JP3256490B2 - Gate valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve capable of opening and closing an opening of a vacuum processing chamber used in, for example, a semiconductor manufacturing process.

[0002]

2. Description of the Related Art In a dry etching process, a sputtering process, an epitaxial wafer forming process, and the like in a semiconductor manufacturing process, a vacuum processing apparatus having a multi-chamber configuration in which a plurality of vacuum processing chambers are connected as shown in FIG. 9 is used. Is done. In the vacuum processing apparatus 101 in FIG. 9, a plurality of vacuum processing chambers 105 for performing various processes can be connected to the outer periphery of the transfer chamber 102 in which the wafer W is loaded and unloaded. The movement of the wafer W between the transfer chamber 102 and each vacuum processing chamber 105 is performed through the gate G. The opening and closing and sealing of the gate G are performed by a gate valve (not shown).

In the vacuum processing apparatus 101 shown in FIG.
Is carried into the transfer chamber 102 by the transfer device (not shown) through the transfer port 103 of the transfer path 104, and the transfer chamber 1
2 is held by a vacuum transfer robot 107 provided in the inside of the apparatus. When the wafer W is held by the vacuum transfer robot 107, the transfer port 103 is closed, and the transfer chamber 102 is evacuated. At this time, each gate valve is in a state where each gate is sealed. When the evacuation in the transfer chamber 102 is completed, each gate valve is driven to open the gate G, and the wafer W is transferred to a predetermined vacuum processing chamber by the vacuum transfer robot 107. In the vacuum processing chamber, in order to perform processing, each gate valve is driven to close the gate G, and a predetermined processing of the wafer W is performed. When the predetermined processing of the wafer W is completed, the gate valve is driven to open the gate G, the wafer W is again taken out of the vacuum processing chamber by the vacuum transfer robot 107, and automatically out of the vacuum processing apparatus 101 through the loading / unloading port 103. It is carried out.

As a structure of the gate valve 106 capable of opening and closing and sealing the gate G in the vacuum processing apparatus 101 as described above, for example, a structure as shown in FIGS. 10 and 11 is known. In FIG. 10, the transfer chamber 202
Communicates with the vacuum processing chamber 203 through the gate G. The gate G is opened and closed by a gate valve 201. The gate valve 201 includes a valve body 205 that opens and closes and seals the gate G. And a seal bellows 2 for sealing between the transfer chamber 202 and the valve rod 206.
07 and a drive unit (not shown) for linearly moving and tilting the valve rod 206. The gate valve 201
In FIG. 10, the gate G is open. To close and seal the gate G, as shown in FIG. 11, the valve rod 206 is moved directly to the position where the valve body 205 closes the gate G, and the valve rod 206 is tilted about the axis 208 as shown in FIG. Performed by As a result, the valve body 205 presses the O-ring 204 provided on the outer periphery of the gate G, and the gate G is sealed.

[0005]

Generally, for example,
A gate valve used in a device that dislikes dust, such as a semiconductor device manufacturing device, requires high sealing performance. Gate valve 201 seal bellows 207 having the above structure
For example, is formed of a metal material so as to be extendable and contractible, and is hermetically fixed to a hole of the transfer chamber 202 into which the valve rod 206 is inserted and an outer periphery of the valve rod 206 by welding. For this reason, the gate valve 201 has a high sealing property,
Since there is no sliding portion on the valve rod 207, no particles are generated, and it is possible to minimize contamination of the wafer by particles.

However, the above-described seal bellows 20
The method of directly fixing 7 to the outer periphery of the transfer chamber 202 and the valve rod 206 by welding has a disadvantage that it is generally very costly. Further, the seal bellows 207 is connected to the transfer chamber 202 and the valve rod 2 by welding.
There is also a disadvantage that the maintenance is costly because it is fixed at 06.

The present invention has been made in view of such a conventional problem, and an object of the present invention is to provide a gate valve which has good sealability, can reduce the manufacturing cost required for the seal portion, and can be easily maintained. Aim.

