JP3276029B2 - Electrostatic actuator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic actuator, and more particularly, to a movable actuator and a stator that can be precisely positioned when driven, and does not significantly increase the weight of the electrostatic actuator. The present invention relates to an electrostatic actuator capable of achieving high output and low voltage.

[0002]

2. Description of the Related Art Recently, electrostatic actuators have been developed as electrostatic motors for converting electric field energy into mechanical energy. In the electrostatic actuator, a mover 10 is mounted on a stator 1 as shown in a sectional view of FIG. 1 (in the figure, the mover 10 is illustrated as being separated from the stator 1. , Mounted on and in contact with the stator 1). The stator 1 has strip-shaped extraction electrodes 25 </ b> A to 27 </ b> A connected to a three-phase power supply on an electrically insulating substrate, and strip-shaped electrode groups 25 forming a driving unit. 27, and the movable element 10 also includes strip-shaped extraction electrodes 25A 'to 27A' connected to a three-phase power supply on an electrically insulating substrate, and strip-shaped electrode groups 25 'to 27' forming a driving unit. It has a wired structure.

[0003] In the stator 1, a wiring pattern composed of an extraction electrode 25A connected to a Φa power supply and strip-like electrode groups 25, 25, 25,.
A wiring pattern composed of an extraction electrode 26A connected to the Φb power supply and a strip electrode group 26 extending therefrom, and an extraction electrode 27A connected to the Φc power supply and a strip electrode group 27 extended therefrom. The three types of wiring patterns are wired in combination. As shown in the stator of FIG. 1, the combinations are wired in parallel in the order of the strip electrodes 25, 27, 26, 25, 27,... From the end.

On the other hand, in the mover 10, a wiring pattern comprising a lead electrode 25A 'connected to a Φa power supply and strip-like electrode groups 25', 25 ',.
A wiring pattern composed of an extraction electrode 26A 'connected to the .PHI.b power supply and band-shaped electrode groups 26', 26 ',... Extending therefrom, and a strip-shaped extraction electrode 27 connected to the .PHI.c power supply
A 'and a group of strip electrodes 27', 27 '
The wiring patterns are composed of three types of wiring patterns. The combination is the moving element 10 shown in FIG.
As shown in the figure, wiring is performed in parallel in the order of 25 ', 26', 27 'from the end.

[0005] That is, as shown in FIG. 1, when the moving element 10 is mounted on the stator 1, the arrangement order of the strip-shaped electrode groups 27, 26, 25,.
, The band-shaped electrode groups 25 ', 26', 27 ',.
And the order of connection to the power supply is reversed.

In the electrostatic actuator configured as described above, the applied voltage of the three-phase power supply is, for example, Φa
(-): Φb (0): Φc (+) → Φa (0): Φb
(+): Φc (-) → Φa (+): Φb (-): Φc
When sequentially switched to (0), potential waves which travel in opposite directions on the moving element and the stator, respectively, are generated, and the moving element floats as shown by arrows in FIG. 1 due to the electrostatic force generated between these traveling waves. At the same time, the moving element is driven in a direction perpendicular to the arrangement direction of the strip electrodes. In addition, this 3
By changing the combination of the phases of the applied voltages in the phase power supply, the mover can move in either the left or right direction, and the three-phase power supply can have more phases.

In such an electrostatic actuator, the same voltage is always applied to the stator and the movable element, so that a high output is obtained, and a repulsive force is generated between the movable element and the stator during driving. Since the force is small and the suction force is applied at the time of stopping, a large holding force can be obtained. Also, high precision is not required for production, and it is easy to make thin, large area, and laminate, and high output, low power It has an advantage that voltage drive is easy.

However, in this electrostatic actuator, there is a problem in that, when the movable element is driven, the mounting position on the stator is displaced in a direction perpendicular to the driving direction. Matching is required. Therefore, conventionally, a positioning guide is provided on the stator so that the moving element does not shift in the direction perpendicular to the driving direction. However, the guide is manufactured by using a line between the stator and the extraction electrode of the moving element. Accuracy according to the width is required. In addition, when high output and low voltage are to be achieved as an electrostatic actuator, the electrode width tends to be narrower,
There is a problem that it is increasingly difficult to make a guide. Further, when such an alignment guide is provided, the weight of the electrostatic actuator itself increases, so that there is a problem that high output and low voltage cannot be obtained.

