JP3299383B2 - Polarizing beam splitter and optical head device using the same - Google Patents

Polarizing beam splitter and optical head device using the same

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Publication number
JP3299383B2
JP3299383B2 JP10066994A JP10066994A JP3299383B2 JP 3299383 B2 JP3299383 B2 JP 3299383B2 JP 10066994 A JP10066994 A JP 10066994A JP 10066994 A JP10066994 A JP 10066994A JP 3299383 B2 JP3299383 B2 JP 3299383B2
Authority
JP
Japan
Prior art keywords
light
beam splitter
polarizing beam
birefringent
head device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10066994A
Other languages
Japanese (ja)
Other versions
JPH07287121A (en
Inventor
正 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP10066994A priority Critical patent/JP3299383B2/en
Priority to CNB2003101142124A priority patent/CN1250987C/en
Priority to CNB951039660A priority patent/CN1134677C/en
Priority to US08/421,904 priority patent/US5739952A/en
Publication of JPH07287121A publication Critical patent/JPH07287121A/en
Application granted granted Critical
Publication of JP3299383B2 publication Critical patent/JP3299383B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、偏光ビームスプリッタ
及びこれを用いた光ヘッド装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polarizing beam splitter and an optical head device using the same.

【0002】[0002]

【従来の技術】従来、例えば光磁気ディスク等の各種光
学装置にあっては、偏光方向によって回折効率を異なら
しめる偏光ビームスプリッタが備えられている。この偏
光ビームスプリッタに関しては種々の提案がなされてお
り、例えば特開昭63−314502号公報等に記載さ
れている。
2. Description of the Related Art Conventionally, various optical devices such as a magneto-optical disk are provided with a polarizing beam splitter that varies the diffraction efficiency depending on the polarization direction. Various proposals have been made for this polarizing beam splitter, and are described in, for example, JP-A-63-314502.

【0003】この特開昭63−314502号公報記載
の偏光ビームスプリッタは、ニオブ酸リチウム結晶板の
主面に周期を有するイオン交換領域(プロトン交換部)
の光学的回折格子を形成し、且つこの回折格子を透過さ
せる常光成分が、イオン交換を施した領域とイオン交換
を施さない領域との間で受ける位相変化を相殺する手段
として、例えばイオン交換を施した領域の上部に位相補
償用の誘電体層を設け、異常光を回折させるというもの
である。
The polarizing beam splitter described in Japanese Patent Application Laid-Open No. 63-314502 has an ion exchange region (proton exchange portion) having a period on the main surface of a lithium niobate crystal plate.
As a means for forming an optical diffraction grating, and as a means for canceling a phase change that an ordinary light component transmitted through the diffraction grating receives between a region subjected to ion exchange and a region not subjected to ion exchange, for example, ion exchange is used. A dielectric layer for phase compensation is provided above the region where the extraordinary light is applied, and extraordinary light is diffracted.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記偏
光ビームスプリッタにあっては、以下の問題がある。す
なわち、プロトン交換は等方的に拡散するプロセスであ
るので、格子ピッチを精密に制御することが難しく、精
度が低下してしまうといった問題がある。
However, the polarizing beam splitter has the following problems. That is, since proton exchange is a process of isotropic diffusion, there is a problem that it is difficult to precisely control the lattice pitch, and the accuracy is reduced.

【0005】また、この位置精度を出すのが難しいプロ
トン交換部に、さらに位相補償用の誘電体格子を位置合
わせしなければならないので、製造が難しいといった問
題もある。
[0005] In addition, since a dielectric grating for phase compensation must be further aligned with the proton exchange portion where it is difficult to obtain the positional accuracy, there is a problem that manufacturing is difficult.

【0006】上記問題は、該偏光ビームスプリッタを用
いた、例えば光ヘッド装置にあっても同様に生じること
になる。
[0006] The above-mentioned problem similarly occurs in, for example, an optical head device using the polarizing beam splitter.

【0007】そこで本発明は、製造が容易になされると
共に、精度が向上される偏光ビームスプリッタ及びこれ
を用いた光ヘッド装置を提供することを目的とする。
Accordingly, an object of the present invention is to provide a polarizing beam splitter which can be easily manufactured and whose accuracy is improved, and an optical head device using the same.

【0008】[0008]

【課題を解決するための手段】請求項1の偏光ビームス
プリッタは、上記目的を達成するために、表面に凹凸状
の周期格子が形成された複屈折材料よりなる基板と、こ
の複屈折基板の前記凹部及び凸部のうちの少なくとも凸
部上に形成された前記複屈折基板の材料とは異なる複屈
折材料層と、を具備し、前記凹部と凸部の間の常光の位
相差と異常光の位相差のうち何れか一方がπの偶数倍、
となり、かつ上記常光・異常光のうちの一方を回折させ
他方は回折させないように、前記複屈折材料層の厚みd
2,d3及び前記基板の凹部深さd1を設定してなる。
According to a first aspect of the present invention, there is provided a polarizing beam splitter having an uneven surface.
A substrate made of a birefringent material on which a periodic lattice of
At least one of the concave and convex portions of the birefringent substrate
Birefringence different from the material of the birefringent substrate formed on the part
A folding material layer, and a position of ordinary light between the concave portion and the convex portion.
One of the phase difference and the phase difference of the extraordinary light is an even multiple of π,
And diffracts one of the above ordinary light and extraordinary light.
The other is so as not to be diffracted so that the thickness d of the birefringent material layer is
2, d3 and the recess depth d1 of the substrate .

