JP3260901B2 - Electron multiplier - Google Patents

Electron multiplier

Info

Publication number
JP3260901B2
JP3260901B2 JP10289893A JP10289893A JP3260901B2 JP 3260901 B2 JP3260901 B2 JP 3260901B2 JP 10289893 A JP10289893 A JP 10289893A JP 10289893 A JP10289893 A JP 10289893A JP 3260901 B2 JP3260901 B2 JP 3260901B2
Authority
JP
Japan
Prior art keywords
dynodes
electron multiplier
connection
pin
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10289893A
Other languages
Japanese (ja)
Other versions
JPH06310084A (en
Inventor
浩之 久嶋
明 渥美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP10289893A priority Critical patent/JP3260901B2/en
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to EP94303077A priority patent/EP0622826B1/en
Priority to EP94303102A priority patent/EP0622827B1/en
Priority to EP94303103A priority patent/EP0622828B1/en
Priority to US08/234,153 priority patent/US5572089A/en
Priority to US08/234,157 priority patent/US5510674A/en
Priority to DE69404080T priority patent/DE69404080T2/en
Priority to US08/234,158 priority patent/US5619100A/en
Priority to EP94303076A priority patent/EP0622824B1/en
Priority to DE69404538T priority patent/DE69404538T2/en
Priority to DE69404079T priority patent/DE69404079T2/en
Priority to EP94303104A priority patent/EP0622829B1/en
Priority to US08/234,152 priority patent/US5491380A/en
Priority to DE69406709T priority patent/DE69406709T2/en
Priority to DE69403857T priority patent/DE69403857T2/en
Priority to US08/234,142 priority patent/US5498926A/en
Publication of JPH06310084A publication Critical patent/JPH06310084A/en
Priority to US08/764,242 priority patent/US5789861A/en
Application granted granted Critical
Publication of JP3260901B2 publication Critical patent/JP3260901B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • H01J43/06Electrode arrangements
    • H01J43/10Dynodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • H01J43/06Electrode arrangements
    • H01J43/12Anode arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • H01J43/06Electrode arrangements
    • H01J43/18Electrode arrangements using essentially more than one dynode
    • H01J43/22Dynodes consisting of electron-permeable material, e.g. foil, grid, tube, venetian blind
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/12Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/18Assembling together the component parts of electrode systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/32Secondary emission electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/34Photoemissive electrodes
    • H01J2201/342Cathodes
    • H01J2201/3421Composition of the emitting surface
    • H01J2201/3426Alkaline metal compounds, e.g. Na-K-Sb

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、多段に積層させたダイ
ノードによって入射電子流を増倍する電子増倍管に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron multiplier for multiplying an incident electron flow by multi-layered dynodes.

【0002】[0002]

【従来の技術】従来の電子増倍管及びその細部の構成を
図5〜図8に示す。この電子増倍管は、入射窓101の
下面に光電陰極106を備えた光電子増倍管を構成して
おり、有底円筒状の真空容器105内に、ダイノード1
02を複数段に積層させた電子増倍部107、アノード
103及びカソード104を配設している。各ダイノー
ド102は、その間に円板状のセラミックスペーサ10
8を介在させて、所定の間隔を空けて積層されている。
なお、このセラミックスペーサ108を各ダイノード間
に介在させることにより、ダイノードの周囲4か所に柱
状のセラミックスペーサ群109が形成されている。ま
た、外部電源端子に接続されるステムピン110は、等
間隔で12本、環状に配設されている。
2. Description of the Related Art A conventional electron multiplier and its detailed structure are shown in FIGS. This electron multiplier constitutes a photomultiplier having a photocathode 106 on the lower surface of an entrance window 101, and a dynode 1 is placed in a bottomed cylindrical vacuum vessel 105.
The electron multiplier 107, the anode 103, and the cathode 104, in each of which a plurality of layers 02 are stacked, are provided. Each dynode 102 has a disk-shaped ceramic spacer 10 therebetween.
8 are interposed at predetermined intervals.
By interposing the ceramic spacer 108 between the dynodes, columnar ceramic spacer groups 109 are formed at four locations around the dynode. Twelve stem pins 110 connected to the external power supply terminal are arranged at equal intervals in a ring shape.