[0009]

SUMMARY OF THE INVENTION According to the present invention, it is possible to precisely align a moving member and a stator of an electrostatic actuator, and to achieve high output and high power without greatly increasing the weight of the electrostatic actuator. An object of the present invention is to provide an electrostatic actuator capable of lowering the voltage.

[0010]

According to the present invention, there is provided an electrostatic actuator in which a plurality of strip-shaped electrodes forming a driving section are wired on an electrically insulating substrate, and mounted on the stator.
A plurality of strip-shaped electrodes forming a driving unit are wired on an electrically insulating substrate, and a movable element is wired. The movable element is floated by switching a phase of a voltage applied to each of the strip-shaped electrodes in the stator and the movable element. In the electrostatic actuator to be driven, the extraction electrode from the strip electrode of the stator and the extraction electrode from the strip electrode of the movable element are wired on the respective electrically insulating substrates in the same direction as the moving direction of the movable element. The wiring position of the extraction electrode on the stator and the wiring position of the extraction electrode on the movable element are opposed to each other in at least one set, and wiring is performed so that voltages of the same polarity are applied to the opposed electrodes. Further, one of the extraction electrodes of the combination of the extraction electrodes of the opposed stator and the moving element is divided into two parts. At square of the strip take-out electrode and the equal intervals, characterized in that it is wired to be made to face.

The electrostatic actuator of the present invention will be described. FIG. 2 is a perspective view of the electrostatic actuator of the present invention, FIG. 3 is a cross-sectional view taken along the line AA, and FIG.
The cross section on plane B shows the cross section of the driving section, which is the same as that shown in FIG. 1 described above, and will be described in detail in a manufacturing method described later.

The principle of operation of the electrostatic actuator of the present invention is the same as that of the conventional electrostatic actuator described with reference to FIG. 1, but the present invention, as shown in FIG. 25A to 27A, the extraction electrodes 25A 'to 27A' of the moving element 10 are arranged on the respective electrically insulating substrates in the same direction as the moving direction of the moving element (that is, the direction perpendicular to the direction of the strip-shaped electrodes forming the driving section).
And the wiring positions are arranged on both sides of the drive unit. In the wiring, as shown in FIG. 3, when the moving element 10 is mounted on the stator 1, the moving electrode is wired from the same power source and the moving electrode to which a voltage of the same polarity is applied. The electrodes are wired in the stator and the movable element, respectively, so that the electrodes face each other in the direction of the electric field.

The following description will be given by taking the facing extraction electrodes 25A and 25A 'as an example.
As shown in FIG. 2, A 'is connected at its end and divided into two parts. Further, as shown in FIG. 3, the extraction electrodes 25A 'of the two-piece movable element are wired in the movable element so as to face the extraction electrodes 25A of the stator at equal intervals. .

In FIG. 3, the strip-shaped extraction electrode 26A of the stator is divided into two parts at the same time to be opposed to the strip-shaped extraction electrode 26A 'of the moving element. This is because opposing extraction electrodes may become 0V. 0
When the V power supply is not used, at least one set of extraction electrodes may be divided and opposed.

FIGS. 4A and 4B are diagrams for explaining the operation of the extraction electrode shown in FIG. 3 in relation to a change in phase due to each power supply in a three-phase power supply. FIG. 4A shows Φa (−). : Φb
(0): If Φc (+), (b) is Φa (0):
Φb (+): When changed to Φc (−), (c) becomes Φc
a (+): Φb (−): Φc (0).

As described above, the same waveform is always applied to the extraction electrodes of the stator and the movable element, and repulsion occurs between the three opposing extraction electrodes due to the electrostatic force.
For example, in (a), the extraction electrode 25A of the stator is used.
Are located between the extraction electrodes 25A 'of the two movers, and the same applies to (b).
Since this also occurs in (c), when the movable element is driven, it is possible to prevent the movable element from being displaced in a direction perpendicular to the driving direction.

FIGS. 5 to 11 show examples of combinations of the extraction electrodes of the moving member and the stator when such a three-phase power source is used, but the present invention is not limited to this.