[0008]

According to the present invention, there is provided a gate valve provided in an airtight chamber, capable of opening and closing an opening of the airtight chamber, and sealing the opening by tilting with respect to the opening. A holding member rotatably supported around the axis of the shaft, and the valve element is fixed to one end, and is provided so as to protrude from the airtight chamber to the outside of the airtight chamber, is inserted into an insertion hole of the holding member, and is linearly movable. And a seal bellows provided on an outer periphery of a shaft portion of the valve rod, for sealing between the hermetic chamber and the holding member, and receiving deformation caused by tilting of the valve rod; and A sealing member that fits on the outer periphery of the rod, is held in the insertion hole of the holding member near the airtight chamber, seals between the holding member and the valve rod, and fits on the outer periphery of the valve rod; Separated from the airtight chamber of the holding member Is held in that side of the insertion hole, the bearing member having a lubricating property to undergo a reaction force acting through the valve rod from said opening during the tilting of the valve rod,
A tilting mechanism that is connected to the valve rod and tilts the valve rod at a position where the valve body closes the opening with the predetermined axis as a fulcrum, and the valve rod connected to the valve rod via the tilting mechanism; A driving means for supplying a driving force necessary for linear movement and tilting of the first bearing, wherein the bearing member is provided in order from a side close to the predetermined axis, and is a first bearing made of a deformable material. A second bearing member made of a material having a higher load-bearing capacity than the first bearing member.

In the structure of the gate valve of the present invention, when the valve rod is tilted, the reaction force acting on the bearing member from the opening of the airtight chamber acts greatly from the side close to the predetermined axis which is the fulcrum of the valve rod tilt. I do. Therefore, the force concentrates on the inner peripheral end of the bearing member closer to the predetermined shaft. For this reason, the first bearing member is deformed, and damage to the valve rod due to the deformation of the first bearing member is suppressed. Since the second bearing member exerts a smaller force than the first bearing member, the second bearing member is less likely to be deformed by the reaction force from the opening through the valve rod, and has the second bearing member. Large load capacity is exhibited.

[0010]

Embodiments of the present invention will be described below in detail with reference to the drawings. First Embodiment FIG. 1 is a sectional view showing a first embodiment of a gate valve according to the present invention, and FIG. 2 is a sectional view of the gate valve shown in FIG.
It is sectional drawing of a line direction. As shown in FIGS. 1 and 2,
The gate valve 1 includes a valve body 2, a valve rod 6 having the valve body 2 fixed to one end via a connecting member 4, a mounting member 8 mounted to an airtight chamber (not shown), and a mounting member into which the valve rod 6 is inserted. 8 into which the valve rod 6 is inserted
a mounting member 9 airtightly fitted and fixed via an O-ring 9a to the outside of the airtight chamber around the a, and an O-ring holding fit and inserted into the valve rod 6 and holding the first O-ring 18 The groove 14b and the O for holding the second O-ring 19
A holding member 14 in which a ring holding groove 14d, a bush holding portion 14c for holding the first bearing member 17 and the second bearing member 21 are formed, and the holding member 14 is held so as to be tiltable about a shaft 15a. Support member 15 and holding member 14
Bellows 1 for sealing between the mounting member 9
0, the fixing member 26 fitted and fixed to the valve rod 6, and the shaft 15a of the support member 15 are rotatably held,
An air cylinder 16 for driving the piston rod 20 and a roller 24 rotatably provided at the other end of the valve rod 6
A roller receiving member 22 disposed opposite to the other end of the valve rod 6 provided with the roller 24, a connecting plate 30 for connecting the roller receiving member 22 and the piston rod 20,
It has a fixing member 26 fixed to the other end of the valve rod 6 and a coil spring 28 whose both ends are fixed by the connecting plate 30 and connects the other end of the valve rod 6 and the connecting plate 30.

The valve body 2 is formed of a plate-shaped member, and can open and close an opening 50 of an airtight chamber (not shown).
The opening 50 by tilting with respect to the O-ring 5.
2 can be sealed. In the present embodiment, a flat plate-shaped member is shown as the valve body 2. However, when the opening has a curved surface shape, it may be shaped accordingly. Further, as a material for forming the valve body 2, a material such as a metal material which does not generate particles as much as possible and does not emit gas or the like is desirable. The connection between the valve body 2 and the connection member 4 is as follows.
For example, by a bolt.

The valve rod 6 has one end to which the valve body 2 is fixed via the connecting member 4, and is provided so as to protrude from an insertion hole 8 a of the mounting member 8 to the outside of an airtight chamber (not shown). First and second O-rings 18,
19 and the first and second bearing members 17 and 21 so as to be able to move directly. The holding member 14 is supported by a support member 15, and the support member 15 is rotatable about a shaft 15a.
It is possible to tilt around a. The connection between the valve rod 6 and the connecting member 4 is performed by, for example, welding. As a material for forming the valve rod 6, a material such as a metal material which does not generate particles as much as possible and does not emit gas or the like is desirable.
For example, SUS304, SUS316L, etc. are used.