【0003】各ダイノード102は、その周囲の4カ所
に固定用穴114を有しており、また径方向に突出する
平板状の接続端子115を備え、この各接続端子115
と該当するステムピン110とが、配線部材112によ
って電気的に接続される。
Each dynode 102 has fixing holes 114 at four locations around the dynode 102, and has flat connection terminals 115 protruding in the radial direction.
And the corresponding stem pin 110 are electrically connected by the wiring member 112.

【0004】[0004]

【発明が解決しようとする課題】このように、従来の電
子増倍管の構造は、接続端子115とステムピン110
との位置関係を考慮して形成されておらず、その長さや
形状を自由に変え得る配線部材112を用いることによ
って、これらの間の接続を行っていた。したがって、接
続部位に応じて、配線部材112を3次元的に加工する
必要があった。
As described above, the structure of the conventional electron multiplier tube includes the connection terminal 115 and the stem pin 110.
The connection between them is made by using the wiring member 112 which is not formed in consideration of the positional relationship with the wiring member 112 and whose length and shape can be freely changed. Therefore, it is necessary to process the wiring member 112 three-dimensionally according to the connection site.

【0005】また、接続端子115が図示したような平
板状であるため、配線部材112を接続する場合には、
この配線部材の端部を、接続端子115に沿うように折
り曲げる必要があった。
Further, since the connection terminal 115 has a flat plate shape as shown in the figure, when the wiring member 112 is connected,
It was necessary to bend the end of this wiring member along the connection terminal 115.

【0006】さらに、このように配線部材を用いること
により、この配線部材112の一端をステムピン110
に、他端を接続端子115に、それぞれ抵抗溶接する必
要があり、組立て作業の効率を低下させる1つの要因に
なっていた。この欠点は、製造する電子増倍管が小型に
なるほど、より顕著にあらわれ、この溶接作業には熟練
を要すこととなり、組立ての作業効率を一層低下させる
などの問題点があった。
Further, by using the wiring member as described above, one end of the wiring member 112 is connected to the stem pin 110.
In addition, it is necessary to resistance-weld the other end to the connection terminal 115, respectively, which is one factor that reduces the efficiency of the assembling work. This drawback becomes more conspicuous as the electron multiplier manufactured becomes smaller, and this welding operation requires skill and has a problem that the assembling work efficiency is further reduced.

【0007】本発明は、このような課題を解決すべくな
されたものであり、その目的は、電子増倍管を小形化す
る場合にも、容易に製造することができる電子増倍管を
提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to provide an electron multiplier that can be easily manufactured even when the electron multiplier is downsized. Is to do.

【0008】[0008]

【課題を解決するための手段】そこで、本発明にかかる
電子増倍管は、複数段に積層され、入射した電子流を増
倍する電子増倍部を構成する複数のダイノードと、各ダ
イノードに所定の電圧を与えるため、このダイノードの
積層方向に沿って延びる複数の接続ピンとを備える。そ
して、各ダイノードの外周部には、対応する接続ピンと
相対する位置に、この接続ピンと係合する係合部材を突
設しており、各段のダイノードの係合部材と各接続ピン
とを接続して構成する。
Accordingly, an electron multiplier according to the present invention is provided with a plurality of dynodes which are stacked in a plurality of stages and constitute an electron multiplier for multiplying an incident electron flow. And a plurality of connection pins extending along the stacking direction of the dynodes for applying a predetermined voltage. At the outer peripheral portion of each dynode, an engagement member that engages with the connection pin is protruded at a position facing the corresponding connection pin, and the engagement member of the dynode at each stage is connected to each connection pin. It is composed.

【0009】なお、この係合部材は、一対の案内片を備
えて構成し、この一対の案内片の間に接続ピンを導くも
のとして構成することもできる。
The engaging member may be provided with a pair of guide pieces, and may be configured to guide a connection pin between the pair of guide pieces.

