JP3337996B2 - Deep hole processing device and deep hole measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deep hole drilling apparatus for performing high precision deep hole drilling, and further relates to a deep hole measuring apparatus for measuring the shape precision of a processed deep hole.

[0002]

2. Description of the Related Art Machining a hole having a large hole depth / hole diameter ratio is called deep hole machining. In deep hole machining having a particularly large hole depth / hole diameter ratio, a BTA (Boring and Trepanning As) is used.
sociation) tools and the like are used. An example of a deep hole drilling method using a BTA tool is as follows.
The workpiece to be machined is fixed to the headstock of the machine tool and rotated, and a boring bar with a tool head at the tip is brought into contact with the workpiece. Processing.

[0003]

In deep hole drilling,
Since the hole to be processed is deep, it is necessary to lengthen the boring bar, and there is a problem that bending due to the weight of the boring bar or bending due to non-uniformity of the material is likely to occur. To solve this problem, Patent No. 25
As disclosed in Japanese Patent No. 43409, in the process of forcibly feeding a deep hole machining tool into a rotating workpiece, the deep hole machining tool is guided while correcting bending using a laser beam. There is a control method. In this method, a reflector is provided inside the tip of the deep hole machining tool, and a laser beam emitted from the outside behind the tool is reflected, and a position shift of the tool is detected by an optical position detector. Since the tool is provided with a reflector, when the tool is rotated, the reflector also rotates, so the optical position detection device must be rotated accordingly, which is not suitable for rotating the tool itself. For this reason, there is a problem that it is difficult to perform a high-precision deep hole drilling when the workpiece cannot be rotated, such as when the workpiece has an asymmetric outer shape or is large.

Furthermore, since a boring bar must be used, there is a physical limit to the length of a deep hole that can be machined due to the rigidity of the boring bar. Further, a deep hole measuring device for measuring the shape accuracy of a processed deep hole is a type in which a measuring device is attached to a tip of an arm, and when the arm is long, the arm is bent by its own weight. Therefore, there is a problem that accurate measurement cannot be performed. Therefore, there arises a problem that the rigidity of the arm limits the depth of the measurable deep hole, and the diameter of the deep hole is several tens of meters.
When m and depth are several meters, there is actually no measuring instrument capable of measuring shape accuracy with high accuracy.

The present invention has been made in view of such a problem, and when rotating a deep hole drilling tool, even if the rotation axis of the tool moves from the guide axis, the tool detects the movement and detects the tool. It is an object of the present invention to provide a deep hole drilling device which makes it possible to drill a straight deep hole by returning the shaft to an induction axis. Furthermore, the present invention provides a deep hole drilling that enables high-precision unlimited deep hole drilling without a physical limit to the processing depth due to the length of the rotating shaft such as a boring bar that holds a deep hole drilling tool. It is intended to provide a device.

Further, the present invention provides a deep hole measuring apparatus and a length of an arm capable of measuring the shape accuracy of a machined deep hole with high accuracy without being affected by the rigidity of an arm supporting a measuring instrument. It is an object of the present invention to provide a deep hole measuring device capable of measuring the shape accuracy of a deep hole without any physical limitations due to the physical limitations.

[0007]

SUMMARY OF THE INVENTION A deep hole machining apparatus according to the present invention detects the attitude of a deep hole machining tool, changes the attitude according to the detection result, and guides the deep hole machining tool along a guide axis. And a mechanism for performing deep hole drilling without reducing the guidance accuracy even when the tool is rotated.

Further, the deep hole measuring device of the present invention detects a posture of the deep hole measuring device, changes the posture according to the detection result, and guides the deep hole measuring device along a guide axis. And enables high-precision measurement of the shape accuracy of the deep hole. In detail, the deep hole drilling device of the present invention is a device main body having a central axis, a rotating shaft rotatable around the central axis, and a tool having a tool at a tip end thereof, along the central axis. A light emitting unit that emits light, a posture detecting unit that is provided outside the device main body in opposition to the light emitting unit, receives light emitted from the light emitting unit, and detects a posture of the device main body; At least 3 is provided on an outer peripheral portion of the device main body, expands and contracts with a wall surface around the device main body, and changes a posture of the device main body.
And a control means for controlling the operation of the attitude adjusting means according to the attitude of the apparatus main body detected by the attitude detecting means.

Further, a deep hole drilling device of the present invention is a device main body having a central axis, a rotary shaft rotatable about the central axis, and having a tool at a tip end thereof, and rotating the rotary shaft. Rotation driving means for emitting light, light emitting means for emitting light along the central axis, and provided outside the apparatus main body in opposition to the light emitting means, for receiving the light emitted from the light emitting means and receiving the light. Attitude detecting means for detecting the attitude of the main body, and at least three attitude adjusting means disposed on the outer peripheral portion of the apparatus main body and extending and contracting between the peripheral wall of the apparatus main body and changing the attitude of the apparatus main body. And control means for controlling the operation of the attitude adjusting means in accordance with the attitude of the apparatus main body detected by the attitude detecting means, and feed means for providing relative feed between the workpiece and the apparatus main body; Having The features.

The attitude of the apparatus main body means the inclination (angle) and displacement of the center axis of the apparatus main body with respect to a predetermined guide axis. A mechanism for detecting a posture constituted by the light emitting means, the posture detecting means, the posture adjusting means, and the control means detects the posture of the apparatus main body so that the central axis of the apparatus main body coincides with the guidance axis. By guiding the deep hole machining tool device to, the effects of non-uniformity of the material of the workpiece, shape error of the prepared hole, vibration during machining, or alignment error due to bending of the boring bar,
Processing of straight holes with higher accuracy becomes possible. Further, by setting the guide axis of the deep hole machining tool device in advance and guiding the deep hole tool tool along the guide axis, it becomes possible to machine a curved deep hole which has been impossible in the past.

Preferably, the light emitting means is provided at the tip of the rotating shaft on the apparatus main body or on the central axis. If the light emitting means is provided in the apparatus main body, even if the tool rotates, the apparatus main body does not rotate, the mechanism for detecting the attitude of the apparatus main body is not affected, and the light emitting means is provided at the tip of the rotating shaft. If it is provided on the central axis which is the rotation axis, the optical axis of the light emitting means will not be shaken, so that the mechanism for detecting the attitude of the apparatus main body is not affected. Therefore, the guiding accuracy of the apparatus main body is improved, and high-precision deep hole drilling can be performed.

Preferably, two sets of the attitude adjusting means are provided on the outer peripheral portion of the apparatus main body in the front and rear direction along the central axis, and each set includes at least three attitude adjusting means. As described above, by providing two sets of posture adjusting means in the front and rear directions along the central axis, it is possible to accurately give an angle to the apparatus main body and adjust the displacement independently of the angle.

