JP3249604B2 - Device for measuring the parallelism of transducers and filters - Google Patents
Device for measuring the parallelism of transducers and filtersInfo
- Publication number
- JP3249604B2 JP3249604B2 JP30935892A JP30935892A JP3249604B2 JP 3249604 B2 JP3249604 B2 JP 3249604B2 JP 30935892 A JP30935892 A JP 30935892A JP 30935892 A JP30935892 A JP 30935892A JP 3249604 B2 JP3249604 B2 JP 3249604B2
- Authority
- JP
- Japan
- Prior art keywords
- parallelism
- filter
- electrodes
- vibrator
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、水晶振動子，水晶フィ
ルタ，セラミック振動子，セラミックフィルタの平行度
を測定する装置に関するものである。The present invention relates to a crystal oscillator, crystal filter, ceramic resonator, the parallelism of the ceramic filter
Those concerning the device for measuring.
【０００２】[0002]
【従来の技術】水晶振動子，水晶フィルタ，セラミック
振動子，セラミックフィルタは、多くの場合、以下のよ
うにして製造される。まず、水晶片あるいはセラミック
片（以下、「振動子片」と呼ぶ）を結晶から切り出す、
あるいは焼成するなどした後、所定の外形寸法および厚
さに研磨する。続いて振動子片に金属を蒸着して電極を
形成し、さらに蒸着量を調整して振動子の振動周波数、
あるいはフィルタの通過周波数帯域を微調整した後、所
定のパッケージに納めて完成する。BACKGROUND ART crystal oscillator, crystal filter, ceramic resonator, a ceramic filter is often produced as follows. First, a crystal piece or a ceramic piece (hereinafter referred to as a “vibrator piece”) is cut out from a crystal.
Alternatively, after baking or the like, it is polished to predetermined external dimensions and thickness. Subsequently, a metal is vapor-deposited on the vibrator piece to form an electrode, and the amount of deposition is further adjusted to adjust the vibration frequency of the vibrator,
Alternatively, after finely adjusting the pass frequency band of the filter, the filter is put in a predetermined package and completed.
【０００３】このとき、金属蒸着によって大幅な周波数
調整を行うと、蒸着時間が長くなって生産性に影響を及
ぼす上に、クリスタルインピーダンスの低下や、蒸着金
属のはがれによる経年変化のおそれの可能性がある。そ
こで、図４に示すように平行平板対向電極１１，１２の
間に金属蒸着する前の振動子片１３を挿入し、ＣＩメー
タやネットワークアナライザ等で振動特性（振動周波
数、クリスタルインピーダンスなど）を測定して選別す
ることが広く行われている。[0003] At this time, if a large frequency adjustment is performed by metal deposition, the deposition time will be prolonged, affecting the productivity. In addition, there is a possibility that the crystal impedance may be reduced and the deposited metal may peel off over time. There is. Therefore, as shown in FIG. 4, a vibrator piece 13 before metal deposition is inserted between the parallel plate opposed electrodes 11 and 12, and vibration characteristics (vibration frequency, crystal impedance, etc.) are measured by a CI meter, a network analyzer, or the like. It is widely used for sorting.
【０００４】[0004]
【発明が解決しようとする課題】振動子の振動特性、あ
るいはフィルタの通過帯域特性は、振動子片の上下面の
平行度に大きく左右される。従来は、振動子片の厚さが
比較的厚く、振動子片に要求される条件もあまり厳しく
なかったので、振動子片の上下面の平行度が問題になる
ことは比較的少なかったが、振動子片が薄く、条件が厳
しくなるにつれて、平行度不良が問題になることが多く
なってきた。製造工程に平行度不良の振動子片が多く流
れると、周波数のばらつきが増えるため周波数の微調整
の手間がかかり生産性が低下するばかりでなく、歩留り
も低下する。平行度不良は主として振動子をラップする
ラップ盤の精度が不足することによるものだが、現在の
機械加工技術ではラップ盤の精度を向上させることは困
難である。そのため、周波数調整のために金属蒸着をす
る前の工程で振動子片の平行度を測定して選別すること
が望まれていた。The vibration characteristics of the vibrator or the pass band characteristics of the filter greatly depend on the parallelism of the upper and lower surfaces of the vibrator element. In the past, the thickness of the vibrator piece was relatively thick, and the conditions required for the vibrator piece were not so severe, so the parallelism of the upper and lower surfaces of the vibrator piece rarely became a problem, As the vibrator piece becomes thinner and the conditions become severer, poor parallelism often becomes a problem. If a lot of vibrator pieces having poor parallelism flow in the manufacturing process, the variation in the frequency increases, so that it takes time and effort to finely adjust the frequency, thereby lowering the productivity and lowering the yield. The poor parallelism is mainly due to the lack of accuracy of the lapping machine for wrapping the vibrator, but it is difficult to improve the accuracy of the lapping machine with current machining technology. For this reason, it has been desired to measure and sort the parallelism of the vibrator pieces in a step before performing metal deposition for frequency adjustment.
