JP3341219B2 - Color filter and manufacturing method thereof - Google Patents

Color filter and manufacturing method thereof

Info

Publication number
JP3341219B2
JP3341219B2 JP23587293A JP23587293A JP3341219B2 JP 3341219 B2 JP3341219 B2 JP 3341219B2 JP 23587293 A JP23587293 A JP 23587293A JP 23587293 A JP23587293 A JP 23587293A JP 3341219 B2 JP3341219 B2 JP 3341219B2
Authority
JP
Japan
Prior art keywords
protective film
mask
color filter
substrate
cutting line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP23587293A
Other languages
Japanese (ja)
Other versions
JPH0763912A (en
Inventor
成太郎 堤
隆 西本
武彦 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP23587293A priority Critical patent/JP3341219B2/en
Publication of JPH0763912A publication Critical patent/JPH0763912A/en
Application granted granted Critical
Publication of JP3341219B2 publication Critical patent/JP3341219B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は,着色画素を透明保護膜
で保護したカラーフィルターに関わり,特に,保護膜を
パターンニングしたカラーフィルターに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter in which colored pixels are protected by a transparent protective film, and more particularly to a color filter in which a protective film is patterned.

【0002】[0002]

【従来の技術】カラーフィルターの保護膜は着色画素形
成後,スピンコートにより,透明樹脂を塗布し,光硬化
あるいは熱硬化し,透明樹脂膜を形成する。この場合,
図1(d) に示すように,裏面には,端面から1〜5mm
の幅で,〜20μm程度の高さの硬化した裏面回り込み
部保護膜3cが形成される。また,膜面外周部には,〜
50μm程度の外周盛り上がりである外周部保護膜3a
が発生する。これは,それぞれ,搬送ロ−ラーなどへの
接触による発塵とセル組工程での基板割れ,セルギャッ
プ不良の原因の一つになっている。
2. Description of the Related Art After forming colored pixels, a protective film of a color filter is formed by applying a transparent resin by spin coating, and photo-curing or heat-curing to form a transparent resin film. in this case,
As shown in Fig. 1 (d), 1-5mm from the end face
, A hardened back surface wraparound portion protection film 3c having a height of about 20 μm is formed. In addition, ~
Peripheral part protection film 3a having a peripheral bulge of about 50 μm
Occurs. This is one of the causes of dust generation due to contact with a transport roller, cracking of a substrate in a cell assembling process, and defective cell gap.

【0003】また,多面付けのカラーフィルターでは,
ITO成膜後,切断保護膜を塗布してスクライブ切断,
ダイシング切断を行い,その後,切断保護膜を除去し,
単一のカラーフィルターとする。この際,あるいは,そ
の後の輸送や後工程での搬送での接触などにより,基板
1の切断端面近傍から保護膜3のチッピングやハガレの
発生がみられ,これが,カラーフィルターの表面に付着
し,後工程で不良をひきおこす原因のひとつとなってい
る。
[0003] Also, in a multi-colored color filter,
After forming ITO film, apply cutting protection film and scribe cutting.
Dicing cutting is performed, and then the cutting protective film is removed.
Use a single color filter. At this time, or due to contact during subsequent transportation or subsequent transportation, chipping or peeling of the protective film 3 is observed from near the cut end surface of the substrate 1, and this adheres to the surface of the color filter. This is one of the causes of defects in the post-process.

【0004】[0004]

【発明が解決しようとする課題】本発明は,基板の外周
部の盛り上がり部分,基板の側面部,基板裏面の回り込
み部の保護膜を除去することを目的とし,更に,光硬化
性樹脂の硬度の高い保護膜を用いた場合でも,チップ切
断時,切断端面近傍から保護膜の剥離を生じないラーフ
ィルターを得ることを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to remove a raised portion of an outer peripheral portion of a substrate, a side portion of the substrate, and a protective film at a wraparound portion of the back surface of the substrate. It is an object of the present invention to obtain a large filter that does not cause peeling of the protective film from the vicinity of the cut end surface at the time of cutting the chip even when a protective film having a high thickness is used.

