JP3237547B2 - Film peeling device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for peeling a protective film attached to a substrate exemplified by a substrate for a printed wiring board, a substrate for a liquid crystal display panel, a substrate for a plasma display and the like.

[0002]

2. Description of the Related Art A printed wiring board as described above is manufactured by the following steps. First, a photosensitive resin (photoresist) is placed on the conductive layer provided on the insulating substrate.
A laminate comprising a layer and a light-transmitting resin film (protective film) for protecting the layer is thermocompression-bonded with a lamination roll. Next, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent resin film.

Next, after the light-transmitting support film is peeled off, the exposed photoresist layer is developed to form an etching mask pattern. Thereafter, unnecessary portions of the conductive layer are removed by etching, and A printed wiring board having a wiring pattern is formed.

There have been proposed various film peeling apparatuses for automatically peeling the protective film in the manufacturing process of the printed wiring board.

[0005] In these film peeling apparatuses, the portion of the protective film leading end where peeling is started is pressed obliquely up and down or hooked by a needle-like member to be raised.

As one of them, for example, Japanese Patent Publication No. 6-355
As disclosed in Japanese Patent Application Publication No. 0, the light transmission is achieved by applying vibration of a rod of a vibrator to the end of a laminated film composed of a light-transmitting resin film and a photosensitive resin layer attached to a substrate and hitting the end. There is a thin film peeling device provided with a film floating means for floating a part of the photosensitive resin film from the photosensitive resin layer.

Further, as disclosed in, for example, Japanese Patent Application Laid-Open No. 62-83974, by moving the pressure wheel along the film edge in a state where the end portion of the protective film is sandwiched by the pressure wheel together with the substrate. In some cases, the edge of the film is raised.

In any case, after the leading edge of the film is floated, a gas is blown to flip the film up from the trailing edge, and further, the flipped-up film edge is sandwiched between rollers and belts. The film is completely peeled off while the substrate is advancing, and is carried out of the line.

[0009]

When the film edge is lifted by a needle-shaped member, a rod, a pressure wheel, or the like, if the film is damaged and a cut is formed in the film edge, the film edge is lifted. When the film is turned up with a gas, the film may be cut from the cut and only one of the right and left sides in the width direction may be turned up, and the other may remain stuck to the substrate.

Furthermore, even after the leading edge of the film is evenly turned up in the width direction without being cut off, the film is further peeled off, for example, at the width direction side end of the film. In the case where there is a flaw, there is a problem that the film is cut at this portion, peeling is interrupted, a part of the film turned up in the width direction is thinned, and a corresponding portion remains on the substrate. is there.

As described above, if a part of the film remains on the substrate that has undergone the film peeling process, it has an important influence on the post-process such as the formation of an etching mask pattern and the subsequent etching. A problem arises in that the film remaining on the line is entangled with a device in a later process, and the line must be stopped.

The present invention has been made in view of the above-mentioned conventional problems, and when a film is peeled off from a substrate, a part of the film remains on the substrate or is further peeled off after the start of peeling. It is an object of the present invention to provide a film peeling device capable of detecting, when a thin film has occurred, and immediately removing the thin film.

[0013]

According to a first aspect of the present invention, there is provided a substrate transfer apparatus for transferring a substrate on which a film is stuck in a predetermined direction along a substrate transfer surface. A film flotation device that is disposed in the middle and lifts the leading edge of the film in the vicinity of the leading end of the substrate in the traveling direction from the substrate, a gas blowing device that blows gas to turn up the leading edge, and the gas A film unloading device for gripping and flipping up the film flipped up by spraying from the leading edge side, and unloading, and a substrate transport surface, which is disposed upstream of the film floating device and has a substrate width. In a film peeling device having a substrate width shifting device that adjusts the position in the direction and aligns in the width direction with respect to the film floating device,
Provided in the middle or near the end of the film transport path in the film unloading device, the widthwise center of the film, and the left and right equidistant from the widthwise center, at least two widthwise ends of the film of at least two types of width A film detection device that detects a nearby portion, a substrate width detection unit that outputs a signal of a substrate width according to a width adjustment amount by the substrate width adjustment device, and a substrate width signal from the substrate width detection unit. The above object is attained by a film peeling device provided with a control device for inactivating the outside portion of the substrate width or canceling an output signal in the film detecting device.

