JP3302784B2 - Hygrometer - Google Patents
HygrometerInfo
- Publication number
- JP3302784B2 JP3302784B2 JP15845693A JP15845693A JP3302784B2 JP 3302784 B2 JP3302784 B2 JP 3302784B2 JP 15845693 A JP15845693 A JP 15845693A JP 15845693 A JP15845693 A JP 15845693A JP 3302784 B2 JP3302784 B2 JP 3302784B2
- Authority
- JP
- Japan
- Prior art keywords
- resistance value
- temperature
- circuit
- power
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、湿度計に関し、より詳
細には、抵抗体の検出温度を上げ抵抗値の変化により湿
度を求める湿度計に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hygrometer and, more particularly, to a hygrometer for increasing the temperature detected by a resistor and determining the humidity by changing the resistance value.
【０００２】[0002]
【従来の技術】ガス検出器、例えば、半導体ガス検出器
は、加熱した金属酸化物半導体、例えば、ＳｎＯ2に還
元性ガスを反応させると抵抗値が減少することを利用
し、さまざまなガスを検出するようになっている。2. Description of the Related Art Gas detectors, for example, semiconductor gas detectors, utilize the fact that when a reducing gas is reacted with a heated metal oxide semiconductor, for example, SnO 2 , the resistance value decreases, and various gasses are used. It is designed to detect.
【０００３】図４は、本発明が適用される片持梁構造に
形成されたガス検知器の一例を説明するための構成図
で、図４（ａ）は平面図、図４（ｂ）は図４（ａ）のＢ
−Ｂ線断面図で、図中、１０は基板、１１は該基板１０
に形成された凹部、１２は前記基板１０の上に形成され
たシリコンチップの薄膜絶縁体で、該薄膜絶縁体１２は
前記凹部１１の上に片持梁式に張り出す張り出し部また
は前記凹部の上に両持梁式に架橋される橋架部１２を有
し、該張り出し部又は橋架部１２の上にヒータ１３及び
該ヒータ１３に近接してガス検出素子１４が設けられて
いる。なお、このガス検出素子１４は、具体的には、前
述のようにＳｎＯ2の金属酸化物半導体である。前記凹
部１１、張り出し部１２、抵抗発熱体部１３、ガス検出
部１４は、好ましくは、同一基板１０上に形成されてい
る。FIG. 4 is a configuration diagram for explaining an example of a gas detector formed in a cantilever structure to which the present invention is applied. FIG. 4 (a) is a plan view, and FIG. B in FIG. 4 (a)
10 is a cross-sectional view taken along line B in FIG.
The thin film insulator 12 is a silicon chip thin film insulator formed on the substrate 10, and the thin film insulator 12 is a cantilever type projecting portion or a protrusion of the silicon chip. There is a bridge portion 12 bridged in a doubly supported manner on the upper side, and a heater 13 and a gas detection element 14 are provided on the overhanging portion or the bridge portion 12 in proximity to the heater 13. The gas detection element 14 is, specifically, a SnO 2 metal oxide semiconductor as described above. The recess 11, the overhang 12, the resistance heating element 13, and the gas detector 14 are preferably formed on the same substrate 10.
【０００４】そして、ガス検出を行なうとき、その検出
したいガスに応じて、雰囲気温度に関係なく一定の電力
で前記ヒータ１３を熱し、前記ガス検出素子１４の抵抗
の変化よりガス検出を行なっていた。When performing gas detection, the heater 13 is heated with a constant power regardless of the ambient temperature in accordance with the gas to be detected, and the gas is detected based on a change in the resistance of the gas detection element 14. .
【０００５】[0005]
【発明が解決しようとする課題】しかし、上記従来技術
によると、ガスを検出するためにヒータの他にガス検出
素子がいるためコストが上がり、更には検出ガスにより
検出温度が違うため、雰囲気温度の違いにも考慮しなけ
ればならない。However, according to the above-mentioned prior art, the cost is increased due to the presence of a gas detecting element in addition to the heater for detecting the gas, and the detected temperature differs depending on the detected gas. The difference must also be considered.
【０００６】[0006]
【課題を解決するための手段】本発明は、上記課題を解
決するために、（１）抵抗体に一定電力を加えて温度を
雰囲気温度より上昇させ、この上昇した温度における抵
抗値により湿度を検出する湿度計において、抵抗体と、
電力制御回路と、前記抵抗体の抵抗値を測る回路と、抵
抗体の熱容量及び加えられる電力によって決まる上昇温
度に対応した抵抗値として求められる理論抵抗値及び前
記理論抵抗値から定電力を加えた後の実測抵抗値との差
を演算する演算回路と、前記理論抵抗値と実測抵抗値と
の差と加えた電力と絶対湿度との関係を記憶した記憶情
報回路とを有すること、更には、（２）前記（１）にお
いて、抵抗値と温度の関係及び温度と飽和水蒸気圧との
関係とを記憶した記憶情報回路と、温度と絶対湿度と飽
和水蒸気圧から相対湿度を演算する演算回路を有するこ
とを特徴とするものである。According to the present invention, in order to solve the above-mentioned problems, (1) a constant power is applied to a resistor to reduce a temperature.
