JP3303525B2 - Dielectric porcelain material and dielectric resonator - Google Patents

Dielectric porcelain material and dielectric resonator

Info

Publication number
JP3303525B2
JP3303525B2 JP12617794A JP12617794A JP3303525B2 JP 3303525 B2 JP3303525 B2 JP 3303525B2 JP 12617794 A JP12617794 A JP 12617794A JP 12617794 A JP12617794 A JP 12617794A JP 3303525 B2 JP3303525 B2 JP 3303525B2
Authority
JP
Japan
Prior art keywords
dielectric
value
dielectric resonator
resonance frequency
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP12617794A
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Japanese (ja)
Other versions
JPH07335025A (en
Inventor
和秀 後藤
裕美 徳永
秀幸 戸高
琢也 藤丸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP12617794A priority Critical patent/JP3303525B2/en
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Application granted granted Critical
Publication of JP3303525B2 publication Critical patent/JP3303525B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、誘電体共振器等の材料
として利用される誘電体磁器材料および誘電体共振器に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic material and a dielectric resonator used as a material for a dielectric resonator and the like.

【0002】[0002]

【従来の技術】近年、波長が数センチメートル以下のマ
イクロ波やミリ波(以下これらをマイクロ波と総称す
る)の高周波領域において、誘電体磁器材料は、誘電体
共振器や高周波集積回路基板等に広く利用されてきてい
る。ところで、この種の誘電体磁器材料においては、
a)比誘電率(εr)が大きく、かつ安定しているこ
と。b)無負荷Q値(Qu)が高く、かつバラツキが小
さいこと。c)共振周波数の温度係数(τf)が小さ
く、かつ所望の値を精度よく設定することが容易である
ことが要望されており、この条件を満たす誘電体磁器材
料として、従来から複合ペロブスカイト型構造(A(B
1/3B′2/3)O3にて示される)を有する酸化物が広く
検討されている。
2. Description of the Related Art In recent years, in the high-frequency region of microwaves or millimeter waves (hereinafter, these are collectively referred to as microwaves) having a wavelength of several centimeters or less, dielectric ceramic materials include dielectric resonators and high-frequency integrated circuit substrates. Has been widely used. By the way, in this kind of dielectric porcelain material,
a) The dielectric constant (εr) is large and stable. b) The no-load Q value (Qu) is high and the variation is small. c) It has been demanded that the temperature coefficient (τf) of the resonance frequency is small and it is easy to set a desired value with high accuracy. As a dielectric ceramic material satisfying this condition, a composite perovskite structure has been conventionally used. (A (B
1/3 B '2/3) oxide having the indicated are) at O 3 has been studied extensively.

【0003】例えば、特公平2−53884号公報にお
いては、一般式(1−x)Ba(Zn1/3Ta2/3)O3
−xBa(Co1/3Nb2/3)O3と表わされたとき、そ
の成分組成がモル分率で0<x<1の範囲内にあり、特
性として比誘電率(εr)が31〜33、無負荷(Q
u)が9420〜10050、共振周波数(τf)が−
0.2〜−10.8ppm/℃の特性値を得る誘電体磁
器組成物が開示されている。この組成物からなる誘電体
磁器材料は、誘電体共振器として帯域通過フイルターや
局部発振器として組み込まれ、900MHz〜1.5G
Hz帯の自動車電話、携帯電話等においてはその小型化
に貢献し、さらに1.2GHz〜12GHz帯のGPS
や衛星放送・衛星通信の周波数コンバータの温度安定化
等に貢献している。
For example, in Japanese Patent Publication No. 2-53884, the general formula (1-x) Ba (Zn 1/3 Ta 2/3 ) O 3 is used.
When expressed as -xBa (Co 1/3 Nb 2/3 ) O 3 , the component composition is in the range of 0 <x <1 in terms of mole fraction, and the relative dielectric constant (εr) is 31 as a characteristic. ~ 33, no load (Q
u) is 9420-10050, and the resonance frequency (τf) is −
A dielectric porcelain composition that achieves a characteristic value of 0.2 to -10.8 ppm / ° C is disclosed. A dielectric ceramic material made of this composition is incorporated as a bandpass filter or a local oscillator as a dielectric resonator, and has a frequency of 900 MHz to 1.5 G.
Hz mobile phone, mobile phone, etc. contribute to miniaturization, and further, 1.2GHz to 12GHz GPS
And temperature stabilization of frequency converters for satellite broadcasting and satellite communications.

