JP3306824B2 - Gate valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve capable of opening and closing an opening of a vacuum processing chamber used in, for example, a semiconductor device manufacturing process.

[0002]

2. Description of the Related Art In a dry etching process, a sputtering process, an epitaxial wafer forming process and the like in a semiconductor manufacturing process, for example, a multi-chamber vacuum processing apparatus in which a plurality of vacuum processing chambers are connected as shown in FIG. 11 is used. Is done. The vacuum processing apparatus 101 of FIG.
A plurality of vacuum processing chambers 105 for performing various processes can be connected to the outer periphery of the transfer chamber 102 where the wafer W is loaded and unloaded. Wafer W transfer chamber 102 and each vacuum processing chamber 10
The movement between 5 and 5 is performed through the gate G. The opening and closing and sealing of the gate G are performed by a gate valve (not shown).

In a vacuum processing apparatus 101 shown in FIG. 11, a wafer W is loaded into a transfer chamber 102 by a transfer device (not shown) through a transfer port 103 of a transfer path 104, and a vacuum transfer robot 107 provided in the transfer chamber 102 is provided. Hold by. When the wafer W is held by the vacuum transfer robot 107, the transfer port 103 is closed, and the transfer chamber 102 is evacuated. At this time, each gate valve is in a state where each gate is sealed. When the evacuation in the transfer chamber 102 is completed, each gate valve is driven to open the gate G, and the wafer W is moved by the vacuum transfer robot 107.
Is transported to a predetermined vacuum processing chamber. In the vacuum processing chamber, in order to perform processing, each gate valve is driven to close the gate G, and a predetermined processing of the wafer W is performed. When the predetermined processing of the wafer W is completed, the gate valve is driven to open the gate G, the wafer W is again taken out of the vacuum processing chamber by the vacuum transfer robot 107, and automatically out of the vacuum processing apparatus 101 through the loading / unloading port 103. It is carried out.

As a structure of the gate valve 106 capable of opening and closing and sealing the gate G in the vacuum processing apparatus 101 as described above, for example, a structure as shown in FIGS. 12 and 13 is known. In FIG. 12, the transfer chamber 202
Communicates with the vacuum processing chamber 203 through the gate G. The gate G is opened and closed by a gate valve 201. The gate valve 201 includes a valve body 205 that opens and closes and seals the gate G. And a seal bellows 2 for sealing between the transfer chamber 202 and the valve rod 206.
07 and a drive unit (not shown) for linearly moving and tilting the valve rod 206. The gate valve 201
In FIG. 12, the gate G is open. To close and seal the gate G, as shown in FIG. 13, the valve rod 206 is moved directly to the position where the valve body 205 closes the gate G, and the valve rod 206 is tilted about the axis 208 as shown in FIG. Performed by As a result, the valve body 205 presses the O-ring 204 provided on the outer periphery of the gate G, and the gate G is sealed.

[0005]

By the way, in the gate valve 201 having the above structure, for example,
It is known that the valve rod 206 is tilted by connecting an air cylinder as a linear motion means and the valve rod 206 via a cam mechanism. As a gate valve using such a cam mechanism, for example, Japanese Patent No. 26
There is one disclosed in Japanese Patent No. 13171. The cam mechanism of the gate valve disclosed in the above-mentioned Japanese Patent No. 261171 discloses a pin and an engagement with the pin, which connect a yoke linearly driven by an air cylinder and a block fixed to the lower end of the valve rod. Consisting of inclined oblong holes. In the cam mechanism having this configuration, the pin slides with respect to the oblong slot to generate tilting power for tilting the valve rod.

As a gate valve using a cam mechanism, for example, one disclosed in US Pat. No. 5,120,019 is known. This US Patent 5,120,0
The cam mechanism disclosed in Japanese Patent No. 19 comprises a cam plate having a cam surface which is directly moved by an air cylinder, and a cam follower comprising a roller rotatably provided on a valve rod. The valve rod is tilted by the engagement of the roller with the surface.

However, in the configuration of the cam mechanism disclosed in Japanese Patent No. 2613171, the pin slides on the inner peripheral surface of the oblong hole, so that sliding friction occurs between the two and noise is generated. The disadvantage was that it was easy and quiet. Further, since sliding friction occurs between the pin and the inner peripheral surface of the oblong slot, it is necessary to increase the output of an air cylinder as a driving means for driving the cam mechanism,
There have been disadvantages such as the cam mechanism being difficult to operate smoothly, and the inner peripheral surfaces of the pin and the oblong hole being easily worn, so that stable operation cannot be guaranteed for a long period of time.

