the presence of the sponge 4d. The electrodes 4a and 4b are held close to each other so as to provide a space 4c therebetween.
Is connected to the tank 7 through a pipe 5 provided with
An electrolytic solution is stored in the tank 7, and the electrolytic solution is supplied to the space 4c by the pump 6. Such an electrode pair 4 can be moved horizontally on the liquid crystal glass substrate 1 by a driving mechanism (not shown).
【0015】以上の如き構成の本発明装置において、電
極4bの先端に設けられたスポンジ4dへ、タンク7からパ
イプ5,電極対4間を介して電解液を供給し所定の電圧
を印加すると、陽極(電極4a) に接触している導電膜2
と陰極に接続されている電極4bとの間が導通してここで
電解が生じ、導電膜2が陽極溶解現象により溶解剥離す
る。In the apparatus of the present invention having the above-described structure, when the electrolytic solution is supplied from the tank 7 to the sponge 4d provided at the tip of the electrode 4b via the pipe 5 and the pair of electrodes 4, and a predetermined voltage is applied. Conductive film 2 in contact with anode (electrode 4a)
And the electrode 4b connected to the cathode conducts, where electrolysis occurs, and the conductive film 2 dissolves and peels off due to the anodic dissolution phenomenon.
【0016】実施例1.20〜30℃の5%硫酸ナトリウム
水溶液を電解液として使用し、電極対4に6Vの電圧を
印加し、3〜4cm/sの速度でスキャンニングして、導
電膜2としてクロム膜が表面に形成されたガラス板3の
再生を行った。この結果、クロム膜は溶解し透明なガラ
ス板3を回収することができた。電解前後のガラス板3
表面の粗度(Rmax)を測定した結果は、電解前, 後共に
0.02μm であり、電解前後で変化はなく、再使用に耐え
るガラス板3を回収することができたことが判る。Example 1. Using a 5% aqueous solution of sodium sulfate at 20 to 30 ° C. as an electrolytic solution, applying a voltage of 6 V to the electrode pair 4 and scanning at a speed of 3 to 4 cm / s to form a conductive film As No. 2, the glass plate 3 on which a chromium film was formed was regenerated. As a result, the chromium film was dissolved and the transparent glass plate 3 could be recovered. Glass plate 3 before and after electrolysis
The results of measuring the surface roughness (Rmax) are shown before and after electrolysis.
It is 0.02 μm, and there is no change before and after electrolysis, and it can be seen that the glass plate 3 that can withstand reuse can be recovered.
【0017】実施例2.5%塩化マグネシウム水溶液を
電解液とし、ガラス板3に形成されたITO膜の電解剥
離を、他の条件は実施例1と同様にして行ったところ、
ITO膜は溶解し透明なガラス板3を回収することがで
きた。Example 2 Using an aqueous solution of 2.5% magnesium chloride as an electrolytic solution, the ITO film formed on the glass plate 3 was subjected to electrolytic peeling in the same manner as in Example 1 except for the following conditions.
The ITO film was dissolved and the transparent glass plate 3 could be recovered.
【0018】実施例3.8%硝酸カリウム水溶液を電解
液とし、ガラス板3に形成されたMT膜の電解剥離を、
他の条件は実施例1と同様にして行ったところ、MT膜
は溶解し透明なガラス板3を回収することができた。EXAMPLE 3.8 Using an aqueous solution of 3.8% potassium nitrate as an electrolytic solution, the MT film formed on the glass plate 3 was subjected to electrolytic peeling.
The other conditions were the same as in Example 1. As a result, the MT film was dissolved and the transparent glass plate 3 could be recovered.
【0019】実施例4.10%硝酸ナトリウム水溶液を電
解液とし、ガラス板3に形成されたアルミニウム膜の電
解剥離を、他の条件は実施例1と同様にして行ったとこ
ろ、アルミニウム膜は溶解し透明なガラス板3を回収す
ることができた。Example 4. Using an aqueous solution of 10% sodium nitrate as an electrolyte, the aluminum film formed on the glass plate 3 was subjected to electrolytic peeling under the same conditions as in Example 1 except that the aluminum film was dissolved. Then, the transparent glass plate 3 could be collected.