【0004】[0004]

【発明が解決しようとする課題】ところで最近の通信分
野、とくに移動体通信分野においては、利用周波数がマ
イクロ波帯の高周波化となるのに伴い送・受信電力の高
出力化が図られている。しかし、従来の誘電体磁器材料
で作られたフイルターは発熱のためこの領域での使用が
制限され、より低誘電損失の材料、いいかえるなら無負
荷Q値(Q=1/tanδ)が高い材料であって、しか
もそのバラツキの小さな安定した材料が望まれている。
また誘電体共振器の高周波領域での応用面の研究も活発
になってきており、無負荷Q値が高く共振周波数の温度
係数(τf)が小さく、かつ所望の値を精度よく設定す
ることが容易である安定した材料が望まれている。
By the way, in the recent communication field, especially in the field of mobile communication, the output power of transmission / reception has been increased as the frequency of use becomes higher in the microwave band. . However, a filter made of a conventional dielectric porcelain material is restricted in use in this region due to heat generation, and is made of a material having a lower dielectric loss, that is, a material having a high unloaded Q value (Q = 1 / tan δ). In addition, a stable material having a small variation is desired.
Research on the application of dielectric resonators in the high-frequency range has also been actively conducted, and it has been found that the unloaded Q value is high, the temperature coefficient of resonance frequency (τf) is small, and a desired value can be set accurately. A stable material that is easy is desired.

【0005】しかしながらこの要望に対し従来材料は、
特に無負荷Q値が最高で10050程度でありマイクロ
波帯ではまだ十分でなく、特性にはバラツキがありしか
も共振周波数の温度係数(τf)が小さくなると無負荷
Q値も同時に低くなるためマイクロ波領域でこの二つの
特性を満たす材料を選択することは困難視されていた。
その主な原因として考えられることは、基本組成物にZ
n成分が含まれており、このZn成分は焼成時に蒸発し
やすくなる傾向をもっており、その結果成分アンバラン
スが生じ安定した磁器素子が得がたく、そのため特に製
造時に於いて特性値のバラツキが大きくなることであっ
た。
However, in response to this demand, the conventional materials
In particular, the no-load Q value is about 10050 at the maximum, which is not yet sufficient in the microwave band, and there are variations in the characteristics. Further, when the temperature coefficient (τf) of the resonance frequency decreases, the no-load Q value decreases at the same time. It has been considered difficult to select a material that satisfies these two characteristics in the region.
One of the main causes is that the basic composition has Z
The n component is included, and the Zn component tends to evaporate easily during firing. As a result, a component imbalance occurs and a stable porcelain element is hardly obtained. It was to become.

【0006】そこで本発明は前記問題点を解決するため
に、マイクロ波領域における無負荷Q値が高く、その無
負荷Q値のバラツキを示す標準偏差値(бn−1)が著
しく小さく、比誘電率(εr)が高くかつ安定化でき、
共振器における共振周波数の温度係数(τf)が小さ
く、かつ所望の値を精度よく設定することができ、製造
時の歩留を向上させ、生産性コスト削減を大幅に改善で
きる誘電体磁器材料を提供することを目的とする。
In order to solve the above problems, the present invention has a high no-load Q value in a microwave region, a very small standard deviation (Δn−1) indicating a variation in the no-load Q value, and a relative dielectric constant. Rate (εr) is high and can be stabilized,
A dielectric porcelain material that has a small temperature coefficient (τf) of the resonance frequency of the resonator, can set a desired value with high accuracy, can improve the yield in manufacturing, and can greatly reduce the productivity cost. The purpose is to provide.

【0007】また誘電体共振器は共振周波数の温度係数
(τf)値を所望の値に精度よく設定することが容易な
誘電体共振器を提供することを目的とする。
Another object of the present invention is to provide a dielectric resonator which can easily set a temperature coefficient (τf) value of a resonance frequency to a desired value with high accuracy.

