JP3260301B2 - Piping structure and piping fittings - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piping structure and a piping joint used for supplying a chemical solution such as a resist solution or a developing solution or a gas to an object to be processed such as a semiconductor wafer or an LCD substrate.

[0002]

2. Description of the Related Art In the manufacture of semiconductor devices and liquid crystal display elements, a photoresist is applied to an LCD substrate on a semiconductor wafer or the like as an object to be processed, and the photoresist is exposed in accordance with a circuit pattern and developed. To do
A circuit pattern is formed by a so-called photolithography technique.

In such a coating / developing process, a chemical solution such as a resist solution or a developing solution is used as a processing solution. In addition, during the adhesion process, the liquid HMD
What gasified S is used.

[0004] These chemicals and gases are transported through pipes, and the pipes have a double pipe structure in order to take measures against leaks and safety in these pipes. Also, when a chemical solution is transported, if a joint or the like is interposed in the piping, a large number of orifices are formed and a change in the pressure of the solution occurs,
As a result, fine bubbles are generated in the processing solution. For example, when an i-line resist used in response to a demand for miniaturization of a device is used, a highly accurate wiring pattern cannot be formed due to the presence of fine pores. There is a risk. Therefore, it is required that the inner pipe of the double pipe has as little seam as possible. For this reason, conventionally, the outer pipes are connected to each other by joints, and the inner pipes pass therethrough to minimize the joints between the inner pipes.

[0005]

However, as shown in FIG. 4, the joint 1 of the outer tube may have a small step 4 at the joint between the outer tube 2 and the outer tube 3,
When the inner tube 5 is inserted, the inner tube 5 is caught by this step.
May not be able to be inserted.

The present invention has been made in view of such circumstances, and has as its object to provide a piping structure and a piping joint that can be inserted without catching an inner pipe, based on a double pipe structure. I do.

[0007]

In order to solve the above-mentioned problems, the present invention has a structure in which the outer tube tip is disposed to face the inner tube, the inner tube is inserted therein, and a double tube of the outer tube and the inner tube is formed. A piping structure having a joint for covering an opposite end of the outer tube arranged opposite to the first tube, wherein the joint has a first end into which a tip of a first outer tube on an outlet side in an inner tube insertion direction is inserted. An insertion portion, a second insertion portion into which the distal end of the second outer tube on the inlet side in the inner tube insertion direction is inserted, and a second insertion portion formed between the insertion portions, the first insertion portion being connected to the second insertion portion. A tapered portion having an inner surface that decreases in diameter toward the first insertion portion, wherein the end of the tapered portion on the side of the first insertion portion has an inner diameter similar to the outer diameter of the inner tube. To provide a piping structure.

According to the present invention, there is also provided a pipe having a double pipe structure comprising an outer pipe and an inner pipe, wherein the outer pipes are connected to each other so as to cover opposed ends of the opposed outer pipes and to connect the inner pipes therein. A pipe joint to be inserted, wherein a first insertion portion into which a tip of a first outer pipe on an outlet side in an inner tube insertion direction is inserted, and a tip of a second outer tube on an inlet side in an inner tube insertion direction are inserted. A second insertion portion to be formed, and a tapered portion formed between these insertion portions and having an inner surface that reduces in diameter from the second insertion portion toward the first insertion portion. And an end on the first insertion portion side having an inner diameter approximate to the outer diameter of the inner pipe.

In the present invention, the joint for connecting the outer pipes is shrunk from the second insertion section into which the tip of the second outer pipe on the inlet side in the inner pipe insertion direction is inserted toward the first insertion section. Since the end portion on the side of the first insertion portion has an outer diameter that is close to the outer diameter of the inner tube in the tapered portion, the second insertion portion on the upstream side The distal end of the inner tube inserted from above is guided by the tapered portion toward the first insertion portion, and passes through an end portion having an inner diameter approximate to the outer diameter of the inner tube. For this reason, the inner tube is inserted without being caught by the first outer tube.

[0010]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a view showing a resist liquid supply system in a resist coating unit for a semiconductor wafer into which a pipe having a pipe structure of the present invention is incorporated. As shown in this figure, the resist coating unit 10 has a spin chuck 31 for sucking and holding the semiconductor wafer W, and a nozzle holder 32 is provided above the spin chuck 31. A resist solution nozzle 33 and a solvent nozzle 34 are attached to the nozzle holder 32. In addition,
The semiconductor wafer W held by the spin chuck 31 is surrounded by a cup (not shown).

The resist liquid nozzle 33 is provided with a transmission sensor 35 for detecting the liquid level in the nozzle 33. As shown in FIG. 2, the transmission type sensor 35
A light-emitting element 35a and a light-receiving element 35b are provided, and the presence or absence of liquid in the transmitted portion is detected based on the amount of light transmitted through the nozzle 33 from the light-emitting element 35a and incident on the light-receiving element 35b, thereby performing liquid level detection. .