According to a second aspect of the present invention, in the first aspect of the present invention, the substrate width shifting device includes a width shifting member for pushing the substrate from at least one side in the width direction, and the substrate width detecting means includes the width shifting member. A width sensor that is moved in synchronization with the member and detects one or both ends in the width direction of the substrate, and a sensor position detection unit that detects a position of the substrate sensor in the width direction of the substrate. .

[0015]

[0016]

According to a third aspect of the present invention, in the first or second aspect of the invention, a film rising sensor for detecting a leading end and a trailing end of the film is provided at a position upstream of the film unloading device in the film transport path. Things.

In the present invention, the presence or absence of the film and the thinness of the film width are detected by the film detecting device on the peeling film transport path according to the substrate width from the substrate width detecting means, and the normal or abnormal film peeling is detected. Is what you do.

[0019]

Embodiments of the present invention will be described below in detail with reference to the drawings.

As shown in FIG. 1, a film peeling apparatus 10 according to the present invention raises the leading edge of the film from the substrate 12 and blows compressed air near the leading end of the substrate 12 in the traveling direction. And a peeling part 14 for further turning up the rising edge of the film,
A substrate transport device 16 that transports the substrate 12 from left to right in FIG.
4, a substrate unloading device 17 for unloading the substrate 12 from which the film has been peeled off. Further, between the peeling unit 14 and the substrate transfer device 16,
A film unloading device 18 is provided.

As shown in FIG. 2, a photosensitive resin layer 12A and a protective film 12B for protecting the same are laminated on both sides of the substrate 12 in this order. After the protective film 12B is peeled off at the peeling section 14 at the peeling section 14, the substrate 12 sent in by the substrate transport apparatus 16 is carried rightward in FIG.

Next, the substrate transfer device 16 will be described in detail with reference to FIGS.

The substrate transfer device 16 includes a plurality of transfer rollers 20 arranged horizontally and at equal intervals, and both sides of a substrate transfer surface II formed by the upper surface of these transfer rollers 20 and a separating section 14. Width-adjusting device 2 disposed near the entry side of the substrate and arranged to be able to move forward and backward from the left and right toward the center in the width direction of the substrate transport surface II from outside of the transport roller 20.
2 is provided.

The substrate width shifting device 22 is provided at a lower position of the horizontally arranged transport roller 20 so that the substrate transport surface I-
It has a pair of width shift plates 24 and 26 that can move forward and backward from both outer sides in the width direction of I in synchronization with the center direction.

The width shift plates 24 and 26 are provided between the transport rollers 20 so as to be able to advance and retreat along the transport rollers 20 in the width direction of the substrate transport surface II without interfering with the rollers. A plurality of arranged width adjusting rollers 24A, 2
6A are provided.

The width adjusting rollers 24A and 26A are rotatably arranged in a horizontal plane by vertical rotating shafts 24B and 26B, and both ends thereof are located at both ends of the substrate 12 on the substrate transfer surface II. Are also projected upward.

FIG. 4 shows a width shift plate driving mechanism 28 for driving the width shift plates 24 and 26 in synchronization with the width direction of the substrate transfer surface II.

The left and right width shift plates 24 and 26 are respectively connected to the substrate transfer surface I- by two guide shafts 32 arranged in parallel with the transfer roller 20 via left and right linear bushes 30L and 30R. It is supported movably in the width direction of I.

The linear bushes 30L, 30R are attached to the upper and lower portions of the endless belt 36 via fixing members 34L, 34R, respectively, so that when the endless belt 36 is driven, the linear bushes 30L, 30R The width shift plates 24 and 26 can be synchronously moved toward the center in the width direction of the substrate transfer surface II or toward the outside in the width direction.

