JP3293222B2 - Fe-Ni alloy sheet and Fe-Ni-Co alloy sheet having excellent magnetic properties for shadow mask and method for producing the same - Google Patents
Fe-Ni alloy sheet and Fe-Ni-Co alloy sheet having excellent magnetic properties for shadow mask and method for producing the sameInfo
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- JP3293222B2 JP3293222B2 JP06244393A JP6244393A JP3293222B2 JP 3293222 B2 JP3293222 B2 JP 3293222B2 JP 06244393 A JP06244393 A JP 06244393A JP 6244393 A JP6244393 A JP 6244393A JP 3293222 B2 JP3293222 B2 JP 3293222B2
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Description
【0001】[0001]
【産業上の利用分野】この発明は、磁気特性に優れたFe
−Ni合金薄板およびFe−Ni−Co合金薄板に係り、カラー
ブラウン管に使用される好ましいシャドウマスク用Fe−
Ni合金薄板およびFe−Ni−Co合金薄板およびそれらの製
造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention
-Regarding Ni alloy thin plate and Fe-Ni-Co alloy thin plate, preferable Fe for shadow mask used for color cathode ray tube-
The present invention relates to a Ni alloy thin plate and a Fe—Ni—Co alloy thin plate and a method for producing them.
【0002】[0002]
【従来の技術】近年、カラーテレビの高品位化に伴い、
色ずれの問題に対処できるシャドウマスク用合金とし
て、34〜38wt%のNiを含有するFe−Ni系合金(以下
「従来のFe−Ni系合金」という)が使用されている。こ
の従来のFe−Ni系合金は、シャドウマスク用材料として
従来から使用されてきた低炭素鋼に比べ、熱膨張率が著
しく小さい。従って、従来のFe−Ni系合金によってシャ
ドウマスクを作れば、シャドウマスクが電子ビームによ
り加熱されても、シャドウマスクの熱膨張による色ずれ
の問題は生じ難い。2. Description of the Related Art In recent years, with the high quality of color televisions,
As an alloy for a shadow mask that can cope with the problem of color misregistration, an Fe-Ni-based alloy containing 34 to 38 wt% of Ni (hereinafter referred to as "conventional Fe-Ni-based alloy") is used. This conventional Fe-Ni alloy has a significantly lower coefficient of thermal expansion than low carbon steel conventionally used as a shadow mask material. Therefore, if a shadow mask is made of a conventional Fe-Ni alloy, even if the shadow mask is heated by an electron beam, the problem of color shift due to thermal expansion of the shadow mask hardly occurs.
【0003】シャドウマスク用合金薄板は、通常、下記
工程によって、製造される。即ち連続鋳造法または造塊
法によって、合金塊を調製し、次いで、このように調製
された合金塊に、分塊圧延、熱間圧延および冷間圧延・
焼鈍を施して、合金薄板を製造するものである。[0003] An alloy sheet for a shadow mask is usually manufactured by the following steps. That is, an alloy ingot is prepared by a continuous casting method or an ingot-making method, and then, into the alloy ingot thus prepared, slab rolling, hot rolling, and cold rolling.
Annealing is performed to produce an alloy thin plate.
【0004】上述したように製造されたシャドウマスク
用合金薄板は、通常、下記工程によって、シャドウマス
クに加工される。即ちシャドウマスク用合金薄板に、フ
ォトエッチングによって、電子ビームの通過孔(以下、
単に「孔」という)を形成し(以下、エッチングによっ
て穿孔されたままのシャドウマスク用合金薄板を「フラ
ットマスク」という)、次いで、フラットマスクに焼鈍
を施し、次いで、焼鈍を施したフラットマスクを、ブラ
ウン管の形状に合うように曲面形状にプレス成形し、そ
の後に、これをシャドウマスクに組立て、そして、その
表面上に黒化処理を施すものである。[0004] The alloy sheet for a shadow mask manufactured as described above is usually processed into a shadow mask by the following steps. That is, a hole for passing an electron beam (hereinafter, referred to as a hole) is formed on a thin alloy plate for shadow mask by photoetching.
(Hereinafter simply referred to as “holes”) (hereinafter, the thin alloy plate for a shadow mask that has been perforated by etching is referred to as a “flat mask”), and then the flat mask is annealed, and then the annealed flat mask is removed. Press-molding into a curved shape so as to conform to the shape of a cathode ray tube, assembling it into a shadow mask, and then subjecting the surface to blackening treatment.
【0005】ところが、このような従来一般のFe−Ni系
合金をシャドウマスクに使用する場合には、カラーブラ
ウン管の外部の環境に存在する迷走の磁場により電子ビ
ームが偏倚し、所定の画素に当たらなくなることによる
“色ずれ”がしばしば発生し、画面品質上問題となって
おり、この問題に対して、次の先行技術が知られてい
る。即ち特開昭64-62421号公報は、穿孔マスク(フラッ
トマスク)を900〜1200℃で5分以上、場合によ
り還元性雰囲気にて焼鈍し、プレス成形を93.3℃で行
ない、次に、787.8℃、場合により弱酸化性雰囲気で
焼鈍することにより、直流の保磁力を1エルステッド以
下とし、上記した“色ずれ”の問題を解決しようとする
ものである。However, when such a conventional general Fe-Ni alloy is used for a shadow mask, an electron beam is deflected by a stray magnetic field existing in an environment outside a color cathode-ray tube, and when the electron beam hits a predetermined pixel. "Color misregistration" due to disappearance often occurs, which is a problem in screen quality, and the following prior art is known for this problem. That is, JP-A-64-62421 discloses that a perforated mask (flat mask) is annealed at 900 to 1200 ° C. for 5 minutes or more, optionally in a reducing atmosphere, press-formed at 93.3 ° C., By annealing at 787.8 ° C. and in some cases a weakly oxidizing atmosphere, the DC coercive force is reduced to 1 Oersted or less, and the above-mentioned problem of “color shift” is solved.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、前記し
た先行技術では、地磁気といった直流の迷走磁場に対し
ては効果が見られたが、実際の外部の環境では、50Hz
以上の周波数による交流での迷走磁場が多く存在し、こ
れらの迷走磁場に対しては効果を十分に発揮することが
できず、その結果として、電子ビームの偏倚が依然とし
て発生し、色ずれの問題が残っている。However, in the above-mentioned prior art, an effect was observed with respect to a DC stray magnetic field such as terrestrial magnetism, but in an actual external environment, it was 50 Hz.
There are many stray magnetic fields due to the alternating current at the above frequencies, and the effect cannot be sufficiently exerted on these stray magnetic fields. As a result, the electron beam is still deflected, and the color shift problem occurs. Remains.
【0007】[0007]
【課題を解決するための手段】本発明は、上記した実情
に鑑み、検討を重ねて創案されたものであり、磁気特性
が優れ、特に50Hz以上の交流の透磁率が優れ、このよ
うな周波数域の迷走磁場を十分に遮蔽(シールド)する
ことが可能な、シャドウマスク用Fe−Ni合金およびFe−
Ni−Co合金薄板およびその製造方法を提供することに成
功したものであって以下の如くである。DISCLOSURE OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and has been devised through repeated studies. The present invention has excellent magnetic characteristics, and particularly has excellent AC magnetic permeability of 50 Hz or more. Masks Fe-Ni alloy and Fe-, which can sufficiently shield the stray magnetic field in the region
The present invention has succeeded in providing a Ni-Co alloy thin plate and a method for producing the same, and is as follows.
【0008】(1)wt%で、Ni:34〜38%、Mn:0.
35%以下、Si:0.06%以下、Cr:0.05%以下、T
i:0.02%以下、Mo:0.05%以下、W:0.05%以
下、Nb:0.02%以下、V:0.05%以下、Cu:0.05
%以下であって、〔Ti〕+〔Cr〕+〔Al〕+〔Si〕+
〔Mo〕+〔W〕+〔Nb〕+〔V〕+〔Cu〕≦0.25%を
含有し、残部不可避不純物およびFeの成分組成からな
り、しかも、黒化処理後の合金板表面への{331}、
{210}、{211}の結晶面の集積度が下表を満足
し、かつビッカース硬度(Hv) が140以下であること
を特徴とする磁気特性に優れたシャドウマスク用Fe−Ni
合金薄板。(1) In wt%, Ni: 34-38%, Mn: 0.
