JP3295838B2 - End hat for magnetron and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetron end hat made of a high melting point metal, for example, molybdenum incorporated in magnetron spheres, and a method of manufacturing the same.

[0002]

2. Description of the Related Art An end hat (hereinafter, simply referred to as an end hat) made of molybdenum incorporated in a magnetron sphere of this kind generally has a shape as shown in FIG.

Referring to FIG. 5A, an upper end hat main body 50 includes a bottom portion 51, an outer peripheral portion 52 extending diagonally from the edge of the bottom portion 51, and a boss portion 53 projecting cylindrically from the bottom portion 51. And In the center of the boss 53, a through hole 54 is provided. Also, the bottom 5
1, a brazing material 5 attached around the boss 53
5 are provided.

Referring to FIG. 5B, a lower end hat main body 60 includes a bottom portion 61 having a through hole 63 and a bottom portion 61.
And an outer peripheral portion 62 protruding in a tubular shape from the edge of the outer peripheral portion 62, and a brazing material 65 is provided inside the outer peripheral portion 62 and on the bottom portion 61.

In FIG. 5A and FIG. 5B, the brazing material 55 or 65 has a ring shape made of a Ru—Mo alloy or an alloy obtained by adding Ni to Ru—Mo, and has an upper or lower end hat. It is joined to the main bodies 50 and 60 by shrink fitting, an adhesive, or spot welding, and used.

FIGS. 6 (a), 6 (b), 6 (c) and 6 (d)
FIG. 2 is a cross-sectional view showing a conventional method of shrink-fitting a brazing material into an end hat. As shown in FIG. 6A, after the brazing material 55 is attached to the upper end hat main body 50, it is sintered, and
As shown in (c), the end hat finished product in a state where the outer peripheral portions 52 of the end hat bodies 50 and 60 are contracted in the radial direction indicated by the arrow 56.

Further, as shown in FIG. 6B, after the brazing material 65 is mounted on the lower end hat main body 60, FIG.
As shown in (d), the end-hat completed product in a state where the outer peripheral portion 62 and the bottom portion 61 are contracted in the radial direction 66 is obtained.

Conventionally, as described above, the brazing materials 55, 6
5 is inserted into the lower end hat body 60 provided with the insertion hole 63 or the upper end hat body 50 having the boss 53. This was usually sintered (shrunk) at a temperature of 1700 ° C. or more, and the upper and lower end hats were joined by shrink fitting using the difference in shrinkage between the brazing material and the end hat.

FIG. 7 is a diagram which is used for explaining the manufacture of the end hat shown in FIGS. 5 and 6. FIGS. 7A and 7B
In the shrink fitting method, since either of the upper and lower end hat bodies 50, 60 and the brazing materials 55, 65 are joined to each other by using a difference in shrinkage at the time of sintering, the upper and lower end hats 50, 60 are joined together after the shrink fitting. When gaps 57, 67 are formed between the lower end hat bodies 50, 60 and the brazing material 55, or when the shrinkage strength is insufficient, the brazing materials 55, 65 may fall off after sintering.

[0010]

Next, the disadvantages of the prior art will be described with reference to FIG.

FIGS. 8 (a) and 8 (b) are views for explaining the drawbacks of manufacturing an end hat according to the prior art. As shown in FIG. 8A, the brazing material 5 of the upper end hat 50
5 has a radial gap 71 and a planar gap 73. As shown in FIG. 8B, the brazing material 65 of the lower end hat 60 has a radial gap 72 and a planar gap 74.

As a method of solving these disadvantages, the brazing materials 55 and 65 are plated with Ni and heat-treated.
Since the bonding is performed by the diffusion or melting of Ni, a strong bonding state can be obtained without generating a gap, but it is necessary to apply Ni plating to the brazing material, which is costly.

On the other hand, in the bonding method using an adhesive, a direct adhesive is used, but before being incorporated into the magnetron sphere,
That is, when heat treatment is performed only in the state of the end hat body and the brazing material, the organic solvent is gasified and scattered, so that the brazing material may fall off.