【0009】[0009]

【0010】請求項の偏光ビームスプリッタは、上記
目的を達成するために、請求項に加えて、前記凹部に
は等方性材料が充填されてなる。
According to a second aspect of the present invention, there is provided a polarizing beam splitter according to the first aspect , further comprising:
Isotropic material formed by filling.

【0011】[0011]

【0012】請求項の偏光ビームスプリッタは、上記
目的を達成するために、請求項1乃至に加えて、表裏
面の少なくとも一方の面に、反射防止膜を具備した。
According to a third aspect of the present invention, in order to achieve the above object, in addition to the first and second aspects, an anti-reflection film is provided on at least one of the front and rear surfaces.

【0013】請求項の光ヘッド装置は、上記目的を達
成するために、光源と、対物レンズと、該光源から情報
記録媒体へ向かう光束と前記情報記録媒体により反射さ
れた光束とを分離する光束分離手段と、反射光束を受光
する光検出器と、を備えた光ヘッド装置において、請求
項1乃至記載の偏光ビームスプリッタを、光束分離手
段と光検出器との間の光路中に配置してなる。
According to a fourth aspect of the present invention, in order to achieve the above object, a light source, an objective lens, and a light beam traveling from the light source to the information recording medium and a light beam reflected by the information recording medium are separated. in the optical head device including a light beam separating means, a photodetector for receiving the reflected light beam, and the polarization beam splitter according to claim 1 to 3, wherein arranged in the optical path between the light beam separating means and the light detector Do it.

【0014】請求項の光ヘッド装置は、上記目的を達
成するために、請求項に加えて、偏光ビームスプリッ
タの複屈折材料の光学軸を、情報記録媒体の反射光の偏
光方向に対して略45°に設定してなる。
According to a fifth aspect of the present invention, in order to achieve the above object, in addition to the fourth aspect , the optical axis of the birefringent material of the polarizing beam splitter is set to be parallel to the polarization direction of the reflected light of the information recording medium. Is set to approximately 45 °.

【0015】請求項の光ヘッド装置は、上記目的を達
成するために、光源と、対物レンズと、λ/4板と、情
報記録媒体から反射された光束を受光する光検出器と、
を備えた光ヘッド装置において、請求項1乃至記載の
偏光ビームスプリッタを、光源から光検出器までの光路
中に配置し、該偏光ビームスプリッタにおける光源から
入射する光の凹凸に対する位相差が、πの偶数倍となる
ように、光源からの光束を該偏光ビームスプリッタに入
射させてなる。
The optical head device according to claim 6, in order to achieve the above object, a light source, an objective lens, and lambda / 4 plate, a photodetector for receiving the light beam reflected from the information recording medium,
In the optical head device, the polarizing beam splitter according to claims 1 to 3 is disposed in the optical path from the light source to the photodetector, and the phase difference with respect to the unevenness of light incident from the light source in the polarizing beam splitter is The light beam from the light source is made incident on the polarizing beam splitter so that it becomes an even multiple of π.

【0016】[0016]

【作用】このような請求項1乃至における偏光ビーム
スプリッタによれば、凹凸格子と基板の溝とを、例えば
1回のエッチングにより同時に加工できるので、位置精
度の向上がなされる。また、充填材を凹部や溝に唯充填
すれば良いので、製造が容易になされる。従って、これ
を用いた請求項乃至における光ヘッド装置も、位置
精度の向上がなされると共に製造が容易になされる。
According to the polarizing beam splitter of the first to third aspects, the concave and convex grating and the groove of the substrate can be simultaneously processed by, for example, one etching, so that the positional accuracy is improved. In addition, since it is only necessary to fill the concave portion or the groove with the filler, manufacturing is facilitated. Therefore, the optical head device according to claims 4 to 6 using this can also improve the positional accuracy and can be easily manufactured.

【0017】[0017]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。図1は本発明の第1実施例を示す偏光ビームスプ
リッタの縦断面図である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of a polarizing beam splitter according to a first embodiment of the present invention.

【0018】同図において、符号1は、例えば方解石等
の複屈折材料よりなる複屈折基板を示しており、この複
屈折基板1表面には凹凸による周期的な格子が形成され
ている。この複屈折基板1表面の凸部1a上には、該複
屈折基板1の材料とは異なる複屈折材料膜として、例え
ば水晶2が形成されており、複屈折基板1の凹凸部及び
複屈折材料膜2により形成される溝内には、等方性材料
よりなる充填材30が充填されている。
In FIG. 1, reference numeral 1 denotes a birefringent substrate made of a birefringent material such as calcite, and a periodic lattice is formed on the surface of the birefringent substrate 1 by irregularities. For example, quartz crystal 2 is formed as a birefringent material film different from the material of the birefringent substrate 1 on the convex portion 1 a on the surface of the birefringent substrate 1. The groove formed by the film 2 is filled with a filler 30 made of an isotropic material.