4 and 5, reference numerals 37 and 38 denote pulleys around which the endless belt 36 is wound, and reference numeral 40 denotes a motor for driving the right pulley 38 in FIG.

In FIG. 4, reference numeral 42 denotes a width adjustment center adjusting mechanism, 43L and 43R denote width adjustment center positioning handles, 44L and 44R denote connecting shafts, 45L and 45R.
Is a coupling, 46 is a centering screw, 47
Denotes a centering block, and a centering screw 46 is fixed to a width-shifting drive unit holding member 48 via a centering block 47, and a coupling 45
L, 45R width adjustment center alignment handle 43
L and 43R, the couplings 45L and 45R are rotated through the connecting shafts 44L and 44R.
R is screwed to change the positions of the pulleys 37 and 38.

Reference numeral 50 in FIG. 3 denotes a board loading sensor which is disposed below the board transfer surface II and upstream of the board width shifter 22, and detects a board to be carried in. Numerals 52L and 52R denote width-adjusting outer sensors attached to the width-adjusting plates 24 and 26, respectively.
7 shows inner side shift sensors mounted on the inner side in the substrate width direction than the outer side width sensors 52L and 52R, respectively.

When the loading of the substrate 12 is detected by the board loading sensor 50, a control device 58, which will be described later, controls the substrate 12 transported by the transport rollers 20 to reach a predetermined width-shifting position based on the output signal. After a time, the transport of the substrate 12 is stopped.
Also, the width shift plates 24 and 26 are driven by the width shift plate driving mechanism 28.
Moves to the center side in the substrate width direction, and the width shift inner sensor 54
When L and 54R detect both ends in the width direction of the substrate 12,
According to the output signal, the control device 58 switches the width moving speed of the width moving plate driving mechanism 28 from high speed to low speed, and further, when the width moving rolls 24A26A push the both side ends of the substrate 12 to reach a predetermined position, Outside width sensor 5
The 2L and 52R detect this and stop the width shifting operation.

In the substrate transfer device 16, the transfer roller 20A on the front end side in the substrate transfer direction is disposed adjacent to the entrance of the peeling section 14, as shown in FIG.

The peeling section 14 is provided on the substrate transfer surface II.
Is disposed further forward than the film unloading device 18 in the substrate transport direction.

Next, the peeling section 14 will be described in detail with reference to FIGS.

The exfoliated portion 14 is provided on the substrate 1 by vibrating the rod 60A at the distal end in the axial direction by air pressure.
2. A film levitation device 60 for hitting the leading edge of the protective film 12B on the upper surface of the protective film 12B to float it, and air blowing for blowing compressed air to the leading edge of the floating protective film 12B to promote the floating / separation. And 62 as a set, and as a set, a total of four sets are vertically symmetrical with respect to the substrate transfer surface II and symmetrically in the vicinity of the width direction of the substrate transfer surface II. Are located.

The film levitation device 60 has a holder portion 60B supported by a levitation member supporting rotary shaft 63 so as to be reciprocable in the axial direction by a sliding holder portion 60C.

The floating member supporting rotary shaft 63 is a square rod-shaped member disposed vertically symmetrically with respect to the substrate transport plane II and parallel to the tip of the substrate 12, and has a supporting mechanism (not shown). ), It is supported by the apparatus frame 64 so as to be swingable in a certain range around the axis thereof and vertically movable in a certain range.

Reference numeral 65 in FIG. 7 denotes a substrate that sandwiches the substrate 12 at a total of eight locations on both sides of the set of film floating devices 60, that is, the upper and lower sides of the substrate transport surface II, and fixes the substrate. 4 shows a holding roller. These substrate holding rollers 65 are supported by the apparatus frame 64 via a leaf spring-like support plate 65A.