The resist solution supply mechanism 40 has a resist solution supply pipe 41, one end of which is provided with the resist solution nozzle 33, and the other end of which is inserted into a resist solution container 42. A resist solution L is stored in the resist solution container 42, and the resist container 42 is housed in a pressurized container 43. The resist liquid supply pipe 41 is not provided with a pump, an air operation valve, a suck-back valve, a filter, and the like as in the related art.

One end of a pipe 44 is connected to the pressurized container 43, and the other end of the pipe 44 is open to the atmosphere. The pipe 44 is provided with an air operation valve 45. A pipe 46 is branched and connected to a portion of the pipe 44 between the air operation valve 45 and the pressurized container 43, and an N ₂ gas cylinder 47 is provided at an end thereof. A regulator 48 for adjusting pressure for pressurization and an air operation valve 4
9 are provided. The regulator 4 of the pipe 46
A pipe 50 is branched and connected to a portion between the pipe 8 and the air operation valve 49, and the other end of the pipe 50 is connected to a portion of the pipe 44 near the pressurized container 43. The piping 50 is provided with a regulator 51.

The air operation valves 45 and 49 and the regulators 48 and 51 are controlled by a controller 60. The output from the light receiving element 35 b of the transmission sensor 35 is input to the controller 60. Then, by closing the air operation valve 45 and opening the air operation valve 49, the N
₍₂₎ The gas pressure of the gas cylinder 47 is applied, and the resist pressure L in the container 42 is changed by the gas pressure.
And discharged from the nozzle 33. By opening the air operation valve 45 and closing the air operation valve 49, the resist liquid at the tip of the nozzle 33 can be sucked back after the discharge of the resist liquid. Further, by closing both of these valves, the resist liquid level in the resist liquid nozzle 33 stops.

On the other hand, the solvent supply mechanism 70 has a solvent supply pipe 71, and the solvent nozzle 34 is provided at one end thereof. Although not shown, the solvent supply mechanism 70 has basically the same configuration as the resist liquid supply mechanism 40.

In the resist liquid supply mechanism 40, when the resist liquid is discharged from the nozzle 33 and the resist liquid is supplied to the semiconductor wafer W, first, the air operation valve 45 is closed and the air operation valve 49 is opened. Then, the N ₂ gas is supplied from the N ₂ gas cylinder 47 into the pressurized container 43 through the pipes 46 and 44. Due to this gas pressure, the resist solution L in the resist solution container 42 is discharged from the nozzle 33 provided at the tip through the pipe 41 and supplied to the semiconductor wafer W. In this case, the controller 60 controls the regulator 48 to adjust the pressurization level to an appropriate value. By adjusting the pressure level in this way,
A predetermined pressure is applied to the resist liquid L in the container 42, and a desired amount of the resist liquid is discharged for a predetermined time, for example, 1 to 5 seconds.

When a predetermined amount of the resist solution is discharged, the air operation valve 49 is closed to stop the discharge of the resist solution. At the same time, the air operation valve 45 is opened to open the pipe 44 to the atmosphere. Thus, the pressure in the pressurized container 43 is reduced, and the resist solution in the pipe 41 is drawn back toward the container 42. Such a suck-back function prevents the resist liquid remaining on the piping from dropping after the resist liquid discharge is completed. In this case, when it is detected by the transmission sensor 35 that the liquid level in the nozzle 33 is at the tip of the level of light from the sensor, the air operation valve 35 is kept open, and the liquid level is The air operation valve 45 is closed when it is detected that the light is returned from the light level.
Thereby, the liquid level in the nozzle 33 stops. Nozzle 33
Fine adjustment of the liquid level inside is performed by adjusting the regulator 51 with the valves 45 and 49 closed and applying a slight pressure to the pressurized container 43.

After one discharge of the resist liquid has been completed in this way, preparations are made for the next discharge of the resist liquid. By repeating the same operation, a predetermined number of semiconductor wafers W are coated with a resist.

Next, the resist liquid pipe 41 will be described in detail. The resist liquid pipe 41 is provided for safety measures and the like.
As shown in FIG. 3, it has a double structure. Then, as described above, a conventional air operation valve, suck back valve, pump,
In order to allow the resist solution to flow without intervening a filter or the like, it is desired that the inner tube of the double tube be installed as seamlessly as possible, and therefore, the necessary joint is provided only in the outer tube.

In this case, if necessary, the outer tubes are connected to each other by a joint, and the inner tube is passed through the joint. Conventionally, as shown in FIG. There is a possibility that the inner pipe may be caught by the step and cannot pass through.