【0010】また、接続ピンを、積層されたダイノード
の周囲に環状に配列し、各ダイノードの係合部材を、対
応する接続ピンと相対する位置にそれぞれ形成すること
が望ましい。
It is preferable that the connection pins are arranged annularly around the stacked dynodes, and the engaging members of each dynode are formed at positions corresponding to the corresponding connection pins.

【0011】また、接続ピンは、係合部材と接続される
端部付近を、この接続ピンの他の部位に比べて剛性の低
い金属材料によって形成することもできる。
Further, the connection pin may be formed of a metal material having a lower rigidity in the vicinity of the end connected to the engagement member than other portions of the connection pin.

【0012】また、このような構造を有する電子増倍管
は、さらに光電陰極を備えた光電子増倍管に適用するこ
ともできる。
Further, the electron multiplier having such a structure can be applied to a photomultiplier further provided with a photocathode.

【0013】[0013]

【作用】各ダイノードには、該当する接続ピンの位置に
対応して、予め係合部材を設けている。従って、組立て
の際には、各ダイノードの係合部材と各接続ピンとの位
置関係が一致する状態となり、この部位において、案内
部材と接続ピンとを溶接などによって接続すれば良い。
Each dynode is provided with an engaging member in advance corresponding to the position of the corresponding connection pin. Therefore, when assembling, the positional relationship between the engaging member of each dynode and each connection pin is in agreement, and in this portion, the guide member and the connection pin may be connected by welding or the like.

【0014】[0014]

【実施例】以下、本発明の実施例を添付図面に基づいて
説明する。
Embodiments of the present invention will be described below with reference to the accompanying drawings.

【0015】図1(a),(b)及び図2に、本実施例
にかかる光電子増倍管を示す。この光電子増倍管は、入
射光を受ける円形の受光面板1、その外周部に配設する
円筒形の金属側管3、及び基台部を構成する円形のステ
ム4によって真空容器を形成し、この内部に、入射電子
流を増倍する電子増倍部5を配設している。
FIGS. 1A, 1B and 2 show a photomultiplier tube according to this embodiment. In this photomultiplier tube, a vacuum vessel is formed by a circular light receiving surface plate 1 for receiving incident light, a cylindrical metal side tube 3 provided on an outer peripheral portion thereof, and a circular stem 4 constituting a base portion. Inside this, an electron multiplier 5 for multiplying the incident electron flow is provided.

【0016】受光面板1の下面には光電陰極2を設け、
この光電陰極2と電子増倍部5との間には収束電極6を
配設している。従って、光電陰極6から放出された各電
子は、収束電極6の影響によってその軌道が収束され、
電子増倍部5の所定の領域内に入射する。
A photocathode 2 is provided on the lower surface of the light receiving face plate 1,
A focusing electrode 6 is provided between the photocathode 2 and the electron multiplier 5. Accordingly, each electron emitted from the photocathode 6 has its trajectory converged by the influence of the focusing electrode 6, and
The light enters a predetermined area of the electron multiplier 5.

【0017】電子増倍部5は、正方形の平板状に形成し
たダイノード7を、複数段に積層して構成しており、各
段のダイノード7には、多数の電子増倍孔8をマトリク
ス状に配列・形成している。また、これら積層したダイ
ノード7の下部には、ダイノード9、及び最終段のダイ
ノード10を順に配設している。
The electron multiplier 5 is formed by stacking a plurality of dynodes 7 formed in the shape of a square plate in a plurality of stages, and each stage has a large number of electron multiplier holes 8 in a matrix. Are arranged and formed. Below the stacked dynodes 7, a dynode 9 and a dynode 10 at the last stage are sequentially arranged.