In one embodiment, in the deep hole drilling apparatus according to the present invention, the rotating shaft includes a tool head at a tip portion, and the tool head includes a rotating axis extending parallel to the center axis, and a rotating axis. And a second rotation shaft for rotating the second rotation shaft, the second rotation shaft having the tool at its tip end, and a second rotation driving means for rotating the second rotation shaft. As the tool, a milling cutter or a grinding tool can be used.

A second rotating shaft having a rotation axis different from a center axis which is a rotation axis of the rotating shaft, and further connected to the rotating shaft by rotating the rotating shaft held by the tool head rotated by the rotating shaft; Since the center of the tool performs a circular motion, the tool has no fixed points. When a milling cutter is used as a tool, the center of a tool rotating about one axis is a fixed point, and the machining ability at the center is extremely low. However, since the fixed point of the tool is eliminated by configuring as described above,
Processing capacity is improved. Therefore, if the deep hole drilling device of the present embodiment is used, it is possible to perform deep hole drilling even when the pilot hole is not drilled in the workpiece.

On the other hand, when the grinding tool is used as a tool, the tool can grind the hole wall of the workpiece while making a circular motion by the revolving axis, so that the hole wall is entirely ground in the circumferential direction. This makes it possible to finish a deep hole with higher precision. In the deep hole drilling device using the deep hole drilling tool of the present invention, the rotation driving means and the feeding means are provided outside the apparatus body, and the feeding means feeds the workpiece along the central axis. Preferably, the rotation driving means may be provided on the apparatus main body, and the feeding means may be provided on a rear portion of the apparatus main body, and the feeding means may feed the apparatus main body along the central axis direction.
That is, a deep hole machining robot is obtained.

Since the apparatus main body is provided with the rotation driving means and the feeding means, there is no need to apply a rotating force from the outside or to feed the workpiece, so that a boring bar or an arm becomes unnecessary, and the processing depth by the boring bar is eliminated. Eliminates physical limitations. That is, deep hole processing of an infinite depth becomes possible. Further, since there is no boring bar, a feed amount detecting means for detecting a feed amount of the apparatus main body is provided at an arbitrary position of the apparatus main body, and by guiding the deep hole processing apparatus along a predetermined guide axis, A freely curved deep hole can be machined. In addition, since a boring bar and a feed stand are not required, the portable device can be carried.

[0017] A deep hole measuring apparatus according to the present invention includes a device main body having a central axis, a rotating shaft rotatable about the central axis, rotation driving means for rotating the rotating shaft, and a tip of the rotating shaft. Provided in the portion, a radial distance detecting means for measuring a radial distance from the rotation axis to the hole wall of the object to be measured, and a light emitting means for emitting light along the central axis,
Attitude detecting means provided outside the apparatus main body facing the light emitting means and receiving light emitted from the light emitting means to detect the attitude of the apparatus main body, and provided at an outer peripheral portion of the apparatus main body The at least three attitude adjusting means that expands and contracts with the peripheral wall of the apparatus main body and changes the attitude of the apparatus main body, and according to the attitude of the apparatus main body detected by the attitude detecting means, It is characterized by comprising control means for controlling the operation of the attitude adjusting means, and feed means for giving relative feed between the object to be measured and the apparatus main body.

An attitude of the apparatus main body is detected by a mechanism for detecting an attitude constituted by the light emitting means, the attitude detecting means, the attitude adjusting means, and the control means, and the central axis of the apparatus main body is aligned with the guiding axis. By guiding the deep hole measuring device so that they coincide with each other, high-precision measurement of the shape accuracy of the deep hole becomes possible. Preferably, the light emitting means is provided at the tip of the rotating shaft on the device main body or on the central axis.

Preferably, two sets of the posture adjusting means are provided on the outer peripheral portion of the apparatus main body in front and rear along the center axis, and each set includes at least three posture adjusting means. In the deep hole measuring device of the present invention, the rotation driving means and the feeding means may be provided outside the apparatus main body, and the feeding means may feed the object to be measured along the central axis, Means may be provided inside the device body, and the feeding means may be provided at the rear of the device body, and the feeding means may feed the device body along the central axis. That is, a deep hole measurement robot is obtained.

Since the apparatus main body is provided with the rotation driving means and the feeding means, there is no need to apply a rotating force from outside or to send the object to be measured, so that an arm or the like is not required.
There is no physical limitation of the measurement depth by the arm. That is, deep hole measurement of an infinite depth becomes possible. Furthermore, since there is no arm, it is possible to measure a curved deep hole more freely by guiding the deep hole measuring device along a predetermined guide axis. In addition, since an arm and a feed stand are not required, carrying is possible.

Preferably, the feed means includes a feed amount detecting means for detecting a feed amount. The provision of the feed amount detecting device makes it possible to measure the shape accuracy of the deep hole, for example, surface roughness, straightness, cylindricity, etc. in relation to the feed amount.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following, a deep hole processing apparatus and a deep hole measuring apparatus according to the present invention will be described in detail with reference to embodiments. FIG. 1 is a schematic overall view showing the configuration of a deep hole drilling device using the deep hole drilling tool of the present invention. For the sake of explanation, a workpiece having a pilot hole to be machined is shown in cross section. ing.

The deep hole drilling apparatus 11 shown in FIG. 1 includes a deep hole drilling tool 13, a machine tool 19 equipped with a boring bar 17 which is a rotation driving means 15 for rotating the deep hole drilling tool 13, A feed base 23 of a machine tool, which is feed means for feeding the workpiece 21 toward the deep hole processing tool 13, is provided. The boring bar 17 rotates about a rotation axis 25. Preferably, the boring bar 17 is hollow and one end of the boring bar 17 has a suction device 2.
7 is connected to discharge cutting chips generated in the processing portion through a hole in the boring bar 17.

The feed bar 23 is guided along a guide device 29 parallel to the rotation axis 25 of the boring bar 17. Preferably, the feed base 23 includes a feed amount detecting device 31 for detecting the feed amount. As the feed amount detecting device 31, an optical encoder, a mechanical encoder, or the like is used. For example, when the guide device 29 is a ball screw also serving as a power transmission, the above-described various encoders are attached to the ball screw. Detect rotation of

The workpiece 21 has a pilot hole 33 formed in advance. Preferably, in order to guide the deep hole machining tool 13 of the present invention straight into the prepared hole 33 of the work piece 21 until the tool 13 completely enters the prepared hole 33 of the work piece 21. , A guide bush 35 is used. The workpiece 21 and the guide bush 35 are fixed to the feed base 23, and the feed base 23
To the deep hole machining tool 13.

FIG. 2 is a partial side sectional view showing details of the deep hole machining tool 13, and FIGS. 3 and 4 are a front view of the deep hole machining tool 13 of FIG. 2 and a line AA of FIG. 2, respectively. FIG. Referring to FIG. 2, the deep hole machining tool 13
Is a device main body 37, a tool head 39 held by the device main body 37, a light emitting means 41, and a posture detecting means 43 for detecting the postures of the device main body 37 and the tool head 39.
A piezoelectric actuator 45 serving as a posture adjusting means for changing the posture of the apparatus main body 37; and a control device 47 serving as a control means for controlling the operation of the posture adjusting means.