【0005】[0005]

【課題を解決するための手段】本発明のカラ−フィルタ
−の製造方法は、透明基板上に、複数色の着色画素を配
列し、着色画素上に透明樹脂による保護膜を積層した構
造のカラ−フィルタ−の製造方法において、保護膜
(3)用の光硬化性透明樹脂又はその溶液を基板(1)
の表面全体に塗布した後、光硬化のための露光を行うに
あたり、マスク(4)により遮光して、外周部保護膜
(3a)、側面部保護膜(3b)、裏面回り込み部保護
膜(3c)を未硬化とし、現像時に溶解除去するもの
で、前記マスク(4)は保護膜形成部分をくり抜いた構
で、マスク内部の下部にフランジ状の張出基部が設け
られたものであることを特徴とするものである。また、
本発明のカラ−フィルタ−の製造方法は、透明基板上
に、複数色の着色画素を配列し、着色画素上に透明樹脂
による保護膜を積層した構造のカラ−フィルタ−を多面
付けして製造する多面付けのカラ−フィルタ−の製造方
法であって、保護膜(3)用の光硬化性透明樹脂又はそ
の溶液を基板(1)の表面全体に塗布した後、光硬化の
ための露光を行うにあたり、マスク(4)により遮光し
て、外周部保護膜(3a)、側面部保護膜(3b)、裏
面回り込み部保護膜(3c)を未硬化とし、現像時に溶
解除去するもので、前記マスク(4)は保護膜形成部分
をくり抜いた構造で、マスク内部の下部にフランジ状の
張出基部が設けられたものであり、マスク(4)が、更
に、基板(1)のカラ−フィルタ−単位のチップ切断線
(5)上及びその近傍部(以下切断線上という)におけ
るマスク部を有し、該マスク部に対応する未硬化の切断
線上の保護膜(3d)を、現像時に同時に溶解除去する
ことを特徴とするものである。
According to the present invention, there is provided a method of manufacturing a color filter having a structure in which colored pixels of a plurality of colors are arranged on a transparent substrate, and a protective film made of a transparent resin is laminated on the colored pixels. In the method for producing a filter, a photocurable transparent resin for a protective film (3) or a solution thereof is applied to a substrate (1).
After applying to the entire surface of the substrate, when performing exposure for photo-curing, light is shielded by a mask (4), and the outer peripheral part protective film (3a), the side part protective film (3b), and the back side wraparound part protective film (3c) are formed. ) Is uncured and dissolved and removed at the time of development. The mask (4) has a structure in which a protective film forming portion is hollowed out, and a flange-shaped overhang base is provided at a lower portion inside the mask.
Is characterized in that the obtained those. Also,
The method for manufacturing a color filter of the present invention is a method of manufacturing a color filter having a structure in which colored pixels of a plurality of colors are arranged on a transparent substrate and a protective film made of a transparent resin is laminated on the colored pixels. A method for producing a multi-faced color filter, comprising applying a light-curable transparent resin for a protective film (3) or a solution thereof to the entire surface of a substrate (1), and then performing exposure for light curing. in conducting, and shielded by the mask (4), the outer peripheral portion protective layer (3a), in which the side surface portion protective layer (3b), and uncured backside curved portion protective layer (3c), is dissolved and removed during the development, the Mask (4) is the protective film forming part
With a hollow structure, a flange-like
An overhang base is provided, and the mask (4) further includes a mask portion on a chip cutting line (5) of a color filter unit of the substrate (1) and a portion near the chip cutting line (hereinafter referred to as a cutting line). And the protective film (3d) on the uncured cutting line corresponding to the mask portion is dissolved and removed simultaneously with the development.

【0006】[0006]

【作用】本発明によれば,保護膜の基板外周もり上がり
が除去され,液晶表示装置のセル組み工程におけるセル
ギャップ不良,基板割れを減少させることができる。ま
た,保護膜の基板裏面の回り込みを,現像時に同時に溶
解除去することにより後工程での発塵,外周もり上がり
除去の効果と同様にセル組み工程における基板割れを減
少させることができる。更に,多面付けのカラーフィル
ターの製造方法において,基板のカラーフィルター単位
のチップ切断線上及びその近傍部において,対応する未
硬化の保護膜を現像時に同時に溶解除去することによ
り,単位のチップに切断時,切断後の保護膜の剥がれ,
チッピングを防止し,カラーフィルターへの保護膜の破
片の付着を防止することができる。
According to the present invention, the rise of the protection film on the outer periphery of the substrate is removed, and the cell gap defect and the substrate crack in the cell assembling process of the liquid crystal display device can be reduced. Further, by dissolving and removing the wraparound of the protective film on the back surface of the substrate at the same time as the development, it is possible to reduce the substrate cracking in the cell assembling process as well as the effects of dust generation in the subsequent process and removal of the outer periphery rising. Furthermore, in the method for manufacturing a multi-faced color filter, the corresponding uncured protective film is dissolved and removed at the same time as development on the chip cutting line of the color filter unit of the substrate and in the vicinity thereof, so that the chip is cut into the unit chip. , Peeling of protective film after cutting,
Chipping can be prevented and adhesion of fragments of the protective film to the color filter can be prevented.

【0007】[0007]

【実施例】以下,図面を参照しながら本発明の実施例を
説明する。 (実施例1)図1は本発明のカラーフィルターの製造工
程を説明する図である。図1(a)の大きさ300mm
×350mm,厚さ1.1mmのガラスの基板1(Co
rning#7059)を充分に洗浄し,図1(b)に
示すように,Crを1000Åスパッタリングし,バー
ニングした。ついで,図1(c)に示すように,Cr層
にブラックマトリックス及びチップ切断線5を形成し,
その上に,赤色感光性樹脂を1.2μmの膜厚になるよ
うに塗布し,その後,70℃,30分間オーブン中で乾
燥させ,水銀ランプを用いて露光し,水によるスプレー
現像を1分間行い,赤色画素を形成すべき領域に赤色の
着色画素2(赤色のレリーフ画像R)を形成し,更に,
150℃で30分間加熱硬化させた。同様の工程を繰り
返して,緑色画素を形成すべき領域に緑色の着色画素2
(緑色のレリーフ画像G)を形成し,青色画素を形成す
べき領域に青色の着色画素2(青色のレリーフ画像B)
を形成して着色層を完成した。次に,図1(d)に示す
ように,光硬化性透明樹脂を用いて保護膜3を形成し
た。まず,光硬化性アクリレートオリゴマーとして,フ
ェノールノボラックエポキシアクリレートを70重量
部,多官能重合性モノマーとして,ジペンタエリスリト
ールヘキサアクリレート(日本化薬製DPHA)を30
重量部混合し,更に,重合開始剤として,イルガキュア
651(チバガイギー社製)3重量部を混合した配合物
をエチルセロソルブアセテート250重量部中に溶解さ
せ,その溶液15gを用いて,フリンジフリーのスピン
コーターで,前記着色層上に1.5μmの厚さに塗布し
た。塗布後に,温度80℃のホットプレート上で90秒
間乾燥させた。
An embodiment of the present invention will be described below with reference to the drawings. (Embodiment 1) FIG. 1 is a diagram for explaining a manufacturing process of a color filter of the present invention. 300 mm in size of FIG.
X 350 mm, 1.1 mm thick glass substrate 1 (Co
(ring # 7059) was sufficiently washed, and as shown in FIG. 1 (b), Cr was sputtered at 1000 ° and burned. Next, as shown in FIG. 1C, a black matrix and a chip cutting line 5 are formed on the Cr layer,
A red photosensitive resin is applied thereon to a thickness of 1.2 μm, then dried in an oven at 70 ° C. for 30 minutes, exposed using a mercury lamp, and spray-developed with water for 1 minute. To form a red colored pixel 2 (red relief image R) in a region where a red pixel is to be formed.
The composition was cured by heating at 150 ° C. for 30 minutes. The same process is repeated to form a green colored pixel 2 in a region where a green pixel is to be formed.
(Green relief image G) and blue colored pixels 2 (blue relief image B) in the area where blue pixels are to be formed
Was formed to complete a colored layer. Next, as shown in FIG. 1D, a protective film 3 was formed using a photocurable transparent resin. First, 70 parts by weight of phenol novolak epoxy acrylate as a photocurable acrylate oligomer, and 30 parts of dipentaerythritol hexaacrylate (DPHA, manufactured by Nippon Kayaku) as a polyfunctional polymerizable monomer.
The mixture was mixed with 3 parts by weight of Irgacure 651 (manufactured by Ciba Geigy) as a polymerization initiator, and dissolved in 250 parts by weight of ethyl cellosolve acetate. It was applied to a thickness of 1.5 μm on the colored layer by a coater. After the application, it was dried on a hot plate at a temperature of 80 ° C. for 90 seconds.

【0008】ついで,図1(e)に示すように,マスキ
ング露光を行った。(図1(e)以下では,切断線用の
マスク部を用いて描かれているが,この点については,
実施例2で説明する)裏回り及び外周もり上がりを除去
するには,430mm×330mmで5mm厚の黒アル
マイト処理したアルミ板をマスク4として用いた。マス
ク4は外周部10mmをマスキングし,保護膜形成部分
はくり抜いた。このマスクではベタ露光時と同じ露光時
間で製造することができ,製造のスループットが維持で
きる。このマスク4を用いて,3.5kwの超高圧水銀
ランプによって紫外線を約30秒間照射した。なお,マ
スク4としては,裏面回り込み部保護膜3cの幅が5m
m程度の場合,8mm幅のマスキング部を有する(メタ
ル)マスクを使用すれば,充分に除去ができる。また,
図3(a)に平面を示すマスク4の断面形状は,マスク
エッジによる露光時の光の散乱を低減するために,例示
の図3(b),図3(c)のようにすると良い。例え
ば,マスク4の下部内縁を4a,マスク4の外縁を4
b,マスク4内部の下部フランジ状の張出基部の線を4
cとし,マスク4の厚みが6mmのとき,フランジ状部
の高さを1mmとすればよい。続いて,図1(f)に示
すように,ジクロロメタンによりカラーフィルター両面
をスプレー現像し,塗布膜の外周部である外周部保護膜
3aの未硬化部分,基板1の側面部の未硬化状態にした
側面部保護膜3b,さらに,未硬化状態にした基板1裏
面の裏面回り込み部保護膜3cを除去した。更に,完全
な硬化状態を得るため,また,その他の不純物除去のた
めに,180℃,60分間ポストベークを行った。次
に,カラーフィルター上の所定位置にマスクスパッタリ
ングによってITO膜を形成し,外周部保護膜3a,側
面部保護膜3b,裏面回り込み部保護膜3cの除去され
たカラーフィルターを得た。
Next, as shown in FIG. 1E, masking exposure was performed. (In FIG. 1 (e) and subsequent drawings, the mask is used for the cutting line.
A 430 mm × 330 mm, 5 mm thick black alumite-treated aluminum plate was used as the mask 4 to remove the back circumference and the rise of the outer periphery (described in the second embodiment). The outer periphery of the mask 4 was masked at 10 mm, and the portion where the protective film was formed was cut out. This mask can be manufactured in the same exposure time as the solid exposure, and the manufacturing throughput can be maintained. Using this mask 4, ultraviolet light was irradiated for about 30 seconds by a 3.5 kW ultra-high pressure mercury lamp. In addition, as for the mask 4, the width of the protective film 3c around the back surface is 5 m.
In the case of about m, a (metal) mask having a masking portion having a width of 8 mm can be sufficiently removed. Also,
The cross-sectional shape of the mask 4 whose plane is shown in FIG. 3 (a) may be as shown in FIGS. 3 (b) and 3 (c) in order to reduce scattering of light during exposure due to the mask edge. For example, the lower inner edge of the mask 4 is 4a, and the outer edge of the mask 4 is 4a.
b, the line of the lower flange-shaped overhang base inside the mask 4 is
When the thickness of the mask 4 is 6 mm, the height of the flange portion may be 1 mm. Subsequently, as shown in FIG. 1 (f), both sides of the color filter are spray-developed with dichloromethane to form an uncured portion of the outer peripheral protective film 3a which is an outer peripheral portion of the coating film and an uncured portion of the side surface portion of the substrate 1. The side surface protection film 3b thus removed and the back surface wraparound portion protection film 3c on the back surface of the uncured substrate 1 were removed. Further, in order to obtain a completely cured state and to remove other impurities, post-baking was performed at 180 ° C. for 60 minutes. Next, an ITO film was formed at a predetermined position on the color filter by mask sputtering to obtain a color filter from which the outer peripheral portion protective film 3a, the side portion protective film 3b, and the back surface wraparound portion protective film 3c were removed.