【0018】図3に拡大して示すように、各ダイノード
7、9、10の外周部には、後述するステムピン11と
接続するためのU字型の接続端子20をそれぞれ一体的
に突設している。接続端子20は、一対の案内用のガイ
ド片20aが前方に突出しており、その中央の凹部20
bは、ステムピン11の径と略同じ径を有し、この凹部
20b内にステムピン11を押し込むことで、接続端子
20とステムピン11とが嵌合する構造になっている。
As shown in FIG. 3 on an enlarged scale, U-shaped connection terminals 20 for connecting to stem pins 11 described later are integrally formed on the outer peripheral portions of the dynodes 7, 9, and 10, respectively. ing. The connection terminal 20 has a pair of guiding guide pieces 20a protruding forward, and a central concave portion 20a.
b has a diameter substantially the same as the diameter of the stem pin 11, and has a structure in which the connection terminal 20 and the stem pin 11 are fitted by pushing the stem pin 11 into the recess 20 b.

【0019】各ダイノード7、9、10には、所定のス
テムピン11と相対する位置に、各接続端子20が配設
されており、図1(b)に示すように、後述するステム
ピン11の配列位置に対応して、ダイノードの各辺に沿
って3カ所ずつ設けられている。
Each of the dynodes 7, 9, and 10 is provided with a connection terminal 20 at a position facing a predetermined stem pin 11, and as shown in FIG. Three positions are provided along each side of the dynode corresponding to the positions.

【0020】基台部となるステム4には、外部の電圧端
子と接続して、各ダイノード7、9、10などに所定の
電圧を与える計12本のステムピン11が貫通してい
る。ステムピン11は、立方形に積層されたダイノード
の周囲を囲むように、各辺に沿って3本ずつ配列してお
り、テーパ状のハーメチックガラス12によってステム
4に対して固定されている。また、各ステムピン11
は、その先端部が、対応する接続端子20に至る長さに
形成されており、図1(a)の例では、上から4段まで
のダイノード7と対応する4本のステムピン11とが接
続された状態を示している。なお、ステムピン11の材
質は、接続端子20に対応する部位付近は銅などの比較
的柔らかい材質で形成されており、これ以外の部分はス
テンレスなどの比較的堅い材質で形成されている。これ
によって、ステムピン11はステム4に対してしっかり
と固定されると共に、ステムピン11を接続端子20と
嵌合させる際に、ステム4部に余分な応力が加わること
を回避できる。また、ステムピン11の先端部を、若
干、内方へ傾けることで、接続端子20と嵌合させる
が、この作業を容易に行うことができる。なお、ステム
ピン11は、同じ材質で一体的に形成したものであって
も十分に適用することが可能である。
A total of twelve stem pins 11 are connected to an external voltage terminal and apply a predetermined voltage to each of the dynodes 7, 9, 10 and the like through the stem 4 serving as a base. Three stem pins 11 are arranged along each side so as to surround the dynodes stacked in a cubic shape, and are fixed to the stem 4 by tapered hermetic glass 12. In addition, each stem pin 11
In the example of FIG. 1A, the top end of the dynode 7 and the corresponding four stem pins 11 are connected to the corresponding connection terminal 20. FIG. The material of the stem pin 11 is formed of a relatively soft material such as copper near the portion corresponding to the connection terminal 20, and the other portion is formed of a relatively hard material such as stainless steel. As a result, the stem pin 11 is firmly fixed to the stem 4, and at the time of fitting the stem pin 11 to the connection terminal 20, it is possible to avoid applying extra stress to the stem 4. In addition, the tip of the stem pin 11 is slightly inclined inward to fit the connection terminal 20, but this operation can be easily performed. In addition, even if the stem pin 11 is integrally formed with the same material, it can be applied sufficiently.

【0021】図2に示すように、ステム4の底部の中央
には、終端部が圧着され封止された状態の金属チップ管
13が突出している。この金属チップ管13を介して、
真空容器内部へのアルカリ金属の導入、或いは残存する
ガスの排気などが行われ、この後、図示したように封止
される。
As shown in FIG. 2, a metal tip tube 13 whose end is crimped and sealed is projected from the center of the bottom of the stem 4. Through this metal tip tube 13,
An alkali metal is introduced into the inside of the vacuum vessel, or the remaining gas is evacuated, and thereafter, sealing is performed as shown in the figure.