【0008】[0008]

【課題を解決するための手段】本発明の誘電体磁器材料
は、上記目的を達成するために、一般式Ba{Zn1/ 3
(NbxTa(1-x)2/3}O3(ただし0<x<1)で表
わされる基本組成物に対して、添加物成分としてCo3
4換算で0.01〜0.08重量%のCoを添加した
ことを特徴とする。ここでCoの炭酸化物、水酸化物、
酸化物等は焼結後に酸化物になることから、Co34
算とはCoの量を基準にしてこれらの量を換算するもの
である。
Means for Solving the Problems] The dielectric ceramic material of the present invention, in order to achieve the above object, the general formula Ba {Zn 1/3
(Nb x Ta (1-x) ) 2/3 } O 3 (where 0 <x <1) and Co 3 as an additive component
It is characterized by adding 0.01 to 0.08% by weight of Co in terms of O 4 . Here, Co carbonate, hydroxide,
Since oxides and the like become oxides after sintering, conversion into Co 3 O 4 means converting these amounts based on the amount of Co.

【0009】また、前記の誘電体磁器材料を用いたこと
を特徴としている誘電体共振器である。
Further, there is provided a dielectric resonator using the above-mentioned dielectric porcelain material.

【0010】[0010]

【作用】一般式Ba{Zn1/3(NbxTa(1-x)2/3
3(ただし0<x<1)で表わされた組成物を基本組
成物とするからマイクロ波領域において比誘電率(ε
r)が高くすることができる。また添加物成分としてC
34換算で0.01〜0.08重量%の範囲内でCo
を添加するからZn成分があっても広い焼成温度幅で焼
結性が良くなり、比誘電率(εr)が高く安定化し共振
周波数の温度係数(τf)が小さく、かつ所望の値に精
度よく設定することができる。さらに無負荷Q値を高く
そのバラツキを表す標準偏差値(бn−1)を小さくす
ることができる。
[Function] General formula Ba {Zn 1/3 (Nb x Ta (1-x) ) 2/3 }
Since the composition represented by O 3 (where 0 <x <1) is used as the basic composition, the relative dielectric constant (ε
r) can be increased. As an additive component, C
o 3 O 4 Co in the range of 0.01 to 0.08 wt% in terms of
Is added, the sinterability is improved over a wide firing temperature range even when there is a Zn component, the relative dielectric constant (εr) is increased and stabilized, the temperature coefficient (τf) of the resonance frequency is reduced, and the desired value is precisely obtained. Can be set. Further, it is possible to increase the no-load Q value and reduce the standard deviation value (Δn−1) representing the variation.

【0011】また誘電体磁器材料を用いることによって
必要な範囲で所望の温度係数(τf)をもつ誘電体共振
器を作ることができる。
Further, by using a dielectric ceramic material, a dielectric resonator having a desired temperature coefficient (τf) within a required range can be manufactured.

【0012】[0012]

【実施例】以下本発明の一実施例の誘電体磁器材料につ
いて、次の(表1)、(表2)に基づいて詳細に説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A dielectric ceramic material according to one embodiment of the present invention will be described in detail with reference to the following (Table 1) and (Table 2).

【0013】[0013]

【表1】 [Table 1]

【0014】[0014]

【表2】 [Table 2]

【0015】(表1)は基本組成が一般式Ba{Zn
1/3(NbxTa(1-x)2/3}O3、(x=0.06)の
組成物に添加物成分としてCoを添加し、その添加量と
焼成条件を変化させた一実施例の誘電体磁器材料とその
特性値である。
Table 1 shows that the basic composition is represented by the general formula Ba {Zn.
Co was added to the composition of 1/3 (Nb x Ta (1-x) ) 2/3 } O 3 (x = 0.06) as an additive component, and the amount of addition and the firing conditions were changed. 3 shows a dielectric ceramic material of one embodiment and its characteristic values.

【0016】(表2)は基本組成が一般式Ba{Zn
1/3(NbxTa(1-x)2/3}O3、(x=0.04)の
組成物に添加物成分としてCoを添加し、その添加量と
焼成条件を変化させた一実施例の誘電体磁器材料とその
特性値である。
Table 2 shows that the basic composition is represented by the general formula Ba {Zn.
Co was added as an additive component to the composition of 1/3 (Nb x Ta (1-x) ) 2/3 } O 3 (x = 0.04), and the amount of addition and firing conditions were changed. 3 shows a dielectric ceramic material of one embodiment and its characteristic values.