On the other hand, in the cam mechanism having the structure disclosed in US Pat. No. 5,120,019, the roller as the cam follower rolls on the cam surface of the cam plate, so that the sliding friction hardly occurs, and mainly Rolling friction occurs. For this reason, the operation of the cam mechanism is relatively smooth and excellent in quietness, but it is necessary to instruct the roller to be rotatable with the support shaft, and the structure becomes complicated, and the distance between the roller and the support shaft is increased. However, since a large radial load is applied to this bearing, there has been a problem in the reliability of the bearing. Also, there is a limit to reducing the diameter of the roller, which is disadvantageous from the viewpoint of miniaturization.

The present invention has been made in view of the above-mentioned problems, and has a simple structure, a small size, and a low cost.
It is an object of the present invention to provide a gate valve that can move smoothly, operate at high speed, is quiet, and has a highly reliable cam mechanism.

[0010]

SUMMARY OF THE INVENTION A gate valve according to the present invention is provided in an airtight chamber, and is capable of opening and closing an opening of the airtight chamber and sealing the opening by tilting with respect to the opening. Body, the valve body is fixed to one end,
A valve rod that is held movably in a predetermined linear movement direction in which the valve element opens and closes an opening, and that is held movably about a predetermined tilt axis; and the valve rod movably moves the valve rod. Sealing means for sealing between the valve body and the airtight chamber; regulating means for regulating the linear movement of the valve body in a direction to close the opening at a closed position where the valve body closes the opening; A valve connected to the other end outside the hermetic chamber to directly move the valve rod by the supplied direct power, and to convert the supplied direct power to tilt power to restrict the linear movement in the closed position. A gate mechanism having a cam mechanism for tilting a rod around the tilt axis in a direction in which the valve body seals the opening, and a driving unit for supplying a direct power to the cam mechanism; The rolling element and the rolling surface of the rolling element A rolling member holding member connected to the driving means; a cam surface disposed opposite to the rolling member holding member, wherein the rolling member rolls and tilts the valve rod; A cam member connected to the valve rod, and an opposing surface opposing a part of the rolling surface of the rolling element rotatably held by the rolling element holding member, wherein the rolling surface and the opposing surface are provided. And a lubricant holding member for holding a lubricant in a gap formed between the two.

The lubricant holding member is provided on the rolling element holding member.

Preferably, the rolling surface of the rolling element is a cylindrical surface, and the opposing surface of the lubricant holding member extends along the generatrix of the cylindrical surface.

[0013] More preferably, the opposing surface of the lubricant holding member has a concave portion that is depressed with respect to the rolling surface of the rolling element.

Preferably, the opposing surface of the lubricant holding member has a lubricant holding area constituted by irregularities.

Preferably, the holding surface of the rolling element holding member has a lubricant retaining recess for retaining the lubricant.

More preferably, the lubricant retaining recess is formed of a plurality of grooves formed on a holding surface of the rolling element holding member and extending in a rotation direction of the rolling element.

The lubricant comprises a semi-solid lubricant.

The lubricant holding member can be formed of a resin.

Further, the gate valve according to the present invention is capable of elastically changing the relative position between the rolling element holding member and the cam member while maintaining the relative positional relationship between the rolling element holding member and the cam member constant. Further, there is provided an elastic member for maintaining the pressure.

Preferably, the elastic member is provided so as to surround the rolling element holding member and the cam member,
It is composed of a coil spring that substantially connects the rolling element holding member and the cam member.

In the present invention, when the rolling element holding member is linearly moved by the driving means in the direction in which the valve element closes the opening, the valve rod moves in that direction, and the linear movement is restricted at the closed position.
Further, when the rolling element holding member is driven, the rolling element rotatably held on the holding surface of the rolling element holding member moves while rolling on the cam surface of the cam member connected to the valve rod.
Thereby, the valve rod tilts, and the opening is sealed by the valve body.

At this time, since the rolling element rotates with respect to the holding surface of the rolling element holding member, sliding friction occurs with the holding surface, and rolling friction occurs with the cam surface. on the other hand,
Since the lubricant is held between the opposing surface of the lubricant holding member and a part of the rolling surface of the rolling element, when the rolling element rolls on the cam surface, the rolling element rotates with respect to the opposing surface. When the rolling element rotates with respect to the opposing surface, lubricant adheres to the rolling surface,
A state in which the lubricant adheres to the entire circumference of the rolling surface is obtained. For this reason, the space between the rolling element and the cam surface of the cam member is lubricated, and the rolling friction therebetween is reduced. Further, the lubricant adhered to the rolling surface is also supplied between the rolling element and the holding surface of the rolling element holding member, and the space between the rolling surface and the holding surface is lubricated to reduce sliding friction.

