JP3316729B2 - Joint structure of micro parts - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a joint of a micro component.

[0002]

2. Description of the Related Art Conventionally, as a joining method of a micro component constituting a micro machine, a micro device, or the like, a method disclosed in a magazine {Sensors and Actuators, A 45 (1994), p.
Some of them are described on page 236｝. FIG. 7 is a perspective view showing a state of joining by the joining method. In the figure,
1 is a hand for holding the micro component, 2 is a fixing hand for holding the micro component, 3 is a stage for fixing and heating the micro component, 4 is a scanning electron microscope, 5a, 5
b is a micro component (hereinafter simply referred to as a component), 6 is an adhesive film, and 7 is a heater.

As shown in FIG. 1, a hand 1, a fixing hand 2, and a stage 3 are installed in a scanning electron microscope 4. The movements of the hand 1 and the fixing hand 2 can be controlled from outside the scanning electron microscope 4 by a manipulator (not shown) installed outside the scanning electron microscope 4. The component 5a and the component 5b are arranged in the scanning electron microscope 4. An adhesive film 6 is applied to the joint between the components 5a and 5b. Then, the operator operates the manipulator to control the movements of the hand 1 and the fixing hand 2 from outside the scanning electron microscope 4. First,
The hand 5 grips the component 5a. Further, while observing with the scanning electron microscope 4, the component 5a gripped by the hand 1 is arranged on the stage 3, and the component 5a is separated from the hand 1.
Next, the component 5b is gripped by the hand 1 and brought close to the component 5a arranged on the stage 3, and the component 5b is pressed against the component 5a by the fixing hand 2.

Further, the hand 1 and the fixing hand 2 are controlled by the manipulator while observing the joint position between the component 5a and the component 5b with the scanning electron microscope 4 so as not to be shifted, and the components 5a and 5b are pressed down. deep. In this state, by heating the stage 3 with the heater 7, the component 5a
Then, the entire part 5b is heated to melt the adhesive film 6. After the adhesive film 6 is melted, when the stage 3 is cooled, the adhesive film 6 is solidified, and the components 5a and 5b are joined together. Stage 3
The components 5a, 5b are pressed down by the hand 1 and the fixing hand 2 until the cooling of the components is completed, and after the joining is completed, the components 5a, 5b are taken out of the scanning electron microscope 4 and are removed. Is completed.

[0005]

Conventionally, micro parts have been joined as described above, but in recent years, the development of micro machines has required a large number of fine micro parts to be assembled with high accuracy. In the conventional joining method as described above, the hand 5 is used to
Since b is operated one by one, it is impossible to join a large number of parts at once. In addition, in order to arrange the components 5a and 5b at predetermined positions by the hand 1, a sophisticated operation technique is required. For example, depending on the gripping position of the hand 1, when the components 5a, 5b are separated from the hand 1, the components 5a, 5b may fall over. As described above, there has been a problem that a certain degree of operation technique is required, and that even a skilled operator requires a great deal of time and careful consideration for arranging parts. It is necessary to hold down the parts 5a and 5b with the hand 1 and the fixing hand 2 while the parts 5a and 5b are bonded together, that is, while the stage 3 is being heated and cooled. For this reason, there is a problem that the working efficiency is poor, and the hand 1 and the fixing hand 2 vibrate due to various disturbances, thereby lowering the positioning accuracy at the time of bonding. Also, in the conventional joining method,
Since the control system becomes complicated and the joining equipment becomes expensive to improve the positioning accuracy at the time of joining, and joining of a large number of parts takes a lot of time, micromachines and microdevices composed of micro parts However, there has been a problem that the assembly cost is increased.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and provides a joint structure of micro components that can easily and accurately position and join a large number of micro components. The purpose is to:

[0007]

According to a first aspect of the present invention, there is provided a joint structure for a micro component, wherein each joint comprises a plurality of positioning parts each having at least one having a polarity different from that of the other. A magnet, an adhesive, and a positioning assisting protruding member protruding from the joint surface of the magnet .
The protruding members of the micro component and the second micro component are both
Each of the first and second microstructures is annular and has an inclined surface at each end portion, and is configured to be fitted to each other by the inclined surface.
The magnets of the parts are located on the inner circumference of the protruding member.
And the polarity of each of the magnets of the first micro component
Is that of the magnet of the second micro component facing this
They are configured to have the opposite polarities .

[0008] Further, the joint structure of the micro component according to the second configuration of the present invention is the same as that of the first configuration, except that the number of magnets is small.
At least the core is disposed in the lower layer .