The mounting member 8 is mounted, for example, in an airtight chamber capable of sealing the inside of a transfer chamber or the like of a vacuum processing apparatus having a multi-chamber configuration. As a material for forming the attachment member 8, a material such as a metal material that does not generate particles as much as possible and does not emit gas or the like is desirable.

The mounting member 9 is provided for facilitating the mounting of the seal bellows 10 on the gate valve 1. The mounting member 9 seals the insertion hole 8a side of the mounting member 8 with an O-ring 9a. By fixing one end of the seal bellows 10 to this mounting member 9,
There is no need to directly weld one end of the seal bellows 10 to the mounting member 8.

The holding member 14 slidably holds the valve rod 6 via first and second O-rings 18, 19 and first and second bearing members 17, 21. The holding member 14 is a cylindrical member, and has an insertion hole 14a for fitting and inserting the valve rod 6 in the inner periphery thereof, and the first and second O-ring holding grooves 14b and 14d and the bush holding portion. 14c are formed. On the outer circumference, a fixing groove 1
5c is formed, and when fitted and inserted into the support member 15,
The fixing screw 15d is engaged with the fixing groove 15c, and the holding member 14 is fixed to the support member 15.

The first and second O-rings 18, 19 are
For example, it is made of resin and seals between the valve rod 6 and the insertion hole 14a of the holding member 14 without lubrication. This prevents dust and the like from entering from outside through the space between the valve rod 6 and the insertion hole 14a of the holding member 14. In addition, the first and second O-rings 18, 19-2
By arranging the two O-rings in parallel, the sealing performance can be further improved.

The first and second bearing members 17, 21 are
The support member 15 is disposed adjacent to the outer periphery of the rod 6 in the axial direction from the side closer to the shaft 15a. These first and second bearing members 17, 21
Slides on the outer peripheral surface of the valve rod 6 and serves to support the force that the holding member 14 receives from the valve rod 6.

The first bearing member 17 is made of a deformable and lubricating resin material. For example, the first bearing member 17 is made of PTFE (polytetrafluoroethylene) or PE.
Materials such as I (polyetherimide) are preferred. Second
As a material for forming the bearing member bush 21, a material having lubricity, large load resistance, and higher rigidity than the first bearing member 17 is used. For example, based on PTFE, PEI, or the like, a material in which lead and other fillers are mixed is integrally formed as a sliding layer on the inner peripheral surface of a sleeve-shaped basic member made of a metal material such as copper. Can be used. Specifically, for example, a product name “DU bush” manufactured by Daido Metal Co., Ltd. can be used.

The support member 15 is formed of a cylindrical member, holds and fixes the holding member 14, and is rotatably supported by an air cylinder 16 via a shaft 15a formed on a side surface. From this, the valve rod 6 is connected to the shaft 15
It is possible to tilt around a. A fitting portion 15e is formed on the inner periphery at the lower end of the support member 15, and a dust seal 23 is provided in the fitting portion 15e in a state fitted and inserted into the valve rod 6. The stopper portion 26b of the fixing member 26 is fitted to the fitting portion 15e and comes into contact with the dust seal 23 to function as a stopper for restricting the axial movement of the fixing member 26, that is, the linear motion of the valve rod 6.

The dust seal 23 plays a role in preventing dust from entering from outside, and is formed of a relatively soft material such as a urethane resin material. Also,
Since the dust seal 23 is formed from a relatively soft material, the dust seal 23 acts so as to reduce the impact when the stopper 26b of the fixing member 26 comes into contact.

The seal bellows 10 is a member for sealing between the mounting member 10 and the holding member 14. Also,
The valve rod 6 is deformable by receiving the tilt of the valve rod 6.
The seal bellows 10 is formed, for example, from a metal material. One end of the seal bellows 10 is air-tightly fixed to a surface of the mounting member 9 outside the airtight chamber by a joining means such as welding. The other end of the seal bellows 10 is air-tightly fixed to an upper end surface of the holding member 14 by a joining means such as welding. Thus, even if the valve rod 6 is tilted, the space between the mounting member 10 and the holding member 14 can be sealed, and contaminants such as particles can be prevented from entering from the outside.

