JP3255178B2 - Inkjet head - Google Patents

Inkjet head

Info

Publication number
JP3255178B2
JP3255178B2 JP34534191A JP34534191A JP3255178B2 JP 3255178 B2 JP3255178 B2 JP 3255178B2 JP 34534191 A JP34534191 A JP 34534191A JP 34534191 A JP34534191 A JP 34534191A JP 3255178 B2 JP3255178 B2 JP 3255178B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
pressure generating
generating chamber
ink jet
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP34534191A
Other languages
Japanese (ja)
Other versions
JPH05169651A (en
Inventor
富士男 赤羽
修 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP34534191A priority Critical patent/JP3255178B2/en
Publication of JPH05169651A publication Critical patent/JPH05169651A/en
Application granted granted Critical
Publication of JP3255178B2 publication Critical patent/JP3255178B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、印字信号に応じてイン
ク滴を吐出して、記録紙等の記録媒体上にインク像を形
成するオンデマンド型インクジェットプリンタの記録ヘ
ッドに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a recording head of an on-demand type ink jet printer which forms an ink image on a recording medium such as recording paper by discharging ink droplets in response to a print signal.

【0002】[0002]

【従来の技術】印字信号に応じてインク滴を飛翔させ
る、いわゆるオンデマンド型インクジェットプリンタの
記録ヘッドには、特公平2−45985号公報や特公平2−526
25号公報に示されたように、一端が基台に固定された圧
電素子の他端を、圧力発生室を形成する容器の弾性壁
に、脚部を介して弾接させて構成されたものがある。こ
の記録ヘッドは、予め弾性壁を圧力発生室側にたわま
せ、この状態から圧電素子を収縮させて弾性壁のたわみ
を戻し、再び圧電素子を伸長させることで圧力発生室の
インクをノズルから液滴として吐出させる。
2. Description of the Related Art A recording head of a so-called on-demand type ink jet printer which flies ink droplets according to a print signal is disclosed in Japanese Patent Publication No. 2-455985 and Japanese Patent Publication No. 2-526.
As shown in Japanese Patent Publication No. 25, one end of a piezoelectric element having one end fixed to a base is elastically contacted via a leg with an elastic wall of a container forming a pressure generating chamber. There is. In this recording head, the elastic wall is bent in advance to the pressure generating chamber side, the piezoelectric element is contracted from this state, the bending of the elastic wall is returned, and the piezoelectric element is extended again, so that the ink in the pressure generating chamber is discharged from the nozzle. Discharge as droplets.

【0003】これによれば、弾性壁の所定の位置に圧電
素子の変位を伝達できるものの、記録ヘッドの小型化、
高密度化により圧電素子や圧力発生室が小型化された場
合には、十分なインク滴を吐出させるに足る圧力発生室
の容積変化を生じさせるには、弾性壁をその垂直方向に
大きく変形させることが必要となる。この結果、圧電素
子に大きな駆動電圧を印加たり、また弾性壁が局所的
に大きく変位するため大きな負担がかかることになり、
弾性壁の疲労等により信頼性の低下を招く。
According to this, although the displacement of the piezoelectric element can be transmitted to a predetermined position on the elastic wall, the size of the recording head can be reduced,
When the piezoelectric element and the pressure generating chamber are miniaturized due to the high density, the elastic wall is largely deformed in the vertical direction in order to cause a change in the volume of the pressure generating chamber sufficient to discharge sufficient ink droplets. It is necessary. As a result, a large driving voltage is applied to the piezoelectric element ,
Large displacement will result in a large burden,
The reliability is reduced due to fatigue of the elastic wall .