Further, in the present invention, by forming a plurality of grooves on the holding surface of the rolling element holding member along the rotating direction of the rolling element, the lubricant attached to the rolling surface stays in these grooves. Thus, the lubricant is always stably supplied between the rolling surface and the holding surface. By forming a lubricant retaining recess on the holding surface, the lubricant attached to the rolling surface accumulates in the lubricant retaining recess, and lubrication between the retaining surface of the rolling element holding member and the rolling surface is more stable. Be transformed into

Further, in the present invention, by using a semi-solid lubricant such as grease as the lubricant, the lubricant can be stably supplied between the facing surface of the lubricant holding member and the rolling surface of the rolling element. In addition, the lubricant can be prevented from scattering around without causing the lubricant to scatter around.

Further, in the present invention, by providing the lubricant holding region on the opposing surface of the lubricant holding member, a sufficient amount of the lubricant is held in the lubricant holding region, and the lubricant is not supplied from the outside. Lubricant is supplied stably.

[0026]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a configuration of a gate valve according to an embodiment of the present invention, and FIG.
FIG. 2 is a sectional view taken along the line AA of FIG. 1 and 2
The gate valve 1 shown in FIG. 1 includes a valve body 2, a valve rod 6 connected to the valve body 2 via a connecting member 4, and a seal bellows 1.
0, a cam mechanism 31, and a cylinder device 60. Here, the valve element 2 is the valve element of the present invention, the valve rod 6 is the valve rod of the present invention, the seal bellows 6 is the sealing means of the present invention, the cam mechanism 31 is the cam mechanism of the present invention, and the air cylinder 60 is the present invention. Correspond to one specific example.

The valve body 2 is formed of a flat plate-like member, and can open and close the opening 51 of the airtight chamber 50, and seals the opening 51 through the O-ring 2a by tilting with respect to the opening 51. be able to. In the present embodiment, a flat plate-shaped member is shown as the valve body 2. However, when the opening has a curved surface shape, it may be shaped accordingly. Further, as a material for forming the valve body 2, a material such as a metal material which does not generate particles as much as possible and does not emit gas or the like is desirable. The connection between the valve body 2 and the connection member 4 is performed by, for example, a bolt. The O-ring 2a is fitted in a so-called dovetail groove 2b formed on the valve body 2 for preventing falling off.

The valve rod 6 has one end to which the valve body 2 is fixed via the connecting member 4 and an attachment member 52 attached to the attachment portion 52 of the airtight chamber 50 via the O-ring 8b. 8 is provided so as to protrude from the airtight chamber through the insertion hole 8a. Further, the other end of the valve rod 6 is connected to the holding member 41 and the holding member 4
Since the holding member 41 held by 1 is rotatable about the support shaft 41a, the valve rod 6 can also be tilted about the support shaft 41a. The connection between the valve rod 6 and the connection member 4 is performed by, for example, welding. As a material for forming the valve rod 6, a material such as a metal material which does not generate particles as much as possible and does not emit gas or the like is desirable.

The seal bellows 10 is a member for sealing between the inside of the airtight chamber 50 and the valve rod 6, and is capable of expanding and contracting as the valve rod 6 moves linearly and tilts. Further, the seal bellows 10 is formed of a metal material, is kept airtight to a fixed ring member 9 fixed to an end of the mounting member 8 via an O-ring 9a, and is fixed by a joining means such as welding. I have. The other end of the seal bellows 10 is fixed to a fixing ring member 11 fitted and fixed to the valve rod 6 by joining means such as welding. Note that an O-ring 11a is interposed between the fixed ring member 11 and the valve rod 6. This allows
Even if the valve rod 6 moves linearly and tilts, the above-mentioned airtight chamber can be sealed, and contaminants such as particles can be prevented from entering from the outside.

The holding member 41 is a cylindrical member having a bottom and an insertion hole 41c for fitting and inserting the valve rod 6 in the bottom.
Are formed on the outer periphery of the support shaft 41a at positions facing each other.
Are formed respectively. Since the holding member 41 is a cylindrical member, the seal bellows 10 that can be expanded and contracted by the direct movement of the valve rod 6 can be accommodated therein.
Each support shaft 41a formed on the holding member 41 is rotatably held by a bearing member 42 and a bearing member 43, respectively. Thereby, the holding member 41 is connected to the support shaft 41a.
, And the valve rod 6 can also be tilted.

The bearing member 43 for rotatably holding one of the support shafts 41a is movably held on a rail 55 provided along the direction of linear movement on the side of the air cylinder 60 facing the two air cylinders 60. Have been. The other support shaft 4
The bearing member 42 for rotatably holding 1a is connected to the linear member 44 movably held on a rail 56 provided along the linear direction on the side surface of the other air cylinder 60 by a fastening means such as a bolt. Are linked. This allows
The holding member 41 is movably held along the linear movement directions B1 and B2, and the valve rod 6 is movable in the linear movement directions B1 and B2.

