JP3334366B2 - LCD color filter and laser processing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing method for a color filter for an LCD (Liquid Crystal Display) and a laser processing for a metal film located on a peripheral portion of the LCD color filter formed on one glass substrate. On how to do.

[0002]

2. Description of the Related Art Conventionally, as a preferred manufacturing mode of an LCD color filter, a multi-panel LCD color filter is manufactured, bonded to a TFT array substrate, and then cut into individual LCD color filters to manufacture an LCD. Is becoming common. According to this method, it is possible to manage the yield and the like as the production of one LCD color filter, and it is possible to increase the yield of the LCD color filter.

However, when this method is adopted, 1
Since a plurality of LCD color filters are manufactured simultaneously on a single glass substrate, it is preferable to display the result at a predetermined position on the glass substrate when each LCD color filter is inspected. , L failed inspection
The inconvenience of producing an LCD using a color filter for CD can be prevented beforehand.

As a method for displaying the inspection result at a predetermined position on a glass substrate, there has been proposed a method of performing laser processing on a metal film on a peripheral portion of the glass substrate using a YAG laser or the like. Specifically, the glass substrate is x
-Move using a y stage or the like to move the laser processing portion to a position where laser irradiation is possible, and irradiate a laser beam in this state. The metal film irradiated with the laser beam absorbs the energy of the laser beam and evaporates and scatters. Therefore, if the movement of the glass substrate and the irradiation of the laser beam by the xy stage or the like are continued, the above-described display can be achieved by eliminating the metal film at the laser beam irradiation position.

[0005]

However, when a metal film on a glass substrate is irradiated with a laser beam to perform desired laser processing, the energy of the laser beam absorbed by the metal film is reduced around the laser processing area. There is a disadvantage that it affects the metal film of the portion and causes cracks in the laser processing end face. The cracks may be peeled off in the post-processing step of the LCD and become a source of dust. Therefore, the cracks cannot be completely tolerated in a color filter for an LCD which immediately deteriorates the display quality.

This inconvenience occurs not only when the inspection result is displayed by laser processing but also when other displays, for example, marking such as naming are displayed.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a color filter for an LCD which can effectively prevent the occurrence of cracks on a laser processing end face, and a laser processing method therefor. The purpose is.

[0008]

Means for Solving the Problems A multi-faced LC according to claim 1
The color filter for D is an LCD color filter in which an LCD color filter is disposed on a glass substrate, and is provided at a predetermined position of a metal film formed on a surplus region of the glass substrate. A metal film removal portion of a predetermined width surrounding a processing target region is formed.

A laser processing method according to a second aspect is a method in which a plurality of color filters for an LCD are formed at the center of a glass substrate. The laser processing method according to claim 3, wherein a color filter for LCD is formed on a glass substrate having a metal film formed on the surface, and a metal film removing process is performed at least at a predetermined position of the metal film located at a peripheral portion of the glass substrate. In this method, a metal film removing portion having a predetermined width surrounding the target region is formed, and a laser beam having a small spot diameter is irradiated to remove the metal film in the target region.

A laser processing method according to a fourth aspect is a method of forming a plurality of color filters for LCD by forming a plurality of color filters for LCD in the center of a glass substrate.

[0011]

According to the LCD color filter of the first aspect,
Since a metal film removal portion having a predetermined width surrounding a target region for metal film removal processing performed later is formed at a predetermined position of the metal film formed on the surplus region of the glass substrate, When irradiating the laser beam to the metal film in the area surrounded by the film removal unit to remove the metal film,
The metal film located outside the metal film removal part is not affected by the energy of the laser beam, and as a result, it is possible to prevent a problem that cracks are generated in the metal film remaining on the glass substrate.

According to the laser processing method of the second aspect, LC
As a color filter for D, a filter in which a plurality of filters are formed at the center of a glass substrate is employed, so that the yield can be significantly improved. According to the laser processing method of claim 3, a color filter for LCD is formed on a glass substrate having a metal film formed on a surface thereof, and a metal film is formed at least at a predetermined position of the metal film located at a peripheral portion of the glass substrate. A metal film removal portion of a predetermined width surrounding the target region of the film removal processing is formed, and the metal film in the target region is removed by irradiating a laser beam having a small spot diameter to remove the metal film. When a laser beam is applied to remove the metal film, the metal film located outside the metal film removed portion is not affected by the energy of the laser beam, and as a result, a crack occurs in the metal film remaining on the glass substrate. Such inconvenience can be prevented beforehand. According to the laser processing method of the fourth aspect, since a plurality of LCD color filters are formed in the center of the glass substrate to form a plurality of LCDs, the yield can be significantly improved.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the accompanying drawings showing embodiments. FIG. 1 is a schematic view for explaining one embodiment of a laser processing method for an LCD color filter according to the present invention. A glass substrate 1 on which a metal film (for example, a Cr film) 2 is formed (see A in FIG. 1). Then, a metal film removing portion 3 having a predetermined width surrounding the entire periphery of the laser processing target region 3a is formed (see B in FIG. 1). Thereafter, laser processing is performed by irradiating a laser beam emitted from a laser oscillator (for example, a YAG laser or the like) 4 onto the laser processing target area 3a to remove the metal film in the relevant area 3a (see C in FIG. 1). ). In this case, the laser beam emitted from the laser oscillator 4 is focused by a focusing optical system (not shown), and the spot diameter on the metal film 2 is set to be small. Further, for example, the metal film removing portion 3 is formed by, for example, dry etching, wet etching, or the like, and the width of the metal film removing portion 3 is, for example, 50.
It is set to at least μm.