The one set of air blowing devices 62 has a rod 6 at the distal end of the film floating device 60 at the distal end.
Flat nozzle 62 that blows compressed air to the leading edge of the film from a position behind 0A to promote the floating of protective film 12B.
A and the flat nozzle 62A, the substrate transfer surface I-
A fan-shaped nozzle 62B is disposed at the outer side in the width direction at I, and blows compressed air widely to the leading edge of the film that has begun to float to expand the floating range in the film width direction.

Reference numerals 66A and 68B in FIG. 7 (see FIG. 8)
Indicates an optical sensor for detecting a release film. The release film detecting optical sensors 66A and 66B are lifted by the film floating device 60, and when the leading end of the protective film 12B that has started peeling is pressed against the film guide plates 86A and 86B (described later) by the compressed air flow.
Upon detecting this, a detection signal is output to the control device 58.

The release film detecting optical sensor 66A,
Reference numeral 66B denotes a reflection-type optical sensor, which projects light onto a reflection surface 66C arranged on the film guide plate 86A (86B) side and receives the reflected light, as shown in FIG. Note that this may be a transmission type optical sensor.

In FIG. 6, reference numerals 67A and 67B denote substrate front end detection sensors, and 68A and 68B denote film edge detection sensors.

Next, referring to FIGS. 8, 9 and 10,
The film unloading device 18 will be described in detail.

As shown in FIG. 8, the film unloading device 18 has film unloading belt devices 70A and 70B provided close to the front side and the back side of the substrate 12 at the film peeling start position. These film unloading belt devices 70A, 70B are a pair of film unloading belts 72A, which sandwich the film peeled off from the substrate 12 and turned up (down) in the thickness direction thereof, and unload the film.
74A, 72B and 74B.

These film discharge belts 72A, 74
As shown in FIG. 9, A and 72B, 74B respectively have three small width discharge belts 73A to 73C, 75A to 75, which are arranged with a gap 76 in the film width direction.
C, 73D to 73F, and 75D to 75F.

Therefore, there are two gaps 76 in the width direction of the film. At the positions of the gaps 76, as shown in FIG. Release film guides 78 and 79 for guiding the release film to the outside of the film discharge belts 72A and 74A are provided.

The upper film discharge belts 72A, 72
4A outlet and lower film discharge belts 72B, 74
Near the outlet of B, an upper film detecting device 94 and a lower film detecting device 96 for detecting a film passing through this position are provided, respectively.

These upper and lower film detecting devices 9
As shown in FIG. 11, reference numerals 4 and 96 respectively denote central sensors 94A and 94A which detect the center position in the width direction of the release film.
6A and minimum width sensors 94B and 96 disposed at positions for detecting the vicinity of both ends in the width direction of the minimum width film to be carried out.
B, maximum width sensors 94D and 96D arranged at positions for detecting the vicinity of both ends in the width direction of the film having the maximum width, and intermediate width sensors 94C and 96C arranged at intermediate positions thereof. I have.

Each of these sensors is configured to detect when a release film passes through the front surface thereof and output a signal to the control device 58 (see FIG. 12).

The reference numeral 98 in FIG.
0 shows suction holes formed in the film guide plates 86A and 86B for sucking the tip of the protective film 12B which has been lifted up by 0 and sprayed and turned up by the fan-shaped nozzle 62A.

As shown in FIG. 8, the film unloading belts 74A and 74B on the downstream side in the substrate transport direction are formed by the belt tension rollers 80A and 80B on the substrate transport surface II side and the belt tension rollers 80A and 80B. Parallel rotating shaft 82
A and 82B are supported by levers 84A and 84B so as to be swingable, so that the belt tension roller 8
Reference numerals 0A and 80B denote a carry-out position for approaching the film carry-out belts 72A and 72B, sandwiching the peeled-up and turned-up (down) film, and a direction downstream from the film feed direction and away from the substrate transfer surface II. It swings between the standby position that has been swung.

The film guide plates 86A, 86B
Is used to remove the leading end of the film peeled from the substrate by the air blowing device and turned up (down) to the substrate transport surface II.
It is for guiding at right angles.