The apparatus main body 37 has a center axis 49, and holds the rotating shaft 51 rotatably about the center axis 49 by a bearing 53. Preferably, the device main body 37 has a cylindrical shape. As the bearing 53, a tapered roller bearing is preferable, and a preload is applied to the bearing 53 in the axial direction so that the play between the device body 37 and the bearing 53 is completely eliminated. The tool head 39 is provided at the tip of the rotating shaft 51. The tool head 39 may be formed integrally with the rotating shaft 51.

The tool head 39 has a circular cross section and has at least one cutting edge 55 which is a tool. Preferably,
A suction port 57 is provided near the cutting blade 55 for sucking cutting chips. The suction port 57 has a central axis 4 at the center of the rotating shaft 51.
It is connected to the suction device 27 shown in FIG. 1 through an inner hole 59 extending along 9 and a hole inside the boring bar 17 connected to the inner hole 59. In order to reduce the unbalanced cutting force acting on the tool head 39 and improve the straightness of the tool head 39, it is conceivable to arrange the cutting blades 55 in a symmetrical shape. Suction port 5
It is preferable that the tool has one cutting edge 55 from the viewpoint that the problem regarding the suction of the cutting chips is likely to occur because there are a plurality of the cutting chips 7 and the direction control.

Further, around the tool head 39, there are provided a suitable number of guide pads 61 which can be attached and detached so as to be optimally arranged according to the cutting state. In FIG.
There are 11 recesses that can be fitted with guide pads,
Guide pads 61 are mounted on five of them. FIG.
As shown in (2), a piezoelectric actuator 45 as at least three attitude adjusting means is provided on the outer peripheral portion of the apparatus main body 37. Preferably, the piezoelectric actuator 45 is provided in the depression 63 provided in the outer peripheral portion, but it is also possible to provide the piezoelectric actuator 45 on the outer peripheral of the device main body 37.

The piezoelectric actuator 45 can be extended and contracted in the radial direction from the main body 37 of the apparatus.
The apparatus main body 37 is moved in the radial direction by contacting the hole wall of the workpiece 21 surrounding the periphery of 7. By arranging the three piezoelectric actuators 45 on the circumference, the device main body 37 can be moved, that is, displaced, in an arbitrary radial direction. Preferably, these piezoelectric actuators 45 are evenly arranged on the outer peripheral portion of the device main body 37 as shown in FIG. More preferably, as shown in FIG. 2, two sets of piezoelectric actuators 45 are provided on the outer peripheral portion of the apparatus main body 37 along the central axis 49.
The piezoelectric actuators 45 are evenly arranged on the outer peripheral portion of the device
Control. Further, by providing two sets in front and back along the central axis 49, for example, after operating only one set of front and back piezoelectric actuators to correct the angle of the apparatus main body, both sets of front and rear piezoelectric actuators are operated. By correcting the displacement by moving the apparatus body in parallel, it becomes possible to accurately tilt, that is, give an angle to the apparatus body 37, and to adjust the displacement independently of the angle.
The center axis 49 of the device main body 37 can be accurately matched with the guide axis.

The piezoelectric actuators 45 may be arranged at positions 45 ° from right below and directly above the piezoelectric actuators 45 instead of being evenly arranged to increase the force for pushing the deep hole drilling tool 13 upward. In FIG. 4, a piezoelectric actuator 45 is used as a posture adjusting means. Since the piezoelectric actuator has high rigidity and is lightweight, the weight of the entire deep hole machining tool 13 can be reduced. However, means such as a cam or a linear actuator may be used as the attitude adjusting means.

FIGS. 5 and 6 show one embodiment of a piezoelectric actuator 45. This piezoelectric actuator 45 is of a hybrid type which mechanically expands the elongation of a laminated piezoelectric element. FIG. 5 shows a state of the piezoelectric actuator 45 which is initially contracted, and FIG. 6 shows a state where the piezoelectric actuator 45 is operated and expanded in the radial direction. The piezoelectric actuator 45 includes a fixed triangular prism-shaped first portion 65 and a triangular prism-shaped second portion 67.
And a support pad 69 attached to the lower surface of the second part 67 in the figure, and a piezoelectric element 71 provided to connect between the slopes of the first part 65 and the second part 67. The first part 65 and the second part 67 are partially connected. As shown in FIG. 6, when the piezoelectric element 71 expands by applying a voltage, the second portion 67 moves downward in FIG. 6 with the connection between the first portion 65 and the second portion 67 as a fulcrum, and The support pad 69 provided on 67 is shown in FIG.
Project downward. In this manner, the amount of extension of the piezoelectric element 71 can be increased.

As shown in FIG. 2, an appropriate number of auxiliary support means such as a coil spring 73 may be provided on the outer peripheral portion at the position of the center of gravity of the apparatus main body 37. By providing two sets of front and rear piezoelectric actuators 45 as attitude adjusting means, and supporting the weight of the apparatus main body 37 by the coil spring 73, the piezoelectric actuator 45 moves the apparatus main body 37 in a direction against gravity so that the piezoelectric actuator 45 moves. The load applied to the piezoelectric actuator 45 is reduced.
, The position control range is expanded.

At the rear end of the rotating shaft 51, there is provided a connecting means 75 for rotating the rotating shaft 51, such as the boring bar 17 of the machine tool 19, for rotating the rotating shaft 51. The connecting means 75 transmits the rotation of the rotation driving means 15 to the rotation shaft 51.
The rotation shaft 51 is also movable in a direction perpendicular to the rotation axis 25 of the boring bar 17. As the connection means 75, a flex coupling or the like is used.

By using the flex coupling, it is possible to change the attitude of the apparatus main body regardless of the bending of the boring bar or the like. Deep hole drilling tool 13
May include a gap sensor 77 for detecting the distance between a reference wall surface, for example, a hole wall of the guide bush and the apparatus main body. With the provision of the gap sensor 77, the deep hole machining tool 13 is installed so that the central axis of the pilot hole 33 of the workpiece 21 or the guide hole of the guide bush 35 and the central axis 49 of the apparatus main body match. Becomes possible.