The fixing member 26 is fitted and fixed to the shaft of the valve rod 6 and has a stopper 26
b, and a groove-shaped fixing portion 26a for fixing the spring member 25 is formed on the spring member 25 side.

The roller 24 is rotatably provided at a predetermined position at the other end of the valve rod 6 by a spring member 25. Specifically, as shown in FIG.
Both ends of the roller 24 are rotatably supported by a spring member 25 so that a part of the outer peripheral surface of the roller 24 is slidably held by a groove-shaped roller holding portion 6b formed at the end of the roller 24. I have. One end of the spring member 25 is fixed to a fixing portion 6 a formed on the valve rod 6.

The roller receiving member 22 is disposed so as to face the other end of the valve rod 6 on which the roller 24 is held. A roller 2 is provided at the tip of the roller receiving member 22.
4, a first holding portion 22a capable of holding the roller 24, an inclined surface 22b capable of engaging the roller while rotating, and a first holding portion 22c capable of holding the roller 24 are formed continuously. First
The holding portion 22a is formed in a groove shape, and holds the roller 24 when the valve rod 6 moves linearly in a direction to open and close the opening 50. The inclined surface 22b can incline the valve rod 6 about the shaft 15a by engaging with the roller 24. The inclined angle θ of the inclined surface 22b with respect to the valve rod 6 is formed, for example, to about 5 degrees. . Second holding part 22c
Is composed of an R portion having the same curvature as the curvature of the roller 24,
When the valve rod 6 is tilted to a predetermined angle, the roller 24 is held. The roller 24 is a first member of the roller receiving member 22.
As a material for forming the roller 24 and the roller receiving member 22, for example, SU may be used in order to prevent abrasion because the holding portion 22 a comes into contact with the inclined surface 22 b and the second holding portion 22 c.
It is desirable to use a relatively hard metal material such as J2.

The spring member 25 for rotatably supporting the roller 24 supports the roller 24 and has the other end fixed to a fixing portion 22 d formed on the roller receiving member 22. Thereby, it is possible to prevent the relative position between the end portion of the valve rod 6 and the roller receiving member 22 from being shifted and not opposing each other.

The coil spring 28 is provided on the fixing member 2 formed on the fixing member 26 fixed to the valve rod 6 so as to surround the opposite end of the valve rod 6 and the outer periphery of the roller receiving member 22.
Both ends are fixed to a fixing portion 30a formed on 6a and the connecting plate 30. The role of the coil spring 28 is to prevent the release of the holding state of the roller 24 from the first holding portion 22a.
And are connected. That is, the coil spring 28
When the roller receiving member 22 linearly moves while the roller 24 is held by the holding portion 22a, the roller 2 of the first holding portion 22a
4 serves to prevent the holding state from being easily released.

Here, an example of the structure of the air cylinder 16 is shown in FIG. As shown in FIG. 4, a piston rod 20 having one end of the air cylinder 16 fixed to the connecting plate 30, a piston 71 fixed to the other end of the piston rod 20, and a piston 71 slidable on the inner peripheral surface 62a. It basically comprises a cylinder 61 to be accommodated.

A female screw portion 20a for connecting to a connecting plate 30 described later is formed on one end shaft portion of the piston rod 20, and a male screw portion 20c for fixing the piston 71 is formed on the other end shaft portion 20b. Have been. This male screw part 20
c, the piston 71 is screwed and fixed.
Ob protrudes from the distal end surface of the piston 71. A bearing collar 77 is screwed and fixed to a portion of the other end shaft portion 20b protruding from the front end surface of the piston 71.

A cushion rubber 76 is fixed to the shaft of the piston rod 20 in contact with the end surface of the piston 71. This cushion rubber 76 is
It is provided in order to prevent the occurrence of problems such as wear due to direct collision of the end surfaces of the cylinder 1 and the cylinder 61. The material for forming the piston rod 20 is not particularly limited. For example, a material having relatively high strength such as carbon steel can be used, and the material for forming the bearing collar 77 is, for example, bronze or phosphor bronze. A material having good conformability and excellent in fatigue resistance, wear resistance, spreadability, and the like can be used.