【0019】ここで、複屈折基板1の厚さをt、複屈折
基板1の凹部1bの溝深さをd1、複屈折材料膜2の厚
さをd2、複屈折基板1の常光に対する屈折率をno
1、複屈折基板1の異常光に対する屈折率をne1、複
屈折材料膜2の常光に対する屈折率をno2、複屈折材
料膜2の異常光に対する屈折率をne2、充填材30の
屈折率をnc、光の波長をλとし、k=2π/λとする
と、複屈折材料膜2が形成された偏光ビームスプリッタ
を通過する(図1におけるAの領域を通過する)常光の
位相は、 {no1・t+no2・d2}k …1式 複屈折材料膜2が形成されていない偏光ビームスプリッ
タを通過する(図1におけるBの領域を通過する)常光
の位相は、 {no1(t−d1)+nc・(d1+d2)}k …2式 従って、常光の位相差OPD(o)は、1式−2式よ
り、 OPD(o)={(no1−nc)d1+(no2−nc)d2}k…3式
Here, the thickness of the birefringent substrate 1 is t, the groove depth of the concave portion 1b of the birefringent substrate 1 is d1, the thickness of the birefringent material film 2 is d2, and the refractive index of the birefringent substrate 1 with respect to ordinary light. Is no
1. The refractive index of the birefringent substrate 1 for extraordinary light is ne1, the refractive index of the birefringent material film 2 for ordinary light is no2, the refractive index of the birefringent material film 2 for extraordinary light is ne2, and the refractive index of the filler 30 is nc. Assuming that the wavelength of light is λ and k = 2π / λ, the phase of ordinary light that passes through the polarizing beam splitter on which the birefringent material film 2 is formed (passes the region A in FIG. 1) is: t + no2 · d2} k (1) The phase of ordinary light that passes through the polarizing beam splitter on which the birefringent material film 2 is not formed (passes the region B in FIG. 1) is: {no1 (t−d1) + nc · ( d1 + d2)} k (2) Accordingly, the phase difference OPD (o) of ordinary light can be calculated from the following equation (1) and equation (2): OPD (o) =) (no1-nc) d1 + (no2-nc) d2} k ... 3

【0020】一方、Aの領域を通過する異常光の位相
は、 {ne1・t+ne2・d2} …4式 Bの領域を通過する異常光の位相は、 {ne1(t−d1)+nc・(d1+d2)}k …5式 従って、異常光の位相差OPD(e)は、4式−5式よ
り、 OPD(e)={(ne1−nc)d1+(ne2−nc)d2}k…6式
On the other hand, the phase of the extraordinary light passing through the region A is {ne1 · t + ne2 · d2}... 4 The phase of the extraordinary light passing through the region B is: {ne1 (t−d1) + nc · (d1 + d2) Therefore, the phase difference OPD (e) of the extraordinary light can be calculated from the following equation (4) −5: OPD (e) = {(ne1-nc) d1 + (ne2-nc) d2} k ... 6

【0021】ここで、異常光が回折しないようにするた
めには、上記3式と6式のうち6式がπの偶数倍となる
ようにすれば良い。すなわち、 OPD(e)={(ne1−nc)d1+(ne2−nc)d2}k =2pπ、(p=0,±1,±2…) …7式 また、常光が回折しないようにするためには、上記3式
と6式のうち3式がπの偶数倍となるようにすれば良
い。すなわち、 OPD(o)={(no1−nc)d1+(no2−nc)d2}k =2pπ、(p=0,±1,±2…) …8式
Here, in order to prevent the extraordinary light from being diffracted, it suffices that 6 of the above equations 3 and 6 be an even multiple of π. That is, OPD (e) = {(ne1-nc) d1 + (ne2-nc) d2} k = 2pπ, (p = 0, ± 1, ± 2...) 7 In order to prevent ordinary light from diffracting. In this case, it suffices that three of the above equations 3 and 6 be an even multiple of π. That is, OPD (o) = {(no1-nc) d1 + (no2-nc) d2} k = 2pπ, (p = 0, ± 1, ± 2...) 8

【0022】ところで、これら2条件下では、d1及び
d2の設定によっては、常光・異常光のうち回折させる
光の中にも、回折しない光量が存在する場合がある。本
発明の偏光ビームスプリッタは、例えば光ディスク装置
のピックアップの中に用いることができるが、このよう
な用途にあっては、常光・異常光のうち一方は全て回折
させ、他方は全く回折しないようにすることが望まし
い。このような目的のためには、7式に加えて、 OPD(o)={(no1−nc)d1+(no2−nc)d2}k =(2q+1)π、(q=0,±1,±2…) …9式 或は、8式に加えて、 OPD(e)={(ne1−nc)d1+(ne2−nc)d2}k =(2q+1)π、(q=0,±1,±2…) …10式 とすれば良い。この時、複屈折材料膜2の厚さd2を決
めるためには、(7−9)式及び(8−10)式より、 [OPD(o)−OPD(e)] ={(no1−ne1)d1+(no2−ne2)d2}k =(2j+1)π、(j=0,±1,±2) …11式 が成り立つように、d1、d2を決めれば良い。
By the way, under these two conditions, depending on the setting of d1 and d2, there is a case where the amount of light that does not diffract is also present in the diffracted light among the ordinary light and the extraordinary light. The polarizing beam splitter of the present invention can be used, for example, in a pickup of an optical disk device.In such an application, one of ordinary light and extraordinary light is diffracted, and the other is not diffracted at all. It is desirable to do. For this purpose, in addition to equation 7, OPD (o) = {(no1-nc) d1 + (no2-nc) d2} k = (2q + 1) π, (q = 0, ± 1, ± 2 ...) ... 9 or 8 plus OPD (e) = {(ne1-nc) d1 + (ne2-nc) d2} k = (2q + 1) π, (q = 0, ± 1, ± 2 ...) ... Equation 10 At this time, in order to determine the thickness d2 of the birefringent material film 2, from the equations (7-9) and (8-10), [OPD (o) -OPD (e)] = {(no1-ne1) ) D1 + (no2-ne2) d2} k = (2j + 1) π, (j = 0, ± 1, ± 2)... 11 may be determined so that d1 and d2 are satisfied.

【0023】7式または8式を満足するように、複屈折
材料膜2の膜厚d2、複屈折基板1の溝深さd1を設定
すれば、上記偏光ビームスプリッタは回折格子として機
能し、常光または異常光の何れか一方のみを回折させな
いようにすることができる。
If the thickness d2 of the birefringent material film 2 and the groove depth d1 of the birefringent substrate 1 are set so as to satisfy the expression 7 or 8, the polarization beam splitter functions as a diffraction grating, and Alternatively, only one of the extraordinary lights can be prevented from diffracting.

