JP3252261B2 - Helium low temperature purifier and operating method thereof - Google Patents

Helium low temperature purifier and operating method thereof

Info

Publication number
JP3252261B2
JP3252261B2 JP33696491A JP33696491A JP3252261B2 JP 3252261 B2 JP3252261 B2 JP 3252261B2 JP 33696491 A JP33696491 A JP 33696491A JP 33696491 A JP33696491 A JP 33696491A JP 3252261 B2 JP3252261 B2 JP 3252261B2
Authority
JP
Japan
Prior art keywords
helium
gas
liquefied
liquid
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP33696491A
Other languages
Japanese (ja)
Other versions
JPH05172457A (en
Inventor
隆 深野
尚男 北山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Nippon Sanso Corp
Original Assignee
Taiyo Nippon Sanso Corp
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Filing date
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Application filed by Taiyo Nippon Sanso Corp filed Critical Taiyo Nippon Sanso Corp
Priority to JP33696491A priority Critical patent/JP3252261B2/en
Publication of JPH05172457A publication Critical patent/JPH05172457A/en
Application granted granted Critical
Publication of JP3252261B2 publication Critical patent/JP3252261B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00Vessel construction, in particular walls or details thereof
    • F17C2203/06Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0602Wall structures; Special features thereof
    • F17C2203/0612Wall structures
    • F17C2203/0626Multiple walls
    • F17C2203/0629Two walls
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323Valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00Handled fluid, in particular type of fluid
    • F17C2221/01Pure fluids
    • F17C2221/016Noble gases (Ar, Kr, Xe)
    • F17C2221/017Helium
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146Two-phase
    • F17C2223/0153Liquefied gas, e.g. LPG, GPL
    • F17C2223/0161Liquefied gas, e.g. LPG, GPL cryogenic, e.g. LNG, GNL, PLNG
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04Indicating or measuring of parameters as input values
    • F17C2250/0404Parameters indicated or measured
    • F17C2250/043Pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06Controlling or regulating of parameters as output values
    • F17C2250/0605Parameters
    • F17C2250/0636Flow or movement of content
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00Effects achieved by gas storage or gas handling
    • F17C2265/01Purifying the fluid
    • F17C2265/015Purifying the fluid by separating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00Processes or apparatus using other separation and/or other processing means
    • F25J2205/02Processes or apparatus using other separation and/or other processing means using simple phase separation in a vessel or drum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00Processes or apparatus using other separation and/or other processing means
    • F25J2205/40Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00Processes or apparatus using other separation and/or other processing means
    • F25J2205/60Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2210/00Processes characterised by the type or other details of the feed stream
    • F25J2210/42Nitrogen
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00Processes characterised by the type or other details of the product stream
    • F25J2215/30Helium
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2270/00Refrigeration techniques used
    • F25J2270/90External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
    • F25J2270/904External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by liquid or gaseous cryogen in an open loop
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2280/00Control of the process or apparatus
    • F25J2280/02Control in general, load changes, different modes ("runs"), measurements

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、ヘリウム低温精製器及
びその運転方法に関し、詳しくは各種の実験における冷
却用、例えば超伝導マグネットの冷却等に使用したヘリ
ウムを回収あるいは循環して再使用する際に、該ヘリウ
ム中に混入している不純物、例えば空気成分等を分離し
てヘリウムを精製するヘリウム低温精製器及びその運転
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a helium low-temperature purifier and a method for operating the same, and more particularly, to recovering or circulating helium used for cooling in various experiments, for example, cooling a superconducting magnet, and reusing it. At this time, the present invention relates to a helium low-temperature purifier for purifying helium by separating impurities, for example, air components, mixed in the helium, and an operation method thereof.