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiment 1 FIG. Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIGS. 1A and 1B are views showing a joint structure of a micro component according to a first embodiment, FIG. 1A is a perspective view showing a state of joining the micro components, and FIG. FIG. 1 is a partially enlarged perspective view of FIG.
(C) is a cross-sectional view showing a joint after joining. In the figure, 5a and 5b are first and second micro parts (hereinafter simply referred to as first and second parts) to be joined to each other, 8 is a magnet having an N pole surface on the joining side, and 9 is a magnet on the joining side. A magnet having an S-pole surface is denoted by 10, an adhesive, and a projection member 11 for positioning assistance, for example, a fitting member that fits with the projection member of the other micro component. The fitting member 11 protrudes from the joining surface of the magnets 8 and 9, and its tip is formed in a tapered shape and has an inclined surface so as to be fitted smoothly.

The joint surface between the first part 5a and the second part 5b is provided with four magnets, an adhesive 10 and a fitting member 11, respectively. Two of the four magnets have a joint surface of N The other two are constituted by magnets 9 having S poles on the joint side. This magnet is for positioning, and when the first component 5a and the second component 5b are opposed to each other and approach to each other, the first and second components 5a and 5b are brought into a predetermined position by the attraction force of the opposite magnets having different polarities. The magnets 8 and 9 are arranged so as to be positioned at the position.

In this embodiment, as shown in FIG. 1B, an annular fitting member 11 is provided around a columnar magnet 8. The fitting member 11 includes the first and second parts 5.
The first and second parts 5a, 5b are formed so as to protrude most from the joining surfaces of the first and second parts 5a, 5b, and serve to assist the positioning when the first and second parts 5a, 5b are approached. The material of the fitting member 11 is, for example, gold or copper.

Further, an adhesive material 10 is provided annularly around the fitting member 11, and the outer diameter of the adhesive material 10 is several tens.
It is about 0 μm. The first and second parts 5a and 5b are represented by Expression 10
The first and second parts 5a, 5 weigh about 0 mg.
b, magnets 8 and 9 so that b can be positioned by the attraction force.
Uses about 1 Tesler. Also, adhesive 1
0 is, for example, an indium-based alloy,
A hot-melt layer of low-temperature solder that melts at １００100 ° C. can be used.

For example, as shown in FIG. 1A, when joining two parts, a first part 5a and a second part 5b
Are brought closer from the direction in which the joining surfaces face each other. As the first part 5a and the second part 5b approach, the first part 5a
Rotational torque is generated by the attraction and repulsion of the magnets 8, 9 having different polarities of the magnets 8, 9 and the second component 5b disposed at a position facing the magnets 8, 9. When the second component 5b is rotatably held, the second component 5b rotates, and the first and second components 5a and 5b are substantially positioned in predetermined directions and positions. When the first and second parts 5a and 5b are brought closer to each other, the fitting members 11 provided on the first and second parts 5a and 5b come into contact with each other, slide on each other on their inclined surfaces, and smoothly conduct. It is positioned with high accuracy.

After being positioned by the fitting member 11, the magnets 8 and 9 attract and fix the joint surfaces. Thereafter, the first and second parts 5a and 5b are
By heating to about ° C, the adhesive 10 formed around the magnet is melted. After this, cool down the adhesive 1
0 is solidified, as shown in FIG.
The parts 5a and 5b can be strongly joined together.

As described above, in this embodiment, the first,
A plurality of magnets having different polarities provided on the second parts 5a and 5b generate a rotating torque by the attraction and repulsion of the magnets when the first and second parts 5a and 5b approach each other.
Thereby, the component is rotated and positioned at a predetermined position with high accuracy by the action of the fitting member 11. Thereafter, the adhesive 10 is melted by heating to join the first and second components 5a and 5b together. Then, assemble. In the conventional joining method, after the first and second parts 5a and 5b are positioned, they must be held down by the hand 1 and the fixed hand 2 during heating and cooling. However, in this embodiment, the fitting member 11 is used. And the magnet is fixed by the attraction force, so that it can be easily and accurately joined in a short time regardless of the skill of the operator. Further, since a large number of micro components can be assembled at once, the manufacturing cost can be significantly reduced as compared with the conventional method of assembling one by one.

Further, if positioning is performed only by the columnar magnets 8 and 9, positioning is not necessarily performed so that the joint surfaces of the magnets are completely coincident with each other. Sometimes fixed. On the other hand, since the annular fitting member 11 is provided, the joint surfaces can be accurately positioned at predetermined positions.