Reference numerals 79A and 79B in FIG. 8 denote belt tension rollers 80 on the side of the film discharge belts 72A and 72B.
A, 80B, the entrance side belt tension roller facing 90B,
Reference numeral 90B denotes a belt supporting roller for maintaining the state in which the film carrying belts 74A and 74B are wound around the belt tensioning rollers 80A and 80B when the belt tensioning rollers 80A and 80B are at the standby position.

The peeling film guides 78 and 79 are provided between the belt pulleys 92A and 93A on the opposite side to the belt tensioning rollers 79A and 80A on the incoming side of the film carrying belts 72A and 74A. Release film extending from an overlapping position as viewed from the side (a position traversing the belt movement locus) to the belt movement direction and to the outside, and being carried out between the output side toothed belt pulleys 92A and 93A, respectively. Guide surface 7 facing both sides of
8 and 79 are provided.

The guide surfaces 78, 79 are expanded laterally and upward from the position between the output-side toothed belt pulleys 92A, 93A so that the release film can be carried out.

The lower film discharge belt 72
No release film guide is provided on the output side of B and 74B, but the release film discharged downward passes between the toothed belt pulleys 92B and 93B on the output side of the film discharge belts 72B and 74B. It is designed to fall down.

Further, a plurality of air blowing pipes 95 are arranged along the conveyance path of the peeled film to blow air to the front side and the back side to smoothly feed the peeled film to the outlet side. The air blowing pipe 95 extends in a direction orthogonal to the substrate transport direction, and has an air blowing hole in the outer periphery thereof in the release film feeding direction.

The rotating shafts 82A and 82B are driven such that the belt tensioning rollers 80A and 80B are at the standby position, and the leading end of the film peeled from the substrate 12 by the air jet is the belt tensioning roller 79A in the standby state. And between 80A and 79B and 80B,
It is designed to be driven to a transport position.

More specifically, the tip of the film peeled from the substrate 12 and turned up (down) is attached to the film guide plates 86A and 86B by the air blowing device 6.
When pressed by the air jet from 2,
This is detected by one of the release film detection optical sensors 66A and 66B, and the release film detection optical sensors 66A and 66B are detected.
6B, the control device 56 drives the actuators of the rotating shafts 82A, 82B such that the belt tension rollers 80A, 80B are at the transport position after a predetermined time from the detection. . Here, the predetermined time is the maximum value of the time lag in the substrate advancing direction between the front ends of the separated films on the front and back of the substrate 12.

Next, the operation of the film peeling device 10 will be described.

When the substrate 12 on which the protective film 12B is adhered is transferred onto the transport roller 20 of the substrate transport device 16 and is transported by the transport roller 20 toward the peeling section 14 to a predetermined position, the board is loaded. The tip of the substrate 12 is detected by the sensor 50.

The control device 58 receives the board tip detection signal from the board loading sensor 50 and then
After a lapse of time when the roller 2 reaches the width approach position, the transport rollers 20
To stop.

Next, the board width shifting device 22 is operated.
The substrate width shifting device 22 is configured such that the endless belt 36 of the width shifting plate driving mechanism 28 is driven by the motor 40 via the pulleys 37 and 38, so that the substrate transport surface I
-I is driven synchronously toward the center in the width direction.

At this time, the width shift rollers 24A, 26A attached to the width shift plates 24, 26 enter the gap between the transport rollers 20, 20 from the outside in the width direction, and the width of the substrate 12 on the transport rollers 20 in the width direction. It is moved in a direction to contact both ends.

When the width adjusting rollers 24A and 26A have moved to some extent, both ends in the width direction of the substrate 12 are detected by the left and right width adjusting outer sensors 52L and 52R. Switching to low speed, the width adjusting rollers 24A and 26A slowly adjust the width of the substrate 12.

The board 12 is moved closer to the substrate transfer surface I-
When the centering is performed at the center position in the width direction I, the width-adjusting inner sensors 54L and 54R are simultaneously
Are detected in the width direction, and the control device 58 ends the width shifting by the detection signal.