【0002】[0002]

【従来の技術】一般に、液体ヘリウムを使用する冷却設
備等においては、被冷却体を冷却した後のヘリウムを回
収し、あるいは循環させて使用しているが、該ヘリウム
中に不純物、例えば空気等が混入すると、極低温状態に
あるヘリウム液化系統の配管や機器の内部にこれらの不
純物が析出して流路を閉塞するおそれがある。
2. Description of the Related Art In general, in a cooling facility or the like using liquid helium, helium after cooling an object to be cooled is recovered or circulated, and impurities such as air or the like are contained in the helium. When these are mixed, there is a possibility that these impurities precipitate in the piping or equipment of the helium liquefaction system in an extremely low temperature state and block the flow path.

【0003】したがって、ヘリウムを極低温に冷却する
以前に、これらの不純物を除去しておくことが必要であ
るが、該不純物の量が多い場合には、不純物を含むヘリ
ウムガスを適当な温度、例えば約80Kに冷却して高沸
点の不純物成分を液化し、該液化した不純物成分を、気
液分離器等の気液分離手段を用いて分離するようにして
いる。
Therefore, it is necessary to remove these impurities before cooling the helium to an extremely low temperature. If the amount of the impurities is large, the helium gas containing the impurities is cooled to an appropriate temperature. For example, it is cooled to about 80 K to liquefy an impurity component having a high boiling point, and the liquefied impurity component is separated using a gas-liquid separation means such as a gas-liquid separator.

【0004】図2は、上記気液分離手段を有するヘリウ
ム低温精製器の一例を示すものである。このヘリウム低
温精製器は、不純物を含むヘリウムガスを導入する管1
と、該不純物を含むヘリウムガスを精製後のヘリウムガ
スとの熱交換により冷却する熱交換器2と、前記不純物
を液化させるために約80Kに保持された液化窒素貯槽
3内に配設した気液分離手段である液空ボトル4と、該
液空ボトル4で分離したガス相に含まれる微量不純物を
吸着除去する吸着器5と、液空ボトル4で分離した液相
を排出する液化成分排出手段6とにより構成されてい
る。
FIG. 2 shows an example of a helium low-temperature purifier having the gas-liquid separation means. This helium low-temperature purifier has a pipe 1 for introducing helium gas containing impurities.
And a heat exchanger 2 for cooling the helium gas containing the impurities by heat exchange with the purified helium gas, and a gas exchanger disposed in a liquefied nitrogen storage tank 3 maintained at about 80 K to liquefy the impurities. A liquid empty bottle 4 serving as a liquid separating means, an adsorber 5 for adsorbing and removing trace impurities contained in a gas phase separated by the liquid empty bottle 4, and a liquefied component discharge for discharging the liquid phase separated by the liquid empty bottle 4 And means 6.

【0005】上記液化成分排出手段6は、前記液空ボト
ル4の底部に連設した排出管7と、該排出管7に設けら
れた排出弁8及び流量制御弁9と、排出弁8を開閉作動
させるタイマー10とにより構成されている。
The liquefied component discharging means 6 includes a discharge pipe 7 connected to the bottom of the empty liquid bottle 4, a discharge valve 8 and a flow control valve 9 provided on the discharge pipe 7, and opens and closes the discharge valve 8. And a timer 10 to be activated.

【0006】上記タイマー10は、所定の周期で排出弁
8を開閉するものであり、その周期は、管1から導入さ
れるヘリウム中の不純物量に応じて設定されている。
The timer 10 opens and closes the discharge valve 8 at a predetermined cycle, and the cycle is set according to the amount of impurities in the helium introduced from the pipe 1.

【0007】例えば、液空ボトル4における不純物の液
化量が毎時6リットル,液空ボトル4の液容量が6リッ
トル,流量制御弁9に設定した液流量が毎分1リットル
ならば、排出弁8を1時間毎に約7分間開いてボトル内
の液化成分を排出するように設定されている。
For example, if the liquefied amount of impurities in the liquid empty bottle 4 is 6 liters per hour, the liquid capacity of the liquid empty bottle 4 is 6 liters, and the liquid flow rate set in the flow control valve 9 is 1 liter per minute, the discharge valve 8 Is opened every hour for about 7 minutes to discharge the liquefied component in the bottle.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、吸着器
5側に不純物が流れて吸着器5の吸着能力を超え、精製
ヘリウム中に不純物が残存することを防止するために
は、上記排出弁8を開く間隔及び開いている時間を、管
1から導入されるヘリウム中の不純物が最も多いときに
合わせて設定しなければならない。
However, in order to prevent impurities from flowing to the adsorber 5 side to exceed the adsorbing capacity of the adsorber 5 and to leave impurities in the purified helium, the discharge valve 8 must be provided. The opening interval and the opening time must be set according to the time when the impurity in the helium introduced from the tube 1 is the highest.