In the above embodiment, four magnets are provided on the joint surface of the first and second parts 5a and 5b, and the joint surface has two magnets each having N pole and S pole. But,
It is not limited to this. However, two or more magnets are provided on the joint surfaces of the first and second parts 5a and 5b so that they can be positioned by generating a rotational torque, and at least one magnet is used instead of all of them having the same polarity. What is necessary is just to comprise with a different polarity. Further, the arrangement of the magnets on the joint surface is not limited to the above embodiment, but the first and second parts 5
Since the positioning is performed while rotating when a and 5b approach each other, it is preferable that the N pole and the S pole are arranged so as not to be point-symmetric. Further, the shapes of the magnets 8 and 9 and the adhesive 10 are not limited to this embodiment. For example, by changing the positional relationship between the adhesive, the magnet, and the fitting member, for example, a column-shaped adhesive is used as the central portion. A configuration in which a magnet and a fitting member are arranged around the magnet may be adopted. Further, the fitting member may be formed in a cylindrical shape and arranged at the center, but in this case, the fitting member of the other component to be joined to this micro component is fitted with the outer peripheral portion of the cylindrical shape. It becomes an annular thing. Alternatively, as shown in FIG. 2, the adhesive 10 may be separated from the magnets 8 and 9 and the fitting member 11.

Embodiment 2 FIG. When joining relatively large micro components, a greater force may be required for positioning and holding the components than in the first embodiment. Embodiment 2
Next, a description will be given of a case in which a larger suction force and a larger repulsion force are obtained with the same size. FIG. 3 is a cross-sectional view showing a joined portion after joining of components according to Embodiment 2 of the present invention, in which first and second component bodies are omitted. In the drawing, reference numeral 12 denotes a core-type fitting member formed of, for example, nickel or permalloy, which has both a protruding member for assisting the positioning of the first and second parts 5a and 5b and a lower layer portion of the magnet. The shape of the core type fitting member 12 is arranged below the N-pole magnet 8 and the S-pole magnet 9, and further protrudes annularly around the magnets 8 and 9. The tip portion is formed in a tapered shape, and has an inclined surface so as to be smoothly fitted with the projecting member of the other component.

As in the first embodiment, the core type fitting member 12 is formed by utilizing the rotating torque generated by the attraction and repulsion of the magnets 8 and 9.
After the first and second parts 5a and 5b are fixed at a predetermined position, the bonding can be performed by melting the adhesive 10 by heating. Further, the core-type fitting member 12
By arranging the magnets below the magnets 8 and 9, it is possible to suppress a decrease in the magnetic flux due to the demagnetizing field and concentrate the magnetic flux in the thickness direction of the magnet without spreading the magnetic flux to the surroundings. Therefore, when a magnet having the same size as that of the first embodiment is used, the first embodiment is used.
A larger attractive force and repulsive force can be obtained, and a relatively large micro component can be joined. Conversely, by providing the core-type fitting member 12 below the magnets 8 and 9, the size of the magnet can be reduced, and the size of the magnet can be reduced when the area of the surfaces to be joined is small. Can be joined together.

In this embodiment, the core and the fitting member are integrally formed to make the structure easy to manufacture. However, the present invention is not limited to this. A core may be provided in the lower layer, and a separate fitting member may be provided.

Embodiment 3 In Embodiments 1 and 2, cylindrical magnets 8 and 9 are used, but in this embodiment,
An example using a fan-shaped ring magnet is shown. FIG. 4 is a diagram showing a joint structure of a micro component according to a third embodiment.
FIG. 4A is a perspective view showing a state of joining micro components, FIG. 4B is an enlarged perspective view showing a part of a joint structure of the micro component, and FIG. 4C is joining after joining. It is sectional drawing which shows a part. In the drawing, reference numeral 13 denotes a sector-shaped ring magnet having an N-pole on the joining side surface, and reference numeral 14 denotes a sector-shaped ring magnet having an S-pole on the joining side. As shown in FIGS. 4A and 4B, two N-pole fan-shaped magnets 13 and two S-pole fan-shaped magnets 14 are arranged in a ring shape on each of the first and second parts 5a and 5b. I do. Further, the fitting member 11 is arranged around the magnets 13 and 14, and the adhesive 10 is arranged around the fitting member 11.

The method of joining the first and second parts 5a and 5b is as follows.
Similar to the first embodiment, the positioning is performed substantially by using the rotating torque due to the attractive force and the repulsive force of the opposed magnets 12 and 13. As the parts 5a and 5b approach, the fitting member 11 first comes into contact, the inclined surfaces thereof slide, and are positioned at the fitting position to perform high-precision positioning. And it can be fixed by the magnets 12 and 13. After accurately positioning the first and second components 5a and 5b at predetermined positions, the adhesive 10 can be melted and joined by heating.