【0004】[0004]

【発明が解決しようとする課題】本発明はこのような課
題に鑑みてなされたもので、その目的とするところは、
軸方向に伸縮する圧電素子の変位を圧力発生室の容積変
化に高い効率で変換して低電圧駆動と弾性壁の寿命延長
を図ることができるインクジェット記録ヘッドを提供す
ることである。
DISCLOSURE OF THE INVENTION The present invention has been made in view of such a problem.
It is an object of the present invention to provide an ink jet recording head capable of converting a displacement of a piezoelectric element which expands and contracts in an axial direction into a change in volume of a pressure generating chamber with high efficiency, thereby achieving low voltage driving and extending the life of an elastic wall.

【0005】[0005]

【課題を解決するための手段】このような問題を解消す
るため本発明においては、長手方向に伸縮変位する圧電
素子によって細長く、かつ前記圧電素子の断面積よりも
大きい圧力発生室の一部を形成する弾性壁を変位させて
ノズルからインク滴を吐出させるインクジェットヘッド
において、前記弾性壁が、前記圧力発生室を封止する弾
性変形板と、前記圧電素子の列設方向の厚みよりも幅が
小さく、また前記圧電素子の列設方向に直角な方向の幅
よりも大きい島状部との積層構造として構成されてい
る。
In order to solve such a problem, the present invention provides a piezoelectric element which expands and contracts in the longitudinal direction, is elongated and has a smaller sectional area than the piezoelectric element.
In an ink-jet head for ejecting ink droplets from nozzles by displacing an elastic wall forming a part of a large pressure generating chamber, the elastic wall has an elastically deformable plate sealing the pressure generating chamber, and a row of the piezoelectric elements. smaller width than alignment direction of the thickness, also be configured as a laminated structure of the large islands than perpendicular width in the column arrangement direction of the piezoelectric element Tei
You.

【0006】[0006]

【作用】長手方向に伸縮する圧電素子の断面積が圧力発
生室よりも小さくても、島状部により圧力室の長手方向
の全体に変位を伝達して局所的に大きな変位が生じさせ
ることなく、矩形状の圧力発生室の容積を効率的に変化
させるため、弾性壁の疲労が低減される。
The cross-sectional area of the piezoelectric element that expands and contracts in the longitudinal direction generates pressure.
Even if it is smaller than the raw chamber, the island-shaped part makes the longitudinal direction of the pressure chamber
To transmit large displacements locally
Without changing the volume of the rectangular pressure generating chamber
Therefore, fatigue of the elastic wall is reduced.

【0007】[0007]

【実施例】そこで以下に本発明の詳細を図示した実施例
に基づいて説明する。図1、図2は、本発明の記録ヘッ
ドの一実施例を示すものであって、複数のノズル2が設
けられたノズル基板1、リザーバ4と圧力発生室5とが
形成されキャビティ形成基板3と、後述する弾性板8と
を積層して流路ユニットが形成されている。流路ユニッ
トは、ヘッドフレーム11に収容された圧電素子12の
先端に弾性板8を当接させてヘッドフレーム11に固定
されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the illustrated embodiments. 1 and 2 show an embodiment of a recording head according to the present invention, in which a nozzle substrate 1 provided with a plurality of nozzles 2, a reservoir 4 and a pressure generating chamber 5 are formed, and a cavity forming substrate 3 is formed. And a later-described elastic plate 8 are laminated to form a channel unit. The flow path unit is fixed to the head frame 11 by bringing the elastic plate 8 into contact with the tip of the piezoelectric element 12 housed in the head frame 11.

【0008】インク滴吐出の駆動源となる圧電素子22
は、その長手方向の約半分の一面を固定台21に固着さ
れ、固着されない他半の先端が弾性板8に接合されてい
る。固定台21には配線パターン24が施されていてリ
ードフレーム25を介して、制御基板13により電界を
圧電素子22に与える。ヘッドフレーム11は、貫通す
る取り付け穴12が形成されていて、圧電素子22を所
定の位置に位置決めするように固定台21を支持してい
る。
A piezoelectric element 22 serving as a driving source of ink droplet ejection
Is fixed to the fixed base 21 on one side in the longitudinal direction, and the other end not fixed is joined to the elastic plate 8. An electric field is applied to the piezoelectric element 22 by the control board 13 via the lead frame 25 on which the wiring pattern 24 is provided on the fixed base 21. The head frame 11 has a mounting hole 12 formed therethrough, and supports the fixed base 21 so as to position the piezoelectric element 22 at a predetermined position.