Stoppers 12 and 13 are provided at ends of the rails 55 and 56 on the airtight chamber 50 side, respectively. Note that the stopper members 12 and 13 correspond to specific examples of the restricting means of the present invention. Stopper member 1
When the valve body 2 moves linearly in the direction B1, that is, in the direction in which the valve body 2 closes the opening 51, the bearings 43 and 42 come into contact with the bearing members 43 and 42, respectively. Regulate. Stopper members 12 and 13
Can be formed of, for example, a resin material in order to reduce the impact caused by the collision with the bearing members 43 and 42. An end of the rail 56 on the side of the connecting plate 30 can be inserted into a through hole 30 b formed in the connecting plate 30.

The air cylinders 60 are arranged at positions not symmetrical with respect to the valve rod 6. These air cylinders 60 are fixed to the outer surface of the airtight chamber 50 of the mounting plate 52 of the airtight chamber 50 by fastening means such as bolts. The air cylinder 60 has built-in piston rods 61 that expand and contract by compressed air, and these piston rods 61 are fixed to the connecting plate 30, respectively.
The piston rod 61 of the air cylinder 60
1 and B2, whereby the connecting plate 30 also moves directly in the linear movement directions B1 and B2.

The coupling plate 30 has two engaging members 71 on both sides of the outer periphery of the holding member 41, which are formed with locking portions 71a that fit into grooves 41d formed along the linear motion directions B1 and B2. Is provided. One of the two engaging members 71 is a linear motion member 7 movably held by the rail 56.
2 are connected. The engaging member 71 engages with the lower end of the groove 41d to move the holding member 41 in the linear movement direction when the connecting plate 30 linearly moves in the linear movement direction B2, that is, in the direction in which the valve body 2 opens the opening 51. When the connecting plate 30 is pulled in the direction B1 and moves linearly in the direction B1, that is, in the direction in which the valve body 2 closes and seals the opening 51, the relative movement between the holding member 41 and the connecting plate 30 is restricted within a certain range. Tolerate.

The cam mechanism 31 is provided between the holding member 41 and the connecting plate 30 to directly move the valve rod 6 by the direct power supplied from the air cylinder 60 through the connecting plate 30. Then, the supplied direct power is converted into tilting power, and the valve rod 6 whose linear motion is restricted at the closed position where the valve body 2 closes the opening 51 is pivoted in the direction in which the valve body 2 seals the opening 51. Tilt around 41a.

FIG. 3 is a sectional view showing a specific structure of the cam mechanism 31. As shown in FIG. 3, the cam mechanism 31 includes a cam member 32 fixed to the lower end of the holding member 41, a roller member 35, and a roller holding member 38 fixed to a position of the connecting plate 30 facing the cam member 32. , A coil spring 80 for connecting the holding member 41 to the connecting plate 30, and a lubricant holding member 91 provided on the roller holding member 38.

Here, the roller member 35 is the rolling element of the present invention, the roller holding member 38 is the rolling element holding member of the present invention, the cam member 32 is the cam member of the present invention, and the lubricant holding member 91 is the lubricant of the present invention. The holding member and the coil spring 80 correspond to respective specific examples of the elastic member of the present invention.

The cam member 32 has a cam surface 32a having a predetermined shape formed of a smoothly continuous curved surface and flat surface.
a. The cam surface 32a includes, for example, a holding portion 32b formed of a concave curved surface capable of holding the roller 35,
An inclined surface portion 32c formed of a curved surface having a curvature such that a required tilting power is generated in the valve rod 6 (holding member 41) by the rotation of the roller 35, and a flat surface formed of flat surfaces along the linear motion directions B1 and B2. 32d. Therefore, the rolling of the roller 35 on the cam surface 32a changes the relative positional relationship between the cam member 32 and the biting member 38 in the linear motion directions B1 and B2, and
The relative positional relationship in the tilting directions C1 and C2 changes, and the cam surface 32a connects the valve rod 6 to the support shaft 4 of the holding member 41.
1a.

The roller 35 is formed of a cylindrical body and has a rolling surface 35a formed of a cylindrical surface. This roller 35
The roller rolls on the cam surface 32a of the cam member 32 and slides on the holding surface 38a of the roller holding member 38, and a large load is applied. For this reason, it is preferable to use a metal material having relatively high strength and high wear resistance for the roller 35. Note that ring members (not shown) are fitted and fixed to both ends in the axial direction of the roller 35, and when these ring members engage with the roller holding member 38, the roller 35 holds the roller holding member 38. The movement in the axial direction with respect to the surface 38a is restricted.

FIGS. 4A and 4B are views showing the structure of the roller holding member 38. FIG. 4A is a sectional view, and FIG. 4B is a top view of the roller holding member 38 shown in FIG. It is a figure, (c) is the bottom view which looked at roller holding member 38 shown in (a) from arrow D2.