35% or less, Si: 0.06% or less, Cr: 0.05% or less, T
i: 0.02% or less, Mo: 0.05% or less, W: 0.05% or less, Nb: 0.02% or less, V: 0.05% or less, Cu: 0.05
% Or less, and [Ti] + [Cr] + [Al] + [Si] +
Contains [Mo] + [W] + [Nb] + [V] + [Cu] ≤ 0.25%, and consists of the balance of unavoidable impurities and the composition of Fe, and to the surface of the alloy plate after blackening treatment {331},
Fe-Ni for a shadow mask excellent in magnetic properties, characterized in that the degree of integration of the {210} and {211} crystal planes satisfies the following table and the Vickers hardness (Hv) is 140 or less.
Alloy sheet.
【0009】[0009]
【表4】 [Table 4]
【0010】(2)wt%で、Ni:34〜38%、Mn:0.
35%以下、Si:0.06%以下、Cr:0.05%以下、T
i:0.02%以下、Mo:0.05%以下、W:0.05%以
下、Nb:0.02%以下、V:0.05%以下、Cu:0.05
%以下、Co:1.0%以下であって、〔Ti〕+〔Cr〕+
〔Al〕+〔Si〕+〔Mo〕+〔W〕+〔Nb〕+〔V〕+
〔Cu〕≦0.25%を含有し、残部不可避不純物およびFe
の成分組成からなり、しかも、黒化処理後の合金板表面
への{331}、{210}、{211}の結晶面の集
積度が下表を満足し、かつビッカース硬度(Hv) が14
0以下であることを特徴とする磁気特性に優れたシャド
ウマスク用Fe−Ni−Co合金薄板。(2) In wt%, Ni: 34-38%, Mn: 0.
35% or less, Si: 0.06% or less, Cr: 0.05% or less, T
i: 0.02% or less, Mo: 0.05% or less, W: 0.05% or less, Nb: 0.02% or less, V: 0.05% or less, Cu: 0.05
%, Co: 1.0% or less, [Ti] + [Cr] +
[Al] + [Si] + [Mo] + [W] + [Nb] + [V] +
Contains [Cu] ≦ 0.25%, the balance being unavoidable impurities and Fe
And the degree of integration of {331}, {210}, and {211} crystal planes on the alloy plate surface after the blackening treatment satisfies the following table, and the Vickers hardness (Hv) is 14
An Fe—Ni—Co alloy sheet for a shadow mask having excellent magnetic properties, wherein the thickness is 0 or less.
【0011】[0011]
【表5】 [Table 5]
【0012】(3)wt%で、Ni:30〜38%、Mn:0.
35%以下、Si:0.06%以下、Cr:0.05%以下、T
i:0.02%以下、Mo:0.05%以下、W:0.05%以
下、Nb:0.02%以下、V:0.05%以下、Cu:0.05
%以下、Co:1.0%超え6%までであって、〔Ti〕+
〔Cr〕+〔Al〕+〔Si〕+〔Mo〕+〔W〕+〔Nb〕+
〔V〕+〔Cu〕≦0.25%を含有し、残部不可避不純物
およびFeの成分組成からなり、しかも、黒化処理後の合
金板表面への{331}、{210}、{211}の結
晶面の集積度が下表を満足し、かつビッカース硬度(H
v) が140以下であることを特徴とする磁気特性に優
れたシャドウマスク用Fe−Ni−Co合金薄板。(3) 30% to 38% of Ni and 0.3% of Mn in wt%.
35% or less, Si: 0.06% or less, Cr: 0.05% or less, T
i: 0.02% or less, Mo: 0.05% or less, W: 0.05% or less, Nb: 0.02% or less, V: 0.05% or less, Cu: 0.05
%, Co: 1.0% to 6%, and [Ti] +
[Cr] + [Al] + [Si] + [Mo] + [W] + [Nb] +
[V] + [Cu] ≦ 0.25%, the balance being composed of inevitable impurities and the composition of Fe, and {331}, {210}, {211} on the alloy plate surface after the blackening treatment. The degree of crystal plane integration satisfies the table below, and the Vickers hardness (H
v) Fe-Ni-Co alloy sheet for a shadow mask having excellent magnetic properties, characterized by having a value of 140 or less.
【0013】[0013]
【表6】 [Table 6]
【0014】(4)前記(1)〜(3)項に記載の成分
を有する低熱膨張合金の熱延鋼帯を熱延板焼鈍して以降
冷間圧延−再結晶焼鈍−仕上冷間圧延−歪取り焼鈍を行
なった後、プレス成形前の焼鈍を施し、引き続くプレス
成形ののちに黒化処理を施す工程にて製造するに際し、
前記熱延板焼鈍温度(T0 ,℃)を810〜890℃、
前記プレス成形前の焼鈍温度(T1 ,℃)は720〜9
00℃、黒化処理温度(T2 ,℃)520〜600℃
で、かつ〔T2 〕≧−(4〔T1 〕/9)+920を満
たすことにより、黒化処理後の合金板表面への{33
1}、{210}、{211}の結晶面の集積度、およ
びビッカース硬度(Hv) が請求項1に記載した値に調整
することを特徴とする磁気特性に優れたシャドウマスク
用Fe−Ni合金薄板およびFe−Ni−Co合金薄板の製造方
法。(4) The hot-rolled steel strip of the low-thermal-expansion alloy having the components described in the above items (1) to (3) is subjected to hot-rolled sheet annealing, and thereafter cold-rolling-recrystallization annealing-finish cold-rolling- After performing the strain relief annealing, performing the annealing before press molding, when manufacturing in the step of performing a blackening treatment after the subsequent press molding,
The hot-rolled sheet annealing temperature (T 0 , ° C.) is 810-890 ° C.,
The annealing temperature (T 1 , ° C.) before the press forming is 720 to 9
00 ° C, blackening temperature (T 2 , ° C) 520-600 ° C
And [T 2 ] ≧ − (4 [T 1 ] / 9) +920 is satisfied, so that {33}
The Fe-Ni for a shadow mask having excellent magnetic properties, wherein the degree of integration of the crystal planes of {1}, {210}, and {211} and the Vickers hardness (Hv) are adjusted to the values described in claim 1. Method for producing alloy thin plate and Fe-Ni-Co alloy thin plate.
【0015】[0015]
【作用】上記したような本発明について更に説明する
と、本発明者等は、既述したような観点から、磁気特性
に優れたシャドウマスク用Fe−Ni合金薄板およびFe−Ni
−Co合金薄板を開発すべく、鋭意研究を重ねた結果、次
の知見を得た。即ち、本発明はシャドウマスク用Fe−Ni
合金薄板およびFe−Ni−Co合金薄板の化学成分組成、ビ
ッカース硬度、合金薄板表面への特定の結晶面の集積度
を所定の範囲内に調整することにより、所要の磁気特性
を得るものである。なお本発明でいう所要の磁気特性と
は、50Hz以上の周波数での透磁率のことであり、この
透磁率を高めることが本発明で意図するところである。
このような50Hz以上の透磁率の向上により、前記した
周波数域の迷走磁場の遮蔽(シールド)を十分に行なう
ことができる。The present invention as described above will be further described. From the viewpoint as described above, the present inventors have found that a Fe--Ni alloy thin plate for a shadow mask and a Fe--Ni alloy having excellent magnetic properties can be obtained.
-As a result of intensive research to develop a Co alloy thin plate, the following findings were obtained. That is, the present invention relates to Fe-Ni for shadow masks.
The required magnetic properties are obtained by adjusting the chemical composition of the alloy sheet and the Fe-Ni-Co alloy sheet, the Vickers hardness, and the degree of integration of a specific crystal plane on the alloy sheet surface within a predetermined range. . The required magnetic properties in the present invention are magnetic permeability at a frequency of 50 Hz or more, and it is intended in the present invention to increase the magnetic permeability.
By improving the magnetic permeability of 50 Hz or more, it is possible to sufficiently shield the stray magnetic field in the frequency range described above.
【0016】また、本発明者らは次の知見を得た。即
ち、本合金の製造工程において、熱延鋼帯を冷間圧延す
る前に所定温度で熱延板焼鈍を施し、更には、プレス成
形前の焼鈍温度および黒化処理温度を適正にすることに
より所定の黒化処理後のビッカース硬度、所定の合金薄
板表面への結晶面の集積度を得て、磁気特性を優れたも
のとすることができる。The present inventors have obtained the following findings. That is, in the production process of the present alloy, hot-rolled sheet annealing is performed at a predetermined temperature before cold-rolling the hot-rolled steel strip, and furthermore, by appropriately setting the annealing temperature and the blackening treatment temperature before press forming. By obtaining the Vickers hardness after the predetermined blackening treatment and the degree of integration of the crystal plane on the surface of the predetermined alloy thin plate, the magnetic properties can be improved.