【0009】(実施例2)切断線上の保護膜3dを除去
する例として,基板1を旭硝子(株)製AX材ガラスと
し,実施例1同様に図1(a)〜図1(d)の工程を行
った。ついで,図1(e)のマスキング工程において,
切断線上及び両側各300μmをマスキングするマスク
部を有するマスク4を用いて,実施例1同様に,3.5
kwの超高圧水銀ランプによって紫外線を約30秒間照
射した。続いて,図1(f)に示すように,ジクロロメ
タンによりカラーフィルター両面をスプレー現像し,塗
布膜の外周部である外周部保護膜3aの未硬化部分,基
板1の側面部の未硬化状態にした側面部保護膜3b,,
未硬化状態にした基板1裏面の裏面回り込み部保護膜3
c及び切断線上の保護膜3dを除去した。更に,完全な
硬化状態を得るため,180℃,60分間ポストベーク
を行った。次に,カラーフィルター切断用の保護膜とし
て,酢酸ビニルアクリル系樹脂のエチルセロソルブアセ
テート溶液を10μmの膜厚になるように塗布し,60
℃,60分間乾燥した。続いて,裏面に同様に2μmの
切断用の保護膜を形成し,裏面からダイシング切断を行
い,所定のチップサイズに切断し,ジクロロメタンに2
分間浸漬し,切断用の保護膜を除去し,図1(g)に示
すように,チップのカラーフィルターを製造した。図2
に,切断部の部分拡大平面図でその寸法例をを示す。切
断線上の保護膜3dが除去されていないカラーフィルタ
ーが12.5%(20/160チップ)の異物付着に対
し,切断線上の保護膜3dが除去されたカラーフィルタ
ーは3.1%(5/160チップ)と異物付着の発生が
抑えられた。
(Embodiment 2) As an example of removing the protective film 3d on the cutting line, the substrate 1 is made of AX material glass manufactured by Asahi Glass Co., Ltd., and as in Embodiment 1, FIGS. 1 (a) to 1 (d) are used. The process was performed. Next, in the masking step of FIG.
Using a mask 4 having a mask portion for masking 300 μm each on the cutting line and on both sides as in Example 1, 3.5.
Ultraviolet light was irradiated for about 30 seconds by a kw ultrahigh pressure mercury lamp. Subsequently, as shown in FIG. 1 (f), both sides of the color filter are spray-developed with dichloromethane to form an uncured portion of the outer peripheral protective film 3a which is an outer peripheral portion of the coating film and an uncured portion of the side surface portion of the substrate 1. Side surface protective film 3b,
Backside wraparound portion protection film 3 on backside of substrate 1 in uncured state
c and the protective film 3d on the cutting line were removed. Furthermore, post-baking was performed at 180 ° C. for 60 minutes to obtain a completely cured state. Next, as a protective film for cutting the color filter, an ethyl cellosolve acetate solution of vinyl acetate acrylic resin is applied to a thickness of 10 μm,
C. and dried for 60 minutes. Subsequently, a 2 μm protective film for cutting is similarly formed on the back surface, dicing is cut from the back surface, cut into a predetermined chip size, and cut into dichloromethane.
After immersion for a minute, the protective film for cutting was removed, and a color filter of a chip was manufactured as shown in FIG. FIG.
Fig. 2 shows an example of the dimensions of the cut portion in a partially enlarged plan view. The color filter from which the protective film 3d was not removed on the cutting line was 12.5% (20/160 chips), whereas the color filter from which the protective film 3d was removed on the cutting line was 3.1% (5/50). 160 chips) and the generation of foreign matter adhesion was suppressed.