【0017】本発明の一実施例の誘電体磁器材料の特性
を比較しえるように実施例間で同じ5mm直径で厚さ2
mmの円柱形の試料を用いて測定をしている。これは後
述する誘電体共振器として使用できるものである。
In order to compare the characteristics of the dielectric porcelain material of one embodiment of the present invention, the same 5 mm diameter and thickness 2
The measurement is performed using a cylindrical sample of mm. This can be used as a dielectric resonator described later.

【0018】そこでこの試料作製の手順から説明する。
なお実施例間では共通の製造条件で製造する。出発原料
は化学的に高純度のBaCO3、ZnO、Nb25、T
2 5、Co34、CoCO3、Co(OH)2、CoO
の各原料粉末を用い、最終製品である誘電体磁器材料の
組成が(表1)および(表2)に示されるような組成と
なるように配合量を計算し、基本組成物100重量%に
対し添加物を添加する方法を用いそれぞれの原料粉末を
所定量秤量した後、それらの各原料粉末を、ウレタン製
ポットミル中にジルコニア玉石および純水と共に投入し
て、20時間の湿式混合処理を施す。そして各混合物を
取り出し乾燥させた後、アルミナ坩堝に入れ、空気中に
おいて1100℃の温度で2時間仮焼を行ない、更にそ
の仮焼物を、ウレタン製ポットミル中にジルコニア玉石
および純水と共に、20時間湿式粉砕処理を施すもので
ある。そして粉砕泥しょうを濾過、乾燥したのち、粉末
にバインダーとして濃度7%のポリビニールアルコール
溶液8重量%を添加して均質としたのち、32メッシュ
の篩を通して造粒を行なう。造粒粉末は金型と油圧プレ
スを用いて成形圧力800Kg/cm2で直径13m
m、厚さ約6mmの円板に成形する。成形体を高純度の
マグネシアさや鉢の中に入れ、組成に応じ空気中におい
て1400〜1550℃の範囲内の温度で20時間保持
して焼成し各誘電体磁器材料を得るものである。
Therefore, the procedure for preparing the sample will be described.
Note that the manufacturing is performed under common manufacturing conditions between the embodiments. Starting material
Is chemically pure BaCOThree, ZnO, NbTwoOFive, T
aTwoO Five, CoThreeOFour, CoCOThree, Co (OH)Two, CoO
Using the raw material powders of
The composition is as shown in (Table 1) and (Table 2)
Calculate the blending amount to become 100% by weight of the basic composition
On the other hand, using the method of adding additives
After weighing a predetermined amount, each of those raw material powders is made of urethane
Pour into a pot mill with zirconia cobblestone and pure water
To perform a wet mixing process for 20 hours. And each mixture
After taking out and drying, put in alumina crucible and put in air
And calcined at 1100 ° C for 2 hours.
Calcined zirconia cobblestone in urethane pot mill
And 20 hours of wet grinding with pure water
is there. After filtering and drying the crushed mud, powder
7% polyvinyl alcohol as a binder
After adding 8% by weight of the solution to make it homogeneous, 32 mesh
Granulation through a sieve. The granulated powder is placed in the mold and hydraulic press.
800kg / cm molding pressureTwo13m in diameter
m, about 6 mm thick. Molded products with high purity
Put in magnesia pods and smell in air according to composition
For 20 hours at a temperature in the range of 1400-1550 ° C
And fired to obtain each dielectric ceramic material.

【0019】この各誘電体磁器材料の試料について、特
性の測定は次のように行った。比誘電率(εr)と無負
荷Q値の値は、それぞれ、公知の平行導体板型誘電体共
振器法を用いて測定した。また無負荷Q値のバラツキを
示す標準偏差値(бn−1)は統計管理手法を用いn=
100個を次式(V=s/n−1、n−1=√V)を用
い計算した。共振周波数の温度係数(τf)は−25〜
75℃の温度範囲における共振周波数の温度変化から計
算により求めた。そして共振周波数は10〜12GHz
の範囲でありこれら結果を(表1)、(表2)に示し
た。なお(表1)、(表2)において*印をした試料は
本発明範囲外の比較例である。
The characteristics of each dielectric ceramic material sample were measured as follows. The relative dielectric constant (εr) and the value of the unloaded Q value were measured using a known parallel conductor plate type dielectric resonator method. The standard deviation value (бn-1) indicating the variation of the no-load Q value is calculated using a statistical management method.
100 were calculated using the following equation (V = s / n-1, n-1 = √V). The temperature coefficient (τf) of the resonance frequency is −25 to
It was obtained by calculation from the temperature change of the resonance frequency in the temperature range of 75 ° C. And the resonance frequency is 10-12 GHz
And the results are shown in (Table 1) and (Table 2). Samples marked with * in Tables 1 and 2 are comparative examples outside the scope of the present invention.