The piston 71 is screwed and fixed to the other end shaft portion 20b of the piston rod 20, as described above.
In addition, a piston seal 72 and a wear ring 73 are provided on the outer periphery, and the piston seal 72 seals between the inner peripheral surface 62a of the cylinder body 62, and the wear ring 73 forms a seal between the piston 71 and the cylinder body 62. Wear due to sliding between the inner peripheral surface 62a and the like is suppressed.

The cylinder 61 is constituted by a cylinder body 62 which is a tubular member and a head cover 63. An insertion hole 62d for inserting the piston rod 20 is formed on one end side of the cylinder body 62. A bush 74 and a rod seal 75 are provided between the insertion hole 62d and the piston rod 20. I have. The bush 74 prevents wear or the like caused by the contact between the insertion hole 62d of the cylinder body 62 and the piston rod 20, and the rod seal 75 allows the piston rod 20 to move between the insertion hole 62d and the piston rod 20. Sealing. On one end side of the cylinder body 62, a flow path 62b through which the compressed air F flows is formed. The material for forming the cylinder body 62 is not particularly limited. For example, a material having relatively high strength such as carbon steel can be used. Also, the material for forming the bush 74 is not particularly limited. For example, fatigue resistance of a copper alloy, bronze, or the like,
A material excellent in abrasion resistance, extensibility and the like can be used.

The head cover 63 is fitted and inserted into the opening at the other end of the cylinder body 62, and the space between the cylinder body 62 and the head cover 63 is sealed by an O-ring 64. The head cover 63 is fixed to the cylinder body 62 by attaching a retaining ring 65 to a groove formed on the inner periphery of the other end of the cylinder body 62. On the other end side of the cylinder body 62, a flow path 62c through which the compressed air F flows in and out is formed. The head cover 63 is provided with a support hole 63a for supporting the other end shaft portion 20b of the piston rod 20 in which the bearing collar 77 is screwed to the outer periphery. Is fitted. The bearing collar 77 can be fitted and inserted into the bush 80. The material for forming the head cover 63 is not particularly limited. For example, the same material as the material for forming the cylinder body 62 can be used. As the material for forming the bush 80, for example, a copper alloy, phosphor bronze, or the like can be used. A material excellent in fatigue property, wear resistance, spreadability, and the like can be used.

The air cylinder 16 constructed as described above
By appropriately supplying and discharging compressed air from two compressed air F channels 62b and 62c formed in the cylinder 61, the piston 71 is driven in a linear direction, and as a result, the piston rod 20 moves linearly. The flow path 62b
The compressed air F is supplied to one of the air supply sources such as an air compressor, and the compressed air is supplied to the flow paths 62b and 62c by a switching valve provided in the air supply source. The supply of F is selectively switched. The reciprocating motion of the piston rod 20 is performed by the selective switching operation of the switching valve.

Next, the operation of the gate valve 1 will be described. Although the state of the gate valve 1 shown in FIGS. 1 and 2 is a state in which the opening 50 is opened, the air cylinder 16 is driven to move the roller receiving member 22 directly in a direction in which the opening 50 is closed.

By driving the air cylinder 16, the roller receiving member 22 causes the valve rod 6 to move directly while the roller 24 is held by the first holding portion 22a shown in FIG. When the roller receiving member 22 moves and the valve rod 6 reaches a predetermined position, as shown in FIGS. 5 and 6, the stopper portion 26b of the fixing member 26 is fitted to the stopper portion 15e of the support member 15, and The end faces abut each other, and the movement of the valve rod 6 is regulated. At the same time, the valve element 2 closes the opening 50.

At this time, the valve rod 6 is connected to the first and second
O-rings 18 and 19 and first and second bearing members 17 and 21 linearly move while sliding. First and second
The airtight chamber side is sealed by the O-rings 18 and 19, so that contaminants such as particles do not enter from the outside.

Further, when the roller receiving member 22 moves directly, the valve rod 6 does not move but only the roller receiving member 22 moves, and as shown in FIG. 3B, the roller 24 is moved to the first holding portion 22a. The held state is released. Roller 24
Rolls on the inclined surface 22b while rotating in the direction of the arrow shown in FIG. As a result, the valve rod 6 is inclined around the shaft 15a of the support member 15.