【0009】このため、管1から導入されるヘリウムに
含まれる不純物量が少ない場合には、液空ボトル4内に
発生する液量に比べて排出弁8が開いている時間が長い
ため、不純物以外にヘリウムガスも排出されてしまうと
いう不都合があった。
For this reason, when the amount of impurities contained in the helium introduced from the pipe 1 is small, the time during which the discharge valve 8 is open is longer than the amount of liquid generated in the empty liquid bottle 4. In addition, there is a disadvantage that helium gas is also discharged.

【0010】一方、このように生成した液を排出するた
めの自動制御として、一般には、液空ボトル4内の液面
を検出し、該液面高さに応じて排出弁8を開閉する方法
が考えられるが、ヘリウム低温精製器においては、その
構造上、差圧式液面計を適用するのは困難であり、ま
た、内部圧力が150気圧程度の高圧であり、温度も低
いことから、封じ切りの面で静電容量型の液面計を設置
して漏れが発生しないような構造とすることも困難であ
り、いずれの場合も高価な装置が必要であり、現実的で
はなかった。
On the other hand, as an automatic control for discharging the liquid thus generated, generally, a liquid level in a liquid empty bottle 4 is detected, and a discharge valve 8 is opened and closed according to the liquid level. However, in a helium low-temperature purifier, it is difficult to apply a differential pressure type liquid level gauge due to its structure, and the internal pressure is as high as about 150 atm and the temperature is low. It is also difficult to install a capacitance type liquid level gauge on the cut surface so as to prevent leakage, and in any case, an expensive apparatus is required, which is not practical.

【0011】そこで本発明は、上記排出弁の開閉、特に
閉弁のタイミングを液の排出状態に応じて適格に制御
し、全自動運転においてもヘリウムの排出量を大幅に低
減することができるヘリウム低温精製器及びその運転方
法を提供することを目的としている。
Therefore, the present invention provides a helium discharge apparatus which controls the opening and closing of the discharge valve, in particular, the timing of closing the valve appropriately according to the state of discharge of the liquid, thereby greatly reducing the amount of helium discharge even in fully automatic operation. It is an object of the present invention to provide a low-temperature purifier and a method of operating the same.

【0012】[0012]

【課題を解決するための手段】上記した目的を達成する
ため、本発明のヘリウム低温精製器は、不純物を含むヘ
リウムガスを冷却する手段と、該冷却により液化した前
記不純物とヘリウムガスとを分離する気液分離手段と、
該気液分離手段で分離した液化成分を排出する手段とを
備えたヘリウム低温精製器において、前記気液分離手段
から液化成分を排出する手段は、液化成分排出管に設け
た排出弁及び流量制御弁と、前記排出弁を所定周期で開
弁するタイマーと、前記流量制御弁より上流側の圧力又
は流量制御弁の前後の差圧を検出して該圧力又は差圧の
変化により前記排出弁を閉弁する制御手段とを備えてい
ることを特徴としている。
In order to achieve the above object, a helium low-temperature purifier of the present invention comprises means for cooling helium gas containing impurities, and separating the helium gas from the impurities liquefied by the cooling. Gas-liquid separation means,
Means for discharging the liquefied component separated by the gas-liquid separation means, wherein the means for discharging the liquefied component from the gas-liquid separation means comprises a discharge valve and a flow rate control provided in a liquefied component discharge pipe. A valve, a timer for opening the discharge valve at a predetermined cycle, and a pressure upstream of the flow control valve or a differential pressure before and after the flow control valve to detect a change in the pressure or the differential pressure. Control means for closing the discharge valve.

