JP3236949B2 - Manufacturing method of chip-shaped electronic component substrate - Google Patents
Manufacturing method of chip-shaped electronic component substrateInfo
- Publication number
- JP3236949B2 JP3236949B2 JP5627896A JP5627896A JP3236949B2 JP 3236949 B2 JP3236949 B2 JP 3236949B2 JP 5627896 A JP5627896 A JP 5627896A JP 5627896 A JP5627896 A JP 5627896A JP 3236949 B2 JP3236949 B2 JP 3236949B2
- Authority
- JP
- Japan
- Prior art keywords
- shaped
- rod
- electronic component
- kneading
- binder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Manufacturing Cores, Coils, And Magnets (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、インダクタ、抵抗
及びコンデンサ又はそれらのアレイ並びにフィルタなど
の電子部品の素地を製造するチップ状電子部品素地の製
造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a chip-shaped electronic component substrate for producing an electronic component substrate such as an inductor, a resistor and a capacitor or an array thereof, and a filter.
【0002】[0002]
【従来の技術】従来、例えば、磁性、誘電性又は絶縁性
或いは低誘電性の焼成された成形体に複数の直線状又は
コイル状導線又は抵抗線を内蔵した小型なチップ状電子
部品が提案されている。2. Description of the Related Art Heretofore, for example, there has been proposed a small chip-shaped electronic component in which a plurality of linear or coil-shaped conductive wires or resistance wires are built in a sintered body of magnetic, dielectric or insulating or low dielectric properties. ing.
【0003】[0003]
【発明が解決しようとする課題】本発明の課題は、上記
した従来のチップ状電子部品を低廉なコストで量産でき
る電子部品素地の製造方法を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing an electronic component base which can mass-produce the above-mentioned conventional chip-shaped electronic component at low cost.
【0004】[0004]
【課題を解決するための手段】本発明は、上記の課題を
解決するために、請求項1に記載のように、絶縁性又は
低誘電性の原料粉末と結合材を混練した混練材を送出す
る押出し成形機により直線状又はコイル状抵抗線を内蔵
する混練材から成る断面方形の複数の棒状成形体を形成
し、該複数の棒状成形体をその側面において互いに接合
し、次いで焼成し、焼成した成形体をその長さ方向に沿
って切断して複数の電子部品素地を製造すること、請求
項2に記載のように、誘電性原料粉末と結合材を混練し
た混練材を送出する押出し成形機により直線状又はコイ
ル状導線を内蔵する混練材から成る断面方形の複数の棒
状成形体を形成し、該複数の棒状成形体をその側面にお
いて互いに接合し、次いで焼成し、焼成した成形体をそ
の長さ方向に沿って切断して複数の電子部品素地を製造
すること、請求項3に記載のように、磁性原料粉末と結
合材を混練した混練材を送出する押出し成形機により直
線状又はコイル状の導線を内蔵する混練材から成る断面
方形の複数の棒状成形体を形成すると共に誘電性原料粉
末と結合材を混練した混練材を送出する押出し成形機に
より直線状又はコイル状の導線を内蔵する混練材から成
る断面方形の複数の棒状成形体を形成し、これら2種類
の棒状成形体を組み合わせてその側面において互いに接
合し、次いで焼成し、焼成した成形体をその長さ方向に
沿って切断して複数の電子部品素地を製造すること、請
求項4に記載のように、絶縁性又は低誘電性の原料粉末
と結合材を混練した混練材を送出する押出し成形機によ
り直線状又はコイル状の抵抗線を内蔵する混練材から成
る断面方形の複数の棒状成形体を形成すると共に誘電性
原料粉末と結合材を混練した混練材を送出する押出し成
形機により直線状又はコイル状導線を内蔵する混練材か
ら成る断面方形の複数の棒状成形体を形成し、これら2
種類の棒状成形体を組み合わせてその側面において互い
に接合し、次いで焼成し、焼成した成形体をその長さ方
向に沿って切断して複数の電子部品素地を製造すること
を特徴とする。複数の棒状成形体の接合時にその側面に
接合材を塗布するか、或いは、前記結合材の溶媒を塗布
する。前記複数の棒状成形体の接合時に、該棒状成形体
を加熱、加熱・加圧又は加圧・振動の内の少なくとも一
つを行うことができる。前記混練材に含まれる結合材と
して熱軟化性の結合材を用いてもよく、この結合材を用
いたとき、複数の棒状成形体の接合時に棒状成形体を加
熱、加熱・加圧又は加圧・振動の少なくとも一つを行う
ことが好ましく、このとき、接合材又は結合材の溶媒を
棒状成形体の側面に塗布しなくてもよい。The present invention SUMMARY OF], in order to solve the above problem, as described in claim 1, insulating or
An extruder for kneading the low-dielectric raw material powder and the binder to form a plurality of rod-shaped compacts having a rectangular cross section made of a kneaded material containing a linear or coiled resistance wire is formed by an extruder for delivering a kneaded material. Bonding the rod-shaped formed body to each other on its side surface, then firing, and cutting the fired shaped body along its length to produce a plurality of electronic component bases ;
As described in Item 2, kneading the dielectric raw material powder and the binder
Straight or coiled by an extruder that feeds the mixed material
Rods with a square cross section made of kneading material with a built-in conductor
A plurality of rod-shaped molded bodies are formed on a side surface thereof.
And joined together, then fired, and the fired compact is
Cuts along the length of a piece to produce multiple electronic component bodies
And binding with the magnetic raw material powder as described in claim 3.
The extruder that sends out the kneaded material obtained by kneading the mixture is directly
Cross section made of kneading material with a built-in linear or coiled conductor
Forming a plurality of rectangular rod-shaped compacts and dielectric raw material powder
To an extruder that sends out a kneaded material obtained by kneading powder and binder.
Made of kneading material with a more straight or coiled conductor
Forming a plurality of rod-shaped molded bodies having a rectangular cross section
Rod-shaped moldings in combination and
And then fired, and the fired compact in the length direction
Cut along to produce multiple electronic component substrates,
As described in claim 4, an insulating or low dielectric material powder
An extruder that delivers a kneaded material obtained by kneading the binder and the binder
Made of a kneading material with a built-in linear or coiled resistance wire.
Forming multiple rod-shaped compacts with rectangular cross sections
Extrusion forming to deliver a kneaded material obtained by kneading raw material powder and binder
A kneading material that incorporates a straight or coiled conductor depending on the shaper
And forming a plurality of rod-shaped molded bodies having a rectangular cross-section
Types of rod-shaped compacts are combined and
And then fired, and the fired compact is
Cutting a plurality of electronic component substrates along the direction . At the time of joining a plurality of rod-shaped moldings, a joining material is applied to the side surface, or a solvent for the binding material is applied. At the time of joining the plurality of rod-shaped molded bodies, the rod-shaped molded bodies can be subjected to at least one of heating, heating / pressurizing, or pressurizing / vibrating. A heat-softening binder may be used as the binder contained in the kneading material. It is preferable to perform at least one of the vibrations, and at this time, the solvent of the bonding material or the binding material does not have to be applied to the side surface of the rod-shaped molded body.
【0005】前記複数の棒状成形体は、インダクタ又は
インダクタ・アレイの場合には、いずれも磁性原料粉末
と結合材を混練した混練材から成り直線状又はコイル状
導線を内蔵する棒状成形体であり、抵抗又は抵抗アレイ
の場合には、いずれも絶縁性又は低誘電性の原料粉末と
結合材を混練した混練材から成り直線状又はコイル状抵
抗線を内蔵する棒状成形体であり、コンデンサ、コンデ
ンサ・アレイの場合には、いずれも誘電性原料粉末と結
合材を混練した混練材から成り直線状又はコイル状導線
を内蔵する棒状成形体であり、インダクタ及びコンデン
サから成る複合部品である場合には、磁性原料粉末と結
合材を混練した混練材から成り直線状又はコイル状の導
線を内蔵する棒状成形体と、誘電性原料粉末と結合材を
混練した混練材から成り直線状又はコイル状導線を内蔵
する棒状成形体の組合わせであり、抵抗及びコンデンサ
から成る複合部品である場合には、前記抵抗の棒状成形
体とコンデンサの棒状成形体の組合わせである。インダ
クタ・アレイの場合、前述したインダクタ又はインダク
タ・アレイの複数の棒状成形体を、その側面に該成形体
の磁性原料粉末よりも透磁率の低い磁性原料粉末または
非磁性原料粉末と結合材を混練した混練材から成る薄板
状成形体を介在させて相互に接合して成形体を作成する
ことが好ましい。In the case of an inductor or an inductor array, each of the plurality of rod-shaped molded bodies is a rod-shaped molded body made of a kneaded material obtained by kneading a magnetic raw material powder and a binder and having a linear or coil-shaped conductive wire built therein. In the case of a resistor or a resistor array, each is a rod-shaped molded body made of a kneaded material obtained by kneading an insulating or low-dielectric raw material powder and a binder, and having a linear or coil-shaped resistance wire built therein. -In the case of an array, each is a rod-shaped molded body made of a kneaded material obtained by kneading a dielectric raw material powder and a binder, and has a built-in linear or coiled conductive wire. A rod-shaped molded body composed of a kneaded material obtained by kneading a magnetic raw material powder and a binder, and having a linear or coiled conductive wire, or a kneaded material obtained by kneading a dielectric raw material powder and a binder. A straight or a combination of the rod shaped molded body incorporating a coiled conductive wire made, if the resistance and a composite component comprising a capacitor is a combination of the rod shaped molded body of the rod shaped molded body and the capacitor resistor. In the case of an inductor array, a plurality of rod-shaped compacts of the inductor or the inductor array described above are kneaded with magnetic material powder or non-magnetic material powder having a lower magnetic permeability than the magnetic material powder of the compact on a side surface thereof and a binder. It is preferable to form a molded body by interposing a thin plate-shaped molded body made of the kneaded material and joining them together.
【0006】請求項1乃至4に記載のチップ状電子部品
素地の製造方法によれば、磁性、誘電性又は絶縁性或い
は低誘電性の原料粉末と結合材を混練した混練材を送出
する押出し成形機により直線状又はコイル状の導線又は
抵抗線を内蔵する混練材から成る断面方形の複数の棒状
成形体を形成し、該複数の棒状成形体をその側面におい
て互いに接合し、次いで焼成し、焼成した成形体をその
長さ方向に沿って切断して複数の電子部品素地を製造す
るので、複数の電子部品素地を低廉なコストで量産する
ことができる。前記複数の棒状成形体の接合時に、加
熱、加熱・加圧又は加圧・振動の内少なくともその一つ
を行うときは、前記成形体同士の接合力が増大する。結
合材として熱軟化性のものを用い、前記複数の棒状成形
体の接合時に、加熱、加熱・加圧又は加圧・振動の内少
なくともその一つを行うときは、接合材や結合材の溶媒
を用いなくても接合することができるので、工数が少な
くなると共に材料が節約することができる。前記複数の
棒状成形体を、その側面に該棒状成形体の磁性原料粉末
よりも透磁率の低い磁性原料粉末または非磁性原料粉末
と結合材を混練した混練材から成る薄板状成形体を介在
させて相互に接合し、次いで、焼成し、焼成した成形体
をその長さ方向に沿って切断して製造された複数の電子
部品素地は、インダクタ・アレイとして用いた場合、イ
ンダクタが相互に干渉しなくなるので、小型に形成する
ことができる。According to the method for manufacturing a chip-shaped electronic component substrate according to any one of claims 1 to 4 , extrusion molding for feeding a kneaded material obtained by kneading a magnetic, dielectric or insulating or low-dielectric raw material powder and a binder. Forming a plurality of rod-shaped moldings having a rectangular cross section made of a kneading material containing a linear or coil-shaped conductive wire or resistance wire by a machine, joining the plurality of rod-shaped moldings to each other on their side surfaces, and then firing and firing. Since the plurality of electronic component bases are manufactured by cutting the formed body along the length direction, the plurality of electronic component bases can be mass-produced at low cost. When at least one of heating, heating / pressurizing, or pressurizing / vibration is performed at the time of joining the plurality of rod-shaped compacts, the joining force between the compacts increases. When a heat-softening binder is used as the bonding material, and at least one of heating, heating / pressing, and pressing / vibration is performed at the time of joining the plurality of rod-shaped molded bodies, a solvent for the joining material or the binding material is used. Since it is possible to perform the joining without using the material, the number of steps can be reduced and the material can be saved. The plurality of rod-shaped compacts are provided with a thin plate-shaped compact made of a kneaded material obtained by kneading a magnetic raw material powder or a non-magnetic raw material powder having a lower magnetic permeability than the magnetic raw material powder of the rod-shaped molded body and a binder on the side surfaces thereof. When a plurality of electronic component substrates manufactured by cutting the fired molded body along the length direction and then firing the formed body are used as an inductor array, the inductors interfere with each other. Since it is no longer necessary, it can be formed in a small size.
【0007】[0007]
【発明の実施の形態】以下に本発明の実施の形態を図面
を参照して説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0008】図1は、チップ状インダクタの1例を示
す。FIG. 1 shows an example of a chip inductor.
【0009】同図において、1は、直方体形状のフェラ
イトから成る磁性コアで、これには例えば、4本の直線
状導線21、22、23、24が所定間隔で並列に配置され
て埋設され、該導線21及び22の端末が磁性コア1の後
面に形成された接続電極31により、導線22及び23の
端末が磁性コア1の前面に形成された接続電極32によ
り、導線23及び24の端末が磁性コア1の後面に形成さ
れた接続電極33によりそれぞれ接続されてこれらの導
線21〜24が直列に接続され、両端の直線状導線21、
24の端末が磁性コア1の左右両端面に形成された外部
電極41及び42に接続されている。このインダクタの構
成によれば、直線状導線21、22、23、24がすべて磁
性コア1に埋設され、長い導線によって生じる磁束が磁
性コア1内に流れ、外部に漏洩することがないので、イ
ンピーダンスが大きく、小型のインダクタが得られる。[0009] In the figure, 1 is a magnetic core made of ferrite having a rectangular parallelepiped shape, including, for example, four linear conductors 2 1, 2 2, 2 3, 2 4 are arranged in parallel at predetermined intervals embedded Te, conductor lines 2 1 and 2 2 of the terminal by the connection electrodes 3 1 formed on the rear surface of the magnetic core 1, conductor 2 2 and 2 3 of the connection electrodes 3 the terminal is formed on the front surface of the magnetic core 1 the 2, terminal conductors 2 3 and 2 4 are these conductors 21 to 24 are connected respectively by the connection electrodes 3 3 formed on the rear surface of the magnetic core 1 are connected in series, linear conductors 2 at both ends 1 ,
2 4 terminals is connected to the external electrodes 4 1 and 4 2 formed on the left and right end surfaces of the magnetic core 1. According to this inductor configuration, the linear conductors 2 1 , 2 2 , 2 3 , and 2 4 are all embedded in the magnetic core 1, and the magnetic flux generated by the long conductor flows into the magnetic core 1 and leaks to the outside. Therefore, a small inductor having a large impedance can be obtained.
【0010】次に、このインダクタに適用された本発明
実施の電子部品素地の製造方法を説明する。Next, a method of manufacturing an electronic component substrate according to the present invention applied to the inductor will be described.
【0011】図2に示すように、長尺の直線状導線5を
押出し成形機6の透孔7に挿通し、磁性体原料粉末Bと
水又はアルコール及びグリセリン・メチルセルロースか
ら成る結合材Sを混練機8で均等に混練した混練材9を
押出し成形機6に加圧送入すると、その断面方形の金型
口金から、導線5を包囲する混練材9から成る断面方形
の外被体が形成されて成形体10が送出される。この成
形体10は乾燥した後、焼成炉の大きさ又は、下に敷く
セッタの形状に合わせて成形体10の長さ方向に沿って
切断し棒状成形体11を得る。図3(A)に示すよう
に、この棒状成形体11を複数個例えば4個作成して、
この4個の棒状成形体11の接合面12にそれぞれ、水
又はアルコールとグリセリン・メチルセルロースから成
る接合材を霧状にして塗布又は筆(刷毛)等により塗
布、孔版印刷法により塗布、浸漬法により塗布或いはス
ポンジなどを押し当て転写法により塗布し、図3(B)
に示すように、4個の棒状成形体11を側面の接合面1
2において互いに接触させ加圧して接合する。その後に
600〜1000℃、例えば900℃で焼成し、図3
(C)に示すように、個々のインダクタの寸法に合わせ
てカッタで切断する。切断された個々のインダクタ素地
13は、バレル粉と水とでバレル研磨して、角部にアー
ルを付ける。次いで、図1に示すように、銀ペーストを
インダクタ素地13の磁性コア1の前後両面及び左右両
端面に銀粉末と溶剤とから成る銀ペーストを塗布し焼き
付けて接続電極31、32、33及び外部電極41、42を
形成する。かくして、インダクタンス素地13の4個の
直線状導線21、22、23、24は直列に接続されて外部
電極41、42に接続される。外部電極41、42の銀層上
には、ニッケル・メッキと半田メッキとが施される。As shown in FIG. 2, a long linear conducting wire 5 is inserted into a through hole 7 of an extruder 6, and a magnetic material powder B and a binder S composed of water or alcohol and glycerin / methyl cellulose are kneaded. When the kneaded material 9 uniformly kneaded by the machine 8 is fed into the extruder 6 under pressure, a rectangular cross-section jacket made of the kneaded material 9 surrounding the conducting wire 5 is formed from the die die having a square cross-section. The molded body 10 is sent out. After the molded body 10 is dried, it is cut along the length direction of the molded body 10 according to the size of the firing furnace or the shape of the setter to be laid below, to obtain a rod-shaped molded body 11. As shown in FIG. 3A, a plurality of, for example, four bar-shaped molded bodies 11 are formed,
A bonding material composed of water or alcohol and glycerin / methylcellulose is applied to the bonding surfaces 12 of the four rod-shaped molded bodies 11 in the form of a mist, applied by a brush or a brush, applied by a stencil printing method, and immersed by a dipping method. FIG. 3 (B)
As shown in the figure, the four rod-shaped molded bodies 11 are
In step 2, they are brought into contact with each other and joined by pressing. After that, baking is performed at 600 to 1000 ° C., for example, 900 ° C., and FIG.
As shown in FIG. 3C, cut with a cutter according to the size of each inductor. Each of the cut individual inductor bodies 13 is barrel-polished with barrel powder and water, and the corners are rounded. Then, as shown in FIG. 1, a silver paste composed of a silver powder and a solvent is applied to the front and rear surfaces and both left and right surfaces of the magnetic core 1 of the inductor base 13 and baked to form connection electrodes 3 1 , 3 2 , 3. 3 and external electrodes 4 1 and 4 2 are formed. Thus, the linear conductors 2 1 4 of the inductance matrix 13, 2 2, 2 3, 2 4 are connected are connected in series to the external electrodes 4 1, 4 2. Nickel plating and solder plating are applied on the silver layers of the external electrodes 4 1 and 4 2 .
【0012】図4は、インダクタ・アレイの1例を示
す。FIG. 4 shows an example of an inductor array.
【0013】これは、図3(C)に示されるインダクタ
素地13の磁性コア1の前面及び後面に、露出した各直
線状導線21、22、23、24の端末に接続される外部電
極41、42、43、44が形成されている。[0013] This is connected to the inductor to the front and rear surfaces of the magnetic core 1 of the matrix 13, each exposed linear conductors 2 1, 2 2, 2 3, 2 4 of the terminal shown in FIG. 3 (C) External electrodes 4 1 , 4 2 , 4 3 , 4 4 are formed.
【0014】このインダクタ・アレイの構成によれば、
前記直線状導線21、22、23、24がすべて磁性コア1
に埋設され、該導線21、22、23、24によって生じる
磁束が磁性コア1内に流れ、外部に漏洩することがない
ので、各導線21〜24のインピーダンスが大きく、小型
のインダクタ・アレイが得られる。According to the structure of the inductor array,
The linear conductors 2 1 , 2 2 , 2 3 , 2 4 are all magnetic cores 1
The embedded, conductor lines 2 1, 2 2, 2 3, magnetic flux generated by the two 4 to flow into the magnetic core 1, since there is no leak to the outside, each conductor 21 to 24 of the impedance is large, a small Is obtained.
【0015】前記棒状成形体11は、図2に示される押
出し成形機6で作成したが、複数の金型口金と長尺の導
線を挿通する複数の透孔を有する押出し成形機を用いて
複数個の棒状成形体11を同時に作成することもでき
る。The rod-shaped molded body 11 was produced by the extrusion molding machine 6 shown in FIG. 2, but was formed by using an extrusion molding machine having a plurality of die and a plurality of through holes through which a long conductive wire is inserted. The rod-shaped molded bodies 11 can be simultaneously formed.
【0016】図5は、図4に示すインダクタ・アレイの
他の例を示す。FIG. 5 shows another example of the inductor array shown in FIG.
【0017】このインダクタ・アレイの磁性コア1は、
各インダクタの磁性コア部分の間に該磁性コア部分の例
えば主成分が酸化鉄から成るNiーZn系の磁性材の透
磁率(μ:800)より低い例えば同主成分から成る透
磁率(μ:20)の磁性コア層又は例えばアルミナ(A
l2O3)から成る絶縁層1aが介在されたものであり、
この構成によれば、各直線状導線21、22、23、24に
流れる電流による磁束は、それぞれ磁性コア層1aで遮
られるためインダクタ同志が相互干渉を起こさないの
で、各インダクタを近接して配置することができ、一層
小型に形成することができる。The magnetic core 1 of this inductor array is
Between the magnetic core portions of the inductors, for example, a magnetic permeability (μ: lower than that of the main component) lower than a magnetic permeability (μ: 800) of a Ni—Zn-based magnetic material whose main component is iron oxide, for example. 20) magnetic core layer or, for example, alumina (A
l 2 O 3 ) with an insulating layer 1a interposed therebetween,
According to this configuration, since the magnetic flux due to the respective linear conductors 2 1, 2 2, 2 3, 2 4 to flow current, inductor comrades does not cause interference for each intercepted a magnetic core layer 1a, each inductor They can be arranged close to each other and can be made smaller.
【0018】このインダクタ・アレイは、、前述した4
個の棒状成形体11の接合面間に前記磁性コア層又は絶
縁層1aを形成する薄板状成形体を介在させて、前記製
造方法と同じように4個の棒状成形体11を接合面に接
合材を塗布し加圧して接合し、その後に焼成し、次い
で、個々のインダクタの寸法に合わせてカッタで切断す
ることによりインダクタ・アレイ素地が得られ、これに
外部電極41〜44を前述のように形成することによりイ
ンダクタ・アレイが得られる。This inductor array is compatible with the aforementioned 4
The four bar-shaped molded bodies 11 are joined to the joint surface in the same manner as in the above-described manufacturing method, with the thin-plate-shaped molded body forming the magnetic core layer or the insulating layer 1a interposed between the joining surfaces of the rod-shaped molded bodies 11. Material was bonded coated pressurized, and subsequently fired, then the aforementioned individual to the dimensions of the inductor inductor array matrix is obtained by cutting with the cutter, which in the external electrode 4 1-4 4 Thus, an inductor array can be obtained.
【0019】図6は、チップ状インダクタ・アレイの他
の例を示す。FIG. 6 shows another example of a chip-shaped inductor array.
【0020】同図において、1は、直方体形状のフェラ
イトから成る磁性コアで、これには例えば、4本のコイ
ル状導線2a1、2a2、2a3、2a4が所定間隔で並列
に配置されて埋設され、該コイル状導線2a1、2a2、
2a3、2a4の各両端末が磁性コア1の前面及び後面に
形成された外部電極41、42、43、44に接続されてい
る。外部電極41、42、43、44は、配線基板に搭載し
たときその導電パッドに接続することが容易であるよう
に、それぞれ上下面にまで延設することが望ましい。こ
のインダクタ・アレイの構成によれば、コイル状導線2
1、22、23、24がすべて磁性コア1に埋設され、コイ
ル状導線21、22、23、24によって生じる磁束が磁性
コア1内に流れ、外部に漏洩することがないので、図5
に図示のものよりインピーダンスが大きく、小型なイン
ダクタ・アレイが得られる。In FIG. 1, reference numeral 1 denotes a magnetic core made of a rectangular parallelepiped ferrite, in which, for example, four coiled conductors 2a 1 , 2a 2 , 2a 3 , 2a 4 are arranged in parallel at predetermined intervals. And the coiled conductive wires 2a 1 , 2a 2 ,
Both terminals 2a 3 and 2a 4 are connected to external electrodes 4 1 , 4 2 , 4 3 , 4 4 formed on the front and rear surfaces of the magnetic core 1, respectively. The external electrodes 4 1 , 4 2 , 4 3 , 4 4 are desirably extended to the upper and lower surfaces, respectively, so that the external electrodes 4 1 , 4 2 , 4 3 , 4 4 can be easily connected to the conductive pads when mounted on the wiring board. According to the configuration of the inductor array, the coiled conductor 2
1 , 2 2 , 2 3 , and 2 4 are all buried in the magnetic core 1, and the magnetic flux generated by the coiled conductors 2 1 , 2 2 , 2 3 , and 2 4 flows into the magnetic core 1 and leaks to the outside. Because there is no
As shown in FIG. 2, a small inductor array having a higher impedance than that shown in FIG.
【0021】次に、このチップ状インダクタ・アレイに
適用された本発明実施の電子部品素地の製造方法を図7
により説明する。Next, a method of manufacturing an electronic component substrate according to the present invention applied to this chip-shaped inductor array will be described with reference to FIG.
This will be described below.
【0022】図7に示すように、磁性体原料粉末Bと結
合材Sを混練機8で均等に混練した混練材9を一次押出
し成形機6aに加圧送入すると、その金型口金から混練
材から成る棒状の巻芯14が送出され、乾燥後この巻芯
14に導線15を巻線機16によりコイル状に巻回す
る。この導線15を巻回した巻芯14を、混練材が加圧
送入される二次押出し成形機6bに挿入し送出させる
と、導線15を巻回した巻芯14を包囲して混練材から
成る断面方形の外被体が被覆され、成形体17が形成さ
れる。この成形体17は、乾燥した後、焼成炉の大きさ
又は、下に敷くセッタの形状に合わせて成形体17の長
さ方向に沿って切断し複数の棒状成形体18を得る。以
後は、図3に示す前記製造方法と同様の工程を経て図6
に示すインダクタ・アレイが製造される。この製造方法
によれば、巻芯14の磁性体の焼成時の収縮率が外被体
の磁性体の収縮率より大きいか等しい場合、焼成時に外
被体の磁性体の収縮による応力が巻芯の磁性体に加わら
ないので、インピーダンス特性が劣化しない。このイン
ダクタ・アレイについても、図5に示すインダクタ・ア
レイと同様に各インダクタの磁性コア部分の間に該磁性
コア部分の透磁率よりも低い磁性コア層又は絶縁層を介
在させることができる。As shown in FIG. 7, when a kneading material 9 obtained by uniformly kneading the magnetic raw material powder B and the binder S with a kneading machine 8 is fed under pressure to a primary extruder 6a, the kneading material is passed through the die. Is wound out, and after drying, a conductor 15 is wound around this core 14 in a coil shape by a winding machine 16. When the core 14 around which the conductive wire 15 is wound is inserted into the secondary extruder 6b to which the kneaded material is fed under pressure and sent out, the core 14 around which the conductive wire 15 is wound is surrounded by the kneaded material. The envelope having a rectangular cross section is covered, and the molded body 17 is formed. After being dried, the molded body 17 is cut along the length direction of the molded body 17 according to the size of the firing furnace or the shape of the setter to be laid below, to obtain a plurality of rod-shaped molded bodies 18. Thereafter, through the same steps as in the manufacturing method shown in FIG.
Is manufactured. According to this manufacturing method, when the contraction rate of the magnetic body of the core 14 during firing is greater than or equal to the contraction rate of the magnetic body of the jacket, the stress due to the contraction of the magnetic body of the jacket during firing is reduced. The impedance characteristics are not degraded because it does not add to the magnetic material. Also in this inductor array, a magnetic core layer or an insulating layer lower than the magnetic permeability of the magnetic core portion can be interposed between the magnetic core portions of the inductors as in the inductor array shown in FIG.
【0023】図7に示す成形体18を用いて図3に示す
前記実施例と同様の工程を経て図6に示すインダクタ素
地を形成し、これに図1に示すように接続電極及び外部
電極を形成することにより、チップ状インダクタを製造
することができる。The inductor body shown in FIG. 6 is formed using the molded body 18 shown in FIG. 7 through the same steps as in the embodiment shown in FIG. 3, and connection electrodes and external electrodes are formed thereon as shown in FIG. By forming, a chip-shaped inductor can be manufactured.
【0024】前記導線及び混練材に代えてCrーNi;
CuーNi;CuーMnなどから成る抵抗線及び例えば
アルミナ等の低誘電率の誘電性原料粉末や絶縁性原料粉
末と結合材を混練した混練材を用い、図2又は図7と図
3に示す前記製造方法と同様の工程を経ることにより図
1に示される構造の抵抗又はコイル状抵抗線を内蔵する
抵抗並びに図4及び図6に示される構造の抵抗アレイを
製造することができる。 図8は、コンデンサ・アレイ
を示す。Cr—Ni instead of the above-mentioned conductive wire and kneading material;
FIG. 2 or FIG. 7 and FIG. 3 show a resistance wire made of Cu—Ni; Cu—Mn or the like and a kneading material obtained by kneading a binder with a dielectric raw material powder or an insulating raw material powder having a low dielectric constant such as alumina. Through the same steps as the above-described manufacturing method, it is possible to manufacture the resistor having the structure shown in FIG. 1 or the resistor having the coiled resistance wire built therein and the resistor array having the structure shown in FIGS. FIG. 8 shows a capacitor array.
【0025】同図において、コンデンサ素地19は、直
方体形状の誘電性コア20の内部に複数の直線状導線2
1〜24が内蔵されたもので、コンデンサ・アレイは、誘
電性コア20の外面に該導線21〜24にそれぞれ対向し
て該導線21〜24間でそれぞれ静電容量を形成するグラ
ンド電極21及び各導線21〜24の両端に接続する外部
電極41〜44が被着されて形成されて構成される。In FIG. 1, a capacitor base 19 includes a plurality of linear conductors 2 inside a rectangular parallelepiped dielectric core 20.
21 to 24 in which is incorporated, the capacitor array, forms a capacitance respectively between conductor lines 2 1 to 2 4, respectively oppose the conductor lines 2 1 to 2 4 to the outer surface of the dielectric core 20 constituted the external electrode 41 to 4 connected to both ends of the ground electrodes 21 and each conductor 2 1 to 2 4 is formed by deposition.
【0026】コンデンサ素地19は、導線並びに例え
ば、チタン酸バリウム等の高誘電率の誘電性原料粉末及
び結合材を混練した混練材を用いて図2及び図3に示す
前記実施例と同様な工程を経ることにより製造される。
コイル状導線を内蔵するコンデンサ素地の場合には、図
7及び図3に示す前記実施例と同様な工程を経ることに
より製造される。The capacitor body 19 is formed by using a conductive wire and a kneading material obtained by kneading a dielectric material powder having a high dielectric constant such as barium titanate and a binder, in the same process as in the above-described embodiment shown in FIGS. It is manufactured by going through.
In the case of a capacitor body incorporating a coil-shaped conductive wire, it is manufactured through the same steps as in the above-described embodiment shown in FIGS.
【0027】図9は、LCフィルタを示す。FIG. 9 shows an LC filter.
【0028】同図において、電子部品素地であるLCフ
ィルタ素地22は、一体に結合されたインダクタ素地2
3とコンデンサ素地24とから成る。このLCフィルタ
素地22は、導線と、磁性原料粉末と結合材を混練した
混練材を用いて図2(又は図7)に示すような工程で直
線状(又はコイル状)導線2を内蔵するインダクタ素地
23用の棒状成形体を作成し、導線と、誘電性原料粉末
と結合材を混練した混練材を用いて図2(又は図7)に
示すような工程で直線状(又はコイル状)導線2を内蔵
するコンデンサ素地24用の棒状成形体を作成し、該2
個の棒状成形体をその側面の接合面に接合材を前記製造
方法と同じように塗布し加圧して接合し、次いで焼成
し、焼成した成形体をその長さ方向に沿って切断するこ
とにより製造される。LCフィルタは、このLCフィル
タ素地22の1側面にインダクタ素地23の導線2及び
コンデンサ素地24の導線2に共通に接続する外部電極
4aを形成し、インダクタ素地23側の他側面に外部電
極4bを形成し、又、中間部の周面にグランド電極4c
をそれぞれ形成して製造される。図9において、外部電
極4bを入力側とすると、低域通過フィルタ回路が形成
される。In FIG. 1, an LC filter substrate 22 as an electronic component substrate is integrated with an inductor substrate 2 integrally connected thereto.
3 and a capacitor substrate 24. The LC filter base 22 is an inductor having a linear (or coil-shaped) conductor 2 built therein in a process as shown in FIG. 2 (or FIG. 7) using a conductor and a kneading material obtained by kneading a magnetic raw material powder and a binder. A rod-shaped molded body for the base body 23 is prepared, and a linear (or coil-shaped) conductive wire is formed in a process as shown in FIG. 2 (or FIG. 7) using a conductive wire and a kneading material obtained by kneading a dielectric raw material powder and a binder. A rod-shaped molded body for the capacitor body 24 incorporating the capacitor 2 is prepared.
By applying a bonding material to the joint surfaces on the side surfaces of the pieces in the same manner as in the above-described manufacturing method, joining the rod-shaped molded bodies by pressing, then firing, and cutting the fired molded bodies along the length direction. Manufactured. In the LC filter, an external electrode 4a is formed on one side of the LC filter base 22 and commonly connected to the conductor 2 of the inductor base 23 and the conductor 2 of the capacitor base 24, and the external electrode 4b is formed on the other side of the inductor base 23. And a ground electrode 4c on the peripheral surface of the intermediate portion.
Are manufactured. In FIG. 9, when the external electrode 4b is on the input side, a low-pass filter circuit is formed.
【0029】抵抗線と、絶縁性又は低誘電率の原料粉末
と結合材を混練した混練材を用いて図2又は図7に示す
ような工程で直線状又はコイル状導線を内蔵する抵抗素
地用の棒状成形体を作成し、これを前述のように作成さ
れた図9に示すコンデンサ素地用の棒状成形体と、その
接合面において接合材を前記製造方法のように塗布し加
圧して接合し、次いで焼成し、焼成した成形体をその長
さ方向に沿って切断することによりRC複合部品用の電
子部品素地が製造される。このRC複合部品用の電子部
品素地の1側面に、2つの直線状導線に共通に接続する
外部電極を形成してそれを絶縁物で被覆し、電子部品素
地の他側面及び中間部の周面に図9に示すようにそれぞ
れ外部電極を形成することにより、抵抗とコンデンサが
直列接続されたスナバ回路が形成される。この回路は、
スイッチ素子、整流素子或いはトランスなどに並列に挿
入接続される。Using a resistance wire, a kneading material obtained by kneading an insulating or low dielectric material powder and a binder, in a process as shown in FIG. 2 or FIG. A rod-shaped molded body was prepared, and this was bonded to the rod-shaped molded body for a capacitor body shown in FIG. 9 prepared as described above, and a joining material was applied and pressurized on the joint surface as in the above-described manufacturing method. Then, firing is performed, and the fired molded body is cut along its length direction to manufacture an electronic component base for an RC composite component. An external electrode commonly connected to the two linear conductors is formed on one side surface of the electronic component base for the RC composite component, covered with an insulator, and the other side surface of the electronic component base and the peripheral surface of the intermediate portion. By forming external electrodes as shown in FIG. 9, a snubber circuit in which a resistor and a capacitor are connected in series is formed. This circuit is
It is inserted and connected in parallel with a switch element, a rectifier element or a transformer.
【0030】図10は、他のフィルタを示す。FIG. 10 shows another filter.
【0031】同図において、フィルタ素地22aは、一
体に結合された2つのコンデンサ素地24、24から成
る。このフィルタ素地22aは、導線と、誘電性原料粉
末と結合材を混練した混練材を用いて図7に示すような
工程でコイル状導線2aを内蔵するコンデンサ素地24
用の棒状成形体を2個作成し、該2個の棒状成形体をそ
の側面の接合面に接合材を前記製造方法のように塗布し
加圧して接合し、次いで焼成し、焼成した成形体をその
長さ方向に沿って切断することにより製造される。フィ
ルタは、このフィルタ素地22aの1側面にコンデンサ
素地24,24のコイル状導線2a、2aにそれぞれ接
続する外部電極4a,4aを形成し、フィルタ素地22
aのほぼ全周面にグランド電極4cを形成し、又、フィ
ルタ素地22aの他側面にコイル状導線2a、2aを相
互に接続する接続電極(図示せず)を形成することによ
り製造される。尚、図示の例ではコンデンサ素地24の
2個でフィルタ素地を形成したが、2個以上のコンデン
サ素地24でフィルタ素地を形成してもよいことは勿論
である。In the figure, the filter substrate 22a is composed of two capacitor substrates 24, 24 which are integrally connected. This filter base 22a is made of a capacitor base 24 containing a coil-shaped conductive wire 2a in a process as shown in FIG. 7 using a conductive wire and a kneading material obtained by kneading a dielectric raw material powder and a binder.
Two rod-shaped moldings are prepared, and the two rod-shaped moldings are applied to the joint surface on the side surface thereof by applying a bonding material in the same manner as in the above-mentioned production method, pressurized and joined, and then baked, and the baked molded body Is cut along its length. In the filter, external electrodes 4a, 4a connected to the coiled conductors 2a, 2a of the capacitor bodies 24, 24 are formed on one side surface of the filter body 22a.
It is manufactured by forming a ground electrode 4c on almost the entire peripheral surface of a, and forming a connection electrode (not shown) for connecting the coiled conductive wires 2a, 2a to each other on the other side surface of the filter substrate 22a. In the illustrated example, two filter bodies 24 are used to form a filter body. However, it is a matter of course that two or more capacitor bodies 24 may form a filter body.