FIG. 7 is a diagram showing details of a mechanism for detecting the attitude of the apparatus main body, that is, the inclination and displacement of the central axis 49 of the apparatus main body 37 with respect to the guide axis. As shown in FIGS. 1 and 2, a mechanism for detecting the attitude of the apparatus main body 37 includes a light emitting unit 41 provided on a front end surface of the tool head 39 on a central axis 49 of the apparatus main body 37, A posture detecting means 43 provided on the guide axis outside the apparatus main body 37 in opposition to the means 41;
A control device 47 for controlling the operation of the piezoelectric actuator 45 as the posture adjusting means in accordance with the posture of the apparatus main body 37 and the tool head 39 held by the main body 37 detected by the control unit 3
It is composed of

By providing the light emitting means 41 on the central axis, the attitude of the apparatus main body can be detected without being affected even when the deep hole drilling tool is rotated. Light emitting means 41
May be provided on a non-rotating portion at the rear end of the device main body 37,
In this case, it is not necessary to provide on the central axis 49 of the apparatus main body 37. If the light emitting means is provided at the rear end of the apparatus main body 37, the light emitting means 41 does not come into contact with the workpiece 21 even if the prepared hole is not formed in the workpiece, so that the pilot hole 33 is provided. It is possible to guide the device main body 37 even when it is not. Further, the light emitting means 41 may be provided inside the tool head 39 so as not to protrude from the front end surface. In any case, the light emitting means 41 emits light along the central axis 49 of the device main body 37.

As the light emitting means 41, a laser light source is used, and preferably, a semiconductor laser is used. Light emitting means 41
Has a battery of a laser light source, and further includes a diffusion lens, a pinhole plate, and the like for converting light from the light source into parallel light in order to obtain a light beam without fluctuation. Posture detection means 43
A half mirror 81 for separating laser light from a laser light source, which is a light emitting means 41, into two directions;
Device body 37 which is the distance between the center axis 49 of the
Displacement detecting position detecting element 83 for detecting displacement of
(Hereinafter, referred to as PSD δ), and a tilt detecting position detecting element 85 (hereinafter, referred to as P.sub.
SDi). The PSDδ83 and PS
Information on the attitude of the apparatus main body 37 detected by the Di 85 and the attitude of the tool head 39 held thereby is transmitted to the control apparatus 47 as shown in FIG. The position detecting element used here is a sensor for detecting the position of a light spot using a semiconductor photodiode.

As shown in FIG. 7, a half mirror 81 is arranged at a distance of l ₁ from a laser light source as the light emitting means 41, and a PSDi 8 is located at a distance of l ₂ from the half mirror 81.
5 and a P at a distance l ₃ from the half mirror 81.
SDδ83 is located. PSDδ83 is on the optical axis 87 of the laser beam, and the normal to the surface of PSDδ83 and PSDi8
The normals of the surface 5 are arranged so as to be substantially perpendicular to each other. The normal of the half mirror 81 is the optical axis 8 of the laser beam.
7 at an angle of about 45 °. However, among the laser beams emitted from the laser light source, each of the PSDs 83 and 85 can receive the laser beam transmitted through the half mirror 81 and the laser beam reflected by the half mirror 81 so that the PSDs 83 and 85 can receive the laser beam.
85 and PSDδ83 can be in any arrangement.

By configuring the mechanism for detecting the attitude of the apparatus main body 37 as described above, the mechanism is simplified, and high detection accuracy can be achieved with a very small number of parts. Further, the attitude of the apparatus main body 37 can be detected without being affected even if the deep hole machining tool 13 is rotated. Next, the operation of the deep hole drilling device 11 of the present invention configured as described above as shown in FIG. 1 will be described.

First, with reference to FIGS. 7 and 8, a method of detecting the attitudes of the apparatus body 37 and the tool head 39 in the deep hole drilling tool 13 and the deep hole drilling apparatus 11 according to the present invention will be described. The half mirror 81 and P included in the posture detecting means 43
When the SDi 85 and the PSD δ83 are arranged as shown in FIG. 7, the arrangement is equivalent to the arrangement shown in FIG. That is, the laser light source which is the light emitting means 41 and the PSD
When i85 and PSDδ83 has a run parallel to on the optical axis 87 of the laser beam, where the place PSDδ83 distance from the laser light source is a light emitting means _{41 L (= l 1 + l} 3), the distance from PSDδ83 This is equivalent to placing the PSDi 85 at l (= l ₂ −l ₃ ).

It is assumed that the central axis 49 of the apparatus main body 37, that is, the optical axis 87 of the laser beam has moved from the guide axis 79 to the attitude of the displacement δ _y and the inclination i _y with respect to the guide axis 79. Apparatus body 3 in PSDi85 and PSDδ87
The movement amount of the light spot before and after the movement of No. 7 is yi,
When yδ, δ _y , i _y , yi, yδ have a relationship represented by the following equation.

Tan (i_y) = (Yi−yδ) / lδ_y= Yi- (L + 1) tan (i_yTherefore, from the above equation, the displacement δ_y, Slope i_ySought
It is. Displacement δ in y-axis direction _y, Slope i_yExplained
Is the displacement δ in the x-axis direction_x, Slope i_xSimilarly
Can be

As described above, the use of the two PSDs 83 and 85 makes it possible to detect the attitude of the apparatus main body 37 separately for displacement and inclination. In addition, since the feed amount of the deep hole machining tool is measured by the feed amount detection device 31, the value of L is adopted as a value that is reduced by the feed amount every moment.
Next, an outline of guidance of the deep hole machining tool 13 of the present invention will be described with reference to FIG. In FIG. 9, e _i (x, y), θ
_i (x, y), e _o (x, y) and θ _o (x, y) are the target values of the displacement and angle of the apparatus main body 37, PSD8, respectively.
3 shows the displacement and inclination of the apparatus main body 37 detected by 85 (x-axis and y-axis are taken on a plane perpendicular to the processing axis, assuming a plane perpendicular to the processing axis).

The deep hole machining tool 13 is
Workpiece which is attached to the bur 17 and has a pilot hole 33
21 and the workpiece 21 have substantially the same outer shape and
Guide bush having the same central axis as pilot hole 33 of object 21
35 is fixed to the feed base 23. Guide deep hole drilling tool 13
It is inserted into the guide hole of the bush 35. Deep hole drilling tool 13
The center axis 49 is roughly defined as a predetermined processing axis (induction axis 79).
Adjust the placement to match. In addition, deep hole machining tools
13 piezoelectric actuator 45 and gap sensor 77
, The attitude (displacement and inclination) of the deep hole machining tool 13
Of the guide bush 35 and a deep hole
The apparatus main body 37 of the processing tool 13 is fixed. Next, Boli
To the rotating shaft 51 of the deep hole drilling tool 13 by the
Rotate to add a deep hole along the pilot hole 33 of the work piece 21.
Work on it. At this time, the piezoelectric actuator
Of the device body 3 due to friction caused by the contact of the
7 does not move, and only the rotating shaft 51 rotates. Device body 37
However, the non-uniformity of the material of the workpiece 21,
Is caused by disturbance U caused by unavoidable causes such as vibration during machining.
And displacement e by each PSD 83 and 85
_o(X, y) and inclination θ _o(X, y) is detected. each
E detected by PSD 83 and 85_o(X, y)
And θ_o(X, y) and target value e_i(X, y) and θ
_iBased on the difference from (x, y), the controller 47
When the piezoelectric actuator 45 as the posture adjusting means is actuated.
Adjusting the amount of displacement of the piezoelectric actuator 45
Therefore, the posture of the apparatus main body 37 is corrected.