【0024】このように、第1実施例においては、表面
に凹凸状の周期格子が形成された複屈折材料としての方
解石よりなる基板1と、この複屈折基板1の凸部1a上
に形成された複屈折基板1の材料とは異なる複屈折材料
層としての水晶2と、を具備し、凹部と凸部の間の常光
の位相差OPD(o)と異常光の位相差OPD(e)の
うち何れか一方がπの偶数倍、となるように、水晶2の
厚みd2及び複屈折基板1の凹部深さd1を設定するよ
うにしたので、上述のように、偏光ビームスプリッタと
して機能させることができるようになっている。
As described above, in the first embodiment, the substrate 1 made of calcite as a birefringent material having an uneven periodic lattice formed on the surface, and the substrate 1 formed on the convex portion 1a of the birefringent substrate 1 And a quartz crystal 2 as a birefringent material layer different from the material of the birefringent substrate 1. The phase difference OPD (o) of the ordinary light between the concave portion and the convex portion and the phase difference OPD (e) of the extraordinary light are provided. The thickness d2 of the quartz crystal 2 and the depth d1 of the concave portion of the birefringent substrate 1 are set so that one of them becomes an even multiple of π, so that it functions as a polarizing beam splitter as described above. Is available.

【0025】ここで、該偏光ビームスプリッタは、従来
技術で説明したプロトン交換部や位相補償用の誘電体格
子を用いておらず、複屈折材料膜2と基板1の溝1bと
を、例えば1回のエッチングにより同時に加工できるよ
うになっているので、位置精度を向上することが可能と
なっている。また、充填材30を溝1bに唯充填するだ
けで、自然と位置合わせができるようになっているの
で、製造を容易に行うことが可能となっている。
Here, the polarizing beam splitter does not use the proton exchange portion or the dielectric grating for phase compensation described in the prior art, and the birefringent material film 2 and the groove 1b of the substrate 1 Since they can be processed simultaneously by multiple etchings, it is possible to improve positional accuracy. In addition, since the positioning can be naturally performed only by filling the groove 1b with the filler 30, the manufacturing can be easily performed.

【0026】図2は本発明の第2実施例を示す偏光ビー
ムスプリッタの縦断面図である。この第2実施例の偏光
ビームスプリッタが第1実施例のそれと違う点は、複屈
折基板1における所定深さd1を有する凹部1b上に、
複屈折材料膜2と同一材よりなる複屈折材料膜12を、
厚さd3分、新たに形成した点である。
FIG. 2 is a longitudinal sectional view of a polarizing beam splitter according to a second embodiment of the present invention. The polarization beam splitter of the second embodiment is different from that of the first embodiment in that the birefringent substrate 1 has a concave portion 1b having a predetermined depth d1.
A birefringent material film 12 made of the same material as the birefringent material film 2
This is a point newly formed for the thickness d3.

【0027】ここで、図2におけるAの領域を通過する
常光の位相は、 {no1・t+no2・d2}k …1式と同じ 図2におけるBの領域を通過する常光の位相は、 {no1(t−d1)+no2・d3+nc(d1+d2−d3)}k …12式 従って、常光の位相差OPD(o)は、1式−12式よ
り、 OPD(o) ={(d2−d3)no2+no1・d1−nc(d1+d2−d3)}k …13式
Here, the phase of the ordinary light passing through the region A in FIG. 2 is the same as the expression {no1 · t + no2 · d2} k (1) The phase of the ordinary light passing through the region B in FIG. t−d1) + no2 · d3 + nc (d1 + d2−d3)} k (12) Accordingly, the phase difference OPD (o) of ordinary light can be calculated from the following equation (1) and equation (12): OPD (o) = 2− (d2−d3) no2 + no1 · d1 −nc (d1 + d2-d3)} k Expression 13

【0028】一方、Aの領域を通過する異常光の位相
は、 {ne1・t+ne2・d2} …4式と同じ Bの領域を通過する異常光の位相は、 {ne1(t−d1)+ne2・d3+nc(d1+d2−d3)}k …14式 従って、異常光の位相差OPD(e)は、4式−14式
より、 OPD(e) ={(d2−d3)ne2+ne1・d1−nc(d1+d2−d3)}k …15式
On the other hand, the phase of the extraordinary light passing through the region A is the same as {ne1 · t + ne2 · d2}... 4 The phase of the extraordinary light passing through the region B is {ne1 (t−d1) + ne2 · d3 + nc (d1 + d2-d3)} k Equation 14 Accordingly, the phase difference OPD (e) of the extraordinary light is obtained from the equation 4-14 as follows: OPD (e) = {(d2-d3) ne2 + ne1 · d1-nc (d1 + d2- d3)} k ... formula 15

【0029】ここで、異常光が回折しないようにするた
めには、上記13式と15式のうち15式がπの偶数倍
となるようにすれば良い。すなわち、 OPD(e) ={(d2−d3)ne2+ne1・d1−nc(d1+d2−d3)}k =2pπ、(p=0,±1,±2…) …16式 また、常光が回折しないようにするためには、上記13
式と15式のうち13式がπの偶数倍となるようにすれ
ば良い。すなわち、 OPD(o) ={(d2−d3)no2+no1・d1−nc(d1+d2−d3)}k =2pπ、(p=0,±1,±2…) …17式
Here, in order to prevent the extraordinary light from being diffracted, it suffices that Expression 15 out of Expressions 13 and 15 is an even multiple of π. That is, OPD (e) = {(d2-d3) ne2 + ne1 · d1-nc (d1 + d2-d3)} k = 2pπ, (p = 0, ± 1, ± 2...) Expression 16 Also, ordinary light is not diffracted. In order to make
It suffices that Expression 13 out of Expression 15 and Expression 15 is an even multiple of π. That is, OPD (o) = {(d2-d3) no2 + no1 · d1-nc (d1 + d2-d3)} k = 2pπ, (p = 0, ± 1, ± 2...) ... 17