【0020】本発明方法によれば上述した以外にも導電
膜であれば電解剥離が可能である。また電解液もガラス
素材を損傷しない導電性の他の溶液が使用可能であるこ
とはいうまでもない。種々検討した結果、燐酸塩類,硫
酸塩類,硝酸塩類等の塩類の溶解液が好適であることが
判明している。また電極対4の材質もカーボンに限定さ
れるものではなく、さらにパッドもスポンジ4dに限定さ
れるものではない。本発明方法を使用することにより、
液晶パネルの製造過程においてガラス基板表面への導電
膜形成時に発生するピンホール,汚れ,マスク不良等の
不良品を再生利用することができる。また導電膜のパタ
ーニングが異なる部品用のガラス基板をリサイクルする
ことも可能である。According to the method of the present invention, in addition to the above, electrolytic peeling can be performed with a conductive film. Needless to say, another conductive solution that does not damage the glass material can be used as the electrolytic solution. As a result of various studies, it has been found that a solution of salts such as phosphates, sulfates, and nitrates is suitable. The material of the electrode pair 4 is not limited to carbon, and the pad is not limited to the sponge 4d. By using the method of the present invention,
Defective products such as pinholes, stains, and defective masks that occur when a conductive film is formed on the surface of a glass substrate in the process of manufacturing a liquid crystal panel can be recycled. It is also possible to recycle a glass substrate for a component having a different conductive film patterning.
【0021】[0021]
【発明の効果】以上のように本発明に係るガラス板の再
生方法及びその実施に使用する装置は、電解液を使用し
所定電圧を印加して導電膜を電解剥離することにより、
その表面を損傷することなくガラス板を再生利用するこ
とが可能となり、歩留りの向上,資源の有効利用,コス
ト低減に大きく貢献する等、本発明は優れた効果を奏す
る。As described above, the method for regenerating a glass sheet according to the present invention and the apparatus used for carrying out the method are as follows.
The present invention has excellent effects, such as being able to recycle a glass plate without damaging its surface, and greatly contributing to improvement in yield, effective use of resources, and cost reduction.
【図1】本発明方法の原理を示す模式図である。FIG. 1 is a schematic view showing the principle of the method of the present invention.
【図2】本発明に係るガラス板の再生方法の実施に使用
する装置構成を示す模式的平面図である。FIG. 2 is a schematic plan view showing the configuration of an apparatus used for carrying out a method for recycling a glass sheet according to the present invention.
【図3】図2の III-III線における模式的拡大断面図で
ある。FIG. 3 is a schematic enlarged sectional view taken along line III-III of FIG.
【図4】補償用液晶セルを備える液晶パネルの構造を示
す模式的断面図である。FIG. 4 is a schematic cross-sectional view illustrating a structure of a liquid crystal panel including a compensation liquid crystal cell.
1 液晶ガラス基板 2 導電膜 3 ガラス板 4 電極対 5 パイプ 6 ポンプ 7 タンク Reference Signs List 1 liquid crystal glass substrate 2 conductive film 3 glass plate 4 electrode pair 5 pipe 6 pump 7 tank
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平5−341118(JP,A) 特開 平3−166400(JP,A) 特開 昭53−137078(JP,A) 特開 平6−157053(JP,A) 特開 昭58−52498(JP,A) 特開 平6−321581(JP,A) (58)調査した分野(Int.Cl.7,DB名) C25F 5/00 C25F 3/00 G02F 1/1333 500 H01L 23/50 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-5-341118 (JP, A) JP-A-3-166400 (JP, A) JP-A-53-137078 (JP, A) JP-A-6-136 157053 (JP, A) JP-A-58-52498 (JP, A) JP-A-6-321581 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C25F 5/00 C25F 3 / 00 G02F 1/1333 500 H01L 23/50
Claims (4)
ラス基板から、前記導電膜を除去することにより前記ガ
ラス板を再生する方法において、電解液の存在下で、前
記導電膜に接触させた陽極と、パッドを介して前記導電
膜に接触させた陰極との間に所定の電圧を印加すること
により前記導電膜を電解剥離することを特徴とするガラ
ス板の再生方法。1. A method for regenerating a glass plate by removing the conductive film from a glass substrate having a conductive film formed on one surface of a glass plate, wherein the glass plate is brought into contact with the conductive film in the presence of an electrolytic solution. A method for regenerating a glass sheet, wherein a predetermined voltage is applied between an anode that has been made and a cathode that is brought into contact with the conductive film via a pad, whereby the conductive film is electrolytically peeled off.