【0009】またヘッドフレーム11は、インク供給管
32が圧入接着されていて、インク接続口32と弾性板
8のインク導入口33を経て、キャビティ形成基板3の
リザーバ4、更に圧力発生室5に外部からインク51を
供給できるように構成されている。
The head frame 11 has an ink supply tube 32 press-fitted and adhered thereto. The ink supply tube 32 passes through the ink connection port 32 and the ink introduction port 33 of the elastic plate 8 to the reservoir 4 of the cavity forming substrate 3 and further to the pressure generating chamber 5. The ink 51 is configured to be supplied from outside.

【0010】圧電素子22は、先端が弾性板8の絶縁部
材7に当接した状態で固定板21を介して制御基板13
によりヘッドフレーム11に固定されている。圧電素子
22は、これを構成する内部電極に駆動信号を供給する
正極側の外部電極41と、負極側の外部電極42が表裏
に対向して形成されている。正極側の外部電極41は固
定台21上の配線パターン24に電気接続され、また負
極側の外部電極42は、導電板23により共通接続され
た上で、導電板23を介して固定台21上の配線パター
ン24にも接続されている。
The piezoelectric element 22 has a front end in contact with the insulating member 7 of the elastic plate 8 with the control board 13
To the head frame 11. The piezoelectric element 22 has a positive external electrode 41 for supplying a drive signal to an internal electrode constituting the piezoelectric element 22 and a negative external electrode 42 formed on the front and back surfaces of the piezoelectric element 22. The external electrode 41 on the positive electrode side is electrically connected to the wiring pattern 24 on the fixing base 21, and the external electrode 42 on the negative electrode side is connected in common by the conductive plate 23, and then on the fixing base 21 via the conductive plate 23. The wiring pattern 24 is also connected.

【0011】本発明の特徴をなすキャビティ形成基板3
の下面を封止する弾性板8について説明する。ニッケル
の電鋳加工法で5ミクロン以下の厚さに形成した金属薄
板6に、絶縁部材7として感光性樹脂を被覆して積層構
造板として構成され、金属薄板6により機械的強度の確
保と、圧電素子側へのインクの漏洩を防止し、また絶縁
部材7により正電極41が金属薄板6に接触して隣接す
る圧電素子同士の短絡を防止する。
Cavity forming substrate 3 which characterizes the present invention
The elastic plate 8 that seals the lower surface will be described. A thin metal plate 6 formed to a thickness of 5 μm or less by nickel electroforming is coated with a photosensitive resin as an insulating member 7 to form a laminated structure plate, and the metal thin plate 6 secures mechanical strength. Ink is prevented from leaking to the piezoelectric element side, and the insulating member 7 prevents the positive electrode 41 from contacting the thin metal plate 6 to prevent a short circuit between adjacent piezoelectric elements.

【0012】この絶縁部材7は、圧力発生室5の長手方
向のほぼ中心を通り、かつ圧力発生室5の投影面より一
回り小さいサイズの島状部7aとして形成されている。
すなわち、圧電素子22の厚みDよりも小さい幅W1
を、また圧電素子22の幅W2よりも大きい長さLを有
するように構成されている。これらの幅W1、長さL
は、弾性板8、より詳細には金属薄板6をたわませるこ
とができる程度に圧力発生室5を区画する隔壁との間の
距離Δd1、Δd2、Δd3を確保できるように選択さ
れている。
The insulating member 7 is formed as an island-like portion 7a which passes through substantially the center in the longitudinal direction of the pressure generating chamber 5 and is slightly smaller than the projection surface of the pressure generating chamber 5.
That is, the width W1 smaller than the thickness D of the piezoelectric element 22
And the length L is larger than the width W2 of the piezoelectric element 22. These width W1 and length L
Are selected so that the distances Δd1, Δd2, and Δd3 between the elastic plate 8 and more specifically, the partition wall that partitions the pressure generating chamber 5 can be secured to the extent that the thin metal plate 6 can be bent.