【0020】(表1)より明かなように試料番号3〜
7、11〜15の材料で示される実施例の誘電体磁器材
料はいずれも比誘電率(εr)は高く安定で、共振周波
数の温度係数(τf)は小さい。無負荷Q値は高い値を
示し、そのバラツキを示す標準偏差値(бn−1)は著
しく小さくなっている。また同一組成において焼成温度
を1530℃と1450℃に変化させているが範囲内の
添加量では充分に特性改善の効果がえられている。特に
添加量が0.02〜0.04重量%の範囲が良好であつ
た。比較のための試料番号1、9の材料はCo34が無
添加で無負荷Q値は低く標準偏差値(бn−1)が大き
い。また試料番号2、10の材料は添加量が0.01重
量%以下で効果は少し認められるが特性値を改善する迄
にはいたっていない。試料番号8、16の材料は添加量
の多い場合で比誘電率(εr)は少し大きくなるが共振
周波数の温度係数(τf)も大きく負になり負側にシフ
トする傾向を示した。さらに無負荷Q値も低くそして標
準偏差値(бn−1)も大きくなるためバラツイて好ま
しくない。
(Table 1) As is clear from Table 1, sample numbers 3 to
7, 11 to 15 of the dielectric ceramic materials of the embodiments, the relative dielectric constant (εr) is high and stable, and the temperature coefficient (τf) of the resonance frequency is small. The no-load Q value shows a high value, and the standard deviation value (Δn-1) showing the variation is extremely small. Although the firing temperature was changed between 1530 ° C. and 1450 ° C. for the same composition, the effect of improving the characteristics was sufficiently obtained with the added amount within the range. In particular, the addition amount was good in the range of 0.02 to 0.04% by weight. For comparison, the materials of sample Nos. 1 and 9 did not contain Co 3 O 4 and had a low unloaded Q value and a large standard deviation value (Δn−1). The effects of the materials of Sample Nos. 2 and 10 were slightly recognized when the amount of addition was 0.01% by weight or less, but the characteristics were not improved. The materials of Sample Nos. 8 and 16 showed a tendency that the relative dielectric constant (εr) was slightly increased when the amount of addition was large, but the temperature coefficient (τf) of the resonance frequency became largely negative and shifted to the negative side. Further, the no-load Q value is low, and the standard deviation value (Δn-1) is also large, which is not preferable because it varies.

【0021】次に試料番号17〜19の材料で示される
実施例はCo34以外のCo添加成分を0.01〜0.
08重量%の範囲内の添加量で添加したものでいづれも
良好な特性値を示している。これはCo34換算で0.
04重量%を各々添加したものである。これはCoの炭
酸化物、水酸化物、酸化物等は焼成後に酸化物になるか
ら添加成分の当初の形態はあまり影響しないと考えられ
るから良い結果がえられている。
Next, in the examples shown by the materials of sample Nos. 17 to 19, Co-added components other than Co 3 O 4 are added in an amount of 0.01 to 0.1.
Each of the compounds added in an amount within the range of 08% by weight shows good characteristic values. This is 0.1 in terms of Co 3 O 4 .
04% by weight respectively. This is a good result because Co carbonates, hydroxides, oxides, and the like become oxides after firing, so that the initial form of the added component is considered to have little effect.

【0022】(表2)より明らかなように試料番号22
〜26、30〜34、36〜38の材料で示される実施
例ではいずれも比誘電率(εr)は安定している。共振
周波数の温度係数(τf)も添加量と共にわずかに負側
にシフトするが安定している、さらに無負荷Q値は高い
値を示し、そのバラツキを示す標準偏差値(бn−1)
は小さくなっている。
(Table 2) As is clear from Table 2, sample No. 22
In the examples shown by the materials of 26 to 30, 34 to 36, and 36 to 38, the relative dielectric constant (εr) is stable. The temperature coefficient (τf) of the resonance frequency also slightly shifts to the negative side with the addition amount, but is stable. Further, the no-load Q value shows a high value, and the standard deviation value (бn−1) showing the variation.
Is getting smaller.