Next, a method for manufacturing an electrostatic actuator when a three-phase power supply is used will be described. FIG.
3 is a cross-sectional view of the electrostatic actuator of the present invention shown in FIG. 2 taken along the plane BB. In the figure, 1 is a stator, 10 is a moving element, 2 is an electrically insulating substrate, and 3 is an electrically insulating board. Sex film,
Reference numerals 25 to 27 and 25 'to 27' denote strip electrodes.

As shown in FIG. 12, the stator and the mover have the same structure except for the electrode wiring. Hereinafter, the stator will be described as an example.

In the electrode wiring according to the present invention, FIG.
As shown in (1), there is a problem that the strip electrode 27 and the extraction electrode 26A must be overlapped. Therefore, even if a through hole is formed in the substrate, the strip-shaped electrode 27 extends to the back surface of the substrate through the through hole, and the extraction electrode 27A is wired on the back surface of the substrate, it is possible to prevent the displacement due to the driving of the moving element. it can. However, in this type of electrostatic actuator, the driving voltage is 200 V to 1 V.
000 V, and the substrate thickness is required to be 1 μm or more in order to prevent dielectric breakdown. When the electrostatic actuators are stacked to form an actuator, there is a problem that the entire capacitance is increased. Also, if a through hole is drilled using a jig, the diameter of the hole cannot be reduced to 300 μm or less.
The limit is 0 μm, and the density of the strip-shaped electrode layer in the stator is limited, so that high output and low voltage driving of the electrostatic actuator cannot be obtained, and the working process is complicated.

Therefore, the method of manufacturing the stator and the moving element in the present invention includes, for example, (1) a step of forming a mask by partially insulating the first transfer substrate, and (2)
The first portion of the transfer substrate other than the mask is plated by plating.
Forming a strip-shaped electrode layer; (3) transferring the first strip-shaped electrode layer onto an electrically insulating substrate having an adhesive layer; and (4) forming a first strip-shaped electrode layer on the electrically insulating substrate. Laminating an electric insulating layer having adhesiveness on the extraction electrode layer, and (5) forming a second strip-shaped electrode layer on the second transfer substrate.
(6) forming the second strip-shaped electrode layer on the electrically insulating substrate on which the first strip-shaped electrode layer is formed, and (6) forming the second strip-shaped electrode layer on the electrically insulating substrate on which the first strip-shaped electrode layer is formed. It is preferable that the electrode is manufactured by a process of transferring to a take-out electrode via an electrically insulating layer having adhesiveness to form a multilayer.

Regarding the multilayer electrode wiring board in the stator,
This will be described with reference to FIG. FIG. 1A is a perspective view showing an arrangement relationship between a strip electrode and an extraction electrode, and FIG. 1B is a cross-sectional view thereof. In the figure, reference numeral 20 denotes an electrically insulating substrate, 21 denotes an adhesive layer, and 22 denotes an adhesive layer. An electric insulating layer having an adhesive layer 23; 25, a first electrode group; 26, a second electrode group; 27, a third electrode group;
5A to 27A are extraction electrodes of each electrode group.

As shown in FIGS. 1A and 1B, in the multilayer electrode wiring board, a first electrode group 25 and a second electrode group 26 are arranged on an electrically insulating substrate 20 with an adhesive layer 21 interposed therebetween. Then, the insulating layer 22 having the adhesive layer 23 is coated on the extraction electrode 26A of the second electrode group 26, and the third electrode group 27 is further formed on the electrically insulating substrate 20 and the insulating layer 22 having the adhesive layer 23. Laminated.

A method for manufacturing the multilayer electrode plate shown in FIG. 13 will be described with reference to FIGS. FIG. 14A is a plan view of a transfer plate, and FIG. 14B is a cross-sectional view thereof, where 30 is a transfer substrate, 31 is an insulating layer, and 33 electrode layers, and can be manufactured by the following two steps. .

(1) First, on a transfer substrate 30 made of a metal plate such as stainless steel, a ceramic or resin or the like is used in addition to a portion where a first strip-shaped electrode layer made up of a first electrode group and a second electrode group is wired. The insulating layer 3 is formed by using a material having an insulating property and patterning by photolithography or the like, or simply by directly patterning using a photoresist or by patterning by screen printing.
Form one. The thickness of the insulating layer 31 is 0.5 μm to 40 μm.
It is preferable that the thickness be set to μm. Further, in a portion to be a circuit, a first strip-shaped electrode layer is formed while leaving a wiring portion of the strip-shaped electrode in the third electrode group.

(2) Next, a metal electrode layer 33 (first strip electrode layer) is laminated on the transfer substrate 30 not covered with the insulating layer 31 by electroplating. As the electrode layer,
The insulating layer may be formed of copper, solder, nickel, or the like, or may be formed by sequentially stacking different metal layers.

Using the transfer plate thus formed, the multilayer electrode plate according to the present invention comprises the following (3) to (6)
It is manufactured by the process shown by.

(3) FIG. 15 (a) is a perspective view thereof, and FIG. 15 (b) is a sectional view thereof.
An adhesive layer 21 is appropriately applied to the upper electrode wiring portion. The electrically insulating substrate is made of plastic such as polyethylene terephthalate, polyimide, epoxy resin, or glass, and the thickness is not particularly limited, but is preferably 1 μm to 50 μm. The pressure-sensitive adhesive is not particularly limited, but generally a pressure-sensitive adhesive such as a rubber-based or acrylic resin can be used. Properties thereof include a solvent-based, water-based (emulsion-type) hot-melt-based, and solvent-free (liquid-curable) -based. Can be used.

(4) The transfer plate prepared in (1) and (2) above is superposed on the thus formed electrically insulating substrate.
The electrode wiring on the transfer plate is transferred onto the electrically insulating substrate. FIG. 16A is a perspective view of a state where the electrode wiring is transferred, and FIG. 16B is a cross-sectional view thereof. In the figure, 20
Is an electrically insulating substrate, 25 is a first electrode group, 26 is a second electrode group, 25A is an extraction electrode of the first electrode group, 26A
Denotes an extraction electrode of the first electrode group, and the same reference numerals as those in FIG. 15 indicate the same contents.

The electrode layer was transferred via the adhesive layer 21. After the electrode layer was formed on the transfer substrate 30 in the above (2), electrodeposition was performed in an electrodeposition adhesive solution to form the electrode layer. After forming the electrodeposited pressure-sensitive adhesive layer only on the upper surface (the film thickness is 0.5 μm to 50 μm), the electrodes may be transferred onto the electrically insulating substrate 20 via the electrodeposited pressure-sensitive adhesive layer. As such an electrodeposition adhesive, for example, a dispersion liquid in which a cationic resin obtained by adding an amine to an epoxy resin, an epoxy resin, and a curing agent are mixed and finely divided into fine powders is used in an aqueous medium. Preferably, this electrodeposited pressure-sensitive adhesive is capable of adjusting the adhesiveness (curing degree) by controlling the heating and pressing conditions after electrodeposition on the electrode layer. Other anionic resins can be used as such an electrodeposition adhesive.

(5) Next, the electric insulating layer 22 having the adhesive layer 23 is coated so as to cover the extraction electrode portion 26A of the second electrode group 26 on the electric insulating substrate. FIG. 17A is a perspective view showing a state where the insulating layer is covered, and FIG. 17B is a sectional view thereof.

The electric insulating layer 22 having the adhesive layer 23 is formed by coating the above-mentioned adhesive on both surfaces of a plastic film such as polyethylene terephthalate or polyimide having a volume resistance of 10 ¹⁴ Ω · cm or more, or by removing the adhesive property. A resin film having the film itself may be used.
μm to 50 μm, preferably 10 μm to 2 μm.
The thickness is preferably 5 μm. If the film thickness is too small, dielectric breakdown occurs due to the applied voltage between the second electrode group and the third electrode group, which is not preferable. If the film thickness is too large, a problem such as disconnection occurs when stacking the third electrode group. It is not preferable.

(6) Next, as described in (1) and (2) above, a third electrode group (second band electrode layer) is formed on another transfer substrate to prepare a transfer plate. Then, as shown in FIG. 17, it is superposed on the electric insulating substrate on which the electric insulating layer 22 having the adhesive layer 23 is formed, and the second electrode group is formed on the extraction electrode via the electric insulating layer 22 having the adhesive layer 23 via the electric insulating layer 22. 3
By transferring the electrode group, a multilayer electrode wiring board shown in FIG. 13 is manufactured.

In the above description, first, on the electrically insulating substrate,
The first strip-shaped electrode layer was formed, and then the second strip-shaped electrode layer was laminated with a part of the insulating layer interposed therebetween. On the contrary, first, the second strip-shaped electrode layer was formed on the electrically insulating substrate, Next, the first strip-shaped electrode layer may be laminated via an insulating layer.

On the multilayer electrode plate shown in FIG. 13, an electrically insulating film such as a 25 μm-thick polyethylene terephthalate film, a polyimide film or the like is laminated as an overcoat layer, or an epoxy resin or the like is applied, and then a 25 μm-thick film is applied. By laminating an electrically insulating film such as a thick polyethylene terephthalate film or a polyimide film, for example, the stator in the electrostatic actuator shown in FIG. 2 is manufactured.

In addition to the case where the stator and the mover have a square shape as shown in FIG. 2, the electrostatic actuator of the present invention has a structure in which the stator and the mover have a donut plate as shown in FIG. It is also possible to adopt a structure in which a strip-shaped electrode layer and concentric extraction electrodes are arranged on the electrically insulative substrate 2 extending radially from the center of the circle.

[0037]

In the electrostatic actuator according to the present invention, the same waveform is always applied to the extraction electrodes of the stator and the moving element, and repulsion occurs by electrostatic force between three opposing extraction electrodes. Is positioned between the other two extraction electrodes, which prevents the movable element from being displaced in a direction perpendicular to the driving direction when the movable element is driven. It becomes possible.

Further, in the method of manufacturing the stator or the moving element, when three kinds of electrode groups are laminated on the electrically insulating substrate, each electrode is multilayered through an insulating layer.
The electrode pitch can be reduced to about 10 μm, the arrangement density of the strip electrodes in the stator can be increased, and high output and low voltage driving of the electrostatic actuator can be achieved. In addition, the thickness of the electrically insulating substrate can be reduced, and the overall capacitance can be reduced when an electrostatic actuator is stacked to form an actuator.

Further, by laminating the electrode layers by transfer, disconnection of the electrode layer can be suppressed even if the electrode layer is laminated on another electrode layer via the insulating layer or even if there is a step due to the insulating layer. In addition, it is possible to increase the number of electrode layers that cannot be achieved by lithography and the like, and to simplify the operation steps.

Further, when a conventional through hole is formed, as the electrode pitch becomes finer, there is a limit to the miniaturization of the electrode pitch due to the influence of the diameter of the through hole.
Moreover, since it is necessary to drill through holes close to each other, there is a problem that rigid glass or the like cannot be used as the material of the base material. Does not change, so that an effective wiring area can be increased on a substrate having the same area, and a substrate such as glass can be effectively used.

Further, since an adhesive layer is formed on the entire surface of the electrically insulating substrate, it is not necessary to apply an adhesive again when laminating the overcoat layer, thereby simplifying the working process. Hereinafter, the present invention will be described in detail with reference to examples.

[0042]

【Example】

(Production of Stator) On a transfer substrate made of stainless steel, FIG.
The first strip-shaped electrode layer wiring portion shown in FIG.
Electrodes), a polyimide resin ink is laminated by screen printing, and an insulating layer 3 having a thickness of 1 μm is formed.
1 was formed.

Next, a copper electrode layer 33 was laminated by electroplating to a thickness of 1 μm on a transfer substrate on which no insulating layer had been formed, thereby producing a transfer plate shown in FIG.

On the other hand, an acrylic pressure-sensitive adhesive (PE, manufactured by Nippon Carbide Co., Ltd.) was placed on a polyimide substrate having a thickness of 25 μm.
-118) is applied to form an adhesive layer 21 having a thickness of 2 μm, and then the transfer plate prepared above is overlapped and pressure-bonded to form an electrode pattern (first band-shaped electrode layer) on the transfer plate on a polyimide substrate. Transcribed above (FIG. 16).

Next, as shown in FIG. 17, a polyimide film having a thickness of 25 μm and having an adhesive applied to both surfaces thereof was attached onto the extraction electrode portion of the second electrode group, and the insulating layer 2 was formed.
2 was coated.

Next, an insulating layer is formed on another stainless steel transfer substrate in the same manner as described above except for the second strip-shaped electrode layer wiring portion composed of the third electrode group, and a copper electrode layer is further formed and transferred. After preparing the plate, the above-prepared polyimide substrate having the first band-shaped electrode layer was overlapped with each other by aligning the respective electrode groups, roller-pressing in the same manner as described above, and transferring the second band-shaped electrode layer. The multilayer electrode wiring board shown in FIG. 13 was produced at a strip electrode pitch of 320 μm. Furthermore, after applying an epoxy resin to the multilayer electrode wiring board with a thickness of 2 μm,
A polyimide film having a thickness of 25 μm was laminated using an adhesive to obtain a stator having a total thickness of 55 μm.

On this stator, a movable element produced in the same manner as described above except that the wiring position of the extraction electrode was adjusted as shown in FIG. 3 was arranged as shown in FIG. 2, and the extraction electrodes 25A and 25A '. Is connected to Φa in the three-phase power supply, the extraction electrodes 26A and 26A ′ are connected to Φb in the three-phase power supply, and the extraction electrodes 27A and 27A ′ are connected to Φc in the three-phase power supply. At a voltage of ± 500 V, Φa (−): Φb (0):
Φc (+) → Φa (0): Φb (+): Φc (−) → Φ
Voltage was applied in the order of a (+): Φb (−): Φc (0), and evaluation was performed. As a result, no displacement occurred and good driving was shown.

[Brief description of the drawings]

FIG. 1 is a sectional view of an electrostatic actuator.

FIG. 2 is a perspective view of the electrostatic actuator of the present invention.

FIG. 3 is a cross-sectional view taken along a line AA in FIG. 2, and is a diagram for explaining a positional relationship between a moving member and a stator.

FIG. 4 is an explanatory diagram of a sequence of applying a voltage to an extraction electrode in FIG. 3;

FIG. 5 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 6 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 7 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 8 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 9 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 10 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 11 is an example of a combination of extraction electrodes in a moving element and a stator when a three-phase power supply is used.

FIG. 12 is a cross-sectional view of the electrostatic actuator of the present invention, for explaining a manufacturing method.

FIG. 13 is a view showing a multilayer electrode wiring board in a moving element or a stator of the electrostatic actuator of the present invention,
(A) is a perspective view and (b) is a sectional view.

FIGS. 14A and 14B are views showing a transfer plate used for manufacturing the multilayer electrode wiring board of FIG. 13, wherein FIG.
(B) is a sectional view.

FIGS. 15A and 15B are diagrams showing a state in which an adhesive layer is formed on an electrically insulating substrate in manufacturing the multilayer electrode wiring board of FIG. 13; FIG. 15A is a perspective view, and FIG. It is.

FIGS. 16A and 16B are diagrams showing a state in which a first strip-shaped electrode layer is transferred to an electrically insulating substrate in manufacturing the multilayer electrode wiring board of FIG. 13, wherein FIG. 16A is a perspective view, and FIG. It is sectional drawing.

17A and 17B are diagrams showing a state in which an insulating layer is laminated on a first strip-shaped electrode layer in manufacturing the multilayer electrode wiring board of FIG. 13; FIG. 17A is a perspective view, and FIG. FIG.

FIG. 18 is a diagram showing another electrostatic actuator according to the present invention.

[Explanation of symbols]

1 is a stator, 2 is an electrically insulating substrate, 3 is an electrically insulating film, 10 is a moving element, 25 to 27 are strip electrodes on the stator, and 25 'to 27' are strip electrodes on the moving element.
5A to 27A are extraction electrodes on the stator;
A 'to 27A' are extraction electrodes in the moving element.

Claims (1)

(57) [Claims] 1. A stator on which a plurality of strip-shaped electrodes forming a driving unit are wired on an electrically insulating substrate, and a plurality of strips mounted on the stator and forming a driving unit on the electrically insulating substrate. Electrodes are wired, and the switching of the phase of the applied voltage to each of the strip electrodes in the stator and the slider causes the slider to float and drive in the electrostatic actuator. The extraction electrode of the movable element and the extraction electrode from the strip-shaped electrode of the movable element are wired on the respective electrically insulating substrates in the same direction as the moving direction of the movable element, and the wiring position of the extraction electrode of the stator and the extraction of the movable element The wiring positions of the electrodes are opposed to each other in at least one pair, and wiring is performed so that a voltage of the same polarity is applied to the opposed electrodes. Further, one of the extraction electrodes of the combination of the extraction electrodes of the opposed stator and the moving element is divided into two and wired so as to be opposed to the other strip-shaped extraction electrode at equal intervals. Electrostatic actuator.