【0030】ところで、これら2条件下では、d1及び
d2並びにd3の設定によっては、常光・異常光のうち
回折させる光の中にも、回折しない光量が存在する場合
がある。本発明の偏光ビームスプリッタは、例えば光デ
ィスク装置のピックアップの中に用いることができる
が、このような用途にあっては、常光・異常光のうち一
方は全て回折させ、他方は全く回折しないようにするこ
とが望ましい。このような目的のためには、16式に加
えて、 OPD(o) ={(d2−d3)no2+no1・d1−nc(d1+d2−d3)}k =(2q+1)π、(q=0,±1,±2…) …18式 或は、17式に加えて、 OPD(e) ={(d2−d3)ne2+ne1・d1−nc(d1+d2−d3)}k =(2q+1)π、(q=0,±1,±2…) …19式 とすれば良い。この時、複屈折材料膜2,12の厚さd
2,d3を決めるためには、(16−18)式及び(1
7−19)式より、 [OPD(o)−OPD(e)] ={(no2−ne2)・(d2−d3)+d1(no1−ne1)}k =(2j+1)π、(j=0,±1,±2) …20式 が成り立つように、d1、d2、d3を決めれば良い。
Under these two conditions, depending on the setting of d1, d2, and d3, there is a case where there is an amount of light that is not diffracted among the ordinary light and the extraordinary light to be diffracted. The polarizing beam splitter of the present invention can be used, for example, in a pickup of an optical disk device.In such an application, one of ordinary light and extraordinary light is diffracted, and the other is not diffracted at all. It is desirable to do. For this purpose, in addition to equation 16, OPD (o) = {(d2-d3) no2 + no1 · d1-nc (d1 + d2-d3)} k = (2q + 1) π, (q = 0, ± 1, ± 2 ...) ... In addition to equation 18 or equation 17, OPD (e) = {(d2-d3) ne2 + ne1 * d1-nc (d1 + d2-d3)} k = (2q + 1) π, (q = 0, ± 1, ± 2 ...) Expression 19 At this time, the thickness d of the birefringent material films 2 and 12 is
In order to determine 2, d3, equations (16-18) and (1
From equation 7-19), [OPD (o) -OPD (e)] = {(no2-ne2). (D2-d3) + d1 (no1-ne1)} k = (2j + 1) π, (j = 0, ± 1, ± 2) ... d1, d2, and d3 may be determined so that Equation 20 is satisfied.

【0031】16式または17式を満足するように、複
屈折材料膜2の膜厚d2、複屈折材料膜12の膜厚d
3、基板1の溝深さd1を設定すれば、上記偏光ビーム
スプリッタは回折格子として機能し、常光または異常光
の何れか一方のみを回折させないようにすることができ
る。
The thickness d2 of the birefringent material film 2 and the thickness d of the birefringent material film 12 are set so as to satisfy Expression 16 or Expression 17.
3. If the groove depth d1 of the substrate 1 is set, the polarization beam splitter functions as a diffraction grating, and can prevent either ordinary light or extraordinary light from diffracting.

【0032】このように構成しても、第1実施例と同様
な効果を得ることができるというのはいうまでもない。
It is needless to say that the same effect as in the first embodiment can be obtained even with this configuration.

【0033】図3は本発明の第3実施例を示す偏光ビー
ムスプリッタの縦断面図である。この第3実施例の偏光
ビームスプリッタが第1、第2実施例のそれと違う点
は、平坦な複屈折基板1上に、凹凸状の複屈折材料膜
2,22を形成した点である。
FIG. 3 is a longitudinal sectional view of a polarizing beam splitter according to a third embodiment of the present invention. The polarization beam splitter of the third embodiment differs from those of the first and second embodiments in that irregular birefringent material films 2 and 22 are formed on a flat birefringent substrate 1.

【0034】この第3実施例にあっても、上記第1、第
2実施例と同様の要領で計算を行うと、 OPD(o)=(d2−d3)・(no2−nc)}・
k OPD(e)=(d2−d3)・(ne2−nc)}・
k、となる。
Even in the third embodiment, when the calculation is performed in the same manner as in the first and second embodiments, OPD (o) = (d2-d3) · (no2-nc)} ·
k OPD (e) = (d2-d3) · (ne2-nc)} ·
k.

【0035】従って、上記第1、第2実施例と同様に、
常光を回折させないためには、 OPD(o)=(d2−d3)・(no2−nc)}・k =2qπ、(q=0,1,2…) …21式 或は、異常光を回折させないためには、 OPD(e)=(d2−d3)・(ne2−nc)}・k =2qπ、(q=0,1,2…) …22式
Therefore, similarly to the first and second embodiments,
In order to prevent ordinary light from diffracting, OPD (o) = (d2-d3) · (no2-nc)} · k = 2qπ, (q = 0, 1, 2,...) Formula 21 or diffracting extraordinary light In order not to make it occur, OPD (e) = (d2-d3) · (ne2-nc)} · k = 2qπ, (q = 0, 1, 2,...) 22

【0036】21式または22式を満足するように、複
屈折材料膜2の膜厚d2、複屈折材料膜22の膜厚d3
を設定すれば、偏光ビームスプリッタとして、常光また
は異常光の何れか一方のみを回折させないようにするこ
とができる。
The thickness d2 of the birefringent material film 2 and the thickness d3 of the birefringent material film 22 are set so as to satisfy the expression 21 or 22.
Is set, it is possible to prevent only one of ordinary light and extraordinary light from diffracting as a polarizing beam splitter.