As shown in FIG. 4, the roller holding member 38
Is a holding surface 35a for holding the rolling surface 35a of the roller 35.
The roller 35 is rotatably held in the direction of arrow R by the holding surface 38a. The roller holding member 38 has a screw hole 38d formed on the bottom surface, and a bolt is screwed into the screw hole 38d to fix the roller holding member 38 to the connecting plate 30. Since the roller holding member 38 is fixed to the connecting plate 30,
It is directly driven by the connecting plate 30 in the linear motion directions B1 and B2. A screw hole 38c for fixing the lubricant holding member 91 to the roller holding member 38 is formed on a side surface of the roller holding member 38.

The holding surface 38a of the roller holding member 38 has a plurality of grooves 38b formed along the rotation direction R of the roller 35, as shown in FIG. This groove 3
8b is for retaining the lubricant G held by a lubricant holding member 91 described later, and constitutes a lubricant retaining recess of the present invention.

FIGS. 5A and 5B are views showing the structure of the lubricant holding member 91. FIG. 5A is a sectional view, and FIG. 5B is a view of the lubricant holding member 91 shown in FIG. FIG. 3C is an enlarged view of a circle A in FIG. In FIG. 5, the lubricant holding member 91 is a member having a substantially L-shaped cross section. The lubricant holding member 91 is connected to the roller holding member 3 through a through hole 91d formed on one side of the L-shaped member.
8 is fixed to the roller holding member 38 by screwing a bolt into the screw hole 38c. In the lubricant holding member 91, one surface of the other side of the L-shaped member is an opposing surface 91a opposing a part of the rolling surface 35a of the roller 35, and the opposing surface 91a The lubricant G is held in a gap formed between the rolling surface 35a and the rolling surface 35a.

At the tip of the facing surface 91a of the lubricant holding member 91, a projecting portion 91c projecting from the facing surface 91a is formed. At the tip of the opposing surface 91a of the lubricant holding member 91, a concave portion 91b recessed with respect to the rolling surface 35a of the roller 35 is formed adjacent to the projecting portion 91c.
Projection 91c and recess 91b of lubricant holding member 91
5B, extends along the generatrix of the rolling surface 35a of the roller 35, and faces substantially the entire area of the rolling surface 35a of the roller 35 in the axial direction. The protrusion 91c and the recess 91b of the lubricant holding member 91 constitute a lubricant holding area for holding the lubricant G by the unevenness.

As shown in FIG. 3, the lubricant G is applied to the opposing surface 91 a of the lubricant holding member 91, the projection 91 c and the recess 9.
It is held in a gap formed between the roller 1b and the rolling surface 35a of the roller 35. In other words, by providing the protrusion 91c near the rolling surface 35a of the roller 35 at the tip of the facing surface 91a of the lubricant holding member 91, when the roller 35 rotates in the direction of the arrow R2 shown in FIG. This prevents a large amount of the lubricant G held in the gap between the surface 91a and the rolling surface 35a of the roller 35 from adhering to the rolling surface 35a of the roller 35 and being carried. That is, the facing surface 9 of the lubricant holding member 91
The protrusion 91c of 1a regulates the amount of the lubricant G adhered to the rolling surface 35a of the roller 35, and functions so that the amount of adhesion is constant.

Also, the opposing surface 91a of the lubricant holding member 91
By providing the protruding portion 91c and the concave portion 91b, a larger amount of the lubricant G can be held as compared with the case where the facing surface 91a is flat.

As the lubricant G, for example, a grease composed of a semi-solid lubricant is used. That is,
By using the lubricant G in an intermediate state between liquid and solid, the opposing surface 91a of the lubricant holding member 91 and the roller 3
5 can be held in the gap with the rolling surface 35a.

The lubricant holding member 91 is made of, for example, a metal material such as Duracon, and is used by cutting.

One end of the coil spring 80 is fitted and fixed in a fixing groove 41 h formed at the end of the holding member 41, and the other end is fitted and fixed in a fixing groove 30 a formed in the connecting plate 30. Have been. The coil spring 80 is provided so as to surround the cam member 32 and the roller holding member 38. The coil spring 80 is connected to the connecting plate 30 and the holding member 4.
1 so that the relative positional relationship between the cam member 32 and the roller holding member 38 is maintained constant while the relative position between the cam member 32 and the roller holding member 38 is elastically allowed to change. Function. That is, the coil spring 80 substantially connects the cam member 32 and the roller holding member 38. Cam member 32 and roller holding member 3
8 is at a certain relative position, the roller 35
The cam member 32 is held by a holding portion 32b of a cam surface 32a.

Next, the operation of the gate valve 1 having the above configuration will be described. The state of the gate valve 1 shown in FIGS. 1 and 2 is a state in which the opening 51 is opened. From this state, the air cylinder 60 is driven to move the roller holding member 38 so that the opening 50 is closed. It is moved directly in the direction B1.