【0017】この発明は、上述したような知見に基づい
てなされたものであって、本発明のシャドウマスク用Fe
−Ni合金薄板およびFe−Ni−Co合金薄板に関する化学成
分、ビッカース硬度、および合金薄板表面への結晶面の
集積度の限定理由は以下の如くである。The present invention has been made on the basis of the above-described findings, and is based on the Fe for shadow mask of the present invention.
Reasons for limiting the chemical composition, Vickers hardness, and the degree of integration of crystal planes on the alloy sheet surface for the -Ni alloy sheet and Fe-Ni-Co alloy sheet are as follows.
【0018】(1)ニッケル:色ずれの発生を防止する
ために、シャドウマスク用Fe−Ni合金薄板に要求され
る、30〜100℃の温度域における平均熱膨張係数の
上限値は、2.0×10-6/℃である。前記熱膨張係数
は、前記合金薄板のニッケル含有量に依存する。そし
て、上述した平均熱膨張係数の条件を満たすニッケル含
有量の範囲は、34〜38wt%の範囲である。従って、
ニッケル含有量は、34〜38wt%の範囲内に限定すべ
きである。なお、このようなNi含有量の範囲内でも、平
均熱膨張係数を低下させうる好ましいNi量は35〜37
%であり、更にはこの平均熱膨張係数をより低下させう
る更に好ましいNi量は35.5〜36.5%である。(1) Nickel: In order to prevent the occurrence of color shift, the upper limit of the average thermal expansion coefficient in the temperature range of 30 to 100 ° C. required for the Fe—Ni alloy thin plate for the shadow mask is 2. 0 × 10 −6 / ° C. The coefficient of thermal expansion depends on the nickel content of the alloy sheet. The range of the nickel content satisfying the above-mentioned condition of the average thermal expansion coefficient is in the range of 34 to 38 wt%. Therefore,
Nickel content should be limited to the range of 34-38 wt%. In addition, even in such a range of the Ni content, a preferable Ni amount that can reduce the average thermal expansion coefficient is 35 to 37.
%, And a more preferable Ni content that can further reduce the average coefficient of thermal expansion is 35.5 to 36.5%.
【0019】なお、Coを0.001〜1.0%含有する場合
でも、上記した平均熱膨脹係数の上限値を満足するNi量
は34〜38%であり、平均熱膨脹係数を低下させる好
ましいNi量は35〜37%である。また、1.0%超え6
%までのコバルトを含有するFe−Ni−Co合金薄板の場
合、上述した平均熱膨脹係数の条件を満たすニッケル含
有量の範囲は30〜38%であり、また、Ni量を30〜
33%、Co量を3〜6%にすることにより、平均熱膨脹
係数は更に低く優れたものとなる。Even when Co is contained in an amount of 0.001 to 1.0%, the amount of Ni satisfying the upper limit of the average thermal expansion coefficient is 34 to 38%, and the preferable amount of Ni for lowering the average thermal expansion coefficient is Is 35-37%. In addition, more than 1.0% 6
% Of the Fe-Ni-Co alloy thin plate containing up to cobalt in the range of 30 to 38%, which satisfies the above-mentioned condition of the average thermal expansion coefficient, and the Ni content is 30 to 38%.
By setting the amount of Co to 33% and the amount of Co to 3 to 6%, the average coefficient of thermal expansion becomes lower and more excellent.
【0020】(2)マンガン:Mnは、本合金中には、熱
間加工性を向上させるが、含有量が多くなると、50Hz
以上の周波数での透磁率が低下する。即ち、Mn量が0.3
5%を越えると、上記した磁気特性の劣化が著しくなる
ので0.35%を上限とした。なお、このMn量を低減する
ことにより更に上記した磁気特性を向上しうる。(2) Manganese: Mn improves hot workability in the present alloy.
The magnetic permeability at the above frequencies decreases. That is, the Mn content is 0.3
If it exceeds 5%, the above-mentioned deterioration of magnetic properties becomes remarkable, so 0.35% was made the upper limit. Note that the magnetic properties described above can be further improved by reducing the amount of Mn.
【0021】(3)アルミニウム、シリコン、クロム、
チタン、モリブデン、タングステン、ニオブ、バナジウ
ム、銅:Al、Si、Cr、Ti、Mo、W、Nb、V、Cuは、本合
金中に不可避的に混入する不純物の1つである。これら
の元素の含有量が多くなると、50Hz以上の周波数での
透磁率が低下する。即ち、上記した元素が、下記の特定
値を超えると磁気特性の劣化が著しくなる。Al:0.02
0%、Si:0.05%、Cr:0.05%、Ti:0.02%、M
o:0.05%、W:0.05%、Nb:0.02%、V:0.0
5%、Cu:0.05%。従って、Al:0.020%以下、S
i:0.06%以下、Cr:0.05%以下、Ti:0.02%以
下、Mo:0.05%以下、W:0.05%、Nb:0.02%以
下、V:0.05%以下、Cu:0.05%以下とそれぞれ定
めた。(3) Aluminum, silicon, chromium,
Titanium, molybdenum, tungsten, niobium, vanadium, copper: Al, Si, Cr, Ti, Mo, W, Nb, V, and Cu are one of the impurities unavoidably mixed into the present alloy. When the content of these elements increases, the magnetic permeability at a frequency of 50 Hz or more decreases. That is, when the above-mentioned elements exceed the following specific values, the magnetic properties are significantly deteriorated. Al: 0.02
0%, Si: 0.05%, Cr: 0.05%, Ti: 0.02%, M
o: 0.05%, W: 0.05%, Nb: 0.02%, V: 0.0
5%, Cu: 0.05%. Therefore, Al: 0.020% or less, S
i: 0.06% or less, Cr: 0.05% or less, Ti: 0.02% or less, Mo: 0.05% or less, W: 0.05%, Nb: 0.02% or less, V: 0 0.05% or less and Cu: 0.05% or less.
【0022】更に、本発明で意図する磁気特性を得るに
は、上記した元素の総和の量の規定も重要である。即
ち、図1はTi、Cr、Al、Si、Mo、W、Nb、Vの各量が本
発明規定範囲内で、ビッカース硬度(Hv) も本発明規定
範囲内であり、{311}、{210}、{211}結
晶面の集積度がそれぞれ本発明規定範囲内の合金におけ
る〔Ti〕+〔Cr〕+〔Al〕+〔Si〕+〔Mo〕+〔W〕+
〔Nb〕+〔V〕+〔Cu〕量と透磁率の関係を示すもので
ある。透磁率の測定方法は後述する実施例1に示す如く
であり、製法については図1中に示す通りであるが、
〔Ti〕+〔Cr〕+〔Al〕+〔Si〕+〔Mo〕+〔W〕+
〔Nb〕+〔V〕+〔Cu〕量が0.25%を越えると、透磁
率の劣化が著しくなるので、0.25%を上限に定めた。
なお、これらの元素の総量が本発明範囲内であっても、
その総量を低減することにより、透磁率を更に向上する
ことができる。Furthermore, in order to obtain the magnetic properties intended in the present invention, it is important to define the total amount of the above-mentioned elements. That is, FIG. 1 shows that the amounts of Ti, Cr, Al, Si, Mo, W, Nb and V are within the range specified by the present invention, and the Vickers hardness (Hv) is also within the range specified by the present invention. [Ti] + [Cr] + [Al] + [Si] + [Mo] + [W] + in alloys having a degree of integration of the crystal planes of {210} and {211} respectively within the range specified in the present invention
It shows the relationship between the amount of [Nb] + [V] + [Cu] and the magnetic permeability. The method of measuring the magnetic permeability is as shown in Example 1 described later, and the manufacturing method is as shown in FIG.
[Ti] + [Cr] + [Al] + [Si] + [Mo] + [W] +
If the amount of [Nb] + [V] + [Cu] exceeds 0.25%, the magnetic permeability deteriorates remarkably, so the upper limit was set to 0.25%.
In addition, even if the total amount of these elements is within the scope of the present invention,
By reducing the total amount, the magnetic permeability can be further improved.
【0023】なお、本発明によるシャドウマスク用Fe−
NiおよびFe−Ni−Co合金は、上記したようにFe−Niおよ
びFe−Ni−Coの基本組成に、特定量のMn、Al、Si、Cr、
Ti、Mo、W、Nb、V、Cuとし、かつ後述するように、黒
化処理後の合金板表面への{331}、{210}、
{211}の結晶面の集積度を特定値以下としかつビッ
カース硬度(Hv) を140以下とすることを特徴として
いるが、前記組成の他に、C:0.0001〜0.0050
%、N:0.0001〜0.0020%、S:0.0001〜
0.0020%、P:0.0001〜0.0050%、O:0.