Raise the ambient temperature and set the resistance at this elevated temperature.
In a hygrometer that detects humidity by resistance, a resistor and
A power control circuit, a circuit for measuring the resistance value of the resistor, and a resistor.
Temperature rise determined by the heat capacity of the antibody and the applied power
An arithmetic circuit that calculates the difference between the theoretical resistance value obtained as a resistance value corresponding to the degree and the measured resistance value after applying constant power from the theoretical resistance value, and a difference between the theoretical resistance value and the measured resistance value. Having a storage information circuit for storing the relation between the applied power and the absolute humidity; and (2) storing the relation between the resistance value and the temperature and the relation between the temperature and the saturated water vapor pressure in the above (1). And an arithmetic circuit for calculating the relative humidity from the temperature, the absolute humidity, and the saturated water vapor pressure.
【０００７】[0007]
【作用】抵抗体（以下、ヒータという）に定電力を印加
し、ヒータの温度を雰囲気温度に関係なく一定温度上げ
るようにし、そのときの抵抗値の変化により絶対湿度を
求める。更に、雰囲気温度の抵抗値より雰囲気温度と飽
和水蒸気圧とを求め、相対湿度も求める。A constant power is applied to a resistor (hereinafter referred to as a heater) to raise the temperature of the heater by a constant value regardless of the ambient temperature, and the absolute humidity is obtained from a change in the resistance value at that time. Further, the ambient temperature and the saturated water vapor pressure are determined from the resistance value of the ambient temperature, and the relative humidity is also determined.
【０００８】[0008]
【実施例】図３は、本発明の動作原理を説明する図であ
る。図中、ＲH01，ＲH02は、それぞれ雰囲気温度が２０
℃，４０℃のときのヒータ１３の抵抗値を示したもので
ある。そして、ヒータ１３に一定電力Ｐを印加して加熱
する。ヒータ１３は、電力Ｐが印加されると自己発熱に
より温度がＴ℃上昇する。この上昇温度Ｔ℃は、ヒータ
１３の熱容量及び印加する電力Ｐによって決まるもので
あり、雰囲気温度に左右されない。このとき、ヒータ１
３は、当然、抵抗体についての周知の式、Ｒ＝Ｒ0＋α
ΔＴにより、抵抗値が上昇する。つまり、現温度におけ
る抵抗値を、それぞれＲH01，ＲH02とすると、温度がＴ
℃上昇した時の理論値としての抵抗値Ｒs1，Ｒs2は、Ｒ
s1＝ＲH01＋αＴ，Ｒs2＝ＲH02＋αＴの値になるはずで
ある。しかし、実測してみると、理論値とは一致しない
値になる。つまり、ＲH01に電力Ｐを加えた後の実測値
ＲH1、及び、ＲH02に電力Ｐ加えた後の実測値ＲH2は、
理論値Ｒs1，Ｒs2よりΔＲ低い値となる。この差ΔＲ
は、雰囲気中の絶対湿度と加えた電力Ｐとに相関関係が
ある。本発明は、このことに着目してなされたものであ
る。FIG. 3 is a diagram for explaining the operation principle of the present invention. In the figure, R H01 and R H02 each have an ambient temperature of 20.
This shows the resistance value of the heater 13 at 40 ° C. and 40 ° C. Then, the heater 13 is heated by applying a constant electric power P. When the electric power P is applied, the temperature of the heater 13 rises by T ° C. due to self-heating. This rise temperature T ° C. is determined by the heat capacity of the heater 13 and the applied electric power P, and is not affected by the ambient temperature. At this time, heater 1
3 is, of course, the well-known equation for resistors, R = R 0 + α
The resistance value increases due to ΔT. That is, if the resistance values at the current temperature are R H01 and R H02 , respectively, the temperature is T
The resistance values Rs 1 and Rs 2 as the theoretical values when the temperature rises by
The values should be s 1 = R H01 + αT and Rs 2 = R H02 + αT. However, actual measurements result in values that do not match the theoretical values. That is, the measured value R H1 after adding the power P to R H01 and the measured value R H2 after adding the power P to R H02 are:
The value becomes ΔR lower than the theoretical values Rs 1 and Rs 2 . This difference ΔR
Has a correlation between the absolute humidity in the atmosphere and the applied electric power P. The present invention has been made by paying attention to this.