When the air cylinder 60 is driven, the valve body 2
Moves toward the position where the opening 51 is closed in the translation direction B1 as shown in FIGS. 6 and 7. In this state, the valve element 2 does not seal the opening 51. FIG.
FIG. 7 is a sectional view taken along line AA of FIG. When the valve body 2 moves in the linear movement direction B1, the roller holding member 3
8 presses the cam member 32 via the roller 35. The roller 35 is held by the holding portion 32a of the cam surface 32a of the cam member 32. Even when the roller holding member 38 is moved at a high speed, the holding state of the roller 35 of the holding portion 32a of the cam member 32 is maintained and released by the elastic force of the coil spring 80. There is no. Further, since the propulsive force from the roller holding member 38 to the roller 35 is transmitted directly to the holding portion 32a of the cam member 32, not by frictional force or the like, the valve rod 6 can be moved at high speed.

When the roller holding member 38 moves and the valve rod 6 reaches a predetermined position, the support shaft 41 of the holding member 41
The bearing members 43 and 42 supporting the contact members a contact the stopper members 12 and 13, and the linear movement direction B of the holding member 41.
1 is regulated. That is, the linear motion of the valve rod 6 in the linear motion direction B1 is restricted. When the linear force from the air cylinder 60 is further supplied in a state where the linear motion of the holding member 41 in the linear motion direction B1 is restricted, the cam mechanism 31 operates to move the valve rod 6 as shown in FIG. The valve body 2 has the opening 5
1 is tilted toward the direction of sealing.

The operation of the cam mechanism 31 at this time will be described with reference to FIG. When the roller holding member 38 is further pushed in the linear movement direction B1 by the air cylinder 60 in a state where the linear movement of the holding member 41 in the linear movement direction B1 is restricted, the holding of the roller holding member 38 is performed as shown in FIG. The roller 35 held on the surface 38a starts rolling from the holding portion 32b of the cam surface 32a of the cam member 32 toward the inclined surface portion 32c against the elastic force of the coil spring 80.

The roller 35 is connected to the cam surface 32a of the cam member 32.
When the roller 35 starts rolling from the holding portion 32b toward the inclined surface portion 32c, the roller 35 is moved to the holding surface 38 of the roller holding member 38.
On a, it rotates in the direction of arrow R1 shown in FIG. That is, the rolling surface 35a of the roller 35 slides with respect to the holding surface 38a.

When the roller 35 rotates in the direction of the arrow R1, the lubricant G held between the lubricant holding portion 91 and the rolling surface 35a of the roller 35 is applied to the rolling surface 35a of the roller 35. The amount of the lubricant G applied to the rolling surface 35 a of the roller 35 is restricted to be substantially constant by the action of the protrusion 91 c of the lubricant holding portion 91.

When the lubricant G adheres to the rolling surface 35a of the roller 35, the space between the rolling surface 35a of the roller 35 and the holding surface 38a of the roller holding member 38 is lubricated.

At this time, the lubricant G attached to the rolling surface 35 a of the roller 35 lubricates between the rolling surface 35 a of the roller 35 and the holding surface 38 a of the roller holding member 38, and The liquid gradually accumulates in the groove 38b formed on the holding surface 38a and stays in the groove 38b.
Therefore, the lubricant G is always supplied between the rolling surface 35a of the roller 35 and the holding surface 38a of the roller holding member 38.

As described above, since the lubricant G is stably supplied between the rolling surface 35a of the roller 35 and the holding surface 38a of the roller holding member 38, the rolling surface 35a and the holding surface 38
a is reduced. Since the rolling surface 35a of the roller 35 is pressed against the cam surface 32a of the cam member 32 with a strong force, the reaction force causes the rolling surface 35a of the roller 35 to be pressed against the holding surface 38a of the roller holding member 38 with a strong force. However, since a sufficient and stable amount of the lubricant G is always supplied between the rolling surface 35a and the holding surface 38a, abrasion, noise and vibration of the rolling surface 35a and the holding surface 38a due to sliding friction are generated. Is greatly suppressed.

Further, on the rolling surface 35a of the roller 35,
When rolling on the cam surface 32a of the cam member 32, the lubricant G is completely adhered, so that the rolling friction between the rolling surface 35a and the cam surface 32a is greatly reduced. Therefore, the roller 3
5 enables the smooth rolling of the cam surface 32a of the cam member 32, and the generation of noise and vibration is greatly reduced.

Further, on the rolling surface 35a of the roller 35,
Even if the lubricant G adheres, since the lubricant G is on a semi-solid, the lubricant G is not scattered to the surroundings, and further, by the action of the protrusion 91c of the lubricant holding member 91, the surroundings of the lubricant G are further increased. Spattering is suppressed. As a result, the lubricant G
However, for example, it is possible to prevent the airtight chamber 50 from being contaminated.