0001〜0.0030%以下であることが好ましい。It should be noted that the Fe—
Ni and Fe-Ni-Co alloy, as described above, the basic composition of Fe-Ni and Fe-Ni-Co, a specific amount of Mn, Al, Si, Cr,
Ti, Mo, W, Nb, V, and Cu, and as described later, {331}, {210},
It is characterized in that the degree of integration of the {211} crystal plane is not more than a specific value and the Vickers hardness (Hv) is not more than 140. In addition to the above composition, C: 0.0001 to 0.0050
%, N: 0.0001-0.0020%, S: 0.0001-
0.0020%, P: 0.0001 to 0.0050%, O: 0.000%
It is preferably 0001 to 0.0030% or less.
【0024】本発明において優れた磁気特性を得るため
には、上記した成分規定に加えて黒化処理後の合金板表
面への特定の結晶面の集積度の制御およびビッカース硬
さの制御が重要である。In order to obtain excellent magnetic properties in the present invention, it is important to control the degree of integration of specific crystal planes on the surface of the alloy plate after the blackening treatment and the control of Vickers hardness in addition to the above-mentioned components. It is.
【0025】すなわち、黒化処理後の合金板表面への
{331}、{210}、{211}の各結晶面の集積
度(以下、単に、{331}結晶面の集積度、{21
0}結晶面の集積度、{211}結晶面の集積度と呼
ぶ)が、それぞれ35%、16%、20%を超えると、
上記した成分規定を満たした場合でも、所要の磁気特性
が得られない。That is, the degree of integration of {331}, {210}, and {211} crystal planes on the alloy plate surface after the blackening treatment (hereinafter simply referred to as the degree of integration of the {331} crystal plane, {21}
0% crystal plane and {211} crystal plane) exceed 35%, 16% and 20%, respectively.
Even when the above-mentioned component requirements are satisfied, required magnetic properties cannot be obtained.
【0026】以上のような技術的事情より、{331}
結晶面の集積度を35%以下、{210}結晶面の集積
度を16%以下、{211}結晶面の集積度を20%以
下とそれぞれ定めた。From the above technical circumstances, {331}
The degree of integration of the crystal plane is set to 35% or less, the degree of integration of the {210} crystal plane is set to 16% or less, and the degree of integration of the {211} crystal plane is set to 20% or less.
【0027】本合金においては、X線回折により、(1
11)、(200)、(220)、(311)、(33
1)、(420)および(422)の各回折面のX線回
折強度が得られ、これらにより結晶方位の集積度を測定
することができる。すなわち{331}結晶面の集積度
は(331)回折面の相対X線強度比を(111)、
(200)、(220)、(311)、(331)、
(420)および(422)の各回折面の相対X線強度
比の和で割ることにより求めた。In the present alloy, (1) was obtained by X-ray diffraction.
11), (200), (220), (311), (33)
The X-ray diffraction intensities of the diffraction planes 1), (420) and (422) are obtained, and the degree of integration of the crystal orientation can be measured based on these. That is, the degree of integration of the {331} crystal plane is (331) and the relative X-ray intensity ratio of the diffraction plane is (111).
(200), (220), (311), (331),
It was obtained by dividing by the sum of the relative X-ray intensity ratios of the diffraction planes of (420) and (422).
【0028】ここで相対X線回折強度比とは各回折面で
測定されたX線回折強度をその回折面の理論X線強度で
割ったものである。たとえば(111)の回折面の相対
X線回折強度比は(111)回折面のX線回折強度を
(111)回折面のX線回折理論強度で割ったものであ
る。また{210}、{211}の各結晶面の集積度は
それぞれこの結晶面と方位的に同じ(420)、(42
2)の回折面の相対X線回折強度比を前記した(11
1)から(422)までの7個の回折面の相対X線回折
強度比の和で割ることにより求めている。Here, the relative X-ray diffraction intensity ratio is obtained by dividing the X-ray diffraction intensity measured on each diffraction surface by the theoretical X-ray intensity of the diffraction surface. For example, the relative X-ray diffraction intensity ratio of the (111) diffraction surface is obtained by dividing the X-ray diffraction intensity of the (111) diffraction surface by the theoretical X-ray diffraction intensity of the (111) diffraction surface. Also, the degree of integration of each of the crystal planes {210} and {211} is (420), (42)
The relative X-ray diffraction intensity ratio of the diffraction surface of (2) is as described above (11).
It is obtained by dividing by the sum of the relative X-ray diffraction intensity ratios of the seven diffraction planes from 1) to (422).
【0029】本発明で意図する所要の磁気特性を得るた
めには、上記した、成分規定、結晶方位の制御に加え
て、ビッカース硬度の制御が重要である。即ち、図2
は、成分、{331}、{210}、{211}結晶面
の集積度が本発明規定内の合金板の透磁率と合金板のビ
ッカース硬度の関係を示したものである。ビッカース硬
度(Hv) が140を越えると、透磁率が低下し、本発明
で意図する所要の磁気特性が得られない。以上より本発
明においては黒化処理後のビッカース硬度(Hv) を14
0以下と定めた。なおHvが140以下の場合でも、Hvを
より低くすることにより、合金板の透磁率をより高いレ
ベルとすることができる。In order to obtain the required magnetic properties intended in the present invention, it is important to control the Vickers hardness in addition to the above-described component definition and crystal orientation control. That is, FIG.
Shows the relationship between the magnetic permeability of the alloy plate and the Vickers hardness of the alloy plate, in which the degree of integration of the components, {331}, {210}, and {211} crystal planes, is within the range of the present invention. If the Vickers hardness (Hv) exceeds 140, the magnetic permeability decreases and the required magnetic properties intended in the present invention cannot be obtained. As described above, in the present invention, the Vickers hardness (Hv) after the blackening treatment is 14
It was determined to be 0 or less. Even when Hv is 140 or less, the magnetic permeability of the alloy plate can be set to a higher level by lowering Hv.
【0030】以上説明したように、本発明合金のMn、A
l、Si、Cr、Ti、Mo、W、Nb、V、Cu、〔Ti〕+〔Cr〕
+〔Al〕+〔Si〕+〔Mo〕+〔W〕+〔Nb〕+〔V〕+
〔Cu〕の規定、黒化処理後の{331}、{210}、
{211}結晶面の集積度の規定およびビッカース硬度
の規定により本発明で意図する磁気特性を優れたものと
することができる。As described above, Mn, A of the alloy of the present invention
l, Si, Cr, Ti, Mo, W, Nb, V, Cu, [Ti] + [Cr]
+ [Al] + [Si] + [Mo] + [W] + [Nb] + [V] +
[Cu], {331}, {210},
By defining the degree of integration of the {211} crystal plane and defining the Vickers hardness, the magnetic properties intended in the present invention can be improved.
【0031】黒化処理後の{331}、{210}、
{211}結晶面の集積度をそれぞれ35%以下、16
%以下、20%以下とするためには、合金薄板の製造に
かかる凝固から熱間での加工、以降の冷間圧延・焼鈍工
程で極力、{331}、{210}、{211}結晶面
を集積させない製造条件を採ることにより達成される。
例えば、本合金が、造塊または連続鋳造スラブを分塊圧
延し、熱間圧延することにより得た熱延鋼帯により製造
する場合は熱延鋼帯を素材として、以降熱延板焼鈍−冷
間圧延−再結晶焼鈍−仕上冷間圧延−歪取り焼鈍を行
い、その後プレス成形前の焼鈍を施し、プレス成形の後
に黒化処理を施す工程で製造するに際し、先ず、熱間圧
延後で適正な熱延板焼鈍を施すことが、{331}、
{210}、{211}結晶面を集積させないためには
有効であり、この際熱延板焼鈍の温度は、810〜89
0℃の範囲内で適切な温度を選択することにより{33
1}、{210}、{211}結晶面の集積度をそれぞ
れ本発明規定値以下とすることができる。以上より、
{331}、{210}、{211}結晶面の集積度を
本発明範囲内とするための熱延板焼鈍条件として810
〜890℃を定めた。{331}, {210},
The degree of integration of {211} crystal planes is 35% or less and 16
% And 20% or less, in order to minimize the {331}, {210}, and {211} crystal planes in the subsequent cold rolling and annealing processes from solidification to hot working in the production of alloy thin plates. Is achieved by adopting manufacturing conditions that do not accumulate.