In this embodiment, such a problem is solved by configuring the joint portion of the outer pipe of the resist liquid pipe 41 as shown in FIG. In FIG. 3, the joint 11 is
A first insertion portion 12 into which the outer tube 21a is inserted, and a second insertion portion 1 provided on the opposite side and into which the outer tube 21b is inserted.
The outer tubes 21a and 21b inserted into the insertion portions 12 and 13 are connected linearly. Inner tube 2
2 is inserted into the outer tube from the outer tube 21b side along the direction shown by arrow A. Therefore, the outer tube 21a is on the outlet side (downstream side) in the insertion direction, and the outer tube 21b is on the inlet side (upstream side). An insertion portion 13 is provided between the insertion portion 12 and the insertion portion 13.
A tapered portion 14 having an inner surface whose diameter decreases toward the insertion portion 12 is formed. The tapered portion 14 is
The end 14a on the second side has an inner diameter approximately equal to the outer diameter of the inner tube 22. Since the tapered portion 14 is formed as described above, a step 15 corresponding to a diameter difference between the outer tube and the inner tube is formed between the first insertion portion 12 and the tapered portion 14. On both outer sides of the joint 11, outer tubes 21a and 2a
1b is fastened by nuts 23a and 23b, respectively.

After the outer pipes are connected to each other with the joint 11 as described above, when the inner pipe 22 is inserted into the outer pipe, for example,
Even if there is an outwardly projecting portion 24 at the tip of the joint, the tip portion is guided by the tapered portion of the joint 11 and proceeds, and the end portion 14a on the first insertion portion 12 side has the outer diameter of the inner tube 22 and Since the outer tube has an approximate outer diameter, the inner tube 22 is inserted without being caught by the step 25 at the tip of the outer tube 21a.

The present invention is not limited to the above embodiment, but can be used in various forms. For example, in the above-described embodiment, the present invention is applied to the pipe 41 that does not interpose an air operation valve, a suck-back valve, a pump, a filter, and the like. be able to. Further, in the above-described embodiment, an example in which the present invention is applied to the resist solution piping is shown. However, the present invention is not limited to this. Can be applied to tubes.

[0024]

As described above, according to the present invention,
The joint connecting the outer pipes is the second pipe on the inlet side in the insertion direction of the inner pipe.
Of the outer tube has a tapered portion that decreases in diameter from the second insertion portion into which the distal end is inserted toward the first insertion portion. In this tapered portion, the end on the first insertion portion side is an inner tube. Since the outer diameter of the inner pipe is approximately the same as the outer diameter of the inner pipe, the tip of the inner pipe inserted from the second insertion section on the upstream side is guided by the tapered section toward the first insertion section, and The inner pipe can be inserted without passing through the end of the inner pipe that approximates the outer diameter of the first outer pipe without being caught by the first outer pipe.

[Brief description of the drawings]

FIG. 1 is a view showing a resist liquid supply system in a resist coating unit in which a pipe having a pipe structure of the present invention is incorporated.

FIG. 2 is a diagram illustrating a state of detecting a liquid level in a resist liquid nozzle.

FIG. 3 is a view showing a joint portion in the piping structure of the present invention.

FIG. 4 is a view showing a joint part in a conventional piping structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Resist coating unit 11 ... Coupling 12 ... First insertion part 13 ... Second insertion part 14 ... Taper part 21a, 21b ... Outer tube 22 ... Inner tube 24 ... Protrusion 25 ... Step 41 ... Resist liquid piping

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. ⁷ , DB name) F16L 1/00 H01L 21/027

Claims (2)

(57) [Claims] 1. A front end of an outer tube is arranged oppositely, and an inner tube is inserted therein to constitute a double tube of an outer tube and an inner tube, and covers an opposite end of the opposed outer tube. A pipe structure having a joint, wherein the joint includes a first insertion portion into which a tip of a first outer tube on an outlet side in an inner tube insertion direction is inserted, and a second insertion portion on an inlet side in an inner tube insertion direction.
A second insertion portion into which the distal end of the outer tube is inserted, and a tapered portion formed between these insertion portions and having an inner surface that decreases in diameter from the second insertion portion toward the first insertion portion. The pipe structure, wherein the tapered portion has an inner diameter approximate to an outer diameter of an inner tube at an end of the tapered portion on the first insertion portion side. 2. A pipe having a double pipe structure comprising an outer pipe and an inner pipe, wherein the outer pipes are connected to each other so as to cover opposed ends of the opposed outer pipes, and the inner pipe is inserted therein. A first insertion part into which the tip of the first outer pipe on the outlet side in the inner tube insertion direction is inserted, and a first insertion part into which the tip of the second outer pipe on the inlet side in the inner pipe insertion direction is inserted. 2, and a tapered portion formed between the inserted portions and having an inner surface that reduces in diameter from the second inserted portion to the first inserted portion, wherein the tapered portion includes:
The end for the first insertion portion has an inner diameter that is close to the outer diameter of the inner pipe.