JP3282989B2 - Display device manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a method for manufacturing a display device.
About the law .

[0002]

2. Description of the Related Art As a display device having an airtight space between a pair of parallel flat plates, for example, a plasma display panel (Plasma Display Pan) which emits light using gas discharge is used.
el: Hereinafter, a PDP, a fluorescent display tube (Va) that excites a phosphor with electrons emitted from an electrode to emit light.
cuum Fluorescent Display (hereinafter referred to as VFD) and field emission display (FED)
Are known. In such a display device, a plurality of light-emitting sections are provided in an airtight space in order to obtain various light-emitting patterns.

For example, in the above-mentioned PDP, FED, etc., a lattice-shaped or stripe-shaped partition for dividing an airtight space into a plurality of spaces arranged in a plane direction of a pair of parallel flat plates is provided. In a PDP, a discharge is generated in an arbitrary space (discharge space) between a plurality of discharge electrodes provided in an airtight space, and is provided in the discharge space by light emission accompanying the generation of plasma generated by the discharge and generated ultraviolet light. The display is performed by the excited light emission of the phosphor layer. Therefore, the partition walls are provided to limit the range of plasma or ultraviolet rays to a predetermined discharge space. Also, FE
In D, an electron generated from a cold cathode provided in the hermetic space flies toward the anode, and the phosphor layer formed on the anode is excited to emit light, thereby performing display. Therefore, in the FED, the partition is provided for the purpose of limiting the electron movement range to the divided space. That is, in these PDPs and FEDs, partitions are provided for the purpose of preventing so-called crosstalk by separating spaces.

In a VFD or the like, a display pattern is formed by a plurality of anodes formed on one (substrate) of a pair of parallel flat plates, and electrons emitted from a filament cathode are provided on each anode. A desired light emission pattern is obtained by selectively colliding with the phosphor layer. A grid electrode is provided between the filamentary cathode and the anode in order to control the movement of such electrons, and the generated electrons are accelerated toward the anode or prevented from traveling toward the anode. I have. Therefore,
Although it is not necessary to separate spaces by partition walls to form a predetermined light emitting pattern, one of the grid electrode structures is provided with a rib-like wall protruding from the substrate around the anode, and a grid electrode is formed on the top of the rib-like wall. Some are provided. For example, a rib grid type VFD described in Japanese Patent Application Laid-Open No. Sho 62-290050 or the like is one example thereof. That is, in such a rib grid type VFD, a rib-like wall (partition wall) is provided for the purpose of preventing leakage light emission or light emission mistake.

[0005]

The above-mentioned partition walls or rib-like walls (hereinafter collectively referred to as partition walls) are generally formed by using, for example, a thick film screen printing method or a sand blast method. When the thick-film screen printing method is used, a thick-film printing paste is repeatedly printed on a substrate in a predetermined pattern and laminated, and then fired to form partitions and the like. On the other hand, when the sand blast method is used, the paste film formed on the entire surface of the substrate by a thick film printing method or the attachment of a film is covered with a resist film having a predetermined pattern, and unnecessary portions of the paste film are formed according to the resist pattern. Is cut off with hard particles, and further baked to form partition walls and the like.

[0006] In the process of forming the partition wall, it is inevitable that a defect such as a dent or a chip is generated in the partition wall or the like. In the thick film screen printing method, these defects are caused by clogging of the screen at the time of printing, unevenness of the printing thickness, and stress caused by thermal expansion and contraction at the time of firing. It is caused by the scattering of water. When such a defect occurs, in a PDP, a FED, or the like, discharge or partitioning of electrons becomes incomplete, and in a rib grid type VFD, a grid electrode formed on a partition is chipped, and the electron control function is partially reduced. May be insufficient. In addition, PD
In a discharge display device such as P, a certain width or more of the partition wall is required to prevent erroneous discharge across the partition wall. However, erroneous light emission can occur. Therefore, during the manufacturing process of the display device, inspection is performed during or after formation of the partition wall in order to find a defect such as a partition that affects the function of the display device as described above and to select or correct a defective product. Have been done.

Conventionally, the inspection of the partition walls and the like has been performed visually by an operator. In such a visual inspection,
Since the shape of the partition can be confirmed from various directions over a wide range, defects can be easily found. However, in mass production equipment, automation of inspection is indispensable in order to obtain high work efficiency. For this purpose, an automatic inspection device is configured by, for example, irradiating light toward a partition with a lighting device such as a halogen lamp. An image recognition device such as a CCD (Charge Coupled Device) camera detects the presence or absence of a difference in the density of reflected light. In such an automatic inspection device,
For the purpose of improving work efficiency as much as possible, for example, a configuration is adopted in which a CCD camera or the like captures an image while moving an image recognition device arranged along the entire length in one direction of the flat plate along the other direction. Therefore, it is difficult to inspect the partition from various directions by the automatic inspection device. In order to inspect the entire flat plate uniformly, the light irradiation direction and the image recognition direction are set to directions substantially perpendicular to the flat plate surface. It is desirable. For this reason,
Even when a defect is present in the partition wall, it is difficult for a shadow to be formed, and a difference in the density of reflected light between the defective portion and the non-defect portion is unlikely to occur. There is a problem that it is difficult to detect even when the degree is small. Although it is possible to lower the detection limit of the density difference, in that case, a problem arises that a normal portion is easily mistaken as a defect due to a difference in reflectance caused by slight surface irregularities or the like.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method of manufacturing a display device which can easily detect a defect of a partition by an automatic inspection device.

[0009]

[First means for solving the problems] To achieve such purpose, it is an Abstract of the first invention, a first and second plates are parallel to each other, said first flat plate and the second
The hermetic space formed between the flat plates is aligned along the surface of the first flat plate.
From the first flat plate to form a plurality of light emitting sections.
A method of manufacturing a display device that includes a set has been septum, and forming a lower partition section for forming a lower portion of the partition wall on (a) the first flat plate, (b ) lower side form the lower-side partition wall portion on the upper septum wall a predetermined thickness to constitute the top of the previous SL partition walls have a different light reflectivity to the partition wall portion
(C) the upper gap toward the first flat plate.
Light is radiated from above the wall, and based on the density difference of the reflected light,
And inspecting the partition for defects .

[0010]

According to the first aspect of the present invention, a lower partition for forming a lower portion of the partition wall is formed on the first flat plate.
With, on which have a different light reflection factor of its lower partition portion
The side partition is formed on the lower partition with a predetermined thickness
Later, by irradiating light from above them, their reflection
The presence or absence of a defect in the partition is inspected based on the difference in light density.
For this reason, a defect occurs in the partition wall due to the partial absence of the upper partition part, and in the portion where the lower partition part is exposed to the top side, the light reflectance of the upper partition part and the light reflectance of the lower partition part are different. Therefore, the reflectance of the light irradiated for inspecting the defect of the partition wall is different between the non-defect portion and the defect portion, and a large difference in the density of the reflected light occurs . Therefore, the above-mentioned
If a defect with a thickness greater than the specified value occurs, the defect is inspected.
Since they are detected in the process,
Wall defects can be easily detected with automatic inspection equipment
You.

[0011]

The A second means for solving], where the gist of the second invention for achieving the above object, a first and second plates are parallel to each other, said first flat plate and said The airtight space formed between the two flat plates is set in the plane direction of the first flat plate.
The first flat plate to form a plurality of light emitting sections along
A method of manufacturing a display device that includes a et erected by septum, (a) under the paste for forming the lower partition portion constituting a lower portion of the partition wall on the first flat plate Shape the membrane
A step of forming a thick film screen (b) a thick film paste
Apply a predetermined thickness on the lower paste film by printing.
By this, an upper partition part constituting the uppermost part of the partition having a light reflectance different from that of the lower paste film is formed.
Forming an upper paste film for the first step;
Irradiate light from above the upper paste film toward the plate
Of the upper paste film based on the density difference of the reflected light.
And an inspection step of inspecting for the presence or absence of a defect .

[0012]

In this manner, the lower plate for forming the lower partition wall constituting the lower portion of the partition wall on the first flat plate.
The side paste film is formed and the lower paste film
Above for constituting the upper partition wall portion having a different light reflectivity than the lower paste film litho by the thick film screen printing on
After the side paste films are formed, light is illuminated from above them.
The upper page based on the density difference of the reflected light.
The presence or absence of a defect in the roast film is inspected. Therefore, Recessed Riketsu by that upper paste layer for constituting the upper partition wall is missing partially occurs in the portion where the lower paste films were exposed to the top side, their light reflectance different since the reflectance of light irradiated to inspect the defects is turned to different defect-free portion and the defect portion, a large density difference of the reflected light is generated. Therefore, more than the predetermined thickness
If a defect occurs, the defect is detected during the inspection process.
It is therefore, can be readily detected by the automatic inspection device defects of the partition wall when producing the display device.

[0013]

[0014]

[0015]

Another aspect of the present invention, in the first invention or the second invention, preferably, the predetermined thickness is approximately 20 (μm).
Thickness, thickness of one to several layers of thick film screen printing, and
What is the minimum allowable defect thickness that is the minimum value of the defect thickness?
That's it. In this way, a depth greater than the allowable defect thickness
When a defect is formed, the defect is detected. Previous
As described above, in the inspection step, the upper partition portion or
Is larger than the thickness of the upper paste film (predetermined thickness).
Defect of size is detected, but the above `` thickness of about 20 (μm) ''
And "thickness of one to several layers of thick film screen printing"
Both are the sizes of defects that cause a problem in the function of the display device.
It is a value equal to the depth. In other words, these are also general tables
In the indicating device, this corresponds to the allowable defect thickness.
The allowable defect thickness is, in principle, questionable due to the function of the display device.
Although it is determined as a value that does not become a problem,
Shape and dimensions required for bulkheads according to various applications
It is determined from the legal accuracy.

Preferably, the lower partition portion or the front partition portion is provided.
The lower paste film has a white color, and the upper partition portion or the upper paste film has a black color. In this case, since the difference between the light reflectances of the two partition portions or the two paste films is sufficiently large, the defect can be more reliably detected by the automatic inspection device. Moreover, since the lower partition has a white color, the reflectivity of the partition generated for light generated in the light-emitting partition is high, so that higher brightness can be obtained, and the upper partition has a black color. Since the light emitting sections are separated by black lines on the display surface side, higher contrast can be obtained.

[0017]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the following examples, the dimensional ratios and the like of each part are not necessarily drawn accurately.

FIG. 1 shows an AC type color PDP having a three-electrode structure, which is an example of a display device having a partition according to an embodiment of the present invention.
FIG. 1 is a diagram showing a configuration of a PDP (hereinafter, simply referred to as a PDP) 10 by cutting out a part thereof. In the figure, a PDP 10 is made of, for example, a flat plate made of soda lime glass and has a light-transmitting front plate 12, a back plate 14 also made of a flat plate made of soda lime glass,
And a longitudinal partition wall 18 forming a plurality of discharge spaces 16 arranged along one direction in an airtight space formed between the two.

On the front plate 12, a plurality of pairs of display discharge electrodes 20a and 20b (hereinafter, unless otherwise distinguished) are arranged in parallel in one direction orthogonal to the longitudinal direction of the partition wall 18. The display discharge electrode 20 is covered with a dielectric layer 22 made of a low softening point glass such as borosilicate glass and a protective film 24 made of MgO or the like so that the center distance between each pair is about 600 (μm). It is provided. The display discharge electrode 20 is made of, for example, ITO (Indium T
in Oxide: ATO (Antimon Tin)
Oxide: a transparent electrode made of a transparent conductive material such as antimony tin oxide, and a pair of outer electrodes of the display discharge electrode 20 provided to overlap the conductivity of the transparent electrode 26. ), Chromium (Cr), copper (Cu), and other metal materials. The protective film 24 is provided for the purpose of preventing the sputtering of the dielectric layer 22. However, since the protective film 24 is formed of a dielectric material having a high secondary electron emission coefficient, it is substantially used as a discharge electrode. Function.

On the other hand, an undercoat 30 is provided on the back plate 14 to cover the entire surface thereof, and a plurality of write-discharges are formed on the undercoat 30 between the display discharge electrode 20a and the undercoat 30 as described later. A write electrode 32 is provided along the plurality of partitions 18 at a position between the partitions 18 so as to be covered with an overcoat 34. The write electrodes 32 are made of a highly conductive metal such as thick film silver, for example, and the center distance between them is about 200 to 500 (μm). The undercoat 30 is made of, for example, low alkali glass or non-alkali glass, and the overcoat 34 is made of, for example, low softening point glass and an inorganic filler. Since the undercoat 30 and the overcoat 34 are made of thick film silver in which the writing electrode 32 is easily diffused by the heat treatment and easily adsorbs the impurity gas, the reaction between the writing electrode 32 and the back plate 14 and the later described Is provided for the purpose of preventing the phosphor layer 36 from being contaminated. Therefore, when the write electrode 32 is formed of a nickel (Ni) thick film, a thin film of aluminum (Al), chromium-copper (Cr-Cu-Cr), gold (Au), or the like, the undercoat 30 or overcoat The coat 34 may not be provided. The inorganic filler contained in the overcoat 34 is, for example, a white filler made of titanium oxide or the like, and is added for the purpose of whitening the overcoat 34 so as to reflect the light emitted from the phosphor toward the display side and increase the luminance. ing.

The partition 18 is made of, for example, B ₂ O ₃ , Pb
Mainly composed of low softening point glass such as O
The dimensions are about 80 to 150 (μm) and the height h is about 100 to 200 (μm).
It is provided on the above-mentioned overcoat 34 at a center interval of the order. Therefore, since the overcoat 34 is provided on the entire surface of the rear plate 14, the partition wall 18 is substantially erected from above the rear plate 14. The partition wall 18 has a lower partition wall portion 18a, which is located on the lower side of the whole and is erected from the overcoat 34, for example, a filler such as alumina of about 50 (%), titanium oxide (TiO ₂ ), zirconia ( ZrO ₂ )
Is formed to be white and porous with a porosity of about 15 to 70 (%) by containing an inorganic pigment such as
The upper partition wall 18b having a thickness range of about 20 (μm) contains a filler such as alumina (a few%) and an inorganic pigment such as Cu-Cr-Mn or Fe-Cr-Mn, thereby forming a black color. It is dense and has a porosity of about 0 to 30 (%). Therefore, the partition wall 18 is erected from the back plate 14 and constitutes a lower portion thereof, and the lower partition wall portion 18a has a visible light reflectance different from that of the lower partition wall portion 18a.
m) and is formed on the lower partition wall 18a with a thickness of about m) and the upper partition wall 18b constituting the uppermost portion. The top of the partition wall 18, that is, the upper surface of the upper partition wall portion 18b has irregularities due to various factors in a manufacturing process described later, but the irregularities are kept within a range of about ± 10 (μm). That is, the upper surface of the partition wall 18 is formed to have a sufficiently high flatness of about 20 (μm) which is substantially equal to the thickness of the upper partition wall portion 18b, including unevenness due to partial chipping or depression. In this embodiment, the back plate 14 is the first plate.
The front plate 12 corresponds to the flat plate, and the front plate 12 corresponds to the second flat plate.

On the inner surface of the back plate 14 and on the surface of the partition wall 18, a phosphor layer 36 coated separately for each discharge space 16 has a thickness determined for each color within a range of, for example, about 50 (μm) or less. It is provided in. However, this phosphor layer 36
The lower partition 18a of the partition 18 is formed with a sufficient thickness, but is hardly formed on the surface of the upper partition 18b, and the surface of the upper partition 18b is substantially exposed. ing. Further, the phosphor layer 36 is fixed to the surface of the back plate 14 and the side surface of the partition wall 18, for example, R (red), G (green), and B (blue) that emit light by ultraviolet excitation.
And the like, and are provided so that adjacent discharge spaces 16 emit different colors.

In the present embodiment, the light-emitting sections (cells) forming the minimum unit of light-emission arranged in a matrix (length and width) in an airtight space formed between the front plate 12 and the back plate 14 are: , A pair of display discharge electrodes 20a, 20b
And the write electrode 32 at each intersection. That is, the center interval of the light emitting sections is equal to the center interval of these intersections. One pixel of the PDP 10 composed of three colors of RGB is composed of one line in the direction along the writing electrode 32 and three lines in the direction along the display discharge electrode 20, and in the direction along the writing electrode 32. Are the center intervals of the intersections, and in the direction along the display discharge electrode 20, they are arranged at the center interval three times as large as the intersections. However, as is clear from FIG. 1, the discharge spaces 16 are separated from each other by the partition walls 18 only in the direction along the write electrodes 32. Therefore, each light-emitting section has a partition wall 18 in the direction along the display discharge electrode 20 where different light-emitting colors are arranged.
However, in the direction along the write electrode 32, each pair of the display discharge electrodes 20a, 20a
b is substantially divided by the vicinity of the center position, that is, the boundary of the range where the effect of the display discharge is exerted.

The PDP 10 configured as described above is driven, for example, as follows. That is, first, one display discharge electrode 20a is sequentially scanned and a predetermined negative voltage is applied, and at the same time, a predetermined write electrode 3a is synchronized with the scanning.
2, a predetermined positive voltage is applied to the write electrode 32 and the display discharge electrode 20a to which the positive voltage is applied, so that a write discharge is sequentially performed, and the dielectric layer 2 covering the display discharge electrode 20a is discharged.
2 (strictly speaking, on the protective film 24 further covering the same), and a light-emitting section is selected by accumulating electric charges. Thereafter, a predetermined discharge sustaining pulse is applied to all the display discharge electrodes 20a and 20b to generate a display discharge and maintain the display discharge for a predetermined time to excite the phosphor layer 36 in the selected light emitting section to emit light, The light is emitted through the front plate 12 to display one image. A desired image is continuously displayed by repeating the above-described selection of the light emitting section and light emission at a constant cycle. In this case, the upper surface of the partition 18 is
Because it is formed with a high flatness of about 20 (μm),
Since the discharge space 16 is reliably separated by the partition wall 18, erroneous discharge beyond the partition wall 18 and erroneous light emission are sufficiently suppressed. That is, in the discharge display device such as the PDP 10, it is important to keep the discharge in the limited predetermined discharge space 16 in order to avoid the erroneous light emission. Contains 20 (μ
m) It is necessary that a portion where a fixed partition width cannot be secured over a thickness of not less than m) is not formed. In addition,
Since a detailed driving method is not necessary for understanding the present embodiment, the description is omitted.

The PDP 10 is manufactured, for example, according to the process shown in FIG. First, in the undercoat forming step of step 1-a, the undercoat 30 is formed by repeatedly applying a thick film insulating paste to one surface of the back plate 14 and firing the same. Next, in the write electrode forming step of Step 2-a, the write electrode 32 is formed on the undercoat 30 from a predetermined conductive material by using, for example, a thick film screen printing method or a thin film method. Step 3-a
In the overcoat forming process of FIG.
The overcoat 34 is formed by repeatedly applying and firing a thick film insulating paste containing a low softening point glass and an inorganic filler over the entire surface of the undercoat 30 from above. Then, in the partition wall forming step of Step 4-a,
A predetermined thick film insulating paste mainly composed of low softening point glass is repeatedly applied on the overcoat 34 in a predetermined pattern by a thick film screen printing method or the like, dried and fired at a predetermined temperature to form the partition wall 18.

In the above-described partition wall forming step, the partition walls 18 are formed by using, for example, the steps shown in FIG. 3 using a thick-film insulating paste containing a white inorganic pigment and a thick-film insulating paste containing a black inorganic pigment. That is, first, in the white paste application step of step 41, a thick film insulating paste containing a filler such as alumina and the above-mentioned white inorganic pigment such as titanium oxide and zirconia is applied on the overcoat 34, and then a drying step of step 42 Is dried at a predetermined temperature of, for example, about 100 to 170 (° C.). One coating thickness is, for example, 20 (μ
m), which is small with respect to the partition height, these steps 41 and 42 are performed several times to ten times until the white paste film is stacked at a predetermined height corresponding to the height before firing of the lower partition 18a. This process is repeated several times to form the lower paste film 38a (see FIG. 4 described later). Next, in the black paste application step of step 43, the inorganic filler and Cu-C
A thick film insulating paste containing a black inorganic pigment such as r-Mn or Fe-Cr-Mn is applied on the lower paste film 38a (that is, a white paste film), and the black paste film applied in the drying step of step 44 is removed. By drying, the upper paste film 38b (see FIG. 4) is formed. These steps 43 and 44 are performed only once or twice, respectively, and the thickness of the upper paste film 38b is about 20 (μm) which is equal to the applied thickness of the thick film screen printing once or twice. After the paste film 38 is formed in this manner, in the inspection step of the step 45, the inspection for the partition wall defect is performed by using the automatic inspection apparatus 40 as shown in FIGS. 4 (a) and 4 (b).

The automatic inspection apparatus 40 includes a line light 42 in which halogen lamps and the like are arranged in one line and a line sensor camera 44 in which CCD sensors having a resolution of several thousand pixels are arranged in one line. And a multi-head 46 extending in a direction perpendicular to the longitudinal direction of the partition 38 (that is, the longitudinal direction of the partition wall 18).
4, a drive motor 50 for moving the multi-head 46 along the longitudinal direction of the paste film 38, an image processing device 48 and a drive motor 50 And a control device 52 for controlling the The line light 42 irradiates light toward the back plate 14 in a direction perpendicular to the surface direction thereof, and the surface of the back plate 14 (strictly the surface of the overcoat 34, but is omitted in the drawing) and The reflected light reflected by the paste film 38 has a line sensor camera 4 provided on the back side of the line light 42.
4. The density information of the reflected light made incident on the line sensor camera 44 is sent to the image processing device 48. For example, the densities obtained at about three arbitrary positions are compared with each other, and the density difference is calculated. Based on this, it is determined whether or not the paste film 38 has a defect.

That is, as described above, the upper paste film 3
8b is black while the lower paste film 38a is white, so that the paste film 38 has a notch 54a, 5a or more with a depth of about 20 (μm) or more as shown in FIG.
4b and the like, the lower paste film 38a is formed.
In the portion where the upper surface 56 is exposed, the reflectance of the irradiated light is higher than in the normal portion where the notch 54 and the like are not formed. Therefore, since the density of the reflected light is higher than the density of the normal portion of the paste film 38 where the defect is not generated in the portion where the notch 54 or the like is formed, the notch 54 is formed by the image processing device 48 based on the density difference. Will be detected. On the other hand, when there is a defect that is shallower than the thickness of the upper paste film 38b, such as a dent 58 having a depth of less than about 20 (μm) or a minute notch 60, the irradiation light from the line light 42 and the reflected light Since the orientation is almost perpendicular to the upper surface of the paste film 38, the reflectance of the defective portion is the same as that of the normal portion of the paste film 38. Therefore, in the image processing device 48, the depression 58 and the chip 60 are not detected as defects. However, these recesses 58 and chippings 6
Since 0 is formed to be shallower than the thickness of the upper paste film 38b and is kept at a depth within the allowable range of the flatness of the partition wall 18 (about 20 [μm]), the fineness does not cause any problem in the function of the PDP 10. Is a defect. Therefore, the above step 4
In No. 5, only the chip 54 having a depth equal to or greater than the thickness of the upper paste film 38b, which is a problem in the function of the PDP 10, is detected. That is, the upper paste layer 38b is
Since the lower paste layer 38a, which exhibits white color, has a black color which is greatly different in contrast, it has a function as an inspection gauge. It should be noted that the upper partition 18b in the inspection step of the step 47 after firing described later naturally has the same function as the upper paste film 38b.

After the inspection of the paste film 38 has been completed as described above, if a chip 54 exists,
Is modified with a glass paste or the like, or the paste film 38
After the entire surface is cleaned and removed, a paste film 38 is again applied and formed on the entire surface of the back plate 14, so that the PDP 10
Only the back plate 14 on which the film without the notch 54 causing the functional problem is formed is sent to the step 46 and subsequent steps. Before firing, the paste film 38 can be easily washed away with water or a suitable solvent because the glass powder is merely bonded to each other by a resin binder or the like. In the firing step of step 46, for example, 580 (° C.)
By baking at a predetermined temperature, the partition walls 18 are generated from the paste film 38 based on softening, melting, sintering, and the like of the glass component in the paste. At this time, since the lower paste film 38a contains a filler as described above, while the upper paste film 38b does not contain a filler, the lower partition wall portion generated from the lower paste film 38a is formed. 18a is porous, and the upper partition 18b formed from the upper paste film 38b is dense. Further, since the upper paste film 38b is applied only once, the upper partition 18b is composed of a single layer formed on the lower partition 18a by thick film screen printing.
The thickness is 20 (μm), which is the allowable defect thickness determined from the flatness required on the upper surface of the partition wall 18 in the PDP 10.
Is approximately equal to

After the partition 18 has been formed in this manner, in the inspection step 47, the automatic inspection apparatus 40 shown in FIG. 4 is used to inspect the partition 18 again in the same manner as in the case of the paste film 38. Is applied. That is, the inspection method is the same as that described above and in FIGS. 4 and 5 except that the paste film 38 is replaced with the partition wall 18. In the baking step (step 46), only the back plate 14 determined to be defect-free in the inspection step (step 45) is heat-treated, and the heat treatment temperature at that time is the transition point of the low softening point glass constituting the partition wall 18. Is set sufficiently higher than the softening point of the soda lime glass constituting the back plate 14, so that the shrinkage behavior of the partition wall 18 and the back plate 14 in the cooling process of the heat treatment is different. That is, the melted partition 18 is contracted more than the back plate 14 which is only thermally expanded. Therefore, a tensile stress acts on the partition wall 18 from the back plate 14, and a chip 54 similar to that shown in FIG. 5 can be generated due to thermal stress.

Returning to FIG. 2, in the phosphor layer forming step of step 5, a phosphor paste in which a predetermined phosphor is dispersed in a vehicle in which a resin component is dissolved in an organic solvent is applied to, for example, a thick film screen. The phosphor layer 36 is formed by removing the solvent component in the paste by applying the paste from above the partition wall 18 by printing or the like and drying the paste at a predetermined temperature. At this time,
As described above, since the upper partition 18b is dense, while the lower partition 18a is porous, the phosphor paste applied from above the partition 18 hardly stays on the surface of the upper partition 18b and flows down. The porous lower partition 18
The solvent component is absorbed on the surface of a and reaches the back plate 14 while remaining on the side surface by a predetermined amount. Therefore, as described above, the phosphor layer 36 is formed only on the lower partition 18a on the side surface of the partition 18.

On the other hand, for the front plate 12, first, in a transparent electrode forming step of step 1-b, a transparent electrode 26 is formed by a thin film / photolithography method using a transparent electrode material such as ITO, and then a step 2 is performed. In the metal electrode forming step of -b, the metal electrode 28 is formed by a thick film screen printing method using a thick film conductive paste such as a thick film silver paste.
To form The method of forming the transparent electrode 26 and the metal electrode 28 is appropriately determined from a thin film method, a thick film method, or the like according to the material and the like. Thereafter, in the dielectric layer forming step of Step 3-b, the thick film insulating paste is repeatedly applied to one surface of the front plate 12 and baked to form the dielectric layer 22 covering the electrodes 26 and 28. And Step 4-
In the protective film forming step b, for example, by using an evaporation method or the like
A protective film 24 made of MgO or the like is formed on the dielectric layer 22.

After the films are formed on the rear plate 14 and the front plate 12 as described above, in the joining step of Step 6, the inside of the rear plate 14 and the front plate 12 is surrounded by frit glass or the like at a peripheral portion (not shown). They are joined together so as to be airtight. Then, in the discharge gas filling step of step 7, for example, the inside of the discharge space 16 is once evacuated, and further, a discharge gas such as He, Ne,
By filling at a predetermined pressure of about 500 (Torr),
The PDP 10 is manufactured. Note that the front plate 12 and the partition wall 18 are only butted but not joined to each other.

As described above, according to this embodiment,
A lower partition wall 18a which is erected from the back plate 14 and constitutes a lower portion of the partition wall 18. The lower partition wall 18a has a different light reflectivity and is approximately equal to the allowable defect thickness of 20 (μm). Formed on the lower partition 18a with a thickness of about
8 comprising an upper partition wall 18b formed by thick film screen printing constituting the uppermost portion of the PDP 1
0 partition walls 18 are formed. Therefore, in the part of the partition wall 18 where the lower partition wall 18a is exposed to the top side due to the formation of the notch 54, the light reflectance of the upper partition wall 18b and the light reflectance of the lower partition wall 18a are different. The reflectance of the light from the line light 42 irradiated for inspecting the defect is different between the defect-free portion and the chipped portion 54, resulting in a large density difference of the reflected light. In this case, since the upper partition wall portion 18b has a thickness of about 20 (μm) and is composed of one or two layers, the upper partition part 18b has a depth of about 20 (μm) or more, which is the thickness of one or two layers. When formed, a defect is detected. This is due to the allowable defect thickness (= 20), which is the size of a defect that causes a problem in the function of the PDP 10.
[μm]). Therefore, the partition 18 of the display device can be obtained in which a defect having a size that causes a problem in the function of the display device can be easily detected by the automatic inspection device.

In this embodiment, the lower partition 1
8a is composed of a porous material having a porosity of about 15 to 75 (%),
The upper partition part 18b is densely formed with a porosity of about 0 to 30 (%). Therefore, after the partition walls 18 are formed, a phosphor paste is applied from the top side thereof, so that the phosphor layer 36 can be suitably provided on the side surfaces of the partition walls 18 and the bottom surface between the partition walls 18. That is, the applied phosphor paste hardly adheres to the densely configured upper partition 18b, but the fluorescent paste is applied to the side surface of the porous lower partition 18a. Since the solvent in the body paste flows down while being attached by being absorbed, it is attached to the side wall of the partition wall 18 with a suitable thickness.

In this embodiment, the lower partition 1
8a is white, and the upper partition 18b is black. Therefore, both partition portions 18a, 1
Since the difference in the light reflectance of 8b is sufficiently large, the defect can be more reliably detected by the automatic inspection device 40. Moreover, since the lower partition 18a is white, the reflectivity of light generated in the discharge space 16 by the partition 18 is high, so that higher brightness is obtained and the upper partition 18b is black. Since the discharge spaces 16 are separated from each other by black lines on the display surface side, higher contrast can be obtained.

While the embodiment of the present invention has been described in detail with reference to the drawings, the present invention can be embodied in still another embodiment.

For example, in the embodiment, the present invention
The case where the present invention is applied to the partition wall 18 provided on the back plate 14 of the P10 has been described. However, if the partition wall 18 is erected on a flat plate and defects such as chipping or depression at the top become a problem, V
The present invention is similarly applied to a rib-like wall formed on an anode substrate of FD, a partition wall 18 formed on a switching substrate of PALC (plasma addressed liquid crystal panel), and the like.

In the embodiment, the case where the present invention is applied to the partition wall 18 formed by the thick film screen printing method has been described. However, the partition wall 18 formed by another method such as the sand blast method may be used. The invention applies equally.

In the embodiment, the front plate 12 and the back plate 14 are both made of soda lime glass. However, the front plate 12 may be made of other transparent glass such as silicate glass. The face plate 14 may be formed of a white plate made of other glass such as silicate glass or alumina ceramics.

In the embodiment, the partition 18 is made of PbO.
Although a low softening point glass such as a glass is used as a main component, another glass such as a lead borosilicate glass may be used.

In the embodiment, the upper partition 18
b is formed by one or two application of the thick film insulating paste, but when the predetermined thickness of the upper paste film 38b can be obtained by one application, that is, the lower paste film 38a
In the case where the entire height of the paste film 38 combined with the above becomes a predetermined height corresponding to the height of the partition wall 18, the number of application times may be reduced to one. On the other hand, when the predetermined thickness of the upper paste film 38b cannot be obtained by two coatings, the coating may be repeated several times. That is, the upper partition 1
8b may be composed of one layer, or may be composed of three or more layers.

In the embodiment, the lower partition 18
Although a is made porous and the upper partition 18b is made dense, any of them may be made porous or dense so long as the application of the phosphor paste is not hindered. When the phosphor layer 36 is not provided, it is not necessary to consider the application characteristics of the phosphor paste when determining the porosity of the partition wall 18.

In the embodiment, the lower partition 18
Although a is formed in white and the upper partition 18b is formed in black, these colors are appropriately changed in a range where the light reflectance is sufficiently different. For example, black and white may be set in reverse, other colors with low light reflectance such as dark blue are used instead of black, and other colors with high light reflectance such as light yellow are used instead of white. May be used. In the embodiment, the partition 1
8 (or the paste film 38) is irradiated with light at the time of inspection, so that the partition walls 18a and 18b have different visible light reflectances.
It is sufficient that the reflectivities of the lights a and 18b are sufficiently different within the wavelength band of the irradiated light.

In the embodiment, the inspection of the partition 18 is performed by the automatic inspection apparatus 40. However, when the visible light reflectance of the lower partition 18a is different from that of the upper partition 18b as in the embodiment, Is sufficiently visible,
The present invention is similarly applied to a case where a worker performs a visual inspection.

Although not specifically exemplified, the present invention can be variously modified without departing from the spirit thereof.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view showing a configuration of a PDP having a partition according to one embodiment of the present invention.

FIG. 2 is a process chart for explaining a manufacturing process of the PDP of FIG. 1;

FIG. 3 is a process diagram illustrating each process constituting a partition forming process in the manufacturing process of FIG. 2;

FIGS. 4A and 4B are diagrams illustrating an inspection step in a partition wall forming step.

FIG. 5 is a diagram illustrating aspects of a defect formed in a partition.

[Explanation of symbols]

 10: PDP (display device) 12: Front plate (second flat plate) 14: Back plate (first flat plate) 16: Discharge space (light-emitting section) 18: Partition wall 18a: Lower partition 18b: Upper partition

──────────────────────────────────────────────────続 き Continuation of the front page (72) Eiji Naraki, Inventor 2160 Yatsunami, Yasu-cho, Asakura-gun, Fukuoka Prefecture 2160 No. Kyushu Noritake Co., Ltd. JP-A-8-129958 (JP, A) JP-A-9-55166 (JP, A) JP-A-10-172442 (JP, A) JP-A-11-14549 (JP, A) JP-A-10-283933 (JP, A) JP-A-1-57029 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01J 9/42 G09F 9/30 324 H01J 9/02 H01J 11/02

Claims (3)

(57) [Claims] And 1. A first and second plates are parallel to each other, a plurality of light emitting sections along an airtight space formed between the first flat plate and the second flat plate in the plane direction of the first flat plate formed
First a method of manufacturing a display device and a erected partition wall of a flat plate, <br/> lower for constituting the lower portion of the partition wall on the first flat plate to forming a partition wall, said lower septum upper septal wall for forming the top of the previous SL partition walls have a different light reflectivity than the lower-side partition wall at a predetermined thickness
Forming a light beam on a wall portion, and emitting light from above the upper partition portion toward the first flat plate.
Irradiation and the defect of the partition based on the density difference of the reflected light
Method for manufacturing a display device and a testing step, characterized in that it comprises examining the presence or absence of. 2. A first plate and a second plate parallel to each other.
When,Hermetic air formed between the first flat plate and the second flat plate
whileForming a plurality of light emitting sections along the surface direction of the first flat plate
A partition wall erected from the first flat plate toTable with
Indicating deviceHow to manufactureThe first flat plateaboveA lower septum constituting a lower portion of the bulkhead
WallFor forming a lower paste film for forming a layer
When,Thick film paste is applied to the bottom
By applying a predetermined thickness on the bottom film.
Blast membrane Has a different light reflectance thanThe top of the bulkhead
Make upUpper partitionUpper paste film for forming
Forming a; From above the upper paste film toward the first flat plate
Light and irradiates the upper paper based on the density difference of the reflected light.
Inspection process for inspecting the Including
And a display device characterized byProduction method. 3. The method according to claim 1, wherein the predetermined thickness is approximately 20 (μm).
One to several layers of film screen printing, and defects
One of the predetermined allowable defect thicknesses,
The method for manufacturing a display device according to claim 1.