【0022】このようなダイノード7、9、10を用い
て、光電子増倍管を組立てる場合には、各ダイノード
7、9、10などを組み込んだ状態で、各ダイノード
7、9、10の接続端子20と、対応するステムピン1
1との位置が一致するため、互いを直接、抵抗溶接など
によって接続するだけでよく、この接続工程を極めて容
易に行うことができる。また、接続端子20は、従来の
ような平板状ではなく、一端が開いたU字型に形成した
ので、ステムピン11がその内側に確実に収まり、従来
のようにステムピン11の先端部に曲げ加工を施す必要
もない。なお、接続端子20の凹部20bに、ステムピ
ン11を嵌合させた後、その両側のガイド片20aの先
端部同士を圧接することで、このステムピン11を接続
端子20の内側に保持した状態とすることもできる。こ
れによって、この後の溶接作業を容易に行うこともでき
る。
When assembling a photomultiplier using such dynodes 7, 9, and 10, the connection terminals of the dynodes 7, 9, and 10 are assembled with the dynodes 7, 9, and 10 assembled. 20 and corresponding stem pin 1
Since the positions coincide with each other, they need only be directly connected to each other by resistance welding or the like, and this connection step can be performed extremely easily. Further, since the connection terminal 20 is formed in a U-shape with one end open, instead of a conventional flat plate shape, the stem pin 11 is securely fitted inside the connection terminal 20, and the tip of the stem pin 11 is bent as in the conventional case. Need not be applied. After the stem pin 11 is fitted into the concave portion 20b of the connection terminal 20, the distal ends of the guide pieces 20a on both sides thereof are pressed against each other, so that the stem pin 11 is held inside the connection terminal 20. You can also. Thus, the subsequent welding operation can be easily performed.

【0023】本実施例では、接続端子20を、U字型に
形成する例を示したが、この形状に限定するものではな
く、例えば、図4に示す形状の他、C字型、V字型、コ
或いはハ字型など、その内側にステムピン11を受け入
れ、係合できる形態のものであれば良い。
In this embodiment, an example is shown in which the connection terminal 20 is formed in a U-shape. However, the present invention is not limited to this shape. For example, in addition to the shape shown in FIG. Any shape, such as a mold, a U-shape, or a C-shape, may be used as long as the stem pin 11 can be received and engaged inside thereof.

【0024】また、本実施例では、接続端子20の凹部
20bとステムピン11とを嵌合させる例を示したが、
必ずしも嵌合状態で収容する必要はなく、接続端子20
の内側にステムピン11が位置できれば良い。
In this embodiment, an example is shown in which the recess 20b of the connection terminal 20 and the stem pin 11 are fitted.
It is not always necessary to accommodate the connection terminals in the fitted state.
It suffices if the stem pin 11 can be positioned inside the inside.

【0025】さらに、本実施例で例示した接続端子20
を備えたダイノードは、光電陰極を備えた光電子増倍管
内に配設する例を示したが、勿論、電子増倍管内に配設
することも可能である。
Further, the connection terminal 20 exemplified in this embodiment
Although the example in which the dynode provided with is provided in the photomultiplier tube provided with the photocathode has been described, it is needless to say that the dynode can be provided in the electron multiplier tube.

【0026】[0026]

【発明の効果】以上説明したように、本発明にかかる電
子増倍管は、ダイノードの積層方向に沿って延びる複数
の接続ピンを有すると共に、各ダイノードの外周部に
は、前記接続ピンと相対する位置に、この接続ピンと係
合する係合部材を突設した。
As described above, the electron multiplier according to the present invention has a plurality of connection pins extending along the direction in which the dynodes are stacked, and the outer periphery of each dynode faces the connection pins. At the position, an engaging member that engages with the connection pin is protruded.