【0013】また、本発明のヘリウム低温精製器の運転
方法は、不純物を含むヘリウムガスを、前記不純物が液
化する温度に冷却して気液分離手段に導入し、該気液分
離手段で分離した液化成分を排出してヘリウムガスと不
純物とを分離するヘリウム低温精製器の運転方法におい
て、前記気液分離手段で分離した液化成分を、流量制御
弁を有する液化成分排出管に設けた排出弁をタイマーに
より所定周期で開弁して液化成分の排出を開始するとと
もに、前記流量制御弁より上流側の圧力を又は流量制御
弁の前後の差圧を検出して該圧力又は差圧が変化したと
きに前記排出弁を閉じて液化成分の排出を終了すること
を特徴としている。
In the method for operating a helium low-temperature purifier according to the present invention, the helium gas containing impurities is cooled to a temperature at which the impurities are liquefied, introduced into gas-liquid separation means, and separated by the gas-liquid separation means. A method for operating a helium low-temperature purifier that discharges a liquefied component and separates helium gas and impurities, wherein the liquefied component separated by the gas-liquid separation means is provided with a discharge valve provided in a liquefied component discharge pipe having a flow control valve. When the valve is opened at a predetermined cycle by a timer to start discharging the liquefied component, and when the pressure or the differential pressure changes by detecting the pressure upstream of the flow control valve or the differential pressure across the flow control valve. And the discharge of the liquefied component is terminated by closing the discharge valve.

【0014】[0014]

【作 用】上記構成によれば、気液分離手段から液化成
分が全て排出され、ガス成分が排出されだすと、流量制
御弁における通気抵抗と通液抵抗との差から、排出弁よ
り上流側の圧力及び流量制御弁の前後の差圧が変化する
ので、該圧力又は差圧の変化を検出して排出弁を閉じる
ことにより、ヘリウムガスの排出量を少なくすることが
できる。
[Operation] According to the above configuration, when all the liquefied components are discharged from the gas-liquid separation means and the gas components are discharged, the difference between the ventilation resistance and the liquid flow resistance in the flow control valve causes the upstream side of the discharge valve to be discharged. The pressure and the differential pressure before and after the flow control valve change. By detecting the change in the pressure or the differential pressure and closing the discharge valve, the discharge amount of the helium gas can be reduced.

【0015】なお、排出弁の開弁周期は、従来と同様に
ヘリウム精製系に導入されるヘリウムに含まれる不純物
量が最も多い場合を基準に設定しておけば、気液分離さ
れないで液状不純物が溢れることが防止できる。
If the discharge valve opening cycle is set on the basis of the case where the amount of impurities contained in helium introduced into the helium purification system is the largest as in the conventional case, the liquid impurity is not separated by gas-liquid separation. Can be prevented from overflowing.

【0016】[0016]

【実施例】以下、本発明を、図1に示す一実施例に基づ
いて、さらに詳細に説明する。なお、前記図2に示した
従来例と同一要素のものには同一符号を付して、その詳
細な説明は省略する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail based on one embodiment shown in FIG . The same elements as those of the conventional example shown in FIG. 2 are denoted by the same reference numerals, and detailed description thereof will be omitted.

【0017】本実施例装置も、従来と同様に管1から不
純物を含むヘリウムガスを導入し、熱交換器2で冷却し
た後、約80Kに保持された液化窒素貯槽3内の液空ボ
トル4でヘリウムガスと液化した不純物成分とを分離す
るように構成されている。
In the apparatus of this embodiment, a helium gas containing impurities is introduced from a pipe 1 as in the prior art, cooled by a heat exchanger 2, and then a liquid empty bottle 4 in a liquefied nitrogen storage tank 3 maintained at about 80K. To separate helium gas and liquefied impurity components.