As described above, by guiding the deep hole machining tool 13, the unevenness of the material of the workpiece 21, the shape error of the prepared hole, the vibration at the time of machining, or the alignment error due to the bending of the boring bar 17. Influence is suppressed, and a more precise straight hole can be machined. Further, the guide axis 79 of the deep hole machining tool 13 is set in advance,
By guiding the deep hole drilling tool 13 along the guide axis 79 using the feed amount of the workpiece 21 detected by the feed amount detecting device 31 such as an encoder provided in It is also possible to process curved deep holes. Further, since the mechanism for detecting the attitude of the apparatus main body 37 is not affected even if the deep hole drilling tool 13 rotates, high-precision deep hole drilling can be performed.

FIG. 10 is a partial side sectional view showing another embodiment of the deep hole machining tool 13 'of the present invention, and FIG.
It is a front view of the deep hole machining tool 13 '. The deep hole drilling tool 13 'of FIG. 10 is similar to the deep hole drilling tool 13 of FIG.
To form a deep hole drilling device. In the drawings, like reference numbers indicate similar parts.

Referring to FIG. 10, the deep hole machining tool 13 '
2, similarly to the deep hole machining tool 13 shown in FIG. 2, the apparatus main body 37, the tool head 39 ', the light emitting means 41, and the posture detecting means 43 for detecting the postures of the apparatus main body 37 and the tool head 39'. A piezoelectric actuator 45 serving as a posture adjusting means for changing the posture of the apparatus main body 37; and a control device 47 serving as control means for controlling the operation of the piezoelectric actuator 45. As with the deep hole drilling tool 13 of FIG.
9 is held by a bearing 53 so as to be rotatable about the same central axis 49. Preferably, the device main body 37 has a cylindrical shape. As the bearing 53, a tapered roller bearing is preferable, and a preload is applied to the bearing 53 in the axial direction so that the play between the device body 37 and the bearing 53 is completely eliminated. A tool head 39 ′ is provided at the tip of the revolution shaft 89. The tool head 39 ′ may be formed integrally with the revolution shaft 89.

The tool head 39 'preferably has a circular cross section. The tool head 39 ′ further has a rotation axis 91 extending parallel to, but not coincident with, the central axis 49 of the device body 37, a rotation axis 93 rotatable about this rotation axis 91, and a rotation axis 93. And a rotation driving means 95 for rotating. The tool 97 is connected to the tip of the rotation shaft 93. As shown in FIG.
Guide pads 61 are provided on the outer periphery of the tool head 39 ' to support a cutting force or a grinding force, and the hole wall is machined without the tool head 39' contacting the hole wall of the workpiece to be machined. You can do it. As the tool 97, for example, a milling cutter or a grinding tool can be used. As the rotation driving means 95, any rotation driving device such as a motor can be used.

The tool head 39 'preferably has a suction port 57' in the vicinity of the tool 97 for suctioning the work debris. As in the case of the deep hole drilling tool 13 in FIG. 2, the suction port 57 'is formed at the center of the revolving shaft 89 inside the inner hole 59' extending along the central axis 49 and inside the boring bar 17 connected to the inner hole 59 '. 1 is connected to a suction device as shown in FIG. As shown in FIG. 11, preferably, a plurality of detachable guide pads 61 are provided around the tool head 39 ', similarly to the deep hole machining tool 13 of FIG.

When the milling cutter is used as a tool, the center of the tool rotating about one axis is a fixed point, so that the machining ability at the center is extremely low. However, as described above, the rotation shaft 93 having the rotation axis 91 different from the center axis 49 which is the rotation axis of the rotation shaft 89 is provided, and the rotation shaft 93 held by the tool head 39 ′ rotated by the rotation shaft 89 is provided. By further rotating, the center of the tool 97 connected to the rotation shaft 93 performs a circular motion, so that the machining ability is improved. Therefore, if the deep hole machining tool 13 'shown in FIG. 10 is used, deep hole machining can be performed even when a pilot hole is not machined in a workpiece.

On the other hand, when the grinding tool is used as the tool 97, the tool 97 can grind the hole wall of the workpiece while making a circular motion by the revolving shaft 89. It is possible to perform a highly accurate deep hole finishing process. The apparatus main body 37 of the deep hole machining tool 13 'shown in FIG. 10 further includes a piezoelectric actuator 45 which is a posture adjusting means. Since the piezoelectric actuator 45 is provided in exactly the same manner as the deep hole machining tool 13 shown in FIG. 2, it will not be described in detail here.

At the rear end of the revolving shaft 89, a connecting means 75 for rotating the revolving shaft 89 such as the boring bar 17 of the machine tool 19 is provided. The connection means 75 transmits the rotation of the rotation drive means 15 to the revolving shaft 89 similarly to the deep hole drilling tool 13 in FIG. 2, but also revolves the revolving shaft 89 in a direction perpendicular to the rotation axis 25 of the boring bar 17. A flex coupling or the like that makes the (rotation axis) movable is used.

The deep hole machining tool 13 'shown in FIG.
Preferably, like the deep hole machining tool 13 shown in FIG.
Auxiliary support means such as a coil spring 73 disposed at an appropriate number on the outer peripheral portion of the center of gravity of the apparatus main body 37, and a distance between the apparatus main body 37 and a reference wall surface, for example, a hole wall of a guide hole of the guide bush 35. And a gap sensor 77 for performing the operation.

The mechanism for detecting the attitude of the apparatus main body 37 of the deep hole machining tool 13 'includes a light emitting means 41 and a light emitting means 41 facing the light emitting means 41, as in the case of the deep hole machining tool 13 shown in FIG. Attitude detecting means 43 provided outside device main body 37
And the device main body 37 detected by the posture detecting means 43
And a control device 47 for controlling the operation of the piezoelectric actuator 45, which is a posture adjusting means, according to the posture of the tool head 39 'provided on the head. Unlike the deep hole machining tool 13 shown in FIG. 2, in the deep hole machining tool 13 ′ of FIG. 10, the light emitting means 41 is provided at a non-rotating portion at the rear end of the device body 37, The light is emitted backward along. Since the device main body 37 does not rotate similarly to the deep hole machining tool 13 in FIG. 2, the light emitting means 41 does not need to be provided on the central axis 49 of the device main body 37.

The details of the light emitting means 41 and the attitude detecting means 43 are the same as those of the deep hole machining tool 13 shown in FIG. 2, and will not be described in detail here. The light emitting unit 41, the attitude detecting unit 43, the control device 47, and the piezoelectric actuator 45 whose operation is controlled by the control device, configured as described above, use the device body of the deep hole drilling tool 13 'shown in FIG. 37 and the tool head 39 'correspond to the deep hole machining tool 1 of FIG.
In the same manner as in the case of 3, the vehicle is guided along a predetermined guiding axis.