【0023】試料番号36〜38の材料で示される実施
例はCo34以外のCo添加成分を範囲内の添加量で添
加したものでいづれも良好な特性値を示している。これ
はCo34換算で0.04重量%を各々添加したもので
ある。比較のための試料番号20、28の材料はCo3
4が無添加で無負荷Q値は低く標準偏差値(бn−
1)が大きい。また試料番号21、29の材料は添加量
が0.01重量%以下のもので効果は少し認められるも
特性値を改善する迄にはいたっていないものである。試
料番号27、35の材料は添加量の多い場合で共振周波
数の温度係数(τf)が大きく負になり負側にシフトす
る傾向を示している。しかも無負荷Q値が低く標準偏差
値(бn−1)が大きくなるため好ましくない。
In the examples shown by the materials of sample Nos. 36 to 38, any of the Co-added components other than Co 3 O 4 was added in the added amount within the range, and all showed good characteristic values. This was obtained by adding 0.04% by weight in terms of Co 3 O 4 . The material of Sample Nos. 20 and 28 for comparison was Co 3
With no added O 4 , the no-load Q value was low and the standard deviation (Δn−
1) is large. Further, the materials of Sample Nos. 21 and 29 have an addition amount of 0.01% by weight or less, and the effect is slightly recognized but the characteristic value is not improved. The materials of Sample Nos. 27 and 35 show a tendency that the temperature coefficient (τf) of the resonance frequency becomes largely negative and shifts to the negative side when the amount of addition is large. In addition, the no-load Q value is low and the standard deviation value (Δn-1) is large, which is not preferable.

【0024】このようにCo34換算で添加成分として
0.01重量%〜0.08重量%のCoを添加するから
磁器材料の焼結性が良くなる。これは基本組成物中のZ
n成分の蒸発をCoが防止するからであると考えられ
る。これによって比誘電率(εr)が高く安定になり、
共振周波数の温度係数(τf)を小さく、かつ所望の値
に精度よく設定することが容易になる。さらに無負荷Q
値が高くそのバラツキを示す標準偏差値(бn−1)は
小さく安定したものになっている。
As described above, since 0.01% to 0.08% by weight of Co is added as an additional component in terms of Co 3 O 4 , the sinterability of the porcelain material is improved. This is because Z in the base composition
This is considered to be because Co prevents evaporation of the n component. This makes the relative permittivity (εr) high and stable,
It becomes easy to set the temperature coefficient (τf) of the resonance frequency to a small value and to a desired value with high accuracy. No load Q
The standard deviation value (Δn−1) having a high value and showing the variation is small and stable.

【0025】次に上記した誘電体磁器材料を使用した本
発明の一実施例である誘電体共振器について説明する。
図1は本発明の一実施例における誘電体共振器の斜視図
である。
Next, a dielectric resonator according to an embodiment of the present invention using the above-described dielectric ceramic material will be described.
FIG. 1 is a perspective view of a dielectric resonator according to one embodiment of the present invention.

