JPS60253769A - Helium refrigerator - Google Patents

Helium refrigerator

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Publication number
JPS60253769A
JPS60253769A JP10830984A JP10830984A JPS60253769A JP S60253769 A JPS60253769 A JP S60253769A JP 10830984 A JP10830984 A JP 10830984A JP 10830984 A JP10830984 A JP 10830984A JP S60253769 A JPS60253769 A JP S60253769A
Authority
JP
Japan
Prior art keywords
gas
helium
adsorber
valve
refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10830984A
Other languages
Japanese (ja)
Inventor
粟田 義久
河村 成人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10830984A priority Critical patent/JPS60253769A/en
Publication of JPS60253769A publication Critical patent/JPS60253769A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、ヘリウム冷凍機に係り、特に、被冷却体と直
結して閉サイクルを形成するヘリウム冷凍機に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a helium refrigerator, and more particularly to a helium refrigerator that is directly connected to an object to be cooled to form a closed cycle.

〔発明の背景〕[Background of the invention]

ヘリウム冷凍機に使われているヘリウムガスは、資源的
に限られており、容易にいつもは入手できず、また高価
なため、ヘリウムガスは再生をして利用されている。そ
のため、ヘリウム冷凍機には、ヘリウムガスを回収し、
精製する装置が付属されている。この回収精製装置は、
ガスバッグ、回収Jヶ 圧縮機、精製器、弊蔵用ガスカードルで構成される。
Helium gas used in helium refrigerators is a limited resource, cannot be easily obtained all the time, and is expensive, so helium gas is recycled and used. Therefore, helium refrigerators collect helium gas and
Comes with purification equipment. This recovery and purification equipment is
It consists of a gas bag, recovery J-compressor, purifier, and our own gas carder.

この方式は、外部精製方式と言われるが、ガス回収時に
ガスバッグを通すので、閉サイクルで使用された汚れの
少ないヘリウムガスを必要以上に汚してしまう。それゆ
え、精製器には、必要以上の精製能力を持たせることに
なる3、また、この外部精製方式は、ヘリウムを液化し
、各種実験などで利用した後、このガスを回収し、精製
するシステム用であるので、処理量も余り大きくなく、
長時間連続運転向きでなく、バッチ運転を前提に考えら
れている。
This method is called an external purification method, but since the gas is passed through a gas bag during gas recovery, the helium gas used in the closed cycle, which is less contaminated, becomes more contaminated than necessary. Therefore, the purifier must have more purification capacity than necessary3.Also, in this external purification method, the helium is liquefied, used in various experiments, etc., and then this gas is recovered and purified. Since it is for the system, the amount of processing is not too large.
It is designed for batch operation, not for long-term continuous operation.

なお、この種の装置として関連するものには、例えば、
特開昭54−147174号公報記載のものがある。
Note that related devices of this type include, for example,
There is one described in JP-A-54-147174.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、ヘリウム冷凍機の運転と並行してヘリ
ウムガスの精製を可能とすることで、長時間連続運転が
可能なヘリウム冷凍機を提供することにある。
An object of the present invention is to provide a helium refrigerator that can be operated continuously for a long time by making it possible to purify helium gas in parallel with the operation of the helium refrigerator.

〔発明の概要〕[Summary of the invention]

本発明は、ヘリウムガス中の不純物を除去する機能を有
する吸着器をコールドボックス内の高圧ガスラインに吸
着、再生切替え可能に設けたことを特徴とするもので、
ヘリウム冷凍機の運転と並行してヘリウムガスの精製を
可能νしたものである。
The present invention is characterized in that an absorber having the function of removing impurities in helium gas is installed in a high-pressure gas line in a cold box so that it can be switched between adsorption and regeneration.
This makes it possible to purify helium gas in parallel with the operation of the helium refrigerator.

〔発明の実施例〕[Embodiments of the invention]

ヘリウム冷凍機と被冷却体で構成される閉サイクルのシ
ステムにおいて、系内のヘリウムガス中の不純物はほと
んど空気である。この空気は、システム運転中に外から
入ることはほとんどな曵、装置の点検、改造などで、系
内が空気にさらされるので、運転前に系内置換を行なう
が、100%完全には置換ができず、その時の残留空気
が徐々にヘリウムガス内に出てくるものである。
In a closed cycle system consisting of a helium refrigerator and a cooled object, most of the impurities in the helium gas in the system are air. This air rarely enters from outside during system operation, and the inside of the system is exposed to air during equipment inspections and modifications, so the system must be replaced before operation, but 100% replacement cannot be achieved. The residual air at that time gradually comes out into the helium gas.