【0018】液空ボトル4内のヘリウムガスは、微量に
残存する不純物を吸着器5で吸着により除去した後、前
記熱交換器2を経て精製ヘリウムとして回収され、ある
いは循環使用される。
The helium gas in the liquid empty bottle 4 is removed by adsorption of a trace amount of impurities by an adsorber 5 and then recovered as purified helium through the heat exchanger 2 or used for circulation.

【0019】また、液空ボトル4内の液化成分は、前記
同様に排出弁8及び流量制御弁9を有する排出管7から
排出される。本発明では、該排出管7からの液排出開
始、即ち排出弁8を開くための手段としてのタイマー1
1が設けられるとともに、液排出終了、即ち排出弁8を
閉じるための手段として、前記ヘリウム導入用の管1の
圧力を検出する圧力計(P)12、又は前記流量制御弁
9の前後の差圧を検出する差圧計(DP)13が設けら
れている。
The liquefied component in the empty liquid bottle 4 is discharged from the discharge pipe 7 having the discharge valve 8 and the flow control valve 9 as described above. In the present invention, the timer 1 as a means for starting the liquid discharge from the discharge pipe 7, that is, opening the discharge valve 8.
And a pressure gauge (P) 12 for detecting the pressure of the helium introduction pipe 1 or a difference between before and after the flow control valve 9 as means for terminating the liquid discharge, that is, closing the discharge valve 8. A differential pressure gauge (DP) 13 for detecting pressure is provided.

【0020】上記タイマー11は、前記同様に、管1か
ら導入されるヘリウムガスにおける最大不純物含有量と
液空ボトル4の液容量に応じて、適当な開弁周期が設定
されるもので、例えば、前述のように不純物の最大液化
量が毎時6リットル,液空ボトル4の液容量が6リット
ルならば、少なくとも1時間毎に開弁作動するように設
定される。
The timer 11 sets an appropriate valve opening cycle in accordance with the maximum impurity content in the helium gas introduced from the pipe 1 and the liquid volume of the liquid empty bottle 4 in the same manner as described above. If the maximum liquefaction amount of impurities is 6 liters / hour and the liquid volume of the empty liquid bottle 4 is 6 liters as described above, the valve is set to open at least every hour.

【0021】一方、前記圧力計12と差圧計13は、流
量制御弁9における気体の流れ抵抗と液体の流れ抵抗の
差とに基づいて、液排出終了を検知するものである。即
ち、液空ボトル4からの液の排出が終了して流量制御弁
9から気体(ヘリウムガス)が排出されだすと、系内ガ
スが放出されるので、流量制御弁9より上流側のヘリウ
ム精製系内の圧力が一時的に低下するとともに、流量制
御弁9の流れ抵抗が上昇するので、前後の差圧が上昇す
る。
On the other hand, the pressure gauge 12 and the differential pressure gauge 13 detect the termination of liquid discharge based on the difference between the gas flow resistance and the liquid flow resistance in the flow control valve 9. That is, when the discharge of the liquid from the liquid empty bottle 4 is completed and the gas (helium gas) is discharged from the flow control valve 9, the gas in the system is discharged.
Since the pressure is released , the pressure in the helium purification system upstream of the flow control valve 9 temporarily decreases, and the flow resistance of the flow control valve 9 increases.

【0022】したがって、排出弁8を開いた後、圧力計
12により管1内のヘリウムガス導入圧力を監視し、該
圧力が低下したときに排出弁8を閉じるようにすること
により、又は、差圧計13により流量制御弁9前後の差
圧を監視し、該差圧が上昇したときに排出弁8を閉じる
ようにすることにより、液空ボトル4からの気体(ヘリ
ウムガス)の排出を最小にすることができる。なお、圧
力計12又は差圧計13の検出値に基づいて排出弁8を
閉じる操作は、電磁弁等を用いた周知の弁駆動手段で行
うことができる。
Therefore, after the discharge valve 8 is opened, the pressure of the helium gas introduced into the pipe 1 is monitored by the pressure gauge 12 and the discharge valve 8 is closed when the pressure decreases. By monitoring the differential pressure across the flow control valve 9 with the pressure gauge 13 and closing the discharge valve 8 when the differential pressure rises, the discharge of gas (helium gas) from the liquid empty bottle 4 is minimized. can do. The operation of closing the discharge valve 8 based on the detection value of the pressure gauge 12 or the differential pressure gauge 13 can be performed by well-known valve driving means using an electromagnetic valve or the like.