Further, when the brazing material is melted in the process of being incorporated into the magnetron sphere, the remaining organic solvent is gasified and scattered, which may undesirably deteriorate the performance of the magnetron sphere.

Further, in the method of melting the brazing material and attaching it to the end hat body, the end hat body and the brazing material are separately sintered, and then the brazing material is inserted into the end hat body.
Further, the brazing material is melted at a temperature equal to or higher than the melting point of the brazing material and adhered to the end hat body.

However, in this method, the number of times of sintering is increased, and the temperature for melting the brazing material is high.

The method using spot welding or the like has no problem with the adhesive strength and the like, but is not economically preferable because of the high cost.

In the conventional method, a gap may be formed between the end hat body and the brazing material.
In the process described above, strict control is required because the soldering process may cause defective brazing in the process of assembling the magnetron sphere. In addition, if the bonding is weak, when a post-bonding process, such as barrel processing, is performed, the brazing material may fall off, crack or chip, thereby affecting the yield.

Accordingly, it is an object of the present invention to provide a magnetron end hat in which a brazing filler metal is incorporated with a high yield and a method of manufacturing the same.

[0020]

In order to solve the above-mentioned problems, a magnetron end hat according to the present invention includes an end hat body and a brazing material, and compresses the brazing material or the brazing material and the end hat body. By doing, it is a magnetron end hat in which the brazing material is joined in the end hat body, wherein the brazing material is made of a temporary sintered body or a sintered body, and the end hat body is made of a sintered body It is characterized by becoming.

Further, in the magnet end hat of the present invention, the brazing material has a ring shape, and there is no gap at a contact portion between the brazing material and the end hat body.

Further, in the method for manufacturing an end hat for a magnetron of the present invention, a brazing material made of a pre-sintered body or a sintered body is inserted into an end hat body made of a sintered body, and a metal set in a press machine is inserted. The method is characterized in that the brazing material or the end hat body is joined by compressing the brazing material or the brazing material and the end hat body into a mold.

Specifically, the present invention employs the following method. As a method of joining the brazing material to the end hat incorporated in the magnetron sphere, temporarily sintered or sintered brazing material is inserted into the sintered end hat, put in a mold,
This is a method of compressing and joining the brazing material or the brazing material and the end hat.

[0024]

Embodiments of the present invention will be described below with reference to the drawings.

In the embodiment of the present invention, a brazing material of a pre-sintered body or a sintered body is inserted into a sintered end hat, placed in a mold set in a press machine, and the brazing material or the brazing material is And by compressing the end hat. As described above, by compressing the brazing material in a state where the brazing material is inserted into the end hat, the brazing material extends in the radial direction, contacts the lower end hat having the insertion hole or the upper end hat having the boss portion, and is further pressed. Can be firmly joined.

First, a method for manufacturing a magnetron end hat according to an embodiment of the present invention will be described.

FIGS. 1 (a) and 1 (b) are cross-sectional views showing the outline of the configuration of an apparatus for manufacturing a magnetron end hat according to an embodiment of the present invention. Referring to FIG. 1A and FIG. 1B, a Ru—Mo alloy or Ru—M
a ring-shaped brazing material made of an alloy obtained by adding Ni to o,
In No. 15, the Ru powder and the Mo powder are blended in a weight% so as to be at the eutectic point in the Ru-Mo phase diagram, mixed well, and then press-molded into a ring shape. Ru powder and Mo
The powder is compounded in weight% so as to have an eutectic point in the Ru-Mo phase diagram, mixed with the Ni powder, mixed well, and then press-molded into a ring shape.