【0026】図1に於いて、1は誘電体共振器本体であ
る。誘電体共振器本体1は上記した誘電体磁器材料を用
いて形成され、円柱状の形状をしている。その特性は5
mm直径で厚さ2mmの場合(表1)、(表2)のデー
タが示すとおりである。2はガラス接合層で、誘電体共
振器本体1とフォルステライト磁器材料の支持台3を接
着させるものである。このガラス接合層2に使用したガ
ラス材料は、その熱膨張係数が誘電体共振器本体1に用
いた誘電体磁器材料の熱膨張係数と支持台3に用いたフ
ォルステライト磁器材料の熱膨張係数とほぼ近いもので
あって、接合時のヒビ割れを防ぐ目的で珪酸塩系の材料
を用い接合温度800℃で接着するものである。支持台
3は誘電体共振器本体1を保持するためのもので、支持
台3に用いたフォルステライト磁器材料はマイクロ波帯
の領域で無負荷Q値が高い円筒状のものを用いている。
In FIG. 1, reference numeral 1 denotes a dielectric resonator main body. The dielectric resonator body 1 is formed using the above-described dielectric ceramic material, and has a columnar shape. Its characteristics are 5
When the diameter is 2 mm and the thickness is 2 mm (Table 1), the data in Table 2 are as shown. Reference numeral 2 denotes a glass bonding layer for bonding the dielectric resonator main body 1 and the support 3 made of forsterite ceramic material. The glass material used for the glass bonding layer 2 has a coefficient of thermal expansion that is the same as the coefficient of thermal expansion of the dielectric porcelain material used for the dielectric resonator body 1 and the coefficient of thermal expansion of the forsterite porcelain material used for the support 3. They are almost similar, and are bonded at a joining temperature of 800 ° C. using a silicate-based material for the purpose of preventing cracks during joining. The support 3 is for holding the dielectric resonator body 1, and the forsterite porcelain material used for the support 3 is a cylindrical material having a high unloaded Q value in a microwave band region.

【0027】本実施例において誘電体共振器本体1は前
記に示す円柱状で共振モードは一般に知られているTE
01δを採用している。この寸法の円柱状とすることで
共振周波数が約12GHz程度のものになる。このほか
誘電体共振器本体1の形状としては円筒状の同軸形共振
器、板状のストリップ線路共振器等のものがあり共振モ
ードはTEMで、これらは共振周波数が比較的低い90
0MHz帯から高い10GHz帯にあるので自動車電
話、携帯電話さらには衛星放送等への利用ができる。
In this embodiment, the dielectric resonator body 1 has a columnar shape as described above, and its resonance mode is generally known as TE.
01δ is adopted. The cylindrical shape of this dimension has a resonance frequency of about 12 GHz. In addition, as the shape of the dielectric resonator main body 1, there are a cylindrical coaxial resonator, a plate-shaped strip line resonator, and the like. The resonance mode is TEM, and these have a relatively low resonance frequency.
Since it is in the 10 MHz band, which is higher than the 0 MHz band, it can be used for car phones, mobile phones, and even satellite broadcasting.

【0028】この実施例の誘電体共振器はマイクロ波領
域での無負荷Q値が高く、共振周波数の温度係数(τ
f)が選択できるから半導体等、他の部品と組み合わせ
たとき回路の温度補償作用を安定化するのに有用で、小
型高性能のフイルターや発振器等を作ることができる。
また、本発明の誘電体磁器材料は誘電体共振器のみなら
ず高周波用の基板等に用いても有用なものである。
The dielectric resonator of this embodiment has a high unloaded Q value in the microwave region, and has a temperature coefficient (τ
Since f) can be selected, it is useful for stabilizing the temperature compensation action of the circuit when combined with other components such as a semiconductor, and a compact, high-performance filter or oscillator can be manufactured.
The dielectric ceramic material of the present invention is useful not only for a dielectric resonator but also for a high-frequency substrate or the like.

【0029】[0029]

【発明の効果】以上説明したように、本発明によれば、
一般式Ba{Zn1/3(NbxTa(1-x )2/3}O3(た
だし0<x<1)で表わされた組成物を基本組成物とす
るからマイクロ波領域において比誘電率(εr)が高く
することができる。また添加物成分としてCo34換算
で0.01〜0.08重量%の範囲内でCoを添加する
からZn成分があっても広い焼成温度幅で焼結性が良く
なり、特性値は10〜12GHzのように高い周波数帯
において、比誘電率(εr)が高く安定化になり、共振
周波数の温度係数(τf)を小さく、かつ所望の値に精
度よく設定することが容易である。さらに無負荷Q値が
12000以上と極めて高くそのバラツキを示す標準偏
差値(бn−1)を小さく安定した値をもたせることが
できる。
As described above, according to the present invention,
Since the composition represented by the general formula Ba {Zn 1/3 (Nb x Ta (1-x ) ) 2/3 } O 3 (where 0 <x <1) is used as the basic composition, in the microwave region The relative dielectric constant (εr) can be increased. Further, since Co is added as an additive component in the range of 0.01 to 0.08% by weight in terms of Co 3 O 4 , sinterability is improved over a wide firing temperature range even if there is a Zn component, and the characteristic value is as follows. In a high frequency band such as 10 to 12 GHz, the relative dielectric constant (εr) is high and stabilized, the temperature coefficient (τf) of the resonance frequency is small, and it is easy to accurately set the desired value. Furthermore, the no-load Q value is extremely high at 12000 or more, and the standard deviation value (Δn−1) showing the variation can be made small and a stable value can be provided.