【０００５】本発明は、上記要請に応えるもので、その
目的は、振動子片の製造および検査工程において振動子
片に電極を蒸着する前に振動子片の平行度測定を可能に
することにより、金属電極を蒸着した後の周波数微調整
の際の生産性向上および後工程の歩留りの向上を図るこ
とができる振動子，フィルタ平行度測定用装置を提供す
ることにある。SUMMARY OF THE INVENTION The present invention meets the above-mentioned demands, and an object of the present invention is to make it possible to measure the parallelism of a vibrator piece before depositing electrodes on the vibrator piece in a process of manufacturing and inspecting the vibrator piece. It is another object of the present invention to provide a vibrator and a filter parallelism measuring device capable of improving the productivity and improving the yield in the post-process when finely adjusting the frequency after the metal electrode is deposited.
【０００６】[0006]
【課題を解決するための手段】前記目的を達成するため
に本発明による振動子平行度測定用装置は、水晶振動
子，セラミック振動子の製造および検査工程において測
定器に接続された対向電極間に前記水晶振動子，セラミ
ック振動子を挿入することによって前記振動子の平行度
を検査，選別する振動子平行度測定用装置において、対
向電極の一方を１つの平板電極、他方を複数の電極で構
成し、前記複数の電極から取り出されるそれぞれの信号
特性を比較することにより、挿入された水晶振動子，セ
ラミック振動子の平行度を検査し選別するように構成し
た。また、本発明は 水晶フィルタ，セラミックフィル
タの製造および検査工程においても同様な構成とした。 In order to achieve the above object, an apparatus for measuring the degree of parallelism of a vibrator according to the present invention is provided between a counter electrode connected to a measuring device in a process of manufacturing and inspecting a crystal vibrator and a ceramic vibrator. In a device for measuring the parallelism of a vibrator for inspecting and selecting the parallelism of the vibrator by inserting the quartz vibrator and the ceramic vibrator into a pair,
One of the counter electrodes is composed of one plate electrode, and the other is composed of a plurality of electrodes.
And the respective signals extracted from the plurality of electrodes
By comparing the characteristics, the inserted crystal oscillator and cell
It is configured to inspect and sort the parallelism of the lamic oscillator.
Was. Further, the present invention has the same configuration in the manufacturing and inspection processes of a crystal filter and a ceramic filter .
【０００７】[0007]
【作用】上記構成によれば、複数の電極のうち、１つの
電極に対し振動特性を測定し、さらに他の電極に対し振
動特性を測定し、特性が揃ったものを選別することによ
り平行度の良好な振動子を後の工程に流すことができ
る。上述のように電極を構成したのは、振動子片の厚さ
と振動特性の間には密接な関係があり、振動特性がそろ
っていれば、厚さもそろっていると考えられるからであ
る。According to the above arrangement, of the plurality of electrodes, the vibration characteristics are measured for one electrode, and the vibration characteristics are measured for the other electrodes. Can be flowed to the subsequent process. The reason why the electrodes are formed as described above is that there is a close relationship between the thickness of the vibrator piece and the vibration characteristics, and it is considered that the thickness is uniform if the vibration characteristics are uniform.