【0027】従って、互いに接続すべき接続ピンと係合
部材との位置関係が一致するので、この接続にあたっ
て、従来のように、配線部材を用いる必要がなく、ま
た、接続ピンを曲げ加工する必要もないため、この接続
作業を容易に実施することが可能となる。また、抵抗溶
接する箇所も、この係合部材との係合部位の一カ所で良
いため、組立ての作業効率を向上させることができる。
しかも、これらの効果は、従来に比べて小形の電子増倍
管を製造する場合に、一層顕著に発揮されるものであ
る。
Therefore, since the positional relationship between the connecting pin and the engaging member to be connected to each other coincides with each other, it is not necessary to use a wiring member for the connection as in the conventional case, and it is also necessary to bend the connecting pin. Since there is no such connection, it is possible to easily carry out this connection work. In addition, since the resistance welding may be performed at only one position of the engagement portion with the engagement member, the working efficiency of the assembly can be improved.
In addition, these effects are more remarkably exhibited when a small electron multiplier is manufactured as compared with the related art.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は、本発明にかかる光電子増倍管を示
し、金属側管を破断してその内部構造を示す側面図、
(b)は電子増倍管の上面図である。
FIG. 1A is a side view showing a photomultiplier tube according to the present invention, in which a metal side tube is broken to show an internal structure thereof;
(B) is a top view of the electron multiplier.

【図2】図1の光電子増倍管の底面図である。FIG. 2 is a bottom view of the photomultiplier tube of FIG.

【図3】ダイノードに設けた接続端子を拡大して示す斜
視図である。
FIG. 3 is an enlarged perspective view showing a connection terminal provided on a dynode.

【図4】接続端子の他の実施例を示す斜視図である。FIG. 4 is a perspective view showing another embodiment of the connection terminal.

【図5】従来の電子増倍管を示す側面図である。FIG. 5 is a side view showing a conventional electron multiplier.

【図6】図5の電子増倍管の上面図である。FIG. 6 is a top view of the electron multiplier of FIG. 5;

【図7】図5の電子増倍管の底面図である。FIG. 7 is a bottom view of the electron multiplier of FIG. 5;

【図8】図5の電子増倍管に備えられたダイノードを取
り出して示す平面図である。
FIG. 8 is a plan view showing a dynode provided in the electron multiplier of FIG. 5;

【符号の説明】[Explanation of symbols]

5…電子増倍部、7、9、10…ダイノード、11…ス
テムピン(接続ピン)、20…接続端子(係合部材)、
20a…ガイド片(一対の案内片)。
5: electron multiplier, 7, 9, 10, dynode, 11: stem pin (connection pin), 20: connection terminal (engaging member),
20a: Guide piece (a pair of guide pieces).

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01J 43/00 - 43/30 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) H01J 43/00-43/30

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 複数段に積層され、入射した電子流を増
倍する電子増倍部を構成する複数のダイノードと、 前記各ダイノードに所定の電圧を与えるため、このダイ
ノードの積層方向に沿って延びる複数の接続ピンとを備
え、 前記各ダイノードの外周部には、対応する前記接続ピン
と相対する位置に、この接続ピンと係合する係合部材を
突設しており、 前記各段のダイノードの係合部材と前記各接続ピンとを
接続してなる電子増倍管。
1. A plurality of dynodes that are stacked in a plurality of stages and constitute an electron multiplying unit that multiplies an incident electron flow, and a predetermined voltage is applied to each of the dynodes along a stacking direction of the dynodes. A plurality of connecting pins extending therefrom, and an outer peripheral portion of each of the dynodes is provided with an engaging member projecting at a position facing the corresponding connecting pin to engage with the connecting pin. An electron multiplier formed by connecting the joining member and each of the connection pins.
【請求項2】 前記係合部材は、一対の案内片を備えて
おり、この一対の案内片の間に前記接続ピンを導くこと
を特徴とする請求項1記載の電子増倍管。
2. The electron multiplier according to claim 1, wherein the engagement member includes a pair of guide pieces, and guides the connection pin between the pair of guide pieces.
【請求項3】 前記接続ピンは、前記積層されたダイノ
ードの周囲に沿って環状に配列されており、 前記各段のダイノードには、対応する前記接続ピンと相
対する位置に、それぞれ前記係合部材が形成されたこと
を特徴とする請求項1又は2記載の電子増倍管。
3. The connection pins are arranged annularly along the periphery of the stacked dynodes, and each of the dynodes is provided with a corresponding one of the engaging members at a position facing the corresponding connection pin. The electron multiplier according to claim 1 or 2, wherein is formed.
【請求項4】 前記接続ピンは、前記係合部材と接続さ
れる端部付近を、その他の部位に比べて剛性の低い金属
材料によって形成したことを特徴とする請求項3記載の
電子増倍管。
4. The electron multiplying device according to claim 3, wherein the connection pin is formed in the vicinity of an end connected to the engagement member with a metal material having lower rigidity than other portions. tube.
【請求項5】 前記電子増倍管は、光電陰極を備えた光
電子増倍管であることを特徴をする請求項1乃至4のい
ずれか一項に記載の電子増倍管。
5. The electron multiplier according to claim 1, wherein the electron multiplier is a photomultiplier provided with a photocathode.
JP10289893A 1993-04-28 1993-04-28 Electron multiplier Expired - Fee Related JP3260901B2 (en)