位以上の電圧を前記電極対に印加することを特徴とする
請求項1記載のガラス板の再生方法。2. The method for regenerating a glass sheet according to claim 1, wherein a voltage equal to or higher than an equilibrium electrode potential of a metal forming the conductive film is applied to the electrode pair.
ラス板を損傷させない、塩類の溶液を使用することを特
徴とする請求項1記載のガラス板の再生方法。3. The method for regenerating a glass sheet according to claim 1, wherein a salt solution that is conductive and does not damage the glass sheet is used as the electrolytic solution.
ラス基板から、前記導電膜を除去することにより前記ガ
ラス板を再生する装置において、前記導電膜と接触せし
めるようになした陽極、及び先端にパッドを有する陰極
を配置した電極対と、該電極対の陽極,陰極間に所定電
圧を印加する手段と、前記パッドに電解液を供給する手
段とを備えることを特徴とするガラス板の再生装置。4. An apparatus for regenerating a glass plate by removing the conductive film from a glass substrate having a conductive film formed on one surface of a glass plate, wherein the anode is brought into contact with the conductive film; A glass plate comprising: an electrode pair having a cathode having a pad at a tip thereof; a unit for applying a predetermined voltage between an anode and a cathode of the electrode pair; and a unit for supplying an electrolytic solution to the pad. Playback device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP00376694A JP3353075B2 (en) | 1994-01-18 | 1994-01-18 | Glass plate recycling method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP00376694A JP3353075B2 (en) | 1994-01-18 | 1994-01-18 | Glass plate recycling method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07207500A JPH07207500A (en) | 1995-08-08 |
JP3353075B2 true JP3353075B2 (en) | 2002-12-03 |
Family
ID=11566299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP00376694A Expired - Fee Related JP3353075B2 (en) | 1994-01-18 | 1994-01-18 | Glass plate recycling method and apparatus |
Country Status (1)
Country | Link |
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JP (1) | JP3353075B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG132496A1 (en) * | 2002-01-16 | 2007-06-28 | Nishiyama Stainless Chemical Co Ltd | Method for regenerating liquid crystal display device |
US7544283B2 (en) | 2002-10-11 | 2009-06-09 | Hitachi Zosen Corporation | Method and apparatus for removing thin metal films |
CN1323973C (en) * | 2002-10-11 | 2007-07-04 | 日立造船株式会社 | Method and apparatus for removing thin metal films |
JP4157753B2 (en) * | 2002-10-11 | 2008-10-01 | 日立造船株式会社 | Method and apparatus for removing metal thin film |
JP4828910B2 (en) * | 2005-10-11 | 2011-11-30 | 日立造船株式会社 | Conductive metal oxide thin film removal device |
JP4701072B2 (en) * | 2005-11-09 | 2011-06-15 | 日立造船株式会社 | Method and apparatus for removing conductive metal oxide thin film |
WO2007122752A1 (en) * | 2006-04-12 | 2007-11-01 | Hitachi Zosen Corporation | Method of removing conductive metal oxide thin-film and apparatus therefor |
-
1994
- 1994-01-18 JP JP00376694A patent/JP3353075B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH07207500A (en) | 1995-08-08 |
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