【0032】上述した本発明実施の電子部品素地の製造
方法においては、混練材に含まれる結合材と複数の棒状
成形体を接合する接合材に同じ材料を用いたが、異なる
材料を用いてもよく、又、複数の棒状成形体を単に圧力
をかけて接合材により接着したが、圧力をかけると共に
更に例えば、40kHzの周波数の超音波振動を加えて
接合してもよく、この方法によると、棒状成形体と接合
材との一体化が促進され、接合力が増大される。In the above-described method for manufacturing an electronic component substrate according to the present invention, the same material is used as the bonding material included in the kneading material and the bonding material for bonding the plurality of rod-shaped molded bodies. In addition, although a plurality of rod-shaped molded bodies are simply applied with pressure and bonded by a bonding material, the pressure may be applied and further, for example, ultrasonic vibration having a frequency of 40 kHz may be applied and bonded together. The integration of the rod-shaped molded body and the joining material is promoted, and the joining force is increased.
【0033】又、前記混練材に含まれる結合材として例
えばポリビニルブチラール等の熱軟化性のものを用い、
接合面に接合材を塗布しないで複数の棒状成形体を例え
ば100℃で加熱しながら例えば100kg/cm2の
圧力をかけて互いに接触させ、該接合面に軟化した前記
結合材を染み出させて該結合材で複数の棒状成形体を接
合させてもよい。この場合、複数の棒状成形体を接触さ
せ、加圧しないで例えば、100℃に加熱して接合して
もよく、或いは接合面に所定の圧力を掛けると共に超音
波振動を加えて接合してもよい。又、熱軟化性の結合材
を用いた場合でも、接合面に熱軟化性の接合材を塗布
し、同様の工程を経て複数の棒状成形体を接合してもよ
いことは勿論である。Further, as the binder contained in the kneading material, a heat-softening material such as polyvinyl butyral is used.
A plurality of rod-shaped molded bodies are brought into contact with each other by applying a pressure of, for example, 100 kg / cm 2 while being heated at, for example, 100 ° C. without applying a bonding material to the bonding surface, and exposing the softened bonding material to the bonding surface. A plurality of rod-shaped moldings may be joined with the binder. In this case, a plurality of rod-shaped molded bodies may be brought into contact with each other without heating, for example, by heating to 100 ° C. to join them together, or by applying a predetermined pressure to the joining surface and applying ultrasonic vibration to join them together. Good. Further, even when a heat-softening bonding material is used, it is a matter of course that a plurality of rod-shaped moldings may be bonded through a similar process by applying a heat-softening bonding material to a bonding surface.
【0034】[0034]
【発明の効果】本発明は、上述の構成によるときは、焼
成された磁性、誘電性又は絶縁性或いは低誘電性の成形
体内に複数の直線状又はコイル状の導線又は抵抗線を内
蔵するチップ状電子部品が安価に量産することができる
という効果を有する。According to the present invention, there is provided a chip having a plurality of linear or coiled conductive wires or resistance wires in a fired magnetic, dielectric or insulating or low-dielectric molded body when the above configuration is employed. This has the effect that the electronic component can be mass-produced at low cost.
【図1】 直線状導線を用いたチップ状インダクタの斜
視図。FIG. 1 is a perspective view of a chip inductor using a linear conductor.
【図2】 図1に示すチップ状インダクタに適用された
本発明実施の電子部品素地の製造方法の一工程の説明
図。FIG. 2 is an explanatory view of one step of a method for manufacturing an electronic component substrate according to the present invention applied to the chip inductor shown in FIG. 1;
【図3】 (A)(B)(C)はそれぞれ図2に示す工
程に続いて行われる工程の説明図。FIGS. 3A, 3B, and 3C are explanatory views of steps performed after the step shown in FIG. 2;
【図4】 直線状導線を用いたチップ状インダクタ・ア
レイの斜視図。FIG. 4 is a perspective view of a chip-shaped inductor array using linear conductors.
【図5】 図4に示すチップ状インダクタ・アレイの改
良例の斜視図。FIG. 5 is a perspective view of an improved example of the chip-shaped inductor array shown in FIG.
【図6】 コイル状導線を用いたインダクタ・アレイの
斜視図。FIG. 6 is a perspective view of an inductor array using a coiled conductive wire.
【図7】 図6に示すインダクタ・アレイに適用された
本発明実施の電子部品素地の製造方法の一工程の説明
図。FIG. 7 is an explanatory view of one step of a method for manufacturing an electronic component substrate according to the present invention applied to the inductor array shown in FIG. 6;
【図8】 直線状導線を用いたコンデンサ・アレイの斜
視図。FIG. 8 is a perspective view of a capacitor array using linear conductors.
【図9】 直線状導線を用いたLCフィルタの斜視図。FIG. 9 is a perspective view of an LC filter using a straight conducting wire.
【図10】コイル状導線を用いたフィルタの他例の斜視
図。FIG. 10 is a perspective view of another example of a filter using a coiled conductive wire.
1 磁性コア 21〜24 直線状導線 2a1〜2a4 コイル状導線 41〜42
外部電極 6、6a、6b 押出し成形機 9
混練材 11 棒状成形体 12 接合面 13 インダクタ素地 18 棒状成形
体 19 コンデンサ素地 22 LCフィ
ルタ素地 22a フィルタ素地1 magnetic cores 21 to 24 linear conductors 2a 1 to 2A region 4 coiled conductor 4 1-4 2
External electrode 6, 6a, 6b Extruder 9
Kneading material 11 Rod shaped body 12 Joining surface 13 Inductor base 18 Rod shaped body 19 Capacitor base 22 LC filter base 22a Filter base
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01F 17/00 - 17/08 H01F 41/00 - 41/10 H01G 13/00 - 13/06 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) H01F 17/00-17/08 H01F 41/00-41/10 H01G 13/00-13/06
Claims (9)
を混練した混練材を送出する押出し成形機により直線状
又はコイル状抵抗線を内蔵する混練材から成る断面方形
の複数の棒状成形体を形成し、該複数の棒状成形体をそ
の側面において互いに接合し、次いで焼成し、焼成した
成形体をその長さ方向に沿って切断して複数の電子部品
素地を製造することを特徴とするチップ状電子部品素地
の製造方法。1. An extruder for feeding a kneaded material obtained by kneading an insulating or low-dielectric raw material powder and a binder, and forming a plurality of rod-shaped rods having a square cross section made of a kneaded material incorporating a linear or coiled resistance wire. Forming a body, bonding the plurality of rod-shaped molded bodies to each other on the side surfaces thereof, and then firing, and cutting the fired molded body along its length to produce a plurality of electronic component base bodies. Of producing chip-shaped electronic component substrates.