The roller 35 is positioned on the flat portion 32d of the cam member 32.
When it rolls up to, as shown in FIG.
The connecting plate 3 is compressed in the linear movement directions B1 and B2 and is also deformed in the tilting directions C1 and C2 of the valve rod 6.
0 and the holding member 41, the linear motion directions B1 and B2
The restoring force of the coil spring 80 acts on the tilting directions C1 and C2.

On the other hand, when the roller 35 rolls on the cam surface 32a of the roller holding member 38, the valve rod 6 is inclined, and the O-ring 2a provided on the valve body 2 is moved to the opening 5 as shown in FIG.
1, and the O-ring 2a is crushed.
At this time, the roller holding member 38 by the air cylinder 60
Is amplified by the wedge effect of the inclined surface portion 32c of the cam surface 32 of the cam member 32, and the force for crushing the O-ring 2a of the valve body 2 is, for example, about 10 times the direct power. As a result, the valve body 2 can sufficiently crush the O-ring 2a, and the opening 51 is sealed well. With the above operation, the sealing of the opening 51 of the airtight chamber 50 by the valve body 2 is completed.

The operation of opening the opening 51 of the airtight chamber 50 is performed by driving the air cylinder 60 in the opposite direction to that described above, that is, by extending the piston rod 61 from the air cylinder 60. When the direct power of the air cylinder 60 in which the valve body 2 closes the opening 51 is released, the valve rod 6 is released.
The roller 35 is a flat portion 32 of the cam surface 32a of the cam member 32.
From the position d, the restoring force of the coil spring 80 rolls the inclined surface portion 32c and is again held by the holding portion 32b, and the valve rod 6 stands upright. Also at this time, roller 3
5 rotates on the holding surface 38a of the roller holding member 38 in a direction opposite to the above-mentioned arrow R1, and the lubricant G adheres to the rolling surface 35a of the roller 35.

As described above, according to the gate valve of the present embodiment, the roller 35 is used for the cam mechanism 31 for tilting the valve rod 6, and the rolling surface 35a of the roller 35 is changed to the holding surface of the roller holding member 38. The cam member 32 is rotatably held at 38a, and the cam surface 32a of the cam member 32 is rolled. Further, the lubricant holding member 91 can supply the lubricant G stably and sufficiently to the rolling surface 35a of the roller 35 that slides on the holding surface 38a of the roller holding member 38. Therefore, it is only necessary to place the roller 35 on the holding surface 38a of the roller holding member 38.
The fifth bearing is not required, the structure can be simplified, the size of the cam mechanism 31 can be reduced, and the cost can be reduced. Further, since the shaft end of the roller 35 need not be supported, the diameter of the roller 35 can be reduced, and
2 can smoothly move when rolling on the cam surface 32a. As a result, the movement of the cam mechanism 31 can be smooth and can be operated at high speed. In addition, the cam mechanism 31 is rich in quietness and reliability. A high cam mechanism 31 is obtained. Further, since the lubricant holding member 91 can hold a sufficient amount of the lubricant G, there is no need to supply the lubricant G from the outside.

The present invention is not limited to the above embodiment. The lubricant holding member 91 of the above-described embodiment has a configuration in which the concave portion 91b and the protruding portion 91c are formed in the facing surface 91a. However, for example, a lubricant holding member having a structure as shown in FIG. 10 can be used. is there. The lubricant holding member 301 shown in FIG. 10 is formed of an L-shaped member, and has a through hole 301c for bolt insertion for fixing to the roller holding member 38 on one side of the L-shaped member. . The lubricant holding member 301 includes an opposing surface 301a opposing the rolling surface 35a of the roller 35 on one surface of the other side of the L-shaped member, and the opposing surface 301a is completely flat.

As described above, even in the configuration in which the concave portion or the protruding portion is not provided on the facing surface 301a, the rolling surface 35 of the roller 35 can be used.
The lubricant character can be held in the gap formed between a and the opposing surface 301a. Also, the lubricant holding member 301
As a material for forming the above, in addition to the above-described metal materials, for example, a resin material such as polyacetal can be used. As described above, the structure of the lubricant holding member 301 is simplified, and the cost can be reduced by molding the lubricant holding member 301 using a resin material, for example, by injection molding.

In the above-described embodiment, the cam member 3
2 is connected to the valve rod 6 (holding member 41), and the roller holding member 38 is directly driven by the air cylinder 60 via the connecting plate 30. For example, the roller holding member 38 is connected to the valve rod 6 (holding member 41). 41), and the cam member 32 may be directly driven by the air cylinder 60. Further, in the above-described embodiment, the case where the roller 35 is used as the rolling element has been described. However, for example, a sphere may be used.