For example, when the present alloy is manufactured from a hot-rolled steel strip obtained by subjecting an ingot or a continuously cast slab to slab-rolling and hot rolling, the hot-rolled steel strip is used as a material, and thereafter, hot-rolled sheet annealing-cooling is performed. Cold rolling-Recrystallization annealing-Finish cold rolling-Strain relief annealing, then annealing before press forming, When manufacturing in the step of performing blackening treatment after press forming, first, appropriate after hot rolling Hot rolled sheet annealing, {331},
This is effective for preventing the {210} and {211} crystal planes from being accumulated. At this time, the temperature of the hot-rolled sheet annealing is 810-89.
By selecting an appropriate temperature within the range of 0 ° C.,
The degree of integration of the {1}, {210}, and {211} crystal planes can each be equal to or less than the specified value of the present invention. From the above,
The hot rolled sheet annealing conditions for keeping the degree of integration of the {331}, {210}, and {211} crystal planes within the range of the present invention are 810.
8890 ° C. was determined.
【0032】なお本発明でのこのような熱延板焼鈍は本
合金の熱延鋼帯が熱延板焼鈍前で充分に再結晶している
ときに発揮されるものである。また本発明で意図する
{331}、{210}、{211}結晶面の集積度を
得るには本合金を製造するに当って分塊圧延後のスラブ
均一化熱処理は好ましくない。たとえば上記の均一化熱
処理が1200℃以上、10時間以上の条件で行われる
場合、{331}、{210}、{211}、結晶面の
集積度が本発明の規定値を超えてしまうので、このよう
な処理は避けねばならない。In the present invention, such hot-rolled sheet annealing is performed when the hot-rolled steel strip of the present alloy is sufficiently recrystallized before hot-rolled sheet annealing. In order to obtain the degree of integration of {331}, {210}, and {211} crystal planes, which is intended in the present invention, the slab homogenizing heat treatment after slab rolling is not preferable in producing the present alloy. For example, when the above-mentioned homogenizing heat treatment is performed under the condition of 1200 ° C. or more and 10 hours or more, {331}, {210}, and {211}, the degree of integration of crystal planes exceeds the specified value of the present invention. Such processing must be avoided.
【0033】また、上記した熱延鋼帯により製造する場
合は、前記の一連の工程の中でプレス前焼鈍条件と黒化
処理条件の適正化も{331}、{210}、{21
1}結晶面の集積度をそれぞれ本発明規定値以下とし、
更には、黒化処理後のビッカース硬度を本発明規定内と
するために必要である。In the case of manufacturing from the above-mentioned hot-rolled steel strip, in the above-mentioned series of steps, the pre-press annealing conditions and the blackening conditions are also optimized in {331}, {210}, and {21}.
1} The degree of integration of crystal planes is set to the value specified in the present invention or less,
Further, it is necessary to keep the Vickers hardness after the blackening treatment within the range specified in the present invention.
【0034】図3は、本発明による合金の熱延鋼帯を該
図の上部に示したような製法によって作製した合金板の
透磁率を、プレス前焼鈍温度(T1 ,℃)および黒化処
理温度(T2 ,℃)を変化させて調査検討した結果を示
すものである。即ちこの図3より、T1 :720〜90
0℃、T2 :520〜600℃で、かつ〔T2 〕≧−
(4〔T1 〕/9)+920とすることにより、{33
1}、{210}、{211}結晶面の集積度がそれぞ
れ35%以下、16%以下、20%以下で、ビッカース
硬度(Hv) も140以下で50Hzでの透磁率が1000
以上と所要の磁気特性が得られている。FIG. 3 shows the magnetic permeability of an alloy sheet prepared by manufacturing a hot-rolled steel strip of the alloy according to the present invention as shown at the top of the figure, the annealing temperature before press (T 1 , ° C.) and the blackening. It shows the results of investigations and examinations by changing the processing temperature (T 2 , ° C.). That is, from FIG. 3, T 1 : 720 to 90
0 ° C., T 2 : 520 to 600 ° C., and [T 2 ] ≧ −
By setting (4 [T 1 ] / 9) +920, it becomes 33
The degree of integration of 1}, {210}, and {211} crystal planes is 35% or less, 16% or less, and 20% or less, the Vickers hardness (Hv) is 140 or less, and the magnetic permeability at 50 Hz is 1000.
As described above, required magnetic characteristics are obtained.
【0035】一方、T1 が900℃を超える場合、{3
31}、{210}、{211}結晶面の集積度のうち
1つ以上が本発明規定を超え、透磁率が本発明で意図す
るレベルを下まわる。また、T1 が720℃未満かつま
たは〔T2 〕<−(4〔T1〕/9)+920の場合
は、ビッカース硬度(Hv) が140を超え、透磁率が本
発明で意図するレベルを下まわる。更にはT2 が600
℃を超える場合、黒化膜の密着性が劣化する。On the other hand, when T 1 exceeds 900 ° C.,
One or more of the degree of integration of the {31}, {210}, and {211} crystal planes exceeds the definition of the present invention, and the magnetic permeability falls below the level intended in the present invention. When T 1 is less than 720 ° C. and / or [T 2 ] <− (4 [T 1 ] / 9) +920, the Vickers hardness (Hv) exceeds 140, and the magnetic permeability falls below the level intended in the present invention. Falls below. Furthermore, T 2 is 600
When the temperature exceeds ℃, the adhesion of the blackened film is deteriorated.
【0036】以上のような検討により、黒化処理後の
{331}、{210}、{211}結晶面の集積度を
それぞれ35%以下、16%以下、20%以下としかつ
ビッカース硬度(Hv) を140以下とし、所要の磁気特
性を優れたものとする条件として、T1 :720〜90
0℃、T2 :520〜600℃、〔T2 〕≧−(4〔T
1 〕/9)+920を定めた。なお黒化処理時間は2mi
n 以上、10min 未満であれば、本発明で意図する効果
は、上記したT1 ,T2 の本発明範囲内制御のもとで達
成される。プレス前焼鈍時間は20min 以上60min 未
満であれば本発明で意図する効果は上記したT1 ,T2
の本発明範囲内への制御の下で達成される。According to the above study, the degree of integration of the {331}, {210}, and {211} crystal planes after the blackening treatment is 35% or less, 16% or less, and 20% or less, respectively, and the Vickers hardness (Hv ) Is set to 140 or less, and T 1 : 720 to 90
0 ° C., T 2 : 520 to 600 ° C., [T 2 ] ≧ − (4 [T
1 ] / 9) +920. The blackening time is 2mi
When the value is n or more and less than 10 minutes, the effects intended in the present invention can be achieved under the above-described control of T 1 and T 2 within the range of the present invention. If the pre-press annealing time is not less than 20 min and less than 60 min, the effects intended in the present invention are the above-mentioned T 1 , T 2
Under control within the scope of the present invention.
【0037】なお、黒化処理後の本合金薄板で{33
1}、{210}、{211}結晶面の集積度を本発明
規定内とする方法は、上記した以外に食冷凝固法の採
用、熱間加工での再結晶のコントロールによる集合組織
制御等がある。また、黒化処理後のビッカース硬度を本
発明規定内とする方法も上記した以外に冷間圧延条件、
焼鈍条件を適正に組み合わせることによっても達成しう
る。The alloy thin plate after the blackening treatment was # 33
In addition to the methods described above, the method of controlling the degree of integration of 1}, {210}, and {211} crystal planes within the range of the present invention employs a food-cooling solidification method, texture control by controlling recrystallization in hot working, and the like. There is. In addition, the method of setting the Vickers hardness after the blackening treatment within the range of the present invention also includes the cold rolling conditions other than those described above,
It can also be achieved by properly combining the annealing conditions.
【0038】上記したように本発明では、磁気特性の向
上が主な目的であるが、黒化処理時の黒化膜の密着性を
優れたものとすることも、本発明における構成要件の1
つである。また上記した図3は、50Hzでの透磁率につ
いてのものであるが、それを超える周波数域での透磁率
についてもT1 ,T2 が上記したような本発明規定条件
内であれば、優れたレベルを示す。As described above, the main object of the present invention is to improve the magnetic properties. However, to improve the adhesion of the blackened film during the blackening process, one of the constituent requirements of the present invention is to improve the adhesion.
One. FIG. 3 described above shows the magnetic permeability at 50 Hz. However, the magnetic permeability in a frequency range exceeding this is also excellent if T 1 and T 2 are within the above-described conditions of the present invention as described above. Level.