【0023】ここで、ヘリウム低温精製器の仕様とし
て、処理量100Nm3 /h,圧力150気圧,入口不
純物濃度5体積%(不純物は空気)の場合、該空気を不
純物として含むヘリウムガスが約80Kまで冷却される
と、気液2相状態となって、ガス96.3Nm3 /h,
液3.7Nm3 /hの割合となる。したがって、液体空
気の発生量は、約6リットル/hとなるので、液空ボト
ル4の容積により排出弁8を開く周期を決定することが
できる。
Here, as the specifications of the helium low-temperature purifier, when the processing amount is 100 Nm 3 / h, the pressure is 150 atm, and the inlet impurity concentration is 5% by volume (the impurity is air), the helium gas containing the air as an impurity is about 80K. When cooled to a gas-liquid two-phase state, the gas is 96.3 Nm 3 / h,
The ratio of the liquid is 3.7 Nm 3 / h. Therefore, the amount of generated liquid air is about 6 liters / h, and the cycle of opening the discharge valve 8 can be determined based on the volume of the empty liquid bottle 4.

【0024】一方、排出弁8を閉じる操作は、前述のよ
うに液体空気が全て排出され、ガスが排出されだす際の
圧力変化を検出して行うため、上記仕様で与えた不純物
レベルが低下して液発生量が減少した場合でも、ヘリウ
ムガスの排出量を最小にすることができる。
On the other hand, since the operation of closing the discharge valve 8 is performed by detecting the pressure change when the liquid air is completely discharged and the gas is discharged as described above, the impurity level given in the above specification decreases. Even when the amount of generated liquid decreases, the amount of helium gas discharged can be minimized.

【0025】なお、上記排出弁8を開く周期を短く設定
しておくことにより、不純物レベルがなんらかの原因で
急に上昇したような場合でも、液体空気が液空ボトル4
内に蓄積され、低温吸着筒5に至ることを防止でき、装
置の信頼性も向上する。また、液空ボトル4中に補助的
フロートを設けて、液空ボトルのガス出口管の出口部
をフロートの上昇により閉塞するように構成し、なんら
かの原因で急に液面が上昇したときに、フロートが該ガ
ス出口部を塞いで、液空ボトル4から低温吸着筒5に液
体空気が流れるのを防ぎ、前記圧力計12が圧力上昇を
検出して排出弁8を開とするように構成しておけば、タ
イマー11による排出弁8の開操作に関係なく緊急時に
排出弁8を開くことができるので、液空ボトル4内に過
剰に蓄積されるのを防止することができる
It should be noted, by setting shorter period of opening the discharge valve 8, the impurity level for some reason
Even if it rises suddenly , the liquid air
It can be prevented from accumulating inside and reaching the low-temperature adsorption cylinder 5, and the reliability of the apparatus can be improved. In addition, auxiliary liquid in empty liquid bottle 4
The provided float constitutes the outlet portion of the gas outlet pipe Ekisora bottle so as to close by the rise of the float, any
When suddenly liquid level in Kano due rises, float Ide busy the gas outlet portion, the liquid in the low-temperature adsorption column 5 from Ekisora bottle 4
If body pressure is prevented from flowing, and the pressure gauge 12 detects a rise in pressure and opens the discharge valve 8 ,
In the event of an emergency, regardless of the opening operation of the discharge valve 8 by the
Since the discharge valve 8 can be opened,
Excessive accumulation can be prevented .

【0026】さらに、圧力計12により排出弁8の閉じ
操作を行う場合には、入口不純物レベルが極めて小さ
く、気液分離できないような場合でも、ガスが排出され
ると同時に系内の圧力が低下するため、これを検知して
直ちに排出弁8を閉じることができ、また、差圧計13
で行う場合でも、液が排出されるときと、ガスが排出さ
れるときとの差圧の違いを設定しておけば、同様にガス
の排出を検出でき、排出弁8を閉じることができる。し
たがって、排出開始時に液空ボトル4内に全く液が存在
しないような場合でもヘリウムガスの排出量を抑えるこ
とができる。
Further, when the discharge valve 8 is closed by the pressure gauge 12, even when the level of impurities at the inlet is extremely small and gas-liquid separation cannot be performed, the gas is discharged and the pressure in the system decreases at the same time. Therefore, the discharge valve 8 can be closed immediately upon detecting this, and the differential pressure gauge 13
If the pressure difference is set between when the liquid is discharged and when the gas is discharged, the discharge of the gas can be detected and the discharge valve 8 can be closed in the same manner. Therefore, even when there is no liquid in the empty liquid bottle 4 at the start of discharge, the discharge amount of helium gas can be suppressed.

【0027】加えて、既存のヘリウム低温精製器におい
ても、上記圧力計あるいは差圧計を設置するとともに、
簡単な制御系統を付加するだけで実施することが可能で
あり、装置構成を大幅に変更することなく、極めて容易
に実施することができる。
In addition, in the existing helium low-temperature purifier, the above-mentioned pressure gauge or differential pressure gauge is installed.
It can be implemented simply by adding a simple control system, and can be implemented extremely easily without largely changing the device configuration.

【0028】なお、図1においては、圧力計12と差圧
計13とを同時に表示したが、実際の装置ではいずれか
一方を設置すれば良く、また、圧力計12の設置位置
は、ガス排出が始まった時に、これによる圧力変化を検
出できる部分ならば任意であり、装置構成に応じて適宜
設定することができる。さらに、流量制御弁9には、オ
リフィスのような固定絞りのものを使用することもで
き、排出弁8が流量制御機能を有しているものならば、
該排出弁8で流量制御弁を兼用することもできる。
In FIG. 1, the pressure gauge 12 and the differential pressure gauge 13 are displayed at the same time. However, in an actual apparatus, only one of them may be installed. At the start, any portion that can detect a pressure change due to this can be used arbitrarily, and can be set as appropriate according to the device configuration. Further, a fixed throttle such as an orifice can be used as the flow control valve 9, and if the discharge valve 8 has a flow control function,
The discharge valve 8 can also serve as a flow control valve.

【0029】[0029]

【発明の効果】以上説明したように、本発明によれば、
不純物である液化成分の排出を確実に行えるとともに、
ヘリウムガスの排出量を最小限に抑えることができ、液
化ヘリウムを利用した各種冷却設備のランニングコスト
を低減することができる。また、高価な検出器を必要と
せず、装置の構造も簡単で、低温精製器全体の構成も従
来型のもので良いため、製造コストも低く抑えることが
できる。
As described above, according to the present invention,
Liquefied components, which are impurities, can be reliably discharged, and
The amount of discharged helium gas can be minimized, and the running costs of various cooling facilities using liquefied helium can be reduced. Further, since an expensive detector is not required, the structure of the apparatus is simple, and the configuration of the entire low-temperature purifier may be a conventional type, the manufacturing cost can be reduced.

【0030】さらに、精製すべきヘリウムガス中の不純
物レベルが変動した場合でも有効に作動するため、自動
運転が極めて容易である。
Further, even when the level of impurities in the helium gas to be purified fluctuates, the operation is effective, so that the automatic operation is extremely easy.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明のヘリウム低温精製器の一実施例を示
す系統図である。
FIG. 1 is a system diagram showing one embodiment of a helium low-temperature purifier of the present invention.

【図2】 従来のヘリウム低温精製器の要部を示す系統
図である。
FIG. 2 is a system diagram showing a main part of a conventional helium low-temperature purifier.