Priority Applications (17)

Application Number Priority Date Filing Date Title
JP10289893A JP3260901B2 (en) 1993-04-28 1993-04-28 Electron multiplier
US08/234,152 US5491380A (en) 1993-04-28 1994-04-28 Photomultiplier including an electron multiplier for cascade-multiplying an incident electron flow using a multilayered dynode
EP94303103A EP0622828B1 (en) 1993-04-28 1994-04-28 Photomultiplier
US08/234,153 US5572089A (en) 1993-04-28 1994-04-28 Photomultiplier for multiplying photoelectrons emitted from a photocathode
US08/234,157 US5510674A (en) 1993-04-28 1994-04-28 Photomultiplier
DE69404080T DE69404080T2 (en) 1993-04-28 1994-04-28 Photomultiplier
US08/234,158 US5619100A (en) 1993-04-28 1994-04-28 Photomultiplier
EP94303076A EP0622824B1 (en) 1993-04-28 1994-04-28 Photomultiplier
EP94303077A EP0622826B1 (en) 1993-04-28 1994-04-28 Photomultiplier
DE69404079T DE69404079T2 (en) 1993-04-28 1994-04-28 Photomultiplier
EP94303104A EP0622829B1 (en) 1993-04-28 1994-04-28 Photomultiplier
EP94303102A EP0622827B1 (en) 1993-04-28 1994-04-28 Photomultiplier
DE69406709T DE69406709T2 (en) 1993-04-28 1994-04-28 Photomultiplier
DE69403857T DE69403857T2 (en) 1993-04-28 1994-04-28 Photomultiplier
US08/234,142 US5498926A (en) 1993-04-28 1994-04-28 Electron multiplier for forming a photomultiplier and cascade multiplying an incident electron flow using multilayerd dynodes
DE69404538T DE69404538T2 (en) 1993-04-28 1994-04-28 Photomultiplier
US08/764,242 US5789861A (en) 1993-04-28 1996-12-12 Photomultiplier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10289893A JP3260901B2 (en) 1993-04-28 1993-04-28 Electron multiplier

Publications (2)

Publication Number Publication Date
JPH06310084A JPH06310084A (en) 1994-11-04
JP3260901B2 true JP3260901B2 (en) 2002-02-25

Family

ID=14339684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10289893A Expired - Fee Related JP3260901B2 (en) 1993-04-28 1993-04-28 Electron multiplier

Country Status (4)

Country Link
US (1) US5498926A (en)
EP (1) EP0622829B1 (en)
JP (1) JP3260901B2 (en)
DE (1) DE69403857T2 (en)

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Also Published As

Publication number Publication date
DE69403857T2 (en) 1997-11-06
US5498926A (en) 1996-03-12
JPH06310084A (en) 1994-11-04
EP0622829A1 (en) 1994-11-02
DE69403857D1 (en) 1997-07-24
EP0622829B1 (en) 1997-06-18

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