【0039】更に、本発明におけるプレス成形前の焼鈍
は、フォトエッチングの前に実施されてもよい。この場
合、プレス成形前の焼鈍条件が本発明規定内であれば、
所要のフォトエッチングの品質は確保しうる。Further, the annealing before press molding in the present invention may be performed before the photoetching. In this case, if the annealing conditions before press forming are within the provisions of the present invention,
The required photo-etching quality can be ensured.
【0040】上記した本発明を具体的実施例によって、
更に詳しく説明すると、以下の如くである。 〔実施例1〕取鍋精錬によって、次の表2〜表4に示す
化学成分を有するNo.1〜No.26 からなる鋼塊をそれぞれ
調整した。なお、いずれの合金のH量は1.0ppm 以下で
あった。The present invention described above will now be described by way of specific examples.
This will be described in more detail as follows. Example 1 Ingots No. 1 to No. 26 having the chemical components shown in the following Tables 2 to 4 were prepared by ladle refining. The H content of each alloy was 1.0 ppm or less.
【0041】[0041]
【表7】 [Table 7]
【0042】[0042]
【表8】 [Table 8]
【0043】[0043]
【表9】 [Table 9]
【0044】上記のようにして得られたインゴットの各
々を手入れ後、分塊圧延、表面疵取り、熱間圧延(熱延
加熱は1100℃×3時間)、疵取りして得られた熱延
コイルを用いて次の表5に示す条件にて、熱延板焼鈍を
行なった。以降、冷延−焼鈍−仕上げ冷間圧延−歪取り
焼鈍を行ない、板厚0.25mmの合金板を得た(合金No.1
〜26はそれぞれ材料No.1〜26と以下称する) 。なお、こ
れらの合金は熱間圧延後で十分再結晶していた。After each of the ingots obtained as described above was groomed, it was subjected to slab rolling, surface flaw removal, hot rolling (hot rolling at 1100 ° C. × 3 hours), and hot rolling obtained by flaw removal. Hot rolled sheet annealing was performed using the coil under the conditions shown in Table 5 below. Thereafter, cold rolling-annealing-finish cold rolling-strain relief annealing was performed to obtain an alloy plate having a thickness of 0.25 mm (alloy No. 1).
To 26 are hereinafter referred to as material Nos. 1 to 26, respectively). Note that these alloys were sufficiently recrystallized after hot rolling.
【0045】[0045]
【表10】 [Table 10]
【0046】これらの材料を、エッチングによりフラッ
トマスクにした後、このフラットマスクを860℃×2
0min にプレス成形前の焼鈍を行ないプレス成形のの
ち、600℃×2分の条件にて黒化処理を行なった。黒
化処理後の合金板の表面の{331}、{210}、
{211}結晶面の集積度は前記したX線回折による方
法により求めた結果を前記表4に示した。また、黒化膜
の密着性は黒化膜の上にテープをはり、180゜密着曲
げをしてから、テープを剥がし、テープ上への黒化膜の
付着状況により評価し、テープへの黒化膜の付着がない
ものを黒化膜の密着性が良好、テープへの黒化膜の付着
があるものを黒化膜の密着性が不良とそれぞれ定めた。After these materials are converted into flat masks by etching, the flat masks are heated at 860 ° C. × 2.
At 0 min, annealing before press molding was performed, and after press molding, blackening treatment was performed at 600 ° C. × 2 minutes. {331}, {210},
Table 4 shows the result of the degree of integration of the {211} crystal plane obtained by the method based on the X-ray diffraction described above. Also, the adhesion of the blackened film was measured by placing a tape on the blackened film, bending it 180 °, peeling off the tape, and evaluating the adhesion of the blackened film on the tape. Those having no blackened film were determined to have good adhesion of the blackened film, and those having the blackened film adhered to the tape were determined to have poor adhesion of the blackened film.
【0047】この実施例における材料No.1〜No.26 の各
材の黒化膜の密着性はいずれも良好であった。本発明で
は、このように黒化膜の密着性が優れていることが重要
な構成要件の1つである。The adhesion of the blackened film of each of the materials No. 1 to No. 26 in this example was all good. In the present invention, such excellent adhesion of the blackened film is one of the important components.
【0048】なお、前記した、プレス成形前の焼鈍、引
き続くプレス成形、および黒化処理を経た合金板(材料
No.1〜No.26)より、リング試験片を加工し、50Hz、0.
3KHz、3KHzおよび30KHzでの交流透磁率も調べ
た。印加した磁界は5mエルステッドである。またこれ
らの合金板についての黒化処理後のビッカース硬度(H
v) は合金板の断面で測定し、その結果は併せて前記表
10に示した。It should be noted that the alloy plate (material) which has been subjected to the annealing before press forming, the subsequent press forming, and the blackening treatment described above.
From No. 1 to No. 26), the ring test piece was processed, and 50Hz, 0.
The AC permeability at 3 KHz, 3 KHz and 30 KHz was also examined. The applied magnetic field is 5 m Oersted. In addition, Vickers hardness (H
v) was measured on the cross section of the alloy plate, and the results are also shown in Table 10 above.
【0049】前述した表7〜表9に示した結果から明ら
かなように、本発明範囲内の成分組成、ビッカース硬度
(Hv) を有し、かつ本発明の範囲内の{331}、{2
10}、{211}結晶面の集積度を有する材料No.16
〜No.26 の50Hz以上の透磁率は後述する比較例に比べ
て高く、優れたレベルを示している。また、材料No.17
、No.18 、No.20 、No.23 、No.24 、No.25 、No.26
は本発明例の中でもHvがより好ましいレベルまで低減さ
れたものであり、No.17 、No.18 、No.20 、No.23 、N
o.24 の50Hz以上の透磁率は、より高い値を示してい
る。更には、これらの材料の中でも、材料No.20 は、M
n、Al、Si、Cr、Ti、Mo、W、Nb、V、Cu、および〔T
i〕+〔Cr〕+〔Al〕+〔Si〕+〔Mo〕+〔W〕+〔N
b〕+〔V〕+〔Cu〕量がより好ましいレベルまで低減
されたものであり、50Hz以上の透磁率はより高い値を
示している。Coを含有する材料No.25 、No.26 も同様に
優れた特性を示している。As is evident from the results shown in Tables 7 to 9, the component compositions and Vickers hardness (Hv) within the range of the present invention, and {331} and {2} within the range of the present invention.
Material No. 16 having a degree of integration of {10} and {211} crystal planes
The magnetic permeability of No. 26 to No. 26 at 50 Hz or higher is higher than that of a comparative example described later, indicating an excellent level. Material No. 17
, No.18, No.20, No.23, No.24, No.25, No.26
In the examples of the present invention, Hv was reduced to a more preferable level, and No. 17, No. 18, No. 20, No. 23, N
The magnetic permeability above 50 Hz of o.24 shows a higher value. Further, among these materials, Material No. 20 is M
n, Al, Si, Cr, Ti, Mo, W, Nb, V, Cu, and [T
i] + [Cr] + [Al] + [Si] + [Mo] + [W] + [N
b] + [V] + [Cu] amount was reduced to a more preferable level, and the magnetic permeability above 50 Hz shows a higher value. Materials No. 25 and No. 26 containing Co also show excellent characteristics.
【0050】これに対して、材料No.1〜No.11 はそれぞ
れ、本発明の範囲外の、Mn、Al、Si、Cr、Ti、Mo、W、
Nb、V、Cu、〔Ti〕+〔Cr〕+〔Al〕+〔Si〕+〔Mo〕
+〔W〕+〔Nb〕+〔V〕+〔Cu〕を含有しているもの
でありいずれも50Hz以上の透磁率は本発明例に比べて
劣っている。On the other hand, materials No. 1 to No. 11 are respectively Mn, Al, Si, Cr, Ti, Mo, W,
Nb, V, Cu, [Ti] + [Cr] + [Al] + [Si] + [Mo]
+ [W] + [Nb] + [V] + [Cu], and the permeability at 50 Hz or more is inferior to that of the examples of the present invention.
【0051】また、材料No.12 〜No.15 はそれぞれ、本
発明の範囲外のビッカース硬度(Hv) 、{331}結晶
面の集積度、{210}結晶面の集積度、{211}結
晶面の集積度のものであり、いずれも50Hz以上の透磁
率は本発明例に比べて劣っている。Materials No. 12 to No. 15 have Vickers hardness (Hv), {331} crystal plane density, {210} crystal plane density, and {211} crystal, respectively, which are outside the scope of the present invention. In each case, the magnetic permeability above 50 Hz is inferior to that of the present invention.