As described above, at the place where the laser beam having the small spot diameter is irradiated, the metal film 2 absorbs the energy of the laser beam and evaporates and scatters. The metal film removal part 3 always exists between the laser beam irradiation location and the non-laser processing area of the metal film 2 (see B in FIG. 1). Therefore, the non-laser processing area of the metal film 2 is hardly affected by the energy of the laser beam, and the generation of cracks in the metal film 2 in this area can be prevented. As a result, it is possible to prevent inconvenience that the metal film 2 is peeled off in the post-processing step and that it becomes a dust source.

FIG. 2 is a plan view showing an example of a state in which laser processing has been performed on the periphery of a multi-panel LCD color filter. FIG. 2 is a plan view of the periphery of a glass substrate 1 on which four LCD color filters 5 have been manufactured. A metal film removing section 3 is formed to partition an area 3a for laser processing of the inspection result corresponding to each LCD color filter. For example, a laser processing target area corresponding to the LCD color filter that has passed the inspection is formed. No laser processing is performed on 3a, and laser processing is performed on the laser processing target area 3a corresponding to the LCD color filter that has not passed the inspection.

Although the timing at which the color filter for LCD is manufactured is not described above, the timing at which L is adjusted at any timing before or after the manufacturing of the metal film removing unit 3 is determined.
A color filter for CD can be manufactured.

[0017]

According to the first aspect of the present invention, when the metal film in the region surrounded by the metal film removing section is irradiated with a laser beam to remove the metal film, the metal located outside the metal film removing section is removed. The film is not affected by the energy of the laser beam, and as a result, it is possible to prevent the inconvenience of the metal film remaining on the glass substrate from being cracked.

According to the second aspect of the present invention, since a plurality of LCD color filters are formed, a specific effect that the yield is remarkably improved is exhibited. According to a third aspect of the present invention, when a laser beam is irradiated to remove the metal film, the metal film located outside the metal film removed portion is not affected by the energy of the laser beam, and as a result, This has a unique effect that a disadvantage that cracks are generated in the metal film remaining on the substrate can be prevented beforehand.

According to the fourth aspect of the invention, since a plurality of LCD color filters are formed, the laser processing efficiency is significantly improved.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating an embodiment of a laser processing method for an LCD color filter according to the present invention.

FIG. 2 is a plan view showing a state in which laser processing has been performed on a color filter for a multi-panel LCD.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass substrate 2 Metal film 3 Metal film removal part 3a Laser processing target area 5 Color filter for LCD

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-153303 (JP, A) JP-A-5-198630 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G02F 1/1335 G02F 1/13

Claims (4)

(57) [Claims] An LCD color filter comprising an LCD color filter (5) disposed on a glass substrate (1), wherein the metal film (2) is formed on an excess area of the glass substrate (1). A metal film removing portion (3) having a predetermined width surrounding a target region (3a) for a metal film removing process to be performed later, at a predetermined position. 2. An LCD color filter (5) is a multi-panel LC in which a plurality of color filters are formed in the center of a glass substrate (1).
The LCD color filter according to claim 1, which is a D color filter. 3. A color filter (5) for LCD is formed on a glass substrate (1) having a metal film (2) formed on a surface thereof, and a metal film (2) located at least on a peripheral portion of the glass substrate (1). A metal film removal portion (3) having a predetermined width surrounding a target region (3a) for metal film removal processing to be performed later is formed at a predetermined position, and a laser beam having a small spot diameter is applied to the metal film removal portion (3). A laser processing method for an LCD color filter, comprising: removing a metal film (2) in a target area (3a). 4. The laser processing method for an LCD color filter according to claim 3, wherein a plurality of LCD color filters (5) are formed in a central portion of the glass substrate (1) to form a plurality of LCDs.