As described above, by guiding the deep hole machining tool 13 ', disturbance due to the influence of non-uniformity of the material of the workpiece and the alignment error due to the bending of the boring bar is suppressed, and higher accuracy is achieved. Processing of straight deep holes becomes possible. Further, using the feed amount of the workpiece detected by the feed amount detecting device 31 such as an encoder provided on the feed base, to guide the deep hole machining tool 13 ′ along a predetermined guide axis. Thereby, a curved deep hole can be machined. Also, even if the deep hole machining tool 13 rotates,
Since the mechanism for detecting the attitude of the apparatus main body 37 is configured so as not to be affected, high-precision deep hole drilling can be performed.

FIG. 12 is a partial side sectional view showing another embodiment of the deep hole drilling apparatus 11 'of the present invention.
4 and FIG. 15 respectively show the deep hole drilling device 1 of FIG.
FIG. 3 is a cross-sectional view taken along line AA and line BB of 1 ′, and a front view. 12 is similar to the deep hole drilling tool 13 of FIG. 2, but the apparatus main body 37 itself further includes a feeding means 101 for feeding the apparatus main body 37.

The deep hole drilling device 11 'shown in FIG. 12 is similar to the deep hole drilling tool 13 shown in FIG. 2 in that the device body 37, the tool head 39, the light emitting means 41, and the positions of the device body 37 and the tool head 39 are provided. And a control unit 47 for controlling the operation of the piezoelectric actuator 45. The control unit 47 controls the operation of the piezoelectric actuator 45. The apparatus further includes a rotation driving unit 103 for rotating the unit 39 and a sending unit 101 for sending the apparatus body 37.
The details of the light emitting means 41 and the attitude detecting means 43 are the same as those of the deep hole drilling tool 13 in FIG. 2 and will not be described in detail here.

The apparatus main body 37 has a center axis 49, and holds the rotating shaft 51 by a bearing 53 so as to be rotatable about the center axis 49. The tool head 39 is provided at the tip of the rotating shaft 51. The tool head 39 may be formed integrally with the rotating shaft 51. The rear end of the rotating shaft 51 is connected to a rotation driving means 103 provided inside the apparatus main body 37. As the rotation driving means 103, an arbitrary rotation driving device such as a motor can be used.

At the rear of the apparatus main body 37, as a part of the apparatus main body 37, a feeding means 101 comprising a feeding device 105 is provided.
Is provided. As shown in FIG. 13, the feeding device 105 includes an L-shaped member 107 and an L-shaped member 107 which expands and contracts.
First piezoelectric actuator 1 for moving the vertical direction in the drawing
09 and a second piezoelectric actuator 111 that expands and contracts and moves the L-shaped member 107 in a direction perpendicular to the drawing (that is, a direction along the central axis of the apparatus main body). As shown in FIG. 13, two such feeding devices 105 are provided on the outer peripheral portion of the rear portion of the device main body 37 so as to face each other in the radial direction. A guide pad 113 is further provided on the outer peripheral portion of the rear portion of the device main body 37. Instead of the guide pad 113, two or more feeding devices 105 may be provided.
The set of the feeding device 105 configured as described above is
7 are provided before and after along the central axis 49 of FIG.
In FIG. 2, the rear pair is omitted and indicated by a dashed line).

As the feeding means 101, an arbitrary movement mechanism such as one using wheels can be used.
As shown in FIG. 14, at least three piezoelectric actuators 45 are provided on the outer peripheral portion of the device main body 37.
Preferably, the piezoelectric actuator 45 is disposed in a depression 63 provided on the outer peripheral portion of the device main body 37.
Can also be provided on the outer periphery of. Preferably, these piezoelectric actuators 45 are evenly arranged on the outer peripheral portion of the device main body 37 as shown in FIG. More preferably, as shown in FIG. 12, two sets of piezoelectric actuators 45 are provided on the outer peripheral portion of the device main body 37 along the central axis 49. The operation of the piezoelectric actuator 45 is as described above and will not be described here.

The configuration of the tool head 39 is the same as that of the deep hole drilling tool 13 shown in FIG. 2 and will not be described in detail here.
The tool head 39 has a plurality of guide pads 61 around the tool head 39 as shown in FIG. 15, and preferably has a suction port 57 near the cutting blade 55 for sucking cutting chips. The suction port 57 has an inner hole 115 extending along the central axis 49 at the center of the rear part of the rotating shaft 51 and the apparatus main body 37.
15 is connected to a suction device (not shown) via a suction pipe 117 connected to the suction device.

The rotation driving means 1 provided in the apparatus main body 37
The electrical wiring to 03 can be provided by using an inner hole 115 of the apparatus main body 37 and another wiring pipe (not shown) provided inside the suction pipe 117. FIG. 16 shows a main body 37 of the deep hole drilling tool 13 'shown in FIG. 10 in which a feed means 101 and a revolving shaft 8 which are the same as the deep hole drilling device 11' shown in FIG.
9 shows a schematic side view of a deep hole drilling device 11 ″ provided with a rotation drive means 103 for rotating 9. Details of the deep hole drilling tool 13 ′ shown in FIG. 10 and the deep hole drilling device shown in FIG. Since it is the same as 11 ', it will not be described here.

FIG. 17 is a view for explaining the operation of the feeding means 101 used in the deep hole drilling devices 11 'and 11 "shown in FIGS. 12 and 16. In FIG. 17A, the right side of the deep hole drilling device is defined as a front side, and the left side is defined as a rear side. 105 L-shaped member 10
7 is in contact with the hole wall around the deep hole drilling devices 11 'and 11 ". Next, as shown in FIG.
To shrink. Next, the front set of L-shaped members 107 is pushed rearward by the second piezoelectric actuator 111 along the central axis 49 of the apparatus main body 37, and as shown in FIG. Send to When the entire deep hole drilling device is sent out, the L-shaped member 1
07 again comes into contact with the surrounding hole wall by the first actuator 109 (FIG. 17 (d)), fixing the entire deep hole processing apparatus, contracting the first piezoelectric actuator 109 and the second piezoelectric actuator 111, and Set of L-shaped members 10
7 is in the state of FIG. 17 (e), and shifts to the state of FIG. 17 (a) again. In this way, the device body 37 and the tool heads 39, 39 'of the deep hole drilling devices 11' and 11 "are fed toward the workpiece to be fixed along the central axis 49 of the device body 37. The feeding means 101 and The connection with the apparatus main body 37 is made by coupling means such as a toothed clutch capable of transmitting the torque that overcomes the cutting resistance of the tool while transmitting only the feed force component to the apparatus main body 37 without transmitting the vibration of the feed means 101. Is used.