【0052】上記したところから明らかなように、本発
明範囲内の成分組成および本発明範囲内におけるビッカ
ース硬度(Hv) 、{331}、{210}、{211}
結晶面の集積度とすることにより、50Hz以上の透磁率
が優れたレベルを有するシャドウマスク用Fe−Ni合金薄
板およびFe−Ni─Co合金薄板が得られることがわかる。As is clear from the above description, the component composition within the scope of the present invention and the Vickers hardness (Hv) within the scope of the present invention, {331}, {210}, {211}.
It can be seen that by setting the degree of integration of the crystal planes, an Fe—Ni alloy sheet and an Fe—Ni─Co alloy sheet for a shadow mask having an excellent level of magnetic permeability of 50 Hz or more can be obtained.
【0053】〔実施例2〕前記した実施例1で用いた合
金No.16 〜No.22 、25、26の熱延鋼帯を用いて、以降、
熱延板焼鈍を次の表6に示す条件にて実施したものにつ
いて、以降、冷間圧延−再結晶焼鈍−仕上げ冷間圧延−
歪取り焼鈍を行ない、板厚0.25mmの合金板を得た。Example 2 Using the hot-rolled steel strips of alloys No. 16 to No. 22, 25, and 26 used in Example 1 described above,
After the hot-rolled sheet annealing was performed under the conditions shown in Table 6 below, cold rolling-recrystallization annealing-finish cold rolling-
A strain relief annealing was performed to obtain an alloy plate having a thickness of 0.25 mm.
【0054】[0054]
【表11】 [Table 11]
【0055】上記した表6に示すような各合金板に、次
の表7に示すような条件によってプレス成形前の焼鈍を
行い引続くエッチングによりフラットマスクにした後、
このフラットマスクをプレス成形し、黒化処理を施し表
7,表8に示すような材料No.25 〜43を得た。又これら
の材料を用い実施例1におけると同じ方法で黒化膜の密
着性を調査した。更にこの黒化膜の密着性と共に黒化処
理後の透磁率およびビッカース硬度(Hv) も前記実施例
1と同じ方法で調べ、それらの結果を表8において示し
た。Each alloy plate as shown in Table 6 was annealed before press forming under the conditions as shown in Table 7 to form a flat mask by subsequent etching.
This flat mask was press-molded and subjected to a blackening treatment to obtain material Nos. 25 to 43 as shown in Tables 7 and 8. Further, using these materials, the adhesion of the blackened film was investigated in the same manner as in Example 1. Further, together with the adhesion of the blackened film, the magnetic permeability and Vickers hardness (Hv) after the blackening treatment were examined in the same manner as in Example 1, and the results are shown in Table 8.
【0056】[0056]
【表12】 [Table 12]
【0057】[0057]
【表13】 [Table 13]
【0058】前記した表13に示した結果から明らかな
ように、本発明範囲内の成分組成、ビッカース硬度(H
v) 、{331}、{210}、{211}結晶面の集
積度を有する材料No.25 〜No.34 およびNo.42 、No.43
の50Hz以上の透磁率は後述する比較例に比べて、高
く、優れたレベルを示している。As is clear from the results shown in Table 13 above, the component composition and Vickers hardness (H
v), materials No. 25 to No. 34 and No. 42, No. 43 having a degree of integration of {331}, {210}, {211} crystal planes
The magnetic permeability of 50 Hz or higher is higher than that of a comparative example described later, and shows an excellent level.
【0059】これに対して、材料No.35 およびNo.39 は
それぞれ本発明規定の上限を超えるプレス成形前の焼鈍
温度、黒化処理温度の場合のものであるが、ビッカース
硬度(Hv) が本発明規定を越えており、50Hz以上の透
磁率は、本発明例に比べて劣っている。また、材料No.3
6 は黒化処理温度が本発明規定上限を超えるものであ
り、黒化膜の密着性が劣っている。On the other hand, the materials No. 35 and No. 39 have the Vickers hardness (Hv) of the case where the annealing temperature and the blackening treatment temperature before press molding exceed the upper limit of the present invention, respectively. Exceeding the requirements of the present invention, the magnetic permeability of 50 Hz or more is inferior to the examples of the present invention. Material No.3
In No. 6, the blackening treatment temperature exceeds the upper limit specified in the present invention, and the adhesion of the blackened film is poor.
【0060】材料No.39 は、本発明規定未満の黒化処理
温度の場合のもの、また材料No.40〜No.41 はいずれも
〔T2 〕≧−(4〔T1 〕/9)+920を満たさない
ものであり、黒化処理後のビッカース硬度(Hv) は本発
明規定値を超えており、50Hz以上での透磁率は、本発
明例に比べて明らかに低い。更に、材料No.37 〜No.38
はプレス前焼鈍温度が本発明規定の上限を超えるもので
あり、{331}、{210}、{211}結晶面の集
積度のうち1つ以上が本発明規定の上限を超えるもので
あり、50Hz以上の透磁率は本発明例に比べて明らかに
低い。Material No. 39 has a blackening temperature lower than that specified in the present invention, and materials No. 40 to No. 41 have [T 2 ] ≧ − (4 [T 1 ] / 9). It does not satisfy +920, the Vickers hardness (Hv) after the blackening treatment exceeds the specified value of the present invention, and the magnetic permeability at 50 Hz or more is clearly lower than that of the examples of the present invention. Furthermore, material No. 37 to No. 38
The pre-press annealing temperature exceeds the upper limit of the present invention, {331}, {210}, one or more of the degree of integration of the {211} crystal plane exceeds the upper limit of the present invention, Magnetic permeability above 50 Hz is clearly lower than in the examples of the present invention.
【0061】以上のように、ビッカース硬度(Hv) 、
{331}、{210}、{211}結晶面の集積度を
本発明範囲として、かつ黒化膜の密着性を優れたレベル
とするためには、プレス前焼鈍温度、黒化処理条件(温
度、時間)を本発明範囲内とすることが重要であること
が理解される。As described above, Vickers hardness (Hv),
In order to keep the degree of integration of the {331}, {210}, and {211} crystal planes within the range of the present invention and to achieve an excellent level of adhesion of the blackened film, the annealing temperature before pressing and the blackening treatment conditions (temperature , Time) within the scope of the present invention.
【0062】[0062]
【発明の効果】以上説明したような本発明によるとき
は、磁気特性に優れ、特に50Hz以上の周波数帯域での
透磁率を優れたものとし、このことより前記した周波数
帯域での迷走磁場遮蔽(シールド)を充分に行い得るシ
ャドウマスク用Fe−Ni合金薄板およびFe−Ni−Co合金薄
板を提供することを可能とし、その効果として前記迷走
磁場によりもたらされる電子ビームの偏倚から生ずる色
ずれを低減せしめるなどの好ましい結果を得しめるな
ど、工業的にその効果の大きい発明である。According to the present invention as described above, the magnetic properties are excellent, and particularly the magnetic permeability in the frequency band of 50 Hz or more is excellent. It is possible to provide an Fe-Ni alloy thin plate and an Fe-Ni-Co alloy thin plate for a shadow mask capable of sufficiently performing (shielding), and as an effect thereof, a color shift caused by an electron beam bias caused by the stray magnetic field is reduced. This is an invention that is industrially highly effective, such as obtaining favorable results, such as exercising.
【図1】透磁率とMn量、〔Ti〕+〔Cr〕+〔Al〕+〔S
i〕+〔Mo〕+〔W〕+〔Nb〕+〔V〕+〔Cu〕量の関
係(括弧内は50Hzでの透磁率の値を示す)を要約して
示した図表である。FIG. 1 Magnetic permeability and Mn content, [Ti] + [Cr] + [Al] + [S
It is a table | surface which summarized and showed the relationship of [i] + [Mo] + [W] + [Nb] + [V] + [Cu] amount (the value in the parenthesis shows the value of magnetic permeability at 50 Hz).
【図2】透磁率とビッカース硬度(Hv) の関係を示した
図表である。FIG. 2 is a table showing the relationship between magnetic permeability and Vickers hardness (Hv).
【図3】透磁率と黒化処理温度およびプレス前焼鈍温度
の関係を要約して示した図表である。FIG. 3 is a table summarizing the relationship among magnetic permeability, blackening temperature and annealing temperature before pressing.