When the roller 24 rolls on the inclined surface 22b of the roller receiving member 22, the valve rod 6 is inclined, and as shown in FIG. Pressing, crushing, and sealing of the opening 50 are performed well. As shown in FIG. 3C, the spring member 25 is elastically deformed against its restoring force. When the valve rod 6 is tilted by a predetermined angle due to the further linear movement of the roller receiving member 22, the roller 24 is held by the second holding portion 22c of the roller receiving member 22, as shown in FIG. . Thereby, the sealing operation of the opening 50 by the valve body is completed. The roller 24 is moved to the second holding portion 22c.
As a result, the roller 24 does not move, and the sealed state of the opening 50 can be stably maintained.

Here, in the pressing operation of the O-ring 52 of the valve body 2 due to the tilting of the valve rod 6, a reaction force from the O-ring 52 acts on the valve rod 6. Further, a shaft 15 a which is a fulcrum of the tilting operation of the valve rod 6 is provided on the support member 15. Therefore, the reaction force from the O-ring 52 acts on the first and second O-rings 18 and 19 and the first and second bearing members 17 and 21.
In particular, the reaction force tends to concentrate on the region indicated by B in FIG. 7 of the present embodiment, that is, on the inner peripheral end nearer to the second O-ring 19 of the first bearing member 17 closer to the shaft 15a. For this reason, for example, the first bearing member 17 is formed on the inner periphery of a sleeve-shaped basic member made of a metal material in the same manner as the material for forming the second bearing member 21, for example, by using PTFE as a base and adding lead and other When a material having a lubricating sliding layer mixed with a filler is used, the reaction force is concentrated on the inner peripheral end near the second O-ring 19, so that the sliding layer is easily peeled off. When the sliding layer peels off,
When the basic member is exposed and the basic member and the valve rod 6 are rubbed, the valve rod 6 is damaged or wear powder is generated.
Since the scratches caused by the abrasion powder enter the valve rod 6, the O-ring provided on the valve rod 6 may deteriorate the sealing performance.

However, in this embodiment, the first bearing member 17 is formed of a deformable resin material having lubricating performance. For this reason, the first bearing member 17
When the reaction force from the O-ring 52 concentrates on the inner peripheral end near the second O-ring 19, the second O-ring of the first bearing member 17
The inner peripheral end region near the ring 19 is deformed. For this reason, the inner peripheral end region of the first bearing member 17 near the second O-ring 19 acts so as to fill the space between the inner periphery of the holding member 14 and the valve rod 6.

On the other hand, since the inner peripheral end region of the first bearing member 17 on the side of the second bearing member 21 is not deformed, it serves to prevent the deformation of the second bearing member 21. For this reason, the second bearing member 21 can sufficiently exhibit a large load resistance without being deformed. That is, in the structure of the gate valve according to the present embodiment, the O-ring 52
The first bearing member 17 suppresses the deformation of the second bearing member 21 due to the reaction force from the first bearing member 17 to maintain the large load-carrying performance of the second bearing member 21.
The sealing performance of the O-rings 18 and 19 can be maintained.

In the present embodiment, the second bearing member 2
Since the dust seal 23 is provided adjacent to 1,
Since dust generated in the gate valve and other devices, in particular, metal abrasion powder is prevented from entering the first and second bearing members 17 and 21, the first and second bearing members described above are prevented. The functions of the elements 17 and 21 can be made more effective.

In this embodiment, since the first and second O-rings 18 and 19 are provided, the valve rod 6
And the holding member 14, the sealing performance can be improved, and by providing two O-rings, the durability of the sealing performance can be greatly improved. In addition,
In the present invention, the number of O-rings for sealing between the valve rod 6 and the holding member 14 is not limited to two, and more O-rings can be used. Is preferred.

Further, in this embodiment, the seal bellows 10 is not directly welded and fixed to the airtight chamber and the valve rod 6, but is fixed to the mounting member 9 and the holding member 14, and the holding member 14 and the valve rod 6 are fixed. 6 between the first and second
Since the sealing is performed by the O-rings 18 and 19, the manufacturing cost required for the sealing portion of the gate valve can be reduced, and the maintenance is relatively easy.

Second Embodiment FIG. 8 is a sectional view showing the structure of a gate valve according to a second embodiment of the present invention. The gate valve shown in FIG.
Although the configuration is substantially the same as the configuration of the first embodiment described above, the gate valve 101 according to the present embodiment differs from the gate valve 101 of the first and second bearing members 17 and 21 in that the second bearing member 21 is provided. O for sealing between the rod 6 and the holding member 14
The difference is that the ring is one O-ring 18 and the dust seal 23 is not provided. Gate valve 1 according to the present embodiment
In the case of No. 01, the sealing performance, durability and the like are inferior to those of the gate valve 1 according to the first embodiment, but the manufacturing cost can be further reduced.