【0013】このように構成されたインクジェット記録
ヘッドは、印字信号に応じて制御基板13からリードフ
レーム25、配線パターン24を通じて圧電素子22の
正電極41と負電極42とに電界を受けると、電界を印
加された圧電素子22だけが長手方向(同図上下方向)
に収縮する。
The ink jet recording head thus configured receives an electric field from the control substrate 13 to the positive electrode 41 and the negative electrode 42 of the piezoelectric element 22 through the lead frame 25 and the wiring pattern 24 in response to a print signal. Is applied only in the longitudinal direction (vertical direction in the figure)
To shrink.

【0014】この時、圧電素子22の下半分は、ヘッド
フレーム11に保持されている固定台21に固着されて
おり、収縮変位できない。一方、圧電素子22の上半分
は、他の拘束を受けるていなため収縮変位して、その収
縮力により島状部7aを介して弾性板8を引張る。
At this time, the lower half of the piezoelectric element 22 is fixed to the fixed base 21 held on the head frame 11 and cannot be contracted and displaced. On the other hand, the upper half of the piezoelectric element 22 is contracted and displaced because it is not subjected to another constraint, and the contraction force pulls the elastic plate 8 through the island-shaped portion 7a.

【0015】圧電素子22に引張られた弾性板8の金属
薄板6は、圧電素子22の幅W2よりも長い領域が下方
へたわみ、圧力発生室5の体積が膨張する。圧力発生室
5が膨張すると、リザーバ4からインク供給口3aを通
じてインク51が流入する。次いで、圧電素子22の電
界印加を解除すると、圧電素子22は元の長さに伸長
し、島状部7aを介して圧力発生室5の広い面積を圧縮
する。この圧力でノズル2からインク滴を吐出する。
In the thin metal plate 6 of the elastic plate 8 pulled by the piezoelectric element 22, a region longer than the width W2 of the piezoelectric element 22 bends downward, and the volume of the pressure generating chamber 5 expands. When the pressure generating chamber 5 expands, the ink 51 flows from the reservoir 4 through the ink supply port 3a. Next, when the application of the electric field to the piezoelectric element 22 is released, the piezoelectric element 22 expands to its original length and compresses a large area of the pressure generating chamber 5 via the island-shaped portion 7a. An ink droplet is ejected from the nozzle 2 at this pressure.

【0016】このように圧電素子22の変位が島状部7
aを介して金属薄板6に伝達されるため、金属薄板6の
圧力発生室5の周縁部をたわみ領域とするようにして圧
力発生室5の広い領域を変形させることができ、圧電素
子22の変位を高い効率で圧力発生室5の容積変化に変
換することができる。
As described above, the displacement of the piezoelectric element 22 is
Therefore, the pressure generating chamber 5 is transmitted to the metal thin plate 6 through the a, so that the peripheral portion of the pressure generating chamber 5 of the metal thin plate 6 is made to be a bent region, so that a wide area of the pressure generating chamber 5 can be deformed. The displacement can be converted to a change in volume of the pressure generating chamber 5 with high efficiency.

【0017】[0017]

【発明の効果】以上説明したように本発明によれば、圧
電素子の断面積よりも広い領域を変形させることがで
き、圧電素子の変位を高い効率で矩形状の圧力発生室の
容積変化に変換でき、インク滴を確実に吐出させること
ができ、低電圧駆動と弾性壁の寿命の延長を図ることが
できる。
As described above , according to the present invention, a region wider than the cross-sectional area of the piezoelectric element can be deformed, and the displacement of the piezoelectric element can be changed with high efficiency to the volume change of the rectangular pressure generating chamber. Conversion can be performed, ink droplets can be reliably ejected, and low-voltage driving and extension of the life of the elastic wall can be achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のインクジェット記録ヘッドの一実施例
を示す組立て斜視図である。
FIG. 1 is an assembled perspective view showing one embodiment of an ink jet recording head of the present invention.