【０００８】[0008]
【実施例】以下、図面を参照して本発明をさらに詳しく
説明する。図２は本発明の実施例を示す図で、振動子，
フィルタの平行度測定用装置を用いた試験システムの構
成図である。下電極１の上に振動子片４がのっており、
その上に２つの上電極２，３が振動子片４と非接触で配
置されている。上電極２，３の面積およびその間隔は任
意であり、振動子片４の特性に合わせて調整される。ま
た、下電極１の面積と形状，下電極１と上電極２，３の
間隔も同様に振動子片４の特性測定が最適になるように
調整される。下電極１は振動特性を測定するネットワー
クアナライザ６の一方の測定端子に接続され、上電極
２，３はそれぞれ同軸リレー５を介してネットワークア
ナライザ６の他方の測定端子に接続されている。図示し
ない制御回路によって同軸リレー５が切り換えられるこ
とによって上電極２と３がそれぞれネットワークアナラ
イザ６の他方の測定端子に電気的に接続され、それぞれ
振動特性が測定される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to the drawings. Figure 2 is a diagram showing an embodiment of the present invention, the vibrator,
It is a block diagram of the test system using the apparatus for parallelism measurement of a filter . A vibrator piece 4 is mounted on the lower electrode 1,
Two upper electrodes 2 and 3 are arranged thereon in a non-contact manner with the vibrator element 4. The areas of the upper electrodes 2 and 3 and their intervals are arbitrary, and are adjusted according to the characteristics of the vibrator element 4. Similarly, the area and shape of the lower electrode 1 and the distance between the lower electrode 1 and the upper electrodes 2 and 3 are also adjusted so that the characteristic measurement of the vibrator element 4 is optimized. The lower electrode 1 is connected to one measurement terminal of a network analyzer 6 for measuring vibration characteristics, and the upper electrodes 2 and 3 are connected to the other measurement terminals of the network analyzer 6 via coaxial relays 5, respectively. When the coaxial relay 5 is switched by a control circuit (not shown), the upper electrodes 2 and 3 are electrically connected to the other measurement terminals of the network analyzer 6, respectively, and the vibration characteristics are measured.
【０００９】図２および図３は上記試験システムで測定
した振動片の測定例である。各図において、（ａ）は上
電極２を接続した場合を、（ｂ）は上電極３を接続した
場合をそれぞれ示している。図２は各電極に接続して測
定した振動特性の差が大きい例を示しており、このよう
に特性の差の大きい振動片は平行度不良として排除され
る。図３は同様に測定した振動特性が極めて似ている例
を示しており、このように特性が揃っている振動子片は
平行度良好として後工程に流される。後工程では振動子
に金属が蒸着されて電極が設けられ、電極が蒸着された
振動子の周波数微調整は手間をかけることなく短時間に
行える。FIGS. 2 and 3 show examples of measurement of the resonator element measured by the test system. In each figure, (a) shows the case where the upper electrode 2 is connected, and (b) shows the case where the upper electrode 3 is connected. FIG. 2 shows an example in which the difference in vibration characteristics measured by connecting to each electrode is large, and a vibrating piece having such a large difference in characteristics is excluded as poor parallelism. FIG. 3 shows an example in which similarly measured vibration characteristics are very similar. A vibrator piece having such uniform characteristics is sent to a subsequent process as having good parallelism. In a later step, a metal is vapor-deposited on the vibrator to provide an electrode, and fine adjustment of the frequency of the vibrator on which the electrode is vapor-deposited can be performed in a short time without any trouble.
【００１０】本実施例では下電極が１つ，上電極が２つ
の例を示したが、上電極は２つ以上であれば何個でも良
い。また、上下を逆にして、上電極を１つ、下電極を２
つ以上のようにしても良いことは言うまでもない。さら
に、振動特性測定には、ネットワークアナライザでなく
てもＣＩメータ等を用いても良い。In this embodiment, one lower electrode and two upper electrodes are shown. However, any number of upper electrodes may be used as long as the number is two or more. Also, upside down, one upper electrode and two lower electrodes
It goes without saying that more than one may be used. Further, a CI meter or the like may be used for the vibration characteristic measurement instead of the network analyzer.
【００１１】[0011]
【発明の効果】以上、説明したように本発明による電極
を用いれば、振動子片の平行度の測定が行えるので、金
属電極を蒸着して周波数微調整をする際の生産性を向上
させることができる。また、後工程の歩留りも向上させ
ることができる。As described above, when the electrode according to the present invention is used, the degree of parallelism of the vibrator piece can be measured, so that the productivity when finely adjusting the frequency by depositing a metal electrode can be improved. Can be. Further, the yield in the post-process can be improved.
【図１】本発明による振動子，フィルタの平行度測定用
装置を用いた振動子，フィルタ平行度検査システムの構
成図である。FIG. 1 is a diagram for measuring the parallelism of an oscillator and a filter according to the present invention.