As described above, the deep hole drilling device 11 'or 1
By providing a rotation driving means 103 for rotating the tool head 39 or 39 'and a feeding means 101 for feeding the apparatus main body 37 inside the 1 "apparatus main body 37, a rotational force is applied from the outside of the apparatus main body 37. In addition, there is no need to add or send the workpiece toward the tool head 39 or 39 ', so that a boring bar and a feed bar are not required, so that there is no physical limitation of the working depth by the boring bar, i.e. unlimited. Further, since there is no boring bar, a feed amount detecting means for detecting a feed amount of the apparatus main body is provided at an arbitrary position of the apparatus main body, and is provided along a predetermined guide axis. By guiding the deep hole drilling devices 11 'and 11 ", it becomes possible to drill a curved deep hole more freely. In addition, since a boring bar and a feed stand are not required, the portable device can be carried. This deep hole drilling device 11 'or 11 "is a so-called deep hole drilling robot.

FIG. 18 is a view similar to the deep hole drilling apparatus 11 'of FIG. 12, showing the shape accuracy of the deep hole (hole diameter, straightness, roundness,
FIG. 4 is a partial side sectional view showing one embodiment of a deep hole measuring device 119 for measuring surface roughness or the like. FIG. 19, FIG.
0 is a line A- of the deep hole measuring device 119 in FIG.
It is arrow sectional drawing in A and the line BB. The deep hole measuring device 119 shown in FIG. 18 includes an apparatus body 37, a measuring head 121 corresponding to the tool head 39 shown in FIG.
7, a posture detecting means 43 for detecting the posture of the measuring head 121, a piezoelectric actuator 45 as a posture adjusting means for changing the posture of the apparatus main body 37, and a control device 47 for controlling the operation of the piezoelectric actuator. A rotation driving unit 103 for rotating the measuring head 121,
A feeding unit 101 for feeding the apparatus main body 37 is provided.

The apparatus main body 37 has a center axis 49, and holds the rotating shaft 51 by a bearing 53 so as to be rotatable about the center axis 49. A measuring head 121 is provided at the tip of the rotating shaft 51. The measuring head 121 may be formed integrally with the rotating shaft 51. The rear end of the rotation shaft 51 is provided with a rotation driving means
It is connected to the. As the rotation driving means 103, a stepping motor is suitable, but any type of rotation driving device such as another type of motor can be used.

At the rear of the apparatus main body 37, as a part of the apparatus main body 37, a feeding means 101 comprising a feeding device 105 is provided.
Is provided. The feed device 105 is the same as that shown in FIG. 12, and will not be described in detail here. Two such feeding devices 105 are provided on the outer peripheral portion of the rear portion of the device main body 37 so as to oppose each other in the radial direction. A guide pad 113 is further provided on the outer peripheral portion of the rear portion of the device main body 37 as shown in FIG. Instead of the guide pad 113, two or more feeding devices 105 may be provided. Two sets of the feeder 105 configured as described above are provided before and after along the central axis 49 of the apparatus main body 37 (see FIG. 18).

As the feeding means 101, an arbitrary motion mechanism such as one using wheels can be used.
As shown in FIG. 20, at least three piezoelectric actuators 45 are provided on the outer peripheral portion of the device main body 37.
Preferably, the piezoelectric actuator 45 is disposed in the depression 63 provided on the outer peripheral portion of the device main body, but it is also possible to provide the piezoelectric actuator 45 on the outer peripheral of the device main body 37. Preferably, these piezoelectric actuators 45 are evenly arranged on the outer peripheral portion of the device main body 37 as shown in FIG. More preferably, as shown in FIG. 18, two sets of piezoelectric actuators 45 are provided on the outer peripheral portion of the apparatus main body 37 along the central axis 49 in the front and rear directions. The operation of the piezoelectric actuator 45 is as follows.
As described above, it will not be described here.

The measuring head 121 preferably has a circular cross-section, and surrounds the periphery of the deep hole measuring device 119.
A radial distance detecting means 125 for measuring a radial distance up to 23; Radial distance detecting means 12
5 is preferably arranged such that the distance from the central axis 49 of the device body 37 to the surrounding hole wall 123 can be measured. As the radial distance detecting means 125, a laser distance measuring device, a magnetic distance measuring device, or a capacitance distance measuring device is used. The measurement signal may be transmitted and received wirelessly, or may be extracted through a flexible cable. In order to observe the state of the inner wall of the device under test, the measuring head 121 may be provided with an endoscope 127.

The light emitting means 41 is connected to the central axis 4 of the apparatus main body 37.
9 is provided on the distal end surface of the measuring head 121. By providing the light emitting means 41 on the central axis 49 serving as the rotation axis, the optical axis does not shift due to the rotation of the measuring head 121. The attitude detecting means 43 is provided outside the device main body 37 so as to face the light emitting means 41 so as to receive the light emitted from the light emitting means 41.

As described above, the provision of the feeding means for moving the apparatus main body to the deep hole measuring apparatus eliminates the physical limitation such as the length of the arm as in the case where the measuring apparatus is sent by the arm, and is infinite. It becomes possible to measure the shape accuracy of a deep hole having a depth. A so-called deep hole measuring robot can be obtained. As shown in FIG. 21, a deep hole measuring device 119 ′ which does not have the rotation driving means 103 for rotating the rotating shaft 51 and the feeding means 101 in the apparatus main body 37 is also possible. In this case, the measuring head 121 of the deep hole measuring device 119 'is connected to an external device, for example, the main shaft of the machine tool via the connecting means 75 provided at the rear end of the deep hole measuring device 119'. Give rotation. Other configurations are the same as those of the deep hole measuring device of FIG.

The deep hole measuring devices 119 and 119 ″ have the above-described configuration, so that the light emitting means 41 and the attitude detecting means 43 detect the attitude of the apparatus main body 37 and operate the piezoelectric actuator 45 as the attitude adjusting means. Is controlled by the control device 47 to guide the device body 37 straight, measure the distance from the guide axis to the hole wall, and measure the hole shape accuracy in relation to the feed amount detected by the feed amount detecting means. I do.

The deep hole machining robot and the deep hole measurement robot
The unit itself is a self-supporting device that has a machining function, a feed function, and a measurement function, and performs deep hole processing in a radioactive environment or space, deep hole measurement, or deep hole processing of large workpieces that cannot be attached to machine tools. Useful for deep hole measurement. Further, in the present embodiment, the example in which the light emitting means 41 is provided on the main body side of the deep hole drilling tool or the deep hole measuring device has been described. May be provided with a mirror and a corner cube prism, and a light beam emitted from the outside may be separated into a displacement detection component and a tilt detection component, reflected to the outside, and detected by the attitude detection means 43 provided outside.