【0010】[0010]

【発明の効果】光硬化性樹脂保護膜の外周部もり上がり
と裏回り及びチップ切断線上の保護膜を除去することに
より,後工程での接触による発塵,セル組み工程での基
板割れとセルギャップ不良,切断線近傍からの保護膜の
チッピングによるゴミ付着が防止できる。
According to the present invention, the outer peripheral portion of the photo-curable resin protective film is lifted up, the back surface is removed, and the protective film on the chip cutting line is removed. It is possible to prevent dust from adhering due to chipping of the protective film from the gap failure and the vicinity of the cutting line.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のカラーフィルターの製造工程を説明す
る図である。
FIG. 1 is a diagram illustrating a process for manufacturing a color filter of the present invention.

【図2】本発明のカラーフィルターの切断部の寸法例を
説明する部分拡大平面図である。
FIG. 2 is a partially enlarged plan view illustrating an example of dimensions of a cut portion of the color filter of the present invention.

【図3】本発明のカラーフィルターの製造方法に用いる
マスクの形状例を説明する図である。
FIG. 3 is a diagram illustrating an example of the shape of a mask used in the method for manufacturing a color filter of the present invention.

【符号の説明】[Explanation of symbols]

1 基板 2 着色画素 3 保護膜 3a 外周部保護膜 3b 側面部保護膜 3c 裏面回り込み部保護膜 3d 切断線上の保護膜 4 マスク 5 チップ切断線 DESCRIPTION OF SYMBOLS 1 Substrate 2 Colored pixel 3 Protective film 3a Peripheral protective film 3b Side protective film 3c Backside protective film 3d Protective film on cutting line 4 Mask 5 Chip cutting line

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平3−129302(JP,A) 特開 平4−278902(JP,A) 特開 昭57−42009(JP,A) (58)調査した分野(Int.Cl.7,DB名) G02B 5/20 101 ────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-3-129302 (JP, A) JP-A-4-278902 (JP, A) JP-A-57-42009 (JP, A) (58) Field (Int.Cl. 7 , DB name) G02B 5/20 101