It is a block diagram of a vibrator and filter parallelism inspection system using the device .
【図２】図１により測定した振動特性図であり、上電極
を切換えたときの特性に大きな差がある場合の例であ
る。FIG. 2 is a vibration characteristic diagram measured according to FIG. 1, and is an example in a case where there is a large difference in characteristics when an upper electrode is switched.
【図３】図１により測定した振動特性図であり、上電極
を切換えたときの特性が類似する場合の例である。FIG. 3 is a vibration characteristic diagram measured according to FIG. 1, and is an example of a case where characteristics when an upper electrode is switched are similar.
【図４】従来の振動子特性試験用電極の例を示す図であ
る。FIG. 4 is a diagram showing an example of a conventional transducer characteristic test electrode.
１，１１ 下電極 ２，３，１２ 上電極 ４ 振動子片 ５ 同軸リレー ６ ネットワークアナライザ 1,11 Lower electrode 2,3,12 Upper electrode 4 Transducer piece 5 Coaxial relay 6 Network analyzer
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H03H 3/00 - 3/10 H01L 21/66 G01R 31/26 G01R 29/22 G01H 17/00 Continuation of the front page (58) Field surveyed (Int.Cl. 7 , DB name) H03H 3/00-3/10 H01L 21/66 G01R 31/26 G01R 29/22 G01H 17/00
Claims (2)
よび検査工程において測定器に接続された対向電極間に
前記水晶振動子，セラミック振動子を挿入することによ
って前記振動子の平行度を検査，選別する振動子平行度
測定用装置において、対向電極の一方を１つの平板電極、他方を複数の電極で
構成し、前記複数の電極から取り出されるそれぞれの信
号特性を比較することにより、挿入された水晶振動子，
セラミック振動子の平行度を検査し選別するように構成
したことを特徴とする振動子平行度測定用装置 。In a manufacturing and inspection process of a quartz oscillator and a ceramic oscillator, the parallelism of the oscillator is inspected by inserting the quartz oscillator and the ceramic oscillator between opposing electrodes connected to a measuring instrument. Transducer parallelism to select
In the measurement device , one of the opposed electrodes is a single plate electrode and the other is a plurality of electrodes.
And each signal extracted from said plurality of electrodes.
By comparing the signal characteristics, the inserted crystal oscillator,
It is configured to inspect and sort the parallelism of the ceramic vibrator.
An apparatus for measuring the degree of parallelism of a vibrator .
造および検査工程において測定器に接続された対向電極
間に前記水晶フィルタ，セラミックフィルタを挿入する
ことによって前記フィルタの平行度を検査，選別するフ
ィルタ平行度測定用装置において、対向電極の一方を１つの平板電極、他方を複数の電極で
構成し、前記複数の電極から取り出されるそれぞれの信
号特性を比較することにより、挿入された水晶フィル
タ，セラミックフィルタの平行度を検査し選別するよう
に構成したことを特徴とするフィルタ平行度測定用装
置 。2. A crystal filter, the crystal filter between a counter electrode connected to the measuring device in the manufacturing and inspection processes of the ceramic filter, checking the parallelism of the filter by inserting a ceramic filter, off to screen
In a filter parallelism measurement device , one of the counter electrodes is one plate electrode and the other is a plurality of electrodes.
And each signal extracted from said plurality of electrodes.
By comparing the signal characteristics, the inserted quartz
To check the parallelism of the filter and ceramic filter
Filter parallelism measuring device characterized by having
Place .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30935892A JP3249604B2 (en) | 1992-10-23 | 1992-10-23 | Device for measuring the parallelism of transducers and filters |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30935892A JP3249604B2 (en) | 1992-10-23 | 1992-10-23 | Device for measuring the parallelism of transducers and filters |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06140860A JPH06140860A (en) | 1994-05-20 |
| JP3249604B2 true JP3249604B2 (en) | 2002-01-21 |
Family
ID=17992044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30935892A Expired - Fee Related JP3249604B2 (en) | 1992-10-23 | 1992-10-23 | Device for measuring the parallelism of transducers and filters |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3249604B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4317675B2 (en) * | 2002-03-05 | 2009-08-19 | 株式会社ヒューモラボラトリー | Inspection method for cracks, chips and scratches in quartz crystal |
-
1992
- 1992-10-23 JP JP30935892A patent/JP3249604B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06140860A (en) | 1994-05-20 |
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