As shown in FIGS. 1 (a) and 1 (b), the press-formed brazing materials 5, 15 are sintered at about 1100 ° C., and the lower end having an insertion hole 3 sintered at 1700 ° C. or more. It is inserted into the hat main body 1 or the upper end hat main body 11 having the boss 13. Next, the molds 25, 3 formed by the upper outer punches 23, 33, the upper inner punches 21, 31, the dies 24, 34, and the lower punches 22, 32, which are set on the press machines 30, 40, respectively.
5 and the brazing material 5 or brazing material 15 and the end hat bodies 1 and 11 are compressed. At this time, the brazing materials 5 and 15 are preferably 50% to 70% in relative density in consideration of compressibility.

The compressed brazing materials 5 and 15 extend in the radial direction, come into contact with the lower end hat main body having an insertion hole or the upper end hat main body having a boss portion, and can be firmly joined by further pressing. .

Next, as a specific example of manufacturing, a method of joining a brazing material to a lower end hat body having an insertion hole will be described.

First, the outer diameter φ 3.90 (mm) and the inner diameter φ
A brazing material 5 having a thickness of 3.10 (mm) and a thickness of 0.3 (mm) is prepared. The brazing material 5 can be either a pre-sintered body or a sintered body, but the pre-sintered body (about 11
(Sintered at 00 ° C.). Next, a diameter of 3.95 (mm)
The lower end hat main body 1 having the insertion hole 3 is prepared.
The lower end hat main body 1 is preferably sintered at 1700 ° C. or higher.

Next, the brazing material 5 is inserted into the insertion hole 3 of the lower end hat main body 1. In this state, it is put into the mold 25 set in the press machine 30 to make it as shown in FIG. The mold includes a die 24, an upper outer punch 21, an upper inner punch 23, and a lower punch 22. Upper outer punch 21 and lower punch 22
Then, the upper and lower surfaces of the lower end hat main body 1 are suppressed, and the brazing material 5 is compressed by the upper inner punch 23. At this time, brazing material 5
Was extended in the radial direction, came into contact with the insertion hole 3 of the lower end hat main body 1, and could be firmly joined by further pressing.

The amount of compression of the brazing material 5 when the brazing material 5 is compressed, the change in the size of the brazing material 5 and the change in the density of the brazing material 5 are shown in Table 1 below and FIGS.

[0034]

[Table 1]

As can be seen from these data, as the amount of compression of the brazing material 5 increases, the outer diameter increases and the inner diameter decreases.

Therefore, the lower end hat main body 1 comes into contact with the insertion hole 3 of the lower end hat main body 1 by increasing the outer diameter of the brazing material 5.

The upper end hat body 11 can be firmly joined by contacting the boss 3 of the upper end hat 15 by reducing the inner diameter of the brazing material 15 and further applying pressure.

Conventionally, as shown in FIG. 8, the gap between the end hat main body and the brazing material, which has been considered a problem, is compressed in a state where the brazing material and the end hat are in contact with each other in the present invention. A state of contact is obtained in both the direction and the surface direction,
A state was obtained in which there was no gap between the contact portions between the brazing materials 5 and 15 and the end hat bodies 1 and 11.

The relative density of the brazing materials 5 and 15 after compression joining is about 78%, and the brazing materials 5 and 15 are not reduced in mass.
Was reduced to 0.20 (mm) or less, which is 60% of the normal thickness of 0.33 (mm).

Accordingly, since the brazing filler metal and the end hat are compression-bonded, the bonding state is further strengthened, and there is no gap between the brazing filler metal and the end hat, which has conventionally occurred. The need for strict management is eliminated.

In the conventional shrink fitting method, if the bonding strength is low, when a bonding step is performed, for example, when barrel processing is performed, the brazing material may fall off, crack or chip, thereby affecting the yield. However, in the present invention, the conventional average yield is 87%, while the compression bonding method is used to achieve 99%.
Improved up to. Also, the brazing material did not fall off during handling.

The poor brazing that occurs in the process of assembling into the magnetron sphere is caused by a gap between the brazing material and the end hat (a gap in a plane direction in FIG. 8) and a large thickness of the brazing material. However, in the present invention, since the brazing material is compression-bonded, there is no gap between the brazing material and the end hat, and it is possible to further reduce the thickness of the brazing material. And high quality brazing material can be provided.