【0030】また焼成温度を低下させることができるの
で磁器材料の焼結性が良くなり製造時の歩留の向上、製
造コスト削減を大幅に改善することができ工業的に利用
価値の大きいものである。
Further, since the firing temperature can be lowered, the sinterability of the porcelain material is improved, and the yield at the time of manufacturing and the reduction of the manufacturing cost can be greatly improved. is there.

【0031】また誘電体共振器は誘電体磁器材料を用い
ることによって必要な範囲で共振周波数の温度係数(τ
f)を持たせた誘電体共振器を作ることができ価値の大
きいものである。
The dielectric resonator is made of a dielectric porcelain material so that the temperature coefficient of the resonance frequency (τ
The dielectric resonator having the feature (f) can be manufactured and is of great value.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例における誘電体共振器の斜視
FIG. 1 is a perspective view of a dielectric resonator according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 誘電体共振器本体 2 ガラス接合層 3 支持台 DESCRIPTION OF SYMBOLS 1 Dielectric resonator main body 2 Glass bonding layer 3 Support base

───────────────────────────────────────────────────── フロントページの続き (72)発明者 藤丸 琢也 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 昭55−56063(JP,A) 特開 昭63−303844(JP,A) 特開 昭64−60905(JP,A) 特開 平4−338154(JP,A) SYUNNICHIRO KAWAS HIMA,AMERICAN CERA MIC SOCIETY BULLET IN,Vol.72,No.5,MAY 1993,p.120−126 (58)調査した分野(Int.Cl.7,DB名) H01B 3/12 312 C04B 35/495 H01P 7/10 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takuya Fujimaru 1006 Kazuma Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (56) References JP-A-55-56063 (JP, A) JP-A-63- 303844 (JP, A) JP-A-64-60905 (JP, A) JP-A-4-338154 (JP, A) SYUNNICHIRO KAWAS HIMA, AMERICA CERA MIC SOCIETY BULLET IN, Vol. 72, No. 5, MAY 1993, p. 120-126 (58) Field surveyed (Int.Cl. 7 , DB name) H01B 3/12 312 C04B 35/495 H01P 7/10

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】一般式Ba{Zn1/3(NbxTa(1-x)
2/3}O3(ただし0<x<1)で表わされる基本組成物
に対して、添加物成分としてCo34換算で0.01〜
0.08重量%のCoを添加したことを特徴とする誘電
体磁器材料。
1. The general formula Ba {Zn 1/3 (Nb x Ta (1-x) )
2/3 } O 3 (where 0 <x <1), and 0.01 to 3 in terms of Co 3 O 4 as an additive component with respect to the basic composition represented by 0 <x <1.
A dielectric ceramic material to which 0.08% by weight of Co is added.
【請求項2】請求項1に記載された誘電体磁器材料から
形成されたことを特徴とする誘電体共振器。
2. A dielectric resonator made of the dielectric ceramic material according to claim 1.
JP12617794A 1994-06-08 1994-06-08 Dielectric porcelain material and dielectric resonator Expired - Fee Related JP3303525B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12617794A JP3303525B2 (en) 1994-06-08 1994-06-08 Dielectric porcelain material and dielectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12617794A JP3303525B2 (en) 1994-06-08 1994-06-08 Dielectric porcelain material and dielectric resonator

Publications (2)

Publication Number Publication Date
JPH07335025A JPH07335025A (en) 1995-12-22
JP3303525B2 true JP3303525B2 (en) 2002-07-22

Family

ID=14928596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12617794A Expired - Fee Related JP3303525B2 (en) 1994-06-08 1994-06-08 Dielectric porcelain material and dielectric resonator

Country Status (1)

Country Link
JP (1) JP3303525B2 (en)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SYUNNICHIRO KAWASHIMA,AMERICAN CERAMIC SOCIETY BULLETIN,Vol.72,No.5,MAY 1993,p.120−126

Also Published As

Publication number Publication date
JPH07335025A (en) 1995-12-22

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