JP3243692B2 - Manufacturing method of piezoelectric ceramics - Google Patents
Manufacturing method of piezoelectric ceramicsInfo
- Publication number
- JP3243692B2 JP3243692B2 JP00691690A JP691690A JP3243692B2 JP 3243692 B2 JP3243692 B2 JP 3243692B2 JP 00691690 A JP00691690 A JP 00691690A JP 691690 A JP691690 A JP 691690A JP 3243692 B2 JP3243692 B2 JP 3243692B2
- Authority
- JP
- Japan
- Prior art keywords
- compound
- magnesium
- powder
- piezoelectric ceramics
- average particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000011777 magnesium Substances 0.000 claims description 34
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 24
- 229910052749 magnesium Inorganic materials 0.000 claims description 24
- 239000002245 particle Substances 0.000 claims description 13
- 239000002994 raw material Substances 0.000 claims description 13
- 238000002156 mixing Methods 0.000 claims description 8
- 238000001354 calcination Methods 0.000 claims description 5
- 238000001027 hydrothermal synthesis Methods 0.000 claims description 4
- 150000002681 magnesium compounds Chemical class 0.000 claims description 4
- 150000002822 niobium compounds Chemical class 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 4
- 150000002611 lead compounds Chemical class 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 150000003609 titanium compounds Chemical class 0.000 claims description 3
- 150000003755 zirconium compounds Chemical class 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 description 19
- 239000000203 mixture Substances 0.000 description 10
- 150000001875 compounds Chemical class 0.000 description 7
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 6
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 5
- 239000001095 magnesium carbonate Substances 0.000 description 4
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000010298 pulverizing process Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910000018 strontium carbonate Inorganic materials 0.000 description 2
- 229910014031 strontium zirconium oxide Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 239000010981 turquoise Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電体セラミックスの製造方法に関し、特に
PbTiO3−PbZrO3−Pb（Mg1/3Nb2/3）O3系圧電体セラミッ
クスの製造方法に関するものである。The present invention relates to a method for producing a piezoelectric ceramic, and more particularly, to a method for producing a piezoelectric ceramic.
The present invention relates to a method for producing a PbTiO 3 —PbZrO 3 —Pb (Mg 1/3 Nb 2/3 ) O 3 piezoelectric ceramic.
PbTiO3−PbZrO3−Pb（Mg1/3Nb2/3）O3系材料は、高誘
電率の圧電体材料として使用されている（例えば特公昭
44−17103号明細書など）。PbTiO 3 —PbZrO 3 —Pb (Mg 1/3 Nb 2/3 ) O 3 material is used as a high dielectric constant piezoelectric material (for example,
44-17103, etc.).
この種の圧電体セラミックスは、その材料として各元
素を含む個別の化合物（例えば、酸化物、炭酸塩など）
を混合し、この混合物を仮焼後、成形し、更に焼成した
後、分極処理を行なうことにより、製造されている。Piezoelectric ceramics of this type are composed of individual compounds containing each element (eg, oxides, carbonates, etc.)
Are mixed, calcined, molded, fired, and then subjected to a polarization treatment.
しかしながら、近年、アクチュエーターや圧電スピー
カーなどの高品質の圧電セラミックス製品のために、よ
り高誘電率で変換効率の高い圧電体セラミックス材料が
要望されている。However, in recent years, there has been a demand for a piezoelectric ceramic material having a higher dielectric constant and a high conversion efficiency for high quality piezoelectric ceramic products such as actuators and piezoelectric speakers.
本発明者らは高誘電率・高変換効率の圧電体セラミッ
クスの製造について、鋭意研究を進めた結果、PbTiO3−
PbZrO3−Pb（Mg1/3Nb2/3）O3系圧電体セラミックスの製
造に際して、その原料化合物、特にニオブとマグネシウ
ムの原料を特定することにより、高品質の圧電体セラミ
ックスが得られるとの知見を得て、本発明を完成させる
に至った。The present inventors have for the preparation of a piezoelectric ceramic having a high dielectric constant and high conversion efficiency, a result of our intensive studies, PbTiO 3 -
In the production of PbZrO 3 -Pb (Mg 1/3 Nb 2/3 ) O 3 based piezoelectric ceramics, high quality piezoelectric ceramics can be obtained by specifying the raw material compounds, especially the raw materials of niobium and magnesium. With the knowledge described above, the present invention has been completed.