The compression joining of the brazing material and the end hat can be simultaneously performed during the sizing step generally performed to improve the accuracy of the end hat, and the shrink fitting step conventionally performed is omitted. It is economical.

[0044]

As described above, according to the present invention,
Conventionally, a brazing material is inserted into the lower end hat having an insertion hole or the upper end hat having a boss portion, and a joining method is used by utilizing the ductility in a radial direction generated when the brazing material is compressed. And a method for manufacturing the same, which is provided with a high-density and thin brazing material as compared with the brazing material.

Also, in the present invention, there is provided a magnetron end hat which is excellent in yield and quality without any gap between the brazing material and the end hat, which is caused by the conventional method, and provides a manufacturing method thereof. can do.

In the present invention, since the density of the brazing filler metal is increased by compression, the brazing filler metal does not crack even after a post-process such as a barrel treatment. An end hat for a magnetron that does not fall off and a method for manufacturing the same can be provided.

Further, according to the present invention, in the step of assembling into the magnetron sphere, the end hat for the magnetron which is free from the defective brazing due to the thickness of the brazing material and the gap between the brazing material and the end hat, and the production thereof. A method can be provided.

Further, according to the present invention, the press forming and sintering steps of the brazing material are the same as in the prior art, and the compression joining of the brazing material and the end hat can be performed simultaneously during the sizing process. Therefore, it is possible to provide a magnetron end hat that can be easily industrialized and a method for manufacturing the same.

Further, according to the present invention, it is possible to omit the baking process conventionally performed and it is economical. Therefore, a magnetron end hat having a low-cost and high-quality brazing material and a magnetron end hat having the same are used. A manufacturing method can be provided.

[Brief description of the drawings]

1 (a) and 1 (b) are cross-sectional views showing an outline of an apparatus configuration for manufacturing a magnetron end hat according to an embodiment of the present invention.

FIG. 2 is a diagram showing a change in a compression amount of the brazing material 5 and a size of the brazing material 5 when the brazing material 5 is compressed.

FIG. 3 is a diagram showing a density change of the brazing material 5 when the brazing material 5 is compressed.

FIG. 4 is a diagram showing a comparison in yield between a conventional method and an embodiment of the present invention.

FIGS. 5A and 5B are cross-sectional views showing end hats according to the related art, respectively.

FIGS. 6 (a), (b), (c), and (d) are views for explaining a shrink-fitting method according to a conventional technique.

FIGS. 7 (a) and 7 (b) are cross-sectional views respectively showing the disadvantages of the shrink-fitting method according to the prior art.

8 (a) and 8 (b) are cross-sectional views respectively showing the disadvantages of the manufacturing method according to the prior art.

[Explanation of symbols]

 1,60 Lower end hat body 3,54 Insertion hole 5,15,55,65 Brazing material 11,50 Upper end hat body 13,53 Boss 21,31 Upper outer punch 22,32 Lower punch 23,33 Upper inner punch 24, 34 Dies 25, 35 Inside of mold 30, 40 Press machine 52, 62 Outer peripheral part 63 Through hole 71, 72 Gaps in radial direction 73, 74 Gaps in surface direction

Claims (3)

(57) [Claims] An end hat for a magnetron comprising an end hat body and a brazing material, wherein the brazing material or the brazing material and the end hat body are compressed to join the brazing material into the end hat body. Wherein the brazing material is made of a temporary sintered body or a sintered body, and the end hat body is made of a sintered body. 2. The magnetron end hat according to claim 1, wherein the brazing material has a ring shape, and there is no gap at a contact portion between the brazing material and the end hat body. End hat. 3. A brazing material comprising a temporary sintered body or a sintered body,
The brazing material and the end hat are inserted into an end hat body made of a sintered body, placed in a mold set in a press machine, and compressing the brazing material or the brazing material and the end hat body. A method for manufacturing an end hat for a magnetron, comprising joining a main body.