【0037】このように構成しても、先の第1、第2実
施例と同様な効果を得ることができるというのはいうま
でもない。
It is needless to say that the same effects as those of the first and second embodiments can be obtained with this configuration.

【0038】因に、上記第1乃至第3実施例において
は、溝部分に屈折率ncの等方性材料30を充填するよ
うにしているが、この充填材30を空気とすることも可
能である。この場合には、nc=1となる。
In the first to third embodiments, the groove is filled with the isotropic material 30 having the refractive index nc. However, the filler 30 may be air. is there. In this case, nc = 1.

【0039】なお、上記第1及び第2実施例における充
填材30の屈折率を、以下の式が満足し得るように設定
すると、d1=0となり、複屈折基板1の凹部の厚みを
0とすることができる。すなわち、基板1への溝加工を
省くことが可能となる。nc=m・|no2−ne2|
+no2(またはne2)、(mは整数)
When the refractive index of the filler 30 in the first and second embodiments is set so as to satisfy the following equation, d1 = 0, and the thickness of the concave portion of the birefringent substrate 1 is set to 0. can do. That is, it is possible to omit the groove processing on the substrate 1. nc = m · | no2-ne2 |
+ No2 (or ne2), (m is an integer)

【0040】また、第3実施例における充填材に下式を
満たす屈折率の材質を選ぶと、 OPD(o)=2qπ、且つ、OPD(e)=(2p+
1)π 或は、OPD(o)=(2p+1)π、且つOPD
(e)=2qπ とすることができ、常光・異常光を回折させないだけで
なく、他方を全て回折させることが可能なり、アイソレ
ータや光ヘッドの差動検出には好適である。
When a material having a refractive index satisfying the following formula is selected as the filler in the third embodiment, OPD (o) = 2qπ and OPD (e) = (2p +
1) π or OPD (o) = (2p + 1) π and OPD
(E) = 2qπ, which allows not only ordinary light and extraordinary light to be diffracted but also diffracts all the other light, which is suitable for differential detection of an isolator or an optical head.

【0041】また、上記第1乃至第3実施例で説明した
偏光ビームスプリッタの表裏面の少なくとも一方に反射
防止膜を設け、総合的な光の利用効率の向上を図ること
もできる。
Further, an antireflection film may be provided on at least one of the front and back surfaces of the polarizing beam splitter described in the first to third embodiments to improve the overall light use efficiency.

【0042】なお、基板1の光学軸と複屈折材料膜2の
光学軸は、互いに略平行または略直交するように設定さ
れている。また、溝1bの方向或はパターンは、基板1
の光学軸や複屈折材料膜2の光学軸とは無関係に設定で
きるようになっており、自由度の向上が図られている。
The optical axis of the substrate 1 and the optical axis of the birefringent material film 2 are set so as to be substantially parallel or substantially perpendicular to each other. The direction or pattern of the groove 1b is
This can be set irrespective of the optical axis of the birefringent material film 2 or the optical axis of the birefringent material film 2, thereby improving the degree of freedom.

【0043】以上、これまでの実施例では、基板上に直
接複屈折膜が形成されている例を述べてきたが、上記基
板と複屈折膜との間に接着層を介在させても、同様な効
果を得ることが可能である。
In the above embodiments, the example in which the birefringent film is formed directly on the substrate has been described. However, the same applies to the case where an adhesive layer is interposed between the substrate and the birefringent film. It is possible to obtain various effects.

【0044】図4は本発明の第4実施例を示す偏光ビー
ムスプリッタを用いた光ヘッド装置の各斜視図である。
この第4実施例の偏光ビームスプリッタとしては、第1
乃至第3実施例で説明した偏光ビームスプリッタが用い
られており、この偏光ビームスプリッタは、例えば光ピ
ックアップ装置の差動検出に用いられている。
FIG. 4 is a perspective view of an optical head device using a polarizing beam splitter according to a fourth embodiment of the present invention.
As the polarizing beam splitter of the fourth embodiment, the first
The polarization beam splitter described in the third to third embodiments is used, and this polarization beam splitter is used, for example, for differential detection of an optical pickup device.

【0045】ここで、図4(a)に示される光ヘッド装
置は、光源53と、光源53からの光束を情報記録媒体
50上に集光させる対物レンズ51と、該光源53から
情報記録媒体50へ向かう光束と情報記録媒体50によ
り反射された光束とを分離する光束分離手段52と、反
射光束を受光する分割された多数の受光部を有する光検
出器54と、を備えており、光束分離手段52と光検出
器54との間の光路中に、上記偏光ビームスプリッタが
配設されている。そして、該偏光ビームスプリッタの複
屈折材料の光学軸Xは、情報記録媒体50の反射光の偏
光方向Yに対して略45°に設定されており、従って情
報記録媒体30からの反射光の回折光と0次光を光検出
器54にて受光し、差動検出できるようになっている。
Here, the optical head device shown in FIG. 4A includes a light source 53, an objective lens 51 for condensing a light beam from the light source 53 on an information recording medium 50, and an information recording medium from the light source 53. A light beam separating means 52 for separating the light beam traveling toward the optical recording medium 50 from the light beam reflected by the information recording medium 50; and a photodetector 54 having a large number of divided light receiving portions for receiving the reflected light beam. In the optical path between the separating means 52 and the photodetector 54, the above-mentioned polarizing beam splitter is arranged. The optical axis X of the birefringent material of the polarizing beam splitter is set to approximately 45 ° with respect to the polarization direction Y of the reflected light of the information recording medium 50. Therefore, the diffraction of the reflected light from the information recording medium 30 is performed. The light and zero-order light are received by the photodetector 54 so that differential detection is possible.