【０００９】図１は、本発明の一実施例を説明するため
の図で、図中、１は抵抗値測定回路、２は演算回路、３
は記憶情報回路、４は電力制御回路である。図２は、図
１の回路の動作説明をするフローチャート図で、以下、
このフローチャートの各ステップに基づいて説明する。FIG. 1 is a diagram for explaining an embodiment of the present invention. In FIG. 1, 1 is a resistance value measuring circuit, 2 is an arithmetic circuit,
Is a storage information circuit, and 4 is a power control circuit. FIG. 2 is a flowchart illustrating the operation of the circuit of FIG.
Description will be made based on each step of this flowchart.
【００１０】step１：抵抗値測定回路１で雰囲気温度の
ときの抵抗値ＲH0（以下、初期値ＲH0とする）を測る。
このとき被測定抵抗に流す電流で、ヒータ１３が自己発
熱してヒータ１３の温度が上がらないように、小電流で
測定する。step２ ：演算回路２は、電力制御回路４よりヒータ１３
に与えられる電力Ｐにより上昇する温度Ｔにより、電力
Ｐが加えられた時のヒータ１３の理論抵抗値ＲsをＲs＝
ＲH0＋αＴ（α：ヒータ１３により決まる値）より求め
る。step３ ：電力制御回路４は、ヒータ１３に一定電力Ｐを
印加する。step４ ：抵抗値測定回路１にて、電力Ｐを印加後のヒー
タ１３の抵抗値ＲH1（以下、実測値ＲH1とする）を測
る。step５ ：演算回路２により、理論値Ｒsと実測値ＲH1と
の差ΔＲ（Ｒs−ＲH1）を求める。step６ ：記憶情報回路３にて、加えた電力Ｐと抵抗値差
ΔＲにより決まる絶対湿度Ｄのテーブルより、絶対湿度
Ｄを求める。絶対湿度Ｄでよければ出力して終了し、相
対湿度Ｈを求めたいときは以下に続く。step７ ：記憶情報回路２には、雰囲気温度ｔと初期抵抗
値ＲH1とのテーブルが入っており、初期抵抗値ＲH1より
雰囲気温度ｔを求める。記憶情報回路２には、雰囲気温
度ｔと飽和水蒸気圧ｅSとの関係を示すテーブルもあ
り、雰囲気温度ｔより飽和水蒸気圧ｅSを求める。step８ ：演算回路２にて、次式（１）より相対湿度を求
めたのち出力をする。Step 1 : The resistance value measuring circuit 1 measures a resistance value R H0 at the time of the ambient temperature (hereinafter, referred to as an initial value R H0 ).
At this time, the measurement is performed with a small current so that the heater 13 does not self-heat and the temperature of the heater 13 does not rise with the current flowing through the resistance to be measured. step 2: The arithmetic circuit 2 sends the heater 13 from the power control circuit 4.
, The theoretical resistance Rs of the heater 13 when the power P is applied is represented by Rs =
It is obtained from R H0 + αT (α: a value determined by the heater 13). step3 : The power control circuit 4 applies a constant power P to the heater 13. step 4 : The resistance value measuring circuit 1 measures the resistance value R H1 of the heater 13 after the application of the electric power P (hereinafter referred to as an actually measured value R H1 ). Step 5 : The arithmetic circuit 2 obtains a difference ΔR (Rs−R H1 ) between the theoretical value Rs and the actually measured value R H1 . Step 6 : The storage information circuit 3 determines the absolute humidity D from the table of the absolute humidity D determined by the applied power P and the resistance difference ΔR. If the absolute humidity D is acceptable, the output is terminated, and if the relative humidity H is desired to be obtained, the procedure is continued as follows. step 7 : The storage information circuit 2 contains a table of the ambient temperature t and the initial resistance value R H1, and the ambient temperature t is obtained from the initial resistance value R H1 . The stored information circuit 2, there is also a table showing the relationship between the ambient temperature t and the saturated water vapor pressure e S, determining the saturation vapor pressure e S than the ambient temperature t. step 8 : The arithmetic circuit 2 calculates the relative humidity from the following equation (1) and outputs the result.
【００１１】[0011]
【数１】 (Equation 1)
【００１２】なお、本発明は、抵抗値差ΔＲをパラメー
タとして各湿度を求めているが、本発明は、これにとら
われるものでなく、Ｒ＝Ｒ0＋αＴ という式よりΔＴ
をパラメータしてもよいし、Ｅ＝ＩＲの式よりΔＥ，Δ
Ｉをパラメータとしてもよい。In the present invention, each humidity is obtained by using the resistance value difference ΔR as a parameter. However, the present invention is not limited to this, and ΔT is obtained from the equation of R = R 0 + αT.
