JP3279383B2 - Arrangement structure of HEPA filter unit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates, regarding <br/> the arrangement of HEPA filter unit arranged on the ceiling of the clean room.

[0002]

2. Description of the Related Art Conventionally, a HEPA filter (High E
As a clean room in which a fficiency particulate airfilter is laid, for example, those disclosed in Japanese Utility Model Application Laid-Open No. 63-95036 and Japanese Patent Application Laid-Open No. 2-103328 are known.

[0003] Conventionally, in a full-surface laminar-flow type clean room, the wind speed blown out from the HEPA filter is:
For the purpose of blocking dust, 0.45 m / s is recommended (for example, ASHRAE 1982 APPLICATION HAND
BOOK).

[0004]

However, as described above, the wind speed blown out of the HEPA filter is set to 0.4
When operating at 5 m / s, the processing air volume increases,
There has been a problem that initial costs and running costs increase.

Therefore, in order to suppress the initial cost and the running cost, the operation has been conventionally performed by setting the wind speed from the HEPA filter to 0.25 to 0.35 m / s. There is a problem that a sufficient dust blocking effect cannot always be obtained.

The present invention, such conventional problems has been made to solve the, to provide an arrangement structure of HEPA filter unit can be obtained blocking effect sufficient dust without increasing the process air volume Aim.

[0007]

According to a first aspect of the present invention, there is provided an arrangement structure of a HEPA filter unit formed by bending a filter medium in a wave shape.
The HEPA filter is formed in a square shape that is, a plurality of sides of comprising a waveform shape of the tidal wave portion formed by larger than the inner filter medium wave-shaped on both sides of the <br/> filter medium same size of the filter medium
The HEPA filter unit of
They are arranged adjacently so as not to touch .

[0008]

[0009]

[0010]

The arrangement of the HEPA filter unit according to claim 1 is provided.
The HEPA filter is formed by bending the filter media in a wave shape.
The filter is formed into a square shape, and the corrugations on both sides of the filter
Larger waves are formed on both sides of the filter media by making them larger than the
A plurality of HEPA filter units of the same size formed
Are placed adjacent to each other so that the large waves do not adjoin each other
Therefore, a high flow velocity region is formed along the outer periphery of each HEPA filter unit .

[0011]

[0012]

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIGS. 1 and 2 show a HEPA filter used in an embodiment of the arrangement structure of the HEPA filter unit of the present invention.
In the drawing, reference numeral 11 indicates a unit body.

A HEPA filter 15, which is formed by bending the filter medium 13 in a wave shape, is accommodated in the unit body 11. In this embodiment, the corrugations on both sides of the filter medium 13 are made larger than the corrugations on the inner filter medium 13.

That is, large wave portions 17 are formed on both sides of the filter medium 13, and small wave portions 19 are formed between these.
Accordingly, both sides of the HEPA filter 15 are defined as the high flow velocity region A, and the space between the high flow velocity region A is defined as the low flow velocity region B.

That is, as shown in FIGS. 3A and 3B, when comparing the small wave portion 19 and the large wave portion 17, the filter medium 1
When the ventilation resistance of the filter medium 3 itself is the same and the pressure difference between the inside and the outside of the filter medium 13 is the same, the surface area of the filter medium 13 of the large wave section 17 in the unit length is equal to the surface area of the filter medium 13 of the small wave section 19. Since the air flow becomes larger, the air flow passing through the large wave portion 17 becomes larger than the air flow passing through the small wave portion 19. As a result, a high flow velocity region A where the flow of the wind is fast is formed below the large wave portion 17, and the small wave portion 19 is formed. A low-speed flow area B in which the flow of the wind is relatively slow is formed below the area.

In this embodiment, the wind velocity in the high flow velocity area A is, for example, 0.45 m / s, the wind velocity in the low flow velocity area B is, for example, 0.15 m / s, and The average wind speed including the low-speed basin B is 0. The wave shapes of the large wave portion 17 and the small wave portion 19 are set so as to be 3 m / s or less.

FIGS. 4 and 5 show a clean room using a plurality of the above-mentioned HEPA filter units. In this clean room, a large number of HEPA filter units 23 are arranged below the ceiling 21 at a predetermined interval from the ceiling 21. Is installed, and the blower 25 provided outside the room
As a result, circulating air is supplied to the space between the ceiling 21 and the HEPA filter unit 23, and the supplied circulating air passes through the HEPA filter unit 23 to increase the cleanliness and is blown into the clean room. .

In this clean room, HEP
The A filter unit 23 is arranged adjacently so that the large wave portions 17 on both sides thereof are not adjacent to each other. That is,
In this embodiment, each HEPA filter unit 23 has a square shape, and in the adjacent HEPA filter units 23, the large waves 17 are arranged so that the wave directions thereof are perpendicular to each other.

Thus, the HEP constructed as described above
In the A filter unit, the wave shape on both sides of the filter medium 13 is
Since the inner diameter of the filter medium 13 was larger than that of the inner side,
The airflow passing through the large waves 17 on both sides of the
A high flow velocity region A is formed on both sides of the filter 15, and the diffusion of the dust is blocked by the high flow velocity region A.
Since the air volume in the above is relatively small, a sufficient dust shielding effect can be obtained without increasing the processing air volume.

Further, the arrangement of the HEPA filter units described above, the HEPA filter unit 23, since the large wave portion 17 has a plurality adjacently disposed so as not adjacent to each other, the high velocity region along the outer periphery of the HEPA filter unit 23 A is formed, and the diffusion of the dust to the adjacent HEPA filter unit 23 side is blocked by the high flow velocity region A. On the other hand, since the air volume in the low speed flow region B is relatively small, it is sufficient without increasing the processing air volume. An effect of blocking dust can be obtained.

That is, for example, as shown in FIG. 6, the wind speed is 0.45 m / s by the so-called space tunnel method.
High flow rate HEPA filter unit 27 and low flow rate HEPA filter unit 2 having a wind speed of 0.15 m / s
9 are alternately arranged, it is difficult to block dirt in a diagonal direction in the figure shown by the arrow, but in the arrangement method of this embodiment, along the outer periphery of each HEPA filter unit 23. Since the high flow velocity region A is reliably formed, it is possible to obtain a sufficient dust blocking effect.

[0023] Figure 7 shows a related art of the arrangement of the HEPA filter units of the present invention, in this example, H
A plurality of EPA filter units 23 are arranged around a normal HEPA filter 31 in which the same waveform is formed.

Then, each HEPA filter unit 23
The wave direction of the small wave portion 19 and the large wave portion 17 of the normal HE
It is arranged so as to be in a direction perpendicular to the PA filter 31.

In this arrangement, the high flow velocity region A is formed outside the normal HEPA filter 31, and the high flow velocity region A
In this case, the diffusion of dust is blocked, and when an apparatus or the like is arranged below the HEPA filter unit 23, the air volume in the normal HEPA filter 31 can be relatively reduced, so that the processing air volume is not increased. A sufficient dust blocking effect can be obtained.

[0026]

As described above, the HEPA according to the first aspect is described.
In the filter unit arrangement structure , the filter media is bent
To form a HEPA filter formed in a square shape,
Make the wave shape on both sides of the filter media larger than the wave shape of the inner filter media.
Of the same size with large waves formed on both sides of the filter media
Number of HEPA filter units, large waves adjacent to each other
Each HEPA filter unit
A high flow velocity region is formed along the outer periphery of the knit, and the diffusion of the dust is blocked by the high flow velocity region. Therefore, a sufficient dust blocking effect can be obtained without increasing the processing air volume.

[0027]

[0028]

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a HEPA filter unit used in an embodiment of an arrangement structure of a HEPA filter unit of the present invention.

FIG. 2 is a top view of FIG.

FIG. 3 is an explanatory diagram showing the amount of air passing through a large wave portion and a small wave portion of the HEPA filter unit of FIG. 1;

FIG. 4 is a sectional view showing a clean room using the HEPA filter unit of FIG. 1;

FIG. 5 is a top view showing a HEPA filter unit of the clean room in FIG. 4;

FIG. 6 is an explanatory diagram showing a state in which ordinary HEPA filter units having different flow rates are alternately arranged.

FIG. 7 is an arrangement structure of a HEPA filter unit of the present invention.
It is a top view which shows the related technology .

[Explanation of symbols]

 13 Filter medium 15 HEPA filter 17 Large wave part 19 Small wave part 23 HEPA filter unit A High flow velocity area B Low velocity area

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B01D 46/52 F24F 7/06

Claims (1)

(57) [Claims] 1. A HEP formed by bending a filter medium into a wave shape.
A filter is formed in a square shape, and the wave shape on both sides of the filter medium is larger than the wave shape of the inner filter medium, and a plurality of HEPA filters of the same size are formed by forming large wave portions on both sides of the filter medium.
Filter unit so that the large waves do not adjoin each other.
An HEPA filter unit arrangement structure characterized by being arranged adjacent to the HEPA filter unit.