Next, the operation due to the use of the sector ring magnets 13 and 14 will be described. Embodiments 1 and 2
Assuming that a magnet having the same area as the columnar magnet used in the above is used, the fan-shaped ring magnets 13 and 14 have an elongated shape, and the interval between adjacent magnets is short. Therefore, first, second part 5a, tens 5b comrades when joining
The arrangement works as follows. When the first and second parts 5a and 5b approach each other with a slight deviation from the predetermined arrangement,
In the second part 5b, a magnet of the same polarity is opposed to the entire surface or a part of the position of the magnet of the first part 5a. Therefore, the first and second magnets are repelled and attracted by the opposing magnets.
Rotational torque is generated in the parts 5a and 5b. Then, the first and second parts 5a and 5b are set at predetermined positions where the suction force is maximized.
Is stable and fixed. As shown in FIG. 4C, after the positioning is completed, the first and second parts 5a and 5b can be strongly joined by melting the adhesive 10 by heating.

In the case where four columnar magnets are arranged as in the first and second embodiments, when the second part 5b approaches the first part 5a while being rotated substantially 90 degrees with respect to the first part 5a. , Magnets of the same polarity are opposed to each other. On the other hand, as described above, in this embodiment,
If the second components 5a and 5b are slightly displaced, the magnets of the same polarity will face each other.
The positioning torque of a and 5b can be increased.

That is, in this embodiment, since the distance between adjacent magnets having different polarities is reduced in the joint structure, the position at which the first component 5a and the second component 5b are originally joined is determined. Even if it is arranged at a position slightly different from the above, a large rotation torque can be generated. For this reason, even if the weight of the first component 5a and the second component 5b is relatively large, it is possible to easily and mass-bond and assemble them. Further, even if the size of the magnet is small, it is possible to easily and accurately join the micro components.

Further, in this embodiment, not only the distance between the magnets is shortened, but also the magnets 13 and
14 are arranged. For this reason, the first and second parts 5a,
Since the rotation torque acting on 5b is generated about the center of the ring formed by the magnets 13 and 14, the first and second parts 5a and 5b are also positioned while rotating about the center of the ring. As a result, suction force and repulsion force can be applied most effectively. At the same time, the fitting member 11 is also concentric and annular, and can be positioned smoothly and accurately.

The shapes of the magnets 13 and 14 and the adhesive 10 are not limited to this embodiment. For example, the positional relationship between the adhesive, the magnet and the fitting member is changed. Alternatively, a configuration may be adopted in which a magnet is arranged around the magnet. Further, the configuration may be such that the magnets 13 and 14 are separated from the adhesive 10.

As in the second embodiment, the first component 5a
When a larger force is required as a magnet for positioning and fixing the second component 5b and when it is necessary to reduce the size of the magnets 13 and 14, the magnets 13 and 1 are used.
The core member 12 may be disposed by providing a core material in a lower layer of 4 and projecting around the magnets 13 and 14 to form an inclined surface at the projecting portion. FIG. 5 is a cross-sectional view showing a joint portion after joining the components, and the first and second component main bodies are omitted. The core-type fitting member 12 is arranged below the N-pole ring magnet 13 and the S-pole ring magnet 14.
By arranging the core-type fitting member 12 below the magnets 13 and 14, it is possible to suppress a decrease in magnetic flux due to a demagnetizing field and concentrate the magnetic flux in the thickness direction of the magnet without spreading it around. Therefore, according to this configuration, since the core type fitting member 12 is further provided in addition to the fan-shaped ring magnet, the attractive force and the repulsive force can be increased, and a complicated operation is not required. The parts can be assembled, and bonding can be performed even when the area of the bonding surface is small and the weight of the parts 5a and 5b is large compared to the size of the magnet.

Further, the projecting member 11 may be formed of the material of the adhesive material 10. In other words, the first and second parts 5a are formed by combining the projecting member 11 and the adhesive 10 and fixing the position by the projecting member 11 and the magnets 13 and 14 and then heating and melting the solid to cool the projecting member 11. , 5b. Also, instead of forming the entire protruding member 11 with the adhesive material, an adhesive may be formed on the inclined surface of the protruding member 11, and the first and second parts 5a and 5b may be joined together.