【0046】図4(b)に示される光ヘッド装置は、光
源53と、光源53からの光束を情報記録媒体50上に
集光させる対物レンズ51と、λ/4板55と、情報記
録媒体50から反射された光束を受光する光検出器5
4,54と、を備えており、上記偏光ビームスプリッタ
は、光源53から光検出器54,54までの光路中に配
置されており、且つ該偏光ビームスプリッタにおける光
源53から入射する光の凹凸に対する位相差が、πの偶
数倍となるように、光源53からの光束を該偏光ビーム
スプリッタに入射させている。すなわち、往路は位相差
がπの偶数倍であるために透過し、復路はπの奇数倍と
なるので光束を全て回折して光検出器54,54にて受
光できるようになっている。
The optical head device shown in FIG. 4B includes a light source 53, an objective lens 51 for condensing a light beam from the light source 53 on an information recording medium 50, a λ / 4 plate 55, and an information recording medium. Photodetector 5 for receiving the light beam reflected from 50
And the polarization beam splitter is disposed in the optical path from the light source 53 to the photodetectors 54 and 54, and is adapted to cope with unevenness of light incident from the light source 53 in the polarization beam splitter. The light beam from the light source 53 is incident on the polarizing beam splitter so that the phase difference is an even multiple of π. That is, the outgoing path is transmitted because the phase difference is an even multiple of π, and the return path is an odd multiple of π, so that all the light beams are diffracted and can be received by the photodetectors 54 and 54.

【0047】このように、第4実施例の光ヘッド装置に
あっては、上述の容易に製造されると共に精度の向上が
図られた偏光ビームスプリッタを用いているので、この
偏光ビームスプリッタを用いた光ヘッド装置も同様に、
容易に製造できると共に精度の向上を図ることが可能と
なる。
As described above, in the optical head device of the fourth embodiment, since the above-described polarization beam splitter which is easily manufactured and whose accuracy is improved is used, this polarization beam splitter is used. Similarly, the optical head device
It can be manufactured easily and the accuracy can be improved.

【0048】以上本発明者によってなされた発明を実施
例に基づき具体的に説明したが、本発明は上記実施例に
限定されるものではなく、その要旨を逸脱しない範囲で
種々変形可能であるというのはいうまでもない。
Although the invention made by the inventor has been specifically described based on the embodiments, the present invention is not limited to the above-described embodiments, and can be variously modified without departing from the gist thereof. Needless to say.

【0049】[0049]

【発明の効果】以上述べたように、請求項1乃至の偏
光ビームスプリッタによれば、従来技術で説明したプロ
トン交換部や位相補償用の誘電体格子を用いずに、偏光
ビームスプリッタとしての機能を発揮でき、凹凸格子と
基板の溝とを、例えば1回のエッチングにより同時に加
工できるので、位置精度を向上することが可能となる。
また、充填材を凹部や溝に唯充填すれば良いので、製造
を容易に行うことが可能となる。従って、これを用いた
請求項乃至における光ヘッド装置も、位置精度を向
上することができると共に、製造を容易に行うことが可
能となる。
As described above, according to the polarization beam splitters of the first to third aspects, the polarization beam splitter can be used as a polarization beam splitter without using the proton exchange part or the dielectric grating for phase compensation described in the prior art. Since the function can be exhibited and the grooves of the concave and convex grating and the grooves of the substrate can be simultaneously processed by, for example, one etching, the positional accuracy can be improved.
In addition, since it is only necessary to fill the recesses and the grooves with the filler, manufacturing can be easily performed. Therefore, the optical head device according to claims 4 to 6 using this can also improve the positional accuracy and can easily manufacture the optical head device.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施例を示す偏光ビームスプリッ
タの縦断面図である。
FIG. 1 is a longitudinal sectional view of a polarizing beam splitter according to a first embodiment of the present invention.

【図2】本発明の第2実施例を示す偏光ビームスプリッ
タの縦断面図である。
FIG. 2 is a longitudinal sectional view of a polarizing beam splitter according to a second embodiment of the present invention.

【図3】本発明の第3実施例を示す偏光ビームスプリッ
タの縦断面図である。
FIG. 3 is a longitudinal sectional view of a polarizing beam splitter according to a third embodiment of the present invention.

【図4】本発明の第4実施例を示す偏光ビームスプリッ
タを用いた光ヘッド装置の各斜視図である。
FIG. 4 is a perspective view of an optical head device using a polarizing beam splitter according to a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 複屈折基板 1a,1b 複屈折基板の凹凸部 2,12,22 複屈折材料層 30 充填材 50 情報記録媒体 51 対物レンズ 52 光束分離手段 53 光源 54 光検出器 55 λ/4板 d1 基板の凹部深さ d2,d3 複屈折材料層の凹凸部の厚み X 複屈折材料の光学軸 Y 反射光の偏光方向 DESCRIPTION OF SYMBOLS 1 Birefringent substrate 1a, 1b Concavo-convex part of birefringent substrate 2, 12, 22 Birefringent material layer 30 Filler 50 Information recording medium 51 Objective lens 52 Light beam separating means 53 Light source 54 Photodetector 55 λ / 4 plate d1 Substrate Depth of recesses d2, d3 Thickness of uneven portion of birefringent material layer X Optical axis of birefringent material Y Polarization direction of reflected light