【符号の説明】[Explanation of symbols]

2…熱交換器 3…液化窒素貯槽 4…液空ボ
トル 5…吸着器 7…排出管 8…排出弁 9…流量制御弁
11…タイマー 12…圧力計 13…差圧計
2 heat exchanger 3 liquefied nitrogen storage tank 4 liquid empty bottle 5 adsorber 7 discharge pipe 8 discharge valve 9 flow control valve
11: Timer 12: Pressure gauge 13: Differential pressure gauge

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) F25J 1/00 - 5/00 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 7 , DB name) F25J 1/00-5/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 不純物を含むヘリウムガスを冷却する手
段と、該冷却により液化した前記不純物とヘリウムガス
とを分離する気液分離手段と、該気液分離手段で分離し
た液化成分を排出する手段とを備えたヘリウム低温精製
器において、前記気液分離手段から液化成分を排出する
手段は、液化成分排出管に設けた排出弁及び流量制御弁
と、前記排出弁を所定周期で開弁するタイマーと、前記
流量制御弁より上流側の圧力又は流量制御弁の前後の差
圧を検出して該圧力又は差圧の変化により前記排出弁を
閉弁する制御手段とを備えていることを特徴とするヘリ
ウム低温精製器。
1. Means for cooling helium gas containing impurities, gas-liquid separation means for separating helium gas from the impurities liquefied by the cooling, and means for discharging liquefied components separated by the gas-liquid separation means Wherein the means for discharging liquefied components from the gas-liquid separation means comprises a discharge valve and a flow control valve provided on a liquefied component discharge pipe, and a timer for opening the discharge valve at a predetermined cycle. And control means for detecting a pressure upstream of the flow control valve or a differential pressure before and after the flow control valve, and closing the discharge valve by a change in the pressure or the differential pressure. Helium cryogenic purifier.
【請求項2】 不純物を含むヘリウムガスを、前記不純
物が液化する温度に冷却して気液分離手段に導入し、該
気液分離手段で分離した液化成分を排出してヘリウムガ
スと不純物とを分離するヘリウム低温精製器の運転方法
において、前記気液分離手段で分離した液化成分を、流
量制御弁を有する液化成分排出管に設けた排出弁をタイ
マーにより所定周期で開弁して液化成分の排出を開始す
るとともに、前記流量制御弁より上流側の圧力を又は流
量制御弁の前後の差圧を検出して該圧力又は差圧が変化
したときに前記排出弁を閉じて液化成分の排出を終了す
ることを特徴とするヘリウム低温精製器の運転方法。
2. A helium gas containing impurities is cooled to a temperature at which the impurities are liquefied and introduced into gas-liquid separation means, and a liquefied component separated by the gas-liquid separation means is discharged to separate helium gas and impurities. In the operation method of the helium low-temperature purifier to be separated, the liquefied component separated by the gas-liquid separation means is opened at a predetermined cycle by a timer with a discharge valve provided in a liquefied component discharge pipe having a flow control valve, and the liquefied component is separated. While discharging, the pressure upstream of the flow control valve or the differential pressure before and after the flow control valve is detected, and when the pressure or the differential pressure changes, the discharge valve is closed to discharge the liquefied component. A method for operating a helium low-temperature purifier, which is terminated.
JP33696491A 1991-12-19 1991-12-19 Helium low temperature purifier and operating method thereof Expired - Fee Related JP3252261B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33696491A JP3252261B2 (en) 1991-12-19 1991-12-19 Helium low temperature purifier and operating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33696491A JP3252261B2 (en) 1991-12-19 1991-12-19 Helium low temperature purifier and operating method thereof

Publications (2)

Publication Number Publication Date
JPH05172457A JPH05172457A (en) 1993-07-09
JP3252261B2 true JP3252261B2 (en) 2002-02-04

Family

ID=18304239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33696491A Expired - Fee Related JP3252261B2 (en) 1991-12-19 1991-12-19 Helium low temperature purifier and operating method thereof

Country Status (1)

Country Link
JP (1) JP3252261B2 (en)

Also Published As

Publication number Publication date
JPH05172457A (en) 1993-07-09

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