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 透明基板上に、複数色の着色画素を配列
し、着色画素上に透明樹脂による保護膜を積層した構造
のカラ−フィルタ−の製造方法において、保護膜(3)
用の光硬化性透明樹脂又はその溶液を基板(1)の表面
全体に塗布した後、光硬化のための露光を行うにあた
り、マスク(4)により遮光して、外周部保護膜(3
a)、側面部保護膜(3b)、裏面回り込み部保護膜
(3c)を未硬化とし、現像時に溶解除去するもので、
前記マスク(4)は保護膜形成部分をくり抜いた構造
で、マスク内部の下部にフランジ状の張出基部が設けら
れたものであることを特徴とするカラ−フィルタ−の製
造方法。
A method for manufacturing a color filter having a structure in which colored pixels of a plurality of colors are arranged on a transparent substrate and a protective film made of a transparent resin is laminated on the colored pixels.
After applying a photocurable transparent resin or a solution thereof to the entire surface of the substrate (1), when performing exposure for photocuring, light is shielded by a mask (4) and the outer peripheral portion protective film (3) is exposed.
a), the side surface protective film (3b) and the back side wraparound portion protective film (3c) are uncured and are dissolved and removed at the time of development.
The mask (4) has a structure in which a protective film forming portion is hollowed out.
At the bottom inside the mask, a flange-shaped overhang base is provided.
A method for manufacturing a color filter, characterized in that the color filter is manufactured.
【請求項2】 透明基板上に、複数色の着色画素を配列
し、着色画素上に透明樹脂による保護膜を積層した構造
のカラ−フィルタ−を多面付けして製造する多面付けの
カラ−フィルタ−の製造方法であって、保護膜(3)用
の光硬化性透明樹脂又はその溶液を基板(1)の表面全
体に塗布した後、光硬化のための露光を行うにあたり、
マスク(4)により遮光して、外周部保護膜(3a)、
側面部保護膜(3b)、裏面回り込み部保護膜(3c)
を未硬化とし、現像時に溶解除去するもので、前記マス
ク(4)は保護膜形成部分をくり抜いた構造で、マスク
内部の下部にフランジ状の張出基部が設けられたもので
あり、マスク(4)が、更に、基板(1)のカラ−フィ
ルタ−単位のチップ切断線(5)上及びその近傍部(以
下切断線上という)におけるマスク部を有し、該マスク
部に対応する未硬化の切断線上の保護膜(3d)を、現
像時に同時に溶解除去することを特徴とするカラ−フィ
ルタ−の製造方法。
2. A multi-colored color filter manufactured by arranging a plurality of color filters having a structure in which colored pixels of a plurality of colors are arranged on a transparent substrate and a protective film made of a transparent resin is laminated on the colored pixels. The method according to (1), wherein after the photocurable transparent resin for the protective film (3) or a solution thereof is applied to the entire surface of the substrate (1), the light-curing exposure is performed.
The outer peripheral portion protective film (3a) is shielded from light by the mask (4),
Side surface protection film (3b), back surface wraparound portion protection film (3c)
In which was uncured, to dissolve and remove at the time of development, the mass
The mask (4) has a structure in which the protective film forming part is hollowed out, and a mask is formed.
With a flange-shaped overhang base at the bottom of the inside
The mask (4) further has a mask portion on the chip cutting line (5) of the color filter unit of the substrate (1) and the vicinity thereof (hereinafter referred to as a cutting line), and corresponds to the mask portion. A method of manufacturing a color filter, comprising simultaneously dissolving and removing the protective film (3d) on the uncured cutting line during development.
JP23587293A 1993-08-30 1993-08-30 Color filter and manufacturing method thereof Expired - Fee Related JP3341219B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23587293A JP3341219B2 (en) 1993-08-30 1993-08-30 Color filter and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23587293A JP3341219B2 (en) 1993-08-30 1993-08-30 Color filter and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH0763912A JPH0763912A (en) 1995-03-10
JP3341219B2 true JP3341219B2 (en) 2002-11-05

Family

ID=16992501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23587293A Expired - Fee Related JP3341219B2 (en) 1993-08-30 1993-08-30 Color filter and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP3341219B2 (en)

Also Published As

Publication number Publication date
JPH0763912A (en) 1995-03-10

Similar Documents

Publication Publication Date Title
JPH04156402A (en) Color filter
JP3341219B2 (en) Color filter and manufacturing method thereof
JPH08184820A (en) Production of substrate with functional film
JPH0990383A (en) Liquid crystal display element
JP3297953B2 (en) Chamfer separation processing method of color filter
JP4918827B2 (en) Manufacturing method of color filter
JPH06273617A (en) Production of substrate for color filter or liquid crystal display device
JP3098562B2 (en) Manufacturing method of color filter
JPH04369604A (en) Defect part correcting method for color filter
JPH07152038A (en) Forming method of spacer for liquid crystal panel
JP2013025148A (en) Method for selectively peeling color filter layer from array substrate with color filter
JP2007183363A (en) Mother substrate, method of manufacturing the mother substrate and method of manufacturing microlens array substrate
JP4701502B2 (en) Sputtering metal mask
JPH0829615A (en) Correcting method of pattern
JPH09197417A (en) Liquid crystal display element
JPH0643468A (en) Method for controlling gap in liquid crystal cell
JP3064855B2 (en) Manufacturing method of color filter
JPH10133012A (en) Production of color filter
JP3128161B2 (en) Manufacturing method of color filter
JPH10142590A (en) Production of optical substrate
JP3461577B2 (en) Manufacturing method of color filter
JP2006047800A (en) Color filter
JP2004198685A (en) Manufacturing method of color filter
KR100325478B1 (en) Method for fabricating liquid crystal display
JP2007279223A (en) Microlens array substrate and liquid crystal display device

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20020219

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20020702

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080823

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090823

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090823

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100823

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110823

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110823

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120823

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120823

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130823

Year of fee payment: 11

LAPS Cancellation because of no payment of annual fees