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 表面に凹凸状の周期格子が形成された複
屈折材料よりなる基板と、 この複屈折基板の前記凹部及び凸部のうちの少なくとも
凸部上に形成された前記複屈折基板の材料とは異なる複
屈折材料層と、を具備し、 前記凹部と凸部の間の常光の位相差と異常光の位相差の
うち何れか一方がπの偶数倍、となり、かつ上記常光・
異常光のうちの一方を回折させ他方は回折させないよう
に、前記複屈折材料層の厚みd2,d3及び前記基板の
凹部深さd1を設定してなる偏光ビームスプリッタ。
1. A substrate made of a birefringent material having a concave and convex periodic grating formed on a surface thereof, and a birefringent substrate formed on at least a convex portion of the concave portion and the convex portion of the birefringent substrate. A birefringent material layer different from the material, and any one of the phase difference of the ordinary light and the phase difference of the extraordinary light between the concave portion and the convex portion is an even multiple of π, and
A polarizing beam splitter in which the thickness d2, d3 of the birefringent material layer and the depth d1 of the concave portion of the substrate are set so that one of the extraordinary lights is diffracted while the other is not diffracted.
【請求項2】 請求項記載の偏光ビームスプリッタに
おいて、 前記凹部には、等方性材料が充填されてなる偏光ビーム
スプリッタ。
2. The polarization beam splitter according to claim 1 , wherein the concave portion is filled with an isotropic material.
【請求項3】 請求項1乃至記載の偏光ビームスプリ
ッタにおいて、 表裏面の少なくとも一方の面に、反射防止膜を具備した
偏光ビームスプリッタ。
3. The polarizing beam splitter according to claim 1 or 2, wherein the at least one surface of front and back surfaces, polarizing beam splitters provided with the antireflection film.
【請求項4】 光源と、対物レンズと、該光源から情報
記録媒体へ向かう光束と前記情報記録媒体により反射さ
れた光束とを分離する光束分離手段と、反射光束を受光
する光検出器と、を備えた光ヘッド装置において、 請求項1乃至記載の偏光ビームスプリッタを、光束分
離手段と光検出器との間の光路中に配置してなる光ヘッ
ド装置。
4. A light source, an objective lens, a light beam separating means for separating a light beam from the light source toward the information recording medium and a light beam reflected by the information recording medium, and a photodetector for receiving the reflected light beam. An optical head device comprising: the polarization beam splitter according to any one of claims 1 to 3 disposed in an optical path between a light beam separating unit and a photodetector.
【請求項5】 請求項記載の光ヘッド装置において、 偏光ビームスプリッタの複屈折材料の光学軸を、情報記
録媒体の反射光の偏光方向に対して略45°に設定して
なる光ヘッド装置。
5. The optical head device according to claim 4 , wherein the optical axis of the birefringent material of the polarization beam splitter is set at approximately 45 ° with respect to the polarization direction of the reflected light of the information recording medium. .
【請求項6】 光源と、対物レンズと、λ/4板と、情
報記録媒体から反射された光束を受光する光検出器と、
を備えた光ヘッド装置において、 請求項1乃至記載の偏光ビームスプリッタを、光源か
ら光検出器までの光路中に配置し、 該偏光ビームスプリッタにおける光源から入射する光の
凹凸に対する位相差が、πの偶数倍となるように、光源
からの光束を該偏光ビームスプリッタに入射させてなる
光ヘッド装置。
6. A light source, an objective lens, a λ / 4 plate, a photodetector for receiving a light beam reflected from an information recording medium,
An optical head device comprising: the polarizing beam splitter according to any one of claims 1 to 3 , wherein the polarizing beam splitter is disposed in an optical path from a light source to a photodetector; An optical head device in which a light beam from a light source is incident on the polarizing beam splitter so as to be an even multiple of π.
JP10066994A 1994-04-14 1994-04-14 Polarizing beam splitter and optical head device using the same Expired - Fee Related JP3299383B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10066994A JP3299383B2 (en) 1994-04-14 1994-04-14 Polarizing beam splitter and optical head device using the same
CNB2003101142124A CN1250987C (en) 1994-04-14 1995-04-14 Polarized light beam splitter and optical probe using the same
CNB951039660A CN1134677C (en) 1994-04-14 1995-04-14 Seperator of polarized light beam and light detector using same
US08/421,904 US5739952A (en) 1994-04-14 1995-04-14 Polarizing beam splitter and optical head assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10066994A JP3299383B2 (en) 1994-04-14 1994-04-14 Polarizing beam splitter and optical head device using the same

Publications (2)

Publication Number Publication Date
JPH07287121A JPH07287121A (en) 1995-10-31
JP3299383B2 true JP3299383B2 (en) 2002-07-08

Family

ID=14280187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10066994A Expired - Fee Related JP3299383B2 (en) 1994-04-14 1994-04-14 Polarizing beam splitter and optical head device using the same

Country Status (1)

Country Link
JP (1) JP3299383B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002311242A (en) 2001-04-18 2002-10-23 Ricoh Co Ltd Polarized light separating element, semiconductor laser unit and optical pickup device
GB2405544A (en) * 2003-08-30 2005-03-02 Sharp Kk Light control element for outputting polarised light over different angular ranges.
JP4597848B2 (en) * 2005-11-30 2010-12-15 京セラキンセキ株式会社 Polarization conversion element

Also Published As

Publication number Publication date
JPH07287121A (en) 1995-10-31

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