フロントページの続き (51)Int.Cl.7 識別記号 FI H01J 29/07 H01J 29/07 Z (56)参考文献 特開 平6−41688(JP,A) 特開 平5−209254(JP,A) 特開 平5−195160(JP,A) 特開 平5−86441(JP,A) 特開 平3−267320(JP,A) 特開 平1−52024(JP,A) (58)調査した分野(Int.Cl.7,DB名) C22C 38/00 - 38/60 H01J 9/14 H01J 29/07 Continuation of the front page (51) Int.Cl. 7 identification symbol FI H01J29 / 07 H01J29 / 07Z (56) References JP-A-6-41688 (JP, A) JP-A-5-209254 (JP, A JP-A-5-195160 (JP, A) JP-A-5-86441 (JP, A) JP-A-3-267320 (JP, A) JP-A-1-52024 (JP, A) (58) Field (Int.Cl. 7 , DB name) C22C 38/00-38/60 H01J 9/14 H01J 29/07
Claims (4)
%以下、Si:0.06%以下、Cr:0.05%以下、Ti:0.
02%以下、Mo:0.05%以下、W:0.05%以下、N
b:0.02%以下、V:0.05%以下、Cu:0.05%以
下であって、〔Ti〕+〔Cr〕+〔Al〕+〔Si〕+〔Mo〕
+〔W〕+〔Nb〕+〔V〕+〔Cu〕≦0.25%を含有
し、残部不可避不純物およびFeの成分組成からなり、し
かも、黒化処理後の合金板表面への{331}、{21
0}、{211}の結晶面の集積度が下表を満足し、か
つビッカース硬度(Hv) が140以下であることを特徴
とする磁気特性に優れたシャドウマスク用Fe−Ni合金薄
板。 【表1】 (1) In wt%, Ni: 34-38%, Mn: 0.35
% Or less, Si: 0.06% or less, Cr: 0.05% or less, Ti: 0.
02% or less, Mo: 0.05% or less, W: 0.05% or less, N
b: 0.02% or less, V: 0.05% or less, Cu: 0.05% or less, [Ti] + [Cr] + [Al] + [Si] + [Mo]
+ [W] + [Nb] + [V] + [Cu] ≦ 0.25%, the balance is composed of unavoidable impurities and the composition of Fe. }, {21
An Fe-Ni alloy sheet for a shadow mask having excellent magnetic properties, wherein the degree of integration of the crystal planes of 0% and {211} satisfies the following table and the Vickers hardness (Hv) is 140 or less. [Table 1]
%以下、Si:0.06%以下、Cr:0.05%以下、Ti:0.
02%以下、Mo:0.05%以下、W:0.05%以下、N
b:0.02%以下、V:0.05%以下、Cu:0.05%以
下、Co:1.0%以下であって、〔Ti〕+〔Cr〕+〔Al〕
+〔Si〕+〔Mo〕+〔W〕+〔Nb〕+〔V〕+〔Cu〕≦
0.25%を含有し、残部不可避不純物およびFeの成分組
成からなり、しかも、黒化処理後の合金板表面への{3
31}、{210}、{211}の結晶面の集積度が下
表を満足し、かつビッカース硬度(Hv) が140以下で
あることを特徴とする磁気特性に優れたシャドウマスク
用Fe−Ni−Co合金薄板。 【表2】 2. In wt%, Ni: 34-38%, Mn: 0.35
% Or less, Si: 0.06% or less, Cr: 0.05% or less, Ti: 0.
02% or less, Mo: 0.05% or less, W: 0.05% or less, N
b: 0.02% or less, V: 0.05% or less, Cu: 0.05% or less, Co: 1.0% or less, [Ti] + [Cr] + [Al]
+ [Si] + [Mo] + [W] + [Nb] + [V] + [Cu] ≦
0.25%, the balance consists of the composition of unavoidable impurities and Fe.
Fe-Ni for a shadow mask having excellent magnetic properties, wherein the degree of integration of the crystal planes of 31%, {210}, and {211} satisfies the following table, and the Vickers hardness (Hv) is 140 or less. -Co alloy sheet. [Table 2]
%以下、Si:0.06%以下、Cr:0.05%以下、Ti:0.
02%以下、Mo:0.05%以下、W:0.05%以下、N
b:0.02%以下、V:0.05%以下、Cu:0.05%以
下、Co:1.0%超え6%までであって、〔Ti〕+〔Cr〕
+〔Al〕+〔Si〕+〔Mo〕+〔W〕+〔Nb〕+〔V〕+
〔Cu〕≦0.25%を含有し、残部不可避不純物およびFe
の成分組成からなり、しかも、黒化処理後の合金板表面
への{331}、{210}、{211}の結晶面の集
積度が下表を満足し、かつビッカース硬度(Hv) が14
0以下であることを特徴とする磁気特性に優れたシャド
ウマスク用Fe−Ni−Co合金薄板。 【表3】 3. In wt%, Ni: 30-38%, Mn: 0.35
% Or less, Si: 0.06% or less, Cr: 0.05% or less, Ti: 0.
02% or less, Mo: 0.05% or less, W: 0.05% or less, N
b: 0.02% or less, V: 0.05% or less, Cu: 0.05% or less, Co: more than 1.0% to 6%, and [Ti] + [Cr]
+ [Al] + [Si] + [Mo] + [W] + [Nb] + [V] +
Contains [Cu] ≦ 0.25%, the balance being unavoidable impurities and Fe
And the degree of integration of {331}, {210}, and {211} crystal planes on the alloy plate surface after the blackening treatment satisfies the following table, and the Vickers hardness (Hv) is 14
An Fe—Ni—Co alloy sheet for a shadow mask having excellent magnetic properties, wherein the thickness is 0 or less. [Table 3]
膨張合金の熱延鋼帯を熱延板焼鈍して以降冷間圧延−再
結晶焼鈍−仕上冷間圧延−歪取り焼鈍を行なった後、プ
レス成形前の焼鈍を施し、引き続くプレス成形ののちに
黒化処理を施す工程にて製造するに際し、前記熱延板焼
鈍温度(T0 ,℃)を810〜890℃、前記プレス成
形前の焼鈍温度(T1 ,℃)は720〜900℃、黒化
処理温度(T2 ,℃)520〜600℃で、かつ
〔T2 〕≧−(4〔T1 〕/9)+920を満たすこと
により、黒化処理後の合金板表面への{331}、{2
10}、{211}の結晶面の集積度、およびビッカー
ス硬度(Hv) が請求項1に記載した値に調整することを
特徴とする磁気特性に優れたシャドウマスク用Fe−Ni合
金薄板およびFe−Ni−Co合金薄板の製造方法。4. A hot-rolled steel strip of a low-thermal-expansion alloy having the components according to claim 1 is subjected to hot-rolled sheet annealing, and thereafter, cold rolling, recrystallization annealing, finish cold rolling, and strain relief annealing are performed. After that, annealing is performed before press forming, and in the process of performing blackening after the subsequent press forming, the hot-rolled sheet annealing temperature (T 0 , ° C.) is set to 810 to 890 ° C., and the press forming is performed. The previous annealing temperature (T 1 , ° C.) is 720-900 ° C., the blackening temperature (T 2 , ° C.) is 520-600 ° C., and [T 2 ] ≧ − (4 [T 1 ] / 9) +920. By satisfying {331}, {2} on the alloy plate surface after the blackening treatment
The Fe-Ni alloy sheet and Fe for a shadow mask having excellent magnetic properties, wherein the degree of integration of the crystal plane of {10} and {211} and the Vickers hardness (Hv) are adjusted to the values described in claim 1. -A method for producing a Ni-Co alloy sheet.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP06244393A JP3293222B2 (en) | 1992-02-28 | 1993-03-01 | Fe-Ni alloy sheet and Fe-Ni-Co alloy sheet having excellent magnetic properties for shadow mask and method for producing the same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4-78504 | 1992-02-28 | ||
JP7850492 | 1992-02-28 | ||
JP06244393A JP3293222B2 (en) | 1992-02-28 | 1993-03-01 | Fe-Ni alloy sheet and Fe-Ni-Co alloy sheet having excellent magnetic properties for shadow mask and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0657383A JPH0657383A (en) | 1994-03-01 |
JP3293222B2 true JP3293222B2 (en) | 2002-06-17 |
Family
ID=26403481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP06244393A Expired - Fee Related JP3293222B2 (en) | 1992-02-28 | 1993-03-01 | Fe-Ni alloy sheet and Fe-Ni-Co alloy sheet having excellent magnetic properties for shadow mask and method for producing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3293222B2 (en) |
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1993
- 1993-03-01 JP JP06244393A patent/JP3293222B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0657383A (en) | 1994-03-01 |
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