この不純物の空気は、活性炭低温吸着法により除去する
ため、活性炭の入った吸着器を、コールドボックス内の
高圧ガスライン、好ましくは液体窒素温度近辺の高圧ガ
スラインの途中に設けたものである。これにより、従来
の外部装置は一切不要にできる。
In order to remove this impurity air by activated carbon low-temperature adsorption method, an adsorber containing activated carbon is installed in the middle of the high pressure gas line in the cold box, preferably in the middle of the high pressure gas line near the temperature of liquid nitrogen. This eliminates the need for any conventional external equipment.

また、先に述べたように、不純物は発生源から考えると
装置起動後に集中することにより、吸着器にバイパスラ
インを設けておき、不純物の除去が一段落したら、プロ
セスガスなバイパスライン側に流し、その間、吸着器中
の不純物を排出する再生を行ない、次の切替えに備える
ようにすれば、連続的に長時間運転が可能である。
In addition, as mentioned earlier, considering the source of impurities, they are concentrated after the equipment is started, so a bypass line is provided in the adsorber, and once the removal of impurities has finished, the process gas is passed to the bypass line side. During this time, if regeneration is performed to discharge impurities in the adsorber in preparation for the next changeover, continuous long-term operation is possible.

以下、本発明の一実施例を図面により説明する。An embodiment of the present invention will be described below with reference to the drawings.

プロセスガスのヘリウムガスは主圧縮mlにて所定圧力
まで昇圧され、コールドボックス19内に入り、窒素子
冷熱文2で、予冷寒剤の液体窒素(LN2)および低圧
戻りライン加を流れる低温ガスにて、40〜70K(プ
ロセスによって幅がある)まで冷却され、活性炭低温吸
着法に必要な温度80に以下となる。このヘリウムガス
は、窒素予冷熱交2の後流側で高圧ガスライン21に設
けられた吸着器人口弁7を通り、吸着器人口弁7の後流
側で高圧ガスライン21に設けられた吸着器3に入り、
この中に充填されている活性炭にて空気などの不純物が
吸着除去され、きれいになったヘリウムガスは、吸着器
3の後流側で高圧ガスライン21に設けられた吸着器出
口弁8を通り、その後一部のガスがタービン流となり、
第1タービン5.第2タービン6で断熱膨張して低圧戻
りライン(9)に入り、低温戻りガスとなる。一方残り
゛のガスはJT流となり熱交4にて冷却され、JT弁l
O,トラン玉ファーチューブ11を通って被冷却休校に
入り、液体ヘリウムの潜熱で対象物の冷却などを行ない
、蒸発ガスは、トランスファーチューブ11を通って低
圧戻りライン囚に入り、熱交4.窒素予冷熱交2で顕熱
を回収され、主圧縮機1に戻って鳴る。
The helium gas as the process gas is pressurized to a predetermined pressure by the main compression ml, enters the cold box 19, and in the nitrogen cooler 2, the helium gas as the pre-cooling cryogen and the low-temperature gas flowing through the low-pressure return line. , 40-70K (varies depending on the process), and the temperature is below 80K, which is required for activated carbon low-temperature adsorption. This helium gas passes through the adsorber valve 7 provided in the high pressure gas line 21 on the downstream side of the nitrogen precooling heat exchanger 2, and passes through the adsorber valve 7 provided in the high pressure gas line 21 on the downstream side of the adsorber population valve 7. Enter vessel 3,
Impurities such as air are adsorbed and removed by the activated carbon filled in this helium gas, and the purified helium gas passes through the adsorber outlet valve 8 provided in the high pressure gas line 21 on the downstream side of the adsorber 3. After that, some of the gas becomes a turbine flow,
First turbine5. It expands adiabatically in the second turbine 6 and enters the low-pressure return line (9), where it becomes low-temperature return gas. On the other hand, the remaining gas becomes a JT flow and is cooled by the heat exchanger 4, and the JT valve l
O, the transfer ball passes through the transfer tube 11 and enters the cooling target, and the latent heat of liquid helium cools the object, and the evaporated gas passes through the transfer tube 11 and enters the low-pressure return line prisoner, where the heat exchanger 4. Sensible heat is recovered by the nitrogen precooling heat exchanger 2 and returned to the main compressor 1.

装置起動後、数日間にて系内のヘリウムガス中の不純物
はかなり除去され、装置運転に支障のない濃度まで低減
される。このような時期に来たならば、吸着器3の再生
を行なっておp、いつでも吸着器を使えるように準備を
する。
After starting the device, impurities in the helium gas in the system are considerably removed within a few days, and the concentration is reduced to a level that does not interfere with the operation of the device. When such a period comes, the adsorber 3 should be regenerated so that it can be used at any time.

吸着器3の再生は、吸着器入口弁7および吸着器出口弁
8を閉止して、プロセスガスはバイパス弁9を開き、こ
のバイパスラインnを通しながら行なうものである。
Regeneration of the adsorber 3 is carried out by closing the adsorber inlet valve 7 and adsorber outlet valve 8, opening the bypass valve 9, and passing the process gas through the bypass line n.