【図2】同上記録ヘッドの部分断面図である。FIG. 2 is a partial cross-sectional view of the recording head.

【図3】同上記録ヘッドの圧電素子と弾性板との当接領
域を拡大して示す斜視図である。
FIG. 3 is an enlarged perspective view showing a contact area between a piezoelectric element and an elastic plate of the recording head.

【図4】同上記録ヘッドの弾性板の平面図である。FIG. 4 is a plan view of an elastic plate of the recording head.

【符号の説明】[Explanation of symbols]

1 ノズル基板 3 キャビティ 5 圧力発生室 6 金属薄板 7 絶縁部材 7a 島状部 8 弾性板 11 ヘッドフレーム 21 固定板 22 圧電素子 DESCRIPTION OF SYMBOLS 1 Nozzle board 3 Cavity 5 Pressure generating chamber 6 Metal thin plate 7 Insulating member 7a Island 8 Elastic plate 11 Head frame 21 Fixed plate 22 Piezoelectric element

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B41J 2/045 B41J 2/055 ──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int.Cl. 7 , DB name) B41J 2/045 B41J 2/055

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 長手方向に伸縮変位する圧電素子によっ
細長く、かつ前記圧電素子の断面積よりも大きい圧力
発生室の一部を形成する弾性壁を変位させてノズルから
インク滴を吐出させるインクジェットヘッドにおいて、
前記弾性壁が、前記圧力発生室を封止する弾性変形板
と、前記圧電素子の列設方向の厚みよりも幅が小さく、
また前記圧電素子の列設方向に直角な方向の幅よりも大
きい島状部との積層構造として構成されたインクジェッ
トヘッド。
1. An ink jet head which ejects ink droplets from nozzles by displacing an elastic wall which forms a part of a pressure generating chamber which is elongated and is larger than a cross-sectional area of the piezoelectric element by a piezoelectric element which expands and contracts in a longitudinal direction. At
The elastic wall has an elastically deformable plate that seals the pressure generating chamber, and a width smaller than a thickness of the piezoelectric element in a row direction,
Further, an ink jet head configured as a laminated structure with an island-shaped portion having a width larger than a width in a direction perpendicular to a direction in which the piezoelectric elements are arranged.
【請求項2】 前記弾性変形板が金属により、また前記
島状部が絶縁材料により構成されている請求項1に記載
のインクジェットヘッド。
2. The ink jet head according to claim 1, wherein said elastically deformable plate is made of metal, and said island-shaped portion is made of an insulating material.
【請求項3】 前記弾性変形板がステンレス鋼により、
また前記島状部が感光性樹脂により構成されている請求
項1に記載のインクジェットヘッド。
3. The elastically deformable plate is made of stainless steel.
2. The ink jet head according to claim 1, wherein said island portion is made of a photosensitive resin.
JP34534191A 1991-12-26 1991-12-26 Inkjet head Expired - Fee Related JP3255178B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34534191A JP3255178B2 (en) 1991-12-26 1991-12-26 Inkjet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34534191A JP3255178B2 (en) 1991-12-26 1991-12-26 Inkjet head

Publications (2)

Publication Number Publication Date
JPH05169651A JPH05169651A (en) 1993-07-09
JP3255178B2 true JP3255178B2 (en) 2002-02-12

Family

ID=18375939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34534191A Expired - Fee Related JP3255178B2 (en) 1991-12-26 1991-12-26 Inkjet head

Country Status (1)

Country Link
JP (1) JP3255178B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5956058A (en) * 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
JP3679863B2 (en) * 1995-06-12 2005-08-03 セイコーエプソン株式会社 Inkjet recording head

Also Published As

Publication number Publication date
JPH05169651A (en) 1993-07-09

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