Embodiment 4 In this embodiment, a method for manufacturing the joint structure of the micro component according to the first embodiment will be described. FIG. 6 is a cross-sectional view showing a method of manufacturing a micro component according to the fourth embodiment of the present invention in the order of steps. First, in FIG.
6 is arranged. Then, the material 11 of the fitting portion is filled into the gap portion 17 of the fitting portion forming die 16 and the substrate 15 by a method such as electroplating (FIG. 6B). This material 1
As 1, filling is performed by plating using, for example, gold, copper, nickel, permalloy, or the like. After filling, the mold for forming the fitting portion is removed. Next, as shown in FIG. 6C, for example, an iron-neodymium-based magnet material 18 is formed on the surface by, for example, a method such as sputtering.

After the magnet material 18 is formed, the surface is polished and flattened, and then a resist 19 is applied, exposed and developed (FIG. 6D) to remove unnecessary portions of the magnetic material 18.
Next, a resist 19 is applied again to protect the fitting member 11 and the magnetic material 18, and the adhesive 10 is formed by a method such as electroplating (FIG. 6E). Finally resist 19
Is removed to obtain the joint structure of the micro component shown in FIG.

According to this embodiment, a mold having a tapered shape is placed over the substrate 15 in advance, and the space 11 between the substrate 15 and the mold is filled with the material 11 of the fitting portion. A certain tapered shape can be easily manufactured, and a large number of magnets and fitting members can be manufactured at once.

[0033]

As described above, according to the first configuration of the present invention, a plurality of positioning magnets and adhesives each having at least one joint having a polarity different from that of the other. , And a positioning assisting protruding member protruding from the joint surface of the magnet, wherein the protruding members of the first micro component and the second micro component are both annular, each having an inclined surface at a tip end thereof. Are configured to mate with each other
And the magnets of the first and second micro parts are respectively
The first micro component is disposed on the inner periphery of the protruding member, and
The polarity of each of the magnets is
Since the components are configured to have the opposite polarity to each of the magnets , the micro component can be smoothly positioned at a predetermined position without operating the manipulator one by one, and easily and accurately in a short time. There is an effect that a joining structure of micro components that can be joined and the manufacturing cost can be reduced can be obtained.

According to the second configuration of the present invention, the first
In the configuration, the core is arranged at least in a lower layer of the magnet.
By suppressing the decrease in magnetic flux,
Even when the weight of the micro component is relatively large or the magnet size is small, it is possible to easily and accurately join the micro component in a short time and reduce the manufacturing cost. There is an effect that a structure can be obtained.

[Brief description of the drawings]

FIG. 1A is a perspective view showing a joint structure of a micro component according to a first embodiment of the present invention, FIG. 1B is an enlarged perspective view showing a main part, and FIG. It is sectional drawing (c).

FIG. 2 is a perspective view showing a joint structure of the micro component according to the first embodiment.

FIG. 3 is a cross-sectional view showing a joint structure of a micro component after joining according to a second embodiment of the present invention.

FIG. 4A is a perspective view showing a joint structure of a micro component according to a third embodiment of the present invention, FIG. 4B is an enlarged perspective view showing a main part, and FIG. 4B shows a joint structure of the micro component after joining. It is sectional drawing (c).

FIG. 5 is a cross-sectional view showing a joint structure of the micro component after joining according to the third embodiment.

FIG. 6 is a cross-sectional view showing a method for manufacturing the joint structure of the micro component according to the fourth embodiment of the present invention in the order of steps.

FIG. 7 is a perspective view showing a conventional method for joining micro components.

[Explanation of symbols]

5a, 5b First and second micro parts, 8 N-pole magnet, 9 S-pole magnet, 10 adhesive, 11, 12 projecting member, 13 N-pole sector magnet, 14 S-pole sector magnet.

Continuation of the front page (56) References JP-A-7-56074 (JP, A) JP-A-6-190643 (JP, A) JP-A-5-315132 (JP, A) Japanese Utility Model Application Sho 63-51574 (JP) , U) Japanese Utility Model 5-111029 (JP, U) Japanese Utility Model Application 61-141039 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) B23P 19/00-21/00 B25J 7/00 B81C 3/00

Claims (2)

(57) [Claims] 1. A plurality of positioning magnets and an adhesive, each of which has at least one joint having a different polarity from the other, and a positioning assisting protruding member projecting from a joint surface of the magnets. The projecting members of the first micro component and the second micro component are both annular, each having an inclined surface at a tip end thereof, and configured to be able to fit to each other with the inclined surface, and The two-micropart magnet is
Each of the first microphones is disposed on an inner peripheral portion of the projecting member.
The polarity of each of the magnets of the component
Polarity opposite to each of the magnets of the second micro component
Joint structure of the micro component, characterized in that that. 2. The structure according to claim 1 , wherein a core is arranged at least in a lower layer of the magnet .