まず、加温ガス人口弁13を開き、続いて加温ガス出口
弁15も開き、主圧縮機1からのプロセスガスな加温ガ
スとして導き、吸着器3の中の巻き込み管14の中にこ
の加温ガスを通し、活性炭などの常温までの昇温を行な
う。吸着器3内がほぼ常温に戻ったならば、真空引き弁
五6を關いて、真空ポンプ17にて吸着器3内の不純物
を除去する。その後、加温ガス人口弁13.加温ガス出
口弁15を閉止し予冷寒剤人ロ弁幻、予冷寒剤出口弁囚
を開き、窒素予冷熱交2に供給されるLN2を冷却用寒
剤として導き、吸着器3の中の巻込み管Zの中にこのL
N2を通し活性炭などの冷却を行なう。これにより吸着
器3の再生は完了する。
First, the heated gas population valve 13 is opened, and then the heated gas outlet valve 15 is also opened, and the heated gas, which is a process gas from the main compressor 1, is introduced into the intake pipe 14 in the adsorber 3. Heat gas is passed through to raise the temperature of activated carbon, etc. to room temperature. When the temperature inside the adsorber 3 returns to approximately room temperature, the vacuum valve 56 is turned on and the vacuum pump 17 removes impurities inside the adsorber 3. After that, heating gas population valve 13. The heated gas outlet valve 15 is closed, the pre-cooled cryogen outlet valve is opened, and the LN2 supplied to the nitrogen pre-cooled heat exchanger 2 is guided as a cooling coolant to the convoluted pipe in the adsorber 3. This L inside Z
Activated carbon, etc. is cooled by passing N2 through it. This completes the regeneration of the adsorber 3.

本実施例のようなヘリウム冷凍機では、次のような効果
を得ることができる。
The helium refrigerator as in this embodiment can provide the following effects.

(1) ヘリウム冷凍機の運転と並行してヘリウムガス
の精製を行なうことができるので、ヘリウム冷凍機を長
時間連続運転できる。
(1) Since helium gas can be purified in parallel with the operation of the helium refrigerator, the helium refrigerator can be operated continuously for a long time.

(2)ガスバッグなどによる二次的な汚れがないため、
ヘリウムガスの汚れが少なく吸着器の不純物吸着負荷を
軽減できる。
(2) There is no secondary contamination caused by gas bags, etc.
There is less helium gas contamination and the load on the absorber for adsorbing impurities can be reduced.

〔発明の効果〕〔Effect of the invention〕

本発明は、以上説明したように、ヘリウムガス中の不純
物を除去する機能を有する吸着器をコールドボックス内
の高圧ガスラインに吸着、再生切替え可能に設けたこと
で、ヘリウム冷凍機の運転と並行してヘリウムガスの精
製を行なうことができるので、長時間連続運転が可能な
ヘリウム冷凍機を提供できる効果がある。
As explained above, the present invention provides an adsorption device that has the function of removing impurities in helium gas in a high-pressure gas line in a cold box so that it can be switched between adsorption and regeneration. Since the helium gas can be purified by the method, it is possible to provide a helium refrigerator that can be operated continuously for a long time.

【図面の簡単な説明】[Brief explanation of drawings]

図面は、本発明によるヘリウム冷凍機の一実施例を示す
系統図である。 3・・・・・・吸着器、19・・・・・・コールドボッ
クス、21・・・3・・−・・咄1益
The drawing is a system diagram showing an embodiment of a helium refrigerator according to the present invention. 3...Adsorber, 19...Cold box, 21...3...1 gain

Claims (1)

【特許請求の範囲】[Claims] 1 ヘリウム中の不純物を除去する機能を有する吸着器
をコールドボックス内の高圧ガスラインに吸着、再生切
替え可能に設けたことを特徴とするヘリウム冷凍機。
1. A helium refrigerator characterized in that an adsorption device having a function of removing impurities in helium is installed in a high-pressure gas line in a cold box so that adsorption and regeneration can be switched.
JP10830984A 1984-05-30 1984-05-30 Helium refrigerator Pending JPS60253769A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10830984A JPS60253769A (en) 1984-05-30 1984-05-30 Helium refrigerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10830984A JPS60253769A (en) 1984-05-30 1984-05-30 Helium refrigerator

Publications (1)

Publication Number Publication Date
JPS60253769A true JPS60253769A (en) 1985-12-14

Family

ID=14481436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10830984A Pending JPS60253769A (en) 1984-05-30 1984-05-30 Helium refrigerator

Country Status (1)

Country Link
JP (1) JPS60253769A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03267659A (en) * 1990-03-16 1991-11-28 Hitachi Ltd Helium freezer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56138655A (en) * 1980-03-31 1981-10-29 Kobe Steel Ltd Cryocooler

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56138655A (en) * 1980-03-31 1981-10-29 Kobe Steel Ltd Cryocooler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03267659A (en) * 1990-03-16 1991-11-28 Hitachi Ltd Helium freezer

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