[0046]

According to the gate valve of the present invention, the sealing performance between the airtight chamber and the outside of the airtight chamber can be improved, the manufacturing cost required for the seal portion can be reduced, and the maintenance can be facilitated. be able to.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a first embodiment of a gate valve according to the present invention.

FIG. 2 is a cross-sectional view of the gate valve shown in FIG. 1 taken along the line AA.

3A and 3B are explanatory diagrams illustrating a relative positional relationship between a roller and a roller receiving member, wherein FIG. 3A illustrates a relative positional relationship when a valve body has an opening portion opened, and FIG. Shows the relative positional relationship when the valve is in the state where the opening is closed, and (c) shows the relative positional relationship when the valve is in a state where the opening is sealed.

FIG. 4 is a sectional view showing an example of an air cylinder.

FIG. 5 is a cross-sectional view showing a state where an opening is closed by the gate valve shown in FIG. 1;

FIG. 6 is a diagram showing an operation state A of the gate valve shown in FIG.
It is sectional drawing of the -A line direction.

7 is a cross-sectional view showing a state in which the opening is sealed by tilting the valve body from the operation state of the gate valve shown in FIG. 6;

FIG. 8 is a sectional view showing a second embodiment of the gate valve according to the present invention.

FIG. 9 is a perspective view showing an example of a vacuum processing apparatus having a multi-chamber configuration.

FIG. 10 is an explanatory view showing an example of the structure of a gate valve.

FIG. 11 is an explanatory view showing a state where the gate is closed and sealed by the gate valve shown in FIG. 10;

[Explanation of symbols]

1, 101 gate valve, 2 valve body, 4 connecting member,
6: valve rod, 8: mounting member, 9: mounting member, 10
... seal bellows, 14 ... holding member, 15 ... support member,
Reference Signs List 16 air cylinder, 17 first bearing member, 18 first O ring, 19 second O ring, 20 piston rod, 21 second bearing member, 22 roller receiving member, 22a ... First holding part, 22b. Inclined surface, 22c. Second holding part, 24. Roller, 25. Spring member, 26. Fixing member, 28. Coil spring, 30. Connection plate, 50. ring.

──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Joe Tamura 4-3-1 Tsujido Shinmachi, Fujisawa-shi, Kanagawa NOK Co., Ltd. (56) References JP-A-9-310766 (JP, A) −4967 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) F16K 3/00-3/36 F16K 51/02

Claims (3)

(57) [Claims] 1. A valve body provided in an airtight chamber, capable of opening and closing an opening of the airtight chamber, and capable of sealing the opening by tilting with respect to the opening, and supported rotatably about a predetermined axis. A holding member, a valve rod fixed to one end portion, provided so as to protrude from the airtight chamber to the outside of the airtight chamber, inserted into an insertion hole of the holding member, and held so as to be able to move directly; and the valve rod. A seal bellows provided on an outer periphery of a shaft portion for sealing between the airtight chamber and the holding member and receiving deformation caused by tilting of the valve rod; A sealing member that is held in the insertion hole near the airtight chamber and seals between the holding member and the valve rod; and an insertion that fits on the outer periphery of the valve rod and separates the holding member from the airtight chamber. The valve lock is held in the hole. A bearing member having a lubricating performance for receiving a reaction force acting through the valve rod from the opening at the time of tilting; and a predetermined position at which the valve body is connected to the valve rod and the valve body closes the opening. A tilting mechanism that tilts with a shaft as a fulcrum; and a driving unit that is connected to the valve rod via the tilting mechanism and that supplies a driving force necessary for linear movement and tilting of the valve rod. A first bearing member, which is provided in order from the side closer to the predetermined shaft and is made of a deformable material, and a second bearing member made of a material having a higher load resistance than the first bearing member. Gate valve consisting of a bearing member. 2. The gate valve according to claim 1, wherein a plurality of the sealing members are arranged in parallel with the valve rod. 3. An outside of the second bearing member in an insertion hole of the holding member, the valve rod being fitted to the valve rod, so that dust between the first and second bearing members and the valve rod is removed. 3. The gate valve according to claim 1, further comprising a dust seal for preventing intrusion.