材を送出する押出し成形機により直線状又はコイル状導
線を内蔵する混練材から成る断面方形の複数の棒状成形
体を形成し、該複数の棒状成形体をその側面において互
いに接合し、次いで焼成し、焼成した成形体をその長さ
方向に沿って切断して複数の電子部品素地を製造するこ
とを特徴とするチップ状電子部品素地の製造方法。2. A kneading method in which a dielectric raw material powder and a binder are kneaded.
Straight or coiled by an extruder
Plural rod-shaped forming of kneading material with built-in wire
And forming a plurality of rod-shaped compacts on the sides thereof.
And then fired.
Cutting a plurality of electronic component bases
A method for producing a chip-shaped electronic component substrate , characterized in that :
を送出する押出し成形機により直線状又はコイル状の導
線を内蔵する混練材から成る断面方形の複数の棒状成形
体を形成すると共に誘電性原料粉末と結合材を混練した
混練材を送出する押出し成形機により直線状又はコイル
状の導線を内蔵する混練材から成る断面方形の複数の棒
状成形体を形成し、これら2種類の棒状成形体を組み合
わせてその側面において互いに接合し、次いで焼成し、
焼成した成形体をその長さ方向に沿って切断して複数の
電子部品素地を製造することを特徴とするチップ状電子
部品素地の製造方法。3. A kneaded material obtained by kneading a magnetic raw material powder and a binder.
Linear or coiled by an extruder
Plural rod-shaped forming of kneading material with built-in wire
And kneading dielectric raw material powder and binder
Linear or coiled by an extruder that delivers the kneading material
Rods with a rectangular cross section made of kneading material with built-in conductors
To form a bar-shaped compact and combine these two types of rod-shaped compacts.
And joined to each other on their sides, then fired,
The fired compact is cut along its length
A method for producing a chip-shaped electronic component substrate, comprising producing an electronic component substrate.
を混練した混練材を送出する押出し成形機により直線状
又はコイル状の抵抗線を内蔵する混練材から成る断面方
形の複数の棒状成形体を形成すると共に誘電性原料粉末
と結合材を混練した混練材を送出する押出し成形機によ
り直線状又はコイル状導線を内蔵する混練材から成る断
面方形の複数の棒状成形体を形成し、これら2種類の棒
状成形体を組み合わせてその側面において互いに接合
し、次いで焼成し、焼成した成形体をその長さ方向に沿
って切断して複数の電子部品素地を製造することを特徴
とするチップ状電子部品素地の製造方法。4. An insulating or low dielectric material powder and a binder
Extruder that feeds the kneaded material
Or the cross-section of a kneading material incorporating a coiled resistance wire
Raw material powder having a plurality of rod-shaped compacts
An extruder that delivers a kneaded material obtained by kneading the binder and the binder
Of kneading material containing linear or coiled conductors
Forming a plurality of bar-shaped compacts in the shape of a square, these two types of bars
Combine shaped bodies and join them together on their sides
And then fired, and the fired compact is stretched along its length.
To manufacture multiple electronic component bases
A method for producing a chip-shaped electronic component substrate.
棒状成形体の磁性原料粉末よりも透磁率の低い磁性原料
粉末または非磁性原料粉末と結合材を混練した混練材か
ら成る薄板状成形体を介在させて相互に接合したことを
特徴とする請求項3に記載のチップ状電子部品素地の製
造方法。5. A thin plate made of a kneaded material obtained by kneading a magnetic material powder or a non-magnetic material powder having a lower magnetic permeability than the magnetic material powder of the rod-shaped molded material and a binder on the side surfaces of the plurality of rod-shaped molded products. 4. The method for producing a chip-shaped electronic component body according to claim 3 , wherein the molded bodies are bonded to each other with a molded body interposed therebetween.
塗布することを特徴とする請求項1乃至5のいずれかに
記載のチップ状電子部品素地の製造方法。6. The method for manufacturing a chip-shaped electronic component base according to claim 1 , wherein a bonding material is applied to side surfaces of the plurality of rod-shaped formed bodies.
材の溶媒を塗布することを特徴とする請求項1乃至5の
いずれかに記載のチップ状電子部品素地の製造方法。7. The method for manufacturing a chip-shaped electronic component base according to claim 1 , wherein a solvent of the binder is applied to side surfaces of the plurality of rod-shaped formed bodies.
熱、加熱・加圧又は加圧・振動の内の少なくとも一つを
行うことを特徴とする請求項1乃至7のいずれかに記載
のチップ状電子部品素地の製造方法。8. at the time of bonding of the plurality of rod-shaped bodies, heating, heating and pressing or according to any one of claims 1 to 7, characterized in that at least one of a pressure and vibration A method for producing a chip-shaped electronic component substrate.
いることを特徴とする請求項8に記載のチップ状電子部
品素地の製造方法。9. The chip-like method of manufacturing an electronic component matrix of claim 8 which comprises using the thermal softening of the bonding material as the bonding material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5627896A JP3236949B2 (en) | 1996-03-13 | 1996-03-13 | Manufacturing method of chip-shaped electronic component substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5627896A JP3236949B2 (en) | 1996-03-13 | 1996-03-13 | Manufacturing method of chip-shaped electronic component substrate |
Publications (2)
Publication Number | Publication Date |
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JPH09246080A JPH09246080A (en) | 1997-09-19 |
JP3236949B2 true JP3236949B2 (en) | 2001-12-10 |
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ID=13022629
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JP5627896A Expired - Fee Related JP3236949B2 (en) | 1996-03-13 | 1996-03-13 | Manufacturing method of chip-shaped electronic component substrate |
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Families Citing this family (5)
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JP3752848B2 (en) * | 1998-05-12 | 2006-03-08 | 株式会社村田製作所 | Inductor |
JP2000106312A (en) * | 1998-09-29 | 2000-04-11 | Murata Mfg Co Ltd | Composite inductor element |
JP3894856B2 (en) * | 2002-07-19 | 2007-03-22 | 松下電器産業株式会社 | Speaker |
JP7160017B2 (en) * | 2019-11-06 | 2022-10-25 | 株式会社村田製作所 | inductor array components |
CN112635182B (en) * | 2020-11-23 | 2021-10-22 | 深圳市信维通信股份有限公司 | Inductor and preparation method thereof |
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1996
- 1996-03-13 JP JP5627896A patent/JP3236949B2/en not_active Expired - Fee Related
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JPH09246080A (en) | 1997-09-19 |
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