In this state, the transport by the transport rollers 20 is resumed, and the substrate 12 is sent to the peeling section 14 while being centered in the width direction by the width-adjusting rollers 24A and 26A.

The control device 58 determines the distance from the preset initial position of the width-adjusting rollers 24A, 26A until the width-adjusting inner sensors 54L, 54R detect both ends in the width direction of the substrate 12. The width of the substrate 12 is calculated based on the moving speed of the shift plates 24 and 26 and the operation time from the initial position.

When the leading edge of the substrate 12 sent to the peeling section 14 is detected by the substrate leading edge detecting sensors 67A and 67B, and further, when the leading edge of the protective film 12B is detected by the film edge detecting sensors 68A and 68B, the detection is performed. The transport of the substrate 12 is stopped at the position, and the fixed roller 20B waiting above the transport roller 20A is lowered, and the substrate 1
2 is fixed in that position.

As shown in FIG. 13, the stop position of the substrate 12 is such that the leading edge of the protective film 12B is slightly forward of the leading end of the rod 60A in the film floating device 60. Time.

Next, the film levitation device 60 and the air blowing device 62 are turned on, and the rod 60A is vibrated in the axial direction by air pressure, so that the tip of the rod 60A hits the protective film 12B. Also, compressed air is blown out from the fan-shaped nozzle 62A.

At this time, when the rod 60A strikes the protective film 12B on the substrate 12, the rod 60A vibrates due to the reaction, but this is absorbed by the sliding holder 60C. When the rod 60A is hitting the protective film 12B, the substrate holding roller 65 holds the substrate 12 from above and below and fixes the position.

The film levitation device 60 has its rod 60
While hitting the protective film 12B on the substrate 12 by A, the floating member supporting rotary shaft 63 is pivoted counterclockwise as shown by the arrow in FIG. 12, whereby the tip of the rod 60A is moved to the position of the protective film 12B. It moves while hitting the protective film 12B toward the edge, and FIG.
As shown in FIG. 2, it extends to the outside of the edge.

Accordingly, a hitting mark is formed from the inside to the edge of the protective film 12B by the rod 60A, and a gap is formed between this portion and the substrate 12, where air is blown from the flat nozzle 62A. The fan-shaped nozzle 62B is lifted from the substrate 12 and further raised.
, The floating portion spreads in the film width direction, and the leading edge is separated from the substrate 12 over the entire width.

The tip of the peeled protective film 12B is
The compressed air flow causes the film guide plate 86
A, 86B. Film guide plate 8
6A and 86B, the leading end of the protective film 12B pressed against the film guide plate 86 by suction holes 98.
A and 86B are sucked and held, and at the same time, the leading ends of the peeled protective films 12B are detected by the peeling film detecting optical sensors 66A and 66B.

Thus, when the belt tensioning rollers 80A, 80B are driven to the carry-out position by the control device 58, the film carry-out belts 72A, 74A, 72B, 72B, 7B.
4B sandwiches the tip of the protective film 12B from the front and back.

Subsequently, the toothed belt pulleys 92A and 93
A and 92B, 93B are simultaneously rotated and driven by a motor (not shown), so that the carry-out belt sandwiching the protective film 12B is driven by toothed belt pulleys 92A, 93B.
Since the protective film 12B moves in the directions of A, 92B, and 93B, the protective film 12B is sequentially peeled off from the substrate 12, and is carried out from the toothed belt pulleys 92A, 93A, 92B, and 93B. The moving speed of the carry-out belt is
2 is adjusted to be substantially the same as the moving speed.

At this time, the two gaps 76 between the narrow belts 73A to 73C and 75A to 75C on the front side (upper side in the figure) are provided with the release film guide 7 as described above.
8 and 79, and a pair of front and back guide surfaces thereof are provided with toothed belt pulleys 92A and 9B when viewed from the side.
3A, and is disposed so as to sandwich the film discharge surface.
The release film carried out to the vicinity of A and 93A is discharged out of the pass line along the guide surface. The release film sandwiched between the lower film discharge belts 72B and 74B is a belt pulley 9 with a discharge toothed belt.
It is discharged downward from between 2B and 93B.

When the release film is discharged out of the pass line, the air from the air blowing pipe 95 allows the film to be discharged smoothly.

When the peeled film is discharged out of the pass line, the upper and lower film detecting devices 94 and 96
Detects the end of the film, thereby confirming the completion of discharge. Release film detecting optical sensors 66A, 66A
If the completion of discharge is not confirmed even though B has detected the leading end of the film, it indicates that a peeling error or a jam on the belt has occurred.

Here, the upper and lower film detecting devices 9
4 and 96, the width-adjusting outer sensor 5
The control device 58 selectively operates according to the movement amount of 2L and 52R, that is, the width of the protective film 12B.

For example, when the detected film width is the maximum, all sensors including the maximum width sensors 94D and 96D are turned on. When the film width is intermediate, the maximum width sensors 94D and 96D are turned off. And the intermediate width sensor 94
C and 96C are turned on, and when the film width is minimum, only the minimum width sensors 94B and 96B and the center sensors 94A and 96A are turned on. I have.

The output signal of the sensor that is not turned on may be canceled by the control device 58 instead of turning it off.

Now, when the peeled protective film 12B has the maximum width, for example, the maximum width sensor 96D on the left side may output a detection signal from the maximum width sensor 94D on the right side.
Does not output a detection signal, it means that the undetected film remains on the substrate 12 without being partially peeled off.

Further, even if the leading end of the protective film 12B is completely peeled off in the width direction, the peeling film becomes thinner in the middle, and if a part of the film remains on the substrate 12, the maximum width is reached in the middle of the peeling. A state occurs in which one of the sensors 94D and 96D does not detect a film.

In this manner, when any one of the sensors in the operating state does not detect the film, the substrate 12 is taken out of the line as a peeling failure.

The substrate 12 having a peeling error carried out of these lines is passed through the film peeling device 10 again, or the remaining film is peeled off by a separate batch process.

In the above-described film peeling device, the detection of the substrate width in the substrate transfer device 16 is performed by a sensor that is interlocked with the width adjusting rollers 24A and 26A of the substrate width adjusting device 22. However, the present invention is not limited to this. For example, a substrate width detection sensor such as a photoelectric sensor may be provided at an intermediate position of the substrate transfer device 16.

In this case, the substrate width detecting sensors may correspond to the respective sensors of the upper and lower film detecting devices 94 and 96.

Further, the substrate width detecting sensor and the sensors of the upper and lower film detecting devices 94 and 96 are line sensors which are continuous in the substrate and film width directions, and output signals thereof in accordance with the substrate width and the film width. May be changed. In this case, even if the film width is slightly thinned during the peeling, it can be reliably detected.

Further, the film peeling device 10 is used for the substrate 1
Although the protective film 12B on both the front and back surfaces of No. 2 is peeled off, the present invention is not limited to this, and is also applicable to a case where the protective film is peeled off from only one side.

Furthermore, the peeling section 14 is used to float and peel by hitting the tip of the protective film 12B with the rod 60A. However, the present invention is not limited to this. Naturally, the present invention is also applied to a case where the sheet is sandwiched together with the substrate and is peeled off by being pressed.

Further, the board width shifting device 22 is designed to push both ends in the width direction of the board 12 by the two width shifting plates 24 and 26, but the present invention is not limited to this. Alternatively, a member for positioning one end in the width direction may be fixed at a position corresponding to the substrate width, and only the other end in the width direction may be pushed toward the one end by the width shifting member.

The film detectors 94 and 96 detect three types of films, large, medium and small. However, the present invention is not limited to this, and at least two or four or more types of widths can be detected. The film may be detected.

Further, the above-mentioned film peeling device is to blow a film by blowing air, but the present invention is also applied to a case where an inert gas such as nitrogen gas is used.

[0098]

Since the present invention is constructed as described above, even if the film is broken and remains on the substrate at the time of peeling, it is possible to reliably detect the film and remove the substrate. Having.

[Brief description of the drawings]

FIG. 1 is a side view showing the appearance of a film peeling device according to the present invention.

FIG. 2 is an enlarged cross-sectional view showing a substrate from which a protective film is peeled by the film peeling device.

FIG. 3 is an enlarged plan view showing a substrate transfer device in the film peeling device.

FIG. 4 is a side view taken along the line IV-IV in FIG. 3;

FIG. 5 is an enlarged side view taken along the line VV in FIG. 4;

FIG. 6 is a schematic side view showing a relationship between a peeling section of the film peeling device and a film unloading device.

FIG. 7 is an enlarged perspective view showing a main part of a peeling unit in the film peeling device.

FIG. 8 is a side view showing a film unloading device in the film peeling device.

FIG. 9 is a diagram showing an arrow IX-IX in FIG. 8;

FIG. 10 is an enlarged perspective view showing a part of the film unloading device.

FIG. 11 is a schematic front view showing an arrangement of sensors of the film unloading device.

FIG. 12 is a block diagram showing a control system of the film peeling device.

FIG. 13 is an enlarged side view showing a state at the start of film peeling by the peeling unit.

FIG. 14 is an enlarged side view showing a film peeling process by the peeling section.

[Explanation of symbols]

 II: substrate transport surface 10: film peeling device 12: substrate 12B: protective film 14: peeling section 16: substrate transport device 18: film unloading device 20, 20A: transport roller 22: substrate width adjuster 24, 26: width Drawer 24A, 26A Width mover roller 28 Width mover driving mechanism 52L, 52R Width mover outside sensor 58 Control device 60 Film floating device 62 Air blowing device 62A Fan nozzle 68A Board tip detection sensor 68B Film edge detecting sensor 94: Upper film detecting device 96: Lower film detecting device 94A, 96A: Central sensor 94B, 96B: Minimum width sensor 94C, 96C: Intermediate width sensor 94D, 96D: Maximum width sensor

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-271356 (JP, A) JP-A-62-83974 (JP, A) JP-A-59-118660 (JP, A) 3550 (JP, B2) (58) Fields investigated (Int. Cl. ⁷ , DB name) B65H 41/00 H05K 13/02

Claims (3)

(57) [Claims] 1. A substrate transfer apparatus for transferring a substrate on which a film is stuck in a predetermined direction along a substrate transfer surface, and a substrate transfer device disposed in the middle of the substrate transfer surface and near a leading end of the transferred substrate in a traveling direction. A film levitation device that lifts the leading edge of the film from the substrate, a gas blowing device that blows up the leading edge by blowing gas, and grips the film flipped up by blowing the gas from the leading edge side. Further flipping up, and a film unloading device for unloading, and the substrate transport surface, disposed upstream of the film levitating device, adjusting the position of the substrate in the width direction, and in the width direction with respect to the film floating device. A film width-separating device comprising: A film detecting device for detecting a central portion in the width direction of the film, and an equidistant left and right distance from the central portion in the width direction, and detecting portions near both ends in the width direction of the film having at least two types of widths; A substrate width detecting unit that outputs a signal of the substrate width according to a width shift amount by the apparatus; and an outside portion of the substrate width in the film detecting device that does not operate according to a substrate width signal from the substrate width detecting unit. Or a control device for canceling the output signal. 2. The device according to claim 1, wherein the substrate width shifting device has a width shifting member for pushing the substrate from at least one side in the width direction, and the substrate width detecting means is moved in synchronization with the width shifting member. And a width sensor for detecting one or both ends in the width direction of the substrate, and a sensor position detecting means for detecting a position of the substrate sensor in the width direction of the substrate. 3. The method of claim 1 or 2, wherein the upstream position than the film feed-out device in the film transport path, provided a release film detection sensors for detecting the leading end of the peeled film Film Stripping device.