すなわち、本発明は、ニオブ化合物、鉛化合物、チタ
ニウム化合物、ジルコニウム化合物及びマグネシウム化
合物を混合、仮焼、焼成、分極するPbTiO3−PbZrO3−Pb
（Mg1/3Nb2/3）O3系圧電体セラミックスの製造方法にお
いて、ニオブ化合物及びマグネシウム化合物として平均
粒径が２μｍ以下のニオブ酸マグネシウム（Mg1/3Nb2/3
O2）を用い、その他の原料を配合して混合、仮焼、焼
成、分極することを特徴とする圧電体セラミックスの製
造方法である。That is, the present invention provides niobium compound, lead compound, titanium compound, mixing a zirconium compound and a magnesium compound, calcining, sintering, polarization is PbTiO 3 -PbZrO 3 -Pb
(Mg 1/3 Nb 2/3) O in 3 system manufacturing method of the piezoelectric ceramic, an average particle size of less magnesium niobate 2μm as the niobium compound and the magnesium compound (Mg 1/3 Nb 2/3
This is a method for producing a piezoelectric ceramic, which comprises mixing, calcining, firing and polarizing other materials using O 2 ).
（ニオブ酸マグネシウム） 本発明で用いられるニオブ酸マグネシウムは、圧電体
セラミックスの原料配合の際に予め合成しておく。(Magnesium niobate) The magnesium niobate used in the present invention is synthesized in advance at the time of mixing the raw materials of the piezoelectric ceramic.
ニオブ酸マグネシウムは、例えば、ニオブの化合物で
ある五酸化ニオブとマグネシウムの化合物である炭酸マ
グネシウムを等モルで混合し、800〜1000℃で反応させ
ることにより合成される。その際、必ずしも、ニオブ酸
マグネシウムは単一相でなく、主成分を構成する組成で
あればよい。Magnesium niobate is synthesized, for example, by mixing niobium pentoxide, a compound of niobium, and magnesium carbonate, a compound of magnesium, in equimolar amounts and reacting at 800 to 1000 ° C. In this case, magnesium niobate is not necessarily a single phase, and may have a composition constituting a main component.
本発明においては、この様にして得られたニオブ酸マ
グネシウムを、ボールミルやビーズミルなどで粉砕し、
微細で反応性の高い粉末として使用することが必要であ
る。粉砕して得られた粉末の平均粒径は２μｍ以下、望
ましくは、１μｍ以下のサブミクロン粒子である。２μ
ｍ以上の平均粒径の粉末では反応性が乏しく、特性の向
上があまり認められない。In the present invention, the magnesium niobate thus obtained is pulverized by a ball mill, a bead mill, or the like,
It must be used as a fine and highly reactive powder. The average particle size of the powder obtained by pulverization is 2 μm or less, preferably 1 μm or less, submicron particles. 2μ
With a powder having an average particle size of m or more, the reactivity is poor, and little improvement in properties is observed.
反応性が高く、微細であるニオブ酸マグネシウムとし
ては、水や溶媒に可溶性のニオブとマグネシウムの塩を
加水分解して得られた湿式合成の粉末、該塩を熱分解し
て得られた粉末などがある。この種の方法で得られた粉
末の平均粒径は１μｍ以下であり、極めて反応性に富ん
でいる。とりわけ、水熱反応で合成されたニオブ酸マグ
ネシウムは、低い温度で合成されるため特に反応性が高
く、平均粒径が1.0μｍ以下の微細な粉末が得られ、本
発明の原料としては特に好ましいものである。水熱反応
の合成によるニオブ酸マグネシウムは、例えば、ニオブ
の化合物である五酸化ニオブとマグネシウムの化合物で
ある酸化マグネシウムとを等モルで混合し、この混合粉
末と水とを白金容器に入れ、100〜500kg/cm2の圧力で、
300〜600℃に保持することにより得られる。Highly reactive and fine magnesium niobate includes wet-synthesized powder obtained by hydrolyzing a salt of niobium and magnesium soluble in water or a solvent, powder obtained by thermally decomposing the salt, and the like. There is. The average particle size of the powder obtained by this type of method is 1 μm or less, and it is extremely reactive. In particular, magnesium niobate synthesized by a hydrothermal reaction is particularly high in reactivity because it is synthesized at a low temperature, and a fine powder having an average particle size of 1.0 μm or less is obtained, which is particularly preferable as a raw material of the present invention. Things. Magnesium niobate by synthesis of hydrothermal reaction, for example, niobium pentoxide, a compound of niobium, and magnesium oxide, a compound of magnesium, are mixed in an equimolar amount, and the mixed powder and water are put in a platinum container, and 100 at a pressure of ~500kg / cm 2,
Obtained by maintaining at 300-600 ° C.
（その他の原材料） その他、本発明に使用する鉛化合物、チタニウム化合
物及びジルコニウム化合物としては、それぞれの元素の
酸化物、炭酸塩、硝酸塩、塩化物、硫化物など、焼成し
て、最終的にPbTiO3−PbZrO3−Pb（Mg1/3Nb2/3）O3系化
合物を形成するものであれば良く、特にその形態を限定
しない。圧電体セラミックスの組成としては、高性能な
圧電材料である以下の組成物、 ｛PbTiO3｝ｘ-｛PbZrO3｝ｙ-｛Pb（Mg1/3Nb2/3）O3｝ｚ （ここで、ｘ、ｙ及びｚはモル％を示し、ｘ＝82〜１、
ｙ＝95〜１、ｚ＝88〜１、ｘ＋ｙ＋ｚ＝100である。） である。(Other Raw Materials) In addition, as the lead compound, titanium compound and zirconium compound used in the present invention, oxides, carbonates, nitrates, chlorides, sulfides, etc. of the respective elements are fired and finally PbTiO. 3 -PbZrO 3 -Pb (Mg 1/3 Nb 2/3) as long as it forms a O 3 based compound, not particularly limited in its form. As the composition of the piezoelectric ceramics, the following composition which is a high-performance piezoelectric material, {PbTiO 3 } x- {PbZrO 3 } y- ｛Pb (Mg 1/3 Nb 2/3 ) O 3 ｚz (here Wherein x, y and z represent mol%, x = 82 to 1,
y = 95-1, z = 88-1, x + y + z = 100. ).
なお、本発明の組成物としては、上記の組成のうち、
PbがSrで１〜20原子％置換された組成物であってもよ
く、また、上記組成を基本とし、特性向上のために微量
の添加物を添加した組成物であってもよい。In addition, as the composition of the present invention, among the above compositions,
A composition in which Pb is substituted by 1 to 20 atomic% with Sr may be used, or a composition based on the above composition and to which a small amount of an additive is added for improving characteristics.
（圧電体セラミックス） 上記の各原料を、最終的に必要とする組成に配合した
後の工程については、慣用の方法を用いることができ
る。(Piezoelectric Ceramics) For the steps after each of the above-described raw materials is blended into a finally required composition, a conventional method can be used.
例えば、配合した原料粉末をボールミルなどを用いて
混合粉砕した後、得られた粉末を800〜1000℃で１〜５
時間大気雰囲気中で仮焼する。その後、仮焼粉末を必要
な形状に成形し、大気雰囲気下1100〜1350℃で１〜５時
間焼成し、焼成物を分極することにより、本発明の圧電
体セラミックスが得られる。分極の条件としては特に限
定しないが、60〜100℃で1.5〜5kV/mmの電圧を１〜30分
印加するのがその目安となる。For example, after mixing and pulverizing the compounded raw material powder using a ball mill or the like, the obtained powder is treated at 800 to 1000 ° C. for 1 to 5 times.
Calcinate in air atmosphere for hours. Thereafter, the calcined powder is formed into a required shape, fired at 1100 to 1350 ° C. in the air atmosphere for 1 to 5 hours, and the fired product is polarized to obtain the piezoelectric ceramic of the present invention. The condition of the polarization is not particularly limited, but a rule of thumb is to apply a voltage of 1.5 to 5 kV / mm at 60 to 100 ° C. for 1 to 30 minutes.
実施例１ 五酸化ニオブ（Nb2O5）と炭酸マグネシウム（MgCO3）
を等モルづつ樹脂ボール及びミルを用いて混合した。こ
の混合物を白金ルツボに入れ、大気雰囲気中900℃で２
時間焼成して、ニオブ酸マグネシウムの粉末を得た。得
られた粉末を樹脂ボール及びミルを用いて16時間粉砕
し、ニオブ酸マグネシウムの原料粉末とした。セデイグ
ラフを用いて測定したこの粉末の平均粒径は1.6μｍで
あった。Example 1 Niobium pentoxide (Nb 2 O 5 ) and magnesium carbonate (MgCO 3 )
Were mixed in an equimolar amount using a resin ball and a mill. This mixture is placed in a platinum crucible and placed in an air atmosphere at 900 ° C. for 2 hours.
After calcining for a time, a powder of magnesium niobate was obtained. The obtained powder was pulverized for 16 hours using a resin ball and a mill to obtain a raw material powder of magnesium niobate. The average particle size of the powder measured using a sedigraph was 1.6 μm.
上記のニオブ酸マグネシウムと酸化鉛、炭酸ストロン
チウム、酸化ジルコニウム及び酸化チタンをPb0.95Sr
0.05（Mg1/3Ｎ2/3）0.375Ti0.375Zr0.25O3となるように
配合し、樹脂ボール及びミルを用いて混合粉砕した。得
られた混合粉末をアルミナルツボに入れ、大気雰囲気中
950℃で２時間仮焼し、得られた仮焼粉末を乳ばちを用
いて解砕し、直径15mm厚さ3mmの円板を、350kg/cm2の圧
力でプレス成形した。The above magnesium niobate and lead oxide, strontium carbonate, zirconium oxide and titanium oxide were converted to Pb 0.95 Sr
0.05 (Mg 1/3 N 2/3 ) 0.375 Ti 0.375 Zr 0.25 O 3 was blended and mixed and pulverized using a resin ball and a mill. Put the obtained mixed powder in an alumina crucible,
The calcined powder obtained was calcined at 950 ° C. for 2 hours, and the obtained calcined powder was crushed using a squeeze, and a disk having a diameter of 15 mm and a thickness of 3 mm was press-molded under a pressure of 350 kg / cm 2 .
アルミナツルボに入れた白金板上に上記の成形体を置
き、1250℃、２時間焼成して焼結体を得た。The above-mentioned molded body was placed on a platinum plate placed in an alumina turquoise and fired at 1250 ° C. for 2 hours to obtain a sintered body.
得られた焼結体を厚さ2mmに研磨し、両面に電極とし
て銀ペーストを焼きつけ、80℃で2.5KV/mmの電圧を５分
間印加して分極せしめ、圧電体セラミックスを得た。The obtained sintered body was polished to a thickness of 2 mm, silver paste was baked on both sides as electrodes, and a voltage of 2.5 KV / mm was applied at 80 ° C. for 5 minutes to polarize, thereby obtaining a piezoelectric ceramic.
得られた圧電体セラミックスの1MHzでの誘電率
（εｒ）と変換効率である電気機械結合係数（Kr）をLC
Rメーターを用いて測定した。得られた結果を第１表に
示す。The dielectric constant (ε r ) at 1 MHz of the obtained piezoelectric ceramic and the electromechanical coupling coefficient (K r ), which is the conversion efficiency, are determined by LC
It was measured using an R meter. Table 1 shows the obtained results.
実施例２ 実施例１と同様にして五酸化ニオブと炭酸マグネシウ
ムとから合成したニオブ酸マグネシウムを、ジルコニア
ビーズ及び樹脂ミルで10時間粉砕したもの（平均粒径0.
9μｍ）を原料粉末のニオブ酸マグネシウムとした以
外、実施例１と同様に行なった。Example 2 Magnesium niobate synthesized from niobium pentoxide and magnesium carbonate in the same manner as in Example 1 was pulverized with zirconia beads and a resin mill for 10 hours (average particle diameter of 0.1%).
9 μm) was used as the raw material powder of magnesium niobate, except that the same procedure was performed as in Example 1.
得られた圧電体セラミックスの特性測定結果を第１表
に示す。Table 1 shows the measurement results of the characteristics of the obtained piezoelectric ceramics.
実施例３ 水熱合成で得られた市販のニオブ酸マグネシウム（堺
化学工業（株）製、平均粒径0.6μｍ）を用いた以外、
実施例１と同様に行なった。Example 3 A commercially available magnesium niobate obtained by hydrothermal synthesis (manufactured by Sakai Chemical Industry Co., Ltd., average particle size: 0.6 μm) was used.
Performed in the same manner as in Example 1.
得られた圧電体セラミックスの特性測定結果を第１表
に示す。Table 1 shows the measurement results of the characteristics of the obtained piezoelectric ceramics.
比較例１ ニオブ酸マグネシウムを合成せず、五酸化ニオブ、炭
酸マグネシウム、酸化鉛、炭酸ストロンチウム、酸化ジ
ルコニウム及び酸化チタンを直接原料として、実施例１
と同様に行なった。Comparative Example 1 Example 1 was prepared by using niobium pentoxide, magnesium carbonate, lead oxide, strontium carbonate, zirconium oxide and titanium oxide directly as raw materials without synthesizing magnesium niobate.
Was performed in the same manner as described above.
得られた圧電体セラミックスの特性測定結果を第１表
に示す。Table 1 shows the measurement results of the characteristics of the obtained piezoelectric ceramics.
比較例２ 実施例１と同様にして五酸化ニオブと炭酸マグネシウ
ムとから合成したニオブ酸マグネシウム粉末（平均粒径
3.5μｍ）を、粉砕せずに原料粉末として用いた以外、
実施例１と同様に行なった。Comparative Example 2 Magnesium niobate powder (average particle size) synthesized from niobium pentoxide and magnesium carbonate in the same manner as in Example 1
3.5 μm) was used as raw material powder without pulverization,
Performed in the same manner as in Example 1.
得られた圧電体セラミックスの特性測定結果を第１表
に示す。Table 1 shows the measurement results of the characteristics of the obtained piezoelectric ceramics.
〔発明の効果〕 第１表に示す結果から明らかなように、原料として平
均粒径が２μｍ以下のニオブ酸マグネシウムを用いるこ
とにより、得られる圧電体セラミックスの特性は従来の
ものと比較して大幅に向上する。本発明により、従来の
製造工程、設備を変えることなく、高品質の圧電体セラ
ミックスを製造することができる。 [Effects of the invention] As is clear from the results shown in Table 1, by using magnesium niobate having an average particle size of 2 µm or less as a raw material, the characteristics of the obtained piezoelectric ceramics are significantly higher than those of conventional ones. To improve. According to the present invention, high quality piezoelectric ceramics can be manufactured without changing conventional manufacturing processes and equipment.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭62−197315（ＪＰ，Ａ) 特開 平１−96973（ＪＰ，Ａ) 特開 昭61−242951（ＪＰ，Ａ) 特開 昭51−59400（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-197315 (JP, A) JP-A-1-96973 (JP, A) JP-A-61-242951 (JP, A) JP-A-51-19751 59400 (JP, A)
Claims (2)
物、ジルコニウム化合物及びマグネシウム化合物を混
合、仮焼、焼成、分極するPbTiO3−PbZrO3−Pb（Mg1/3N
b2/3）O3系圧電体セラミックスの製造方法において、ニ
オブ化合物及びマグネシウム化合物として平均粒径が２
μｍ以下のニオブ酸マグネシウム（Mg1/3Nb2/3O2）を用
い、その他の原料を配合して混合、仮焼、焼成、分極す
ることを特徴とする圧電体セラミックスの製造方法。1. A niobium compound, lead compound, titanium compound, mixing a zirconium compound and a magnesium compound, calcining, sintering, polarization is PbTiO 3 -PbZrO 3 -Pb (Mg 1/3 N
b 2/3 ) In the method for producing an O 3 -based piezoelectric ceramic, the niobium compound and the magnesium compound have an average particle size of 2
A method for producing piezoelectric ceramics, comprising using magnesium niobate (Mg 1/3 Nb 2/3 O 2 ) having a size of μm or less, blending other raw materials, mixing, calcining, firing and polarizing.
ｍ以下のニオブ酸マグネシウムを用いることを特徴とす
る請求項１に記載の方法。2. An average particle size of 1.0 μm synthesized by a hydrothermal reaction.
2. The method according to claim 1, wherein m or less of magnesium niobate is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00691690A JP3243692B2 (en) | 1990-01-16 | 1990-01-16 | Manufacturing method of piezoelectric ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00691690A JP3243692B2 (en) | 1990-01-16 | 1990-01-16 | Manufacturing method of piezoelectric ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03214506A JPH03214506A (en) | 1991-09-19 |
| JP3243692B2 true JP3243692B2 (en) | 2002-01-07 |
Family
ID=11651559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00691690A Expired - Lifetime JP3243692B2 (en) | 1990-01-16 | 1990-01-16 | Manufacturing method of piezoelectric ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3243692B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04149059A (en) * | 1990-10-09 | 1992-05-22 | Shizuoka Univ | Ceramic piezoelectric body |
-
1990
- 1990-01-16 JP JP00691690A patent/JP3243692B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03214506A (en) | 1991-09-19 |
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