May be parameterized, and ΔE, Δ
I may be used as a parameter.
【００１３】[0013]
（１）請求項１に対する効果：ヒータに所定電力を印加
し、ヒータの抵抗値を測り、絶対湿度を測るので、ガス
感応素子がいらず、コストダウンにつながり、性質上雰
囲気温度の影響を受けずにすむ。 （２）請求項２に対する効果：ヒータの抵抗値より雰囲
気温度を求めることで、絶対湿度から相対湿度への変換
ができる。(1) Effect on Claim 1: Since a predetermined power is applied to the heater, the resistance value of the heater is measured, and the absolute humidity is measured, there is no need for a gas-sensitive element, leading to cost reduction and being affected by the ambient temperature in nature. You don't have to. (2) Effect on Claim 2: By calculating the ambient temperature from the resistance value of the heater, the absolute humidity can be converted into the relative humidity.
【図１】 本発明の一実施例を説明するための回路図で
ある。FIG. 1 is a circuit diagram for explaining an embodiment of the present invention.
【図２】 本発明の一実施例を説明するフローチャート
である。FIG. 2 is a flowchart illustrating an embodiment of the present invention.
【図３】 抵抗値と温度との関係を表した図である。FIG. 3 is a diagram illustrating a relationship between a resistance value and a temperature.
【図４】 従来技術を説明するための図である。FIG. 4 is a diagram for explaining a conventional technique.
１…抵抗値測定回路、２…演算回路、３…記憶情報回
路、４…定電力出力回路、１０…基板、１１…凹部、１
２…張り出し部、１３…ヒータ、１４…ガス感応素子。DESCRIPTION OF SYMBOLS 1 ... Resistance value measurement circuit, 2 ... Operation circuit, 3 ... Storage information circuit, 4 ... Constant power output circuit, 10 ... Substrate, 11 ... Concave part, 1
2 ... overhang, 13 ... heater, 14 ... gas sensitive element.
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 27/00 - 27/24 G01N 25/00 - 25/72 Continuation of the front page (58) Field surveyed (Int. Cl. 7 , DB name) G01N 27/00-27/24 G01N 25/00-25/72
Claims (2)
温度より上昇させ、この上昇した温度における抵抗値に
より湿度を検出する湿度計において、抵抗体と、電力制
御回路と、前記抵抗体の抵抗値を測る回路と、抵抗体の
熱容量及び加えられる電力によって決まる上昇温度に対
応した抵抗値として求められる理論抵抗値及び前記理論
抵抗値から定電力を加えた後の実測抵抗値との差を演算
する演算回路と、前記理論抵抗値と実測抵抗値との差と
加えた電力と絶対湿度との関係を記憶した記憶情報回路
とを有することを特徴とする湿度計。1. A constant electric power is applied to a resistor to set a temperature to an atmosphere.
In a hygrometer that raises the temperature from the temperature and detects the humidity from the resistance value at the raised temperature , a resistor, a power control circuit, a circuit for measuring the resistance of the resistor,
The temperature rise depends on the heat capacity and the applied power.
An arithmetic circuit for calculating the difference between the theoretical resistance value obtained as the corresponding resistance value and the measured resistance value after adding constant power from the theoretical resistance value, and the difference between the theoretical resistance value and the measured resistance value. A hygrometer comprising a storage information circuit that stores a relationship between power and absolute humidity.
及び温度と飽和水蒸気圧との関係とを記憶した記憶情報
回路と、温度と絶対湿度と飽和水蒸気圧から相対湿度を
演算する演算回路を有することを特徴とする湿度計。2. A storage information circuit according to claim 1, wherein a relationship between the resistance value and the temperature and a relationship between the temperature and the saturated steam pressure are stored, and an arithmetic circuit for calculating the relative humidity from the temperature, the absolute humidity and the saturated steam pressure. A hygrometer characterized by having:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15845693A JP3302784B2 (en) | 1993-06-29 | 1993-06-29 | Hygrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15845693A JP3302784B2 (en) | 1993-06-29 | 1993-06-29 | Hygrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0712769A JPH0712769A (en) | 1995-01-17 |
| JP3302784B2 true JP3302784B2 (en) | 2002-07-15 |
Family
ID=15672148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15845693A Expired - Fee Related JP3302784B2 (en) | 1993-06-29 | 1993-06-29 | Hygrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3302784B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4162344B2 (en) * | 2000-01-07 | 2008-10-08 | セイコーインスツル株式会社 | Humidity sensor |
| TWI405917B (en) | 2006-09-06 | 2013-08-21 | Tsubakimoto Chain Co | Water rust paint, water rust coating and high corrosion resistant surface treatment chain |
-
1993
- 1993-06-29 JP JP15845693A patent/JP3302784B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0712769A (en) | 1995-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |