JP3267601B2 - DC current extraction tank with regulator - Google Patents

Abstract

The titanium anode container (56) of electroplating apparatus is cube shaped, with its rear wall parallel to or against the container (50) wall. A titanium spacer maintains a set gap between the rear and leading anode container walls. The carrier surface can be adjusted in relation to the surface of the anode container. The electroplating apparatus has a container (50) for the electrolyte (58), with at least one wall angled against the vertical. The titanium anode container (56) is filled with an anode material. An outlet surface (89) for ions is on the surface of the carrier (87) acting as the cathode, where they are deposited, facing the anode container (56). The anode container (56) is cube shaped, with its rear wall parallel to or against the container (50) wall. A titanium spacer maintains a set gap between the rear and leading anode container walls. The carrier surface can be adjusted in relation to the surface of the anode container.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for direct current deposition of a metal layer on a substrate, the apparatus comprising an electrolyte container and an anode material, and a substrate facing the anode container. An anode container having a substantially flat outlet surface for metal ions derived from the anode material deposited on the surface, wherein the substrate functions as a cathode, and the surface of the substrate is perpendicular to a vertical line. A substrate holder that is inclined and is disposed substantially parallel and away from an outlet surface of the anode container facing the substrate surface, and is coupled to a driven shaft orthogonal to the substrate surface; The driven shaft is supported by driving means on a container cover, and the cover is rotatably mounted around a pivot shaft of pivot means mounted on the container side opposite the anode container. It consists of

[0002]

2. Description of the Related Art Such devices are used, for example, in the electroforming process of compression tools or dies, in particular of nickel products. These compression tools are used to manufacture disks such as compact disks (CD), laser disks (registered trademark) and other information medium disks by compression or injection molding. The above-mentioned types include an original type such as a so-called glass master and a duplicate product thereof, and are intermediate types used for manufacturing a compression tool. Types retain their information in relief on their surface. The surface structure is transferred to a compression tool by means of electroforming duplication. When the compression tool is used for injection molding or compression molding, information included in the surface structure is written on the surface of the plastic material.

[0003] In the case of optical discs, including compact discs, the relief structure modulates the laser beam light so that the information provided on the surface of the plastic body can be read.

For the production of compression tools or dies, a metal layer, usually a nickel layer, is an insulating substrate having an electrically conductive thin layer, for example a substrate made of glass or a metal substrate, for example nickel. Folded up, the substrate surface in each case has a relief structure containing the information to be read. The smallest information unit, the so-called pit, has a spatial wavelength in the micrometer range, and the adjacent information track spacing is also in the micrometer range. Since the substrate surface contains thousands of millions (10 ⁹ ) of information units and the corresponding precision structures in the micrometer region to be transferred to the metal layer, the metal deposition process must meet very high standards. No. For example, the deposited metal layer must be of minimal grain size and tensionless.
Furthermore, the thickness of the deposited metal layer must be relatively large. For example, a compression tool manufactured by metal bending for manufacturing a compact disc requires a thickness of 295 μm ± 5 μm. Furthermore, the unfolding step needs to be performed at a high speed. In addition, the device for direct current extraction must be small in size and operationally simple.

[0005]

An important requirement when forming an electroformed metal layer on a substrate surface is that the thickness of the layer must be uniform. Throughout the entire substrate surface, the thickness should only vary within narrow limits. If these conditions are not fulfilled, the optical disc produced by this metal layer technology will be of poor quality.

[0006] Such an apparatus is disclosed in EP-A-0 0586.
49. The anode container filled with the anode material is inclined with respect to the vertical. Its exit surface is essentially parallel to the substrate surface, and the substrate is supported by an axially driven substrate holder. The metal layer deposited on the substrate by known means shows a considerable variation in the layer thickness through the substrate surface.

It is an object of the present invention to provide an apparatus for direct current extraction of a metal layer with reduced layer thickness variations throughout a relatively large surface area substrate.

This object is achieved in known devices by making the substrate surface adjustable with respect to the anode vessel outlet surface facing the substrate surface.

[0009]

The present invention comprises an anode,
It is based on the notion that non-uniformity of the current distribution in the space between the substrate and the substrate functioning as the cathode is a fundamental cause of the thickness variation. Preferably, the current lines are as uniform and homogeneous as possible in the form of parallel lines between the anode vessel and the substrate surface. In practice, because the electrical resistance along the line between the exit surface and the substrate surface is not constant, the uniformity of the current line distribution is likewise reduced and the metal layer grows at different thicknesses on the substrate surface. By changing the position of the substrate relative to the position of the exit surface of the anode container, for example, by changing the mutual spacing or changing the relative surface inclination, etc., along the line between the exit surface and the substrate surface And can affect the current distribution. In this way the current distribution on the substrate surface is homogenized and also results in a uniform growth of the metal layer.

It is theoretically possible to change and adjust both surfaces, namely the substrate surface and the outlet surface, relatively simultaneously. However, in reality, it is advantageous to keep either the substrate surface or the exit surface in a stable position and change the position of the corresponding other surface. Preferably, the substrate surface is used as an adjustable surface, since this surface is connected via a substrate support to a cover that prevents foreign objects from entering the container holding the electrolyte during operation. The position of the cover can be adjusted from the outside, or the position of the substrate holder in contact with the cover can be easily adjusted from the outside.

In a preferred embodiment of the present invention, the axis of the pivot axis of the cover is located in a plane parallel to the central axis of the drive shaft and crosses the clamp plate of the substrate support, and the cover is closed. Characterized in that it is movable towards the anode container in order to reduce the distance between the substrate surface and the outlet surface of the anode container.

In practice, when the distance between the substrate surface and the outlet surface of the anode container is reduced, the metal ion extraction speed increases. This is because the electric resistance along the straight line connecting the substrate surface and the exit surface decreases. As a result, the potential between the anode and the cathode is kept unchanged, but the current and the number of metal ions moving per unit time are increased. As the distance between the substrate and the anode vessel is reduced, the non-homogeneous current line distribution has the effect of increasing the non-uniformity of the deposition layer thickness. In order to homogenize the current line distribution, an insulating shield having an opening is provided between the anode container and the substrate. Because the shield is located close to the substrate, care must be taken to prevent collision between the clamp plate holding the substrate and the shield during the pivoting operation to open the cover. The feature of the above aspect is that, on the one hand, the cover is pulled away from the anode container so as to increase the distance between the substrate and the outlet surface when opening the cover, while reducing the distance between the substrate and the outlet surface of the anode container. Can be pulled in the direction of When pivoting the cover, the edge of the clamp plate passes through the shield a sufficient distance from itself. Another aspect of the invention that is important for achieving a uniform thickness of the layer on the substrate surface involves an anode vessel. As noted above, it is generally desirable that the exit surface for metal ions be parallel to the substrate surface.

[0013] The anode container contains the material to be deposited,
The material is in the form of a small material piece, for example, a nickel piece. During operation of the direct current draw tank, the anode vessel is refilled with pieces of material to maintain a high filling level inside the anode vessel. This is necessary to ensure that the titanium material, which is the material of the anode container, does not dissolve in the electrolyte and that the passivation is maintained. Conventional anode vessels are known to deform during only a short period of use, for example, an initially cubic anode vessel may become swollen during operation, or its outer surface may undulate. This may be due to the densification of the anode material that is corroded during the unfolding operation. In particular, when the front surface of the anode container is deformed and the front surface includes an outlet surface, the current line distribution between the outlet surface and the substrate surface changes, causing a change in the layer thickness over the entire surface of the deposited metal layer.

According to one aspect of the invention, a titanium spacer means is provided between the rear and front walls of the anode vessel to solve this problem.

This spacer means ensures that the outlet surface is maintained at a constant spacing relative to the rear wall of the anode vessel. The parallel plane installation of the outlet surface and the substrate surface is maintained even when the anode material is densified between operations.

Preferably, the spacer means comprises a plurality of titanium screws which connect the front and rear walls, respectively, and extend through titanium spacer sleeves. Preferably, the screw head is located in the front and a corresponding threaded hole is located in the rear wall. This type of spacer means has a simple structure and is easy to realize. Within the front wall, including the outlet surface that tends to bulge and undulate during operation, the number of screws and spacer sleeves is higher than in other ranges.

Another embodiment of the present invention relates to power supply to an anode container. In order to achieve high speed deposition, a current, such as a significant amperage, 90 amperes, must be supplied to the anode vessel. Therefore, reliable contact must be ensured. Furthermore, the anode conductor and the contact means for forming a contact between the anode conductor and the anode container are provided in the electrolyte container such that the influence on the current line distribution in the electrolyte entering by the current supply element is minimized.

[0018] EP-A-0 086 649, as already mentioned, is known to provide an anode conductor in the lower area of the electrolyte container and to provide a terminal as a contact means for making an electrical connection with the anode conductor. Have been. Due to the reduction of the contact resistance, contact pressure is often generated by the screw connection means. Such a screw connection is due to electrolyte deposition,
There is a concern that the nut or screw will be stuck in the wrong position, damaging the screw or making it unfit for use. The coupling between the contact means and the anode conductor causes a decrease in contact pressure to the extent that overheating occurs at the contact point when a strong current flows, and the direct current discharge tank is located near the contact point due to plastic melting. Can even be destroyed. Thus, there is provided a device for direct current deposition of a metal layer on a substrate, wherein the current supply to the anode container is safe and reliable and the anode container can be easily installed without complicated operation. Issues to be provided arise.

According to the invention, the contact means is a clip connector which can be attached to or detached from the anode conductor and which can be brought into spring-pressure contact with the anode conductor.
tactstrip). The clip coupler,
It provides the necessary contact pressure to avoid the loose contact points that cause such disadvantages. The clip coupler can be easily attached to the anode container. This allows the anode container to be changed quickly without the need for time consuming assembly steps. Due to the resilient pressure of the clip coupler, the contact points are cleaned by the spring pressure of the clip coupler each time the clip coupler is applied to the conductor. This prevents electrolyte buildup at the contact points and ensures low contact resistance.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 schematically shows the production of a music compact disc. The mold used during the manufacturing process has a metal layer formed by direct current extraction in a device according to the invention. The quality of the metal layer is necessary for the reproduction quality of the final product, for example a music signal recorded on a compact disc.

The manufacturing stages are roughly divided into four groups A, B, C and D. Group A is a glass master (master) manufacturing step, B is a compression tool manufacturing step, C is a molding step, and D is a finishing step.

The starting point for the production of a glass master is the creation of a master magnetic tape (step 10), in which music information is digitally recorded on the magnetic tape with very high precision. For the manufacture of a glass master (manufacturing step group A), a photoresist thin film is formed on a polished glass disk (steps 12 and 14).

In the next step (step 16), the photoresist is exposed with a focused laser beam modulated by digital information on the master magnetic tape.

In the next development step (step 18), the exposed portions of the photoresist film are removed, leaving a relief-like photoresist structure on the glass disk. This structure contains, in pit form, digital information captured from a master magnetic tape.

In the next step (step 20), the relief-like structure is coated with a thin electrically conductive layer, for example a nickel layer. A glass master for a compact disc is obtained as an intermediate product.

Next manufacturing step group, group B
Relates to the manufacture of compression tools. In the next step 22,
A metal mold, a so-called father, is produced in a direct current device according to the invention by depositing a thick nickel layer, for example a 500 μm thick layer, on a thin electrically conductive layer of a glass master in a direct current extraction step. You. The father has a relief structure complementary to the glass master. The father is a tool for manufacturing compact discs.
Could be used directly. However, the father is usually called a mother and is used to create a mold made of nickel in other electroforming processes.

Subsequently, the compression tool is formed as a negative copy from the mother in another direct current extracting step (step 26). The mold produced in this step is called a son or stamper and is used as a compression tool for mass production. A number of mothers or suns are produced which are used for compact disc production in different plants.

The following molding (manufacturing step group C)
It comprises an injection molding or compression molding process during which the relief structure of the compression tool is transferred to a plastics material (step 28). The digital information (step 10) initially contained on the master magnetic tape is now contained in a disc-shaped plastic material as a relief or so-called pit structure, where one pit is the smallest unit of information. And has a recessed shape on the surface of the plastic material.

Subsequent finishing (manufacturing step group D)
Comprises coating the plastic material surface with a thin aluminum reflective layer by a sputtering process. By means of the reflective layer, the scanning laser beam is modulated when reading information, and the initial music information is reproduced from the laser beam. In a final manufacturing step 32, the compact disc is coated with a transparent protective layer that protects the reflective layer from scratches or corrosion.

In this example, the steps for manufacturing a music compact disc (audio CD) have been described. Data compact discs, laser vision discs and other optical discs with pit structure information are manufactured in a similar or similar manner.

The relief pit structure on the reflective layer of the compact disk has extremely small dimensions, for example, a pit width of about 0.3 mm.
5 μm, the depth is about 0.1 μm, the length varies between 1 and 3 μm, and the distance between adjacent tracks is about 1.6 μm. In view of the small size of these structures, various DC current steps for the production of various molds are very strict standards,
It is understood that strict criteria must be met, especially with regard to the uniformity of the metal layer thickness over the entire surface. In relation to the injection molding process for the production of compact discs, large changes in thickness cause problems when releasing the disc from the mold,
Further, it is difficult to form a protective layer thereafter. In addition, large changes in thickness do not allow the optical scanning sensor to adequately compensate for the height changes occurring on the compact disc during rotation of the compact disc at high speeds, thereby resulting in information loss.

FIG. 2 is a diagram of a DC current device (40) including a DC current extracting tank 42. In this DC current extraction tank,
Many types, such as fathers, mothers, stampers (suns) are formed by direct current extraction of metallic nickel. At the base of the direct current device 40 is a cleaning unit 44 for cleaning or filtering the electrolyte. Head 46
Includes a current control and power unit for controlling the direct current process. The rectifier for the required high DC current production is
Controlled by computer. The components in contact with these electrolytes are made of polypropylene plastic or titanium. The clean room filter 48 is installed on the direct current extraction tank 42. As shown in FIG. 2, the direct current extraction tank 42 has a 2
A container 50 having a plurality of outer walls. The other outer wall (not shown) is vertical. The driving means 54 is installed on the cover 52 of the container 50. The driving means will be described in more detail later. A removable cover plate 51 is provided adjacent to the cover 52 and is separated therefrom by a separation gap 53. Inside the container 50 is an anode container 56 made of titanium, which can be accessed by an operator when the cover plate 51 is opened.

FIG. 3 shows a DC current extraction tank 42 according to the present invention.
FIG. The anode container 56 is filled with a piece of nickel (also called pellet or flat) and filled with an electrolyte 58 and its outer walls 60, 62.
Is installed in a container 50 inclined at 45 degrees with respect to a vertical line. The anode container 56 is installed in parallel with the outer wall 62 of the container 50. On its top side, it supports a clip coupler 66 that is electrically coupled to an anode conductor having a circular cross section. The clip coupler 66 can be easily detached from the anode conductor 68 so that the anode container 60 can be separated from the container 50 by an operator.

The cover 52 is connected to the base of the direct current device 40 or the edge of the container 50 by a pivot means 70. Therefore, the cover 52 is pulled up in the direction of the arrow 72 to approach the inside of the container 50. The adjusting means 74 is installed on the cover 52. Adjustment means 7
4 comprises an L-shaped plate 76 and an adjusting plate 78 coupled to the L-shaped plate by screw means. The adjusting plate 78 supports a driving means 54 composed of a motor 82.

The motor 82 drives a drive shaft 84 via a transmission gear. The clamp plate 86
It is installed at the end of the drive shaft 84. The substrate 87 from which nickel is bent is clamped by the clamp plate 86. By adjusting the screw of the adjusting means 74, the clamp plate 86 and the substrate 87 are adjusted.
Is positioned opposite the substrate and parallel to the planar outlet surface 89 of the anode vessel for nickel ions, or the distance between the substrate 87 and the anode vessel 56 is precisely adjusted.

A septum 88, which is rigidly connected to the outer wall 60 of the container 50 and has a filtering element 85, is located between the clamp plate 86 and the anode container 56. Same filtration element 85
Is an induction shield 9 located on the opposite side to the partition wall 88.
This prevents small particles or mud of the anode material from entering the zero gap. The induction shield 90 includes a handle portion 90a useful for insertion thereof. In the space between the induction shield 90 and the substrate 87 fastened to the clamp plate 86, a nozzle 92 for injecting the purified electrolyte 58 is provided below the induction shield 90. The electrolyte is supplied through a supply tube 94 shown schematically. For the sake of clarity, the drainage means 58 required for the electrolyte is not shown in FIG.

FIG. 4 is a sectional view of the upper portion of the driving means 54 installed on the cover 52. The upper part is provided with an adjusting plate 78 by means of a screw 96 which is connected to a threaded hole 98.
Fixed to For a better understanding of the arrangement of the binding members on the adjusting plate 78, FIG.
Is referred to. The L-shaped plate 76 is located opposite the adjusting plate 78 and is separated therefrom by a distance a. The adjusting plate 78 is mounted on the L-shaped plate 76 by means of adjusting screws 100 (only one is shown in FIG. 4).
The adjusting screw 100 is guided into a threaded hole 101. By rotating the corresponding adjusting screw 100, the angular position and distance of the adjusting plate 78 with respect to the corresponding L-shaped plate 76 are changed, thereby the substrate 87 surface position corresponding to the anode container outlet surface 89 facing the substrate 87. Is adjusted. The adjusting plate 87 with the driving means 54 is fixed to the L-shaped plate 76 by means of screws 103 which extend into the holes 105 and engage with the threaded holes 107. For a better understanding of the drawing, the through hole 105 is shown only in FIG. 5, while the threaded hole 107 is shown only in FIG.

The L-shaped plate 76 is fixed to the solid stainless steel plate 102 mounted on the cover 52 by means of screws 104 by welding or screw means. The stainless steel plate 102 is bent close to the pivot means 70 and is fixed on the cover 52 by means of screws 104. The drive unit 55 partially protrudes into the cover 52 and the oval opening 116 (see FIG. 6) of the stainless steel plate 102 installed on the cover 52. Electrolyte 5
8 to protect the driving means 54 from the protective cover 10.
Surround with 6. Shaft 84 with insulating layer 108 is sealed against electrolyte ingress by means of sealing member 110. A protective tube 112, one end of which extends below the level 114 of the electrolyte 58, is provided as a protection against splashes during rotation of the shaft 84.

FIG. 5 is a top view of the adjustment plate 78 with a threaded hole 98 for mounting the drive unit 55. The angular position and distance of the adjusting plate 78 corresponding to the L-shaped plate 76 are determined by the four screws 1 guided to the threaded hole 101.
00 means. Threaded hole 10
A through-hole 105 in the adjustment plate 78 parallel to and located a small distance is adapted to receive four screws 103 that firmly couple the drive unit 54 and the L-shaped plate 76. The two recesses 109, 109 are provided to reduce the weight.

FIG. 6 involves a stainless steel plate 102 and an L-shaped plate 76, but with driving means 54 and pivot means 70.
FIG. 6 is a top view of the cover 52 with the cover removed. The cover 52 is connected to the stainless steel plate 102 by means of screws 104. The through hole 107 of the L-shaped plate 76 is
To the L-shaped plate 76. The figure clearly shows the oblong opening 116 into which the driving means 54 partially enters (see FIG. 4). The threaded hole 118 is provided at the upper end of the stainless steel plate 102 and the threaded hole 118 is provided for mounting a flange (not shown). A driving force acts on the flange to open and close the cover 52. Recess 111 in L-shaped plate 76
Is provided for weight reduction.

FIGS. 7 and 8 show a stainless steel plate 102 with associated pivot means 70. Same pivot means 70
Is only partially shown. Stainless steel plate 102
The upper L-shaped plate 76 has been omitted for clarity. In this example, the stainless steel plate 102 has a threaded hole 105 for attaching the L-shaped plate 76 by screw means. FIG. 8 is a side view of the structure of FIG.
The pivot means 70 symmetrical about the center line M1 includes two extension pieces 120 welded to the stainless steel plate 102. The upper pivot bearing 122 is attached to each extension piece 1.
The stainless steel plate 102 is formed at an end remote from the stainless steel plate 102. Spacer member 126 is axially mounted in upper pivot bearing 122 and extends over the entire width between the two extension pieces 120. The spacer member 126 includes a lower pivot bearing 128 that supports the hinge 134 so as to pivot. The hinge 134 is fixed in the groove-shaped recess 161 on the base plate 160 by a screw 135. The hinge 134 is a long hole 13
7, which is adjustable along the up and down arrow p1. The base plate 160 also has a long hole 163 into which screws can be inserted to mount the plate on the edge of the container 50 or to the frame of the direct current device. Base plate 160
Can thus be adjusted in the direction of the up and down arrow p2. FIG.
Shows the side and top surfaces of the base plate 160 having the elongated holes 163. The groove 161 has a threaded hole 161a for mounting the hinge 134.

FIG. 10 shows a specific embodiment of the pivot means 70 in different operation stages A, B and C when the cover 52 is opened or closed. The pivot means 70 includes an upper pivot bearing 122 having a pivot shaft 124.
Thus, the extension piece 120 coupled to the spacer member 126 is coupled to the stainless steel plate 102. Lower pivot bearing 1 having lower pivot shaft 130
By means of 28, the spacer member 126 is coupled to a pivot lever 132 located in a hinge 134. The hinge 134 comprises a pivot bearing 136 having a pivot axis 138 and is rigidly connected to the base plate 160, which is only indicated in the figure and which is formed over the entire edge of the container 50. Is preferred.
The pivot lever 132 has a lower stop surface 1 that takes a small acute angle w1 (counterclockwise with respect to the vertical line) (see stage B).
42. Further, the pivot lever 132 has an upwardly inclined stop surface 144 that takes a small acute angle W2 (clockwise with respect to a vertical line). The spacer members 126 face the stop surfaces 142, 144 and correspond to the corresponding continuous planar stop surfaces 14.
6,148.

The operation of the pivot means 70 will be described below in comparison with the operation steps A, B and C. Arrow G at the top of the figure indicates the direction of gravity, that is, the vertical line. In the state raised in operation stage A (in this example, the included angle W3 taken is approximately 50 degrees), the stop surface 146 stops at the lower stop surface 142. The center line 127 of the spacer member 126 is slightly inclined with respect to the vertical at an angle W 1, and the stop surface 146 is pressed against the stop surface 142 by the weight of the cover 52.

In operation phase B (closed cover), the cover 52 is pivoted about the pivot axis 124 in the direction of arrow G, during which the stop surfaces 146 and 142 remain in contact with each other. As a result, the small interval or interval b is different between the front edge of the pivot lever 132 and the bent stainless steel plate 1.
02 is formed.

In the operation stage C, the cover 52
The stop surface 148 is moved in the 50 direction until it comes into contact with the upper stop surface 144. As the stop surface 144 is tilted at the angle W2, the pivot bearing 124 moves to the right, where the distance b increases. To achieve height adaptation, the pivot lever 132 rotates clockwise about the pivot axis 138 by a small angle W4. Thanks to the installation according to FIG. 7, the distance between the substrate 87 clamped on the clamp plate 86 and the anode container outlet surface 89 facing the substrate is reduced, thereby accelerating the unfolding process. The nickel layer
In this way, it is formed with a high total current and a constant voltage.

To open the cover 52, the cover 52 is moved in the direction opposite to the arrow 150 (see operation step B) and is raised (operation step A). The distance between the surface of the clamp plate 86 facing the anode container 56 and the induction shield 90 (see FIG. 3) is increased by movement in the direction opposite to arrow 150, whereby the clamp plate 86
Can be safely passed through the shield 90 without risk of damaging the clamp plate 86 or the induction shield 90 when the is opened.

FIG. 11 shows another embodiment of the pivoting means 70 in different operating stages A, B and C. Like members are indicated by like numbers. Spacer member 12
6 comprises a lower stop surface 152 and a rear stop plate 156 which is stopped against the inclined stop surface 157 of the hinge in the operating phases A and B. The lower stop surface 152 of the spacer member 126 comes into contact with the flat stop surface 158 on the base plate 126 in operation phase C. In operation phase A, cover 52 is raised and rear stop surface 156
Comes into contact with the stop surface 157.

In the operating phase B, the cover 52 is in the lowered position while the stop surfaces 156 and 157 remain in contact with each other. As a result, the distance between the base plate 160 and the bent stainless steel plate 102 is the distance b. Operation stage C
, The cover 52 moves in the direction of the arrow 156 toward the stop surface 1.
52 and 158 are moved to cooperate. Therefore,
The distance b increases.

As can be seen particularly well in operation stage C, the pivot shaft 124 has a spacer member 126.
Are not located on the center line 162. As a result, while moving the cover 52, the extension piece 120 is raised slightly along a circular path, thereby causing the cover 52 with respect to the container 50 to move.
Is reduced.

FIG. 12 is a sectional view of an upper portion of the anode container 56. It is essentially cubic and has a 4 mm thick, continuously sealed titanium back wall 170. The relatively thick rear wall 170 allows the anode container 56 to have mechanical strength. In the upper region, the region accessible to the operator, the anode container 56 is opened so that it can be easily filled with nickel pieces. For this purpose, the front wall 172 is also made of titanium and has a thickness of 2 mm,
It is bent in the area 174. U-shaped clip connector 176
Is welded to the bottom side of the bent portion of the front wall 172. The clip coupler 176 embraces the anode conductor 182 having a circular cross section at its legs 178 and 180. Same leg 178,
180 has a concave and funnel-shaped opening at its end and a clip coupler 17 on anode conductor 182.
Useful for sliding 6. In the process of sliding the clip coupler over the anode conductor, any electrolyte deposits that may have formed on the anode conductor 182 disappear. Anode conductor 182
The contacts 184, 186 on the top and legs 178, 180
Rubbed and cleaned. Other contacts 188 are formed at the base of clip coupler 176. This type of electrical coupling between the clip coupler 176 and the anode conductor 182 ensures low contact resistance and ease of handling of the anode container 56. The handlebar 190 is connected to the anode container 56.
It is installed on the side walls 192, 194 of the open area (see also FIG. 13). The handlebar 190 is connected to the electrolyte container 50.
The operator is grasped by the operator to put the anode container 56 in and out.

FIG. 12 shows the front wall 172 and the rear wall 1.
The screw 196 between the first and second 70 is shown. The flat head 198 of the screw 196 is flush with the front surface of the front wall 172. The central portion of the screw 196 extends to a spacer sleeve 197 whose ends are fastened to the front wall 172 and the back wall 170, respectively. The length between the ends is thus the front wall 172
And the back wall 170 are defined. Nickel pieces can be easily placed around the spacer sleeve 197. Threaded portion 20 of screw 196
0 mates with a threaded hole 202 in the strong back wall 170. The screw 196 is a part of the spacer means 208 which is a means for adjusting the distance and the level of the front wall 172 with respect to the rear back wall 170.

In this way, bulging or waving of the front wall 172 is compensated.

FIG. 13 shows the upper surface of the anode container 56.

The clip coupler 176 is connected to the anode container 5.
6 and thus form a large electrical contact surface for power supply. Front wall 172 and side wall 1
92, 194 are perforated to the upper edge of the clip combiner 176 at the periphery indicated by reference numeral 204;
). Thus, the surface of the front wall 172 provides an outlet surface 8 for releasing nickel ions from the anode vessel 56.
9 is formed. The anode container 56 has a rounded lower portion 206. Screw 196 and spacer sleeve 1
The arrangement of 97 forms a spacer means 208 for maintaining the flatness of the exit surface 89 and the distance from the strong back wall 170.

[0056]

According to the present invention, a titanium spacer means is provided between the rear wall and the front wall of the anode container. This spacer means has a simple structure and is easy to realize, to maintain a constant spacing of the front wall, including the outlet surface, which tends to bulge and undulate during operation, to the rear wall of the anode vessel. To ensure. The parallel plane installation of the outlet surface and the substrate surface can be maintained even when the density of the anode material during operation is increased.

[Brief description of the drawings]

FIG. 1 is a schematic view of an apparatus in a mold and a compression tool for manufacturing a compact disc manufactured by metal stamping, which is an important application field of the present invention.

FIG. 2 is a diagram of a DC current device including a DC current extraction tank.

FIG. 3 is a schematic view of a DC current extraction tank having a pivotable and movable cover.

FIG. 4 is a partial cross-sectional view of an adjusting means installed on a cover and a drive shaft.

FIG. 5 is a top view of an adjusting plate for adjusting a driving unit and a shaft driven by the driving unit.

FIG. 6 is a top view of the cover with the drive unit removed.

FIG. 7 is a top view of a stainless steel plate having pivot means.

FIG. 8 is a side view of the structure shown in FIG. 7;

FIG. 9 is a top view of a movable base plate of the pivot means.

FIG. 10 shows various different operating states of the pivot means when the cover is opened or closed.

FIG. 11 shows another specific embodiment of the pivot means in another different operation state.

FIG. 12 is a cross-sectional view of an anode container including a clip coupler and an anode conductor.

FIG. 13 is a front view of an anode container having titanium screws provided as spacer means.

[Explanation of symbols]

 Reference Signs List 50 container 56 anode container 58 electrolyte 87 substrate 89 outlet surface 170 back wall 172 front wall 208 titanium spacer member

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Wittlt Kraukzky Germany D-33334 Gütersloh Auf dem Reck 122 (72) Inventor Klaus Prenzell Germany D-33334 Gütersloh Hirzeweg 17 (72) Inventor Rudolph Opitz Germany D-33332 Gütersloh Ewersgerdtweg 114 (58) Fields studied (Int. Cl. ⁷ , DB name) C25D 1/00 C25D 17/12 G11B 7/26

Claims (11)

(57) [Claims] 1. A device for direct current fold-out a metal layer on the substrate, less the apparatus is inclined to the vertical
Containers (5) each having one wall and holding an electrolyte (58).
0), and an anode container (56) made of titanium filled with an anode material.
But it includes an outlet surface for ions out folded on the substrate surface facing the anode container (56) to (89) above the substrate (87) functions as a cathode, the anode volume
The container (56) has its back wall (170) attached to the container (5).
In apparatus as installed in as in contact with at least a parallel is or the wall with respect to the wall of 0), titanium spacer means (208) is predetermined the back wall (170) the back of the anode container (56) to maintain the distance between the front wall (172) and
The device characterized by being installed between a wall (170) and said front wall (172). Wherein said spacer means (208) is, the <br/> front wall and (172) above the back wall (170) and then interconnecting Also the front wall and (172) above the back wall and (170) Titanium spacer sleeve (197) installed between
Comprising a plurality of titanium screws (196) extending, the Ne
Di head (198) is threaded corresponding to these on the installed also the back wall (170) on said front wall (172)
The apparatus of claim 1, wherein a drilled hole (202) is provided. 3. The back wall (17) closed continuously.
Device according to claim 1 or 2, wherein 0) has a thickness of 3 to 5 mm . 4. The front wall (172) has a perforated hole and a thickness of 1 to 3 mm .
3. The apparatus according to any one of 3. 5. An apparatus for direct current deposition of a metal layer on a substrate, comprising: a container (50) for holding an electrolyte (58); and a substrate (50) facing an anode container (56). An anode container (56) having an essentially flat front wall (172) as an exit surface (89) for the metal ions to be deposited and further filled with anode material; ) functions as a cathode, the anode container (56 to form an electrical coupling anode conductor for supplying an anode current to the anode container (56) and (182) also with the anode conductor (182)) above an apparatus having a contact means provided on, as the contact means in contact slip engagement also spring-biased to that than be desorbed Tokumata the anode conductor (182) on the anode conductor (182) Adapted clip combiner (1
76) An apparatus as designed as). Wherein the anode conductor (182) and the chestnut <br/>-up coupler and (176), but the anode container (56)
Full width formed by as extending across to Claim 5 Apparatus according to. 7. The anode conductor (182) The apparatus essentially formed by as a circle according to claim 5 or 6, wherein in the cross section. 8. The clip coupler (176) is, the leg portions of the anode conductor (182) to form a contact
8. A device as claimed in claim 5 , comprising a resilient U-shaped bracket carried by (178,180) .
The apparatus according to. 9. The U-shaped bracket (176) base <br/> The apparatus of claim 8, wherein formed by as stops on the anode conductor (182) of. 10. The clip coupler (176) is formed by as is installed on the anode container front wall (172) near the opening of the container for holding the electrolyte (58) (50) Apparatus according to any of claims 5 to 9 . 11. The apparatus according to handlebars which extend in the width direction of the anode container (190) is either the anode container (56) according to claim 10 comprising installed in the opening region of the.