[0076]

As described above, according to the deep hole drilling apparatus of the present invention, by providing a mechanism for detecting the attitude, the attitude of the deep hole drilling tool is detected, and according to the detection result, To guide the deep hole drilling tool along the guide axis, due to unevenness of the material of the workpiece, shape error of the prepared hole, vibration during processing, or alignment error due to bending of the boring bar. Influence is suppressed, and a more precise straight hole can be machined.

Furthermore, by setting the guide axis of the deep hole machining tool in advance and guiding the deep hole machining tool along this guide axis, it becomes possible to machine a curved deep hole which has been impossible in the past. . Similarly, according to the deep hole measuring device of the present invention, by providing a mechanism for detecting the posture, the posture of the device main body is detected, and the posture is changed according to the detection result. Is guided along the guide axis, so that a deep hole can be measured with higher accuracy.

[Brief description of the drawings]

FIG. 1 is a schematic overall view showing the configuration of a deep hole drilling device using the deep hole drilling tool of the present invention.

FIG. 2 is a partial side sectional view showing details of a deep hole machining tool according to the present invention.

FIG. 3 is a front view of the deep hole machining tool of FIG. 2;

FIG. 4 is a sectional view taken along line AA of FIG. 2;

FIG. 5 is a schematic side view showing an initial contracted state of one embodiment of the piezoelectric actuator.

FIG. 6 is a schematic side view of one embodiment of a piezoelectric actuator, showing an actuated radial extension.

FIG. 7 is a detailed view of a mechanism for detecting a posture of the apparatus main body.

FIG. 8 is a principle diagram of a method for detecting the attitude of the apparatus main body according to the present invention.

FIG. 9 is a block diagram showing a posture control system according to the present invention.

FIG. 10 is a partial sectional side view of a deep hole machining tool according to another embodiment of the present invention.

FIG. 11 is a front view of the deep hole machining tool of FIG. 10;

FIG. 12 is a partial side sectional view of a deep hole drilling apparatus according to another embodiment of the present invention.

FIG. 13 is a sectional view taken along line AA of the deep hole drilling device of FIG. 12;

14 is a sectional view of the deep hole drilling device of FIG. 12 taken along line BB.

FIG. 15 is a front view of the deep hole drilling device of FIG. 12;

FIG. 16 is a schematic side view of a deep hole drilling machine in which the same main body as the deep hole drilling machine shown in FIG. .

FIG. 17 is a schematic view showing the operation of the feeding means.

FIG. 18 is a partial side sectional view showing one embodiment of a deep hole measuring device for measuring the shape accuracy of a deep hole.

19 is a sectional view taken along line AA of the deep hole measuring device of FIG. 18;

20 is a sectional view taken along line BB of the deep hole measuring device of FIG. 18;

FIG. 21 is a schematic side view of a deep hole measuring device according to another embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 ... Deep hole processing apparatus 13 ... Deep hole processing tool 15 ... Rotation drive means 17 ... Boring bar 19 ... Machine tool 37 ... Device main body 41 ... Light emitting means 43 ... Position detection means 47 ... Control device 49 ... Center axis 51 ... Rotation axis 119 deep hole measuring device 121 measuring head 125 radial distance detecting means

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) B23Q 17/00-23/00 G05B 11/00, 11/27

Claims (10)

(57) [Claims] 1. An apparatus main body having a central axis, a rotation axis rotatable about the central axis, and a tool provided at a tip end, a light emitting unit for emitting light along the central axis, An attitude detecting means provided outside the apparatus main body facing the light emitting means and receiving light emitted from the light emitting means to detect an attitude of the apparatus main body; and provided on an outer peripheral portion of the apparatus main body. And at least three attitude adjusting means that expands and contracts with a peripheral wall of the apparatus main body to change the attitude of the apparatus main body; and, in accordance with the attitude of the apparatus main body detected by the attitude detecting means, Control means for controlling the operation of the attitude adjusting means; 2. An apparatus main body having a central axis, a rotating shaft rotatable about the central axis, and a tool provided at a tip portion, a rotation driving unit for rotating the rotating shaft, and the central axis. A light emitting unit that emits light along the light emitting unit; and a posture detecting unit that is provided outside the device main body so as to face the light emitting unit and that receives light emitted from the light emitting unit and detects a posture of the device main body. And at least three attitude adjusting means disposed on an outer peripheral portion of the apparatus main body and extending and contracting with a peripheral wall of the apparatus main body to change the attitude of the apparatus main body; Control means for controlling the operation of the attitude adjusting means in accordance with the attitude of the apparatus main body, and feed means for providing relative feed between the workpiece and the apparatus main body. Deep hole processing equipment . 3. The rotating shaft includes a tool head at a distal end thereof, the tool head rotating around the rotating axis extending parallel to the central axis, and including the tool at a distal end. The deep hole drilling device according to claim 1, further comprising a second rotation shaft, and a second rotation driving unit that rotates the second rotation shaft. 4. The apparatus according to claim 3, wherein the tool is a milling cutter. 5. The apparatus according to claim 3, wherein the tool is a grinding tool. 6. The apparatus according to claim 1, wherein the rotation driving means is provided on the apparatus main body, and the feeding means is provided on a rear portion of the apparatus main body.
4. The deep hole drilling device according to claim 2, wherein the feed unit feeds the device main body along the center axis direction. 5. 7. The light emitting means is provided at a rear portion of the apparatus main body.
The light is emitted backward, and the posture detecting means is provided.
Receives the light emitted backward and receives the light
7. The method according to claim 1, wherein the posture of the main body is detected.
The deep hole drilling device according to claim 1. 8. The light emitting means is provided at a rear portion of the feed means.
The light is emitted backward, and the posture detecting means is provided.
Receives the light emitted backward and receives the light
7. The method according to claim 2, wherein the posture of the main body is detected.
The deep hole drilling device according to claim 1. 9. A center axis and a rotation about the center axis.
A device main body having a rotatable rotation shaft, a rotation driving unit for rotating the rotation shaft, and a measurement device provided at a tip end of the rotation shaft and measuring from the rotation shaft.
Radial distance detection that measures the radial distance of an object to the hole wall
Detecting means and a light emitting means for emitting light along said central axis, said light emitting means opposed to al provided outside of the device body
Receiving the light emitted from the light emitting means,
Posture detecting means for detecting the posture of the main body; and
Expands and contracts with the wall of the device to change the posture of the device body
At least three attitude adjusting means, and an image of the apparatus body detected by the attitude detecting means
A control means for controlling the operation of the attitude adjusting means according to the force
A step and a feed for giving a relative feed between the device to be measured and the apparatus body
Means for measuring a deep hole. 10. The apparatus according to claim 1, wherein said rotation driving means is provided inside said apparatus main body.
And the feeding means is provided at a rear portion of the apparatus main body.
And the feeding means moves the device body to the center axis.
The deep hole measuring device according to claim 9, which is sent along.