[0068]

According to the present invention, the structure of the cam mechanism of the gate valve can be simplified, miniaturized and reduced in cost, the movement can be made smooth and high speed, and the quietness and reliability can be achieved. Can be expensive.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a configuration of a gate valve according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a sectional view showing a specific structure of a cam mechanism section 31.

FIG. 4 is a view showing a structure of a roller holding member 38,
(A) is a cross-sectional view, (b) is a top view of the roller holding member 38 shown in (a) viewed from the direction of the arrow D1,
FIG. 3C is a bottom view of the roller holding member 38 shown in FIG.

FIG. 5 is a view showing a structure of a lubricant holding member 91.

FIG. 6 is a cross-sectional view showing a state in which an opening is closed by the gate valve shown in FIG. 1;

FIG. 7 shows A in the operating state of the gate valve shown in FIG. 6;
It is sectional drawing of the -A line direction.

FIG. 8 is a cross-sectional view showing a state in which the valve body is tilted from the operation of the gate valve shown in FIG. 7 and the opening is sealed.

FIG. 9 is a cross-sectional view for explaining the operation of the cam mechanism 31.

FIG. 10 is a diagram showing another configuration example of the lubricant holding member.

FIG. 11 is a perspective view showing an example of a vacuum processing apparatus having a multi-chamber configuration.

FIG. 12 is an explanatory view showing an example of the structure of a gate valve.

FIG. 13 is an explanatory view showing a state in which the gate is closed and sealed by the gate valve shown in FIG. 12;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Gate valve 2 ... Valve element 4 ... Connection member 6 ... Valve rod 10 ... Seal bellows 30 ... Connection plate 31 ... Cam mechanism part 32 ... Cam member 32a ... Cam surface 35 ... Roller 35a ... Rolling surface 38 ... Roller holding member 38a: holding surface 41: holding member 60: air cylinder

Claims (12)

(57) [Claims] 1. A valve body provided in an airtight chamber, capable of opening and closing an opening of the airtight chamber and capable of sealing the opening by tilting with respect to the opening, and the valve body being fixed to one end. The valve body is held movably in a predetermined linear movement direction in which the valve body opens and closes an opening, and the valve rod is held movably about a predetermined tilt axis, and the valve rod is movably held. Sealing means for sealing between the valve rod and the airtight chamber; regulating means for regulating the linear movement of the valve body in the direction of closing the opening at a closed position where the valve body closes the opening; The valve is connected to the other end of the rod outside the airtight chamber, the valve rod is linearly moved by the supplied direct power, and the supplied direct power is converted to tilt power to restrict the linear movement in the closed position. The valve rod is tilted so that the valve element seals the opening. A gate valve comprising: a cam mechanism for tilting about a shaft; and driving means for supplying direct power to the cam mechanism, wherein the cam mechanism comprises: a rolling element; and a rolling surface of the rolling element. A rolling member holding member driven by the driving unit, the cam surface being provided to face the rolling member holding member, the rolling member rolling and tilting the valve rod; A cam member connected to the valve rod; and an opposing surface opposing a part of a rolling surface of the rolling element rotatably held by the rolling element holding member, wherein the rolling surface and the opposing surface are provided. And a lubricant holding member for holding a lubricant in a gap formed between the gate valve and the gate valve. 2. The gate valve according to claim 1, wherein the lubricant holding member is provided on the rolling element holding member. 3. The gate valve according to claim 1, wherein the rolling surface of the rolling element is a cylindrical surface, and the opposing surface of the lubricant holding member extends along a generating line of the cylindrical surface. . 4. The gate valve according to claim 1, wherein the opposing surface of the lubricant holding member has a lubricant holding region formed by unevenness. 5. The gate valve according to claim 4, wherein the opposing surface of the lubricant holding member has a concave portion that is depressed with respect to the rolling surface of the rolling element. 6. The opposing surface of the lubricant holding member is provided with a protruding portion that approaches the rolling surface of the rolling element.
6. The gate valve according to any one of 5. 7. The gate valve according to claim 1, wherein the holding surface of the rolling element holding member has a lubricant retaining recess for retaining the lubricant. 8. The method according to claim 1, wherein the lubricant retaining recess comprises a plurality of grooves formed on a holding surface of the rolling element holding member and extending in a rotating direction of the rolling element. Gate valve. 9. The gate valve according to claim 1, wherein said lubricant comprises a semi-solid lubricant. 10. The gate valve according to claim 1, wherein the lubricant holding member is formed of a resin. 11. An elastic member for maintaining a constant relative positional relationship between the rolling element holding member and the cam member while elastically permitting a change in the relative position between the rolling element holding member and the cam member. The gate valve according to claim 1, further comprising: 12. The method according to claim 11, wherein said elastic member is provided so as to surround said rolling element holding member and said cam member, and comprises a coil spring substantially connecting said rolling element holding member and said cam member. The described gate valve.